With Treatment Of Coating Material Patents (Class 118/600)
  • Publication number: 20090029054
    Abstract: A system and a method for providing a film having a matte finish. The system includes means for providing a coated substrate, the coated substrate comprising a first coatable material applied to a substrate, the coatable material forming a first major surface of the coated substrate; means for changing the viscosity of the first coatable material from a first viscosity to a second viscosity; a face-side roller having an outer surface positioned to contact the first major surface of the coated substrate to impart a matte finish thereon; and optionally, means for hardening the first coatable material.
    Type: Application
    Filed: July 25, 2007
    Publication date: January 29, 2009
    Inventors: Robert A. Yapel, Francis M. Aguirre, John P. Baetzold, Olester Benson, JR., Andrew J. Henderson, Mitchell A. F. Johnson, Leslie A. Kreilich, Steven J. McMan, David L. Phillips, Bruce D. Shalles
  • Publication number: 20090017213
    Abstract: Method and apparatus for spreading a continuous coating film on a substrate to be printed, by supplying piezoelectric heads with components of a fluid product chosen from within the category comprising: a varnish, an enamel, a lacquer, a primer, a coating, a glue or similar products. Each component has a viscosity preferably in the region of 20 cP and density of about 0.6-1.3 g/cm3. The piezoelectric heads distribute the components on the substrate, producing mixing thereof and a polymeric polyaddition reaction able to form a coating film which is thin, resistant and uniformly distributed over the entire substrate.
    Type: Application
    Filed: April 3, 2008
    Publication date: January 15, 2009
    Inventor: Luigi CASTELVIN
  • Publication number: 20080236665
    Abstract: A method for liquid phase deposition of crystalline silicon thin films, and a high efficiency solar cell that is fabricated using crystalline silicon thin film technology, has the performance of a crystal silicon solar cell, but at the cost level per unit area of a solar cell fabricated using an amorphous silicon thin film. The crystal thin film uses only 10% or less of the amount of silicon used in a wafer-based solar cell. Because of the maturity of silicon technology in semiconductor industry, this approach not only enables high volume, automated production of solar cells on a very large, low-cost substrate, but also increases the area throughput up to 10000 cm2/min from 942 cm2/min in case of CZ crystal growth.
    Type: Application
    Filed: April 2, 2007
    Publication date: October 2, 2008
    Inventors: Jianming FU, Zheng XU
  • Publication number: 20080149986
    Abstract: A system and method are disclosed for processing a zero angstrom oxide interface dual poly gate structure for a flash memory device. An exemplary method can include removing an oxide on a surface of a first poly layer and forming a second poly layer on the first poly layer in a same processing chamber. A transfer of the structure is not needed from an oxide removal tool to, for example, a poly layer formation tool, an implant tool, and the like. As a result, impurities containing a silicon oxide caused by exposure of the first poly layer to an oxygen-containing atmosphere do not form at the interface of the first and second poly layers.
    Type: Application
    Filed: December 21, 2006
    Publication date: June 26, 2008
    Applicants: SPANSION LLC, ADVANCED MICRO DEVICES, INC.
    Inventors: Robert Bertram Ogle, Jr., Joong Jeon, Austin Frenkel, Eric Paton
  • Publication number: 20080139002
    Abstract: A liquid chemical supply apparatus includes a storage unit, addition unit, and nozzle unit. The storage unit stores a liquid chemical. The addition unit adds, to the liquid chemical supplied from the storage unit, a modifier in an amount corresponding to the degree of deterioration of the liquid chemical. The nozzle unit supplies, onto a substrate, the liquid chemical to which the modifier is added.
    Type: Application
    Filed: December 11, 2007
    Publication date: June 12, 2008
    Inventor: Hirokazu Kato
  • Patent number: 7384658
    Abstract: Seasoning for use with snack chips can be recovered and recycled. A seasoning permeable conveyor transports snack chips through a seasoning application. The seasoning applicator deposits seasoning onto the snack chips. The conveyor allows the seasoning not adhered to the moving snack chips to substantially pass through and by toward a seasoning recoverer. The seasoning recoverer, which is positioned beneath the conveyor, collects the seasoning for purification and blending with fresh seasoning. After blending, the seasoning mixture is transported to the seasoning application for use.
    Type: Grant
    Filed: September 13, 2005
    Date of Patent: June 10, 2008
    Assignee: Frito-Lay North America, Inc.
