Gas Or Vapor Condensation Or Absorption On Work Patents (Class 134/31)
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Patent number: 5196137Abstract: Azeotropic mixtures of 1,1,1,2,3,4,4,5,5,5-decafluoropentane (HFC-43-10mee) and trans-1,2-dichloroethylene, cis-1,2-dichloroethylene or 1,1-dichloroethane are useful as cleaning agents, expansion agents for polyolefins and polyurethanes, refrigerants, aerosol propellants, heat transfer media, gaseous dielectrics, fire extinguishing agents, power cycle working fluids, polymerization media, particulate removal fluids, carrier fluids, buffing abrasive agents, and displacement drying agents.Type: GrantFiled: October 1, 1991Date of Patent: March 23, 1993Assignee: E. I. Du Pont de Nemours and CompanyInventor: Abid N. Merchant
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Patent number: 5194170Abstract: Azeotropic or azeotrope-like compositions of effective amounts of 1,1,2,2,3,3,4,4-octafluorobutane and trans-1,2-dichloroethylene; cis-1,2-dichloroethylene; or 1,1-dichloroethane to form an azeotropic or azeotrope-like composition are disclosed that are useful as cleaning agents, refrigerants, aerosol propellants, heat transfer media, gaseous dielectrics, fire extinguishing agents, expansion agents for polyolefins and polyurethanes and as power cycle working fluids.Type: GrantFiled: April 2, 1992Date of Patent: March 16, 1993Assignee: E. I. Du Pont de Nemours and CompanyInventors: Abid N. Merchant, Janet C. Sung
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Patent number: 5193739Abstract: In the process according to the invention for soldering electronic boards, in particular, printed circuit boards with devices installed on them, first, during the pickling process, a condensable process material, for example, water, is introduced into flaws in the oxide layers on the soldering connection surfaces and at least partially condensed in the flaws. Then, the oxide layers are exposed to rapid heating such that the process material condensed in the flaws vaporizes explosively and thus the oxide layer breaks up and cracks off of the basis material, such that the soldering connection surfaces for the subsequent actual soldering process are brought to virgin condition. In the case of wave soldering, the rapid heating occurs preferably by means of the wave of solder itself. If non-oxide passive layers must also be removed, this occurs preferably in a preceding stage of the pickling process, during which the oxide layer is hydrophilized. For this, a plasma pretreatment is suitable.Type: GrantFiled: December 18, 1991Date of Patent: March 16, 1993Assignee: WLS Karl-Heinz GrasmannInventors: Volker Liedke, Karl-Heinz Grasmann, Hans-Jurgen Albrecht, Harald Wittrich, Wilfred John, Wolfgang Scheel
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Patent number: 5190685Abstract: Stable azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane, dichlorotrifluoroethane, ethanol and cyclopentane which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: August 15, 1990Date of Patent: March 2, 1993Assignee: Allied-Signal Inc.Inventors: Peter B. Logsdon, Leonard M. Stachura, Ellen L. Swan, Rajat S. Basu
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Patent number: 5182096Abstract: A particulate carrier for airborne suspensions of an active agent. The carrier is formed in situ by contacting a spray containing ammonia, a monoalkylamine or dialkylamine with a spray containing acetic acid and/or sulfur dioxide.Type: GrantFiled: November 9, 1990Date of Patent: January 26, 1993Inventors: Abelardo A. Portas, Graciela I. O de Portas
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Patent number: 5181985Abstract: A process for the wet-chemical surface treatment of semiconductor wafers in which aqueous phases containing one or more chemically active substances in solution act on the wafer surfaces, consisting of spraying a water mist over the wafer surfaces and then introducing chemically active substances in the gaseous state so that these gaseous substances combine with the water mist so that there is an interaction of the gas phase and the liquid phase taking place on the surface of the semiconductor wafer. Gases such as hydrogen fluoride, chlorine and ozonized oxygen or other halogen gases act on the wafer surfaces between rinsing steps so that when the wafers are dried, the surfaces achieve extremely high cleanliness levels.Type: GrantFiled: March 6, 1991Date of Patent: January 26, 1993Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbHInventors: Ingolf Lampert, Christa Gratzl
