Abstract: An improved solid electrolytic capacitor, and method of making the solid electrolytic capacitor, is described. The solid electrolytic capacitor comprises a pressed powder anode and a braided lead wire extending from the anode. A dielectric is on the anode and a cathode is on the dielectric.

Abstract: The invention relates to a composition comprising an ionic liquid consisting in the combination of a pyrrolidinium cation and a nitrate anion and comprising a solvent selected from lactone solvents, carbonate solvents, nitrile solvents and mixtures thereof. The composition may be used as an electrolyte, for example, for such applications as energy storage devices.

Abstract: A package electric double-layer capacitor having a first terminal that extends from a package at a first corner of a first cell, which is adjacent to a second cell, on one side in a second direction orthogonal to a first direction. A second terminal extends from the package at the first corner in the first direction and on a side of the first terminal opposite to the second cell. A third terminal extends from the package at a second corner of the second cell, which is adjacent to the first cell and the first corner. A fourth terminal extends from the package at the second corner in the first direction and on a side of the third terminal opposite to the first cell.

Abstract: A multilayer ceramic capacitor includes a multilayer body that includes ceramic layers and inner conductor layers arranged in a stacking direction and that includes a first surface in which the inner conductor layers are exposed, and an outer electrode on the first surface of the multilayer body. The inner conductor layers contain Ni. The outer electrode includes a base layer that directly covers at least a portion of the first surface and is connected to the inner conductor layers. The base layer contains a metal and glass and includes a Ni diffusion portion connected to the inner conductor layers, the Ni diffusion portion containing Ni. A ratio of a diffusion depth of the Ni diffusion portion to a thickness of the base layer is smaller on two of the inner conductor layers that are located outermost than on other inner conductor layers.

Abstract: A connector is disclosed for connecting a first shaped element to a second shaped element. The first shaped element and the second shaped element each include a dovetail guide. In an embodiment, the connector is provided with contact areas. The contact areas are designed to engage into the respective dovetail guides to connect the first and second shaped elements.

Abstract: A dry transformer load switch, and transformer having such switch, has a hollow insulation cylinder extending longitudinally about a virtual center axis and has a plurality of connection contacts arranged along the inner circumference thereof, and a radially oriented main contact arranged in the interior of the hollow insulation cylinder so as to be rotatable about the center axis and which, with a corresponding rotary movement, can be optionally electrically connected by the radially outer end thereof to one of the connection contacts. In a hollow-cylindrical space about the center axis that is defined by the radially inner and outer end of the main contact, there is a barrier shield, which can be rotated together with the main contact about the axis.

Abstract: A two terminal arc suppressor for protecting switch, relay or contactor contacts and the like comprises a two terminal module adapted to be attached in parallel with the contacts to be protected and including a circuit for deriving an operating voltage upon the transitioning of the switch, relay or contactor contacts from a closed to an open disposition, the power being rectified and the resulting DC signal used to trigger a power triac switch via an optoisolator circuit whereby arc suppression pulses are generated for short predetermined intervals only at a transition of the mechanical switch, relay or contactor contacts from an closed to an open transition and, again, at an open to a close transition during contact bounce conditions.

Abstract: A filter assembly for a circuit breaker arc chamber includes a coarse filter layer defining an outlet layer, having an upstream side and a downstream side opposite the upstream side, and a fine filter layer defining an inlet layer, disposed on the upstream side of the coarse filter layer.

Abstract: An electronic device includes a manipulating member extending in first directions and having a portion serving as a pressable portion which is pressed by a user, the manipulating member being elastically deformable such that the pressable portion is movable in second directions transverse to the first directions; a light source; and a light guide member configured to receive light from the light source, the light guide member extending in the first directions and being disposed along the manipulating member, the light guide member being separate from the manipulating member. The manipulating member is made of a light-transmissive material and is caused to glow by the light received from the light guide member.