    Inventors: Kathryn Melissa Dove, Joseph H. Gold, Ponnattu Kurian Joseph, Ali Reza Peyrovi, Donald Joe Tatsch, Mehrnaz Vafaie, Tim Wilding
  • Publication number: 20080121175
    Abstract: A system, nozzle assembly, and method for coating a stent with a solvent and polymer are provided. The polymer can include a therapeutic substance or a drug. The polymer and solvent can be discharged from separate tubes disposed within another tube carrying moving air. The polymer and the solvent mix together when they are discharged and are atomized by the air. The ends of the tubes can be concentric with each other. The ends of the tubes can also be positioned relative to each other to prevent accumulation of polymer at the ends of the tubes.
    Type: Application
    Filed: February 6, 2008
    Publication date: May 29, 2008
    Inventor: Stephen Dirk Pacetti
  • Publication number: 20080118645
    Abstract: A method (and apparatus) of imprint lithography, includes imprinting, via a patterned mask, a pattern into a resist layer on a substrate, and overlaying a cladding layer over the imprinted resist layer. A portion of the cladding layer is used as a hard mask for a subsequent processing.
    Type: Application
    Filed: November 16, 2006
    Publication date: May 22, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Matthew E. Colburn, Theodore G. van Kessel, Yves C. Martin, Dirk Pfeiffer
  • Publication number: 20080107804
    Abstract: What is provided is a method and an apparatus for easily forming a multilayer structure of conductive metal thin films while forming a metal oxide thin film regardless of the conductivity of a substrate. A thin film of conductive metal is laminated by: dissolving metal precursors for a metal oxide to be formed and an oxidant to oxidize the metal precursors in a supercritical fluid or subcritical fluid; forming a metal oxide thin film by an oxidation reaction on the surface of a substrate in the supercritical fluid or subcritical fluid; then, dissolving a reducing agent and conductive metal precursors in a supercritical fluid or subcritical fluid; while reducing the metal oxide thin film formed on the surface of the substrate to a metal thin film, reducing the conductive metal precursors on the reduced metal thin film.
    Type: Application
    Filed: June 1, 2005
    Publication date: May 8, 2008
    Inventor: Eiichi Kondo
  • Publication number: 20080081116
    Abstract: An ink jet recording method comprising: applying an undercoating liquid containing a polymer onto a recording medium; partially curing the undercoating liquid that has been applied onto the recording medium; and recording an image by ejecting an ink that is curable by irradiation with actinic energy onto the partially cured undercoating liquid. According to the invention, an image having excellent uniformity between various types of recording mediums can be recorded, irrespective of the type of the recording medium; ink bleeding or unevenness in line width or color due to coalescence of the ink droplets can be effectively suppressed; and an image can be well reproduced to details with high density while maintaining a uniform dot diameter, irrespective of the form of the image, when an image having low dot density is recorded with a small amount of a liquid (e.g., an image having low resolution or density).
    Type: Application
    Filed: October 1, 2007
    Publication date: April 3, 2008
    Applicant: FUJIFILM Corporation
    Inventors: Toshiyuki Makuta, Yusuke Nakazawa
  • Patent number: 7252854
    Abstract: A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured gel components contained in the dispenser are outgased prior to application of the gel on the output face while a vacuum is maintained in the chamber. Outgasing takes place at a first chamber orientation with the nozzle pointing upwards through which the outgasing air ventilates. The gel is applied at a second chamber orientation where the output face is horizontal and upwards pointing. Immediately following the gel application, the vacuum is unmade to prevent cooking of the mixed and uncured gel. A glass plate is then pressed against the applied fluid gel.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: August 7, 2007
    Assignee: Intel Corporation
    Inventor: Janusz Liberkowski
  • Publication number: 20070148325
    Abstract: The present invention provides a granulation method with increased drying effect while assuring the pressure for spraying the aqueous solution and the necessary number of nozzles equivalent to those of conventional design. Specifically, the granulation method uses a granulator structured by a fluid bed which fluidizes the granulating-particles, an air feed pipe to introduce air, a nozzle for spraying the raw material aqueous solution being located at center part of the air feed pipe, and a perforated plate to feed a fluidization air to the fluid bed, thus granulating the raw material aqueous solution by spraying thereof from the nozzle into a granulation part, wherein a multi-nozzle in a specified shape having a plurality of nozzle ends thereon is used as the nozzle for spraying the raw material aqueous solution.
