Patents Issued in November 6, 2018
  • Patent number: 10121754
    Abstract: A method of fabricating an interconnect structure includes providing a semiconductor structure and performing a first spin resist and bake cycle. The first spin resist and bake cycle includes applying a first predetermined amount of a resist material over one or more portions of the semiconductor structure and baking the semiconductor structure to form a first resist layer portion of a resist layer. The method also includes performing a next spin resist and bake cycle. The next spin resist and bake cycle includes applying a next predetermined amount of the resist material and baking the semiconductor structure to form a next resist layer portion of the resist layer. The method additionally includes depositing a conductive material in an opening formed in the resist layer and forming a conductive structure from the conductive material. An interconnect structure is also provided.
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: November 6, 2018
    Assignee: Massachusetts Institute of Technology
    Inventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
  • Patent number: 10121755
    Abstract: A seal ring structure is disclosed for integrated circuit (IC) packaging. The seal ring includes an inner moisture barrier ring and an outer crack stop ring. Line structures of both the inner and outer rings include chamfered corners. The chamfers of a chamfered corner are devoid of acute angles. No metal line structure for the inner ring is provided at the pad level. The seal ring as described improves the reliability and strength of the structure and hence the seal ring can sustain high stress at the corners of the die during dicing.
    Type: Grant
    Filed: September 24, 2017
    Date of Patent: November 6, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Mahesh Bhatkar, Juan Boon Tan, Wanbing Yi
  • Patent number: 10121756
    Abstract: In order to easily inspect a dispersion state of conductive particles in such an anisotropic conductive film that the conductive particles are dispersed even at high density, linear lines including no conductive particle in a plan view of an anisotropic conductive film including an insulating adhesive layer and conductive particles dispersed in the insulating adhesive layer are allowed to exist at predetermined intervals. Specifically, the conductive particles are disposed in a lattice so as to be arranged in a first arrangement direction and a second arrangement direction, and the disappearance lines are inclined relative to the first arrangement direction or the second arrangement direction.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: November 6, 2018
    Assignee: DEXERIALS CORPORATION
    Inventors: Seiichiro Shinohara, Yasushi Akutsu
  • Patent number: 10121757
    Abstract: A pillar structure is disposed on a substrate. The pillar structure includes a pad, a metal wire bump, a metal wire, and a metal plating layer. The pad is disposed on the substrate. The metal wire bump is disposed on the pad. The metal wire is connected to the metal wire bump. The metal wire extends in a first extension direction, the substrate extends in a second extension direction, and the first extension direction is perpendicular to the second extension direction. The metal plating layer covers the pad and completely encapsulates the metal wire bump and the metal wire.
    Type: Grant
    Filed: November 27, 2015
    Date of Patent: November 6, 2018
    Assignee: Unimicron Technology Corp.
    Inventor: Cheng-Jui Chang
  • Patent number: 10121758
    Abstract: A bonding wire for a semiconductor device includes a Cu alloy core material and a Pd coating layer on a surface of the Cu alloy core material, and contains Ga and Ge of 0.011 to 1.2% by mass in total, which is able to increase bonding longevity of the ball bonded part in the high-temperature, high-humidity environment, and thus to improve the bonding reliability. The thickness of the Pd coating layer is preferably 0.015 to 0.150 ?m. When the bonding wire further contains one or more elements of Ni, Ir, and Pt in an amount, for each element, of 0.011 to 1.2% by mass, it is able to improve the reliability of the ball bonded part in a high-temperature environment at 175° C. or more. When an alloy skin layer containing Au and Pd is further formed on a surface of the Pd coating layer, wedge bondability improves.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: November 6, 2018
    Assignees: Nippon Micrometal Corporation, Nippon Steel & Sumikin Materials Co., Ltd.
    Inventors: Daizo Oda, Motoki Eto, Kazuyuki Saito, Teruo Haibara, Ryo Oishi, Takashi Yamada, Tomohiro Uno
  • Patent number: 10121759
    Abstract: A method of providing a z-axis force profile applied to a plurality of bonding locations during a wire bonding operation is provided. The method includes: (a) determining a z-axis force profile for each of a plurality of bonding locations on an unsupported portion of at least one reference semiconductor device; and (b) applying the z-axis force profile during subsequent bonding of a subject semiconductor device. Methods of: determining a maximum bond force applied to a bonding location during formation of a wire bond; and determining a z-axis constant velocity profile for formation of a wire bond, are also provided.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: November 6, 2018
    Assignee: Kulicke and Soffa Industries, Inc.
