Patents Issued in February 20, 2020
  • Publication number: 20200058440
    Abstract: A planar magnetic structure includes a closed loop structure having a plurality of core segments divided into at least two sets. A coil is formed about one or more core segments. A first antiferromagnetic layer is formed on a first set of core segments, and a second antiferromagnetic layer is formed on a second set of core segments. The first and second antiferromagnetic layers include different blocking temperatures and have an easy axis pinning a magnetic moment in two different directions, wherein when current flows through the coil, the magnetic moments rotate to form a closed magnetic loop in the closed loop structure.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 20, 2020
    Inventors: Guohan Hu, Naigang Wang
  • Publication number: 20200058441
    Abstract: A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7?). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.
    Type: Application
    Filed: April 13, 2018
    Publication date: February 20, 2020
    Applicant: COMET AG
    Inventors: Thierry Altenhoven, Walter Bigler, Timothy Albert Weber, Mark Mildner
  • Publication number: 20200058442
    Abstract: A method of manufacturing a multilayer ceramic electronic component includes preparing a ceramic green sheet, forming an internal electrode pattern by coating a paste for an internal electrode including nickel (Ni) powder including a coating layer having a surface including copper (Cu) on the ceramic green sheet, forming a ceramic multilayer structure by stacking the ceramic green sheet with the internal electrode pattern formed thereon, and forming a body including a dielectric layer and an internal electrode by sintering the ceramic multilayer structure. The content of Cu is equal to or greater than 0.2 wt %, based on a total weight of the Ni powder.
    Type: Application
    Filed: October 10, 2018
    Publication date: February 20, 2020
    Inventors: Kyoung Jin CHA, Jeong Ryeol KIM, Kyung Ryul LEE, Young Joon OH, Hyo Min KANG, Jun Oh KIM
  • Publication number: 20200058443
    Abstract: A multilayer capacitor includes a body, including a stacked structure formed of a plurality of dielectric layers and a plurality of internal electrodes, and a plurality of external electrodes. Each external electrode includes a conductive layer, disposed at the end of the body and connected to the plurality of internal electrodes, and a plating layer covering the conductive layer. Each conductive layer includes nickel (Ni) and barium titanate (BT), and an area occupied by nickel with respect to the total area of the respective conductive layer is 30% to 65%.
    Type: Application
    Filed: November 8, 2018
    Publication date: February 20, 2020
    Inventors: Sung Hyung KANG, Yong Koo KIM, Hyung Kyu KIM, Won Hee YOO, Jong Hyun CHO, Byung Kil YUN, Seok Kyoon WOO, Hyun Sung DONG
  • Publication number: 20200058444
    Abstract: A multilayer ceramic electronic component includes a body including an internal electrode alternately arranged with a dielectric layer; and an external electrode disposed on the body and connected to the internal electrode. The internal electrode includes a plurality of nickel (Ni) grains, and a composite layer including tin (Sn) and nickel (Ni) is disposed at a grain boundary of the nickel (Ni) grains.
    Type: Application
    Filed: October 11, 2018
    Publication date: February 20, 2020
    Inventors: Kyoung Jin CHA, Hyung Soon KWON, Ji Hong JO
  • Publication number: 20200058445
    Abstract: A multilayer ceramic capacitor includes a ceramic body including a dielectric layer and having first and second surfaces opposing each other, third and fourth surfaces connecting the first and second surfaces, and fifth and sixth surfaces connected to the first to fourth surfaces and opposing each other, a plurality of internal electrodes disposed inside the ceramic body, exposed through the first and second surfaces, and having one end portion exposed through the third or fourth surface, and first and second side margin portions disposed on the edges of the plurality of internal electrodes, exposed through the first and second surfaces, in which RGB values of the first and second surfaces on which the first and second side margin portions are disposed are different from RGB values of the fifth and sixth surfaces.
    Type: Application
    Filed: October 16, 2018
    Publication date: February 20, 2020
    Inventor: Su Hyoung LEE
  • Publication number: 20200058446
    Abstract: A multilayer ceramic capacitor includes a ceramic body including an active portion that includes a dielectric layer and a plurality of internal electrodes overlapping other across the dielectric layer, and cover portions formed above and below the active portion, and including first and second surfaces opposing each other, third and fourth surfaces connecting the first and second surfaces, and fifth and sixth surfaces connected to the first to fourth surfaces and opposing each other, and first and second side margin portions disposed on the first and second surfaces. In a cross-section of the ceramic body in a length-thickness (L-T) direction, a ratio Sd/Sc of an area Sd of a region except for the active portion to an overall area Sc of the section is greater than 27%.