    Type: Application
    Filed: December 14, 2006
    Publication date: June 28, 2007
    Inventors: Genshi Nishikawa, Eiji Sakata
  • Patent number: 7131189
    Abstract: A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: November 7, 2006
    Assignee: Cymbet Corporation
    Inventor: Mark Lynn Jenson
  • Patent number: 6953004
    Abstract: Seasoning for use with snack chips can be recovered and recycled. A seasoning permeable conveyor transports snack chips through a seasoning application. The seasoning applicator deposits seasoning onto the snack chips. The conveyor allows the seasoning not adhered to the moving snack chips to substantially pass through and by toward a seasoning recoverer. The seasoning recoverer, which is positioned beneath the conveyor, collects the seasoning for purification and blending with fresh seasoning. After blending, the seasoning mixture is transported to the seasoning application for use.
    Type: Grant
    Filed: November 1, 2002
    Date of Patent: October 11, 2005
    Assignee: Frito-Lay North America, Inc.
    Inventors: Kathryn Melissa Dove, Ponnattu Kurian Joseph, Donald Joe Tatsch, Mehrnaz Vafaie
  • Patent number: 6913783
    Abstract: The invention pertains to methods of obtaining anisotropic crystalline films and to devices for carrying out the methods. A colloidal system with anisometric particles is applied as a film onto the surface of a substrate while the viscosity of the colloidal system is lowered. The particles of the colloidal system with lowered viscosity are oriented and the original viscosity of the colloidal system is restored. The film is then dried. The drying is carried out under controlled conditions. Zones of the dried film may be progressively heated to improve the film characteristics.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: July 5, 2005
    Assignee: Optiva, Inc.
    Inventors: Pavel I. Lazarev, Victor V. Nazarov, Natalya A. Ovchinnikova
  • Patent number: 6890588
    Abstract: A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured gel components contained in the dispenser are outgased prior to application of the gel on the output face while a vacuum is maintained in the chamber. Outgasing takes place at a first chamber orientation with the nozzle pointing upwards through which the outgasing air ventilates. The gel is applied at a second chamber orientation where the output face is horizontal and upwards pointing. Immediately following the gel application, the vacuum is unmade to prevent cooking of the mixed and uncured gel. A glass plate is then pressed against the applied fluid gel.
    Type: Grant
    Filed: September 5, 2002
    Date of Patent: May 10, 2005
    Assignee: Intel Corporation
    Inventor: Janusz Liberkowski
  • Patent number: 6802903
    Abstract: An apparatus and method are provided for applying adhesive to an outer circumference of a section of tubing. The apparatus includes opposed grippers with concave adhesive transfer areas that can be moved into surrounding relationship with the tubing. Adhesive dispensing passages communicate with the adhesive transfer areas for delivering adhesive to the tubing. Counterbores are at opposed ends of the adhesive transfer areas and communicate with a vacuum source for removing excess adhesive.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: October 12, 2004
    Assignee: Becton, Dickinson and Company
    Inventors: Brian Barber, John Young
  • Patent number: 6786970
    Abstract: A semiconductor fabricating device and method that minimize the influence of a process deteriorating material that is generated during first processes on second processes, when the plurality of processes are continually performed step by step. Operational failures are prevented during the course of the semiconductor fabricating processes, by directing air flow from a location where the second processes are carried out to a location where the first processes are carried out, to carry the process deteriorating gas away from the second processes. This reduces the frequency of failures during processing.
    Type: Grant
    Filed: August 28, 2001
    Date of Patent: September 7, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun-Don Oh, Tae-Sin Park
  • Patent number: 6776880
    Abstract: A plurality of processing chambers are connected to a common chamber (103 in FIG. 1), and they comprehend a processing chamber for oxidation (107), a processing chamber for solution application (108), a processing chamber for baking (109), and processing chambers for vapor-phase film formation (110, 111). Owing to a thin-film forming apparatus of such construction, it is permitted to fabricate an EL (electroluminescence) element employing a high-molecular EL material, without touching the open air. Thus, an EL display device of high reliability can be fabricated.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: August 17, 2004
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 6761769
    Abstract: An applicator has a rubber heater (51) attached to the outer peripheral surface of the application member (4) in the vicinity of a nozzle (3). Thereby, the temperature in the vicinity of the nozzle (3) is controlled by a control unit by detecting the temperature using a thermal resistor (52). A change in the viscosity of the viscous material (2) is prevented by keeping the temperature substantially constant, so that the volume of the viscous material from the nozzle (3) is stabilized.