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Patent number: 5182042Abstract: Azeotrope-like compositions of 1,1,1-trifluorohexane and perfluoromethylcyclohexane which are useful in a variety of industrial cleaning applications including defluxing of printed circuit boards.Type: GrantFiled: October 21, 1991Date of Patent: January 26, 1993Assignee: Allied-Signal Inc.Inventor: Michael Van Der Puy
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Patent number: 5174855Abstract: A surface treating apparatus using vapor includes a container for holding two liquids, e.g., hydrogen fluoride and water, which exhibits an azeotropic phenomenon under predetermined conditions, and an azeotropic condition establishing device for conditioning the container to satisfy the predetermined azeotropic conditions. Under the azeotropic conditions, a vapor mixture having the composition of the liquid mixture is produced, and surface treatment of substrates or the like is performend using the vapor mixture. Since the vapor of the liquid mixture in the azeotropic state is used for surface treatment of substrate, surface treatment is effected under fixed conditions all the time.Type: GrantFiled: April 20, 1990Date of Patent: December 29, 1992Assignee: Dainippon Screen Mfg. Co. Ltd.Inventor: Masato Tanaka
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Patent number: 5167761Abstract: A process for halide etching of a semi-conductor substrate in the presence of water. Etching is realized in a reaction vessel. The process steps comprise filling of the reaction vessel with a first gas to a first pressure and subsequently filling the reaction vessel with a second gas to a second pressure after which the substrate is left in the reaction vessel for several minutes to obtain the etching required. One of the gases is HF and the other of the gases is water vapor. The etching is conducted at sub-atmospheric pressure, preferably below 50 Torr.Type: GrantFiled: September 23, 1991Date of Patent: December 1, 1992Assignee: ASM International N.V.Inventors: Johannes F. M. Westendorp, Hans W. Piekaar
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Patent number: 5152913Abstract: For replacing cleaning compositions based on 1,1,2-trichloro-1,2,2-trifluoroethane (F113), the invention provides a composition comprising 55 to 79.5% by weight of 1,1-dichloro-1-fluoroethane (F141b), 20 to 40% by weight of methyl formate and 0.5 to 5% of methanol. These three compounds form a positive azeotrope (b.p.=28.3.degree. C. at atmospheric pressure).The composition, which may be stabilized, can be used for cleaning solid surfaces, in particular for removing flux from printed circuits and for degreasing mechanical parts.Type: GrantFiled: February 7, 1991Date of Patent: October 6, 1992Assignee: Societe AtochemInventors: Daniel Desbiendras, Jean-Jacques Martin, Pascal Michaud
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Patent number: 5145598Abstract: Azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane, dichlorotrifluoroethane, nitromethane and ethanol or methanol are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: April 15, 1991Date of Patent: September 8, 1992Assignee: Allied-Signal Inc.Inventors: Ellen L. Swan, Rajat S. Basu
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Patent number: 5146015Abstract: The present invention provides a class of hydrochlorofluorocarbons having a tertiary structure, 5 carbon atoms, 1 chlorine atom, 6 to 8 fluorine atoms, and OH rate constants from about 8 to about 15 cm.sup.3 /molecule/sec.times.10.sup.-14. The hydrochlorofluorocarbons are useful as solvents and blowing agents.Type: GrantFiled: September 27, 1991Date of Patent: September 8, 1992Assignee: Allied-Signal Inc.Inventor: Chen C. Li
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Patent number: 5143663Abstract: An improved stereolithographic apparatus and method is described. In one embodiment, the improvement includes immersing at least a portion of a part in a volume of a liquid solvent in a vapor degreaser while subjecting the portion to ultrasonic agitation to substantially remove excess resin. Several examples of solvents are provided, including ethanol, and Freon TMS. In a second embodiment, the improvement includes building the part on a layer of liquid resin supported by a volume of a dense, immiscible, and UV transparent intermediate liquid, and integratably immersing at least a portion of the built part in the intermediate liquid, and then either subjecting the immersed portion to ultrasonic agitation to substantially remove excess resin, or subjecting the immersed portion to UV light. Several examples of intermediate liquids are provided, including perfluorinated fluids, such as Fluorinert FC-40, and water-based salt solutions, such as solutions of magnesium sulfate or sodium chloride in water.Type: GrantFiled: June 12, 1989Date of Patent: September 1, 1992Assignee: 3D Systems, Inc.Inventors: Richard N. Leyden, Thomas A. Almouist, Mark A. Lewis, Hop D. Nguyen