Abstract: A venting system for a keyboard assembly is disclosed. A keyboard assembly including a printed circuit board defining a set of apertures, and a group of switch housings coupled to the printed circuit board. Each switch housing of the group of switch housings may define a switch opening positioned above one of the set of apertures of the printed circuit board. The keyboard assembly may also include a shield defining at least one channel of a venting system formed below the printed circuit board. The at least one channel may be in fluid communication with at least one aperture, and at least one of the switch openings positioned above the at least one aperture.

Abstract: An electronic device including a waterproof structure is provided. The electronic device includes a housing, a window arranged in at least a part of the housing, a display module arranged in a rear surface of the window, a heat radiating member arranged in a rear surface of the display module, a polymer member arranged between a first surface of the heat radiating member and the rear surface of the display module, and a conductive member arranged in a second surface of the heat radiating member facing the first surface of the heat radiating member. A waterproof structure for the heat radiating member may be configured using at least one of the polymer member or the conductive member.

Abstract: A keyboard including: a key top; a slide member that is attached to the key top, slides up and down, and presses a contact via an elastic member; a non-slide member that is attached to the key top, and never moves up and down; supporters that support the slide member and the non-slide member, respectively; wherein the slide member is restrained by the key top in a first direction, and is movable in a second direction vertical to the first direction, and the non-slide member is arranged diagonally with the slide member, is movable in the first direction, and is restrained by the key top in the second direction.

Abstract: A lock member includes a fit portion, an inclined portion and a contacting portion. The fit portion is fitted with a projecting portion of a trigger to maintain an off-lock state. The inclined portion is brought into contact with a shaft of an unlock button and moves the lock member to release the off-lock state. The projecting portion is slidable on the contacting portion and maintains an on state.

Abstract: A luminous keyboard includes plural keys and a backlight module under the plural keys. The backlight module includes a light-shading plate, a light guide plate and a reflecting plate, which are sequentially stacked on each other from top to bottom. The light-shading plate includes a first cutting hole and a first cutting hole periphery around the first cutting hole. The light guide plate includes a perforation. The reflecting plate includes a second cutting hole and a second cutting hole periphery around the second cutting hole. A top surface of the second cutting hole periphery is attached on a bottom surface of the first cutting hole periphery through the perforation. While an object is penetrated through the first cutting hole and the second cutting hole, the object is closely covered by the first cutting hole periphery and the second cutting hole periphery in response to an elastic restoring force.

Abstract: A control device with limit switches is provided. The device has a container housing an electric circuit provided with one or more limit switches, and a driving assembly configured to control operation of a valve or an actuator through the limit switches of the electric circuit. The driving assembly has a shaft configured to be rotatably coupled to a valve or an actuator and one or more cams keyed on the shaft and is configured for driving the limit switches of the electric circuit. The shaft has a gripping surface and each cam has a radial clamping mechanism whose gripping members are arranged in correspondence of a through hole configured to allow to fit the cam onto the shaft.

Abstract: A cantilevered push button adapted for accepting an input on an electrical or electronic device is disclosed. The button can include an elongated button top component disposed about an exterior surface of an electrical or electronic device such that it is accessible to a user, and having two opposing distal ends associated with separate user inputs. A first fulcrum is located between the first distal end and the midpoint of the elongated button top component, while a second fulcrum is located between the second distal end and the midpoint. A first electrical contact is associated with the first distal end, such that when a user presses on the first distal end, the elongated button top component pivots about the second fulcrum and the first electrical contact is actuated. A second electrical contact is similarly associated with the second distal end and first fulcrum.

Abstract: The disclosed concept relates to vacuum interrupters having an electrically floating arc-enduring center shield component made out of an alloy of copper (Cu) and chromium (Cr), with or without additional minority alloying element or elements, and contact assemblies positioned in a vacuum envelope. In an open position, the contact assemblies include a contact gap formed there between. In accordance with the invention, contact assemblies are axially positioned such that the axial position of the contact gap aligns with a portion of the wall of the Cu—Cr alloy-based center shield component that has a maximum thickness and outer diameter.

