Abstract: A plasma source chamber (10) for use in a spectrometer comprises an inner housing (11) for accommodating a plasma source (31) and an outer housing (12) accommodating the inner housing. The outer housing (12) comprises at least one outer air inlet opening (21) in a first wall and at least one outer air outlet opening (22) in a second wall. Walls of the inner housing and walls of the outer housing define a spacing (25) so as to allow a first air flow (1) from the at least one outer air inlet opening (21) to the at least one outer air outlet opening (22) through the spacing (25) between the inner housing and the outer housing. The inner housing (11) comprises at least one inner air inlet opening (23) in a first wall and at least one inner air outlet opening (24) in a second wall to allow a second air flow (2) from the at least one inner air inlet opening to the at least one inner air outlet opening through the inner housing.

Abstract: A wafer inspection method includes acquiring an inspection image from an edge region of a wafer, generating a color profile of the inspection image in a radial direction of the wafer, detecting a side surface of a layer formed on the wafer based on a change in the color profile in a first direction from a side surface of the wafer toward a center of the wafer, and calculating a distance between the side surface of the layer and the side surface of the wafer.

Abstract: A self-powered ionization device is a bipolar plasma ionization module powered by a wind turbine and supported within a unit of HVAC ductwork by at least three adjustable legs. Power generated by an air current within the ductwork operates the bipolar plasma ionization module.

Abstract: An apparatus for applying a sealing and/or a coating substance to a component, in particular a vehicle body component. The apparatus includes kinematics, a spray device, and a sensor. The apparatus is configured to: a) acquire computer-aided design (CAD)-based information on the component; and in real time: b) acquire actual information on the component by the first sensor; c) create a movement profile for the kinematics and an application profile for the spray device on a basis of the CAD-based information and the actual information; and d) execute the movement profile and the application profile on the component.

Abstract: An illumination device includes first, second, and third light-emitting diode chips arranged around a center axis along virtual outlines of first, second, and third geometric figures, respectively. The geometric figures are concentric. A bond wire is connected to a connection point of each chip in its peripheral region. Multiple groups are defined, with each including one each of the first, second, and third chips. Within a first group, the first, second, and third chips are arranged on first, second, and third virtual rays, respectively. The rays each intersect only a single light-emitting diode chip, are transverse to the center axis, and originate at, and extend outwardly from, the center axis. In the first group, the second chip neighbors the first chip, the third chip neighbors the second chip, and the chips are rotated relative to one another such that the respective connection points are oriented in different directions.

Abstract: A system and method for operating at least one stowable automated robotic pod in a workplace having a workpiece is disclosed. The pod includes a robot on a base that can also include one or both of a tool nest and process equipment. A door to subfloor storage allows the pod to raise its base vertical, placing the robot into the desired vertical position in the workspace. Once operations on the workpiece are complete, the pod withdraws back to the subfloor storage and the doors to the storage volume close.

Abstract: Apparatuses and methods related to improving environmental protection and waste collection from application of deposition material using portable systems that are easier for operators to use on surfaces such as ship hulls are provided. Embodiments include a portable and repositionable deposition material applicator enclosure and application system for applying deposition material on a substrate employing non-adherent deposition material waste removal and selective enclosure coupling and decoupling structures or systems employing magnetic and suction or differential pressure based forces.

Abstract: A robotic device and mobility module for navigating through a passageway whose diameter may vary comprises a central support member, a first casing coupled to the elongate support member via a first expandable and collapsible linkage, the first casing having an external surface including a first movable track, and a second casing coupled to an opposite side of the elongate support member from the first casing, the second casing coupled to the elongate support member via a second expandable and collapsible linkage and including an external surface including a second movable track.

Abstract: A gas supply unit includes a base plate, a plurality of gas supply regions protruding from the base plate and arranged on the base plate in a circumferential direction, and a plurality of sidewall trenches alternating with the gas supply regions on the base plate. A distance between opposing surfaces of the base plate increases in a radial direction from a center of the base plate in each of the plurality of sidewall trenches, so each of the plurality of sidewall trenches has a depth that decreases in the radial direction from the center of the base plate.