    Type: Application
    Filed: October 23, 2018
    Publication date: February 20, 2020
    Inventors: Yeong Ju CHOE, Min Woo KIM, Eun Jung LEE, Ki Pyo HONG
  • Publication number: 20200058447
    Abstract: A multilayer ceramic capacitor includes a ceramic body including an active portion that includes a dielectric layer and a plurality of internal electrodes overlapping other across the dielectric layer, and cover portions formed above and below the active portion, and including first and second surfaces opposing each other, third and fourth surfaces connecting the first and second surfaces, and fifth and sixth surfaces connected to the first to fourth surfaces and opposing each other, and first and second side margin portions disposed on the first and second surfaces. In a cross-section of the ceramic body in a length-thickness (L-T) direction, a ratio Sd/Sc of an area Sd of a region except for the active portion to an overall area Sc of the section is greater than 27%.
    Type: Application
    Filed: February 13, 2019
    Publication date: February 20, 2020
    Inventors: Yeong Ju CHOE, Min Woo KIM, Eun Jung LEE, Ki Pyo HONG
  • Publication number: 20200058448
    Abstract: An electronic component includes: a capacitor array including a plurality of multilayer capacitors consecutively disposed in a horizontal direction, first and second metal frames disposed on both side surfaces of the capacitor array and connected to first and second external electrodes, respectively. The first and second metal frames respectively include first and second horizontal bonding portions bonded to upper portions of first and second band portions, first and second horizontal mounting portions disposed to oppose the first and second horizontal bonding portions in a vertical direction, and first and second vertical portions connecting the first and second horizontal bonding portions and the first and second horizontal mounting portions and having at least one first and second cutout portions in a horizontal direction, respectively. The first and second horizontal mounting portions are spaced apart from the plurality of multilayer capacitors.
    Type: Application
    Filed: November 14, 2018
    Publication date: February 20, 2020
    Inventor: Beom Joon CHO
  • Publication number: 20200058449
    Abstract: A capacitor includes an anode, an oxide layer, a dielectric layer and a cathode. The oxide layer is located between the anode and the dielectric layer. The anode is made of a Zr-alloy having a composition of ZrM, where M is a metal element capable of forming an oxide coating in an electrolytic solution. The oxide layer includes a composite oxide of ZrM having a hexagonal close-packed structure and having a composition of (ZrM)OY where Y<2. The dielectric layer includes another composite oxide of ZrM having a composition of (ZrM)O2.
    Type: Application
    Filed: July 29, 2016
    Publication date: February 20, 2020
    Applicants: TOKIN CORPORATION, NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY
    Inventors: Hiroki HABAZAKI, Koji SAKATA
  • Publication number: 20200058450
    Abstract: A photoelectric conversion element includes: a transparent substrate; a photoelectric conversion cell disposed on one surface of the transparent substrate; and a conductive first current extracting portion disposed on the one surface of the transparent substrate and that extracts a current from the photoelectric conversion cell. The photoelectric conversion cell includes: an electrode disposed on the one surface of the transparent substrate; a counter substrate that faces the electrode and that has a metal substrate; and sealing portion disposed between the transparent substrate and the counter substrate.
    Type: Application
    Filed: November 13, 2017
    Publication date: February 20, 2020
    Applicant: FUJIKURA LTD.
    Inventors: Keisuke Naka, Kenji Katsumata, Kenichi Okada
  • Publication number: 20200058451
    Abstract: An electrolyte is introduced into an electrochemical device, passed, via a first corrugation feature, through a first electrode of the electrochemical device, passed through an ion permeable separator, and contacted with a second electrode. The first or second electrode comprises a second corrugation feature in fluid communication with the first corrugation feature to contact the electrolyte across a portion of an active surface of the first or second electrode.
    Type: Application
    Filed: October 16, 2019
    Publication date: February 20, 2020
    Inventor: Stephen Cordova
  • Publication number: 20200058452
    Abstract: A power storage apparatus includes bag-shaped separators. Each of the bag-shaped separators includes a first welded portion and a first non-welded portion. The first welded portion exists along a first edge of the bag-shaped separator and is formed by welding the surplus sections of the separator members together. In the first non-welded portion, the separator members are not welded together. The bag-shaped separator includes a second welded portion and a second non-welded portion. The second welded portion exists along a second edge and is formed by welding the surplus sections of the separator members together. The second non-welded portion is located closer to the second edge than the second welded portion. In the second non-welded portion, the separator members are not welded together. In the power storage apparatus, the width of the first non-welded portion>the width of the second non-welded portion.
