Abstract: The present disclosure involves systems for applying finishing treatment to balls. The system includes an arm that transports at least one ball through a plurality of stations. A first station includes a first actuator, which permits introduction of a ball into the arm. A second station includes a buffer, which buffs the surface of the ball and rotates the ball in place relative to the arm, a spray nozzle configured to apply treatment to the ball, and a camera configured to capture images of the ball. A third station includes an inspection camera that captures inspection images of the ball and a rotating plate configured to rotate the ball in place relative to the arm. A fourth station includes a second actuator, which ejects the ball from the arm.

Abstract: Methods and apparatus for vacuum forming and subsequently applying topical coatings fiber-based food containers. The slurry includes one or more of an embedded moisture barrier, vapor barrier, and oil barrier, and the topical coating comprises one or more of a vapor barrier, a moisture barrier, an oil barrier, and an oxygen barrier. For food containers having deep sidewalls, a spray coating system includes a first nozzle for applying a full cone spray pattern to the bottom surface of the container, and a second nozzle for applying a hollow cone spray pattern to the inside surfaces of the side walls.

Abstract: A method for indirect additive manufacturing of an object, the method comprising: (i) separately feeding a powder from which said object is to be manufactured and either a difunctional curable monomer according to Formula (I) or an adhesive polymer binder into an additive manufacturing device; (ii) dispensing selectively positioned droplets of said difunctional curable monomer or adhesive polymer binder, from a printhead of said additive manufacturing device, into a bed of said powder to bind particles of said powder with said difunctional curable monomer or adhesive polymer binder to produce a curable preform having a shape of the object to be manufactured; and, in the case of the difunctional curable monomer, (iii) curing said curable preform to form a crosslinked object.

Abstract: A thin film processing device includes a showerhead for performing thin film processing for a substrate on a susceptor that moves along a transport track, and one or more transporters for supporting the susceptor. The transporters can transport the susceptor along the transport track while floating with respect to the track and not contacting the track, and can also control the height of the susceptor so as to adjust the distance from the substrate to the showerhead; and a transporter control system for controlling the transporters.

Abstract: A carriage assembly for a spray coating apparatus and a spray coating apparatus including the carriage assembly. The carriage assembly includes a carriage operatively connected to a track that is non-linear, which in some embodiments allows a coating to be applied at at least two different thicknesses.

Abstract: An automated system is provided for performing slide processing operations on slides bearing biological samples. In one embodiment, the disclosed system includes a slide tray holding a plurality of slides in a substantially horizontal position and a workstation that receives the slide tray. In a particular embodiment, a workstation delivers a reagent to slide surfaces without substantial transfer of reagent (and reagent borne contaminants such as dislodged cells) from one slide to another. A method for automated processing of slides also is provided.

Abstract: A metrology system can be integrated within a lithographic apparatus to provide integrated metrology within the lithographic process. However, this integration can result in a throughput or productivity impact of the whole lithographic apparatus which can be difficult to predict. It is therefore proposed to acquire throughput information associated with a throughput of a plurality of substrates within a lithographic apparatus, the throughput information including a throughput parameter, and predict, using a throughput simulator, a throughput using the throughput parameter as an input parameter. The throughput simulator may be calibrated using the acquired throughput information. The impact of at least one change of a throughput parameter on the throughput of the lithographic apparatus may be predicted using the throughput simulator.

Abstract: A three-dimensional fabrication apparatus includes a fabrication chamber, a liquid discharge device, a vibration applicator, and a controller. In the fabrication chamber, powder is layered to form a powder layer, the powder of the powder layer is bonded together in a desired shape to form a layered fabrication object, and another layered fabrication object is laminated on the layered fabrication object. The liquid discharge device discharges a fabrication liquid onto the powder in the fabrication chamber. The vibration applicator applies vibration to the powder layer onto which the fabrication liquid is discharged from the liquid discharge device. The controller controls and drives the vibration applicator to apply vibration to the powder layer when the liquid discharge device discharges the fabrication liquid onto the powder layer to form the layered fabrication object.