Abstract: A method and a system for moving a substrate, the system includes a chamber, a chuck, a movement system that is positioned outside the chamber, a controller, an intermediate element, at least one sealing element that is configured to form a dynamic seal between the intermediate element and the chamber housing. The movement system is configured to repeat, for each region of the substrate out of a plurality of regions of the substrate, the steps of: rotating the chuck to position a given portion of the region of the substrate within a field of view that is related to an opening of the chamber housing; and moving the chuck relation to the opening to position additional portions of the region of the substrate within the field of view that is related to the opening.

Abstract: An apparatus for painting an object, the apparatus having a painting head equipped with a spraying nozzle arranged to deliver a flow of paint on a surface. The apparatus also includes a device for moving the painting head in the space according to at least two degrees of freedom. An identification device is also provided for identifying the three-dimensional shape of the surface. A processing means is also provided to process the detected projected image and to determine the spatial coordinates of each point.

Abstract: An apparatus for aligning a dispenser includes a table having a first alignment mark, an alignment plate provided along at least one side of the table, at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark, a first image camera provided along a side of the syringe and detecting an image of the second alignment mark, a second image camera detecting an image of the first alignment mark, and an alignment control unit aligning the image of the second alignment mark and a first reference position, and aligning an image of the first alignment mark and a second reference position.

Abstract: The present invention relates to a pulsed laser deposition system, and particularly relates to a pulsed laser deposition system capable of using several different targets. In the pulsed laser deposition system, a beam-splitting device is provided to split a UV laser beam into several UV laser beams and to introduce these UV laser beams to different targets simultaneously. Therefore, the pulsed laser deposition system can use several different targets and can be used to form doped epitaxial layer (III-V semiconductor film) and ternary or quaternary epitaxial layer (III-V semiconductor film).

Abstract: A non-contact edge coating apparatus includes an applicator for applying a coating material on an edge of a solar cell substrate and a control system configured to drive the applicator. The control system may drive the applicator along an axis to maintain a distance with an edge of the substrate as the substrate is rotated to have the edge coated with a coating material. The applicator may include a recessed portion into which the edge of the substrate is received for edge coating. For example, the applicator may be a roller with a groove. Coating material may be introduced into the groove for application onto the edge of the substrate. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

Abstract: The present invention relates to a spark discharge generator. The spark discharge system of the present invention includes a plurality of columnar electrodes and a ground plate having a plurality of outlet holes at positions corresponding to the columnar electrodes. The use of the spark discharge generator enables the production of a three-dimensionally shaped nanostructure array on a large area in a uniform and rapid manner.

Abstract: A vapor phase growth apparatus of an embodiment includes: a reaction chamber; a shower plate disposed in the upper portion of the reaction chamber to supply a gas into the reaction chamber; and a support portion disposed below the shower plate inside the reaction chamber to place a substrate thereon. Then, the shower plate includes a plurality of first and second lateral gas passages disposed within different horizontal planes and first and second gas ejection holes connected to the first and second lateral gas passages. Further, the shower plate includes a center lateral gas passage that passes through a position directly above the rotation center of the support portion and third gas ejection holes connected to the center lateral gas passage. Then, the gases ejected from the first and second gas ejection holes and the center gas ejection holes are independently controllable.

Abstract: A liquid crystal material dispensing apparatus includes a spacer height measuring unit for measuring a height of a spacer on a substrate, and a liquid crystal material dispensing system for determining an amount of the liquid crystal material to be dispensed on the substrate based upon the measured spacer height and for dispensing the liquid crystal material onto the substrate.

Abstract: A monitoring apparatus is provided to monitor an amount of a liquid discharged from a nozzle. The monitoring apparatus includes a discharge case. The discharge case is configured to receive liquid discharged from a nozzle. The discharge case includes a storage space for storing the liquid. A photographing unit photographs the level of the liquid stored in the storage space.