    Type: Application
    Filed: February 27, 2018
    Publication date: February 20, 2020
    Applicant: KABUSHIKI KAISHA TOYOTA JIDOSHOKKI
    Inventors: Atsushi MINAGATA, Masato OGASAWARA, Tomoaki TACHIBANA
  • Publication number: 20200058453
    Abstract: A fused tap for an elbow connector that properly insulates and houses an interruption device or fuse to provide protection on underground distribution power lines. The interruption device is replaceable without the need of replacing the entire assembly. The fused tap provides flexibility in installation for existing and new underground distribution lines and/or feeders.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 20, 2020
    Inventor: Robert K. Jones
  • Publication number: 20200058454
    Abstract: A low-voltage protective switching device includes: at least one outer conductor path from an outer conductor supply terminal of the low-voltage protective switching device to an outer conductor load terminal of the low-voltage protective switching device; a neutral conductor path from a neutral conductor terminal of the low-voltage protective switching device to a neutral conductor load terminal of the low-voltage protective switching device; a mechanical bypass switch disposed in the outer conductor path; a first semiconductor circuit arrangement of the low-voltage protective switching device connected parallel to the mechanical bypass switch; an electronic control unit; a current measuring arrangement disposed in the outer conductor path, the current measuring arrangement being connected with the electronic control unit; and a first mechanical disconnecting switch disposed in series to the first semiconductor circuit arrangement and in parallel to the mechanical bypass switch.
    Type: Application
    Filed: September 29, 2017
    Publication date: February 20, 2020
    Inventor: Kenan Askan
  • Publication number: 20200058455
    Abstract: A PCB motor controller comprises relays mounted on a PCB and interconnected to power traces in or on the PCB to receive incoming three-phase power and to output three-phase power to a motor. Control power traces in or on the PCB connect the relays to control circuitry, also mounted on the PCB. A power supply is mounted on the PCB and connected to the control circuitry to provide power for its operation and for switching of the relays. The relays are switched in accordance with a point-on-wave (POW) switching scheme, allowing for the use or relays and the PCB, which may not otherwise be suitable for motor control applications.
    Type: Application
    Filed: August 27, 2019
    Publication date: February 20, 2020
    Inventors: Michael Lee Gasperi, Andrew John Jaap
  • Publication number: 20200058456
    Abstract: Methods for assembling low-profile, singulated keyboards by prefabricating key assemblies onto a chassis strip that is divided into individual key assemblies only after the substrate is affixed to a feature plate of keyboard. For example, a row of key assemblies is fabricated onto a chassis strip. The row corresponds to a partial or complete row of keys of the keyboard. The chassis strip is thereafter affixed to a feature plate in a specific location, thereby aligning each prefabricated key assembly to a precise location on the feature plate. While connected, each prefabricated key assembly is independently affixed to the feature plate. Thereafter, interconnecting portions of the chassis strip between the prefabricated key assemblies are removed, thereby singulating each key assembly.
    Type: Application
    Filed: October 25, 2019
    Publication date: February 20, 2020
    Inventors: Chia Chi Wu, Ming Gao, Zheng Gao, Zyhengyu Li
  • Publication number: 20200058457
    Abstract: A cam of a safety switch rotates about a rotational shaft in accordance with an operation of inserting an actuator into an opening and an operation of withdrawing the actuator. A switch part includes an operation rod that reciprocates according to a rotation angle of the cam, and detects an insertion state where the actuator is inserted in the opening. In the insertion state, a locking member locks the actuator upon engagement with a part of the cam. When the operation of withdrawing the actuator is performed in a locked state of the actuator, the cam pushes the locking member in one direction, and the locking member pushes a part of a head case in the one direction. This improves locking strength of the safety switch.
