Patents Issued in November 12, 2020
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Publication number: 20200357577Abstract: An improved capacitor is provided wherein the capacitor comprises a conductive polymer layer. The conductive polymer comprises first particles comprising conductive polymer and polyanion and second particles comprising the conductive polymer and said polyanion wherein the first particles have an average particle diameter of at least 1 micron to no more than 10 microns and the second particles have an average particle diameter of at least 1 nm to no more than 600 nm.Type: ApplicationFiled: July 28, 2020Publication date: November 12, 2020Inventors: Ajaykumar Bunha, Antony P. Chacko, Yaru Shi, Qingping Chen, Philip M. Lessner
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Publication number: 20200357578Abstract: Provided are a boron-doped nanodiamond having a large specific surface area and high electrical conductivity, an electrode containing the boron-doped nanodiamond, and a sensor or an electricity storage device provided with the electrode. The boron-doped nanodiamond of the present invention has a specific surface area of 110 m2/g or greater and electrical conductivity at 20° C. of 5.0×10?3 S/cm or greater. The boron-doped nanodiamond preferably has a median diameter of 200 nm or smaller. Additionally, the electrode of the present invention contains the boron-doped nanodiamond.Type: ApplicationFiled: August 28, 2018Publication date: November 12, 2020Applicants: DAICEL CORPORATION, TOKYO UNIVERSITY OF SCIENCE FOUNDATIONInventors: Takeshi KONDO, Tatsuo AIKAWA, Makoto YUASA, Kenjo MIYASHITA, Masahiro NISHIKAWA, Takahiro TEI
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Publication number: 20200357579Abstract: An aqueous electrolyte for a pseudo-capacitor and a pseudo-capacitor comprising the same, and more particularly an aqueous electrolyte for a pseudo-capacitor comprising an aqueous solvent, and a certain concentration or more of a lithium salt and a zwitterionic compounds, and a pseudo-capacitor comprising the aqueous electrolyte described above.Type: ApplicationFiled: August 12, 2019Publication date: November 12, 2020Inventors: Donghoon SUH, Seokhyun YOON
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Publication number: 20200357580Abstract: Device, circuit, system, and method for contact sequencing are discussed. An electrical circuit includes a first pair of terminals adapted to be connected across a first set of switchable contacts, and a second pair of terminals adapted to be connected across a second set of switchable contacts that are coupled to an arc suppression circuit. A controller circuit is coupled to the first and second pairs of terminals and is configured to sequence activation or deactivation of the first and second sets of contacts based on a contact control signal. A first power switching circuit is coupled to the first pair of terminals and the controller circuit. The first power switching circuit is configured to switch power from an external power source and to trigger the activation or the deactivation of the first set of switchable contacts based on a first logic state signal from the controller circuit.Type: ApplicationFiled: June 23, 2020Publication date: November 12, 2020Inventors: Reinhold Henke, Robert Thorbus
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Publication number: 20200357581Abstract: A keyswitch device which is provided with a support mechanism which supports a keytop in a movable manner, and a membrane sheet which has a plurality of upper electrodes and a plurality of lower electrodes which respectively correspond to the plurality of the upper electrodes and which form contact pairs with the corresponding upper electrodes. A plurality of contact pairs are arranged for a single keytop. The rubber cup pushes the plurality of contact pairs which are arranged for the single keytop.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Applicant: FUJITSU COMPONENT LIMITEDInventors: Hiromi OHTSUKA, Daisuke TAGA, Takuya SAITOU, Momosuke NAKAHARA
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Publication number: 20200357582Abstract: A mechatronic module includes: a hybrid circuit arrangement having at least one interrupter, which interrupter includes at least one first mechanical switch and at least one first semiconductor circuit arrangement. The hybrid circuit arrangement is situated on a first face of a ceramic substrate, a second face, opposite the first face, of the ceramic substrate being connected to a metal plate. A housing shell is fastened to the metal plate and encloses the ceramic substrate and the hybrid circuit arrangement. The metal plate and the housing shell form a housing of the mechatronic module. Interstices within the housing are filled at least in some regions with a potting compound.Type: ApplicationFiled: November 9, 2018Publication date: November 12, 2020Inventor: Kenan Askan
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Publication number: 20200357583Abstract: A keyswitch structure includes a keycap, a baseplate having a buffer space, a support movably disposed between the baseplate and the keycap, a magnetic member having a front section coupling the support, a middle section and a tail end, a magnetic unit disposed below the magnetic member, a switch film having a flexible portion extending over the buffer space. When the keycap is pressed, the support enables the magnetic member to move away from the magnetic unit, so the tail end is away from the flexible portion. When the keycap is released, a magnetic attraction force between the magnetic member and the magnetic unit enables the magnetic member to move toward the magnetic unit, so the tail end firstly contacts and pushes the flexible portion to deform toward the buffer space, and then the middle section contacts the magnetic unit to drive the support to support the keycap upward.Type: ApplicationFiled: May 8, 2020Publication date: November 12, 2020Inventors: Sung-Fu YANG, Po-Chun HOU