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Patent number: 5137651Abstract: Azeotrope-like compositions comprising 1,1,-dichloro-1-fluoroethane, dichlorotrifluoroethane, 1,2-dichloroethylene, and optionally ethanol or methanol are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: December 19, 1990Date of Patent: August 11, 1992Assignee: Allied-Signal Inc.Inventors: Leonard M. Stachura, Ellen L. Swan, Peter B. Logsdon, Rajat S. Basu
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Patent number: 5137581Abstract: A degreasing and cleaning method for removing oils from an object includes the steps of heating an object deposited with oils in a container, jetting a cleaning liquid which is mainly water or steam into the container and subsequently evacuating the container to reduce the pressure in the inside of the container to thereby evaporate the deposited oils to remove them from the object. The degreasing and cleaning method can be conducted by an apparatus which includes a vacuum container having a heating means for heating an object deposited with oils, a jetting means for jetting the cleaning liquid into the vacuum container and an exhausting means for exhausting evaporated ingredients formed by steam distillation in the vacuum container therefrom.Type: GrantFiled: June 25, 1991Date of Patent: August 11, 1992Assignee: Oriental Engineering Co., Ltd.Inventor: Tsuneo Takahashi
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Patent number: 5135676Abstract: Compositions suitable for use in cleaning processes formed of hydrogen-containing fluorochlorohydrocarbons selected from the group of consisting of tetrachloromonofluoroethanes, trichlorodifluoroethanes, dichlorotrifluoroethanes, dichloromonofluoroethanes and dichloropentafluoropropanes or a mixture one or more of these hydrogen-containing fluorochlorohydrocarbons in admixture with partially fluorinated alkanols containing two to four carbon atoms.Type: GrantFiled: November 5, 1990Date of Patent: August 4, 1992Assignee: Kali-Chemie AGInventors: Hans Buchwald, Andreas Brackmann, Boleslaus Raszkowski
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Patent number: 5127962Abstract: Apparatus and method for measuring a dissolved gas in oil wherein air is blown into an oil sample through a bubble generator, bubbles are passed through the oil sample to extract dissolved gas therefrom, a resulting air-extracted gas mixture is contacted by a gas sensor for detecting and measuring the dissolved gas and the mixture is recirculated through the oil sample. Preferably, the air bubbles are within the range of 0.1 mm to 8.0 mm, and, also, the volume of the apparatus is selected so that the quantity of the gas to be measured is not more than 20% of the combined volume of the extraction vessel, the sensor chamber, and the connecting conduit.Type: GrantFiled: April 18, 1990Date of Patent: July 7, 1992Inventors: Yasuo Inoue, Masanari Kikkawa, Masaru Kamba, Hiroshi Okuda
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Patent number: 5126067Abstract: Stable azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane, dichloroethylene, and optionally an alkanol which are useful in a variety of industrial cleaning applications including defluxing and some of which are also useful as blowing agents in the preparation of polyurethane foams.Type: GrantFiled: June 5, 1990Date of Patent: June 30, 1992Assignee: Allied-Signal Inc.Inventors: Ellen L. Swan, Rajat S. Basu, Richard M. Hollister
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Patent number: 5124065Abstract: Stable azeotrope-like compositions consisting essentially of dichloropentafluoropropane and an alkanol having 1-4 carbon atoms which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: May 22, 1990Date of Patent: June 23, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, David P. Wilson, Dennis M. Lavery, Richard M. Hollister, Richard E. Eibeck, Michael Vanderpuy, Rajat Basu, Ellen L. Swan
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Patent number: 5124063Abstract: Azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane; dichlorotrifluoroethane; methanol; and alkane having 5 or 6 carbon atoms are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards and dry cleaning.Type: GrantFiled: December 20, 1990Date of Patent: June 23, 1992Assignee: Allied-Signal Inc.Inventors: Peter B. Logsdon, Ellen L. Swan, Leonard M. Stachura, Rajat S. Basu