    Type: Application
    Filed: February 16, 2018
    Publication date: February 20, 2020
    Inventors: Tatsuhiro WATANABE, Masatake YAMANO
  • Publication number: 20200058458
    Abstract: A power contactor and a method for producing a housing body for a power contactor are disclosed. In an embodiment a power contactor includes a first electrical contact, a second electrical contact, a switch element configured to provide an opened position and a closed position, wherein the switch element, in the closed position, contacts the first electrical contact and the second electrical contact with one another, and wherein the first electrical contact and the second electric contact are insulated from one another when the switch element is in the opened position and at least one temperature sensor integrated into the power contactor, wherein the sensor is configured to detect a temperature of the power contactor in a pre-defined distance from the first electrical contact and/or the second electrical contact.
    Type: Application
    Filed: November 7, 2017
    Publication date: February 20, 2020
    Inventor: Robert Hoffmann
  • Publication number: 20200058459
    Abstract: The invention relates to a voltage limiting device which has an electromagnetically operable switching device for producing an electrical connection between a first cable terminal and a second cable terminal wherein a first electrical conductor connects the first cable terminal to the one terminal of the switching device and a second electrical conductor electrically connects the second cable terminal to the other terminal of the switching device. The voltage limiting device is characterized in that one of the two electrical conductors comprises an electrically conductive support plate. The expansion of the support plate in the width direction allows, in contrast to an electrical conductor which is characterized by a small width in relation to the length, a current displacement in the width direction.
    Type: Application
    Filed: August 7, 2019
    Publication date: February 20, 2020
    Inventor: Julian Beuchelt
  • Publication number: 20200058460
    Abstract: The objective of the invention is to provide a microwave tube, or the like, wherein gas adsorption action of a getter may be satisfactorily performed independently from a microwave amplification operation. In order to solve this problem, this microwave electron tube comprises: a helix wherein a microwave may progress oriented from an input section to an output section within a helical tube; an electron gun emitting an electron flow oriented toward the helix; a focusing device causing the electron flow to traverse the vicinity of the helix in the direction of a collector; the collector absorbing the electron flow; and a getter having a heater insulated from the cathode provided in the electron gun.
    Type: Application
    Filed: February 16, 2018
    Publication date: February 20, 2020
    Applicant: NEC NETWORK AND SENSOR SYSTEMS, LTD.
    Inventor: Taishi MASUDA
  • Publication number: 20200058461
    Abstract: A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.
    Type: Application
    Filed: March 27, 2018
    Publication date: February 20, 2020
    Applicant: Excillum AB
    Inventors: Per TAKMAN, Tomi TUOHIMAA
  • Publication number: 20200058462
    Abstract: An X-ray tube includes: a vacuum housing configured to include an internal space which is vacuum; a target unit configured to be disposed in the internal space, and include a target that generates an X-ray by using an electron beam incident therein, and a target support unit that supports the target, the X-ray generated by the target being transmitted through the target support unit; an X-ray emission window configured to be so provided as to face the target support unit, and seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window; an elastic member configured to press the target unit in such a direction as to approach the X-ray emission window; and a target shift unit configured to shift the target unit pressed by the elastic member in a direction crossing an incidence direction of the electron beam.
    Type: Application
    Filed: February 26, 2018
    Publication date: February 20, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventor: Kazutaka SUZUKI
  • Publication number: 20200058463
    Abstract: An ion beam treatment or implantation system includes an ion source emitting a plurality of parallel ion beams having a given spacing. A first lens magnet having a non-uniform magnetic field receives the plurality of ion beams from the ion source and focuses the plurality of ion beams toward a common point. The system may optionally include a second lens magnet having a non-uniform magnetic field receiving the ion beams focused by the first lens magnet and redirecting the ion beams such that they have a parallel arrangement having a closer spacing than said given spacing in a direction toward a target substrate.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 20, 2020
    Inventor: Peter F. Vandermeulen
  • Publication number: 20200058464
    Abstract: An X-ray analyzer includes: an X-ray detector that detects an X-ray emitted from a specimen and outputs a signal having a step that has a height corresponding to energy of the X-ray; a pulse generation circuit that converts the signal output from the X-ray detector into a first pulse signal; a pulse-width setting circuit that sets a pulse width; a pulse-width conversion circuit that converts a pulse width of the first pulse signal into the pulse width set by the pulse-width setting circuit to form a second pulse signal; a pulse-height discriminator that discriminates the second pulse signal according to a pulse height of the second pulse signal; a counting circuit that calculates a counting rate of the discriminated second pulse signal; and a counting-loss correction processing unit that corrects the counting rate. The counting-loss correction processing unit corrects the counting rate based on the pulse width.