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Publication number: 20200357584Abstract: An electro-permanent magnet key assembly may comprise an electro-permanent magnet generating a magnetic field when a direction of current applied to an electrically conductive wire coiled around a low-coercivity magnet, and a pair of scissor plates operably connected to the electropermanent magnet, such that the scissor plates rotate away from one another in the presence of downward force on a key cap situated atop the scissor plates. The top surface of the key cap may lie flush with adjacent keys of a keyboard when the key cap is in a neutral position. The electro-permanent magnet key assembly may further comprise a ferromagnetic flange operably connected to one of the scissor plates having angled overlap protrusions situated adjacent to the electropermanent magnet when the key cap is not in the neutral position, such that the angled overlap protrusions are attracted toward the magnetic field to return the key cap to the neutral position.Type: ApplicationFiled: May 7, 2019Publication date: November 12, 2020Applicant: Dell Products, LPInventors: Jason S. Morrison, Laurent A. Regimbal
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Publication number: 20200357585Abstract: This limiter pole (B) for a multipole DC electrical switch (2) comprises a compartment in which an input terminal and an output terminal for a direct electric current are provided, along with a first electrical contact connected to the input terminal and a second electrical contact connected to the output terminal, third and fourth electrical contacts connected to one another in series, the third and fourth contacts being capable of being moved simultaneously relative to the first and second electrical contacts, respectively, between a closed position, in which the first and third contacts and the second and fourth contacts make contact with one another so as to allow the direct electric current to flow between the input terminal and the output terminal, and an open position, in which said contacts are located away from one another, interrupting the flow of the current between the input terminal and the output terminal.Type: ApplicationFiled: April 8, 2020Publication date: November 12, 2020Applicant: Schneider Electric Industries SASInventors: Eric DOMEJEAN, Marc RIVAL, Daniel ROTA, Stéphane DYE
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Publication number: 20200357586Abstract: A gas circuit breaker of an embodiment includes a sealed container, a first contact part and a second contact part, an operation mechanism, an insulating nozzle, a pressure accumulator, and an electric field shield. The insulating nozzle is displaced in conjunction with the first contact part in a separation process of the first contact part and the second contact part. The insulating nozzle surrounds arc discharge generated between the first contact part and the second contact part. The electric field shield is attached to the insulating nozzle. The electric field shield has a floating potential during a period of at least part of the separation process. The electric field shield is electrically connected to the second contact part such that the electric field shield has the same potential in a completely open electrode state in which separation between the first contact part and the second contact part is terminated.Type: ApplicationFiled: July 29, 2020Publication date: November 12, 2020Applicants: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATIONInventors: Amane MAJIMA, Tooru INOUE, Toshiyuki UCHII, Norimitsu KATO, Akira SHIMAMURA, Takanori YASUOKA, Tsutomu TANAKA, Tadashi MORI
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Publication number: 20200357587Abstract: An insulating molded body to be used for an arc extinguishing device of a gas circuit breaker is provided. The insulating molded body includes a fluororesin mixture which contains a fluororesin and an oxygen generator configured to generate oxygen through thermal decomposition at 450° C. or more and 1,150° C. or less with an arc generated when a conduction current is interrupted. The oxygen generator is dispersed in the fluororesin. Also provided is a gas circuit breaker including an insulating nozzle formed of the insulating molded body.Type: ApplicationFiled: October 30, 2018Publication date: November 12, 2020Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Shuichi HIZA, Takashi KAWANA, Fumihiko HOSOKOSHI, Motohiro SATO, Kenji MIMURA
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Publication number: 20200357588Abstract: A protective cover assembly for an electrical wall switch disposed on a wall in which the electrical wall switch has an actuator physically contactable and actuatable by a user for controlling electrical power to a load from an electrical power source. The protective cover assembly may include an enclosure and a connector for connecting the enclosure over the electrical wall switch to inhibit a user from physically contacting and actuating the actuator. A first magnetic material member is attached to or disposed in the actuator. A tool includes a second magnetic material member. When the tool is moved relative to the outer surface of the enclosure, a magnetic force acting through the enclosure is operable to move the actuator from a first position to a second position thereby moving the actuator for controlling electrical power to the electrical load.Type: ApplicationFiled: May 6, 2020Publication date: November 12, 2020Inventor: JEFFREY A. STALLMER
