Abstract: A liquid crystal display panel includes an array substrate and a color filter substrate which are arranged opposite to each other, and a liquid crystal layer. The color filter substrate includes a second substrate, a black matrix, a color resist layer, and photo spacers arranged on a common electrode. The photo spacers are arranged directly under the black matrix. The photo spacer includes a support spacer arranged on the common electrode and a buffer spacer arranged on the support spacer.

Abstract: Provided are a display panel and a preparation method thereof, and a display apparatus. The display panel includes a first substrate and a second substrate which are aligned and combined into a cell, wherein the first substrate includes a backlight structure layer and an array structure layer arranged on a side of the backlight structure layer facing the second substrate, the backlight structure layer includes a light guide plate, a grating layer arranged on a side of the light guide plate facing the array structure layer and a refractive layer covering the grating layer, the grating layer includes a plurality of grating units, the array structure layer includes a plurality of pixel electrodes, and the grating units are in one-to-one correspondence with the pixel electrodes.

Abstract: The present application discloses a display module and a display device. The display module includes: a liquid crystal display panel; a micro light-emitting diode (LED) display panel disposed under the liquid crystal display panel and bonded to the liquid crystal display panel, wherein the micro LED display panel only displays white color; a first driving chip configured to drive the liquid crystal display panel to emit light and display; and a second driving chip configured to drive the micro LED display panel to emit light and display. Power consumption of the display module is reduced, and contrast of a double-layer display panel is significantly increased.

Abstract: A display device is provided, including a backlight module, a liquid crystal cell, a light guide body, a light-emitting unit, and a camera unit. The backlight module includes a backlight section and a through hole section, and the backlight section surrounds at least a portion of the through hole section. The liquid crystal cell is disposed on the backlight module. The light guide body is disposed in the through hole section. The light-emitting unit is disposed on a light incident surface of the light guide body. The camera unit is disposed on a first surface of the light guide body. The display device and a corresponding part of an opening area cannot display an image correctly, which is prevented.

Abstract: A backlight module and a display device are disclosed. The backlight module includes a light emitting element array including a plurality of light emitting elements that emit blue light; a quantum dot film disposed on a light-emergent side of the light emitting element array and having a middle area and an edge area, the edge area surrounding the middle area; and a light conversion layer disposed on the light-emergent side of the light emitting element array, wherein an orthographic projection of the light conversion layer on the quantum dot film is located in the edge area of the quantum dot film, a material of the light conversion layer includes a first light conversion material configured to emit red light under excitation of light from the light emitting element and a second light conversion material configured to emit green light under excitation of light from the light emitting element.

Abstract: A diffusion plate has a first surface and a second surface opposite to each other, and includes a plurality of first prism pillars and a plurality of second prism pillars. The first prism pillars are disposed on the first surface. An angle range of a first apex angle of the first prism pillar is 60° to 90°. The second prism pillars are disposed on the second surface. An angle range of a second apex angle of the second prism pillar is 60° to 90°. The first prism pillars are arranged along a first direction. The second prism pillars are arranged along a second direction. The first direction is substantially perpendicular to the second direction. A backlight module using the diffusion plate is also provided. The diffusion plate and the backlight module can improve the brightness uniformity.

Abstract: A display device includes a display panel including a front substrate and a back substrate, a plurality of brackets attached to a non-display area of a back surface of the back substrate using an adhesive, and a backlight unit positioned in the rear of the display panel. The backlight unit includes a frame including at least one protrusion, a light guide plate disposed between the frame and the display panel, the light guide plate including at least one groove or hole corresponding to the at least one protrusion of the frame, an optical layer disposed between the light guide plate and the display panel, and a light source disposed on the side of the light guide plate.

Abstract: According to an aspect, a display apparatus includes: a first light-transmissive substrate; a second light-transmissive substrate arranged to face the first light-transmissive substrate; a liquid crystal layer including polymer dispersed liquid crystals sealed between the first light-transmissive substrate and the second light-transmissive substrate; at least one light-emitting device arranged to face at least one of a side surface of the first light-transmissive substrate or a side surface of the second light-transmissive substrate; and at least one reflector arranged on at least one of a side surface of the first light-transmissive substrate or a side surface of the second light-transmissive substrate, the side surface of the first or second light-transmissive substrate being on an opposite side of the side surface of the first or second light-transmissive substrate to which the at least one light-emitting device faces, and configured to reflect light at the side surface on the opposite side.

