With Non-impelling Fluid Deflector Or Baffle Other Than Conduits Or Nozzles Patents (Class 134/182)
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Patent number: 5935341Abstract: A portable parts washer flows a washing agent over an object to remove any contaminants. The washing agent and contaminants flow into a basin mounted below the object. The washing agent is drawn from the basin and used to wash the object to provide a closed-loop system. A venturi-type injector mixes ozone from an ozone generator with the washing agent. A pump draws the washing agent from a first inlet to the basin, forces the washing agent through the injector, and returns the washing agent through a first outlet to the basin. Various splash protection mechanisms are used to protect an operator from any substances that may splash off of the object.Type: GrantFiled: August 31, 1998Date of Patent: August 10, 1999Assignee: EZ Environmental Solutions CorporationInventors: Howard B. Kosofsky, Lawrence A. Shrieber, Richard O. Rhodes, Michael D. Damron, Eduardo M. Garcia
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Patent number: 5927302Abstract: A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.Type: GrantFiled: September 14, 1995Date of Patent: July 27, 1999Assignee: Fujitsu LimitedInventors: Yuka Hayami, Masanori Kobayashi, Ken Yamazaki
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Patent number: 5922138Abstract: Disclosed is a liquid treatment for an object to be processed, such as a semiconductor wafer or a glass LCD substrate, which is designed to remove any chemicals remaining in chemical supply nozzles and also improve the rinse capability and throughput. To that end, a processing liquid supply means is configured as jet nozzle pipes 40, a bottom surface 40c of each of the jet nozzle pipes 40 is inclined so as to slope downward from a chemical supply side thereof to an end portion, and the end portion is connected to a drain pipe 55 by a waste liquid orifice 40d and a drain valve 54. A chemical is supplied from nozzle orifices 40b of the jet nozzle pipes 40, the chemical is brought into contact with wafers W, and a treatment is performed thereby. Thereafter, a chemical-removing agent such as pure water or N.sub.2 is supplied through the jet nozzle pipes 40 to remove any remaining chemical from the jet nozzle pipes 40, then pure water is brought into contact with the wafers W to wash them.Type: GrantFiled: August 7, 1997Date of Patent: July 13, 1999Assignee: Tokyo Electron LimitedInventors: Naoki Shindo, Miyako Yamasaka, Yuji Kamikawa
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Patent number: 5904169Abstract: An apparatus for treating a substrate with a predetermined treatment liquid includes: a first storing portion for storing the treatment liquid; a supplying device for supplying the treatment liquid stored by the first storing device to the substrate located at a predetermined position; a receiving portion for receiving the treatment liquid supplied to the substrate after applied to the substrate; a second storing portion for storing the treatment liquid received by the receiving device; an introducing system for introducing the treatment liquid stored by the second storing portion to the first storing portion; and a controlling device for controlling the introducing system so as to prevent bubbles included in the treatment liquid stored by the second storing portion from introduction to the first storing portion.Type: GrantFiled: September 11, 1996Date of Patent: May 18, 1999Assignee: Dainippon Screen Mfg. Co., Ltd.Inventor: Mitsuaki Yoshitani
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Patent number: 5901718Abstract: To provide a wash tank which is excellent in washing effect with a simple structure, compact, highly practical and effective in washing small molded parts made of rubber or plastic, the wash tank includes a sealable lid having a washing fluid outlet, a conical bottom wall portion having a washing fluid inlet and a cylindrical side wall portion, having a draft tube in a bugle-like shape a bottom end and an upper end of which are expanded and which is disposed at the inside of the tank and a partition plate arranged at a front face of the draft tube and further provided with a jet stream nozzle at a washing fluid inlet portion where the tank is constituted reversibly.Type: GrantFiled: March 26, 1997Date of Patent: May 11, 1999Assignee: Kuraray Engineering Co., Ltd.Inventors: Ryoichi Morimoto, Ikuo Ueda, Yasuo Ohnishi
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Patent number: 5899215Abstract: A diverter member is installed in a dishwasher to reduce detergent consumption therein. The diverter member includes an upwardly disposed liquid receiving surface in fluid communication with a drain for receiving a portion of the rinse liquid sprayed on dishware in a rinse section of the dishwasher to increase the amount of rinse liquid communicated to the drain. A lesser amount of rinse liquid returns to the wash tank, thereby reducing dilution of the wash liquid and consumption of detergent.Type: GrantFiled: August 26, 1996Date of Patent: May 4, 1999Assignee: Ecolab Inc.Inventors: Carleton J. Parker, III, Richard E. Bittner, Mary J. Schumacher, Ralph J. Van Hoven, Keith L. Ware