    Inventors: Aashish Shah, Robert William Ellenberg, Stephen Babinetz, Ziauddin Ahmad, Wei Qin
  • Patent number: 10121760
    Abstract: A wafer bonding system and method using a combination of heat and a pneumatic force to bond two wafers held together in alignment. The wafers are heated via a non-contact, gaseous interface, thermal path between heating elements and the wafers. The pneumatic force is created by a pressure differential between a first pressure surrounding the two wafers and a second pressure, which is less than the first pressure, maintained between the two wafers.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: November 6, 2018
    Assignee: Nikon Corporation
    Inventor: Alton H. Phillips
  • Patent number: 10121761
    Abstract: A method of producing a semiconductor device includes steps of: growing semiconductor layers to form a semiconductor stack on a semiconductor substrate; forming a first adhesive layer on the semiconductor stack; bonding a temporary support made of non-semiconductor material to the first adhesive layer; removing the semiconductor substrate from the semiconductor stack to expose a surface of the semiconductor stack; forming a second adhesive layer on the exposed surface of the semiconductor stack; bonding a support to the second adhesive layer; and removing the temporary support from the semiconductor stack. The support has a thermal conductivity greater than the thermal conductivities of the semiconductor layer in the semiconductor stack. In forming the first adhesive layer, this layer can cover the entire surface, or both the top and a side of the semiconductor stack. Before forming the first adhesive layer, a protective layer can be formed on the semiconductor stack.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: November 6, 2018
    Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventor: Masataka Watanabe
  • Patent number: 10121762
    Abstract: Wafer bonding methods and wafer bonding structures are provided. An exemplary wafer bonding method includes providing a first wafer; forming a first interlayer dielectric layer and a first bonding layer passing through the first interlayer dielectric layer on the surface of the first wafer; providing a second wafer; forming a second interlayer dielectric layer and a second bonding layer passing through the second interlayer dielectric layer on surface of the second wafer; forming a self-assembling layer on at least one of a surface of the first interlayer dielectric layer and a surface of the second interlayer dielectric layer; and bonding the first wafer with the second wafer, the first bonding layer and the second bonding layer being fixed with each other, and the first interlayer dielectric layer and the second interlayer dielectric layer being fixed with each other by the self-assembling molecular layer.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: November 6, 2018
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventor: Fu Cheng Chen
  • Patent number: 10121763
    Abstract: Implementations of a clip for a semiconductor package may include: an electrically conductive clip having a first end and a second end and a middle section between the first end and the second end. The first end may be configured to couple to a first die through a bonding material. The second end may be configured to couple to a second die through a bonding material. The middle section may be configured to couple to an emitter structure through a bonding material. The clip may include an integrally formed electrically conductive material and include an M-shape. A middle of the M-shape may be coupled to the emitter structure.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: November 6, 2018
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Chee Hiong Chew, Atapol Prajuckamol, Yushuang Yao
  • Patent number: 10121764
    Abstract: The present invention provides a ball forming method for forming a ball portion at a tip of a bonding wire which includes a core material mainly composed of Cu, and a coating layer mainly composed of Pd and formed over a surface of the core material, wherein the ball portion is formed in non-oxidizing atmosphere gas including hydrocarbon which is gas at room temperature and atmospheric pressure, the method being capable of improving Pd coverage on a ball surface in forming a ball at a tip of the Pd-coated Cu bonding wire.
    Type: Grant
    Filed: April 14, 2016
    Date of Patent: November 6, 2018
    Assignees: Nippon Micrometal Corporation, Nippon Steel & Sumikin Materials Co., Ltd.
    Inventors: Noritoshi Araki, Takashi Yamada, Teruo Haibara, Ryo Oishi, Tomohiro Uno
  • Patent number: 10121765
    Abstract: A semiconductor substrate contains a plurality of semiconductor die with a saw street between the semiconductor die. A plurality of bumps is formed over a first surface of the semiconductor die. An insulating layer is formed over the first surface of the semiconductor die between the bumps. A portion of a second surface of the semiconductor die is removed and a conductive layer is formed over the remaining second surface. The semiconductor substrate is disposed on a dicing tape, the semiconductor substrate is singulated through the saw street while maintaining position of the semiconductor die, and the dicing tape is expanded to impart movement of the semiconductor die and increase a space between the semiconductor die. An encapsulant is deposited over the semiconductor die and into the space between the semiconductor die. A channel is formed through the encapsulant between the semiconductor die to separate the semiconductor die.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: November 6, 2018
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Gordon M. Grivna
  • Patent number: 10121766
    Abstract: Semiconductor device packages for incorporation into semiconductor device assemblies may include a substrate including an array of electrically conductive elements located on a lower surface of the substrate. A window may extend through the substrate from the lower surface to an upper surface of the substrate. The array of electrically conductive elements may at least partially laterally surround a periphery of the window, and the substrate may extend laterally beyond the array of electrically conductive elements. Semiconductor devices may be supported on the upper surface of the substrate around a periphery of the array of electrically conductive elements. The semiconductor devices may be electrically connected to at least some of the electrically conductive elements of the array by routing elements extending from the semiconductor devices toward the window.