Abstract: A display panel and an electronic device are provided. The display panel includes a first pixel unit, a second pixel unit, and a liquid crystal layer including a plurality of liquid crystal units. Each of the first pixel unit and the second pixel unit corresponds to one of the liquid crystal units. The liquid crystal unit corresponding to the first pixel unit is doped with a plurality of first quantum rods and a chiral molecule, and the liquid crystal unit corresponding to the second pixel unit is doped with a plurality of second quantum rods.

Abstract: According to one embodiment, a display device including a display panel emitting display light of linearly polarized light, a semi-transparent layer, a first retardation film, a reflective polarizer transmitting first linearly polarized light and reflecting second linearly polarized light orthogonal to the first linearly polarized light, a second retardation film, an element, and a third retardation film arranged between the reflective polarizer and the element, wherein the first retardation film, the second retardation film, and the third retardation film are quarter-wave plates, and the element has a lens action of condensing first circularly polarized light.

Abstract: The present invention provides a laminate and an image display device, in which alignment defects of a liquid crystal layer provided on an optical alignment layer are suppressed. The laminate includes an optical alignment layer and a liquid crystal layer provided on the optical alignment layer. In the laminate, the liquid crystal layer is formed from a liquid crystal composition containing a liquid crystal compound and a surfactant, and the liquid crystal compound is immobilized in a horizontal alignment state, and the surfactant is a copolymer having a repeating unit containing a fluorinated alkyl group and having a repeating unit containing a mesogenic group.

Abstract: A liquid crystal display is formed by arraying a plurality of pixels 10, and the pixel 10 includes a first substrate 20, a second substrate 50, a first electrode 120 formed on the first substrate 20, a second electrode 52 formed on the second substrate 50, and a liquid crystal layer 60. A pretilt angle is provided to a liquid crystal molecule 61, and the first electrode 120 is formed of a transparent conductive material layer and a foundation layer 150 including a plurality of projecting portions 130 and recessed portions 140. A first transparent conductive material layer 135 connected to a first power feeding unit is formed on a projecting portion top surface 151 of the foundation layer 150, and a second transparent conductive material layer 145 connected to a second power feeding unit is formed on a recessed portion bottom surface 152 of the foundation layer 150.

Abstract: In a liquid crystal device, an intermediate refractive index film including a silicon nitride film, a silicon oxynitride film, or an aluminum oxide film is provided between an oriented film formed of a diagonally vapor-deposited film of silicon oxide and an electrode containing ITO. Thus, because there are no interfaces having a large refractive index difference between the oriented film and the electrode, reflection between the oriented film and the electrode can be suppressed. A high density silicon oxide film is formed between the intermediate refractive index film and the oriented film. The high density silicon oxide film is formed by an atomic deposition method, thus is appropriately formed inside a contact hole.

Abstract: An embodiment of the present application provides a liquid crystal display panel, including a color filter substrate having at least one first auxiliary trace disposed on a lower surface thereof; an array substrate having a low voltage area disposed on an upper surface thereof, wherein the low voltage area is disposed with a plurality of low voltage signal traces; and at least one connecting metal pair, wherein each of the connecting metal pairs includes two connecting metals, and the two connecting metals are disposed between the color filter substrate and the array substrate to electrically connect two ends of one of the low voltage signal traces to two ends of the first auxiliary trace.

Abstract: An array substrate and a display panel are provided. In the array substrate, a shield electrode is located between adjacent pixel electrodes, an electrode main part of the shield electrode is located between the adjacent pixel electrodes, an extension part of the shield electrode extends from the electrode main part in a direction toward the adjacent pixel electrodes, a groove is formed in an insulating layer, the groove is formed between the electrode main part and the pixel electrodes, the extension part extends into the groove, and at least a part of a vertical projection of the extension part on a plane of data lines is located on an outside of the data lines.

Abstract: A transmissive micro display board is manufactured without providing a light shielding layer. A manufacturing method of a micro display board includes the steps of: (i) forming a circuit layer on a surface of a first substrate provided with a single-crystal silicon layer; (ii) attaching a second substrate by using an adhesive to the surface of the first substrate on which the circuit layer has been formed; (iii) thinning a rear surface of the first substrate; (iv) attaching a third substrate being a transparent substrate to the thinned surface of the first substrate by using an adhesive; (v) removing the second substrate from the first substrate; and (vi) exposing a surface of the circuit layer by removing the adhesive on the surface of the first substrate after detaching the second substrate.