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Patent number: 5124503Abstract: The present invention provides stabilized compositions comprising dichlorotrifluoroethane and effective stabilizing amounts of alkanol having 4 or 5 carbon atoms, nitroalkane having 1 to 3 carbon atoms, and a third component of 1,2-epoxyalkane having 2 to 7 carbon atoms or phosphite ester. Stabilized dichlorotrifluoroethane is useful in a variety of vapor degreasing, cold cleaning, and solvent cleaning applications including defluxing.Type: GrantFiled: December 13, 1990Date of Patent: June 23, 1992Assignee: Allied-Signal Inc.Inventors: Chien C. Li, Kane D. Cook, Alfred A. Riederer
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Patent number: 5124064Abstract: Azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane; dichlorotrifluoroethane; ethanol; and alkane having 5 or 6 carbon atoms are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards and dry cleaning.Type: GrantFiled: April 23, 1991Date of Patent: June 23, 1992Assignee: Allied-Signal Inc.Inventors: Peter B. Logsdon, Ellen L. Swan, Leonard M. Stachura, Rajat S. Basu
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Patent number: 5120462Abstract: Azeotropic and azeotrope-like compositions composed of dichloropentafluoropropanes and acetone are described which are suitable for use in cleaning processes and in printing and copying processes for fixing toner based on polystyrene.Type: GrantFiled: April 1, 1991Date of Patent: June 9, 1992Assignee: Kali-Chemie AGInventors: Hans Buchwald, Andreas Brackmann, Boleslaus Raszkowski
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Patent number: 5120461Abstract: Azeotrope-like compositions comprising 1,1-dichloro-1-fluoroethane; dichlorotrifluoroethane; methanol; and alkene having 5 carbon atoms are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards and dry cleaning.Type: GrantFiled: August 21, 1990Date of Patent: June 9, 1992Assignee: Allied-Signal Inc.Inventors: Peter B. Logsdon, Ellen L. Swan, Leonard M. Stachura, Rajat S. Basu
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Patent number: 5118438Abstract: Stable azeotrope-like compositions consisting essentially of dichloropentafluoropropane and a hydrocarbon containing six carbon atoms which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: May 22, 1990Date of Patent: June 2, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, David P. Wilson, Dennis M. Lavery, Richard M. Hollister, Richard E. Eibeck, Michael Vanderpuy
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Patent number: 5118437Abstract: Novel azeotrope-like compositions comprising dichloropentafluoropropane, ethanol and a hydrocarbon containing six carbon atoms which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: May 22, 1990Date of Patent: June 2, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, David P. Wilson, Dennis M. Lavery, Richard M. Hollister
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Patent number: 5116526Abstract: Azeotrope-like compositions comprising dichloropentafluoropropane and 1,2-dichloroethylene are stable and have utility as degreasing agents and as solvents in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: July 9, 1990Date of Patent: May 26, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, Richard E. Eibeck, Michael Van Der Puy, Richard M. Hollister, Dennis M. Lavery, David P. Wilson
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Patent number: 5116525Abstract: Azeotropic mixtures of dichloropentafluoropropane (HCFC-225) and trans-1,2-dichloroethylene (T-HCC-1130) with methanol or ethanol or isopropanol, are useful in solvent cleaning applications as refrigerants, aerosol propellants and polymer blowing agents.Type: GrantFiled: October 18, 1990Date of Patent: May 26, 1992Assignee: E. I. Du Pont de Nemours and CompanyInventor: Abid N. Merchant
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Patent number: 5114608Abstract: A method of stabilizing chlorofluorocarbon compositions thereby is provided. The stabilized composition comprises a chlorofluorocarbon and a sufficient amount of an epoxidized, generally high molecular weight stabilizer having an oxirane content sufficient to effectively stabilize the chlorofluorocarbon. The stabilizer is preferably an epoxidized oil having a molecular weight in the range of about 300 to about 1,500 and an oxirane content of at least about 4%. The method includes the step of adding a sufficient amount of such a stabilizer to the chloroflurocarbon composition. The chlorofluorocarbon composition typically comprises chlorofluoromethane, chlorofluoroethane, mixtures thereof or a chlorofluorocarbon-alcohol azeotropic solution. Also provided is an improved continuous dialyzer cleaning method utilizing the stabilized chlorofluorocarbon composition.Type: GrantFiled: October 12, 1990Date of Patent: May 19, 1992Assignee: Baxter International Inc.Inventors: Robert M. Sluga, Randolph H. Watkins, Henry M. Gajewski, Jerry D. Fisher, Dennis C. Berry