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Patent number: 5896879Abstract: A flow damper for cleaning stations, in particular for cleaning pipettor tips, is described, a cleaning liquid being introduced into the cleaning station through a pipettor needle and flowing around the pipettor tip before it is conducted away out of the cleaning station. In order to avoid wetting of the isolation surfaces of the pipettor needle and a level detector electrode, if provided, there are provided, according to the invention, in the cleaning station at least one screen having a preferably central entry orifice for the jet of liquid emerging from the pipettor needle and a device for diverting the liquid flow in the direction essentially opposite that of the entering jet of liquid. Furthermore, a plurality of exit orifices, preferably arranged radially around the entry orifice, for the diverted liquid flow are formed in the at least one screen.Type: GrantFiled: April 25, 1997Date of Patent: April 27, 1999Assignee: Behhring Diagnostics GmbHInventors: Jurgen Gross, Dieter Bickoni, Heinz Neuberger, Hugo Wilmes, Helmut Konigstein, Martin Schleicher
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Patent number: 5881750Abstract: This invention is directed to a substrate treating apparatus in which a treatment is performed upon a top surface and a bottom surface of a substrate to be carried on a substrate carrying plane inclined at a certain angle to a horizontal plane in a direction normal to a substrate carrying direction. The substrate treating apparatus includes a guide plate provided below a substrate carrying plane along which a bottom surface of the substrate is to be carried; and treating liquid supply means having a first treating liquid supply member for supplying a treating liquid to a clearance defined between the bottom surface of the substrate carrying plane and the guide plate.Type: GrantFiled: June 3, 1997Date of Patent: March 16, 1999Assignee: Dainippon Screen Mfg. Co., Ltd.Inventor: Mitsuaki Yoshitani
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Patent number: 5878603Abstract: A quiet fill water system for a washing machine comprises a washing tub having an outer wall and an entry port disposed within the outer wall and a valve having a water inlet and a water outlet. A water reservoir is coupled to the outer wall, the water reservoir having a tube entry port, a cup-shaped bottom portion and a water outlet wherein the water outlet is mated with the outer wall entry port so as to provide fluid communication between the water reservoir and the washing tub. A capillary tube having a first end, a second end and a tip portion is disposed such that the first end is coupled to the water outlet of the valve and the second end is positioned within the tube entry port so that the tip portion is disposed within the cup-portion of the water reservoir at a lower position relative to the water outlet such that a quiescent reservoir of water is formed during a fill period so as to decrease the level of noise of the fill period.Type: GrantFiled: March 19, 1998Date of Patent: March 9, 1999Assignee: General Electric CompanyInventors: Richard Edwin Warren, Jr., Robert Arvin Heeden, Dennis Steenburgh
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Patent number: 5875804Abstract: A substrate treating apparatus adapted for treating a substrate with treating fluid therein, the substrate treating apparatus includes a processing bath; a baffle plate with a plurality of holes disposed therein for dividing the processing bath into an upper region and a lower region, the holes allowing communication of the treating liquid between the upper region and the lower region. The baffle plate is composed of a material exhibiting a property that the contact angle of a bubble generated in the treating liquid with respect to the baffle plate is smaller than a predetermined value.Type: GrantFiled: June 16, 1997Date of Patent: March 2, 1999Assignee: Dainippon Screen Manufacturing Co., Ltd.Inventors: Masato Tanaka, Teruyuki Kobayashi
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Patent number: 5873381Abstract: A wet treatment device for bathing a semiconductor wafer in a processing solution is disclosed. The device includes a processing tank, a discharge ditch around the processing tank, a flow control board located in the processing tank, a supply line supplying processing solution to the processing tank, and a discharge line carrying away processing solution from the discharge ditch. Any two walls in the device are connected in a curved surface having an arc sufficient to reduce accumulation of contaminant matter at the curved surface. A line connects to a wall in a curved annular surface any two walls having an arc sufficient to reduce abrasion at the curved annular surface. The curved surface can be substituted with an approximation of a curved surface so long as the approximation has an arc sufficient to reduce accumulation/abrasion.Type: GrantFiled: March 11, 1997Date of Patent: February 23, 1999Assignee: LG Semicon Co., Ltd.Inventor: Suk-Bin Han
