Abstract: A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit

Abstract: Methods and apparatuses for dispensing samples or reagents onto a target object are provided. A dispensing position designating section (62) designates the dispensing position on the target object (50), such as a membrane, based on an image of the target object (50) displayed on a monitoring section (60). A dispensing control section (64) positions the target object and the dispensing device relative to each other so that the designated dispensing position on the target object is placed beneath the dispensing device (10) and controls the dispensing operation of the dispensing device (10). A dispensing position information creating section (68) creates dispensing position information about the dispensing position on the target object (50) which is designated by the dispensing position designating section (62) and to which the dispensing operation has been performed and outputs it to the outside.

Abstract: Marking information relating to use of a marking device to perform a marking operation may be acquired from one or more input devices, logged/stored in local memory of a marking device, formatted in various manners, processed and/or analyzed at the marking device itself, and/or transmitted to another device (e.g., a remote computer/server) for storage, processing and/or analysis. In one example, a marking device may include one or more environmental sensors and/or operational sensors, and the marking information may include environmental information and operational information derived from such sensors. Environmental and/or operational information may be used to control operation of the marking device, assess out-of-tolerance conditions in connection with use of the marking device, and/or provide alerts or other feedback. Additional enhancements are disclosed relating to improving the determination of a location (e.g.

Abstract: An apparatus and method for coating abluminal surface of a stent is described. The apparatus includes a stent support, a coating device, and an imaging system. The coating device includes a solution reservoir and transducer assembly. The transducer assembly includes a plurality of transducers and a controller. Each transducer is used to generate focused acoustic waves in the coating substance in the reservoir. A controller is communicated to an image system to enable the transducers to generate droplets on demand and at the predetermined ejection points on the surface of the coating substance to coat the stent. A method for coating a stent includes stent mounting, stent movement, and droplet excitation.

Abstract: A system for producing multi-component colloidal structures has a supply system; an assembly system that is in fluid connection with the supply system to receive a supply of colloidal structural components from the supply system; and an output system in fluid connection with the assembly system. The assembly system has an assembly chamber adapted to contain colloidal structural components during assembly of a multi-component colloidal structure and is structured and arranged to control positions and orientations of first and second c structural components in the assembly chamber to bring the first and second colloidal structural components together in predetermined relative positions and orientations for assembly into at least a portion of the multi-component colloidal structure.

Abstract: Process of masking cooling holes of a gas turbine component with an external surface, comprising a cavity and a plurality of cooling holes before coating the gas turbine component, comprising the steps of first applying a mask material to the cooling holes so that the cooling holes are filled at least closest to the external surface, whereby the mask material contains a substance which fluoresces under ultraviolet light and a filler material. Then the mask material within the cooling holes is thickening. An inspection using ultraviolet light to locate any unwanted residual mask material on the external surface is carried out and unwanted residual mask material is removed before the coating is applied to the external surface of the component and the masked cooling holes. In the end the mask material is removed from the cooling holes.

Abstract: In a method of measuring the thickness of a coating as it is applied to a substrate, wherein the coating is applied as a thin ribbon from a spray gun, at least one surface profile of the applied coating is obtained along a line intersecting the ribbon during relative movement of the substrate and spray gun. The thickness of the applied coating is computed from the obtained surface profile.

Abstract: A method and apparatus for controlling coating material deposition on to a medical device. Images of material drops in flight are captured and an average single drop volume value is calculated by conversion of the captured drop images to a volume measurement. The average single drop volume value is used to calculate a total number of drops necessary to apply a desired amount of coating. Alternately, material is applied and the amount of material deposited is accumulated and adjustments are made to deposit only a desired amount of coating material. A drop volume is determined for either every drop or a sampling of drops as the drops are being applied. Adjustments to the coating process include changing drop size and changing a number of drops to be deposited.

Abstract: A spray application system for applying material to a surface of a rotating body such as a beverage can includes a detector that detects the actual speed of rotation of the surface during a spraying operation. This allows a controller to adjust trigger signals for the application device to be adjusted based on speed of rotation to minimize overcoat. A laser sensor may be used as an example. The use of the speed detector also allows for partial wraps as well as full wraps of applying material to the rotating surface.

