Abstract: The invention offers an ultracapacitor-based power system solution with four main functional blocks which are power conditioning block, monitoring block, charge-discharge block and protection block. The proposed system has the advantage of working well in the environment of vibration, high temperature, has a large capacity to provide a large amount and radiates less heat compared to systems using traditional batteries. In addition, the system has functions to protect and stabilize the output voltage, and the operating parameters of the system is monitored continuously.

Abstract: A multilayer electronic component includes: a body including dielectric layers and having first and second surfaces opposing each other in a first direction, third and fourth surfaces connected to the first and second surfaces and opposing each other in a second direction, and fifth and sixth surfaces connected to the first to fourth surfaces and opposing each other in a third direction; side margin portions disposed on the fifth and sixth surfaces, respectively; and external electrodes disposed on the third and fourth surfaces, respectively. The body includes an active portion including internal electrodes disposed alternately with the dielectric layers in the first direction, one of the internal electrodes includes a central portion and an interface portion disposed between the central portion and one of the dielectric layers, and the interface portion and one of the side margin portions include Sn.

Abstract: A capacitor includes: a plurality of bottom electrodes; a dielectric layer formed over the bottom electrodes; and a top electrode formed over the dielectric layer, wherein the top electrode includes a carbon-containing material and a germanium-containing material that fill a gap between the bottom electrodes.

Abstract: A multilayer ceramic capacitor includes a laminate and an external electrode connected to the internal electrode layer. The laminate includes a central layer portion in which an internal electrode layer and a dielectric ceramic layer are alternately laminated, and a covering portion covering an outer surface of the central layer portion in the lamination direction and the width direction. A region where the main surface meets the lateral surface in the laminate is defined as a corner portion that is rounded, and a distance from the corner portion to an internal electrode closest to the corner portion is about 20 ?m or less.

Abstract: The present disclosure relates to a metal case capacitor that includes: a capacitor module (10) including a capacitor device, a first busbar (1) electrically connected with a thermally-sprayed surface of the capacitor device and having a first lead terminal (1a) on an exposed side, a second busbar (2) electrically connected with the other thermally-sprayed surface of the capacitor device and having a second lead terminal (2a) on an exposed side, and an insulating sheet disposed between the first busbar (1) and the second busbar (2); a metallic external case (20) having a space; a plastic insulating member positioned between the capacitor module (10) and the metallic external case (20) and insulating the capacitor module (10) and the metallic external case (20) from each other; and a filler permeating in a gel or liquid state into a space between the capacitor module (10) and the metallic external case (20).

Abstract: A multi-layer ceramic electronic component includes: a ceramic body including a main surface, an end surface, and a side surface respectively perpendicular to a first axis, a second axis, and a third axis orthogonal to one another, a top portion that connects the main surface, the end surface, and the side surface to one another, and a plurality of internal electrodes laminated in a direction of the first axis; and an end external electrode including a corner portion located on the top portion, a base portion that covers the end surface and extends from the end surface to the main surface and the side surface, and a protrusion that protrudes from the base portion in a thickness direction, the protrusion including an L-shaped main surface protrusion located on the main surface and extending in directions of the second axis and the third axis from the corner portion.

Abstract: A multi-layer capacitor including a capacitor element having at least two segments. Each segment includes multiple layer planes, including ceramic dielectric layers and electrode layers arranged therebetween, which are arranged in a layer sequence one above the other. The electrode layers include different electrodes, including at least first and second electrodes. The different electrodes overlap in active regions but not in passive regions. Multiple segments are arranged one above the other in a stack direction. The outermost dielectric layers of two segments form a connection region in which the segments are fixedly connected to each other parallel to the layer planes. The connection region contains a relief region. The relief region occupies at least the entire passive region of the capacitor.

Abstract: Embodiments disclosed herein include an electronic package and methods of forming an electronic package. In an embodiment, the electronic package comprises a package substrate, an organic layer over the package substrate, and a capacitor embedded in the organic layer. In an embodiment, the capacitor comprises, a first electrode, where the first electrode comprises a seam between a first conductive layer and a second conductive layer, a dielectric layer over the first electrode, and a second electrode over the dielectric layer.