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Publication number: 20200357589Abstract: A temperature-dependent switch which comprises a first and a second stationary counter contact and a temperature-dependent switching mechanism having a current transfer member. The switching mechanism, depending on its temperature, either closes the switch by pressing the current transfer member against the first and the second counter contact and thereby establishing an electrically conductive connection between the two counter contacts via the current transfer member, or opens the switch by keeping the current transfer member at a distance from the first and the second counter contact and thereby interrupting the electrically conductive connection. A closing lock is provided, which keeps the switch open when it has been opened for the first time. The closing lock comprises a spring washer which directly interacts with the current transfer member and mechanically locks the latter permanently when the switch has been opened for the first time so that the switch remains permanently open.Type: ApplicationFiled: May 4, 2020Publication date: November 12, 2020Inventor: Marcel P. Hofsaess
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Publication number: 20200357590Abstract: The present invention relates to the technical field of temperature controllers, and more particularly, to a backpack power-off reset temperature limiter, which comprises an insulating base, a first terminal, a second terminal, a power-receiving elastic piece and an arch-shaped temperature sensing sheet. The power-receiving elastic piece is arranged on the upper end surface of the insulating base. One end of the power-receiving elastic piece is fixedly connected with the first terminal, and the other free end of the power-receiving elastic piece is electrically connected with the second terminal. The two ends of the power-receiving elastic piece are respectively provided with a fixing clamping position that is clamped with an end part of the temperature sensing sheet, and the two sides of the power-receiving elastic piece are respectively provided with an assembly clamping position that is matched with the temperature sensing sheet.Type: ApplicationFiled: August 8, 2019Publication date: November 12, 2020Inventor: Hehua LI
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Publication number: 20200357591Abstract: A connection unit includes: an electromagnetic relay having a housing, a first fixed contact side terminal, a second fixed contact side terminal, and a movable touch piece; a first bus bar extending on an outside of the housing along a bus bar installation surface in an arrangement direction, and whose one end in the arrangement direction is connected to the first fixed contact side terminal; a second bus bar connected to the second fixed contact side terminal on the outside of the housing; and a bus bar position restrictor arranged on the bus bar installation surface with a gap in the arrangement direction from a connection point, and configured to restrict a position of the first bus bar in a contact/separation direction and in a direction away from the bus bar installation surface.Type: ApplicationFiled: July 2, 2018Publication date: November 12, 2020Applicant: Omron CorporationInventors: Ryota Minowa, Shingo Mori
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Publication number: 20200357592Abstract: A circuit breaker for interrupting a direct current, in particular in a power supply system in a vehicle having a main current path that includes a switch, and having a reed relay for detecting an electric current flow across the main current path. The switch is coupled to the reed relay. Also, a use of a circuit breaker is provided.Type: ApplicationFiled: July 23, 2020Publication date: November 12, 2020Applicant: ELLENBERGER & POENSGEN GMBHInventors: Hendrik-Christian KOEPF, Ernst-Dieter WILKENING
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Publication number: 20200357593Abstract: A high-capacity miniature cartridge fuse is provided. A fuse includes a cylindrical housing, a fusible wire, and first and second deep-drawn ferrules fabricated from aluminum alloy. The aluminum is plated with nickel. The ferrule includes a side wall and an end wall. The side wall surrounds the first or second end of the housing, and has a thickness of approximately 0.50 mm or less. The end wall includes a boss extending toward an interior of the housing, and has a thickness greater than the thickness of the side wall.Type: ApplicationFiled: May 6, 2019Publication date: November 12, 2020Inventors: Ramdev Kanapady, Hui Calvin Yang, Gang Duren Huang, Nicholas Stone
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Publication number: 20200357594Abstract: An exemplary embodiment of active/passive automotive fuse module in accordance with the present disclosure may include an electrically insulating base, a fuse plate including a bus bar portion disposed on a top surface of the base above a projectile cavity formed in the base, the fuse plate further including a fusible portion electrically connected to the bus bar portion and adapted to open when an amount of current flowing through the fuse plate exceeds a current rating of the active/passive automotive fuse module, the active/passive automotive fuse module further including a pyrotechnic interrupter (PI) disposed atop the base and including a projectile positioned above the bus bar portion, the PI configured to drive the projectile through the bus bar portion upon actuation of the PI.Type: ApplicationFiled: April 21, 2020Publication date: November 12, 2020Applicant: Littelfuse, Inc.Inventors: Julio C. Urrea, Gary M. Bold, Juergen Scheele