    Type: Grant
    Filed: February 15, 2002
    Date of Patent: July 13, 2004
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Yuzuru Inaba, Eiichiro Terayama, Naoichi Chikahisa, Shunji Hashimoto
  • Patent number: 6749906
    Abstract: A thermal physical vapor deposition apparatus includes an elongated vapor distributor disposed in a chamber held at reduced pressure, and spaced from a structure which is to receive an organic layer in forming part of an OLED. One or more detachable organic material vapor sources are disposed outside of the chamber, and a vapor transport device including a valve sealingly connects each attached vapor source to the vapor distributor. During vapor deposition of the organic layer, the structure is moved with respect to the vapor distributor to provide an organic layer of improved uniformity on the structure.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: June 15, 2004
    Assignee: Eastman Kodak Company
    Inventor: Steven A. Van Slyke
  • Patent number: 6727194
    Abstract: A system and method for isothermally distributing a temperature across a semiconductor device. A furnace assembly is provided, which includes a processing tube configured to removably receive a wafer carrier having a full compliment of semiconductor wafers. A heating assembly is provided which can include a resistive heating element positioned to heat air or other gases allowed to enter the process tube. The wafer carrier and heating assembly are vertically raised into a position within the process tube. Once the heating assembly forms a seal with the process tube, the process tube is exhausted and purged of air. Gas is then allowed to flow into the process tube and exchange heat with the heating element. The heated gas circulates through the process tube to convectively raise the temperature of the wafers.
    Type: Grant
    Filed: August 2, 2002
    Date of Patent: April 27, 2004
    Assignee: WaferMasters, Inc.
    Inventor: Woo Sik Yoo
  • Publication number: 20040045500
    Abstract: A jet type coater with a nozzle orifice is provided with an adjustable, internal filter or screen in the head of the coater. The filter has orifices or slots which are formed by relatively movable members and is adjustable to a size smaller than that of the nozzle orifice, to keep the nozzle orifice unclogged and functioning. The internal filter is also easily clearable on the run without shutdown and cleanable with coating liquid and/or water.
    Type: Application
    Filed: September 9, 2002
    Publication date: March 11, 2004
    Applicant: Stora Enso North America Corp.
    Inventor: Wayne A. Damrau
  • Patent number: 6641703
    Abstract: A magnetic multi-layer film manufacturing apparatus has a transferring chamber, a plurality of film-depositing chambers, and a robotic transferring device. Each film-depositing chamber has a rotatable substrate holder, a plurality of targets positioned at an incline on an opposing interior surface from the substrate holder, and a double layer rotating shutter mechanism and is controllable to deposit at least one layer of a magnetic multi-layer film structure. Magnetic multi-layer film structures are formed by depositing a plurality of magnetic films divided into a plurality of groups, each one of the plurality of groups deposited in an associated one of the plurality of film-depositing chambers continuously in a laminated state. A first division between successive groups of magnetic films is between a metal oxide film and a magnetic layer continuous therewith and a second division is between an antiferromagnetic layer and a magnetic layer continuous therewith.
    Type: Grant
    Filed: November 30, 2001
    Date of Patent: November 4, 2003
    Assignee: Anelva Corporation
    Inventors: Shuji Nomura, Ayumu Miyoshi, Koji Tsunekawa
  • Patent number: 6620247
    Abstract: A method of forming a thin polycrystalline silicon film and a thin film forming apparatus allowing inexpensive formation of a thin polycrystalline silicon film at a relatively low temperature with high productivity. More specifically, a method of forming a thin polycrystalline silicon film and a thin film forming apparatus in which a state of plasma is controlled to achieve an emission intensity ratio of hydrogen atom radicals (H&bgr;) of one or more to the emission intensity of SiH* radicals in the plasma.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: September 16, 2003
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Akinori Ebe, Naoto Kuratani, Eiji Takahashi
  • Publication number: 20030170379
    Abstract: A leaf coater, in which a constant quantity of a coating solution is supplied intermittently from a coating solution supply source through a predetermined coating solution quantity intermittent supply means and a coating solution applying means to a blank substrate, for coating blank substrates one by one with the coating solution, characterized in that a coating solution filtration means is provided in the coating solution flow pipeline from said coating solution supply source to the coating solution applying means, and the Young's modulus of the filter medium in the coating solution filtration means is not less than 200 MPa, while the pore size of the filter medium is in the range of 0.05 &mgr;m to 100 &mgr;m; and a method for producing coated substrates using said leaf coater.