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: November 6, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Matthew Monroe
  • Patent number: 10121767
    Abstract: A semiconductor storage device of the present embodiments includes a substrate, a first semiconductor chip and a sealer. The substrate has wirings. The first semiconductor chip is connected to the wirings on the substrate. The sealer has a first surface, which does not face a top surface of the first semiconductor chip and is provided with a mark, and seals the first semiconductor chip.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: November 6, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Misa Sugimura, Akihiro Iida
  • Patent number: 10121768
    Abstract: A face-to-face semiconductor assembly is characterized in that first and second semiconductor devices are face-to-face mounted on two opposite sides of a first routing circuitry and is further electrically connected to an interconnect board through the first routing circuitry. The interconnect board has a heat spreader to provide thermal dissipation for the second semiconductor device, and a second routing circuitry formed on the heat spreader and electrically coupled to the first routing circuitry. The first routing circuitry provides primary fan-out routing for the first and second semiconductor devices, whereas the second routing circuitry provides further fan-out wiring structure for the first routing circuitry.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: November 6, 2018
    Assignee: BRIDGE SEMICONDUCTOR CORPORATION
    Inventors: Charles W. C. Lin, Chia-Chung Wang
  • Patent number: 10121769
    Abstract: A fan-out semiconductor package includes: a first interconnection member having a through-hole; a first semiconductor chip disposed in the through-hole and having an active surface having connection pads disposed thereon and an inactive surface; a first encapsulant encapsulating at least portions of the first interconnection member and the first semiconductor chip; a second interconnection member disposed on the first interconnection member and the first semiconductor chip; a second semiconductor chip disposed on the first encapsulant and having an active surface having connection pads disposed thereon; and a second encapsulant encapsulating at least portions of the second semiconductor chip.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: November 6, 2018
    Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Dae Hyun Park, Eun Jung Jo, Sung Won Jeong, Han Kim, Mi Ja Han
  • Patent number: 10121770
    Abstract: A device according to embodiments of the invention includes a first semiconductor light emitting layer disposed between a first n-type region and a first p-type region. A second semiconductor light emitting layer disposed between a second n-type region and a second p-type region is disposed over the first semiconductor light emitting layer. A non-III-nitride material separates the first and second light emitting layers.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: November 6, 2018
    Assignee: Koninklijke Philips N.V.
    Inventors: Hans-Helmut Bechtel, Erik Nelson, April Dawn Schricker
  • Patent number: 10121771
    Abstract: A microchip structure and a method for manufacturing thereof are provided. The microchip structure comprises a target integrated circuit (TIC) comprising a first surface and a first power contact at a first location on the first surface of the TIC, the TIC further comprising a second power contact at a second location on the first surface of the TIC; a plurality of photovoltaic (PV) diodes deposited on a first surface of a transparent substrate, each of the PV diodes having an anode coupled to an anode contact and a cathode coupled to a cathode contact, the transparent substrate is transparent to an electromagnetic frequency to which the PV diodes are sensitive; the cathode contact of a first PV diode of the PV diodes is bonded to the first power contact and the anode contact of a second PV diode of the PV diodes is bonded to the second power contact.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: November 6, 2018
    Assignee: Sol Chip Ltd.
    Inventors: Shani Keysar, Doron Pardess, Rami Friedlander
  • Patent number: 10121772
    Abstract: A display apparatus includes a driving substrate, a plurality of light-emitting devices, and a plurality of metal common electrodes. The light-emitting devices are dispersedly disposed on the driving substrate, and each of the light-emitting devices includes an epitaxial structure and a first type electrode and a second type electrode disposed on the epitaxial structure. The metal common electrodes are dispersedly disposed on the driving substrate and in contact with a portion of the second type electrode of each of the light-emitting devices to form an ohmic contact.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: November 6, 2018
    Assignee: PlayNitride Inc.