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Publication number: 20200357595Abstract: A field emission electron source and a method of manufacturing the same. A field emission electron source comprises an emitting electrode and an extractor gate electrode. The emitting electrode comprising a plurality of particles with nanosharp protrusions. The extractor gate electrode comprises a metal. The extractor gate electrode is formed in a same plane as the emitting electrode. The extractor gate electrode is formed surrounding the emitting electrode. A method of manufacturing a field emission electron source comprises forming an emitting electrode comprising a plurality of particles with nanosharp protrusions using a direct ink writing (DIW) printer. The method comprises forming an extractor gate electrode comprising a metal using the DIW printer.Type: ApplicationFiled: May 6, 2020Publication date: November 12, 2020Applicants: Massachusetts Institute of Technology, Instituto Tecnológico y de Estudios Superiores de MonterreyInventors: Luis Fernando Velásquez-García, Imperio Perales-Martinez
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Publication number: 20200357596Abstract: An ion generator includes a high-voltage transformer having a secondary side that is not grounded; a discharge wire-pattern; an induction wire-pattern; a discharge electrode connected to a first terminal via the discharge wire-pattern, the first terminal being disposed on the secondary side of the high-voltage transformer; and an induction electrode connected to a second terminal via the induction wire-pattern, the second terminal being disposed on the secondary side of the high-voltage transformer. The first terminal has a first width. The discharge wire-pattern includes a discharge wide region having a second width greater than the first width. The discharge wide region and the induction wire-pattern at least partly overlap each other in plan view.Type: ApplicationFiled: April 29, 2020Publication date: November 12, 2020Inventors: NOBUYUKI OHE, TETSUYA EZAKI, SATOSHI OKANO
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Publication number: 20200357597Abstract: The object of the present invention is to provide a cold cathode X-ray tube capable of being driven stably over a long period of time by preventing temporal reduction in anode current. A cold cathode X-ray tube 1 comprises an electron emission part 10 including an electron emission element using a cold cathode, an anode part 11 disposed opposite to the electron emission part 10, a target 12 disposed on a part of a surface of the anode part 11, a housing 15 in which the electron emission part 10, the anode part 11, and the target 12 are disposed, and a hydrogen generation part 14 that is made of a material that generates hydrogen when receiving collision of electrons and disposed on a portion other than the surface of the target 12 out of surfaces existing in the housing 15.Type: ApplicationFiled: January 29, 2019Publication date: November 12, 2020Inventor: KENMOTSU HIDENORI
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Publication number: 20200357598Abstract: A rotary anode driving device includes a DC power supply, an inverter circuit which is connected to the DC power supply and includes a plurality of switching elements and, the inverter circuit generates an AC voltage from a DC voltage of the DC power supply, and outputs the AC voltage to a stator coil which generates a rotating magnetic field of an X-ray tube; a pulse width modulation (PWM) waveform generator configured to generate an AC voltage of two phases or three phases as the AC voltage from the DC voltage by performing PWM control of the switching elements of the inverter circuit; and a capacitor connected in series to an input side of a stator coil of at least one phase of the stator coil, the capacitor having an electrostatic capacitance constituting a series resonant circuit with the stator coil to which the capacitor is connected.Type: ApplicationFiled: May 7, 2019Publication date: November 12, 2020Inventor: Yasuhiro DEMURA
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Publication number: 20200357599Abstract: A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.Type: ApplicationFiled: July 27, 2020Publication date: November 12, 2020Applicant: UIH AMERICA, INC.Inventor: Jonathan MALTZ
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Publication number: 20200357600Abstract: A multi-beam charged particle system includes: a vacuum enclosure having an opening covered by a door; a particle source configured to generate charged particles, wherein the particle source is arranged within the vacuum enclosure; at least one multi-aperture plate module including at least one multi-aperture plate and a base; and a transfer box having an opening covered by a door. The at least one multi-aperture plate includes a plurality of apertures. The base is configured to hold the at least one multi-aperture plate. The base is configured to be fixed relative to the vacuum enclosure such that the multi-aperture plate module is arranged in an interior of the vacuum enclosure such that, during operation of the particle beam system, particles traverse the plural multi-aperture plates through the apertures of the plates.Type: ApplicationFiled: July 28, 2020Publication date: November 12, 2020Inventors: Dirk Zeidler, Thomas Kemen, Christof Riedesel, Ralf Lenke, Joerg Jacobi