    Type: Application
    Filed: April 7, 2003
    Publication date: September 11, 2003
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Masaya Tsujii, Shinji Tomimatsu, Hirofumi Kobayashi, Kazuyuki Hashimoto, Hiroshi Kawatake
  • Patent number: 6554969
    Abstract: In general, the present invention is directed to acoustically enhanced deposition processes, and a system for performing same. In one embodiment, the method comprises providing a substrate having a layer of insulating material formed thereabove, the layer of insulating material having a plurality of openings formed therein, performing a deposition process to form a layer of metal at least in the openings in the layer of insulating material, and actuating at least one acoustic generator to generate sound waves during the deposition process. In one illustrative embodiment, the system comprises a deposition tool for receiving a substrate having a layer of insulating material formed thereabove, the layer of insulating material having a plurality of openings formed therein, and performing a deposition process to form a layer of metal at least in the openings in the layer of insulating material, and at least one acoustic generator coupled to the deposition tool to generate sound waves during the deposition process.
    Type: Grant
    Filed: July 11, 2001
    Date of Patent: April 29, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Robert James Chong
  • Publication number: 20030049377
    Abstract: A machine can deposit a film on a roll that will be used as a rotogravure printing medium. The machine has a carriage for rotatably holding the roll. Also included is a rotary driver for rotating the roll, and a linear driver for moving the carriage downstream along a processing path in order to move the roll axially. The machine also has a coating head with an orifice that is in communication with a source of composition for dispensing the composition onto the roll helically as a merging series of adjacent, self-leveling strip or bead portions. The carriage can be moved to one or more curing stations where the composition film will be (a) initially cured with a UV energy source at a primary energy flux density, and (b) secondarily cured with a UV energy source at a secondary energy flux density that is greater than the primary energy flux density.
    Type: Application
    Filed: September 11, 2001
    Publication date: March 13, 2003
    Inventors: W. Richard Chesnut, David Bressler, Daniel Calligaro
  • Patent number: 6471778
    Abstract: An electrostatic coating system for dispensing multi-component waterborne coating materials from a coating material supply container having an insulated outer portion and a coating material supply line coupled to a dispenser, a metal tube disposed in the container in contact with coating material therein, a first non-conductive fitting coupling a first end portion of the tube to a first opening of the container, a second non-conductive fitting coupling a second end portion of the tube to a second opening of the container, and a cooling fluid supply device coupled to the tube.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: October 29, 2002
    Assignee: Illinois Tool Works Inc.
    Inventors: James P. Baltz, Dennis P. Stephens
  • Publication number: 20020144651
    Abstract: An air unit for the removal of excess particulate coating material that is present on products which are in a coating machine comprises, for blowing surplus particulate material off the products, at least one suction member for drawing off air, with particulate material present therein, from the coating machine, separating means for removing particulate material from the air drawn off, and circulating means for feeding at least a portion of the air drawn off to the blowing member.
    Type: Application
    Filed: April 9, 2002
    Publication date: October 10, 2002
    Applicant: CFS BAKEL B.V.
    Inventor: Hendrikus Antonius Jacobus Kuenen
  • Publication number: 20020136838
    Abstract: A coating apparatus and coating method include a device for conveying an object to be coated; a coating device which is disposed in a vicinity of a conveyed surface of the object, and which discharges a coating liquid, and which forms a bridge of the liquid between the device and the object which is conveyed by the device for conveying an object to be coated, and which coats the liquid on at least one surface of the object; and a gas stream blowing device which, immediately after starting of coating, blows out a gas from a direction substantially opposite to a object conveying direction, toward a portion of the object where coating starts.
    Type: Application
    Filed: March 19, 2002
    Publication date: September 26, 2002
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventor: Shin Kanke
  • Patent number: 6455172
    Abstract: A method for producing a laminated metal ribbon comprises the steps of (a) vapor-depositing a third metal layer on at least one welding surface of a first metal ribbon 4 and a second metal ribbon 5 in a vacuum chamber 1, the third metal being the same as or different from a metal or an alloy of the first and second metal ribbons 4, 5; (b) pressure-welding the first metal ribbon 4 to the second metal ribbon 5; and (c) subjecting the resultant laminate 9 to a heat treatment for thermal diffusion.
    Type: Grant
    Filed: September 22, 2000
    Date of Patent: September 24, 2002
    Assignee: Hitachi Metals, Ltd.