Abstract: A method of aligning a chiral nematic liquid crystal (103), the method comprising depositing a first chiral nematic liquid crystal (103) onto a first substrate (102), positioning a second substrate (104) on top of the liquid crystal (103) to form an initial layer structure and then applying rolling pressure to at least one of the substrates (102, 104) of the initial layer structure to create a final layer structure in which the first chiral nematic liquid crystal (103) is aligned with a helical axis substantially perpendicular to a local plane of the first substrate (102). Aspects of the invention provide optical filter materials for laser protection applications, LED emission filtering and lighting, augmented reality display coatings.

Abstract: An electrochromic article includes a first substrate having a first surface and an opposite second surface and a second substrate having a third surface and an opposite fourth surface separated from the first substrate. The second surface of the first substrate faces the third surface of the second substrate and a first electrode is positioned over at least a portion of the second surface of the first substrate. A second electrode is positioned over at least a portion of the third surface of the second substrate. A sealant material is positioned between the first electrode and second electrode. An electrochromic composition is positioned in direct contact with at least a portion of the first electrode and at least a portion of the second electrode. The sealant material is formed from an organic polymer material having an oxygen transmission rate (OTR) of less than or equal to 2 cc·mm/m2·day·atm.

Abstract: A display panel and a display device, including a display area and a non-display area are disclosed. The display panel includes: a first substrate and a second substrate disposed opposite to each other, a first electrode and a second electrode, a plurality of charged particles, and a plurality of third electrodes. By respectively controlling different bias voltages of the electrodes in the display area and the third electrode in the non-display area, the present application can realize a capability of switching between different working states of the display panel.

Abstract: An electrical device capable of emitting or absorbs energy relative a surrounding environment. The electrical device includes a housing, an interior volume defined in the housing, an energy sensor at least partially exposed to the surrounding environment, a first material having a first absorptivity, and a second material having a second absorptivity lower than the first absorptivity. The first material is nearer to the surrounding environment than the second material is at an energy sensor reading below a threshold energy range, and the first material is farther from the surrounding environment than the second material is at an energy sensor reading above the threshold energy range.

Abstract: Disclosed are a terahertz signal generation apparatus and a terahertz signal generation method using the same. The terahertz signal generation apparatus includes first and second resonators configured to respectively output an optical signal of a first resonant frequency and an optical signal of a second resonant frequency from an optical signal input through a gain medium, an optical modulator configured to optically modulate the output optical signal of the second resonant frequency, an optical combiner configured to combine the CW optical signal of the first resonant frequency and the modulated optical signal of the second resonant frequency, and a signal generator configured to generate a terahertz signal using heterodyne beating between the CW optical signal of the first resonant frequency and the modulated optical signal of the second resonant frequency, wherein the first resonant frequency and the second resonant frequency are processed to have a predetermined frequency difference.

Abstract: A system includes, in part, a multitude of RF receivers, a first optical modulator adapted to modulate an optical signal in accordance with a first data received by a first one of RF receivers to generate a first modulated signal, a second optical modulator adapted to modulate the optical signal in accordance with a second data received by a second RF receiver to generate a second modulated signal, and a first optical fiber adapted to carry the first and second modulated signals. The optical modulator may be a photodiode or a Mach-Zehnder modulator.

Abstract: The present embodiment relates to a camera module, comprising: a housing; an elastic member; a holder; a magnet; a coil; a lens module; and a filter, wherein the magnet comprises a first magnet, a second magnet disposed opposite to the first magnet, a third magnet, and a fourth magnet disposed opposite to the third magnet, and wherein the coil comprises a first coil facing the first magnet, a second coil facing the second magnet, a third coil facing the third magnet, and a fourth coil facing the fourth magnet, and wherein the first to fourth coils are independently applied with a current, and the filter is tilted to a diagonal direction by control of a current applied to the first and third coils.

Abstract: A system for evenly-scattered adaptable subject lighting for mobile device photography, comprising a case configured to enclose and securely fasten a mobile device and an illuminating portion, the illuminating portion configured to produce light based on input received from a plurality of sensors. The system further comprising a plurality of programming instructions stored in a memory and operating on a processor of a network-connected computing device, and configured to direct the operation of the illuminating portion comprising at least a sensor processor and an image capture device, wherein the sensor processor adjusts the illuminating portion based on preconfigured thresholds to provide evenly-scatter lighting for capturing images of subjects via the image capture device.

Abstract: A head for supporting an imaging device and being supported by a tripod.