    Type: Application
    Filed: August 9, 2019
    Publication date: February 20, 2020
    Inventor: Kazunori Tsukamoto
  • Publication number: 20200058465
    Abstract: The present disclosure relates to a method includes generating ions with an ion source of an ion implantation apparatus based on an ion implantation recipe. The method includes accelerating the generated ions based on an ion energy setting in the ion implantation recipe and determining an energy spectrum of the accelerated ions. The method also includes analyzing a relationship between the determined energy spectrum and the ion energy setting. The method further includes adjusting at least one parameter of a final energy magnet (FEM) of the ion implantation apparatus based on the analyzed relationship.
    Type: Application
    Filed: August 13, 2019
    Publication date: February 20, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Hsiung LIN, Cheng-En LEE, Chia-Lin OU, Hsuan-Pang LIU, Yao-Jen YEH
  • Publication number: 20200058466
    Abstract: A plasma apparatus includes a remote plasma source, a substrate processing chamber, and a connector which connects the remote plasma source to the substrate processing chamber. The remote plasma source includes a continuous peripheral wall structure that surrounds an inner channel, and that includes an electrode structure that defines at least a part of an internal channel extending internally within the continuous peripheral wall structure in which the inductively coupled plasma can be sustained. The remote plasma source also includes an electrical signal supply device for supplying an electrical signal that drives the electrode structure, and a plasma outlet which is in communication with the internal channel. The connector is in connection with the plasma outlet of the remote plasma source and the substrate processing chamber so that at least some components of the inductively coupled plasma sustained in the internal channel can be introduced to the substrate processing chamber.
    Type: Application
    Filed: August 15, 2019
    Publication date: February 20, 2020
    Inventor: Paul Bennett
  • Publication number: 20200058467
    Abstract: A plasma processing apparatus includes a processing chamber, a part of which is formed of a dielectric window; a substrate supporting unit, provided in the processing chamber, for mounting a target substrate; a processing gas supply unit for supplying a processing gas to the processing chamber to perform a plasma process on the target substrate; an RF antenna, provided outside the dielectric window, for generating a plasma from the processing gas by an inductive coupling in the processing chamber; and an RF power supply unit for supplying an RF power to the RF antenna. The RF antenna includes a single-wound or multi-wound coil conductor having a cutout portion in a coil circling direction; and a pair of RF power lines from the RF power supply unit are respectively connected to a pair of coil end portions of the coil conductor that are opposite to each other via the cutout portion.
    Type: Application
    Filed: October 24, 2019
    Publication date: February 20, 2020
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Yohei YAMAZAWA, Kazuki DENPOH, Jun YAMAWAKU
  • Publication number: 20200058468
    Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.
    Type: Application
    Filed: January 4, 2018
    Publication date: February 20, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Kazuki TAKAHASHI, Yuki KAWADA, Naoki MATSUMOTO, Takahiro SENDA, Koji KOYAMA, Shohei FUKANO, Jun YOSHIKAWA, Hiroyuki KONDO, Takashi MINAKAWA
  • Publication number: 20200058469
    Abstract: A plasma processing system includes a vacuum chamber, a first coupling electrode, a substrate holder disposed in the vacuum chamber, a second coupling electrode, and a controller. The substrate holder is configured to support a substrate. The first coupling electrode is configured to provide power for generation of a plasma in the vacuum chamber. The first coupling electrode is further configured to couple source power pulses to the plasma. The second coupling electrode is configured to couple bias power pulses to the substrate. The controller is configured to control a first offset duration between the source power pulses the bias power pulses.
    Type: Application
    Filed: December 13, 2018
    Publication date: February 20, 2020
    Inventors: Alok Ranjan, Peter Ventzek, Mitsunori Ohata
  • Publication number: 20200058470
    Abstract: A method of plasma processing includes generating a first sequence of source power pulses, generating a second sequence of bias power pulses, combining the bias power pulses of the second sequence with the source power pulses of the first sequence to form a combined sequence of alternating source power pulses and bias power pulses, and, using the combined sequence, generating a plasma comprising ions and processing a substrate by delivering the ions to a major surface of the substrate.