    Inventors: Kentaro Yano, Noboru Hanai
  • Publication number: 20020129766
    Abstract: Methods of high speed coating a pigment-containing liquid coating material onto a substrate so as to avoid visible pigment separation in the coating material in its as coated state. In the method, a pigment-containing liquid coating material is applied to a substrate, while the substrate is moving at a high line speed of at least about 15.24 m/min., to form a coated layer. The coating material is applied to the substrate along a substantially straight, dynamic wetting line where the coating material first contacts the moving substrate. The coating material is of the type that will exhibit visible pigment separation on its interface surface when the coating material is coated onto the fast moving substrate, without the use of a substantially straight wetting line. The wetting line is substantially straight when a significant amount of visible pigment separation does not occur at the chosen high line speed.
    Type: Application
    Filed: March 14, 2001
    Publication date: September 19, 2002
    Inventors: Mikhail L. Pekurovsky, Shannon D. Sharp, Paul J. Toftness, Ian D. Gates, James A. Smart
  • Publication number: 20020127346
    Abstract: The present invention provides a method and apparatus for applying a coating material onto a print substrate mounted on a plate cylinder of a printing press. The method comprising: delivering a supply of the coating material to a distributive surface of an ultrasonic horn, the distributive surface controlling a flow of the coating material to an active edge of the ultrasonic horn, and atomizing the coating material at the active edge of the ultrasonic horn and directing the atomized coating material onto a surface of the print substrate. The present invention also provides a multi-purpose ultrasonic acoustic coating/cleaning system for applying a coating material onto, and cleaning the coating material from, a print substrate.
    Type: Application
    Filed: March 11, 2002
    Publication date: September 12, 2002
    Inventor: Thomas K. Herber
  • Patent number: 6432842
    Abstract: A closed space is formed in a reduced pressure drying station, and the closed space is brought to a vacuum state. In this state, an EB unit irradiates a wafer mounted on a hot plate with an electron beam to foam an insulating film material. Subsequently, the hot plate is raised to a predetermined temperature, and drying processing is performed under a reduced pressure. As described above, since the foaming processing is performed in the reduced pressure drying station, bubbles remain in the insulating film, so that the existence of the bubbles can decrease the relative dielectric constant.
    Type: Grant
    Filed: March 21, 2001
    Date of Patent: August 13, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Masami Akimoto, Yoichi Deguchi
  • Patent number: 6428852
    Abstract: A process for coating a solid surface (42) with a conditioned liquid composition of substantially uniform thickness is provided. A liquid composition is conditioned by a) degassing either via vacuum or by sparging with a high kinematic viscosity gas; and b) substantially maintaining the viscosity of the liquid composition. The conditioned liquid may then be dispensed onto a solid surface (42) positioned in a sub-atmospheric environment (37) or in a helium-rich environment (37). The solid surface (42) is rotated so that the liquid composition forms a uniformly thick coating free from bubbles on the solid surface (42) and thereby produces a thin film of uniform thickness.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: August 6, 2002
    Assignee: Mykrolis Corporation
    Inventors: John E. Pillion, Michael E. Clarke, Jill Boski
  • Patent number: 6375742
    Abstract: A decoloring apparatus for an image forming material comprising means for bringing a solvent into contact with an image forming material formed on a paper sheet and containing a color former, a developer and a decolorizer, and means for removing a residual solvent from the paper sheet.
    Type: Grant
    Filed: January 22, 1999
    Date of Patent: April 23, 2002
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenji Sano, Katsuyuki Naito, Satoshi Takayama, Sawako Fujioka, Tetsuo Okuyama, Shigeru Machida
  • Publication number: 20020031603
    Abstract: A metallic base material is covered with a coating layer of intermetallic compound, or a plurality of metallic base materials are welded to each other with an intermetallic compound, with reduced energy consumption within a short period of time. First metallic substance 31 in powdery form is piled up on metallic base material 2. Second metallic substance 3 in molten form is delivered onto piling layer 80 of the first substance. Thus, under the control of reaction initiation temperature, coating layer (or building up coating layer) 84 of intermetallic compound having a thickness of hundreds of microns (&mgr;m) to millimeters (mm) is formed on the base material 2 by the self-exothermic reaction between the first substance and the second substance. This method is also useful in the welding of a plurality of metallic base materials to each other with an intermetallic compound. The first substance can be constituted of, for example, Ni, Co or Fe. The second substance can be constituted of, for example, Al or Ti.