Abstract: A structure of capacitors connected in parallel includes a substrate. A trench embedded in the substrate. Numerous electrode layers respectively conformally fill in and cover the trench. The electrode layers are formed of numerous nth electrode layers, wherein n is a positive integer from 1 to M, and M is not less than 3. The nth electrode layer with smaller n is closer to the sidewall of the trench. When n equals to M, the Mth electrode layer fills in the center of the trench, and the top surface of the Mth electrode is aligned with the top surface of the substrate. A capacitor dielectric layer is disposed between the adjacent electrode layers. A first conductive plug contacts the nth electrode layer with odd-numbered n. A second conductive plug contacts the nth electrode layer with even-numbered n.

Abstract: Provided is a hybrid electrolytic capacitor having large capacitance, low ESR, and superior high-frequency characteristics and high-temperature endurance.

Abstract: An improved capacitor is provided wherein the capacitor has an improved bond between the anode and anode wire. The anode comprises a pressed anode powder comprising a first density region and a second density region wherein the second density region has a higher density than the first density region. An anode wire extends into the second density region wherein the anode wire in the second density region is distorted by compression. This allows for better utilization of the metal powder surface area by allowing a lower bulk press density and lower sinter temperature while still achieving the necessary wire pull strength. In addition, this invention when utilized with deoxidation steps, results in sufficient wire pull strengths not possible otherwise.

Abstract: A button mechanism includes a button, a module, and a thin sheet spring. The thin sheet spring is in physical communication with the button and with the module. The thin sheet spring exerts a tension force on the button and the module to bias the button toward a normal position. In response to a force greater than the tension force being exerted on the button, a portion of the thin sheet stretches to enable the button to be placed in a contact position. In response to the force being removed from the button, the tension force causes the thin sheet to snap back to an original position and biases the button toward the normal position.

Abstract: A light emitting keyboard includes a frame having a translucent frame body, a plurality of key modules each having a keycap, and a backlight module including a light source circuit board, a first light guide plate disposed on top of the light source circuit board, a second light guide plate disposed under the light source circuit board, a plurality of first light-emitting members extending upwardly through the first light guide plate, a plurality of second light-emitting members extending downwardly through the second light guide plate, and a reflector plate disposed under the second light guide plate. Light emitted from the first light-emitting members is transmitted in the first light guide plate and projects upwardly onto the keycaps. Light emitted from the second light-emitting members is transmitted in the second light guide plate is reflected by the reflector plate, and projects onto the frame body.

Abstract: In a rocker arm of an electric switch, the electric switch is actuated by the rocker arm for setting definable positions. The rocker arm of an embodiment includes a first part, for setting the definable positions, and a second part, movable between a first position and a second position. In the first position of the second part, the first part can be moved into the definable positions; and in the second position of the second part, the movement of the first part is blocked.

Abstract: A shape-memory alloy actuated switch (SMAAS) is provided that enables the stable switching of two separate circuits. The presently disclosed SMAAS includes a substrate, one or more electrical contacts attached to the substrate for connecting to load circuits, and one or more electrically conductive elements for selectively connecting the one or more electrical contacts. The disclosed SMAAS also includes one or more shape-memory alloy actuators attached to the substrate. The one or more shape-memory alloy actuators are configured to move the one or more electrically conductive elements. The shape-memory alloy actuators are self-heated by passing current through the shape-memory alloy material. The disclosed SMAAS may also include electrical contacts to connect an external control current to the shape-memory alloy material. In some examples, the provided SMAAS includes one or more retention mechanisms to prevent movement of the electrically conductive elements after actuation.

Abstract: An embodiment of an electric heating element is disclosed, including an electrically resistive inner heating element, an electrically resistive outer heating element, and a thermostat positioned underneath a centrally-positioned medallion and along a cold leg of the inner heating element. The thermostat is configured to selectively allow electrical current to be delivered to the inner heating element while maximum electrical current, for example, continues to be provided to the outer heating element. The thermostat cycles the electrical current on and off when detecting maximum and minimum desired temperatures radiated from the electric heating element. The inner heating element has a pair of cold legs that extend parallel to a pair of cold legs of the outer heating element, some or all of which may be supported by a terminal bracket.

