Abstract: A mask for deposition for forming a pattern on a transparent substrate according to the present invention includes a mask member having a mask alignment mark penetratedly formed so as to be aligned with a substrate alignment mark formed on the transparent substrate; and an unevenness region formed on one surface of the mask member so as to be adjacent to the mask alignment mark and having protrusions and depressions on a surface thereof. In accordance with embodiments of the present invention, it is possible to prevent the alignment error of the mask from occurring by increasing the recognition rate of the align marks formed on the substrate and the mask. As a result, it is possible to reduce the manufacturing costs by reducing the defective rate of the organic light emitting diode (OLED) display device.

Abstract: Systems and relative methods for regulating the loading capacity of a coating sleeve affixed to an outer surface of an implantable medical device to control an amount of antimicrobial agent delivered with the implantable medical device. A coating sleeve defines fibril void spaces into which therapeutic agents are loaded. A clamp is positioned on the coating sleeve to adjust the volume of the fibril void spaces so as to regulate the loading capacity of the coating sleeve.

Abstract: A core wire holder 20 is formed with a core wire insert hole 21 having an opening part 22 on an upper surface of a main body and extending toward a lower surface side, and a silicon core wire 5 is inserted into the core wire insert hole 21. In addition, a slit-like gap part 60 extending along a virtual plane P including a central axis C of the core wire insert hole 21 is formed, and the slit-like gap part 60 is a gap part extending from the core wire insert hole 21 to reach an outer surface of the main body of the holder 20. The silicon core wire 5 inserted in the core wire insert hole 21 is fixed by fastening an upper part of the main body of the holder 20 from sides with, for example, a bolt/nut type fixing member 31.

Abstract: A substrate subjected to back surface cleaning by a back surface cleaning processing unit is held by a hand of an interface transport mechanism and transported to a cooling unit. The substrate whose temperature has been adjusted by the cooling unit is held by a hand of the interface transport mechanism and transported to an exposure device. The substrate subjected to exposure processing by the exposure device is held by a hand of the interface transport mechanism and transported from the exposure device to a substrate platform.

Abstract: Methods of coating a stent are disclosed. In one example, the method includes positioning the stent on a support element configured to support the stent while rotating the stent. The support element has at least three elongate elements converging inwardly from a proximal end to a distal end of each element to form a conical or frusto-conical shape. The support element can be configured to be positioned within an end of the stent. The stent can be pinched between the support element and a second support element. A coating composition is applied to the stent. The method can further include pulsing the support element and/or the second support element to change a contact position of the stent with respect to the support element or the second support element; rotating the support element and the second support element at two different rates; or translating the support element from a first point of contact with the stent to a second point of contact with the stent.

Abstract: A wafer plating jig system comprising an electrically insulating wafer plating jig base having a plurality of overlapping cavities of different depths, each cavity configured to receive a semiconductor wafer of a different size and an electrically conductive cover plate comprising an open center surrounded by a support, the cover plate comprising an electrical conductor surrounding the open center and with at least one of the overlapping cavities of the wafer plating jig base.

Abstract: It is an object of the present invention to provide a rotor and a method for manufacturing the same that represent an improvement over the prior art. A roll for hot-dip metal coating bath having a body with a substantially cylindrical appearance, at least an outer peripheral surface thereof being formed of a ceramic material, wherein, on the outer peripheral surface of the body, a groove formed in a direction crossing the rotation axis is formed, and in the bottom surface of the groove, a plurality of rows of a fine groove is formed along the longitudinal direction of the groove. In place of the fine groove along the longitudinal direction of the groove, a plurality of rows of a fine groove are formed along the crosswise direction of the groove.

Abstract: A stent with at least one severable supporting device and methods of coating using the same are disclosed. The severable supporting device can be an end tube or a tab attached to some portion of the stent by at least one “gate” or attachment. The end tube or tab may be part of the design of the stent when it is originally manufactured, or it may be attached to the stent in a secondary process by a biocompatible glue or solder. The end tube or tab can be used to support a stent during a coating process eliminating the need for a mandrel which would otherwise contact the stent during the coating process.