Abstract: A liquid adhesive dispensing system operable for more uniformly applying liquid adhesive foam onto moving substrates, notwithstanding changes in line speed, adhesive liquid flow rates, or foaming/atomizing air pressures. The illustrated liquid adhesive system includes a header having a plurality of air atomizing spray guns; the spray guns each having a respective variable speed positive displacement pump for directing a metered quantity of liquid adhesive from a liquid adhesive supply to the respective spray gun; and a control for controlling the operating speed of the positive displacement pumps in relation to the speed of the moving substrate and the foaming/atomizing air pressure to the spray guns in relation to the operating speed of the positive displacement pumps. The control further is operable for monitoring pressures across the positive displacement pumps for insuring the accurate direction of metered quantities of liquid to the spray guns.

Abstract: A shower head structure characterized by comprising a shower head section, opposed to the upper surface of a mounting table in an evacuable treating vessel, for injecting a processing gas into the treating vessel; a temperature observation through-hole which opens in the lower surface of the shower head so as to be opposed to the upper surface of the mounting table, a transparent observation window which hermetically seals the upper end of the temperature observation through-hole, a radiation thermometer disposed on the upper surface of the transparent observation window, an adhesion preventive gas supply path communicating with the temperature observation through-hole to prevent a film from adhering to the transparent observation window, wherein the adhesion preventive gas supply path communicates with the temperature observation through-hole through an injection nozzle for injecting the adhesion preventive gas to the transparent observation window.

Abstract: Methods and apparatus for generating electronic records of marking operations for underground facilities/utilities. Electronic records of marking information may be logged/stored in local memory of a marking device, formatted in various manners, processed and/or analyzed at the marking device itself, and/or transmitted in whole or in part to another device (e.g., a remote computer/server) for storage, processing and/or analysis. In one example, service-related information and/or ticket information is collected and logged into an electronic record of a marking operation. Such information may in some cases be logged together with actuation data based on one or more actuations of a marking device (e.g., a trigger-pull to dispense marking material).

Abstract: A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.

Abstract: A film formation system 10 has a processing chamber 15 bounded by sidewalls 18 and a top cover 11. In one embodiment, the top cover 11 has a reflective surface 13 for reflecting radiant energy back onto a substrate 19, pyrometers 405 for measuring the temperature of the substrate 19 across a number of zones, and at least one emissometer 410 for measuring the actual emissivity of the substrate 19. In another embodiment, a radiant heating system 313 is disposed under the substrate support 16. The temperature of the substrate 19 is obtained from pyrometric data from the pyrometers 405, and the emissometer 410.

Abstract: The system and method for decorating cakes and confections includes an adjustable stand for a laser, which is used to project cake decorating guidelines. The stand includes a base member and a removable vertical rod member that extends from the base. In one embodiment, the vertical rod member includes a threaded portion at its bottom end that may be screwed into a threaded receiving hole on the top of the base. A generally horizontal rod may be attached to the vertical rod by an adjustable clamp or other device, so that it may be secured to the vertical rod at any point, so that the height of the horizontal rod above the base may be adjusted to any desired position. Further, the clamp for the horizontal rod may pivot, so that the horizontal rod may be rotated angularly from the vertical rod upwardly or downwardly, as desired. A laser line generator includes a clamp member, or similar device, so that the laser may be positioned along either the vertical rod or the horizontal rod in any desired position.

Abstract: A spray coating apparatus comprises a spray gun (12) operable to deposit a sprayed coating via a spray nozzle (18) onto a surface, a mapping means (22) associated with the spray gun (12) operable to ascertain and store topographical characteristics of the surface, a position sensor (28) operable to ascertain the position of the spray gun (12) relative to the surface, a coating thickness monitor (26) operable to ascertain the thickness of a coating applied to the surface, and a nozzle control means (24) operable to control the deposition of the sprayed coating, wherein the nozzle control means (24), in use, control the deposition of the sprayed coating in response to information provided by the position sensor (28), the coating thickness monitor (26) and the mapping means (22).