Abstract: A stator for a high efficiency motor and a manufacturing method of a stator for a high efficiency motor are disclosed. The method includes: preparing filling powder by coating a surface of soft magnetic powder with an insulating layer; providing a stator core partitioned into a center hole and inner spaces, the stator core including a yoke portion and a plurality of teeth; coiling coils around the plurality of teeth located in the inner spaces, respectively; and filling the inner spaces with a mixture of the filling powder and an adhesive, and curing the mixture of the filling powder and the adhesive.

Abstract: A sheet like article produced from a polyurethane resin has a carbonate group and an oxycarbonyl group as ester groups and has uniform, elegant surface quality, a flexible, highly crease recoverable texture, and high resistance to light and hydrolysis, and also provided is a production method therefore. The sheet like article is produced by adding, as a binder, a polyurethane resin that meets requirements (I) and (II) to a fibrous base material formed mainly of ultrafine fibers: (I) a polyurethane resin such that the polyurethane resin contains, in its interior, an oxycarbonyl group and a carbonate group as ester groups; (II) a polyurethane resin such that the sum of the content of the urethane group and the content of the urea group in the polyurethane resin is 7.0 to 11.0 mass %.

Abstract: A painting stand for vehicle bumpers includes a base frame supported by a plurality of casters together with a vertically supported post. A post extension is telescopically supported within the vertical post and is adjustable in its elevation. The upper end of the post extension is coupled to a support, to which is coupled a pivoting support rack. The support rack is comprised of upper and lower transverse/horizontal member(s). These transverse members are rigid in the middle and semi-rigid at both ends and serve as a mounting surface to which bumpers in need of paint or repair are affixed. The support rack's unique configuration allows the operator to easily affix and detach a wide variety of bumper shapes and sizes to the stand quickly and efficiently. Said support rack pivots. The pivoting function of the support rack is actuated and controlled by a foot pedal connected to the support rack by a cable.

Abstract: An aseptic medical instrument packaging has supporting peelable flaps by adding a material playing a supporting role which is harder than the rest of an extending part outside a sealing edge of a peeling side of the packaging, or adopting a material which is harder than the rest of an extending part outside a sealing edge of the peeling side of the packaging. A groove is carved in a junction between an outer edge of a sealing edge of a peeling side of the packaging. The material playing the supporting role comprises hard plastic, metal and paper. A soft cover of the packaging is prevented from being curled inwardly in the process of peeling open the packaging; and when one or two peeling sides exist, the degree of differentiation the peeling side will be increased, such that medical staff can conveniently find the peeling side.

Abstract: An automated in situ heat induced antigen recovery and staining method and apparatus for treating a plurality of microscope slides. The process of heat induced antigen recovery and the process of staining the biological sample on the microscope slide are conducted in the same apparatus, wherein the microscope slides do not need to be physically removed from one apparatus to another. The reaction conditions for treating a slide can preferably be controlled independently, including the individualized application of reagents to each slide and the individualized treatment of each slide.

Abstract: A method for processing a plurality of substrates after forming a photosensitive film on each substrate includes carrying each substrate into a placement buffer including a plurality of supporters by a first transport mechanism; taking out each substrate from the placement buffer to an interface by a second transport mechanism; carrying each substrate into the exposure device; carrying each substrate out of the exposure device into the placement buffer by the second transport mechanism; taking out each substrate from the placement buffer to the processing section by the first transport mechanism; performing development processing on each substrate; making each substrate stand by at the placement buffer based on timing at which the exposure device can accept each substrate; and making each substrate stand by at the placement buffer based on timing at which the developing device can accept each substrate.

Abstract: A method for making a medium for transferring a univocal pattern, comprising the steps of preparing a transfer medium (1) provided with a transfer surface (2), preparing an amount of encapsulated microdrops (3) of color, applying a layer of adhesive material (4) or other material or technique adapted to stably withhold said micro droplets at least on said transfer surface, randomly distributing an amount of encapsulated microdrops of color at least on said surface. Apparatus for implementing the method and medium thereby obtained.