Abstract: A drum coating device for coating work-pieces includes a main body, a support element, a cleaning device, a spraying device, a rotary drum device, a heating device, and a drive device. The main body defines a receiving room. The support element is received in the receiving room and defines slots for receiving the work-pieces. The cleaning device cleans the work-pieces. The spraying device sprays coating materials to the work-pieces. The rotary drum device uniformly coats the coating materials on the work-pieces. The heating device heats the coating materials coated on the work-pieces. The drive device includes a rotating drive rotating the support element and a linear drive raising or lowering the support element in the receiving room.

Abstract: An interface block is constituted by a cleaning/drying processing block and a carry-in/carry-out block. The cleaning/drying processing block includes cleaning/drying processing sections and a transport section. The transport section is provided with a transport mechanism. The carry-in/carry-out block is provided with a transport mechanism. The transport mechanism carries substrates in and out of an exposure device.

Abstract: A processing apparatus includes a substrate supporting unit that supports a substrate in a processing space in which the substrate is processed, a first partitioning member that includes a ceiling portion having an opening and partitions the processing space from an outer space, and a second partitioning member that is attached to the first partitioning member so as to close the opening and partition the processing space from the outer space together with the first partitioning member. The second partitioning member is attached to the first partitioning member so that the second partitioning member is removable from the first partitioning member by moving the second partitioning member toward a space which a lower surface of the ceiling portion faces.

Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.

Abstract: An apparatus includes a chuck, a first drain cup and second drain cup with two separately drain lines connected to each drain cup. The second drain cup is integrated with the first drain cup and located on top of the first drain cup. The different based chemical wastes can be collected into the separated drain cups and furthermore into the different drain lines and waste tanks. Accordingly, different based photo resists and developers can be used at the same apparatus by adjusting the chuck position to save the coating and develop tool and clean room space and furthermore the production cost.

Abstract: A susceptor device includes: a placement section on which a substrate is placed; a lift pin which is provided in the placement section and protrudes further to the upper side than the placement section at the time of carrying-in or carrying-out of the substrate, thereby supporting the substrate placed on the placement section; and lift pin moving means for moving the lift pin up and down. At the time of carrying-in or carrying-out of the substrate, the substrate is moved up and down by moving the lift pin up and down by the lift pin moving means in a state where the substrate is supported by the lift pin, and the susceptor device further includes a control section which controls the lift pin moving means so as to reduce a movement speed immediately before the substrate and the lift pin come into contact with each other, in a case of moving the lift pin.

Abstract: A system for depositing a substance onto a substrate comprises continuously transporting the substrate in a transport direction while traversing a deposition arrangement across the substrate to deposit the substance in a number of swathes. During such movement the positions of the deposition arrangement and the substrate are controlled with respect to one another such that the swathes complement one another to provide substantially uniform coverage of the substrate. As a result of the defined arrangement, improved substrate speeds can be achieved since there is no need for the substrate to stop at each traverse.

Abstract: A coating device includes an autoclave and a spray member. The autoclave includes an autoclave body and a cover sealing the autoclave body. The autoclave body defines a plurality of holding grooves in an inner surface thereof for holding substrates. The spray member is positioned on the cover and received in the autoclave body. The spray member defines openings in a side surface thereof. The spray member includes a container and an ultrasonic atomization unit. The container defines a cavity in communication with the openings. The ultrasonic atomization unit is received in the cavity.

Abstract: A substrate processing apparatus of the present invention includes a substrate placement stage installed in the process chamber, and configured to place the substrate on a substrate placement surface, with a flange provided on its side face; a heating element arranged in the substrate placement stage and configured to heat the substrate; a plurality of struts configured to support the flange from below, and an exhaust unit configured to exhaust an atmosphere in the process chamber, wherein the supporting member is provided between the substrate placement stage and the plurality of struts.

Abstract: The invention relates to a roller drive device for use in a deposition system for manufacturing a photovoltaic device having a substrate (12), the roller drive device comprising a roller means (9) and a cover means (1), whereby the roller means is arranged slidable along a roller means axis (11) between a rolling position and a retracting position, whereby the roller means is configured for transporting the substrate in the rolling position, the cover means is arranged slidable along a cover means axis (2) between a shielding position and an opening position, whereby, if the roller means is in the retracting position, the cover means is configured for shielding the roller means against contamination by a substance present in the deposition system in the shielding position, and the roller means axis and the cover means axis are arranged tilted to each other.