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Patent number: 5862823Abstract: The substrate cleaning method for performing cleaning processing on a plurality of substrates disposed such that front surfaces of the substrates on which a circuit pattern is to be formed extend substantially in a vertical direction. This method includes a step of picking up substrates contained in a cassette, all together, from the cassette, a step of making front surfaces of adjacent substrates face each other without bringing the front surfaces into contact with each other, while making back surfaces of adjacent substrates face each other without bringing the back surfaces into contact with each other, the front surfaces of the adjacent substrates being situated with a pitch interval L.sub.1 interposed therebetween, and the pitch interval being set to be larger than a pitch interval L.sub.Type: GrantFiled: October 10, 1996Date of Patent: January 26, 1999Assignee: Tokyo Electron LimitedInventors: Yuji Kamikawa, Naoki Shindo
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Patent number: 5862821Abstract: An improved and simplified apparatus and method for washing leafy plant products is provided. The invented apparatus utilizes hydro-energy for sufficiently cleaning plant products being processed thereby, while effectively using water recirculating therethrough. The apparatus comprises a plant product loading assembly coupled to a cleansing flume. The loading assembly comprises a conical receiving section having a plurality of spray nozzles located about the periphery thereof to form a turbulent water flow through the loading assembly that completely submerges plant product disposed in the receiving section. This ensures that a maximum amount of plant product mixes with the water to form a slurry that optimizes water usage and quickly cleans the product. The flow rate of the water flowing through the spray nozzles does not damage the plant product. The configuration of the loading assembly inhibits collection of debris for maintaining sanitation of the apparatus.Type: GrantFiled: September 23, 1997Date of Patent: January 26, 1999Inventor: Jeffrey J. Rodriguez
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Patent number: 5803982Abstract: A portable parts washer flows a washing agent over an object to remove any contaminants. The washing agent and contaminants flow into a basin mounted below the object. The washing agent is drawn from the basin and used to wash the object to provide a closed-loop system. A venturi-type injector mixes ozone from an ozone generator with the washing agent. A pump draws the washing agent from a first inlet to the basin, forces the washing agent through the injector, and returns the washing agent through a first outlet to the basin. Various splash protection mechanisms are used to protect an operator from any substances that may splash off of the object.Type: GrantFiled: March 7, 1997Date of Patent: September 8, 1998Assignee: EZ Environmental Solutions CorporationInventors: Howard B. Kosofsky, Lawrence A. Shrieber, Richard O. Rhodes, Michael D. Damron, Eduardo M. Garcia
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Patent number: 5725403Abstract: A method of flushing an outboard marine motor using a marine outboard motor flush and run tank wherein the marine outboard motor flush and run tank comprises a flush trough member, a fluid inlet and a fluid outlet. The method of flushing an outboard marine motor flushes from the coolant system of an outboard marine motor salt, silt and other material. An organic detergent is added to fresh water for forming a mixture which is siphoned into the coolant system for breaking down and purging the salt, silt and other material from the coolant system.Type: GrantFiled: November 18, 1996Date of Patent: March 10, 1998Inventor: James T. Ridolfo
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Patent number: 5720308Abstract: A drain flow control assembly for liquids draining from a sink or the like to a reservoir having a given liquid level. The flow control assembly includes a downtube with its inlet opening above the level of the liquid and its outlet below the liquid level, a divider plate surrounding the outlet opening and extending radially outwardly of the opening a distance equal to at least twice the diameter of the downtube opening. The assembly also includes a radially smaller, imperforate deflector plate positioned beneath and spaced closely apart from the divider plate, so as to form a radially extending transfer space between the two plates. When the assembly is positioned in a liquid-containing reservoir with the downtube outlet below the upper surface of the liquid, liquid flows vertically through the downtube outlet opening and then horizontally through the radial transfer space.Type: GrantFiled: February 23, 1996Date of Patent: February 24, 1998Assignee: Safety Kleen Corp.Inventors: Thomas J. Danowski, Michael R. Dvorak
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Patent number: 5713378Abstract: A jet spray fingernail cleaner apparatus including a pulsating pump. The pump has a fluid exhaust tube for releasing a fluid that is held within the pump. Included is a housing that has a bottom wall with an aperture and a cylindrical side wall. The side wall has a top edge for forming a top opening of the housing. The side wall has a pair of horizontal wedge-shaped arms along opposite portions of the side wall. Each arm has an arm tip extending past a rear portion of the arm. Included is an elongated resilient finger stall for positioning within the housing. The finger stall has an upper end and a rear end with a fluid intake line that extends therefrom and through the aperture of the bottom wall of the housing. The fluid intake line couples with the fluid exhaust tube of the pump for allowing a jet stream of fluid to flow into the finger stall. Lastly, an O-ring is positioned over the housing to secure the finger stall about the housing, when the upper end is folded around the housing.Type: GrantFiled: December 2, 1996Date of Patent: February 3, 1998Inventor: Roy F. Smith