Abstract: Provided is a coating device including: a substrate carrying unit which rotatably holds a substrate while the substrate is upright and is able to dispose the held substrate at a first position and a second position; an application unit which includes a liquid material nozzle ejecting a liquid material to each of first and second surfaces of the substrate disposed at the first position; and a removal unit which includes an accommodation mechanism accommodating a part of the peripheral edge portion of the substrate disposed at the second position and a cleaning liquid ejection mechanism ejecting a cleaning liquid to the peripheral edge portion and removes the liquid material of the peripheral edge portion.

Abstract: Methods and apparatuses disclosed herein relate to a recyclable thermoplastic unit that includes a casing body composed of a first thermoplastic having a first melting point. The casing body also includes a first locking mechanism that is configured to mate with a second locking mechanism of a sacrifice layer. The sacrifice layer is composed of a second thermoplastic and includes the second locking mechanism. The sacrifice layer has a melting point that is greater than the melting point of the casing body.

Abstract: The instant invention relates to a device and method for manufacturing patterns in layers. The device includes an auxiliary frame, a vertically displaceable build platform, a dispensing device for applying a binder material onto the build platform, a mounting platform, a mounting platform, and a spreader device for applying particulate material. The mounting platform preferably is connected to the auxiliary frame and includes a cut-out for the build platform. The dispensing device, the spreader device, and the build platform are connected to the mounting platform, so that the dispensing device, the spreader device and the build platform are cable of being mounted, adjusted, and wired to the mounting platform while located outside the auxiliary frame.

Abstract: An apparatus for materials processing utilizing a rotating magnetic field comprises a platform for supporting a specimen, and a plurality of magnets underlying the platform. The plurality of magnets are configured for rotation about an axis of rotation intersecting the platform. A heat source is disposed above the platform for heating the specimen during the rotation of the plurality of magnets. A method for materials processing utilizing a rotating magnetic field comprises providing a specimen on a platform overlying a plurality of magnets; rotating the plurality of magnets about an axis of rotation intersecting the platform, thereby applying a rotating magnetic field to the specimen; and, while rotating the plurality of magnets, heating the specimen to a desired temperature.

Abstract: A non-contact edge coating apparatus includes an applicator for applying a coating material on an edge of a solar cell substrate and a control system configured to drive the applicator. The control system may drive the applicator along an axis to maintain a distance with an edge of the substrate as the substrate is rotated to have the edge coated with a coating material. The applicator may include a recessed portion into which the edge of the substrate is received for edge coating. For example, the applicator may be a roller with a groove. Coating material may be introduced into the groove for application onto the edge of the substrate. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

Abstract: A slit nozzle includes: a first head, a second head facing the first head; and a plurality of cores located between the first head and the second head, wherein the plurality of cores includes: a first core and a third core for coating a coating solution; and a second core located between the first core and the third core so that coating of the coating solution via the first core and the third core is achieved at different instants of time.

Abstract: A conductive paste applying mechanism 14 of an embodiment of the present invention has: a swing unit 140 configured to hold a solar cell 1 so that a surface of the solar cell 1 is positioned on a holding surface; and an applying unit 142 configured to apply a conductive paste on first and second faces of the solar cell 1. In a period since the conductive paste is applied on the first face until the conductive paste is applied on the second face, the swing unit 140 swings around the swing axis as a center while holding the solar cell 1. There is an offset in the perpendicular direction between the swing axis and the holding surface.

Abstract: A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal.

Abstract: A paste supply apparatus includes a paste pot including a tubular container which stores paste and which includes a bottom portion provided with a through hole and a movable inner lid provided in the tubular container, and a pot holder which holds the paste pot in a state in which the through hole of the paste pot is directed downward such that lateral expansion of the tubular container is suppressed and downward movement of the tubular container thereof is regulated. The paste supply apparatus further includes a paste ejecting device which presses the inner lid of the paste pot and which ejects the paste in the tubular container from the through hole.

Abstract: A method of manufacturing an optical compound film includes providing a substrate, a first surface of the substrate facing upwards. A first curable glue is applied on the first surface. The first curable glue is pressed by a first roller with a rough circumferential surface to form a rough surface on the first curable glue. The first curable glue is cured to form a diffusion layer. The substrate is turned over to make a second surface of the substrate face upwards. A second curable glue is applied on the second surface. The second curable glue is pressed by a second roller having a micro-prism-structured circumferential surface to form a micro-prism-structured surface on the second curable glue. The second curable glue is cured to form a brightness-enhancing layer.