    Inventors: Chih-Ling Wu, Yu-Hung Lai, Yi-Min Su
  • Patent number: 10121773
    Abstract: A semiconductor apparatus reduces the effect of inductances and induced magnetic fields, and causes a large current to flow from one device to another device. Provided is a semiconductor apparatus comprising a first device of a first region; a second device of a second region; and a connection conductor that electrically connects the first device to the second device. The connection conductor includes current paths that are adjacent and have opposite directions in at least a portion thereof. The connection conductor causes current to flow from the first device to the second device, and causes current to flow in a direction from the second device toward the first device in at least a portion thereof.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: November 6, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Hideo Ami
  • Patent number: 10121774
    Abstract: Embodiments of inventive concepts disclosed provide a method of manufacturing a semiconductor package. The method includes mounting a plurality of semiconductor chips on a substrate having a connecting member protruding from a top surface of the substrate, applying a non-conductive paste on the substrate and the semiconductor chips, forming a supporting layer coupling each of the semiconductor chips to the substrate, aligning an interposer on the non-conductive paste, forming a non-conductive layer by applying heat while pressing the interposer and the substrate against each other, and cutting the substrate, the non-conductive layer, and the interposer into separate unit packages, each of which include a semiconductor chip.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: November 6, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Junyoung Ko
  • Patent number: 10121775
    Abstract: Described is an optoelectronic semiconductor chip (1) with a built-in bridging element (9, 9A) for overvoltage protection.
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: November 6, 2018
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Christian Leirer, Berthold Hahn, Karl Engl, Johannes Baur, Siegfried Herrmann, Andreas Ploessl, Simeon Katz, Tobias Meyer, Lorenzo Zini, Markus Maute
  • Patent number: 10121776
    Abstract: A film-type semiconductor package includes a semiconductor integrated circuit and a dummy metal pattern. The semiconductor integrated circuit is formed on a film and includes an electrostatic discharge (ESD) protection circuit. The dummy metal pattern is formed on the film and is electrically connected to the ESD protection circuit through a first wiring formed on the film.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: November 6, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung-Jun Song, Young-Min Kim, Chang-Su Kim, Han-Gu Kim
  • Patent number: 10121777
    Abstract: A silicon controlled rectifier including a semiconductor substrate, first and second semiconductor wells, first and second semiconductor regions, third and fourth semiconductor regions and a silicide layer is provided. The first and the second semiconductor wells are formed in the semiconductor substrate. The first and the second semiconductor regions are respectively formed in the first and the second semiconductor wells in spaced apart relation. The third and the fourth semiconductor regions are respectively formed in the first and the second semiconductor wells. The silicide layer is formed on the third and the fourth semiconductor regions. The silicon controlled rectifier is at least suitable for high frequency circuit application. The silicon controlled rectifier has a relatively low trigger voltage, a relatively high electrostatic discharge level, and a relatively low capacitance.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: November 6, 2018
    Assignee: Novatek Microelectronics Corp.
    Inventors: Chun-Yu Lin, Jie-Ting Chen, Ming-Dou Ker, Tzu-Chien Tzeng, Keko-Chun Liang, Ju-Lin Huang
  • Patent number: 10121778
    Abstract: According to one embodiment, an electrostatic discharge semiconductor device includes one or more wiring layers first disposed over a substrate, including: a wiring electrically connected at a first connecting point of a pad, a second wiring electrically connected at a second connecting point of a ground wiring, and a third wiring electrically connected at a third connecting point of the ground wiring; a first transistor formed in the substrate comprising a first diffusion region electrically connected to the first wiring, a second diffusion region electrically connected to the second wiring, and a gate electrically connected to the ground wiring; and a second transistor formed in the substrate comprising the first diffusion region electrically connected to the first wiring, a third diffusion region electrically connected to the third wiring, and a gate electrically connected to the ground wiring, wherein, a first resistance value of a first current pathway leading from the first connecting point to the secon
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: November 6, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Taichi Wakui, Yasuhiro Suematsu, Yuui Shimizu
  • Patent number: 10121779
    Abstract: Integrated circuits and methods of producing integrated circuits are provided. In an exemplary embodiment, an integrated circuit includes a source and a drain defined within a body isolation well. A gate overlies the body isolation well between the source and the drain, and an isolating structure is formed within the body isolation well. The isolating structure sections the source into a plurality of source sections with the plurality of source sections adjacent to one gate.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: November 6, 2018
    Assignee: Globalfoundries Singapore Pte. Ltd.