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Patent number: 5709235Abstract: Liquid feed section 2 and liquid discharge section 4 of a washing vessel 1 are formed in widths W2 and W4 which are broader than an intermediate washing section 3 with a width W3, and at the same time formed in a greater depth to have bottom surfaces sunken or stepped down from the bottom surface of the washing section 3. Regulator plate holder frames 14 and 20 of upstream and downstream flow regulator means 7 and 8 are located in position by abutting engagement with stepped portions 15 and 21 in such a way that only perforated portions of regulator plates 11, 12, 18 and 19 are disposed in the flow passage to and from the intermediate washing section, precluding flow disturbances which would otherwise be caused by the holder frame or unperforated peripheral portions of the regulator plates.Type: GrantFiled: September 16, 1996Date of Patent: January 20, 1998Assignee: Speedfam Clean System Co., Ltd.Inventors: Shigeo Akanuma, Yoshinobu Terui
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Patent number: 5682914Abstract: An apparatus for cleaning a piston is provided and consists of a container made from a flexible waterproof material having an open bottom end and an open top end. A mechanism is provided for sealing the open bottom end of the container about the skirt of the piston. A device is provided for supporting the open top end of the container above the head of the piston so that water can be introduced into the container through the open top end to cover the ring grooves and the head of the piston. An apparatus is provided for agitating the water within the container so that the water can clean the ring grooves and the head of the piston, and a drain is provided for emptying the dirty water out from the container.Type: GrantFiled: May 6, 1996Date of Patent: November 4, 1997Inventor: Ante Simlesa
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Patent number: 5664594Abstract: A method and apparatus for the cleaning of a ventilator manifold while it is attached to a respiratory support system. A particular embodiment of the present invention relates to a cleaning device used in conjunction with the ventilator manifold to clean the interior chamber of the manifold of patient secretions that have accumulated during the use of the manifold. The cleaning device includes a dual lumen catheter which accesses one of a plurality of manifold ports by inserting the cleaning device through a flexible boot attached to one of the manifold ports. The flexible boot allows for omni-directional use of the cleaning device inside the manifold by medical personnel. The use of the flexible boot in combination with the cleaning device allows medical personnel to cleanse the interior of the manifold without concurrent loss of respiratory support to the patient.Type: GrantFiled: December 29, 1994Date of Patent: September 9, 1997Assignee: Sherwood Medical CompanyInventor: Kok-Hiong Kee
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Patent number: 5645092Abstract: An installation for cleaning pieces of partially deleafed leafy salad vegetables and for removing particles of small foreign bodies therefrom includes a bath for receiving the pieces to be cleaned and a means for causing the pieces to circulate in the bath. A deflector, which is permeable to the particles, deflects the pieces below the level of the bath. A source of gas bubbles emits gas bubbles below the deflector so that the gas bubbles entrain the particles and cause the particles to rise through the deflector to separate the particles from the pieces. A particle collector recovers and removes the particles which have risen through the deflector and are floating on the surface of the bath.Type: GrantFiled: September 15, 1995Date of Patent: July 8, 1997Assignee: Soleco "Societe Legumiere Ducotentin"Inventor: Laurent Beaumont
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Patent number: 5598861Abstract: A drain flow control assembly for liquids draining from a sink or the like to a reservoir having a given liquid level. The flow control assembly includes a downtube with its inlet opening above the level of the liquid and its outlet below the liquid level, a divider plate surrounding the outlet opening and extending radially outwardly of the opening a distance equal to at least twice the diameter of the downtube opening. The assembly also includes a radially smaller, imperforate deflector plate positioned beneath and spaced closely apart from the divider plate, so as to form a radially extending transfer space between the two plates. When the assembly is positioned in a liquid-containing reservoir with the downtube outlet below the upper surface of the liquid, liquid flows vertically through the downtube outlet opening and then horizontally through the radial transfer space.Type: GrantFiled: March 7, 1995Date of Patent: February 4, 1997Assignee: Safety-Kleen Corp.Inventors: Thomas J. Danowski, Michael R. Dvorak