Abstract: Disclosed is a coating apparatus configured to properly detect a liquid surface of a coating liquid stored within a slit nozzle. The disclosed coating apparatus includes a slit nozzle, a moving mechanism, a storage portion illumination unit, and an imaging unit. The slit nozzle includes an elongated main body, a storage portion configured to store a coating liquid within the main body, and a slit-shaped ejecting port configured to eject the coating liquid fed from the storage portion through a slit-shaped flow path, wherein at least a part of each of a first wall and a second wall which face each other in the main body is formed of a transparent member. The moving mechanism is configured to move the slit nozzle with respect to a substrate. The storage portion illumination unit is configured to illuminate an inside of the storage portion through the transparent member of the first wall. The imaging unit is configured to image the inside of the storage portion through the transparent member of the second wall.

Abstract: The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.

Abstract: A method for hot-dip coating of a steel strip running in a bath of liquid metal such as zinc, or metal alloy contained in a pan is provided. Dross which are formed during the coating and float at the surface of the bath are moved away from the surface of the strip by at least one inductor. Each inductor produces a sliding electromagnetic field oriented along a given direction and generates a magnetomotive force, and the magnetomotive forces displaced the dross towards a container intended to collect them and/or towards an area of the surface of the bath from which they are discharged. For at least one of the inductors, the direction of the respective sliding electromagnetic field is reversed intermittently so as to modify the flows of the dross inside the pan. A hot dip coating facility is also provided.

Abstract: A system for controlling a boundary of spreading liquid adhesive on a surface is disclosed. The system includes one or more ultra-violet (UV) sources configurable to emit UV light onto the liquid adhesive; and a control circuit coupled to the one or more UV sources and configured to control the one or more UV sources to selectively apply the UV light at selected locations on the liquid adhesive to cure the adhesive and prevent its further spread at those locations.

Abstract: The invention provides an apparatus for manufacturing a cylindrical member comprising a cylindrical core body having an outer peripheral surface with a releasing property, the apparatus comprising: a film-forming device that forms a resin film in a region at a central portion from both ends in the axial direction of the outer peripheral surface of the core body; a judging device that judges the deterioration of the releasing property of regions continuous from the region where the resin film is to be formed in the region at the inner side from both ends in the axial direction of the outer peripheral surface of the core body, before the resin film is formed by the film-forming device; and a control device that controls the film-forming device such that the resin film is formed by exposing regions with an undeteriorated releasing property on both ends in the axial direction of the outer peripheral surface of the core body, in accordance with the results of judgment by the judging device.

Abstract: A graphical application system, with a surface spattering device, with at least one nozzle for expelling a spattering material onto a target surface, a nozzle control mechanism controls expelling of the nozzle. A spatial referencing unit references the spattering device in space and a computation means automatically controls the nozzle according to information from the spatial referencing unit and according to predefined desired spattering data as a digital image or a CAD-model of a desired pattern to be spattered onto the target surface. A communication means for establishing a communication link from the spatial referencing unit to the computation means to supply the position and orientation to the computation means. The spatial referencing unit is located remote from the spattering device and comprises at least two optical 2D cameras arranged with a stereobasis, for determining the position and orientation of images taken by the cameras.

Abstract: A closed chemical introduction system used to deliver active ingredients in liquid chemical to a chemical vapor deposition system includes a robust, moisture-free cartridge containing a defined dose of liquid chemical. The cartridge is placed on a mounting slot specially configured to receive the cartridge. Upon initiating the system, a first linear mechanical actuator securely holds the cartridge in the slot, while an extraction lance attached to a second linear mechanical actuator punctures the cartridge from the bottom, extracts the liquid chemical and delivers it to a vaporization chamber. The vaporization chamber evaporates the liquid chemical and delivers the vapors containing the active ingredients to the chemical vapor deposition system.