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Publication number: 20200357601Abstract: There is provided a technology for imparting attenuation while maintaining rigidity of a support member that reduces vibration of a sample stage when disturbance such as an environmental sound is applied to a device and vibrates the sample stage. A charged particle beam device according to the present disclosure includes a sample stage that can move a sample, an attenuation unit that attenuates vibration of the sample stage, and a sample chamber that stores the sample stage and the attenuation unit. In the charged particle beam device, the sample stage and the attenuation unit are disposed so as to be horizontal to each other. Also, the sample stage is configured to be supported so as to be sandwiched between the attenuation unit and a first side surface of a casing, and the inside of the casing of the attenuation unit is filled with a plural number of friction bodies.Type: ApplicationFiled: May 25, 2018Publication date: November 12, 2020Inventors: Hirohisa ENOMOTO, Wataru SUZUKI, Munekazu KOYANAGI, Shigeru HANEDA, Hideki KIKUCHI
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Publication number: 20200357602Abstract: An object of the present invention is to provide a technique for reducing a phenomenon in which fine particles derived from a sample and bounced off by ion beam irradiation are reattached to an ion milling surface. An ion milling device of the invention includes an ion source which emits an ion beam, a chamber, a sample table in which a sample is placed in the chamber, and a shielding plate placed on the sample, and by having a magnet disposed in the chamber, reattachment of fine particles derived from the sample can be reduced.Type: ApplicationFiled: September 15, 2017Publication date: November 12, 2020Inventors: Asako KANEKO, Hisayuki TAKASU
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Publication number: 20200357603Abstract: An ion implantation system, including an ion source, and a buncher to receive a continuous ion beam from the ion source, and output a bunched ion beam. The buncher may include a drift tube assembly, having an alternating sequence of grounded drift tubes and AC drift tubes. The drift tube assembly may include a first grounded drift tube, arranged to accept a continuous ion beam, at least two AC drift tubes downstream to the first grounded drift tube, a second grounded drift tube, downstream to the at least two AC drift tubes. The ion implantation system may include an AC voltage assembly, coupled to the at least two AC drift tubes, and comprising at least two AC voltage sources, separately coupled to the at least two AC drift tubes. The ion implantation system may include a linear accelerator, comprising a plurality of acceleration stages, disposed downstream of the buncher.Type: ApplicationFiled: July 14, 2020Publication date: November 12, 2020Applicant: Varian Semiconductor Equipment Associates, Inc.Inventor: Frank Sinclair
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Publication number: 20200357604Abstract: In one embodiment, a charged particle beam writing method includes virtually dividing a writing region of the substrate into a plurality of first mesh regions in a first mesh size, calculating an area density of the pattern for each of the plurality of first mesh regions to generate first mesh data, converting a mesh size of the first mesh data into a second mesh size greater than the first mesh size to generate second mesh data, performing a convolution operation between the second mesh data and a proximity effect correction kernel to generate third mesh data, converting a mesh size of the third mesh data into the first mesh size to generate fourth mesh data, performing a convolution operation between the first mesh data and a middle range effect correction kernel to generate fifth mesh data, and adding the fourth mesh data and the fifth mesh data together to calculate an irradiation amount of the charged particle beam for each of the plurality of first mesh regions.Type: ApplicationFiled: March 27, 2020Publication date: November 12, 2020Applicant: NuFlare Technology, Inc.Inventors: Kenichi YASUI, Yasuo KATO
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Publication number: 20200357605Abstract: In one embodiment, a charged particle beam writing method includes dividing a figure pattern defined in writing data into a plurality of shot figures, virtually dividing a writing target substrate into a plurality of mesh regions, and calculating a correction irradiation amount to correct proximity effect and middle range effect for each of the mesh regions based on a position of the figure pattern, calculating an irradiation amount for each of the plurality of shot figures using the correction irradiation amount, calculating an insufficient irradiation amount at an edge portion of the shot figure based on the irradiation amount, resizing the shot figure based on the insufficient irradiation amount, and writing the resized shot figure on the writing target substrate using a charged particle beam in the irradiation amount.Type: ApplicationFiled: March 27, 2020Publication date: November 12, 2020Applicant: NuFlare Technology, Inc.Inventor: Kenichi YASUI