Abstract: An insulating housing with integrated functions comprises a barrel-shaped shell, an interior wall of which being provided with a protruded or recessed uneven texture configured to increase a creepage distance between both axial ends of the barrel-shaped shell, the path of the creepage distance formed by the protruded or recessed uneven texture having more than two flyover or bypass sub-paths, such that the creepage distance is increased, and the voltage withstanding is increased.

Abstract: The present disclosure relates to a vacuum interrupter that is installed within a vacuum circuit breaker to break a circuit. The vacuum interrupter includes an insulated container, a seal cup, a fixing electrode, a diaphragm, and a movable electrode. The insulated container is formed in a cylindrical form. The seal cup is installed on an upper end of the insulated container. The fixing electrode includes a fixing shaft and a fixing contact member installed on the other end of the fixing shaft. The diaphragm is installed on a lower end of the insulated container. The movable electrode includes a movable shaft having one end fixed to the diaphragm and the other end disposed within the insulated container and formed to be linearly movable, and a movable contact member installed on the other end of the movable shaft to be selectively contacted to the fixing contact member.

Abstract: A key that includes a body with an optically transmissive or light permeable region and an optical film coupled to or carried by the light permeable region is disclosed. The key also includes a resilient structure coupled to the body. The key can be assembled or coupled to, or disposed relative or adjacent to, a display screen. The key also includes a switch actuator (e.g., an electromechanical switch actuator or contact element). Displacement of the key, more specifically the body of the key, displaces the switch actuator for actuating a switch. The resilient structure is configured to bias the body at a first position. The body can be actuated or displaced from the first position to a second position for effectuating corresponding displacement of the switch actuator and actuation of the switch. The resilient structure provides a positive tactile feedback upon user-directed or user-controlled actuation or displacement of the body.

Abstract: A short circuit detection circuit for an electrical circuit includes a secondary power supply. The electrical switch is connected in series with a load and is selectively connected in series with a first power supply. The secondary power supply is limited in comparison to the first power supply in terms of voltage and/or current. A first resistance is electrically connected between the secondary power supply and a first terminal of the electrical switch. A voltage measurement circuit measures a voltage at the second end of the first resistance. A controller is configured to, while the electrical switch is controlled to an open state, energize the secondary power supply and obtaining a first voltage measurement. In response to the first voltage measurement indicating that a voltage across the first resistance is greater than a predetermined threshold, the controller identifies a low-resistance condition in the electrical switch.

Abstract: A hybrid contactor device that provides the ability to use the device with both AC and DC circuits is provided. The hybrid contactor includes a series-parallel arrangement of mechanical contacts with solid state devices, increasing the switching capacity of the mechanical contacts, and maintains galvanic isolation when open. The hybrid contactor includes two mechanical contacts, and is arranged so that one contact closes shortly before the other. The second contact forms a parallel circuit with an electronic switch.

Abstract: The present disclosure provides methods of fabricating a micro-electro-mechanical systems (MEMS) switch. The methods include providing a substrate, forming a first dielectric layer disposed above the substrate, forming a bump above the first dielectric layer, providing a movable member including a top actuation electrode, and forming at least one support member that includes the first dielectric layer and is directly below the top actuation electrode. The top actuation electrode is electrically coupled to the bump.

Abstract: A contact arm for use in a circuit breaker is provided. The contact arm includes a tubular body that includes a conductive tube and defines a central longitudinal axis of the contact arm. The body has a first end configured for connection with a contact of the circuit breaker, and a second end configured for connection with a pole of the circuit breaker. The body defines a plurality of apertures extending therethrough from an outer surface of the body to an inner surface of the body.

Abstract: A first support member and a second support member are provided in a rotation support device and a worm gear is rotated in a state that the second support member is inserted in the first support member, whereby the worm gear is prevented from being shaken through the first support member and the second support member and heat transmission to a housing due to rotation of the worm gear to damage the housing is prevented.