Abstract: An assembly method of a voice coil motor for assembling component parts of a voice coil motor includes the following steps: (1) providing identifiable glue, and the identifiable glue is made by mixing colorable substance or phosphor into transparent glue; (2) coating the identifiable glue on connecting positions of the component parts; (3) curing the identifiable glue, and identifying the identifiable glue simultaneously to check dispensing and curing effect of the component parts. The assembly method can cure and check the voice coil motor simultaneously, thereby it can improve the production efficiency, reduce the manpower, and promote the development of the automated production line. An assembly device is also disclosed.

Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

Abstract: A pipeline field joint coating applicator machine. The machine having a first frame arranged to be mounted on a pipeline, the frame carrying an induction heating coil which encircles the field joint for heating. A second frame mounted on the pipeline and rotatable thereabout, which second frame carries a pipeline field joint coating applicator. A dust extraction hood mounted on the second frame having lateral sides with respective holes therein through which the pipeline may pass. The dust extraction hood is coupled to a vacuum source and a filter such that air may be drawn into the hood via one or both of the holes so that coating material-contaminated air is filtered.

Abstract: A system and method for capturing three-dimensional image data for inspection, alignment and operations of a material applicator includes an imaging system configured to capture three-dimensional image data of an electronic substrate. The imaging system includes one or more illumination assembly configured to project a spectrum of light substantially along a first axis at an angle to the surface of the electronic substrate. The imaging system further includes an image sensor assembly configured to detect the spectrum of light reflected from an electronic substrate surface, with the image sensor assembly including a viewing plane. The material application includes a controller that is coupled to the imaging system. The controller is configured to control movement of the imaging system and to communicate with the image sensor assembly to produce a three-dimensional image of the topology of the electronic substrate.

Abstract: An exchangeable cartridge system for use with a production coater for coating a material with a solution or a suspension. The exchangeable cartridge system includes an integrated drum and exhaust plenum, the drum is connectable with a motor of the production coater and the exhaust plenum is connectable with an exhaust duct of the production coater. The exchangeable cartridge system provides for simple exchange of drums having a wide range of production capacities.

Abstract: Various methods preserve or restore the low roughness throughout an outer shell of a device (e.g., a streamer) used underwater for seismic surveys, by applying various substances that fill micro-cracks, are easy to polish or are self-healing. Apparatuses used to implement these methods may be used shortly before the devices are deployed in water, for example, having the device passing through such an apparatus as it is moved to be deployed in water.

Abstract: An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.

Abstract: Herein is an apparatus for overlaying a media stripe onto a media stripe previously applied to a surface (i.e., “old media strip”). The apparatus includes a mobile frame housing controls and an applicator head having a spray nozzle that applies new media. The applicator head also includes sensors and/or a camera that cast a cone of vision onto a surface. The cone of vision is positioned tangentially to a first edge of the old media stripe. If while operating the apparatus, the applicator head moves and the new media stripe is not overlaid onto the old media stripe, the sensors and/or camera will direct an actuator arm (or similar) to reposition the applicator head and spray nozzle so that the new media stripe is once again sprayed on top of the old media stripe.

Abstract: Disclosed is a process tunnel (102) through which substrates (140) may be transported in a floating condition between two gas bearings (124, 134). To monitor the transport of the substrates through the process tunnel, the upper and lower walls (120, 130) of the tunnel are fitted with at least one substrate detection sensor (S1, . . . , S6) at a respective substrate detection sensor location, said substrate detection sensor being configured to generate a reference signal reflecting a presence of a substrate between said first and second walls near and/or at said substrate detection sensor location. Also provided is a monitoring and control unit (160) that is operably connected to the at least one substrate detection sensor (S1, . . . , S6), and that is configured to record said reference signal as a function of time and to process said reference signal.