Abstract: A projection liquid crystal display device (1) including: a first optical system that splits a light beam outputted from a light source (40) into a red light beam, a green light beam, and a blue light beam; a red liquid crystal panel (100R), a green liquid crystal panel (100G), and a blue liquid crystal panel (100B) that modulate the red light beam, the green light beam, and the blue light beam, respectively; a second optical system that combines the modulated red light beam, the modulated green light beam, and the modulated blue light beam into one optical path; and a projection lens system that projects a light beam outputted from the second optical system on a projection surface (30), in which respective driving voltages of the red liquid crystal panel (100R), the green liquid crystal panel (100G), and blue liquid crystal panel (100B) are identical to each other, and a configuration of a liquid crystal layer (110) of the red liquid crystal panel (100R) is different from respective configurations of liquid

Abstract: A projection display system, including light emitting device, light splitting device, first, second and third light modulators. The light emitting device emits first light and second light in time sequence. The light splitting device splits the first and second light into first and second wavelength range light along first and second optical paths, respectively, and guides part of the second light along the first optical path. The first and second light modulators modulate the light along the first and second optical paths, respectively; the light modulated by the first and second light modulators is combined to obtain third light along third optical path. The third light modulator is in optical path between the light emitting device and the light splitting device and modulates the first and second light from the light emitting device; or the third light modulator is in the third optical path and modulates the third light.

Abstract: In a projection display system, a polarizing beamsplitter can split an unpolarized light beam into a first internal beam and a second internal beam, which can have polarization states that are orthogonal. A polarization rotator, such as a half-wave plate, can rotate a plane of polarization of at least one of the first internal beam or the second internal beam. A beam aligner, such as a second polarizing beamsplitter, can change a propagation direction of at least one of the first internal beam or the second internal beam. The polarization rotator and the beam aligner each can adjust at least one of the first or second internal beams such that the first internal beam forms a first exiting beam and the second internal beam forms a second exiting beam. The first exiting beam and the second exiting beam can be adjacent and parallel and have parallel polarization states.

Abstract: A projection apparatus includes a detector, a laser source control unit and a laser source unit, and the laser source control unit is connected to the detector and the laser source unit. The detector is configured to obtain a detection signal for indicating whether there is an object to be protected in a laser projection region, and send the detection signal. The laser source control unit is also configured to: receive the detection signal, and send an adjustment signal carrying an adjusted projection parameter to the laser source unit when it is determined that there is the object to be protected in the laser projection region of the laser source unit based on the detection signal. The projection parameter indicates a light emission luminance of at least one laser in the laser source unit. The laser source unit is configured to emit a beam in response to the adjustment signal.

Abstract: The light source unit includes a base provided with an opening, a support member fixed to the base at the opening, and a light source assembly fixed to the support member at the opening. The light source assembly includes a light source emitting laser light, a lens disposed on an optical axis of the laser light, and a holding member holding the light source and the lens. The support member has a convex receiving surface extending along the spherical surface so as to surround the optical axis when viewed from a direction parallel to the optical axis. The light source assembly is fixed to the support member by coupling the holding member to the receiving surface at a contact portion with the receiving surface. The receiving surface has a portion located on a side away from the optical axis with respect to a coupling part with the holding member.

Abstract: A Fresnel projection screen includes: a Fresnel layer; a first micro-structure layer disposed at a light incident side of the Fresnel layer, the first micro-structure layer including a plurality of micro-structures that are configured to diffusely reflect a portion of light incident thereon and refract another portion of the light; a second micro-structure layer disposed on a surface of the first micro-structure layer, the second micro-structure layer including a plurality of second micro-structures that are configured to diffusely reflect a portion of light incident thereon and refract another portion of the light; and a reflective layer disposed on a side of the Fresnel layer away from the first micro-structure layer.

Abstract: A screen including a light control sheet which includes a front surface and a rear surface and has a transparent state and an opaque state, and a transparent reflective layer that faces the rear surface. The front surface is positioned such that light from a projection device is applied in the opaque state. The opaque state includes a state in which an average diffuse reflectance of visible light applied to the front surface is 10% or more and less than 20%.

Abstract: The disclosure provides a display unit and a projection device. The display unit includes a first display panel having first light emitting elements configured to provide a first color light, a wavelength conversion element located on a transmission path of the first color light and having a conversion region and a non-conversion region, a second display panel having second light emitting elements configured to provide a second color light, and a light combining element. A quantum dot conversion material is disposed on the conversion region. Part of the first color light is converted into a third color light after passing through the conversion region, and another part of the first color light passes through the non-conversion region. The light combining element is located on transmission paths of the first color light, the second color light and the third color light and is configured to form an image beam.