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Patent number: 5114495Abstract: A vapor cleaning process for cleaning soil from solid articles comprising the use of an azeotropic vapor mixture of perchloroethylene and water as the cleaning agent which condenses on the articles and thus cleans them. Liquid perchloroethylene and water are placed in a lower portion of a degreasing chamber, the articles to be cleaned are introduced into an upper portion of the chamber, the perchloroethylene and water are heated and evaporated to form a minimum-boiling azeotropic vapor mixture, the vapor mixture is condensed on the articles whereby soil is removed from them, and the cleaned articles are then removed from the chamber.Type: GrantFiled: February 4, 1991Date of Patent: May 19, 1992Assignee: Vulcan Materials CompanyInventor: Eric L. Mainz
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Patent number: 5112437Abstract: In oxide film removing equipment for removing a SiO.sub.2 film on a semiconductor substrate by using hydrogen fluoride, a liquid mixture of hydrogen fluoride and methyl alcohol is prepared in a chemical factory beforehand. The liquid mixture of hydrogen fluoride and methyl alcohol is heated to generate azeotropic vapor at a semiconductor works and the vapor is used to remove the SiO.sub.2 film on the substrate. The liquid mixture of hydrogen fluoride and methyl alcohol previously prepared in the chemical factory increases safety during an operation at the semiconductor works.Type: GrantFiled: February 20, 1991Date of Patent: May 12, 1992Assignees: Dainippon Screen Mfg. Co., Ltd., Nobuatsu Watanabe, Morita Kagaku Co., Ltd.Inventors: Nobuatsu Watanabe, Yong-Bo Chong, Toshio Tatsuno, Tomoyoshi Okada, Akira Izumi, Keiji Toei
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Patent number: 5106426Abstract: A method of cleaning window furnishings while located in their place of use, in which the furnishings are pushed together to form a vertically hanging block and a wetting medium is circulated from above. A cleaning washing medium is thereafter circulated from above, followed by a rinsing liquid also from above and over the window furnishings. The furnishings are then dried, and surplus fluids are collected at a base of the furnishings. All procedures are carried out while the window furnishings are hanging vertically in their locations of normal use. The wetting medium, washing medium and the rinsing liquid flow downward due to gravity with uniform velocity and cover the furnishings uniformly.Type: GrantFiled: February 27, 1991Date of Patent: April 21, 1992Assignee: Reinhard KonigInventors: Reinhard Konig, Friedrich Konig
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Patent number: 5106526Abstract: Novel azeotrope-like compositions comprising dichloropentafluoropropane, methanol, and a hydrocarbon containing six carbon atoms which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: June 6, 1990Date of Patent: April 21, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, David P. Wilson, Dennis M. Lavery, Richard M. Hollister
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Patent number: 5106425Abstract: A method for maintaining a flammable solvent in a nonflammable environment involves covering the flammable solvent with a nonflammable vapor blanket provided by a nonflammable solvent, such that vapors from the flammable and nonflammable solvents form a nonflammable gaseous mixture in the blanket. Such a method is used in removal of both oil-based and polar contaminants to control the flammability potential of an alcohol solvent. An apparatus for cleaning articles using fluorocarbon and alcohol solvents includes a chamber having a plurality of compartments for containing the solvents and a bounded vapor space. At least one of the compartments contains liquid fluorocarbon and at least one other will contain liquid alcohol. The solvents voltalize into the bounded vapor space to provide a nonflammable vapor blanket over the alcohol-containing compartment.Type: GrantFiled: February 22, 1991Date of Patent: April 21, 1992Assignee: Baxter International, Inc.Inventors: Robert M. Sluga, Randolph H. Watkins, Jerry D. Fisher, Dennis C. Berry, Milo Eldridge