Abstract: Hollow fiber cartridges and components and methods of their construction.

Abstract: The surface of a substrate may be smoothly covered with a liquid when the substrate is fixed in a holder which together with forms, together with the surface of the substrate, a process volume into which the liquid may be introduced onto the surface of the substrate by means of a wetter, and when the holder including the substrate is set in a swaying motion by means of a swayer, so that the liquid will smoothly spread on the surface of the substrate. By the swaying motion, concentration of the volume of liquid at a specific location of the substrate surface is prevented, since the direction of motion of the liquid changes constantly.

Abstract: Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.

Abstract: One embodiment of the present invention provides a system for bonding a first substrate and a second substrate. During operation, the system starts by treating a first surface of the first substrate and a second surface of the second substrate with a hydrophilic treatment. The system then transfers a first oligomer layer onto the treated first surface and a second oligomer layer onto the treated second surface. Next, the system treats the first oligomer layer and the second oligomer layer for hydrophilic activation. The system subsequently brings the first oligomer layer into contact with the second oligomer layer, thereby allowing the two oligomer layers to adhere and form a single bonding layer between the first substrate and the second substrate. In particular, each of the first oligomer layer and the second oligomer layer is a polydimethylsiloxane (PDMS) layer.

Abstract: A substrate processing apparatus including a holder for rotatably holding a substrate; a coating solution supply nozzle for supplying a coating solution onto a front surface of the substrate to be processed held by the holder; a treatment chamber housing the holder and the coating solution supply nozzle; a cooling device which cools the substrate before the coating solution is supplied to the substrate, to a predetermined temperature; a heating devices which heats the substrate coated with the coating solution to a predetermined temperature; and a transferer that transfers the substrate between the treatment chamber, the cooling device and the heating device, wherein the treatment chamber, the cooling device and the heating device are partitioned from ambient air, and wherein at least the treatment chamber is connected to a gas supply mechanism having a supply source of a gas having a kinematic viscosity coefficient higher than that of air.

Abstract: The device has a gas flow levelling pipe (3), which defines a continuous curved development surface (Z), at comprising a collector (4) to which a nozzle (10) is fixed, a delivery manifold (1), in order to introduce pressurized gas into the pre-chamber (2) through the holes (12), a first holed partition (5) and a second holed partition (6) within the levelling pipe (3), arranged perpendicular to the curved development surface (Z) of the pipe (3).

Abstract: A partition portion includes a proximal portion fixed to the outer periphery of the peripheral wall portion and a sealing member mounted to the proximal portion in a manner that the sealing member is allowed to move in inner and outer circumferential directions of the peripheral wall portion. When receiving a force toward an outer circumferential direction, the sealing member is moved in the outer circumferential direction, and a distal end portion thereof is held in press-contact with a sliding contact portion of a ventilation member with a force generated along with the above-mentioned force.

Abstract: Disclosed is a coating apparatus having a coater chuck capable of improving a photoresist coating uniformity by preventing the coater chuck for performing a photoresist coating process from being sunk, in a manner of employing a different type of a material for making the coater chuck, wherein the coater chuck is made of stone and connected to a a servo motor via a drive shaft, the driving shaft being movable up and down, and a glass substrate coated with photoresist through a slit nozzle is placed on the coater chuck.

Abstract: The purpose of the present invention is to improve the throughput of a dye adsorption process in which a dye is adsorbed in a porous semiconductor layer on a substrate and to improve dye use efficiency. In a dye adsorption device of the present invention, a dye solution drop-coating unit 12 performs a first process (dye solution drop-coating process) on an unprocessed substrate G carried in the dye adsorption device 10, in which a dye solution is dropped and coated on a porous semiconductor layer on the substrate G. A solvent evaporating/removing unit 14 performs a second process (solvent removing process) in which a solvent is evaporated and removed from the dye solution coated on the semiconductor layer on the substrate G. A rinsing unit 16 performs a third process (rinsing process) in which unnecessary or extra dye attached to the surface of the semiconductor layer n the substrate G is rinsed and removed.