    Type: Application
    Filed: July 13, 2001
    Publication date: March 14, 2002
    Applicant: JSR CORPORATION
    Inventors: Yoshinari Miyamoto, Kiyotaka Matsuura, Toshio Teramoto
  • Publication number: 20020000034
    Abstract: A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
    Type: Application
    Filed: March 23, 2001
    Publication date: January 3, 2002
    Inventor: Mark Lynn Jenson
  • Publication number: 20010035125
    Abstract: A coater having a controllable pressurized process chamber for applying photoresist to a wafer is provided. The controllable pressurized process chamber reduces the evaporation of solvent in the photoresist during a spin-on process step. Reducing premature curing of the photoresist results in improved uniform planarization of the photoresist layer. Contaminants in the photoresist are also reduced by having an environmentally controllable process chamber. A housing having a upper and lower section forms a process chamber surrounding a wafer chuck. The upper housing section includes a solvent vapor opening for introducing pressurized solvent vapor into the process chamber and the lower housing section includes an exhaust opening. The upper housing section also includes an opening for introducing photoresist onto a wafer. A control device is coupled to the exhaust opening and a vacuum device for controlling the pressure in the process chamber.
    Type: Application
    Filed: June 19, 2001
    Publication date: November 1, 2001
    Applicant: Applied Materials, Inc.
    Inventors: Homayoun Talieh, Alex Lurye
  • Patent number: 6309463
    Abstract: A device for direct or indirect application of a liquid or viscous coating medium onto a moving material web, specifically a paper or cardboard web, includes an applicator unit which, in the direct application method, applies the coating medium in the form of a coating layer directly onto the material web at a point of application. In the indirect application method, the coating medium is first applied onto an applicator element, for example an applicator roll, which then transfers, at the point of application, the coating medium to the material web in the form of a coating layer. In addition, a drying device for drying of the coating layer is provided downstream from the point of application, viewed in the direction of flow of the material web. In the applicator unit, a device for moistening and/or warming the material web, coating medium or the coating layer is additionally provided before the drying device, viewed in the flow direction of the material web.
    Type: Grant
    Filed: May 2, 2000
    Date of Patent: October 30, 2001
    Assignee: Voith Sulzer Papiertechnik Patent GmbH
    Inventors: Harald Hess, Rüdiger Kurtz, Benjamin Mendéz-Gallon
  • Patent number: 6264809
    Abstract: One electrode is provided in association with the object to be coated, the other electrode. A pre-stretched ion-exchange membrane in a thin tubular form is sandwiched inbetween two nonconductive water permeable screen tubular housings. The assembly contains a supply line that provides a water way for the electrolyte to flow from the top of the device into a lower cap, then to the lower cap reservoir that allows stabilization and disbursement of electrolyte through the rifled housing Inertia developed through this defined pattern creates a swirling action that scrubs the impurities away from the anode, and to the top of the device to be carried out top. The location of the supply line is just inside the inner screen inserted through both the upper housing and lower cap. The tubular electrode is provided to the inside of membrane housing completing the inner portion of the waterway return chamber.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: July 24, 2001
    Assignee: PTI Advanced Filtration, Inc.
    Inventor: Cheng H. Lee
  • Patent number: 6228429
    Abstract: A disk gripper for gripping an insulating disk, such as a glass disk, at its edge during processing includes a contact device for contacting the edge of the insulating disk and a mechanism for moving the contact device between a contact position, in contact with the edge of the disk, and a retracted position. In a first processing station, a conductive coating is applied to a disk held by the gripper, with the contact device in the retracted position. In a second processing station, ions are generated in a plasma adjacent to the surface of the disk held by the gripper. The contact device is in the contact position in contact with the conductive coating, and a bias voltage is applied to the contact device in the second processing station. The ions are accelerated from the plasma toward the disk by the bias voltage applied to the conductive coating.
    Type: Grant
    Filed: February 1, 2000
    Date of Patent: May 8, 2001
    Assignee: Intevac, Inc.
    Inventors: Terry Bluck, James H. Rogers, Jun Xie, Eric C. Lawson
  • Patent number: 6217657
    Abstract: A resist processing system includes a sensor connected for detecting the surface level of the processing solution contained in an intermediate tank, and a controller connected for controlling the fluid pressure on the basis of the surface level detected by the sensor.
    Type: Grant
    Filed: October 21, 1998
    Date of Patent: April 17, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Yukio Kiba, Norio Semba, Keizo Hasebe
  • Patent number: 6162294
    Abstract: An apparatus for exhausting coating materials used in the process of spin coating a top surface of a wafer, the wafer having an edge and a bottom surface that is supported and rotated by a rotatable chuck attached by a shaft to a spin motor. The apparatus includes a bowl having an exhausted drain configured to receive excess liquid and vapor from the spin coating and an assembly configured to maintain the drain at a negative pressure differential relative to the bowl. In a preferred embodiment, a baffle is attached to the bottom to limit the flow of the liquid and vapor into the drain to a predetermined direction.