    Type: Application
    Filed: December 17, 2018
    Publication date: February 20, 2020
    Inventors: Peter Ventzek, Zhiying Chen, Alok Ranjan
  • Publication number: 20200058471
    Abstract: In one embodiment, an RF impedance matching circuit is disclosed. The matching circuit is coupled between a plasma chamber and an RF source providing an RF signal having a frequency. The matching circuit includes a first electronically variable capacitor having a first variable capacitance and a second electronically variable capacitor having a second variable capacitance. A control circuit determines a first parameter related to the plasma chamber, and then determines, based on the first parameter, a first capacitance value for the first electronically variable capacitor and a second capacitance value for the second electronically variable capacitor. The control circuit then generates a control signal to alter the first variable capacitance and the second variable capacitance accordingly, causing the RF power reflected back to the RF source to decrease while the frequency of the RF source is not altered.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 20, 2020
    Inventors: Imran Ahmed Bhutta, Michael Gilliam Ulrich
  • Publication number: 20200058472
    Abstract: A compact cylindrical vacuum chamber made from a dielectric ceramic or glass wrapped with a cylindrical electrode connected to an RF source make a hollow cathode RF plasma source. The dielectric cylinder is used as the vacuum container with the conductive electrode outside the vacuum region to excite plasma inside. A gas is supplied by a gas source at low flow on one end of the cylinder and after being excited exhausts into a connected vacuum chamber carrying excited metastables and radicals. RF power is applied to the electrode to excite the plasma via the hollow cathode effect. This remote RF plasma source can be used to create ions, electrons, excited metastables, and atomic radicals for use downstream depending on choices of gas, pressure, flow rates, RF power and frequency, and extraction electrodes.
    Type: Application
    Filed: October 15, 2019
    Publication date: February 20, 2020
    Applicant: XEI Scientific, Inc.
    Inventor: Ronald A. Vane
  • Publication number: 20200058473
    Abstract: The present invention relates to an electrode pair for generating a linear plasma wherein the electrodes (21, 22) are segmented. More particularly, the present invention relates to a plasma source, for instance a hollow-cathode plasma source, comprising one or more plasma-generating electrode pairs wherein the electrodes are segmented. The present invention further relates to methods for controlling the uniformity of a linear plasma and also to methods for surface treating or coating substrates in a uniform way with linear plasma sources.
    Type: Application
    Filed: April 27, 2018
    Publication date: February 20, 2020
    Applicants: AGC GLASS EUROPE, AGC Inc., AGC GLASS COMPANY NORTH AMERICA, AGC VIDROS DO BRASIL LTDA
    Inventors: Hugues WIAME, John CHAMBERS, Marc DATZ
  • Publication number: 20200058474
    Abstract: A water molecule supply device for a plasma torch excitation device, comprising a flame outlet end formed at a bottom end of a plasma torch excitation device. The plasma torch excitation device has a water cavity therein, and the flame outlet end is fixed and provided with a mask body having a flame channel through which the plasma torch is ejected. A plurality of water guiding holes surrounding the flame channel are formed in the mask body, and the plurality of water guiding holes are respectively connected between the water cavity and the flame channel. The water molecules are supplied from the flame channel to be ejected so that water molecules contact the torch flame in the flame channel to capture the F2 gas so as to react into hydrogen fluoride (HF) which is more easily subjected to water washing filtration.
    Type: Application
    Filed: September 28, 2018
    Publication date: February 20, 2020
    Inventor: WU-YU FONG
  • Publication number: 20200058475
    Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.
    Type: Application
    Filed: October 25, 2019
    Publication date: February 20, 2020
    Inventors: Jan Peter Engelstaedter, Pawel Ozimek, Krzysztof Ruda, Jakub Swiatnicki
  • Publication number: 20200058476
    Abstract: A plasma treatment method is provided. The method includes generating a planar plasma in a plasma treatment chamber, observing an effective influence region of the planar plasma by using an optical observation system in which an observation lens has a transparent substrate and a fluorescent coating thereon, adjusting a location of the observation lens to observe a brightness change of the fluorescent coating and the transparent substrate to obtain a location and a thickness range of the effective influence region of the planar plasma, and then adjusting a location of the observation lens to observe a brightness change of the fluorescent coating and the transparent substrate to obtain a location and a thickness range of the effective influence region of the planar plasma. A location of a sample is adjusted to within the effective influence region, and a plasma treatment is then performed on the sample.