    Inventors: Handoko Linewih, Chao Cheng
  • Patent number: 10121780
    Abstract: Disclosed are structures and methods related to a barrier layer for metallization of a selected semiconductor such as indium gallium phosphide (InGaP). In some embodiments, the barrier layer can include tantalum nitride (TaN). Such a barrier layer can provide desirable features such as barrier functionality, improved adhesion of a metal layer, reduced diffusion, reduced reactivity between the metal and InGaP, and stability during the fabrication process. In some embodiments, structures formed in such a manner can be configured as an emitter of a gallium arsenide (GaAs) heterojunction bipolar transistor (HBT) or an on-die high-value capacitance element.
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: November 6, 2018
    Assignee: Skyworks Solutions, Inc.
    Inventors: Cristian Cismaru, Peter J. Zampardi, Jr.
  • Patent number: 10121781
    Abstract: A die stack comprises a first integrated circuit (IC) die having at least a first device comprising a first source, a first drain and a first gate electrode above a first channel region between the first source and the first drain. A second IC die has at least a second device comprising a second source, a second drain and a second gate electrode above a second channel region between the second source and the second drain. The second gate electrode is connected to the first gate electrode by a path including a first through substrate via (TSV), the second drain connected to the first source by a path including a second TSV.
    Type: Grant
    Filed: February 14, 2017
    Date of Patent: November 6, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chao Chieh Li, Ruey-Bin Sheen, Chih-Hsien Chang
  • Patent number: 10121782
    Abstract: The present disclosure generally relates to semiconductor manufactured memory devices and methods of manufacture thereof. More specifically, methods for forming a plurality of layers of a 3D cross-point memory array without the need for lithographic patterning at each layer are disclosed. The method includes depositing a patterned hard mask with a plurality of first trenches over a plurality of layers. Each of the plurality of first trenches is etched all the way through the plurality of layers. Then the hard mask is patterned with a plurality of second trenches, which runs orthogonal to the plurality of first trenches. Selective undercut etching is then used to remove each of the plurality of layers except the orthogonal metal layers from the plurality of second trenches, resulting in a 3D cross-point array with memory material only at the intersections of the orthogonal metal layers.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: November 6, 2018
    Assignee: Western Digital Technologies, Inc.
    Inventors: Mac D. Apodaca, Daniel Robert Shepard
  • Patent number: 10121783
    Abstract: A semiconductor integrated circuit includes a semiconductor substrate of a first conductivity type, a first well region of a second conductivity type formed in an upper portion of the semiconductor substrate, a second well region of the first conductivity type formed in an upper portion of the first well region, an insulating layer formed separated from the first well region on a bottom portion of the semiconductor substrate that is directly beneath the first well region, and a rear surface electrode layer formed on a bottom of the insulating layer.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: November 6, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Hiroshi Kanno, Masaharu Yamaji, Akihiro Jonishi
  • Patent number: 10121784
    Abstract: A semiconductor apparatus includes a first area, a first transistor being formed in two or more divided areas of the first area, and a second area, a second transistor being formed in two or more divided areas of the second area. The number of areas of the second area is greater than the number of areas of the first area, the divided areas of the first area and the second area are alternately arranged, and the gate pad of the first transistor and the gate pad of the second transistor are formed in the second area.
    Type: Grant
    Filed: February 16, 2016
    Date of Patent: November 6, 2018
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Junichi Nita, Kazutaka Suzuki, Takahiro Korenari, Yoshimasa Uchinuma
  • Patent number: 10121785
    Abstract: Provided herein is a multi-channel finFET having a plurality of fins prepared by a process. The process includes forming a series of mandrels on hard mask layer which overlays a semiconductor layer. The semiconductor layer has areas of a first semiconductor material and a second semiconductor material in contact with the hard mask layer. The process includes applying a first conformal coating on the hard mask layer and the series of mandrels, to form spacer layer sacrificial fins. The process includes removing the first conformal coating from horizontal surfaces while retaining the first conformal coating on sidewalls of the series of mandrels. The process includes removing the series of mandrels and etching into a material of the hard mask layer using the spacer layer sacrificial fins as a mask.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: November 6, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Sivananda K. Kanakasabapathy, Fee Li Lie, Eric Miller, Stuart A. Sieg
  • Patent number: 10121786
    Abstract: In one aspect, a method of forming finFET devices is provided which includes patterning fins in a wafer; forming dummy gates over the fins; forming spacers on opposite sides of the dummy gates; depositing a gap fill oxide on the wafer, filling any gaps between the spacers; removing the dummy gates forming gate trenches; trimming the fins within the gate trenches such that a width of the fins within the gate trenches is less than the width of the fins under the spacers adjacent to the gate trenches, wherein u-shaped grooves are formed in sides of the fins within the gate trenches; and forming replacement gate stacks in the gate trenches, wherein portions of the fins adjacent to the replacement gate stacks serve as source and drain regions of the finFET devices.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: November 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Robert H. Dennard, Isaac Lauer, Ramachandran Muralidhar, Ghavam G. Shahidi
  • Patent number: 10121787
    Abstract: Method for fabricating Fin field effect transistors (FinFETs) are disclosed. One of the methods includes the following steps. A first semiconductor fin, a second semiconductor fin and an insulator between the first semiconductor fin and the second semiconductor fin are formed. A first dummy gate, a second dummy gate and an opening between the first and second dummy gates are formed over the insulator, wherein the first dummy gate and the second dummy gate cross over portions of the first semiconductor fin and the second semiconductor fin respectively. A dielectric layer is formed in the opening, wherein the dielectric layer comprises an air gap therein. The first dummy gate and the second dummy gate are replaced with a first gate and a second gate, wherein the first gate and the second gate are electrically insulated by the dielectric layer comprising the air gap therein.