Abstract: A fuse has a first contact and a second contact, with the second contact being used to electrically contact the device to be protected. The fuse has a fuse element that connects the first contact to the second contact. The fuse also has an additional contact being arranged so as to be insulated from the first contact and insulated from the second contact and, in an untripped state, is contactless with respect to the fuse element, with the first contact being directly connected to the first potential during operation and with the device to be protected being directly connected to the second potential during operation, with the additional contact also being directly connected to the second potential during operation. A fourth contact makes external triggering available, with triggering resulting in an electric arc that causes the fuse element to fuse.

Abstract: An improved fuse element for use in a circuit protection fuse. The fuse element may include an insulating substrate portion and a conductive metallic portion disposed on at least one surface of the insulating substrate portion, wherein the metallic portion extends along, and is in continuous, intimate contact with the substrate portion. When the metallic portion melts and separates upon the occurrence of an overcurrent condition, the substrate portion bridges the resulting gap that is formed in the metallic portion and provides electrical arc suppression therein.

Abstract: A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the top pole ion emitting slit. At least one magnet creates a magnetic field that passes through the anode slit. Wherein the width of the anode slit is 3 mm or less. A process of generating an accelerated ion beam is also provided that includes flowing a gas into proximity to said anode. By energizing a power supply electron flow is induced to the anode and the gas is ionized. Accelerating the ions from the anode through the linear ion emitting slit generates an accelerated ion beam by a process superior to that using a racetrack-shaped slit.

Abstract: A scanning electron microscope according to the present invention includes: an electron source that produces an electron beam; a trajectory dispersion unit that disperses the trajectory of an electron beam of electrons with a different energy value; a selection slit plate having a selection slit that selects the energy range of the dispersed electron beam; and a transmittance monitoring unit that monitors the transmittance of an electron beam, which is being transmitted through the selection slit. Accordingly, there can be provided a scanning electron microscope equipped with an energy filter that implements a stable reduction in energy distribution.

Abstract: In one embodiment, a method of cleaning an electron source included in an electron gun for an electron beam writing apparatus includes supplying an inert gas to an electron gun chamber, allowing the electron source to emit electrons, ionizing the inert gas with the electrons to produce ions, and removing contaminants deposited on the electron source by bombardment with the ions, and cutting off the supply of the inert gas based on a change in electron beam emission characteristic of the electron gun.

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, an electron beam inspection system includes multiple stages or multiple chambers, where the chambers/stages (N?2) are organized to form one or more paths for wafer/mask inspection. An inspection procedure in each chamber (or at each stage) is determined by its order in the path and the relative columns used. For a system with N chambers/stages, a maximum number of N wafers/masks can be processed simultaneously.

Abstract: There is provided an electron microscope in which a crossover position can be kept constant. The electron microscope (100) includes: an electron source (110) for emitting an electron beam; an acceleration tube (170) having acceleration electrodes (170a-170f) and operative to accelerate the electron beam; a first electrode (160) operative such that a lens action is produced between this first electrode (160) and the initial stage of acceleration electrode (170a); an accelerating voltage supply (112) for supplying an accelerating voltage to the acceleration tube (170); a first electrode voltage supply (162) for supplying a voltage to the first electrode (160); and a controller (109b) for controlling the first electrode voltage supply (162). The lens action produced between the first electrode (160) and the initial stage of acceleration electrode (170a) forms a crossover (CO2) of the electron beam.

Abstract: A multi charged particle beam writing apparatus includes a modulation rate data calculation processing circuitry to calculate, for each pixel being a unit region, a modulation rate of a beam to a pixel concerned and each modulation rate of a beam to at least one pixel at a periphery of the pixel concerned, and a corrected-dose calculation processing circuitry to calculate, for the each pixel, a corrected dose by adding a multiplied value obtained by multiplying the modulation rate of the pixel concerned in a modulation rate map by beam dose to the pixel concerned, and a multiplied value obtained by multiplying the modulation rate of the pixel concerned which becomes one of the at least one pixel at the periphery with respect to another pixel defined for the position of the pixel concerned by a beam dose to the another pixel.

Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

Abstract: A multi charged particle beam exposure method includes calculating an effective irradiation time, for each of a plurality of control irradiation time periods for controlling an irradiation time of each beam in the multi-beams of a charged particle beam, using a blanking error time of each divided shot of a plurality of divided shots, previously acquired, due to an error of blanking control for each divided shot; generating correlation data representing a relation between the control irradiation time and the effective irradiation time; selecting, using the correlation data, for each irradiation position of a target object, the combination of the divided shots corresponding to the effective irradiation time to be closer to each desired irradiation time; and performing exposure, using the multi-beams, based on the combination of the divided shots selected for each irradiation position of the target object.

Abstract: A method of making a nanostructure and nanostructured articles by depositing a layer to a major surface of a substrate by plasma chemical vapor deposition from a gaseous mixture while substantially simultaneously etching the surface with a reactive species. The method includes providing a substrate; mixing a first gaseous species capable of depositing a layer onto the substrate when formed into a plasma, with a second gaseous species capable of etching the substrate when formed into a plasma, thereby forming a gaseous mixture; forming the gaseous mixture into a plasma; and exposing a surface of the substrate to the plasma, wherein the surface is etched and a layer is deposited on at least a portion of the etched surface substantially simultaneously, thereby forming the nanostructure. The substrate can be a (co)polymeric material, an inorganic material, an alloy, a solid solution, or a combination thereof.

Abstract: In accordance with example embodiments, a plasma processing apparatus includes a chamber configured to peform a plasma process, an upper plate on the chamber, an antenna under the upper plate and the antenna is configured to generate plasma in the chamber, an upper insulator between the upper plate and the antenna and the upper insulator covers a top of the antenna, a lower insulator covering a bottom of the antenna, an antenna support ring configured to fix the antenna to the upper plate, and a metal gasket adhered to the antenna support ring.

Abstract: Provided herein are approaches for dynamically modifying plasma volume in an ion source chamber by positioning an end plate and radio frequency (RF) antenna at a selected axial location. In one approach, an ion source includes a plasma chamber having a longitudinal axis extending between a first end wall and a second end wall, and an RF antenna adjacent a plasma within the plasma chamber, wherein the RF antenna is configured to provide RF energy to the plasma. The ion source may further include an end plate disposed within the plasma chamber, adjacent the first end wall, the end plate actuated along the longitudinal axis between a first position and a second position to adjust a volume of the plasma. By providing an actuable end plate and RF antenna, plasma characteristics may be dynamically controlled to affect ion source characteristics, such as composition of ion species, including metastable neutrals.

Abstract: A substrate processing system includes a processing chamber. A pedestal and a showerhead are arranged in the processing chamber. A surface plasmon resonance (SPR) fiber has a central portion disposed in the processing chamber, and opposing ends disposed outside the processing chamber. A light source provides input light at one end of the SPR fiber, and a detector receives output light from the other end of the SPR fiber. Surface plasmon waves and evanescent waves constitute the output light, which is processed and analyzed to determine a condition of the processing chamber.

Abstract: Methods, systems, and computer programs are presented for reducing chamber instability while processing a semiconductor substrate. One method includes an operation for identifying a first recipe with steps having an operating frequency equal to the nominal frequency of a radiofrequency (RF) power supply. Each step is analyzed with the nominal frequency, and the analysis determines if any step produces instability at the nominal frequency. The operating frequency is adjusted, for one or more of the steps, when the instability in the one or more steps exceeds a threshold. The adjustment acts to find an approximate minimum level of instability. A second recipe is constructed after the adjustment, such that at least one of the steps includes a respective operating frequency different from the nominal frequency. The second recipe is used to etch the one or more layers disposed over the substrate in the semiconductor processing chamber.

Abstract: A detector (100) comprises an upstream ionization chamber (110), a downstream detector chamber (120) and a signal processor (160). The ionization chamber (110) comprises a first electrode (111), a second electrode (112) and an ionization chamber gas (114). The detector chamber (120) comprises a converter unit (130) adapted to convert incident radiation (6) into electrons (8), an electron amplification device (140) adapted to produce further electrons (9) from the electrons (8), a read-out device (150) adapted to generate a signal representative of the incident radiation (6) and a detector chamber gas (121). The signal processor (160) is adapted to generate a corrected signal by processing the signal representative of the incident radiation (6) based on a current signal representative of an ionization current measured between the first electrode (111) and the second electrode (112) and induced by the incident radiation (6).