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Publication number: 20200357606Abstract: A plasma processing apparatus includes: an evacuable processing chamber including a dielectric window; a substrate supporting unit, provided in the processing chamber, for mounting thereon a target substrate; a processing gas supply unit for supplying a desired processing gas to the processing chamber to perform a plasma process on the target substrate; a first RF antenna, provided on the dielectric window, for generating a plasma by an inductive coupling in the processing chamber; and a first RF power supply unit for supplying an RF power to the first RF antenna. The first RF antenna includes a primary coil provided on or above the dielectric window and electrically connected to the first RF power supply unit; and a secondary coil provided such that the coils are coupled with each other by an electromagnetic induction therebetween while being arranged closer to a bottom surface of the dielectric window than the primary coil.Type: ApplicationFiled: May 1, 2020Publication date: November 12, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Yohei YAMAZAWA, Masashi SAITO, Kazuki DENPOH, Chishio KOSHIMIZU, Jun YAMAWAKU
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Publication number: 20200357607Abstract: Some embodiments include a plasma system comprising: a plasma chamber, an RF plasma generator, a bias generator, and a controller. The RF plasma generator may be electrically coupled with the plasma chamber and may produce a plurality of RF bursts, each of the plurality of RF bursts including RF waveforms, each of the plurality of RF bursts having an RF burst turn on time and an RF burst turn off time. The bias generator may be electrically coupled with the plasma chamber and may produce a plurality of bias bursts, each of the plurality of bias bursts including bias pulses, each of the plurality of bias bursts having an bias burst turn on time and an bias burst turn off time. In some embodiments the controller is in communication with the RF plasma generator and the bias generator that controls the timing of various bursts or waveforms.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Timothy Ziemba, Kenneth Miller, James Prager, Kevin Muggli, Eric Hanson
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Publication number: 20200357608Abstract: Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.Type: ApplicationFiled: May 24, 2019Publication date: November 12, 2020Applicant: Newpowerplasma Co., Ltd.Inventors: Seunghee Ryu, Soonsang Hwang, Younghee Jang
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Publication number: 20200357609Abstract: Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.Type: ApplicationFiled: January 10, 2020Publication date: November 12, 2020Applicant: Newpowerplasma Co., Ltd.Inventors: Seunghee RYU, Soonsang HWANG, Younghee JANG
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Publication number: 20200357610Abstract: In one embodiment, a method of matching an impedance is disclosed. A matching network includes an electronically variable reactance element (EVRE) comprising discrete reactance elements and corresponding switches. For a determined parameter, potential new positions for the EVRE are determined, the potential new positions having differing effectiveness in causing an impedance match between an RF source and a plasma chamber. The discrete reactance elements of the EVRE that are currently restricted from switching are determined. A preferred position for the EVRE is determined as being the one of the potential new positions that provides greatest effectiveness in providing an impedance match while also not requiring switching in or out of any of the discrete reactance elements that are currently restricted from switching.Type: ApplicationFiled: July 22, 2020Publication date: November 12, 2020Inventor: Imran Ahmed BHUTTA
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Publication number: 20200357611Abstract: An apparatus may include a main chamber, a substrate holder, disposed in a lower region of the main chamber, and defining a substrate region, as well as an RF applicator, disposed adjacent an upper region of the main chamber, to generate an upper plasma within the upper region. The apparatus may further include a central chamber structure, disposed in a central portion of the main chamber, where the central chamber structure is disposed to shield at least a portion of the substrate position from the upper plasma. The apparatus may include a bias source, electrically coupled between the central chamber structure and the substrate holder, to generate a glow discharge plasma in the central portion of the main chamber, wherein the substrate region faces the glow discharge region.Type: ApplicationFiled: May 10, 2019Publication date: November 12, 2020Applicant: APPLIED Materials, Inc.Inventors: Vikram M. Bhosle, Christopher J. Leavitt, Guillermo Colom, Timothy J. Miller
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Publication number: 20200357612Abstract: A method of wafer processing includes supporting a wafer in a process chamber. The method further includes introducing a flow of a gaseous material through an inlet of the process chamber to process the wafer. The method further includes generating, between the inlet and the wafer, controllable forces acting in various directions on the gaseous material to spread the gaseous material inside the process chamber.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Chien Kuo HUANG, Shih-Wen HUANG, Joung-Wei LIOU, Chia-I SHEN, Fei-Fan CHEN
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Publication number: 20200357613Abstract: The present inventive concept relates to a substrate treatment apparatus comprising: a support part for supporting a substrate; a first electrode part disposed above the support part; a second electrode part disposed above the first electrode part; a generation hole formed to extend through the first electrode part; and a protruding electrode coupled to the second electrode part while protruding downward from the second electrode part at a position corresponding to the generation hole, wherein the protruding electrode is formed to have a shorter length than the first electrode part in the vertical direction.Type: ApplicationFiled: January 29, 2019Publication date: November 12, 2020Inventors: WOONG KYO OH, Hyun Ho KOO, Kwang Su YOO, Sang Du LEE, Kyu jung CHO