Abstract: Systems and methods for molding shells for fluid-filled prosthetic implants, including spinning and rotating dip- or spray-mandrels during a devolatilization step to ensure an even covering. The mandrels may be spun during the dipping or spraying step, and/or afterward while a solvent evaporates until a gum state is formed. The techniques are particularly useful for forming hollow shells from silicone dispersions for soft implants, such as breast implants.

Abstract: In order to provide an economical process for applying a coating to at least one side, optionally to both sides, of a leather, in which gentle processing of the leather is ensured and hardening thereof is avoided, an aqueous plastic dispersion having compact particles containing a blowing agent being applied to this side or these sides and being allowed to solidify, and hollow microspheres being formed from the thermoplastic compact particles by supplying heat, the invention proposes that, after solidification, the plastic dispersion containing the compact particles is subjected to the action of expanded superheated steam at a temperature between 80° C. and 100° C. (FIG. 2).

Abstract: According to one embodiment, a film forming apparatus includes: a stage on which a coating object is placed; a rotation mechanism rotating the stage; an application nozzle supplying a coating material to the coating object; an application moving mechanism moving the application nozzle; a controller which controls the rotation mechanism and application moving mechanism to rotate the stage and move the application nozzle between the rotation center and the outer edge and controls the application nozzle to apply the coating material to the coating object; and a sound wave generator which generates a sound wave. The film forming apparatus projects the sound wave onto the surface of the coating film.

Abstract: According to one embodiment, a pattern formation method includes grouping an unevenness pattern of a template into a plurality of groups having different pattern sizes. The method includes using a nozzle having a relatively small nozzle diameter to dispense an imprint resist in liquid form into a region on a substrate where the unevenness pattern of a group of the plurality of groups having a relatively small pattern size is to be aligned, and using a nozzle having a relatively large nozzle diameter to dispense the liquid imprint resist into one other region on the substrate where the unevenness pattern of a group of the plurality of groups having a relatively large pattern size is to be aligned. The method includes curing the imprint resist. The method includes releasing the template from the cured imprint resist.

Abstract: The present invention concerns methods and apparatus for forming a clad product, such as a clad pipe or tube. Particular embodiments include a method for metallurgically bonding cladding material onto a metal substrate, the method including a step of providing a metal substrate comprising a pipe or a tube having a cladding composition arranged along an interior surface of the substrate to form a coated substrate, the interior surface arranged within an interior cavity of the substrate. A further step includes inserting a heat source into an interior cavity of the substrate, the heat source comprising an infrared, microwave, or radio frequency heat source, the heat source being mounted on a heat source-retaining housing, the housing comprising a cantilevered structure. An additional step includes applying heat discharged from the heat source to the coated substrate along the coated interior surface until the cladding composition metallurgically bonds to the substrate.

Abstract: A wiping element made of a rubber-elastic or ductile-elastic material for the protection of components mobile against one another, wherein at least one wiping lip (2) is provided on a wiping ring (1). The wiping element has a protective lip (4), which is or can be fixed in a detachable fashion to the wiping ring (1). In a wiper arrangement (10), the wiping ring (1) is arranged position-stable on a first component and lies with the wiping lip (2) and the protective lip (4) adjacent to a second component. With the use of such a wiper arrangement (10) for the painting of components mobile against one another, at least one component is painted in the fixed state of the protective lip (4) and the protective lip (4) is then detached from the wiping ring (1).

Abstract: Methods are provided for applying a layer to a honeycomb body. The methods include the steps of applying a cement mixture to a cylindrical surface of the honeycomb body and rotating the honeycomb body and a blade relative to one another about a longitudinal axis of the honeycomb body. The methods further include the steps of holding the blade at a first interior angle during a relative rotation of the honeycomb body and the blade about the longitudinal axis. The methods then include the step of moving the blade from the first interior angle to a second interior angle greater than the first interior angle. The methods still further include the step of rotating of the honeycomb body and the blade relative to one another about the longitudinal axis after the blade begins to move from the first interior angle toward the second interior angle.