    Type: Grant
    Filed: September 17, 2017
    Date of Patent: November 6, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Che-Cheng Chang, Chih-Han Lin, Horng-Huei Tseng
  • Patent number: 10121788
    Abstract: Disclosed is a semiconductor structure, including at least one fin-type field effect transistor and at least one single-diffusion break (SDB) type isolation region, and a method of forming the semiconductor structure. In the method, an isolation bump is formed above an isolation region within a semiconductor fin and sidewall spacers are formed on the bump. During an etch process to reduce the height of the bump and to remove isolation material from the sidewalls of the fin, the sidewall spacers prevent lateral etching of the bump. During an etch process to form source/drain recesses in the fin, the sidewalls spacers protect the semiconductor material adjacent to the isolation region. Consequently, the sides and bottom of each recess include semiconductor surfaces and the angle of the top surfaces of the epitaxial source/drain regions formed therein is minimized, thereby minimizing the risk of unlanded source/drain contacts.
    Type: Grant
    Filed: January 17, 2018
    Date of Patent: November 6, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Haiting Wang, Wei Zhao, Hong Yu, Xusheng Wu, Hui Zang, Zhenyu Hu
  • Patent number: 10121789
    Abstract: A semiconductor substrate includes lower source/drain (S/D) regions. A replacement metal gate (RMG) structure is arranged upon the semiconductor substrate between the lower S/D regions. Raised S/D regions are arranged upon the lower S/D regions adjacent to the RMG structure, respectively. The raised S/D regions may be recessed to form contact trenches. First self-aligned contacts are located upon the raised S/D regions within a first active area and second self-aligned contacts are located upon the recessed raised S/D regions in the second active area. The first and second self-aligned contacts allows for independent reduction of source drain contact resistances. The first self-aligned contacts may be MIS contacts or metal silicide contacts and the second self-aligned contacts may be metal-silicide contacts.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: November 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Emre Alptekin, Kangguo Cheng, Balasubramanian Pranatharthiharan, Shom S. Ponoth
  • Patent number: 10121790
    Abstract: A semiconductor device includes a semiconductor substrate having a first region and a second region, a plurality of first semiconductor fins in the first region, a plurality of second semiconductor fins in the second region, a first solid-state dopant source layer within the first region on the semiconductor substrate, a first insulating buffer layer on the first solid-state dopant source layer, a second solid-state dopant source layer within the second region on the semiconductor substrate, a second insulating buffer layer on the second solid-state dopant source layer and on the first insulating buffer layer, a first fin bump in the first region, and a second fin bump in the second region. The first fin bump includes a first sidewall spacer and the second fin bump comprises a second sidewall spacer. The first sidewall spacer has a structure that is different from that of the second sidewall spacer.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: November 6, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung
  • Patent number: 10121791
    Abstract: A semiconductor device includes a substrate, first through fourth gate electrodes, and first through fifth fin active pattern. A first recess which is formed in the substrate between the first and second gate electrodes intersecting the second fin active pattern, is filled with a first source/drain region, and has a first depth in a third direction perpendicular to the first and second directions. A second recess which is formed in the substrate between the third and fourth gate electrodes intersecting the second fin active pattern, is filled with a second source/drain region, and has a second depth in the third direction. A third recess which is formed in the substrate between the second and third gate electrodes intersecting the second fin active pattern, is filled with a third source/drain region, and has a third depth in the third direction. The third depth is greater than the first and second depths.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: November 6, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun Kwan Yu, Hyo Jin Kim, Dong Suk Shin, Ji Hye Yi, Ryong Ha
  • Patent number: 10121792
    Abstract: A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described.