Abstract: A substrate position detecting apparatus detects a position of a substrate inside a chamber from an image of a target inside the chamber. The apparatus includes an image pickup device to pick up the image of the target inside the chamber through a window, an illumination device to irradiate light upwards, an illumination reflecting plate provided above the illumination device and including a reflecting surface to reflect the light from the illumination device towards the window, and a reflection restricting part provided on the reflecting surface to form a shadow in a predetermined region that includes the target inside the chamber.

Abstract: A board printing apparatus includes a board working table, a first printing table, a second printing table, and a control portion controlling printing operations. The control portion is configured to perform second printing on a board held by the board working table by a large component mask of the second printing table after a first printing performed on the board held by the board working table by a small component mask of the first printing table.

Abstract: A device and a method for visual monitoring and stabilization of an elongated metallic strip during continuous transport of the strip in a transport direction along a predetermined transport path, wherein the strip has been coated with a metallic layer by the strip having continuously passed through a bath of molten metal. The device includes an electromagnetic stabilizing device with at least one first pair of electromagnetic stabilizing means arranged on each side of the predetermined transport path, and a wiping device for wiping off superfluous molten metal from the strip by applying an air current in a line transversely of the transport direction of the strip and across essentially the whole width of the strip. A first image-reading apparatus takes images of the actual position of the strip in relation to the predetermined transport path. A second and third image-reading apparatus take images of the surface of the strip.

Abstract: A deposition apparatus for performing a deposition process by using a mask with respect to a substrate, the deposition apparatus includes a chamber, a support unit in the chamber, the support unit including first holes and being configured to support the substrate, a supply unit configured to supply at least one deposition raw material toward the substrate, and movable alignment units through the first holes of the support unit, the alignment units being configured to support the mask and to align the mask with respect to the substrate.

Abstract: A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cut-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed.

Abstract: A charged particle beam device includes: a sample stage (146) supporting a sample; a charged particle beam optical system that focuses a charged particle beam from a charged particle source on the sample; a charged particle beam column (101) housing the charged particle beam optical system; a first differential evacuation diaphragm (108) attached to the charged particle beam column (101); a frontal sample chamber (103) disposed in connection with the charged particle beam column (101) via the first differential evacuation diaphragm (108); a second differential evacuation diaphragm (109) attached to the frontal sample chamber (103); a first vacuum pump (141) for evacuating the charged particle beam column (101); and a second vacuum pump (142) for evacuating the frontal sample chamber (103).

Abstract: An apparatus for removing a defect according to the embodiment includes an image processing part for observing a surface of a substrate; a layer forming part for forming a layer on the surface of the substrate; and a humidity controlling part for controlling humidity in a chamber in which the substrate is placed. A method for removing a defect according to the embodiment includes detecting the defect on a surface of a substrate; forming an oxide layer by oxidizing the defect; and removing the oxide layer. A method for removing a defect according to another embodiment includes forming an oxide layer on an entire surface of a substrate; and removing the oxide layer to remove the defect.

Abstract: Fanfold and/or perforated media comprising a substrate including one or more friable coatings and an overcoat covering at least a portion of the one or more friable coatings proximate to one or more associated fanfolds and/or perforations is provided, wherein the overcoat mitigates spallation of the one or more friable coatings. Methods and apparatus for making the same are also disclosed.

Abstract: A system is disclosed for depositing material on a component. The system includes a deposition device operatively coupled to a fiber optic Nd:YAG laser. The deposition device includes a focusing prism that focuses the Nd:YAG laser at a focal area on a bladed disk, where the focal area on the bladed disk is between two blades of the disk. The system further includes an imaging means that views the focal area of the component. The imaging means and the fiber optic Nd:YAG laser each are positioned in a substantially similar optical relationship to the focal area on the bladed disk. The system further includes an additive material delivery means that delivers additive material to the component at the focal area on the component.