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Publication number: 20200357614Abstract: An ECR (Electron Cyclotron Resonance) ion source includes a plasma chamber having a circular cylindrical cross-section, magnets for generating a magnetic field for confinement of the plasma in the plasma chamber, and a microwave generator disposed outside the plasma chamber and generating at least two microwave signals. Several antennas protrude radially into the plasma chamber with a predetermined angular offset ?. The antennas receive phase-shifted microwave signals from the microwave generator and radiate linearly polarized microwaves, which in turn produce a circularly polarized microwave inside the plasma chamber. A method for operating an ECR ion source is also described.Type: ApplicationFiled: May 7, 2020Publication date: November 12, 2020Applicant: Dreebit GmbHInventor: ALEXANDRA PHILIPP
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Publication number: 20200357615Abstract: Implementations of the present disclosure relate to methods and systems for abating F-gases present in the effluent of semiconductor manufacturing processes. In one implementation, a method for abating effluent exiting a processing chamber is provided. The method begins by flowing an effluent from a processing chamber into a plasma source, wherein the effluent comprises one or more F-gases. The method further includes delivering at least one abating reagent to the plasma source, the abating reagent comprising at least one of water vapor and oxygen-containing gas, at operation. The method further includes activating the effluent and the abating reagent in the presence of a plasma to convert the one or more F-gases in the effluent and the abating reagent to an abated material.Type: ApplicationFiled: July 27, 2020Publication date: November 12, 2020Inventor: Colin John DICKINSON
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Publication number: 20200357616Abstract: Embodiments of the invention generally provide a processing chamber used to perform a physical vapor deposition (PVD) process and methods of depositing multi-compositional films. The processing chamber may include: an improved RF feed configuration to reduce any standing wave effects; an improved magnetron design to enhance RF plasma uniformity, deposited film composition and thickness uniformity; an improved substrate biasing configuration to improve process control; and an improved process kit design to improve RF field uniformity near the critical surfaces of the substrate. The method includes forming a plasma in a processing region of a chamber using an RF supply coupled to a multi-compositional target, translating a magnetron relative to the multi-compositional target, wherein the magnetron is positioned in a first position relative to a center point of the multi-compositional target while the magnetron is translating and the plasma is formed, and depositing a multi-compositional film on a substrate.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Adolph Miller ALLEN, Lara HAWRYLCHAK, Zhigang XIE, Muhammad M. RASHEED, Rongjun WANG, Xianmin TANG, Zhendong LIU, Tza-Jing GUNG, Srinivas GANDIKOTA, Mei CHANG, Michael S. COX, Donny YOUNG, Kirankumar SAVANDAIAH, Zhenbin GE
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Publication number: 20200357617Abstract: A collimator that is biasable is provided. The ability to bias the collimator allows control of the electric field through which the sputter species pass. In some implementations of the present disclosure, a collimator that has a high effective aspect ratio while maintaining a low aspect ratio along the periphery of the collimator of the hexagonal array of the collimator is provided. In some implementations, a collimator with a steep entry edge in the hexagonal array is provided. It has been found that use of a steep entry edge in the collimator reduces deposition overhang and clogging of the cells of the hexagonal array. These various features lead to improve film uniformity and extend the life of the collimator and process kit.Type: ApplicationFiled: June 24, 2020Publication date: November 12, 2020Inventors: Martin Lee RIKER, Fuhong ZHANG, Anthony INFANTE, Zheng WANG
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Publication number: 20200357618Abstract: Methods for testing or adjusting a charged-particle detector are provided. A diagnostic and/or adjustment method for a charged-particle detector of an instrument includes providing, from a photon source, photons incident on the charged-particle detector. Moreover, the method includes detecting a response by the charged-particle detector to the photons incident thereon. Related detection systems are also provided.Type: ApplicationFiled: April 23, 2020Publication date: November 12, 2020Inventor: James Arthur VanGordon
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Publication number: 20200357619Abstract: Certain configurations described herein are directed to mass spectrometer systems that can use a gas mixture to select and/or detect ions. In some instances, the gas mixture can be used in both a collision mode and in a reaction mode to provide improved detection limits using the same gas mixture.Type: ApplicationFiled: March 31, 2020Publication date: November 12, 2020Inventors: Pritesh Patel, Chady Stephan, Fadi Abou-Shakra