Abstract: The present invention provides an apparatus for manufacturing a bonded substrate that suppresses a defect in the bonded substrate. When the pressure in a vacuum chamber is at the atmospheric level, upper and lower chuck units respectively attract substrates through vacuum. When the vacuum chamber is depressurized, each chuck unit electrostatically attracts the associated substrate. During the depressurization of the vacuum chamber, the pressure for attracting each substrate to the associated chuck unit is controlled to be equal to the pressure in the vacuum chamber. This prevents each substrate from falling from or moving relative to the associated chuck unit. The first and second substrates are thus bonded together and accurately aligned.

Abstract: The present invention is a method for localized chemical vapor deposition (CVD) for localized growing for example for carbon nanotubes (CNT), nanowires, and oxidation using a heated tip or an array of heated tips to locally heat the area of interest. As the tips moved, material such as CNTs grows in the direction of movement. The Scanning Probe Growth (SPG) or nanoCVD technique has similarities to the CVD growth; however it allows for controlled synthesis and direction and eliminates the need for masks.

Abstract: LEDs in an LED display part are arranged so as to have approximately the same placing form as containers. When a chemical solution in a container is exhausted, a corresponding LED of the LED display part lights up. Prior to an operation of replacing the container, an operator allows a bar code reader to read a bar code of an unused container. A bar code reader collator collates the bar code data of the unused container with the bar code data of a container corresponding to the lighting LED, which is already registered in a data base. When the bar code reader collator judges that the chemical solutions in the both containers are identical, the display of the LED is changed from a lighting-up display to a flashing display. This makes it easy to recognize the disposing position of the empty container to be replaced, thereby effectively preventing incorrect replacement of the container.

Abstract: An apparatus and method for the controlled fabrication of nanostructures using catalyst retaining structures is disclosed. The apparatus includes one or more modified force microscopes having a nanotube attached to the tip portion of the microscopes. An electric current is passed from the nanotube to a catalyst layer of a substrate, thereby causing a localized chemical reaction to occur in a resist layer adjacent the catalyst layer. The region of the resist layer where the chemical reaction occurred is etched, thereby exposing a catalyst particle or particles in the catalyst layer surrounded by a wall of unetched resist material. Subsequent chemical vapor deposition causes growth of a nanostructure to occur upward through the wall of unetched resist material having controlled characteristics of height and diameter and, for parallel systems, number density.

Abstract: Marking devices for dispensing markers on the ground and marking methods are provided. The marking devices and marking methods use a marking dispenser having a machine-readable ID mechanism. The ID mechanism has data storage capability. In one embodiment, the marking dispenser may be provided with a radio-frequency identification (RFID) tag. In another embodiment, the marking dispenser may be provided with a barcode. The type of information that may be encoded in the ID mechanism may include, but is not limited to, product-specific information, user-specific information, other predetermined information of interest, and any combination thereof. The ID information encoded in the ID mechanism may be collected and used for various purposes, such as, but not limited to, real-time product verification, tracking which user location received a batch of marking paint, tracking marking paint inventory, tracking marking paint problems, and tracking marking paint usage.

Abstract: A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cur-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed.

Abstract: Monochromatic or multichromatic images may be created on surfaces. The surface is moved to first, second and third stations. The surface is electrically biased, and powder is transferred to the surface electrostatically at the first station. The powder is fused or sintered selectively on the surface at the second station. Unfused or unsintered portions of the powder are removed from the surface at the third station.

Abstract: A device for repairing a chimney preferably includes a rod effective for positioning and manipulating a camera and a plunger blade in a chimney; a camera attached to the lower portion of the rod in a manner such that rotation of the rod results in a corresponding rotation of the camera; and a plunger blade attached to the rod above the camera. The plunger blade is adapted to apply mortar to the sides of a chimney when the device is pulled upward in the chimney. The device may further include a camera-direction indicator attached to the rod above the plunger blade in a manner such that the camera-direction indicator is effective for indicating the direction of view of said camera even when the camera is not visible to the operator.