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Patent number: 5104454Abstract: The cleaning method of the present invention comprises; (a) immersing a material to be cleaned in a mixed solvent contained in the first open vessel, wherein the mixed solvent consists of a chlorofluoro-hydrocarbon with a boiling point of 20.degree.-50.degree. C. and an organic solvent with a boiling point of 50.degree. C. or more higher than that of said chlorofluoro-hydrocarbon and compatible therewith, but not azeotropic therewith, and kept at a temperature within a range between the boiling point of the chlorofluoro-hydrocarbon and a temperature of at least 30.degree. C.Type: GrantFiled: March 15, 1988Date of Patent: April 14, 1992Assignee: Du Pont - Mitsui Fluorochemicals Co. Ltd.Inventors: Michinori Yokozawa, Hideaki Kikuchi
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Patent number: 5104565Abstract: Novel azeotrope-like compositions comprising dichloropentafluoropropane, 2-propanol and a hydrocarbon containing six carbon atoms which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: June 25, 1990Date of Patent: April 14, 1992Assignee: Allied-Signal Inc.Inventors: Hillel Magid, David P. Wilson, Richard M. Hollister, Dennis M. Lavery
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Patent number: 5102563Abstract: For replacing cleaning compositions based on 1,1,2-trichloro-1,2,2-trifluoroethane (F113), the invention provides a composition comprising 55 to 80% by weight of 1,1,1,2,2-pentalfuoro-3,3-dichloropropane (225ca) and 20 to 45% by weight of methyl tert-butyl ether.These two compounds form a negative azeotrope (b.p.=59.9.degree. C. at atmospheric pressure).The composition, which may be stabilized, can be used for cleaning solid surfaces, in particular for removing flux from printed circuits and for degreasing mechanical parts.Type: GrantFiled: May 10, 1991Date of Patent: April 7, 1992Assignee: Societe ATOCHEMInventors: Daniel Desbiendras, Jean-Jacques Martin, Pascal Michaud
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Patent number: 5100572Abstract: An azeotropic mixture of polyfluoropentanes and methanol is disclosed. The azeotropic mixture is useful as: a cleaning agent, a blowing agent, a refrigerant, an aerosol propellant, a heat transfer medium and a power cycle working fluid.Type: GrantFiled: June 28, 1991Date of Patent: March 31, 1992Assignee: E. I. Du Pont de Nemours and CompanyInventor: Abid N. Merchant
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Patent number: 5091104Abstract: Azeotrope-like compositions of tertiary butyl 2,2,2-trifluoroethyl ether and perfluoromethylcyclohexane which are useful in a variety of industrial cleaning applications including defluxing of printed circuit boards.Type: GrantFiled: June 26, 1991Date of Patent: February 25, 1992Assignee: Allied-Signal Inc.Inventor: Michael Van Der Puy
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Patent number: 5089084Abstract: An apparatus used to HF gas etch a plurality of integrated circuit wafers within an etch chamber, followed by a de-ionized water cascade rinse in the chamber. On completion of the rinse and removal of the wafer carriers, the apparatus, housing, and supply conduits are purged with an inert gas to prepare the apparatus for a next batch of wafer carriers. The apparatus includes process-control means for automatically controlling each step of the process.Type: GrantFiled: December 3, 1990Date of Patent: February 18, 1992Assignee: Micron Technology, Inc.Inventors: Navjot Chhabra, Loyal Gibbons
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Patent number: 5087383Abstract: The invention relates to a novel azeotropic or azeotrope-like mixture which essentially comprises about 90-97% by mass of 2,2,2-trifluoroethyl 1,1,2,2-tetrafluoroethyl ether and about 3-10% by mass of ethanol and also to a process for cleaning electrical or electronic components, in particular soldered circuit boards or printed circuits, but also other solid surfaces, with the aid of said mixture. Soldering fluxes, in particular, can be removed from circuit boards with the aid of said mixture.Type: GrantFiled: April 24, 1991Date of Patent: February 11, 1992Assignee: Hoechst AktiengesellschaftInventors: Horst Robeck, Hans-Matthias Deger