Abstract: A system includes a mass spectrometer and associated sample interfacing equipment. The sample interfacing equipment includes a platform structured to support a sample thereon, a fluid source, a high voltage source, a dispensing probe electrically coupled to the high voltage source and defining a fluid dispensing passage therethrough, a collection probe defining a collection passage therethrough, a sensing arrangement coupled to the dispensing probe, and control logic responsive to the sensing arrangement to control distance between the dispensing probe and the sample. The dispensing probe facilitates formation of one or more ionized sample analytes when dispensing the fluid through the dispensing passage proximate to the sample on the platform. The collecting probe receives at least some of the one or more ionized sample analytes to pass through the collection passage into the mass spectrometer for analysis.

Abstract: A voltage supply system for supplying an RF voltage to an RF resonant load comprising an ion-optical component of a mass spectrometer is disclosed. The system comprises a Direct Digital Synthesiser (“DDS”) arranged and adapted to output an RF voltage. The voltage supply system is arranged and adapted: (i) to vary the frequency of the RF voltage output by the Direct Digital Synthesiser, (ii) to determine a first resonant frequency of the RF resonant load comprising the ion-optical component, and (iii) to determine whether or not the generation of an RF voltage at the first resonant frequency by the Direct Digital Synthesiser would also result in the generation of a spur frequency close to the first resonant frequency.

Abstract: A method of fragmenting ions is disclosed comprising providing a linear ion trap comprising: (i) a first electrode set comprising a plurality of first electrodes; (ii) a second electrode set arranged downstream of the first electrode set and comprising a plurality of second electrodes; and (iii) a third electrode set arranged downstream of the second electrode set and comprising a plurality of third electrodes. Ions are axially confined within the linear ion trap. Either: (i) a potential difference between at least some of the first electrodes and at least some of the second electrodes; and/or (ii) a potential difference between at least some of the second electrodes and at least some of the third electrodes, is varied in order to accelerate at least some ions confined within the linear ion trap in order to cause the ions to fragment so as to form fragment or daughter ions.

Abstract: The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.

Abstract: Methods, systems and devices that generate differential axial transport in a fluidic device having at least one fluidic sample separation flow channel and at least one ESI emitter in communication with the at least one sample separation flow channel. In response to the generated differential axial transport, the at least one target analyte contained in a sample reservoir in communication with the sample separation channel is selectively transported to the at least one ESI emitter while inhibiting transport of contaminant materials contained in the sample reservoir toward the at least one ESI emitter thereby preferentially directing analyte molecules out of the at least one ESI emitter. The methods, systems and devices are particularly suitable for use with a mass spectrometer.

Abstract: Edge trim processes in 3D integrated circuits and resultant structures are provided. The method includes trimming an edge of a wafer at an angle to form a sloped sidewall. The method further includes attaching the wafer to a carrier wafer with a smaller diameter lower portion of the wafer bonded to the carrier wafer. The method further includes thinning the wafer while it is attached to the wafer.

Abstract: According to an embodiment of the present disclosure, a substrate processing apparatus including a housing is provided. The housing having an internal atmosphere of a reduced oxygen concentration includes a box structure configured to accommodate a substrate holder which receives a plurality of substrates therein and including a first gap and a second gap. Further, the housing includes an inert gas pipe connected to the box structure, and configured to supply an inert gas to the box structure, a cover member mounted in the box structure, and a buffer space formed between an internal space of the box structure and the cover member.

Abstract: Methods and apparatuses for forming high modulus silicon oxide spacers using atomic layer deposition are provided. Methods involve depositing at high temperature, using high plasma energy, and post-treating deposited silicon oxide using ultraviolet radiation. Such silicon oxide spacers are suitable for use as masks in multiple patterning applications to prevent pitch walking.