Abstract: A coat removing method of removing a coat of a coated optical fiber 3 made of a glass fiber 3a and the coat of polyimide resin 3b covering the glass fiber 3a includes holding the coated optical fiber 3 with fiber clamps 5 and 7 at two locations spaced by a predetermined distance in a length direction of the coated optical fiber 3, applying tension to the coated optical fiber 3 in the length direction, pressing a coat removal blade 29 to the coated optical fiber 3 in the tension-applied state in a direction crossing the length direction, to bend the coated optical fiber 3, and moving the coat removal blade 29 in the length direction along the coated optical fiber 3 in the bent state, thereby removing the coat.

Abstract: Aspects of the disclosure relate to a method of producing a golf ball, which may include creating a core of the golf ball, creating an outer cover of the golf ball around the core of the golf ball and applying a coating material to the golf ball. Further, creating the outer cover of the golf ball around the core of the golf ball, may include creating one or more gates, or flash, attached to the outer cover of the golf ball, wherein the one or more gates, or at least a portion of the flash, remain attached to the outer cover of the golf ball while the coating material is applied to the golf ball.

Abstract: An apparatus for application of liquids to a continuously conveyed outer layer having a rotating plate which is horizontal and parallel to the outer layer or with a deviation of up to 15° from horizontal, wherein a liquid applied to the rotating plate is ejected centrifugally from the rotating plate via rotation and then, via gravity, passed onto the outer layer below the rotating plate, is provided.

Abstract: A method includes steps of: carrying an air-permeable web while holding the first surface of the web on a carrying surface; dispensing powder particles onto the second surface of the web; drawing the first air from a plurality of suction holes in the carrying surface through the web, thereby holding the powder particles in a predetermined pattern on the second surface of the web; and giving at least a part of the first air flow components flowing in directions along the second surface of the web by means of an airflow deflector opposing the second surface of the web, thereby moving powder particles on non-suction areas between the suction holes on the web, thus arranging the powder particles in a predetermined pattern on the web.

Abstract: There is provided a liquid processing apparatus capable of preventing an atmospheric air of a lower surface side of a substrate, to which a processing liquid is supplied, from circulating and being introduced into an upper surface side of the substrate, to which the processing liquid is not supplied, and capable of decreasing a fuzzy gas consumption supplied to separate the atmospheres between the lower and upper surface sides from each other. An upper plate 5 is disposed at an opposite side to the upper surface of the substrate maintained horizontally and a gas supplier 53, 531 supplies a pressurized gas into a space formed between the upper plate and the substrate. Also, due to a negative pressure built in a space formed between the upper plate and the substrate, an atmospheric gas outside the space is introduced into the space via a gas inlet port.

Abstract: A coating method includes holding a substrate in a horizontal state on a substrate holding member; supplying a coating liquid onto a front side central portion of the substrate held on the substrate holding member; rotating the substrate holding member about a vertical axis to spread the coating liquid supplied on the front side central portion of the substrate toward a front side peripheral portion of the substrate by a centrifugal force; and damping a wobble of the substrate being rotated, by a wobble damping mechanism including a gas delivery port and a suction port both disposed to face a back side of the substrate, while delivering a gas from the delivery port and sucking the gas into the suction port.

Abstract: To provide an apparatus and method of curtain coating for applying onto a running web a coating solution from a lip top in the form of curtain to form a coating thereon, wherein a fluid is blown to remove excessive deposits of the coating solution that are formed at the edges in the width direction of the coating, and the deposits blown away by the fluid are ejected.

Abstract: In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

Abstract: The present invention is a method of developing a resist film on a substrate using a developing solution at a predetermined temperature lower than room temperature, including a first cooling step of mounting and cooling the substrate on a cooling plate at a temperature lower than room temperature and higher than the predetermined temperature in a cooling apparatus; a second cooling step of then carrying the substrate into a developing apparatus and supplying a rinse solution at the predetermined temperature or lower onto the substrate to cool the substrate in the developing apparatus; a developing step of then supplying the developing solution onto the substrate and developing the resist film on the substrate to form a resist pattern in the resist film; and a cleaning step of then supplying a rinse solution at the predetermined temperature onto the substrate to clean a front surface of the substrate.