Abstract: A notch or the like of a wafer is detected via a guide member by means of a CCD camera provided so that an optical axis is coaxial to an optical axis of a laser beam, and alignment of the wafer is carried out. Next, in a state in which liquid ejected from a main nozzle or sub-nozzles is guided by means of the guide member, a laser beam whose optical axis is provided to be coaxial to the optical axis of the CCD camera is irradiated via the guide member. In addition, a predetermined processing operation is carried out with respect to the surface while an irradiation position of the laser beam is moved in a horizontal direction. The wafer is then transported from a chuck to the outside, and then, a purge gas is supplied to a bottom face of the guide member, and the bottom face is dried.

Abstract: There is disclosed a film forming method comprising continuously discharging a solution adjusted so as to spread over a substrate by a given amount to the substrate through a discharge port disposed in a nozzle, moving the nozzle and substrate with respect to each other, and holding the supplied solution onto the substrate to form a liquid film, wherein a distance h between the discharge port of the nozzle and the substrate is set to be not less than 2 mm and to be in a range less than 5×10?5 q? (mm) given with respect to a surface tension ? (N/m) of the solution, discharge speed q (m/sec) of the solution continuously discharged through the discharge port, and a constant of 5×10?5 (m·sec/N).

Abstract: An apparatus for aligning a dispenser includes a table having a first alignment mark, an alignment plate provided along at least one side of the table, at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark, a first image camera provided along a side of the syringe and detecting an image of the second alignment mark, a second image camera detecting an image of the first alignment mark, and an alignment control unit aligning the image of the second alignment mark and a first reference position, and aligning an image of the first alignment mark and a second reference position.

Abstract: An apparatus for depositing viscous material on an electronic substrate includes a frame, a unit coupled to the frame, the unit being configured to deposit material on the electronic substrate, and a substrate support assembly coupled to the frame. The substrate support assembly is configured to support the electronic substrate. The substrate support assembly includes a plurality of support elements, a table coupled to the frame, the table having a support surface to support at least one support element of the plurality of support elements, a placement head configured to releasably secure the at least one support element, and a transport device coupled to the frame and the placement head. The transport device is configured to move the placement head relative to the table in both X and Y directions to place the at least one support element on the support surface of the table in a predetermined position.

Abstract: The present invention presents an improved upper electrode for a plasma processing system, wherein the design and fabrication of an electrode plate coupled to an upper assembly advantageously provides gas injection of a process gas with substantially minimal erosion of the electrode plate.

Abstract: A dispenser for a liquid crystal display panel includes a syringe having a nozzle provided at an end thereof, a body in which the syringe is mounted, a vertical driving stepping motor for moving the body in a vertical direction, a first sensor for detecting whether the nozzle of the syringe is in contact with a substrate, a second sensor for detecting a gap distance between the nozzle and the substrate, and a main unit for controlling the vertical driving stepping motor in response to an output from the second sensor to obtain a desired gap distance between the nozzle and the substrate.

Abstract: Disclosed is a sealant dispenser for more precisely dispensing a sealant onto a substrate, and a control method thereof. The sealant dispenser includes a stage on which a substrate is mounted; a nozzle for dispensing a sealant while making a relative motion with the substrate; a syringe coupled to the nozzle, for storing the sealant; and a distance sensor installed on both sides of a lower portion of the syringe, for measuring a vertical distance between a principal plane of the substrate and an outlet of the nozzle. According to the principles of the present invention, because the nozzle and the syringe have substantially the same central axis, the response speed of the sealant to be dispensed is increased and the start point and the end point of paste pattern are more precisely dispensed. Also, by minimizing the distance between the nozzle and a measuring point provided by the distance sensor, it becomes possible to dispense the sealant at higher precision.

Abstract: When a solution sprayed by a spray nozzle portion reaches one surface portion of a substrate, a thin film forming material contained the solution decomposes thermally because the substrate is heated to a prescribed temperature, and a thin film is formed on the one surface portion of the substrate. An imaging section obtains a prescribed information on the thickness of a thin film to be formed on one surface portion of the substrate, and a main control section controls a valve section based on the prescribed information from the imaging section. Since, based on the prescribed information on the thickness of a thin film to be formed on one surface portion of the substrate, the main control section allows the spraying nozzle portion to spray the solution therefrom, a thin film of the desired thickness can be formed with high accuracy.