Abstract: A dispensing system includes a frame, a dispensing unit gantry movably coupled to the frame, and a dispensing unit coupled to the dispensing unit gantry. The dispensing unit further includes a vision system gantry coupled to the frame and a vision system coupled to the vision system gantry. A controller is coupled to the dispensing unit gantry, the dispensing unit, the vision system gantry, and the vision system. The controller is configured to obtain an image of a fiducial provided on the electronic substrate, obtain an image of at least a portion of an object positioned on the electronic substrate, orient the object with respect to the dispensing unit, and perform a dispense operation to secure the object to the electronic substrate. Methods of dispensing material on a substrate are further disclosed.

Abstract: An apparatus includes a piezoelectric print head capable of ejecting a droplet of a coating substance towards a stent strut, a sensor capable of sensing a parameter of the droplet, and a controller, communicatively coupled to the print head and the sensor, capable of determining if the parameter of the droplet meets a requirement. A method includes ejecting a droplet of a coating substance towards a stent strut with a piezoelectric print head, sensing a parameter of the droplet, and determining whether the parameter of the droplet meets a requirement.

Abstract: An adhesive application apparatus for applying a liquid adhesive to an object includes a regular application stage against which the object is placed for a regular application of the liquid adhesive to the object, a trial application stage to which a trial application of the liquid adhesive is carried out, an application unit relatively movable with respect to the regular application stage and trial application stage to carry out the regular application and trial application of the liquid adhesive, and a suction unit carrying out a suction operation of the liquid adhesive used in the trial application. The adhesive application apparatus smoothly carries out the trial application of the liquid adhesive without bothering the operation of an adhesive application line.

Abstract: A deposition apparatus includes a process chamber including an observing window, a crucible disposed in the process chamber to overlap with the observing window in a first direction, a disc disposed between the observing window and the crucible to overlap with the observing window in the first direction and rotated with respect to the first direction, a rotation unit coupled to the process chamber and the disc to rotate the disc, a deposition preventing plate disposed between the disc and the crucible and provided with an opening formed therethrough and overlapped with the observing window in the first direction, and a measuring sensor disposed outside the process chamber to overlap with the observing window, the disc, and the crucible in the first direction. The measuring sensor senses a distance between the deposition material and the measuring sensor to measure a residual amount of the deposition material.

Abstract: A machine (12, 13) for painting small three-dimensional objects (2) comprises a plurality of spindles (9) equipped with holders (10) for objects (2) to be painted. A unit (15) able to rotate about an axis (16) is equipped with a plurality of seats (17) structured to receive a spindle (9). The spindle (9) is removably associable with said seat (17). An airless painting device (25) is operatively positioned at a painting station (26) designed to receive said seats (17) in sequence. First actuator means (27) drive the rotation about a painting axis (18) at least of the holder (10) when the seat is positioned at the painting station (26). Means (29) for transferring the objects (2) grip a spindle (9) positioned along a transfer line (3) and place it in one of the seats (17) and/or vice versa.

Abstract: A spray monitoring device analyzes images obtained from a beam passing through a spray pattern applying a spray to a substrate, and identifies discontinuities in the image as indicative of a discontinuity in a spray pattern. The spray pattern is produced by a plurality of nozzles spaced apart across the substrate for applying a suitable coating thereto. The beam is produced by a laser, that preferably has a collimator for distributing the beam intensity. The beam is imaged by a camera that provides a constant image to a computers where the scattering of beam light by the spray pattern is processed by image processing software and optionally provided to a user interface for analysis. Discontinuities detected by the user or software indicate faulty spray nozzles and may trigger remedial action.

Abstract: An electrode plate production device includes a drying device and a plurality of surface state detection devices. The drying device is configured to dry a coating film for forming an active material layer that is coated on a surface of a substrate sheet for forming a current collector while the substrate sheet travels in a traveling direction. The coating film includes at least an active material, a bonding agent and a solvent. The surface state detection devices are configured to detect a surface state of the coating film in a noncontact manner. The surface state detection devices are arranged within the drying device in the traveling direction of the substrate sheet with respect to each other.