Abstract: A device for blocking workpieces for the processing and/or coating thereof, has a support surface for positioning the workpiece to be blocked, a blocking station in which the workpiece can be blocked on a blocking piece by a temporarily deformable blocking material, and a transport device which has a retaining head for the workpiece and by which a relative movement can be created between the workpiece being retained at the retaining head, and the support surface and the blocking station. The transport device has at least four position-controlled movement axes, by which to position the workpiece in a defined manner in consideration of the orientation and geometric information relative to a blocking piece located in the blocking station, and can be retained in the defined relative position to the blocking piece during blocking while leaving a blocking material accommodation gap between the workpiece and the blocking piece.

Abstract: A coating device includes a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of a substrate while rotating the substrate; and an adjusting mechanism which adjusts the coating state of the liquid material at the outer periphery of the substrate; wherein the adjusting mechanism includes a dip portion which dips the outer periphery of the substrate in a solution while rotating the substrate and dissolves; and a suction portion which suctions the vicinity of the outer periphery of the substrate after dipping in the solution.

Abstract: A coating auxiliary device, for coating hollow workpieces, includes a loading tray, masking stoppers, and an ejecting plate. The loading tray includes a loading surface, a matching surface opposite to the loading surface, and engaging portions extending up from the loading surface. Each workpiece is engaged with an engaging portion. The loading device defines guiding holes. Each guiding hole passes through an engaging portion and the matching surface and is in communication with the respective workpiece. Each masking stopper is configured to be inserted into a respective workpiece to mask an interior of the respective workpiece. The ejecting plate includes an assembling surface and ejecting rods extending up from the assembling surface. Each ejecting rod is configured to be guided into a respective guiding hole from the matching surface to eject out a respective masking stopper.

Abstract: Provided is a loading device that is provided in a tire testing machine including a testing station (30) provided with a spindle (31) attached with a tire (50) to be tested and feeds the tire (50) from a predetermined standby position to a testing position where the center of the spindle matches the center of the tire (50) in the testing station (30). The loading device includes: conveyors (1, 2) that convey the tire (50) from the standby position toward the testing position in a direction perpendicular to the axial direction of the tire; and positioning devices (6B, 20) that position the tire to be tested to a position, in which a front end of the tire in the feeding direction matches a point separated from the spindle by a predetermined distance, as the standby position. Setting of the standby position based on the position of the front end of the tire (50) in the feeding direction shortens the feeding distance and the feeding time and hence shortens the testing cycle time.

Abstract: An ejecting device includes a supporting plate and a balloon member. The supporting plate includes a top surface. The balloon member is fixed on the top surface and includes a main portion and a number of ejecting portions. The main portion is configured for receiving fluid. The ejecting portions are positioned on the main portion. When the main portion is full filled with the fluid, each ejecting portion protrudes from the main portion.

Abstract: A paper feeder enables a compact printer to print a large area of paper. The paper feeder includes a hanger, a paper feeding module, a driving module and a controller. The feeding module includes a tray and a roller. The tray includes a paper input board and a paper output board. The roller is located in the tray and feeds a paper from the paper input board to the paper output board. The driving module includes a base configured to receive the compact printer and a driving device which drives the base to move across the moving direction of the paper. The controller is configured to control the compact printer to print on the paper at a certain location.

Abstract: A conveying device for a deposition device includes a transport device and a carrier. The transport device includes a main body, two wheels, a connection shaft, and a first bevel gear. The connection shaft is mounted on the main body. The two wheels are mounted on two opposite ends of the connection shaft. The first bevel gear is sleeved on the connection shaft. The carrier includes a revolving frame, a rotating shaft, a second bevel gear, and at least one carrying bar. The rotating shaft is mounted on the revolving frame. The second bevel gear is sleeved on one end of the rotating shaft and meshed with the first bevel gear. The revolving frame rotates relative to the rotating shaft. The at least one carrying bar is mounted on the revolving frame and driven by the rotating shaft to rotate. Each carrying bar includes supporting elements for carrying workpieces.