Abstract: A method is provided. The method includes preparing a mask blank, the mask blank including a substrate, a reflective layer disposed on the substrate for reflecting extreme ultraviolet light, and a light absorbing layer disposed on the reflective layer; providing a photomask by forming a plurality of pattern elements having a target critical dimension from the light absorbing layer, wherein the plurality of pattern elements include a correction target pattern element to be corrected, and the correction target pattern element has a critical dimension different from the target critical dimension; identifying a correction target area of the photomask in which the correction target pattern element is disposed; applying an etchant to the photomask; and irradiating a laser beam to the correction target area while the etchant is provided on the photomask.

Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.

Abstract: Present disclosure provides a mask and a method for fabricating a semiconductor device, the mask includes a target pattern having consecutive edges, a first scattering bar and a second scattering bar extending along a primary direction and adjacent to consecutive edges of the target pattern, wherein the first scattering bar and the second scattering bar partially overlaps in the primary direction, and a connecting segment connecting between a first end of the first scattering bar and a first end of the second scattering bar, wherein the first scattering bar is not parallel to the connecting segment.

Abstract: The present invention is to provide a pellicle characterized by including a pellicle film and a pellicle frame, in which the pellicle film is stretched on the pellicle frame, and the pellicle film is an annealed pellicle film, and to provide a method for producing a pellicle by stretching a pellicle film on a pellicle frame, including the step of annealing the pellicle film alone before stretching the pellicle film on the pellicle frame, annealing the pellicle after stretching the pellicle film on the pellicle frame, or annealing the pellicle film alone and the to pellicle both before and after stretching the pellicle film on the pellicle frame.

Abstract: Provided is an agglutinant for pellicles that can reduce residues stuck onto an exposure original plate when a pellicle is peeled from the exposure original plate after exposure, in particular exposure using ArF as an exposure light source, and also provided are a pellicle, an exposure original plate with a pellicle, a method for regenerating an exposure original plate, and a peeling residue reduction method. An agglutinant for pellicles for bonding a pellicle to an exposure original plate, the agglutinant comprising an acrylic polymer as a base material, the acrylic polymer comprising, as monomer components: a (meth)acrylic acid alkyl ester having a C4 or less alkyl group; and a (meth)acrylic acid ester having an ether bond.

Abstract: The present invention is to provide a pellicle frame in a frame shape, having an upper end face to arrange a pellicle film thereon and a lower end face to face a photomask, and which is characterized by being provided with a notched part from an outer side face toward an inner side face of the upper end face, and to provide a pellicle characterized by including the pellicle frame as a component.

Abstract: A color conversion layer and a manufacturing method of the same are provided. The manufacturing method of the color conversion layer includes steps of: subjecting a block copolymer thin film to self-assembly to obtain a self-assembled block copolymer thin film, including a plurality of main parts arranged in order, and a plurality of spacing parts disposed between the plurality of main parts; forming a protective layer covering the main parts; removing the spacing parts to form a plurality of grooves arranged in order; and dropping a color conversion layer ink into the grooves, followed by drying the color conversion layer ink to obtain the color conversion layer.

Abstract: An onium salt containing an anion having formula (A1) and a cation having formula (A1-a), (A1-b) or (A1-c) is provided. A chemically amplified negative resist composition comprising the onium salt as acid generator forms a pattern of good profile having a high sensitivity, improved dissolution contrast, reduced LWR and improved CDU.

Abstract: Provided is a lithographic printing plate precursor having an aluminum support and an image-recording layer on the aluminum support, in which the image-recording layer contains an infrared absorber, a polymerization initiator, a polymerizable compound, and an addition polymerization-type resin having a dispersible group, and in a case where a capacitance Cp of the lithographic printing plate precursor is set to satisfy Cp (t)/Cp (20 seconds)=0.95, t satisfies t<12 seconds or the capacitance Cp of the lithographic printing plate precursor satisfies Cp (0 seconds)>400 nF. Also provided are a method for preparing lithographic printing plate or a lithographic printing method using the lithographic printing plate precursor. The capacitance Cp of the lithographic printing plate precursor is measured by bringing at least a measurement portion of the image-recording layer into contact with a 2% by mass aqueous sodium chloride solution at 25° C.