    Type: Grant
    Filed: October 9, 2017
    Date of Patent: November 6, 2018
    Assignee: Intel Corporation
    Inventors: Peter L. D. Chang, Uygar E. Avci, David Kencke, Ibrahim Ban
  • Patent number: 10121793
    Abstract: A semiconductor device includes storage electrodes on a substrate and one or more supporters configured to couple one or more portions of the storage electrodes. The semiconductor device may include multiple non-intersecting supporters extending in parallel to a surface of the substrate. At least one supporter may have an upper surface that is substantially coplanar with upper surfaces of the storage electrodes. The storage electrodes may include a capacitor dielectric layer that conformally covers one or more surfaces of the storage electrodes and one or more supporters. A storage electrode may include upper and lower storage electrodes coupled together. The upper and lower storage electrodes may have different horizontal widths.
    Type: Grant
    Filed: March 29, 2016
    Date of Patent: November 6, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyung-Eun Kim, Yongkwan Kim, Semyeong Jang, Jaehyoung Choi, Yoosang Hwang, Bong-Soo Kim
  • Patent number: 10121794
    Abstract: An alternating stack of insulating layers and spacer material layers is formed over a semiconductor substrate. Memory openings are formed through the alternating stack. An optional silicon-containing epitaxial pedestal and a memory film are formed in each memory opening. After forming an opening through a bottom portion of the memory film within each memory opening, a germanium-containing semiconductor layer and a dielectric layer is formed in each memory opening. Employing the memory film and the dielectric layer as a crucible, a liquid phase epitaxy anneal is performed to convert the germanium-containing semiconductor layer into a germanium-containing epitaxial channel layer. A dielectric core and a drain region can be formed over the dielectric layer. The germanium-containing epitaxial channel layer is single crystalline, and can provide a higher charge carrier mobility than a polysilicon channel.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: November 6, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Marika Gunji-Yoneoka, Atsushi Suyama, Jayavel Pachamuthu, Tsuyoshi Hada, Daewung Kang, Murshed Chowdhury, James Kai, Hiro Kinoshita, Tomoyuki Obu, Luckshitha Suriyasena Liyanage
  • Patent number: 10121795
    Abstract: A method for producing a pillar-shaped semiconductor memory device includes forming a mask on a semiconductor substrate and etching to form a semiconductor pillar on the semiconductor substrate. A tunnel insulating layer is formed and a data charge storage insulating layer is formed so as to surround the tunnel insulating layer, and a first conductor layer and a second interlayer insulating layer are formed on the semiconductor pillar. S stacked material layer is formed in a direction perpendicular to an upper surface of the semiconductor substrate, the stacked material layer including the first conductor layer and the second interlayer insulating layer. Data writing and erasing due to charge transfer between the semiconductor pillar and the data charge storage insulating layer through the tunnel insulating layer is performed by application of a voltage to the first conductor layer.
    Type: Grant
    Filed: August 17, 2017
    Date of Patent: November 6, 2018
    Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
    Inventors: Fujio Masuoka, Nozomu Harada
  • Patent number: 10121796
    Abstract: According to embodiments, a semiconductor memory device includes a plurality of control gate electrodes laminated on a substrate. A first semiconductor layer has one end connected to the substrate, has a longitudinal direction in a direction intersecting with the substrate, and is opposed to the plurality of control gate electrodes. An electric charge accumulating layer is positioned between this control gate electrode and the first semiconductor layer. A first contact has one end connected to the substrate and another end connected to a source line. A second contact has one end connected to the substrate and another end connected to a wiring other than the source line. The first contact includes a first silicide layer arranged on the substrate. The second contact includes a second silicide layer arranged on the substrate. The first silicide layer has a higher temperature resistance than the second silicide layer.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: November 6, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Takeshi Sonehara, Masaru Kito
  • Patent number: 10121797
    Abstract: According to an embodiment, a semiconductor memory device comprises: a stacked body including control gate electrodes stacked upwardly of a substrate; a semiconductor layer facing the control gate electrodes; and a gate insulating layer provided between the control gate electrode and the semiconductor layer. The stacked body comprises: a first metal layer configuring the control gate electrode; a first barrier metal layer contacting an upper surface of this first metal layer; a first silicon nitride layer contacting an upper surface of this first barrier metal layer; a first inter-layer insulating layer contacting an upper surface of this first silicon nitride layer; a second barrier metal layer contacting a lower surface of the first metal layer; a second silicon nitride layer contacting a lower surface of this second barrier metal layer; and a second inter-layer insulating layer contacting a lower surface of this second silicon nitride layer.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: November 6, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Shigeki Kobayashi, Satoshi Konagai, Atsushi Konno, Kenta Yamada, Masaaki Higuchi, Masao Shingu, Soichiro Kitazaki, Yoshimasa Mikajiri
  • Patent number: 10121798
    Abstract: A semiconductor device includes a substrate, a stacked structure on the substrate, and a vertical structure in a hole passing through the stacked structure. The stacked structure includes units stacked on top of each other in a direction perpendicular to a top surface of the substrate. The units include first units and second units between the first units. Each of the first units includes a first interlayer insulating layer on a first gate, and each of the second units includes a second interlayer insulating layer on a second gate. A ratio of a thickness of the second interlayer insulating layer with respect to a thickness of the second gate is different from a ratio of a thickness of the first interlayer insulating layer with respect to a thickness of the first gate.