Abstract: An interrupter includes a gas producer, an actuator pin, and an electrical conductor. The electrical conductor includes a first terminal portion, a first separable portion, a second terminal portion, and a second separable portion. The second separable portion is electrically connected to the first separable portion in parallel. A first timing when the first separable portion starts to be cut off from the first terminal portion is earlier than a second timing when the second separable portion starts to be cut off from the second terminal portion.

Abstract: A pyrotechnic switch comprises a housing formed by a first housing part and a second housing part, at least one rivet by means of which the first housing part is riveted onto the second housing part in order to form the housing, and at least one pyrotechnic actuator arranged in the housing. Further, at least one of the first housing part or the second housing part comprises a metal insert and a plastic body overmolded onto the metal insert, and the metal insert comprises a passage opening for the rivet such that the rivet is in contact with the passage opening of the metal insert.

Abstract: An abnormality detection circuit includes a first voltage detection circuit to which a voltage is applied from an AC power source when a first relay contact is closed and a second voltage detection circuit to which a voltage is applied from the AC power source when a second relay contact is closed. One end of the first voltage detection circuit is connected to the AC power source via the second wiring line while passing through no other switch. One end of the second voltage detection circuit is connected to the AC power source via the first wiring line while passing through no other switch. Abnormalities of the first and second relay contacts are detected by comparing the voltage applied to a comparative voltage detection circuit with each of the voltages applied to the first and second voltage detection circuits, respectively.

Abstract: A relay coil assembly includes a bobbin having flanges on two ends, an enameled wire wound around bobbin, a coil pin mounted to the flange and having an insertion portion, an enameled wire fixing portion and a signal wire fixing portion, and a signal wire. The signal wire fixing portion is provided with a first engagement recess with an opening facing downward, in which the signal wire is engaged. An inverted hook is provided at one of two recess sidewalls of the first engagement recess, and a slope section is provided at one of the two recess sidewalls of the first engagement recess. The opening gradually enlarges from inside to outside along the slope section, which is capable of squeezing the signal wire into the first engagement recess and the inverted hook is capable of preventing the signal wire from coming out.

Abstract: A miniature circuit breaker, which includes a button mechanism, a circuit breaker housing, and an anti-switching-on mechanism, wherein the button mechanism is arrange at one end of the circuit breaker housing and is in sliding fit with the circuit breaker housing, the anti-switching-on mechanism includes a first locking member, the first locking member is pivotally arranged on the circuit breaker housing, one end of the first locking member is in locking fit with the button mechanism to prevent the button mechanism from moving towards a switching-on direction, and after the miniature circuit breaker is installed to an installed position for the circuit breaker, an external housing of the installed position for the circuit breaker acts on the first locking member, so that after the first locking member is unlocked from the button mechanism, the button mechanism is capable of moving towards the switching-on direction for a switching-on operation.

Abstract: A miniature circuit breaker, which includes a circuit breaker housing, a button mechanism, an operating mechanism, a moving contact, and a static contact, wherein the operating mechanism includes a supporting member, a buckle member, a catch member, and a switching-off rod, the switching-off rod includes a switching-off rod connecting end and a switching-off rod driving end.

Abstract: The present invention relates to a multi-contact disconnect switch for a lightning arrester configured to maintain contact points of a contact shaft evenly and to improve the operation stability of the contact shaft, and more particularly to, a multi-contact disconnect switch for a lightning arrester including a first body having a passage formed therein and a multi-contact unit positioned on one side of the passage, and a second body having a contact shaft inserted into the passage and coupled to the other side of the first body, wherein, when the second body is coupled to the first body in a contact state, an end of the contact shaft is in contact with the multi-contact unit, and thus the multi-contact unit is in multi-contact with a contact circumferential surface of the contact shaft.

Abstract: A method for mounting an interlock module between two contactors, including: providing a first contactor having a first mounting surface and a first movable iron core assembly and a second contactor having a second mounting surface and a second movable iron core assembly, and placing the first mounting surface and the second mounting surface face to face; providing the interlock module comprising a first slider, a second slider and a housing formed separately from the first slider and the housing, an interlocking portion being mounted in the housing for interacting with the first slider and the second slider; connecting the first slider to the first movable iron core assembly of the first contactor; connecting the second slider to the second movable iron core assembly of the second contactor; assembling the housing to the first slider and the second slider; and fixing the housing.