Abstract: An apparatus (1) for PECVD deposition of a thin layer of a barrier-effect material in a receptacle (3), the apparatus comprising: a structure (5) receiving the receptacle (3), said structure (5) defining a plasma-presence zone (18), said structure (5) being provided with an orifice (14) defining an axis (A1) and presenting an inside opening (15) opening out into the plasma-presence zone (18), and an outside opening (16) opening out outside said zone (18); an electromagnetic wave generator; and an optical plasma monitor device (19) including a pick-up (21) placed outside the plasma-presence zone (18) on the axis (A1) of said orifice.

Abstract: To simultaneously display a transfer state of substrates (wafers) held on a substrate holding tool and detail-information thereof on the same screen. In a substrate processing apparatus that loads a substrate holding tool, on which a plurality of substrates are placed, into a furnace, and applies prescribed processing thereto, a whole body of boats, as a boat image view of transfer information regarding the substrates on the substrate holding tool, is displayed in an operation screen, and detail-information of a substrate of each area is displayed in the operation screen, with the whole body of the boats divided into a plurality of areas.

Abstract: Control method and apparatus for a manual spray gun includes display that is disposed on the spray gun and that provides information to an operator about one or more coating operation parameters. An auxiliary trigger may be used that enables an operator to make selections or changes of one or more coating operation parameters. The display and auxiliary trigger together permit an operator to make selections or changes without having to divert attention or field of view away from the spray gun or the coating area, especially during a coating operation. The display may include numeric information, for example, data relating to a coating function being displayed.

Abstract: A roll coater assembly system for application of a fluid material having a transport system with a part loading system, an application system, and a curing system for curing the material applied. The transport system is a continuous conveyor having a plurality of work stations movably supporting and transporting items to be processed to the application systems and curing systems, with the conveyors of the transport and loading systems having a single drive mechanism which operates both of the conveyors, such that the cylindrical items are provided to circumferentially located stations within and surrounding a cylindrical drum of the part loading system which rotates to engage and move the cylindrical items into and out of the stations of the cylindrical drum about a central axis of the cylindrical drum and into the transport system conveyor by movement of the drive mechanism and respective conveyor synchronized by a control system.

Abstract: A color sensor monitors the output of a color producing process and produces a signal representative of a color produced by the color producing process. The signal can be used as feedback signal to control the process. Occasionally, the color sensor signal includes a component representing a transient error. A system model of the color producing process is used to predict reasonable sensor signals. A comparison of the sensor signal with the predicted sensor signals is used to determine if the sensor signal is reasonable. If the sensor signal is unreasonable, a substitute signal is used as the feedback signal to the control process. The substitute signal can be a predicted sensor signal or a signal based on historical system performance data.

Abstract: A robotic spray system is provided for accurately spraying mold release onto any size or shaped green tire. The system analyzes individual green tires using an integrated vision system. The system controls the robotic spray position, the fan, fluid, atomizing air, and tire rotation speed for optimal spray coverage on both the inside and outside of green tires. The system includes a conveyor, an overhead mounted camera located over an infeed station, and a second camera located perpendicular to the green tire's tread and several feet away from the center of the tire. Pictures of the green tire in the station are used to estimate the center and radius of the tire and locate the angle of the bar code with respect to the center of the tire. Reference points are provided from the camera images and robot positions are calculated to control the spraying.

Abstract: An apparatus for forming an alignment layer of a liquid crystal display device includes: an alignment material dropping unit with a head having a plurality of holes for dropping an alignment material on the substrate; an alignment material supply unit to supply the alignment material to the alignment material dropping unit; a scan unit to survey alignment material dropping from the head; and a monitor to display an image base upon scan data from the scan unit so that the discharge state of the plurality of holes in the head can be checked.

Abstract: An apparatus for fabricating a flat panel display device includes a substrate on which a picture display section is formed and a stage on which the substrate is loaded. A dispenser applies a sealant along an outer line of the picture display section in the substrate. A light detector emits light toward the sealant and detects the amount of reflected light in real-time. A controller detects broken lines in the sealant in accordance with a signal supplied from the light detector and controls the dispenser so as to re-apply the sealant to spaces in the broken line in which the sealant is not present.