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Patent number: 5568822Abstract: Systems and methods in accordance with the invention clean particulate matter from photographic film using water without impairment of image bearing portions of the film or retention of substantial water in the film. Water formed into thin sheets is directed at high velocity or with mechanical augmentation against the film in directions at least partially opposite to the direction of film movement. Alternatively or successively, the film passes through water removal stations where dry air is blown onto the film and adjacently drawn off with entrained water in successive alternating flows. The film may be further dried of absorbed moisture in an associated environmental chamber having multiple loops before being wound up on a takeup reel.Type: GrantFiled: December 22, 1994Date of Patent: October 29, 1996Inventor: Manfred G. Michelson
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Patent number: 5540247Abstract: A holding rod is disposed in a processing bath close to the bottom of the processing bath. The holding rod is located in a bottom center portion of the processing bath between two processing fluid supply pipes. Since the holding rod serves as diaphragm means, a processing fluid from outlet holes rushing toward the bottom center portion of the processing bath along the bottom of the processing bath hits the holding rod, changes its direction upward and starts uniformly circulating in the processing bath.Type: GrantFiled: December 5, 1994Date of Patent: July 30, 1996Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Masafumi Kawatani, Kouzou Terashima, Hazime Shirakawa
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Patent number: 5539950Abstract: A protective housing for the purpose of inhibiting the drying of materials in contact with the roller cover installed on a roller applicator. Applicator shaft seals and perimeter seals around protective housing inhibit the escape of fluid materials from or the intrusion of materials onto the roller cover. A transparent housing enables the user to visually identify the type of covering materials which are in contact with the roller cover.Type: GrantFiled: February 14, 1989Date of Patent: July 30, 1996Inventors: Randy Zar, James Streetmaker
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Patent number: 5531236Abstract: Novel rinse troughs accomplish thorough uniform rinsing. The tanks are suitable for one or more essentially planar items having substantially the same shape. The troughs ensure that each surface is rinsed uniformly. The new troughs also require less rinse fluid to accomplish a thorough rinse than prior art troughs.Type: GrantFiled: April 11, 1995Date of Patent: July 2, 1996Inventors: Steven N. Kempka, Robert N. Walters
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Patent number: 5524653Abstract: A parts washer is provided having a reservoir containing a supply of fluid and a first mechanism for pressurizing fluid from the supply and delivering the pressurized fluid to against a part to be washed with the first mechanism including an inlet for fluid from the reservoir which is at least partially immersed in reservoir fluid so that there is a predetermined fluid pressure at the inlet due to the depth of the fluid. Structure is provided for increasing the pressure of fluid at the inlet without changing fluid depth at the inlet.Type: GrantFiled: June 30, 1994Date of Patent: June 11, 1996Assignee: The Modern Auto Recycling Techniques Corp.Inventors: Gary Minkin, Marc Treppler
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Patent number: 5517833Abstract: An apparatus for fluidly connecting a washing machine with a utility tub in a laundry cabinet. A fluid discharge device is attachable to a utility tub. The discharge device includes an elbow having an inlet, an outlet and a passage for conducting fluid between the inlet and outlet. A flow restrictor is located in the passage. The restrictor defines a wide flow path near a top wall of the outlet and a narrow flow path near a bottom wall of the outlet. A deflector surface is located adjacent the outlet and extends transversely relative to the extent of the outlet. The deflector surface directs fluid flow from the outlet in a direction transversely to the passage in a quiet, non-turbulent and thin flat stream of fluid into the utility cabinet.Type: GrantFiled: August 23, 1994Date of Patent: May 21, 1996Assignee: E. L. Mustee & Sons, Inc.Inventors: Robert J. Mustee, William E. Trsek
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Patent number: 5515877Abstract: This invention is a dental cleaning device disposed within a visually attractive furniture grade cabinet. The cleaning tank within the device is kidney shaped with a pair of inlets that direct a circulating liquid upwardly and inwardly from an area adjacent the bottom of one end of said tank. At least one liquid outlet is provided at the opposite end of said tank and connected to a circulating means such as a circulating pump so that a continuous flow of liquid can be accomplished across dentures placed in the tank, The kidney shape of the tank causes eddy currents to flow off of the main swirling inlet to outlet liquid circulation to further clean the various areas of the dentures.Type: GrantFiled: April 11, 1994Date of Patent: May 14, 1996Inventor: Robert Dunn, Jr.