Abstract: A semiconductor wafer includes a first surface and an implantation area adjacent to the first surface and a certain distance away from the first surface, the implantation area including implanted particles and defects. A defect concentration in the implantation area deviates by less than 5% from a maximum defect concentration in the implantation area.

Abstract: A large current electron beam is stably emitted from an electron gun of a charged particle beam device. The electron gun of the charged particle beam device includes: a SE tip 202; a suppressor 303 disposed rearward of a distal end of the SE tip; a cup-shaped extraction electrode 204 including a bottom surface and a cylindrical portion and enclosing the SE tip and the suppressor; and an insulator 208 holding the suppressor and the extraction electrode. A shield electrode 301 of a conductive metal having a cylindrical portion 302 is provided between the suppressor and the cylindrical portion of the extraction electrode. A voltage lower than a voltage of the SE tip is applied to the shield electrode.

Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

Abstract: Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.

Abstract: A method adjusts an output power of a power supply supplying electrical power to a plasma in a plasma chamber. The method includes: connecting the power supply to at least one electrode in the plasma chamber; transporting one or more substrates relative to the electrode using a substrate carrier; maintaining the plasma by the electrical power; processing the one or more substrates with the plasma; and adjusting the output power based on a parameter related to a distance between a surface of the electrode facing a carrier-substrate-assembly and a surface of the substrate-carrier-assembly facing the electrode.

Abstract: A plasma processing apparatus capable of improving the in-plane uniformity of plasma and a lower stage used for the plasma processing apparatus are anticipated. In an exemplary embodiment, the lower stage is for a lower stage that generates plasma with an upper electrode. The lower stage includes: a lower dielectric body formed of ceramic, a lower electrode embedded in the lower dielectric body, and a heating element embedded in the lower dielectric body. The separation distance between the top surface of the lower dielectric body at the outer edge position thereof and the lower electrode is smaller than the separation distance between the top surface of the lower dielectric body in the central region thereof and the lower electrode. The lower electrode has an inclination region inclined with respect to the top surface between the outer edge position and the central region.

Abstract: Systems and methods for tuning a megahertz radio frequency (RF) generator within a cycle of operation of a kilohertz (kHz) RF generator are described. In one of the methods, a predetermined periodic waveform is provided to a processor. The processor uses a computer-based model to determine plurality of frequency parameters for the predetermined periodic waveform. The frequency parameters are applied to the megahertz RF generator to generate an RF signal having the frequency parameters during one or more cycles of operation of the kilohertz RF generator.

Abstract: Embodiments described herein relate to methods of tuning within semiconductor processes to improve plasma stability. In these embodiments, multiple matching networks are provided. Each of the matching networks couple a radio frequency (RF) source to one of multiple connection points located on an electrode. Based on tuning parameter information and physical geometry information, a controller determines a tuning sequence for the multiple matching networks. As such, some of the matching networks are tuned while the other matching networks are locked. Using multiple matching networks leads to a more uniform plasma within the process volume of the process chamber. Improved plasma uniformity leads to less substrate defects and better device performance. Additionally, in these embodiments, the ability to tune each of the matching networks in a sequence decreases or prevents interference from occurring between the matching networks.

Abstract: A plasma generation device includes a plasma head configured to eject plasma gas that is plasmatized, a gas supply device configured to supply gas serving as the plasma gas to the plasma head, a pair of electrodes that is provided in the plasma head, the pair of electrodes being configured to perform discharging for a part of the gas supplied from the gas supply device to generate the plasma gas, a temperature sensor that is provided in the plasma head, the temperature sensor being configured to measure a temperature of the plasma head; and a control device, in which the control device executes a cooling process of cooling the plasma head by causing the gas supply device to continue supply of the gas until the temperature sensor measures a temperature equal to or less than a predetermined value after the discharging of the pair of electrodes is stopped.

Abstract: At timing t0, a brake gas (raw material gas) starts to be supplied to an ion beam generator, and the brake gas is fed into a turbo molecular pump. After timing t1, a vent valve is opened intermittently to feed atmospheric air into the turbo molecular pump. The brake gas may be different from the raw material gas. The brake gas is supplied using a gas supply system.