Abstract: In a first aspect, a loadport is provided. The loadport has a plate adapted to couple to a door of a substrate carrier to open the substrate carrier wherein the plate includes a first opening adapted to couple to a first port in the door of the substrate carrier on a first side of the plate and to couple to a gas source on a second side of the plate, and wherein the loadport is adapted to allow a flow of gas into the substrate carrier via the first opening in the plate. Methods of purging substrate carriers are provided, as are numerous other aspects.

Abstract: An encasement for coating a bone plate with a substrate includes a sidewall structure having an upper edge and a cover disposed on the upper edge of the sidewall structure. The encasement includes a base from which the sidewall structure rises such that the sidewall structure, the cover and the base combine to create an open interior space of the encasement. An aperture in the sidewall structure provides access to the open interior space of the encasement and a plurality of cover protrusions extend from the cover into the open interior space. The encasement further includes a plurality of base protrusions extending from the base directly opposing the plurality of cover protrusions. A combined height of an individual cover protrusion and an opposing base protrusion is less than or equal to a height of the sidewall structure.

Abstract: In some aspects, an animal positioning system can include a first positioning member; and a second positioning member positioned relative to the first positioning member configured to limit an available spacing along a floor surface between the first positioning member and the second positioning member. The second positioning member is typically arranged at an angular bias away from the first positioning member relative to a floor surface and is configured to permit unobstructed viewing of a body of an animal positioned in the available spacing.

Abstract: According to an embodiment of the present disclosure, a substrate processing apparatus including a housing is provided. The housing having an internal atmosphere of a reduced oxygen concentration includes a box structure configured to accommodate a substrate holder which receives a plurality of substrates therein and including a first gap and a second gap. Further, the housing includes an inert gas pipe connected to the box structure, and configured to supply an inert gas to the box structure, a cover member mounted in the box structure, and a buffer space formed between an internal space of the box structure and the cover member.

Abstract: An apparatus and method for thoroughly soaking wood for use in the grilling or preparation of food. The apparatus being capable of accepting and soaking wood in the form of wood planks, wood chunks, or wood chips. The apparatus in a form of a tank which holds the cooking wood plank in liquid for any amount of time, ensuring that the plank absorbs the liquid evenly and for a long enough period for proper cooking. Other items can be added to the liquid while soaking, such as seasonings, sauces, or other wood types. These flavors will meld with the liquid in the tank and evenly distribute the flavor to the cooking plank.

Abstract: Various embodiments of methods and devices for coating stents are described herein.

Abstract: A barrier type deposition apparatus has a barrier in a closed chamber of a base to separate the chamber into two depositing rooms. The deposition apparatus may deposits a thin film on a side of a glass substrate, which is a part of the deposition apparatus. While the barrier is another glass substrate, it may deposit two different thin films respectively on opposite sides of the glass substrate in the same time.

Abstract: An article carrier adapted for holding and carrying a plurality of articles includes a carrier band, and a plurality of carrier racks connected with the carrier band by means of connecting plates. Each article defines an inserting groove. Each carrier rack has a first buckling arm extending forward from the connecting plate. An elastic arm of substantially lying-V shape from a lateral view is connected with a front edge of the first buckling arm with the mouth thereof facing rearward. A rear edge of the elastic arm extends rearward to form a second buckling arm. Each carrier rack is inserted into the inserting groove under the guidance of the elastic arm, and the first and second buckling arms resist against a top inner sidewall and a bottom inner sidewall of the inserting groove by virtue of an elastic force of the elastic arm.

Abstract: The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention.

Abstract: There are provided a golf ball having a paint coating that is prevented from being unevenly distributed over the ball surface, and a method and apparatus for manufacturing the golf ball. The method for manufacturing the golf ball comprises the steps of coating the surface of the golf ball with paint in a painting section; transferring the coated golf ball from the painting section to a drying section; and drying the coated golf ball in the drying section. The transferring step comprises attaching the coated golf ball to a moving unit by suction in the painting section; moving the moving unit to which the golf ball is attached by suction from the painting section to the drying section; and blowing gas to the golf ball toward the direction opposite to the suction direction for attaching the golf ball to release the golf ball from the moving unit in the drying section.