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Patent number: 5509431Abstract: A method for precision cleaning of a workpiece with a cleaning fluid comprising liquid and/or supercritical fluid carbon dioxide and a primary solvent which is liquid at ambient temperatures and pressures comprises first placing the workpiece in a pressurizable vessel with a removable lid and within an inner tank open at the top; supplying the primary solvent to the inner tank; flushing the primary solvent through the pressure vessel; draining the inner tank to remove the primary solvent; and then supplying liquid and/or supercritical fluid carbon dioxide to the pressure vessel and flushing it through the vessel by withdrawing it from near the bottom of the inner tank.Type: GrantFiled: November 14, 1994Date of Patent: April 23, 1996Assignee: Snap-Tite, Inc.Inventors: Charles W. Smith, Jr., Larry R. Rosio, Stephen H. Shore
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Patent number: 5502868Abstract: For the purpose of blast-cleaning surfaces, in particular facades, a cleaning process and accompanying device have a working area with an air curtain and a suction device. The working area is tightly connected with the surface on one side via a contact opening and on the other side has a work opening through which the cleaning personnel can guide the cleaning jet nozzle while maintaining visual contact with the surface to be cleaned. The air curtain is formed along the work opening in such a way that no dust or blasting material can escape through the work opening from the working area.Type: GrantFiled: June 20, 1994Date of Patent: April 2, 1996Assignee: Braendle Metallbau AGInventor: Ruedi Braendle
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Patent number: 5503171Abstract: A substrates-washing apparatus includes a process vessel in which washing solution is stored to wash a plurality of substrates, a boat for holding the substrates parallel to one another in the process vessel, solution supply openings formed in the bottom of the process vessel, a solution supply system communicated with the solution supply openings to supply washing solution into the process vessel through the solution supply openings, and a straightening plate arranged between the substrates held on the boat and the solution supply openings in the bottom of the process vessel and provided with a plurality of apertures through which washing solution passes. The apertures form plural lines in the longitudinal direction of the straightening plate, the apertures in each line are arranged to correspond to the substrates alternately, and the apertures in one line are shifted from those in the other adjacent line.Type: GrantFiled: December 22, 1993Date of Patent: April 2, 1996Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu LimitedInventors: Kenji Yokomizo, Chihaya Tashima, Eiichi Mukai, Yoshiyuki Honda, Naohiko Hamamura, Shinya Murakami, Yasuhiro Chouno
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Patent number: 5485861Abstract: A cleaning tank defining therein a cleaning chamber adapted to receive an article to be cleaned and having an upper opening for carrying the article into and out of the cleaning chamber, a plurality of small holes provided in the bottom wall of the cleaning chamber and communicated with an outlet port, and at least one inlet port for introducing a cleaning liquid into the cleaning tank and into the cleaning chamber only through the upper opening thereof.Type: GrantFiled: October 4, 1994Date of Patent: January 23, 1996Assignee: Dan Science Co., Ltd.Inventors: Yutaka Hiratsuka, Tadashi Akiyama
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Patent number: 5482068Abstract: A chemical cleaning section of a semiconductor wafer cleaning system has a processing vessel. Two cleaning liquid supplying ports are formed in a bottom portion of the vessel. A holder for holding a plurality of wafers at intervals is arranged in the vessel. A rectifying plate is arranged between the holder and the supplying ports and a diffusion plate is arranged between the rectifying plate and the supplying ports. Bubble storage members are formed on a lower surface of the rectifying plate, so as to be located just above both side edges of the diffusion plate extending in a direction in which the wafers are aligned. The bubble storages are connected to the outside of the vessel through exhaust holes and exhaust pipes. Bubbles contained in a cleaning liquid supplied through the supplying ports are discharged from the bubble storages through the exhaust pipes to the outside of the vessel. As a result, the wafers are not influenced by the bubbles.Type: GrantFiled: August 18, 1994Date of Patent: January 9, 1996Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu LimitedInventors: Shigenori Kitahara, Takashi Terada
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Patent number: 5474616Abstract: A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.Type: GrantFiled: April 6, 1993Date of Patent: December 12, 1995Assignee: Fujitsu LimitedInventors: Yuka Hayami, Masanori Kobayashi, Ken Yamazaki
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Patent number: 5406967Abstract: The present invention relates to a paint brush cleaning device in which a paint brush is located through an exit region of an elongated cavity of a nozzle-like housing, the exit region defining an inner area which is much larger than that of the entry region through which the cleaning fluid, viz., water enters the cylindrical sectional. The cylindrical neck section includes a hub having an interior side wall surface threaded for connection to a conventional garden hose, a central region that includes a valve for control of the passage of water and a throat region that marks the intersection between the cylindrical neck section and a flared exitway of which the exit region previously mentioned is associated.Type: GrantFiled: May 27, 1993Date of Patent: April 18, 1995Inventor: John J. Eberle