Abstract: A plasma processing apparatus includes: an electrostatic chuck supporting a wafer, and connected to a first power supply, an edge ring disposed to surround an edge of the electrostatic chuck and formed of a material having a first resistivity value, a dielectric ring supporting a lower portion of the edge ring, formed of a material having a second resistivity value lower than that of the first resistivity value, and connected to a second power supply, and an electrode ring disposed in a region overlapping the dielectric ring, in contact with a lower surface of the edge ring, and formed of a material having a third resistivity value greater than the first resistivity value, wherein the third resistivity value is a value of 90 ?cm to 1000 ?cm.

Abstract: A technique allows control of the etching rate at an outer periphery of a substrate being processed. A substrate support includes a substrate support portion that supports a substrate, and an edge ring support that supports an edge ring surrounding the substrate supported on the substrate support portion. The edge ring support includes a plurality of heating elements arranged in a circumferential direction of the edge ring support and a plurality of heater power feeders. Each of the plurality of heater power feeders is included in a corresponding heating element of the plurality of heating elements to provide power from an external source to the corresponding heating element.

Abstract: Temperature measurement is described for a substrate carrier using a heater element array. In one example a method includes measuring a first combined current load of each of a plurality of heating elements in the electrostatic chuck, changing a power status of a first heating element of the plurality of heating elements, measuring a second combined current load of each of the plurality of heating elements after changing the power status of the first heating element, determining the difference between the first and second combined current loads, determining a temperature of the first heating element using the difference, and reverting the power status of the first heating element to that before the change and repeating changing power, measuring a current load, determining a difference, and determining a temperature for each of the other heating elements of the plurality to determine a temperature at each of the heating elements of the plurality.

Abstract: The present disclosure provides a shielding mechanism and a thin-film-deposition equipment using the same, wherein the shielding mechanism includes two shield members and a driver. The driver includes a motor and a shaft seal. The motor interconnects the two shield members via the shaft seal, and such that to drive the two shield members to sway in opposite directions and to switch between an open state and a shielding state. Furthermore, each of the two shield members is formed with at least one cavity, for reducing weights thereof and loading of the motor and the driver.

Abstract: Provided are methods for determining the apolipoprotein E (ApoE) phenotype in a sample by mass spectrometry; wherein the ApoE allele(s) present in the sample is determined from the identity of the ions detected by mass spectrometry. In another aspect, provided herein are methods for diagnosis or prognosis of Alzheimer's disease or dementia.

Abstract: A collision reaction pool ion acceleration apparatus which has extremely low crosstalk. The apparatus comprises an apparatus body, a vacuum chamber, a first tube bundle channel and a second tube bundle channel. The vacuum chamber is fixedly connected to the interior of the apparatus body; the other end of the interior of the apparatus body is fixedly connected to a first insulation seat. A collision chamber is embeddedly connected to the inside the first insulation seat, and a high-frequency electrode quadrupole lens is fixedly connected to two sides of the collision chamber. When charged ions enter the collision chamber, the high-frequency electrode quadrupole lens focuses on the charged ions, so that the incoming charged ions form a new motion trajectory in the collision chamber, and the charged ions are easily separated from the collision chamber, thereby increasing the working efficiency.

Abstract: A sample support body for ionization of a sample, including: a substrate having a first surface, a second surface on a side opposite to the first surface, and a plurality of through-holes opening on each of the first surface and the second surface; a conductive layer provided on the first surface; and a matrix crystal layer provided on at least one of the conductive layer and the second surface, in which the matrix crystal layer is formed of a plurality of matrix crystal grains so as to include a gap communicating the plurality of through-holes with an outside.

Abstract: In one aspect, a mass analyzer is disclosed, which comprises a quadrupole having an input end for receiving ions and an output end through which ions can exit the quadrupole, said quadrupole having a plurality of rods to at least some of which a drive RF signal and an excitation signal can be applied. A fixed phase relationship is maintained between the drive RF signal and the excitation signal, thereby enhancing the signal-to-noise ratio of the mass detection signal.

Abstract: Apparatuses are disclosed which include one or more lamps configured to emit germicidal light, wherein the apparatuses are configured such that germicidal light emitted from the one or more lamps is projected exterior to the apparatus. The apparatuses further include wheels arranged along a bottom of the apparatus and a motor to provide automated mobility of the apparatus across at least a part of a room or area in which the apparatus is arranged. Moreover, the apparatuses include a processor and a storage medium having program instructions which are executable by the processor for activating the motor such that the apparatus is moved within the room or area while the one or more lamps are emitting germicidal light.