    Type: Application
    Filed: October 27, 2019
    Publication date: February 20, 2020
    Applicant: Industrial Technology Research Institute
    Inventor: Hung-Yuan Hsieh
  • Publication number: 20200058477
    Abstract: An electron multiplier production method including a main body portion, and a channel provided in the main body portion to open at one end surface and the other end surface of the main body portion and emits secondary electrons includes a first step of preparing a main body member including the one end surface and the other end surface, a communicating hole for the channel through which the one end surface and the other end surface communicate being provided in the main body member, a second step of forming the channel by forming a deposition layer including at least a resistive layer on an outer surface of the main body member and an inner surface of the communicating hole using an atomic layer deposition method, and a third step of forming the main body portion by removing the deposition layer formed on the outer surface of the main body member.
    Type: Application
    Filed: October 23, 2019
    Publication date: February 20, 2020
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Hiroshi KOBAYASHI, Ginji SUGIURA
  • Publication number: 20200058478
    Abstract: An apparatus for mass spectrometry and/or ion mobility spectrometry is disclosed comprising a first device arranged and adapted to generate aerosol, smoke or vapour from a target and one or more second devices arranged and adapted to aspirate aerosol, smoke, vapour and/or liquid to or towards an analyser. A liquid trap or separator is provided to capture and/or discard liquid aspirated by the one or more second devices.
    Type: Application
    Filed: October 24, 2019
    Publication date: February 20, 2020
    Inventors: Tamas KARANCSI, Lajos GODORHAZY, Daniel SZALAY, Zoltan TAKATS, Julia BALOG, Steven Derek PRINGLE, Daniel SIMON
  • Publication number: 20200058479
    Abstract: The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form factor and makes it well suited, in particular, for compact mass spectrometers and desk-top mass spectrometers.
    Type: Application
    Filed: July 29, 2019
    Publication date: February 20, 2020
    Inventors: Urs STEINER, Jochen FRANZEN
  • Publication number: 20200058480
    Abstract: The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors (42; 44) are biased at retarding gap (46). The system further comprises an exit disc electrode with an exit through hole centered about the exit axis, the intermediate electrode being biased at an intermediate voltage between the voltage of the housing and the average voltage of the sectors. The trajectories of the secondary ions become more parallel to the exit axis and become closer to the axis.
    Type: Application
    Filed: February 17, 2017
    Publication date: February 20, 2020
    Inventor: David Dowsett
  • Publication number: 20200058481
    Abstract: The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors are biased at retarding potentials in order to reduce the energy of the ion beam entering the deflecting gap. The system further comprises an exit disc electrode which is biased at the midvoltage of the average voltage of the sectors, and two side plates both facing the spherical sectors, the side plates being biased in order to create an electrostatic field perpendicular to the exit axis.
    Type: Application
    Filed: February 17, 2017
    Publication date: February 20, 2020
    Inventor: David Dowsett
  • Publication number: 20200058482
    Abstract: The present invention addresses the problem of providing a polishing method for polishing a silicon carbide substrate, which is capable of increasing the polishing speed even when using a polishing pad that usually does not lead to an increase in polishing speed. A polishing method for polishing a silicon carbide substrate, the polishing method including a primary polishing step of polishing with a polishing member A containing abrasive grains using a polishing pad, the primary polishing step being polishing performed in association with a solid-phase reaction between the abrasive grains and the silicon carbide substrate.
    Type: Application
    Filed: February 6, 2018
    Publication date: February 20, 2020
    Applicant: FUJIMI INCORPORATED
    Inventors: Kazuma Toujinbara, Naoya Miwa, Keiji Ashitaka
  • Publication number: 20200058483
    Abstract: A semiconductor substrate processing method includes: a peeling layer forming step of forming a peeling layer by irradiating a first semiconductor substrate with a laser beam having a wavelength capable of passing through the first semiconductor substrate while positioning a focal point of the laser beam within the first semiconductor substrate; a second semiconductor substrate forming step of forming a second semiconductor substrate by epitaxial growth on an upper surface of the first semiconductor substrate after performing the peeling layer forming step; a peeling step of peeling off the first semiconductor substrate from the peeling layer; and a grinding step of grinding and removing the first semiconductor substrate after performing the peeling step.