Abstract: The present disclosure is directed to a susceptor support that includes a hub and a plurality of arms extending radially from the hub, where each arm has a terminal end positioned away from the hub. The susceptor support also includes a plurality of elongated rectangular tips formed at the terminal end of each arm, each tip having a length and a width, wherein the length is greater than the width.

Abstract: A coating device includes a main body, a transport device, at least one loader, a driving device. The main body has a top plate, a bottom plate, and a pair of sidewalls connecting the top plate and bottom plate. The sidewalls respectively define an input gate and an output gate. The transport device includes a transport track passing through the input gate and the output gate, and at least one lifting arm mounted on the transport track. Each loader is configured for loading workpieces and includes a rotary shaft, at least one loading frame rotatably connected with the rotary shaft. The driving device is mounted on the top plate. Each lifting arm is configured for clamping a corresponding loader and transporting the corresponding loader to engage with the driving device. The driving device rotates the corresponding loader rotary shaft through the rotary shaft of the corresponding loader.

Abstract: An apparatus with: an extrusion head with a tip and a die concentrically arranged therewithin and extrudes a tube between the tip and the die; a needle that feeds at least one optical fiber and filler to be filled around the optical fiber into the tube being extrusion-molded; and a cylindrical bundling member provided within the needle. The bundling member has a bundling hole smaller than an inner diameter of the tube at a center thereof and into which the optical fiber can pass through, and a flow pass penetrating along a feeding direction of the filler between the bundling hole and an inner circumferential surface of the needle. In a method using the apparatus, the optical fiber is passed through a bundling hole to be bundled at a center of the tube. The filler is passed through a flow path to be filled around the optical fiber.

Abstract: The invention provides methods and apparatus for supporting a substrate in a chemical vapor deposition reactor, and methods and apparatus for synthesizing large area thin films. The invention provides a substrate support assembly comprising at least two interdigitable substrate support fixtures, each fixture carrying at least one finger-like formation for engaging and positioning the substrate during the deposition process that creates the thin film. When two such fixtures are interdigitated, the substrate may be positioned not only in between and around the finger-like substrate engagement members, but also on the outside of each fixture, thus achieving a many-fold increase in the effective width of the substrate.

Abstract: An in-line vacuum coating system includes a vacuum chamber, a coating source and a substrate carrier for holding tubular substrates, the carrier being displaceable using the vacuum chamber. A sure method of simply and securely coupling a fixed rotational drive unit to a carrier that can be displaced at a constant rate of speed in an in-line vacuum coating system is accomplished by a fixed splined shaft rotatably installed and connectable to a rotational drive unit, and a gearwheel that can be engaged with the splined shaft and that is rotatably mounted on the carrier. The gearwheel is longitudinally displaceable to a predefined extent in spring-loaded fashion in a direction opposite to the direction of travel of the carrier.

Abstract: The present invention relates to a chemical vapor deposition (CVD) apparatus which has rotation type heater. Particularly, the inventive CVD apparatus has advantageous effects in that it includes a motor for rotating the heater and a position sensor assembly for detecting the orientational position of the heater, so that the thickness of a thin film being deposited on a wafer can be made uniform through the rotation of the heater upon the deposition in spite of uneven introduction of a reaction gas into a reaction chamber, and the orientational positions of the wafer at the start and the end of the deposition process which are identical to each other can be secured to thereby orient the wafer in a predetermined direction on the heater.

Abstract: Disclosed is an apparatus for transporting a substrate media sheet along a process path through a marking zone. The apparatus includes a marking zone, an air bearing support rail and a media cart. The marking zone marks the substrate media sheet. The air bearing support rail extends from a first location upstream of the marking zone to a second location downstream of the marking zone. The media cart conveys the sheet along the process path. The media cart includes a platen for holding the sheet thereon as the media cart translates through the marking zone. The media cart is supported along the process path between the first and second locations by the air bearing support rail. The air bearing support rail includes a gaseous layer providing a non-contact bearing support between an outer surface of the air bearing support rail and a non-contact support surface of the media cart.

Abstract: A systems and method for reducing coating defects on a stent may involve a support apparatus comprising wire cage for carrying a stent. The support apparatus may have no structure that extends inside the stent. A support apparatus may include a plurality of wires that pass through the stent but do not pass through the midplane of the stent. A support apparatus may contact only the proximal ends of the stent. The method may involve keeping the stent in motion during a spray coating process to prevent the stent from having a point remain in continuous contact with a support apparatus.