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Publication number: 20200357620Abstract: The invention generally relates to methods and devices for synchronization of ion generation with cycling of a discontinuous atmospheric interface. In certain embodiments, the invention provides a system for analyzing a sample that includes a mass spectrometry probe that generates sample ions, a discontinuous atmospheric interface, and a mass analyzer, in which the system is configured such that ion formation is synchronized with cycling of the discontinuous atmospheric interface.Type: ApplicationFiled: July 16, 2020Publication date: November 12, 2020Inventors: Robert Graham Cooks, Guangtao Li, Guangming Huang, Jason Duncan, Xin Li, Ewa Sokol, Xin Yan
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Publication number: 20200357621Abstract: A sample support body is for ionization of a sample. The sample support body includes a substrate including a first surface and a second surface on sides opposite to each other, and a conduction layer provided at least on the first surface. A plurality of through-holes opening on the first surface and the second surface are formed in an effective region of the substrate, the effective region being for ionizing components of the sample. A width of a first opening on the first surface side is larger than a width of a second opening on the second surface side in each of the plurality of through-holes.Type: ApplicationFiled: January 16, 2019Publication date: November 12, 2020Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Masahiro KOTANI, Takayuki OHMURA
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Publication number: 20200357622Abstract: Mass spectrometer based analytical systems and methods in which a feedback control system can be utilized to control the flow of liquid within a sampling probe to adjust and/or maintain the surface profile (e.g., shape) of the liquid-air interface within an open sampling port of the sampling probe. The feedback control systems can automatically monitor and/or detect the surface profile of the liquid-air interface and adjust the flow rate of the sampling liquid to ensure that experimental conditions remain consistent at the time of sample introduction during serial samplings. These can provide stable and reproducible analyte flows of consistent dilution to the ion source, increasing reproducibility and/or accuracy of data generated by MS analysis. Can be used with a change in the desired set point according to the particular experimental workflow (e.g., automated adjustment between an interface corresponding to a sampling set point and a cleaning set point).Type: ApplicationFiled: November 20, 2018Publication date: November 12, 2020Inventors: Don W Arnold, Thomas R. Covey, Chang Liu, Bogdan Morosan
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Publication number: 20200357623Abstract: A negative DC voltage is supplied to a flight tube from a negative voltage generator by turning on switching elements and turning off other switching elements during performance of a measurement, and a capacitor is charged by an auxiliary positive voltage generator by turning on a switching element. When an applied voltage is switched from a negative to a positive polarity, a large current is supplied to the flight tube from the capacitor by turning off the switching elements and turning on the switching element, and thus a capacitance is quickly charged to a positive potential. Thereafter, a stable positive DC voltage is applied to the flight tube from a positive voltage generator by turning off the switching element and turning on the switching element.Type: ApplicationFiled: September 4, 2017Publication date: November 12, 2020Applicant: Shimadzu CorporationInventors: Yasushi AOKI, Takuro KISHIDA
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Publication number: 20200357624Abstract: A detector system for targeted analysis and/or sample collection by distance-of-flight mass spectrometry (tDOF-MS).Type: ApplicationFiled: November 16, 2018Publication date: November 12, 2020Applicant: STC.UNMInventor: Christie Enke
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Publication number: 20200357625Abstract: A mass spectrometer comprising: a pulsed ion source for generating pulses of ions having a range of masses; a time-of-flight mass analyzer for receiving and mass analyzing the pulses of ions from the ion source; and an energy controlling electrode assembly located between the pulsed ion source and the time-of-flight mass analyzer configured to receive the pulses of ions from the pulsed ion source and apply a time-dependent potential to the ions thereby to control the energy of the ions depending on their m/z before they reach the time-of-flight mass analyzer. Mass dependent differences in average energy of ions can be reduced for injection into a time-of-flight mass analyzer, which can improve ion transmission and/or instrument resolving power.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Hamish Stewart, Dmitry Grinfeld, Alexander Makarov
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Publication number: 20200357626Abstract: An electrostatic linear ion trap has first and second axially aligned ion minors separated by a charge detection cylinder axially aligned with each ion minor. Electric fields are selectively established within the first and second ion minors in a manner which causes an ion in the trap to oscillate back and forth through the charge detection cylinder between the first and second ion minors with a duty cycle, corresponding to a ratio of time spent by the ion passing through the charge detection cylinder and total time spent traversing a combination of the first and second ion mirrors and the charge detection cylinder during one complete oscillation cycle, of approximately 50%.Type: ApplicationFiled: January 11, 2019Publication date: November 12, 2020Inventors: Martin F. JARROLD, Joanna A. HOGAN