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Patent number: 5388602Abstract: Descaling device employing water to descale blooms, thin slabs, billets, etc., which cooperates with a mould and the zone immediately downstream therefrom, or with an induction furnace or rolling mill stands, the slabs or blooms (11-24) being fed in cooperation with the descaling device at a speed of feed of the order of 1.5-20 meters per minute, but advantageously between 4 and 10 meters per minute, the device consisting of at least one movable arm (12-13) bearing nozzle means (14) delivering descaling water, the movable arm (12-13) being associated with the face of the slab or bloom (11-24) to be descaled and having a working phase, in which the descaling water acts on the surface of the slab or bloom (11-24), and a shut-off phase, in which the descaling water does not act on the surface of the slab or bloom (11-24).Type: GrantFiled: July 19, 1993Date of Patent: February 14, 1995Assignee: Danieli & C. Officine Meccaniche SpAInventors: Giovanni Coassin, Franco Driussi, Fausto De Marco, Gianni Rattierri
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Patent number: 5377708Abstract: Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like using vapor phase processing chemicals, particularly aqueous hydrofluoric acid etchants. Homogeneous vapor mixtures are generated from homogeneous liquid mixtures. Means for recirculating, mixing and agitating the liquid phase reactants are provided. In some embodiments the liquid phase is advantageously circulated through a chemical trench within the processing bowl. Exposure of wafers to vapors from the chemical trench can be controlled by a vapor control valve which is advantageously the bottom of the processing chamber. The wafer is rotated or otherwise moved within the processing chamber to provide uniform dispersion of the homogeneous reactant vapors across the wafer surface and to facilitate vapor circulation to the processed surface. A radiative volatilization processor can be utilized to volatilize reaction by-products which form under some conditions.Type: GrantFiled: April 26, 1993Date of Patent: January 3, 1995Assignee: Semitool, Inc.Inventors: Eric J. Bergman, Timothy J. Reardon, Raymon F. Thompson, Aleksander Owczarz
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Patent number: 5365958Abstract: A razor cleaning device is attached to a source of tap water either at a faucet spout or independently of a faucet. The device contains a nozzle for directing the tap water to a location to which blades of a razor are guided for cleaning. The outlet of the nozzle is of a relatively small area, causing the tap water exiting from the nozzle to be of a high pressure. The device contains a valve which remains closed unless the razor blades are in place for cleaning, the closed valve causing the pressure at the valve to increase and also conserving water. The device contains a notched leaf for guiding the razor blades to the location for cleaning, and a lever which is pressed upon by the razor when the blades are in that location, the lever causing the valve to open and a high pressure blast of water to exit the nozzle, cleaning the blades.Type: GrantFiled: April 7, 1993Date of Patent: November 22, 1994Inventor: Glen Stuhlmacher, II
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Patent number: 5353823Abstract: The device comprises a cleaning chamber (1) which is arranged on a base (10) and through the orifice (13) of which the shank part (3) of a tool (5) or of a toolholder (4) is introduced. The wall of the cleaning chamber (1) is matched to the shape of the shank part (3) and has an internal thread (7). A compressed liquid is introduced through a run-in orifice (8), streams through the grooves of the internal thread (7) and flows virtually without pressure through a run-off orifice (9), at the same time discharging dirt particles located on the surface of the shank part (3). The shank part (3) can be clamped and consequently fixed in the cleaning chamber (1) by means of the clamping appliance (19). An increased cleaning effect is thereby achieved.Type: GrantFiled: July 12, 1993Date of Patent: October 11, 1994Assignee: Starrfras Maschinen AGInventor: Novak Peter
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Patent number: 5350064Abstract: A novel disposable container and method is used for cleaning and lubricating a standard dental handpiece. The disposable container completely encloses a head of the dental handpiece. When the handpiece is cleaned or lubricated with cleaning or lubricating agents, the container collects cleaning or lubricating agents and any other materials that are expelled therewith from the handpiece to prevent these materials from entering the atmosphere.Type: GrantFiled: April 16, 1993Date of Patent: September 27, 1994Assignee: Gendex CorporationInventor: Gary G. Schneck
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Patent number: 5341825Abstract: An overflow tank for rinsing an article such as a wafer with a liquid such as pure water is continuously supplied with the liquid. The tank comprises a partition isolating two adjacent chambers from each other, and is utilized as a passage for transferring an article from one of the chambers to the other chamber. The overflow tank has two opening sections that are opened at the two chambers, respectively, and each of the opening sections is defined by a continuous and level peripheral edge so that an overflow of the liquid can occur over all of the peripheral edge. During the passage of the article through the overflow tank, the article is rinsed with the water.Type: GrantFiled: June 2, 1993Date of Patent: August 30, 1994Assignee: Nippon Steel CorporationInventor: Satoshi Kobayashi
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Patent number: 5333633Abstract: An improved animal grooming clipper cleaning, storing and transporting unit that has a top that seals to a base and an internal separation unit that separates clipper head assemblies placed within the separation unit, a strainer to allow grooming clipper parts to drain free of cleaning solution, a motor to agitate the cleaning solution and are capable of being interlocked to stick several assemblies.Type: GrantFiled: February 19, 1993Date of Patent: August 2, 1994Inventor: Kim Laube