Abstract: A method of processing a substrate, includes emitting light including vacuum ultraviolet light to a front surface of the substrate, which has a resist film formed thereon from a resist material for EUV lithography, before an exposure process in an interior of a processing container.

Abstract: Provided is an on-press development type lithographic printing plate precursor having an aluminum support and an image-recording layer on the aluminum support, in which the image-recording layer contains an infrared-absorbing polymethine colorant having HOMO of ?5.2 eV or less, a polymerization initiator, and a polymerizable compound having 7 or more functional groups and contains or does not contain a polymer having a molecular weight 10,000 or more, and in a case where the image-recording layer contains the polymer having a molecular weight of 10,000 or more, a ratio Wp/Wm of a content Wp of the polymer having a molecular weight of 10,000 or more to a content Wm of the polymerizable compound having 7 or more functional groups is 1.00 or less. Also provided are a method for preparing a lithographic printing plate and a lithographic printing method using the lithographic printing plate precursor.

Abstract: A manufacturing method of a patterned quantum dot light-emitting layer includes: forming a sacrificial layer on a side of a base substrate, wherein the sacrificial layer includes a first component and a second component mixed in the first component; forming a patterned photoresist layer on a side of the sacrificial layer facing away from the base substrate; etching the sacrificial layer by taking the patterned photoresist layer as a mask to form a patterned sacrificial layer; forming a quantum dot film layer on a side of the photoresist layer facing away from the sacrificial layer; making the second component decompose under the preset condition to produce the bubbles, to make the first component form the porous structure; and forming the patterned quantum dot light-emitting layer by removing the photoresist layer, the sacrificial layer and the quantum dot film layer attached to the sacrificial layer, by dissolution via a solvent.

Abstract: A method for cleaning is provided. The method includes: removing a pellicle frame from a top surface of a photomask by debonding an adhesive between the photomask and the pellicle frame, wherein a first portion of the adhesive is remained on the top surface of the photomask, and removing the first portion of the adhesive on the top surface of the photomask, including applying an alkaline solution to the top surface of the photomask, and performing a mechanical impact to the photomask.

Abstract: A method for gauge selection for use in calibrating a process model associated with a patterning process. The method involves obtaining a set of initial gauges having one or more properties (e.g., gauge name, weight, dose, focus, model error, etc.) associated with the patterning process; and selecting a subset of initial gauges from the set of initial gauges, the selecting the subset of initial gauges including determining a first subset of gauges from the set of initial gauges based on a first property parameter of the one or more properties, the first subset of gauges being configured to calibrate a process model (e.g., optics model, resist mode., etc.).

Abstract: A field facet system for a lithography apparatus includes an optical element. The optical element includes a base section having an optically effective surface. The optical element also includes a plurality of lever sections provided at a rear side of the base section facing away from the optically effective surface. In addition, the field facet system includes two or more actuating elements configured, with the aid of the lever sections acting as levers, to apply in each case a bending moment to the base section to elastically deform the base section and thus to alter a radius of curvature of the optically effective surface. The actuating elements are arranged in series as viewed along a length direction of the optical element.

Abstract: A microlithographic projection exposure mirror has a mirror substrate (12, 32), a reflection layer system (21, 41) for reflecting electromagnetic radiation that is incident on the mirror's optical effective surface, and at least one piezoelectric layer (16, 36), which is arranged between the mirror substrate and the reflection layer system and to which an electric field for producing a locally variable deformation is applied by a first electrode arrangement situated on the side of the piezoelectric layer facing the reflection layer system, and by a second electrode arrangement situated on the side of the piezoelectric layer facing the mirror substrate. One of the electrode arrangements is assigned a mediator layer (17, 37, 51, 52, 53, 71) for setting an at least regionally continuous profile of the electrical potential along the respective electrode arrangement. The mediator layer has at least two mutually electrically insulated regions (17a, 17b, 17c, . . . ; 37a, 37b, 37c, . . . ).

Abstract: A method of processing a substrate that includes: depositing a photoresist layer over the substrate; performing a cyclic direct-write lithographic process using a direct-write lithography tool, the cyclic direct-write lithographic process including a plurality of cycles, each of the plurality of cycles including: exposing the photoresist layer to a patterned actinic radiation without using a photomask, defining one of a plurality of coupon regions, where the plurality of coupon regions are configured to generate a plurality of test samples on the substrate for evaluating process conditions of a fabrication process; exposing the one of the plurality of coupon regions; and performing the fabrication process on the one of the plurality of coupon regions.