    Type: Grant
    Filed: June 22, 1998
    Date of Patent: December 19, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Shawn D. Davis, John S. Molebash, Bruce L. Hayes, John T. Davlin
  • Patent number: 6149984
    Abstract: In processing an object by irradiating it with laser light, a laser irradiation chamber is evacuated to a pressure value suitable for the intended laser light processing and the laser light processing is performed with the pressure in the chamber kept constant at the above value. Further, electrodes are provided in the laser irradiation chamber, and the inside of the chamber is cleaned by introducing an etching gas into the chamber during or immediately before the laser light irradiation and rendering the etching gas active.
    Type: Grant
    Filed: May 3, 1999
    Date of Patent: November 21, 2000
    Assignee: Semiconductor Energy Laboratory, Inc.
    Inventors: Shunpei Yamazaki, Naoto Kusumoto
  • Patent number: 6124793
    Abstract: A system coupleable to a heated wafer chuck control system provides an indication that the heated chuck is operating at a temperature outside of a desired operational range. An operational temperature circuit generates an operational temperature limit signal which is reflective of a selected limit for a heated wafer chuck. An input circuit configured for coupling to a heated wafer chuck control system provides a chuck temperature signal which is reflective of the actual measured temperature of the heated chuck. A comparator circuit coupled to the operational temperature circuit and the input circuit compares the limit signal to the chuck temperature signal and provides an output signal for generating a humanly-perceptible indication of the chuck temperature status, and an interlace circuit controls other aspects of the system for turning the chuck OFF. The system includes circuitry for verifying and calibrating the operation of the control board for the heated chuck.
    Type: Grant
    Filed: November 9, 1999
    Date of Patent: September 26, 2000
    Assignees: Sony Corporation, Sony Electronics Inc.
    Inventor: Paul L. Knutson
  • Patent number: 6099896
    Abstract: Solvent-free lubrication of thin film magnetic media, such as magnetic discs, is implemented by applying collimated and/or non-collimated beams of lubricant molecules, including polymeric lubricants having a known and narrow molecular weight distribution to selected regions of the media surface, such as the landing zone. Embodiments include providing in-situ and on-demand fractionation of polymeric lubricants.
    Type: Grant
    Filed: July 23, 1998
    Date of Patent: August 8, 2000
    Assignee: Seagate Technology, Inc.
    Inventor: Michael J. Stirniman
  • Patent number: 6045615
    Abstract: A paste dispensing system for dispensing paste to a substrate such as a ceramic greensheet or other electronic component substrate comprises a reservoir for holding the paste and a nozzle housing in fluid communication with the reservoir and having an opening therein through which the paste is dispensed. The nozzle housing has disposed therein a rotatable slotted shutter which is in fluid communication with the reservoir and which has an auger disposed in the shutter. The auger when actuated, draws paste from the reservoir into the shutter, advances the liquid material through the shutter and circulates the paste back to the reservoir. When it is desired to dispense the paste, the shutter is rotated so that the slot in the shutter communicates with a slot in a nozzle plate connected to the nozzle housing through which slot the paste is dispensed. The paste is continually circulated through the paste dispensing system by the auger whether or not paste is being dispensed.
    Type: Grant
    Filed: January 28, 1998
    Date of Patent: April 4, 2000
    Assignee: International Business Machines Corporation
    Inventors: Alvin W. Buechele, John T. Butler, Philo B. Hodge, David C. Polgrean
  • Patent number: 6040004
    Abstract: A particle-coated substrate (in particular, an abrasive material formed by coating a substrate with abrasive particles) in which a substrate is coated uniformly and in a thin layer with cohesive fine particles, a particle ejector for fabricating the coated substrate, a coated substrate fabricating apparatus comprising the ejector, a particle-coated substrate fabricating method (in particular, a method of fabricating an abrasive material in which a substrate is coated with abrasive particles), and an abrasive sheet. Agitation gas is fed through the porous wall of a particle storage container in the ejector, and an ejection gas is fed from an ejector nozzle through the container to deliver the fluidized particles and ejection gas through a discharge tube generally coaxial with the ejection gas nozzle. The particle ejector is capable of attaining a uniform particle size distribution without causing the particles to undergo blocking, agglomeration, or bridging.
    Type: Grant
    Filed: August 1, 1997
    Date of Patent: March 21, 2000
    Assignee: 3M Innovative Properties Company
    Inventors: Kenji Matsumoto, Kazuo Suzuki, Muneo Haga