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Patent number: 5327921Abstract: A processing vessel suitable for use with a washing system intended to wash a plurality of wafers. The processing vessel includes a washing solution supply source, a circulation pump, a filter, a main vessel portion provided with inlets in the bottom thereof, a boat for holding the plurality of wafers in the center area of the main vessel portion and a flow control assembly arranged between the inlets and the wafers. The flow control assembly includes a scattering plate for scattering washing solution, which is introduced into the main vessel portion through the inlets, in the horizontal direction, and guiding passages through which the washing solution introduced through the inlets is made to have a substantially laminar flow and is guided into the center area of the main vessel portion. The guiding passages are formed by intervals between side plates and the scattering plate and by a plurality of apertures in the scattering plate.Type: GrantFiled: March 4, 1993Date of Patent: July 12, 1994Assignees: Tokyo Electron Limited, Tokyo Electron Saga LimitedInventors: Shouri Mokuo, Kenji Yokomizo, Osamu Tanaka
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Patent number: 5322081Abstract: A paint roller cleaner, for water based paints, that is inserted through a specially designed paint roller and that is attachable to the standard garden hose with the purpose of cleaning the nap of the paint roller. The structure is made of a sixteen-inch plastic tube with one end closed and the other end with a hose attachment. The first nine inches from the closed side has eight rows of twenty-four one-sixteenth holes, evenly spaced, and a raised handle that keeps the paint roller in place. Structural means are provided for directing the water flow in such a manner that water sprays perpendicularly outward through the holes and through the nap with equal intensity from the top to bottom of the roller.Type: GrantFiled: February 24, 1993Date of Patent: June 21, 1994Inventor: Raphael Isaac
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Patent number: 5316590Abstract: A novel disposable container and method is used for cleaning and lubricating a standard dental handpiece. The disposable container completely encloses a head of the dental handpiece. When the handpiece is cleaned or lubricated with cleaning or lubricating agents, the container collects cleaning or lubricating agents and any other materials that are expelled therewith from the handpiece to prevent these materials from entering the atmosphere.Type: GrantFiled: February 22, 1993Date of Patent: May 31, 1994Assignee: Gendex CorporationInventor: Gary G. Schneck
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Patent number: 5291907Abstract: A rinse nozzle for gently and efficiently rinsing the interior and exterior of breathing regulators, snorkels, buoyancy compensator vests and other SCUBA equipment. The nozzle has an outlet adapted to releasably mate with regulator and snorkel mouthpieces and with the mouthpiece of a buoyancy compensator inflator. The nozzle includes a flow metering means, baffle means, and diffusing passage to provide low velocity fluid rinsing to prevent damage to the equipment. The rinse nozzle can be attached to any standard hose or faucet.Type: GrantFiled: October 1, 1992Date of Patent: March 8, 1994Inventor: Raymond S. Clark
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Patent number: 5277207Abstract: For the treatment of bottles before they are filled, the bottles (2) gripped by a clamp (24), are inverted by the pivoting of the clamp about an inversion axis (28) and in the inverted position undergo injection by means of a nozzle (49). At the same time, the clamp and the bottle are driven rotationally about the axis of a rotary roundabout (13) simultaneously treating a plurality of bottles.The clamp is articulated on the sides of an individual receptacle (29) which also turns with the roundabout (13) and which discharges into an annular collector (62). The nozzle (49) is situated at the center of a funnel (61) through which the fluid injected into the bottle falls back into the receptacle (29).Utilization for enhancing the hygiene of the collection circuit for the evacuation or recycling of the treatment fluid.Type: GrantFiled: December 6, 1991Date of Patent: January 11, 1994Inventor: Rene Perrier
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Patent number: 5277210Abstract: A flexible air duct is connected to a dishwashing unit for conducting hot moist air therefrom. Opposite ends of the duct communicate with the dishwashing unit for conducting condensed water back thereto, while hot air is discharged through an air outlet disposed intermediate the ends of the duct. The duct is of oblong cross-section and includes cooling fins on one side.Type: GrantFiled: May 27, 1992Date of Patent: January 11, 1994Assignee: Samsung Electronics Co., Ltd.Inventor: Shin-Yong Kim
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Patent number: 5275185Abstract: A dentures cleaning device for receiving at least one denture and a liquid comprises a container having two oppositely positioned side walls and an outlet aperture in the container. A lid is hingedly fixed to the container for closing the container and has a filling aperture for passing the liquid into the container. A lock is provided for locking the lid to the container. A step is positioned in the container near each side wall. Also, a separation wall is positioned on one of the steps and spaced parallel away from the side wall. The separation wall is shorter than the side wall for defining an overflow space. The outlet aperture communicates with the overflow space for passing the liquid from the container; and a rib is provided on each step perpendicular to the side walls.Type: GrantFiled: September 18, 1992Date of Patent: January 4, 1994Inventor: Peter Florjancic