Abstract: An automated apparatus and method for coating medical devices such as an intravascular stent, are disclosed in the method, a 2-D image of a stent is processed to determine (1) paths along the stent skeletal elements by which a stent secured to a rotating support element can be traversed by a dispenser head whose relative motion with respect to the support element is along the support-element axis, such that some or all of the stent skeletal elements will be traversed (2) the relative speeds of the dispenser head and support element as the dispenser head travels along the paths, and (3), and positions of the dispenser head with respect to a centerline of the stent elements as the dispenser head travels along such paths The rotational speed of the support and relative linear speed of the dispenser are controlled to achieve the desired coating thickness and coating coverage on the upper surfaces, and optionally, the side surfaces, of the stent elements.

Abstract: A dynamically tunable process kit, a processing chamber having a dynamically tunable process kit, and a method for processing a substrate using a dynamically tunable process kit are provided. The dynamically tunable process kit allows one or both of the electrical and thermal state of the process kit to be changed without changing the phyisical construction of the process kit, thereby allowing plasma properties, and hence processing results, to be easily changed without replacing the process kit. The processing chamber having a dynamically tunable process kit includes a chamber body that includes a portion of a conductive side wall configured to be electrically controlled, and a process kit. The processing chamber includes a first control system operable to control one or both of an electrical and thermal state of the process kit and a second control system operable to control an electrical state of the portion of the side wall.

Abstract: A cap platen to securely hold headwear, such as caps, hats, and the like, so that graphics, including custom graphics, can be printed on the cap automatically. The platen has a vise plate to support the bill of a cap and a face plate attached to the vise plate to hold the crown of cap. Arms can be attached to the vise plate or the face plate to apply a biasing force against the sides of the cap pushed the sides of the cap outwardly away from the face plate.

Abstract: A coating device includes a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of a substrate while rotating the substrate; and an adjusting mechanism which adjusts the coating state of the liquid material at the outer periphery of the substrate; wherein the adjusting mechanism includes a dip portion which dips the outer periphery of the substrate in a solution while rotating the substrate and dissolves and removes a thin film formed on the outer periphery of the substrate; and a suction portion which suctions the vicinity of the outer periphery of the substrate after dipping in the solution.

Abstract: Disclosed is a coating and developing apparatus including (a) a first liquid process module to sequentially perform a first liquid process by a first chemical liquid, and a second liquid process by the first chemical liquid again; (b) a buffer module to sequentially store the respective substrates which have been subjected to the first liquid process and have not yet been subjected to the second liquid process; and (c) a second liquid process module to sequentially perform a third liquid process by a second chemical liquid. In particular, the third liquid process to be performed on a first substrate of the substrate group is started before the first liquid process performed on a last substrate of the substrate group is ended, in such a manner that right after the first liquid process is performed on the last substrate, the second liquid process is to be performed on the first substrate.

Abstract: A method of processing a substrate includes physically contacting an exposed conductive electrode of an electrostatic carrier with a conductor to electrostatically bond a substrate to the electrostatic carrier. The conductor is removed from physically contacting the exposed conductive electrode. Dielectric material is applied over the conductive electrode. The substrate is treated while it is electrostatically bonded to the electrostatic carrier. In one embodiment, a conductor is forced through dielectric material that is received over a conductive electrode of an electrostatic carrier to physically contact the conductor with the conductive electrode to electrostatically bond a substrate to the electrostatic carrier. After removing the conductor from the dielectric material, the substrate is treated while it is electrostatically bonded to the electrostatic carrier. Electrostatic carriers for retaining substrates for processing, and such assemblies, are also disclosed.

Abstract: An sputtering device includes a carrier that includes a main body and support members. The main body defines a receiving space and includes a lateral surface defining at least one groove extending along a longitudinal direction. The receiving space and the at least one groove communicate with each other. The at least one groove is defined by a first surface and a second surface. The first surface defines recessed portions along the longitudinal direction and communicates with the receiving space. The support members are used for hanging workpieces. Each of the support members includes at least one support arm protruding from the lateral surface and is selectively and movably retained by one of the recessed portions.