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: November 6, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yeong Dae Lim, Seung Jae Jung
  • Patent number: 10121799
    Abstract: A method comprises forming material to be etched over a substrate. An etch mask comprising a silicon nitride-comprising region is formed elevationally over the material. The etch mask comprises an elevationally-extending mask opening in the silicon nitride-comprising region that has a minimum horizontal open dimension that is greater in an elevationally-innermost portion of the region than in an elevationally-outermost portion of the region. The elevationally-outermost portion has a greater etch rate in at least one of HF and H3PO4 than does the elevationally-innermost portion. The etch mask is used as a mask while etching an elevationally-extending mask opening into the material. The silicon nitride-comprising region is exposed to at least one of HF and H3PO4 to increase the minimum horizontal open dimension in the elevationally-outermost portion to a greater degree than increase, if any, in the minimum horizontal open dimension in the elevationally-innermost portion.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: November 6, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Fei Wang, Tom J. John, Kunal Shrotri, Anish A. Khandekar, Aaron R. Wilson, John D. Hopkins, Derek F. Lundberg
  • Patent number: 10121800
    Abstract: A display device is provided including a substrate having a first region and a second region, a plurality of pixels above the first region, and a connection terminal above the second region, wherein a Young's modulus of the second region is higher than a Young's modulus of the first region.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: November 6, 2018
    Assignee: Japan Display Inc.
    Inventors: Kazuto Tsuruoka, Toshihiro Sato
  • Patent number: 10121801
    Abstract: The present invention provides a TFT array substrate, the TFT array substrate includes: a first metal layer including a first common electrode line, a second metal layer including a second common electrode line, and a third common electrode line, wherein the third common electrode line is electrically connected with at least one of the first common electrode line and the second common electrode line. The TFT array substrate provided by the present invention can achieve at least one effect of reducing the delay of a common electrode line signal (common signal), reducing flicker inequality and crosstalk without reducing the aperture ratio, lowering the cost and simplifying the manufacturing process.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: November 6, 2018
    Assignees: SHANGHAI AVIC OPTOELECTRONICS CO., LTD., TIANMA MICRO-ELECTRONICS CO., LTD.
    Inventors: Yanli Wang, Shoufu Jian
  • Patent number: 10121802
    Abstract: The present disclosure provides an array substrate, a method for manufacturing the same and a display device. The array substrate includes a plurality of signal lines and a connection line electrically connected to the plurality of signal lines. During the formation of each insulation layer on the connection line, a via-hole is formed at a position where the connection line is to be interrupted. In addition, the protection layer is provided to cover the portion of the connection line corresponding to the region where the via-hole is located, so as to protect the connection line. Upon the completion of the insulation layers, the connection line may be interrupted through the via-holes, so as to interrupt electrical connection among the signal lines.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: November 6, 2018
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventor: Quanhu Li
  • Patent number: 10121803
    Abstract: A semiconductor device includes a substrate, a first conductive layer on the substrate and including a main pattern, and substantially symmetrical auxiliary patterns extending from two sides of the main pattern, an insulating layer on the substrate and the first conductive layer, and a second conductive layer on the insulating layer and overlapping at least a portion of the main pattern and the auxiliary patterns.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: November 6, 2018
    Assignee: Samsung Display Co., Ltd.
    Inventors: Chang-Soo Pyon, Min-Ho Ko, Hyun-Chol Bang, Kwang-Min Kim, Won-Kyu Kwak