Abstract: A Far-UVC excimer light source contains a first electrode adapted to be energized, a second electrode adapted to be energized, a body defining a cavity that is filled with an excited molecule complex between the first and second electrodes; and a Far-UVC optical dielectric coating filter which is a Far-UVC filter attached to the interior side of the first electrode and adapted to filter a Far-UVC light excited in the cavity of the body. The Far-UVC dielectric coating is located inside the light source, between the cavity with the excited molecules and the first electrode. The Far-UVC filter attached to the interior side of the first electrode is a transmissive Far-UVC optical filtering dielectric coating or coated glass which is integrated, placed on, or near the interior side of the first electrode inside the light source.

Abstract: A method for fabricating an electron field emission cathode, the field emission cathode including a substrate having a field emission material layer engaged therewith, where the field emission material incorporates a carbon nanotube material and a metal oxide. The field emission material is produced via a sol-gel process to improve field emission characteristics of the field emission cathode and field emission cathode devices implementing such cathodes.

Abstract: According to one embodiment, a substrate processing apparatus includes a batch type cleaning unit, a holding unit, and a single-substrate type drying unit. The batch type cleaning unit simultaneously cleans a plurality of substrates in a batch process with a first liquid. The holding unit receives the cleaned substrates while still wet and then keeps a first surface of each of the substrates wet with the first liquid. The single-substrate type drying unit is configured to receive the substrates one by one from the holding unit and then dry off the substrates one by one.

Abstract: Examples of a substrate processing apparatus includes a chamber, an upper cover provided inside the chamber, an electrostatic chuck which includes an annular portion of a dielectric body and an embedded electrode embedded into the annular portion, the electrostatic chuck being provided inside the chamber, and a plasma unit configured to generate plasma in a region below the upper cover and the electrostatic chuck, wherein the annular portion includes an annular first upper surface located immediately below the upper cover, and a second upper surface located immediately below the upper cover and surrounding the first upper surface, the second upper surface having a height higher than a height of the first upper surface.

Abstract: To provide a gallium oxide-based semiconductor with its bandgap being sufficiently reduced, and a manufacturing method thereof. A gallium oxide-based semiconductor containing a mixed crystal having a composition represented by (Ga(1-x)Fex)2yO3, wherein 0.10?x?0.40 and 0.85?y?1.2, wherein the mixed crystal has a beta-gallia structure, is provided. Also, a method for manufacturing the gallium oxide-based semiconductor, including depositing a mixed crystal having a composition represented by (Ga(1-x)Fex)2yO3, wherein 0.10?x?0.40 and 0.85?y?1.2 on a substrate surface by a pulsed laser deposition method, wherein denoting the temperature of the substrate as T° C., x and T satisfy the relationship represented by 500x+800?T<1,000, is provided.

Abstract: The present disclosure relates to a method of manufacturing a nanowire structure. According to an exemplary process, a substrate is firstly provided. An intact buffer region is formed over the substrate, and a sacrificial top portion of the intact buffer region is eliminated to provide a buffer layer with a planarized top surface. Herein, the planarized top surface has a vertical roughness below 10 ?. Next, a patterned mask with an opening is formed over the buffer layer, such that a portion of the planarized top surface of the buffer layer is exposed. A nanowire is formed over the exposed portion of the planarized top surface of the buffer layer through the opening of the patterned mask. The buffer layer is configured to have a lattice constant that provides a transition between the lattice constant of the substrate and the lattice constant of the nanowire.

Abstract: A method includes depositing a hard mask over a target layer. Depositing the hard mask includes depositing a first hard mask layer having a first density and depositing a second hard mask layer over the first hard mask layer, the second hard mask layer having a second density greater than the first density. The method further includes forming a plurality of mandrels over the hard mask; depositing a spacer layer over and along sidewalls of the plurality of mandrels; patterning the spacer layer to provide a plurality of spacers on the sidewalls of the plurality of mandrels; after patterning the spacer layer, removing the plurality of mandrels; transferring a patterning the plurality of spacers to the hard mask; and patterning the target layer using the hard mask as a mask.