    Type: Application
    Filed: August 8, 2019
    Publication date: February 20, 2020
    Inventor: Kazuya HIRATA
  • Publication number: 20200058484
    Abstract: Provided are abrasive grains, an evaluation method and a wafer manufacturing method. A predetermined amount of abrasive grains is prepared as an abrasive grain sample group, the grain diameter of individual abrasive grains in the abrasive grain sample group is measured, the number of abrasive grains in the abrasive grain sample group as a whole is counted, abrasive grains having a grain diameter equal to or smaller than a predetermined reference grain e diameter criterion which is smaller than the average grain diameter of the abrasive grain sample are defined as small grains and the number of the small grains is counted, a small grain ratio is calculated as the number ratio of the small grains occupied in the abrasive grain sample group as a whole, and a determination is made as to whether or not the small grain ratio is equal to or smaller than a predetermined threshold value.
    Type: Application
    Filed: September 7, 2017
    Publication date: February 20, 2020
    Applicant: SUMCO Corporation
    Inventor: Makoto FUNAYAMA
  • Publication number: 20200058485
    Abstract: An integrated circuit a semiconductor substrate includes a device die with includes transistors configured to execute an electrical function. A first interconnect layer of the device die is configured to route electrical signals or power to terminals of the transistors. An interlevel dielectric (ILD) layer is located over the interconnect layer. A metal electrode located over the ILD layer. A dielectric barrier layer is located between the ILD layer and the metal electrode. A scribe seal surrounds the device die. A first opening within the dielectric barrier layer surrounds the metal electrode. Second and third openings within the dielectric barrier layer are located between the first opening and the scribe seal.
    Type: Application
    Filed: August 16, 2019
    Publication date: February 20, 2020
    Inventors: Jeffrey Alan West, Adrian Salinas, Elizabeth C. Stewart, Dhanoop Varghese, Thomas D. Bonifield
  • Publication number: 20200058486
    Abstract: Embodiments of semiconductor structures for wafer flatness control and methods for using and forming the same are disclosed. In an example, a model indicative of a flatness difference of a wafer between a first direction and a second direction is obtained. The flatness difference is associated with one of a plurality of fabrication stages of a plurality of semiconductor devices on a front side of the wafer. A compensation pattern is determined for reducing the flatness difference based on the model. At the one of the plurality of the fabrication stages, a compensation structure is formed on a backside opposite to the front side of the wafer based on the compensation pattern to reduce the flatness difference.
    Type: Application
    Filed: September 24, 2018
    Publication date: February 20, 2020
    Inventors: Xiaowang Dai, Zhenyu Lu, Qian Tao, Yushi Hu, Ji Xia, Zhaosong Li, Jialan He
  • Publication number: 20200058487
    Abstract: A method of treating a semiconductor substrate includes converting a first main side of the semiconductor substrate having a first coefficient of static friction relative to a surface of a wafer table to a second coefficient of static friction relative to the surface of the wafer table, wherein the second coefficient of static friction is less than the first coefficient of static friction. A photoresist layer is applied over a second main side of the semiconductor substrate having the first coefficient of static friction. The second main side opposes the first main side. The semiconductor substrate is placed on the wafer table so that the first main side of the semiconductor substrate faces the wafer table.
    Type: Application
    Filed: August 15, 2019
    Publication date: February 20, 2020
    Inventors: Chung-Hao CHANG, Chitong CHEN
  • Publication number: 20200058488
    Abstract: A method for manufacturing a semiconductor device according to an, exemplary embodiment of the present disclosure includes: forming a semiconductor layer on a substrate in a chamber; and forming a semiconductor layer on a substrate in a chamber. Forming the insulation layer includes: (a) injecting precursors that include a metal into a surface of the semiconductor layer; (b) removing precursors that are not adsorbed; (c) injecting reactants onto the surface of the semiconductor layer; and (d) removing residual reactants. The semiconductor layer includes a semiconductor material that has a layered structure.
    Type: Application
    Filed: June 13, 2019
    Publication date: February 20, 2020
    Inventors: Jun Hyung Lim, Hyung Jun Kim, Sun Hee Lee, Seung Gi Seo, Whang Je Woo
  • Publication number: 20200058489
    Abstract: A semiconductor device including a nanostructure, comprising a planar layer (1020) of a Ill-nitride semiconductor crystal, which layer includes an array of epitaxially grown nanowire structures (1010), and semiconductor material (1016) which is redistributed from said nanowire structures in a reformation step after epitaxial growth, arranged to fill out a spacing between the nanowire structures, wherein the array of nanowire structures and the semiconductor material form a coherent layer.
    Type: Application
    Filed: October 5, 2017
    Publication date: February 20, 2020
    Inventor: Jonas Ohlsson