Abstract: When a coating film is formed on a substrate, the inplane uniformity of the thickness of the coating film is enhanced to improve through put. Above the substrate, there are provided main and auxiliary nozzles separately movable, and monitoring means for monitoring the state of the surface of the substrate to detect the occurrence of an uncoated region on the surface of the substrate. On the basis of previously prepared coating data, a coating liquid is spirally applied on the substrate by the main nozzle. Then, if the monitoring means detects the occurrence of the uncoated region in a coated region in which the coating liquid has been applied by the main nozzle, a control part detects whether it is required to supply the coating liquid to the uncoated region. If it is required, the coating liquid is supplied to the uncoated region by the auxiliary nozzle. On the other hand, the portion of occurrence of the uncoated region has been grasped by the control part.

Abstract: A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film comprises the step of detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started, and the step of controlling based on a signal of the detection at least one of the driving timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.

Abstract: A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base and the cannular tube are assembled to form the detachable detection window.

Abstract: A substrate is disposed within a processing chamber. A nitrogen precursor and a group-III precursor are flowed into the processing chamber. A layer is deposited over the substrate with a thermal chemical-vapor-deposition process at an elevated temperature within the processing chamber using the nitrogen precursor and the group-III precursor. Light beams are directed to a surface of the layer and light spots corresponding to reflections of the light beams are received from the surface at a position-sensitive detector. Positions of the light spots on the position-sensitive detector are determined from photocurrent induced in a photodiode in the position-sensitive detector. A curvature of the layer is determined from the positions of the light spots.

Abstract: A batter applicator with an adjustable coating mechanism is disclosed which includes a frame, a main batter tank, a structure comprising at least one of a submerger and an overflow structure that is adapted to be positioned proximate the main batter tank and actuatable means for tilting the structure relative to a reference horizontal surface.

Abstract: A system (20) and method for coating semiconductor material on glass sheets is performed by conveying the glass sheets vertically suspended at upper extremities thereof through a system (20) having a housing (22) including a vacuum chamber (24). The glass sheets are conveyed on shuttles (42) through an entry load lock station (26) into the housing vacuum chamber (24), through a heating station (30) and at least one deposition station (32, 34) in the housing (22), and to a cooling station 36 prior to exiting of the system through an exit load lock station (28). The resultant semiconductor coated glass sheet (G) has tong marks (44?) formed during the coating processing.

Abstract: Aspects of the invention are directed to systems and methods for dispensing materials onto a substrate. In one aspect, a dispensing system includes a dispenser having a dispensing outlet positionable over a top surface of the substrate, the dispenser having a substantially vertical dispensing axis along which material from the dispenser is dispensed, and a vision system, coupled to the dispenser, the vision system being positionable to obtain images of the top surface of the substrate along an optical axis, wherein the vision system is constructed and arranged such that the optical axis intersects the dispensing axis.

Abstract: An exemplary repairing method includes providing a substrate having a plurality of conducting lines; detecting a broken position of one of the conducting lines; switching on a nozzle; and forming a copper layer at the broken position on the substrate. The repairing method of the present invention employing a repairing device for performing a chemical vapor deposition (CVD) method to forming the copper layer at a position of the broken defect of one of the conducting lines.

Abstract: A liquid drop discharge device such as an ink jet device is provided that discharges a liquid drop with high precision. The liquid drop is discharged from a discharge head to a target position of a substrate and a cylindrical laser beam surrounds a trajectory that the liquid drop follows. As a result, the liquid drop can be rebounded by the laser beam to land at a target position of the substrate even if the course of the liquid drop discharged from the discharge head is diverted out of its predetermined trajectory.

Abstract: A position adjusting apparatus adjusts a mounting position in mounting a substrate on a substrate holder within a sputtering system by a vacuum robot. The position adjusting apparatus has a memory for storing information on the mounting position, driving unit for mounting the substrate on the substrate holder by the vacuum robot on the basis of the stored information on the mounting position, measuring unit for measuring a mounted state of the mounted substrate, judging unit for judging whether or not displacement has occurred on the basis of the measured result and correcting unit for correcting the information on the position for mounting the substrate when it is judged that displacement has occurred.