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Patent number: 5085798Abstract: Stable azeotrope-like compositions consisting essentially of 1,1-dichloro-1-fluoroethane, cyclopentane and optionally an alkanol which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: September 11, 1990Date of Patent: February 4, 1992Assignee: Allied-Signal Inc.Inventors: Ellen L. Swan, Rajat S. Basu, Richard M. Hollister
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Patent number: 5085796Abstract: Stable azeotrope-like compositions comprising 1,1-dichloro-1-fluorethane, dichlorotrifluoroethane, ethanol, and a mono- or di-chlorinated C.sub.2 or C.sub.3 alkane which are useful in a variety of industrial cleaning applications.Type: GrantFiled: August 15, 1990Date of Patent: February 4, 1992Assignee: Allied-Signal Inc.Inventors: Leonard M. Stachura, Peter B. Logsdon, Ellen L. Swan, Rajat S. Basu
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Patent number: 5085797Abstract: Stable azeotrope-like compositions of 1,1-dichloro-1-fluoroethane, a mono-chlorinated C.sub.3 alkane and optionally an alkanol which are useful in a variety of industrial cleaning applications including cold cleaning and defluxing of printed circuit boards.Type: GrantFiled: September 11, 1990Date of Patent: February 4, 1992Assignee: Allied-Signal Inc.Inventors: Ellen L. Swan, Rajat S. Basu
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Patent number: 5082503Abstract: A method for maintaining a flammable solvent in a nonflammable environment involves covering the flammable solvent with a nonflammable vapor blanket provided by a nonflammable solvent, such that vapors from the flammable and nonflammable solvents form a nonflammable gaseous mixture in the blanket. Such a method is used in removal of both oil-based and polar contaminants to control the flammability potential of an alcohol solvent. An apparatus for cleaning articles using fluorocarbon and alcohol solvents includes a chamber having a plurality of compartments for containing the solvents and a bounded vapor space. At least one of the compartments contains liquid fluorocarbon and at least one other will contain liquid alcohol. The solvents voltalize into the bounded vapor space to provide a nonflammable vapor blanket over the alcohol-containing compartment.Type: GrantFiled: October 22, 1990Date of Patent: January 21, 1992Assignee: Baxter International Inc.Inventors: Robert M. Sluga, Randolph H. Watkins, Jerry D. Fisher, Dennis C. Berry, Milo Eldridge
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Patent number: 5082518Abstract: A gas diffusion system for evenly distributing injected gas in a bath including a diffusion sparger plate for spreading and distributing the gas. Gas moves horizontally under the plate, and is relayed upward through a set of gas passages in the plate.Type: GrantFiled: October 29, 1990Date of Patent: January 21, 1992Assignee: SubMicron Systems, Inc.Inventor: James S. Molinaro
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Patent number: 5081068Abstract: The method of treating a surface of a substrate (12) comprises the steps of physically treating the surface by jetting hydrogen peroxide containing ice particles (28) onto the substrate surface, and chemically treating the substrate surface with hydrogen peroxide solution obtained by melting the hydrogen peroxide containing ice particles (28).Type: GrantFiled: July 3, 1990Date of Patent: January 14, 1992Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Shinji Endo, Toshiaki Ohmori, Takaaki Fukumoto, Keisuke Namba
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Patent number: 5078832Abstract: A method for treating a main surface of a wafer on which a thin film having micro openings is formed with a treatment agent includes the steps of: making the thin film hydrophilic, supplying water to the surface of the thin film, and supplying the treatment agent in vapor phase to the thin film while spinning the wafer. The rendered hydrophilic thin film causes the water supplied to the surface of the thin film to form a water film having a uniform thickness on the inner surface of the openings as well as on the surface of the thin film. A vapor phase treatment agent supplied dissolves in the water film so as to treat the main surface of the wafer at the bottom of the openings. Even if the wafer is spun at high speed, the treatment agent permeates through the water film into the openings so as to uniformly and efficiently treat the main surface of the wafer.Type: GrantFiled: May 3, 1990Date of Patent: January 7, 1992Assignee: Dainippon Screen Mfg. Co., Ltd.Inventor: Masato Tanaka
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Patent number: 5076956Abstract: Mixtures of the two fluorocarbon compounds 1,1,2,2,3,5,5,5-nonafluoro-4-trifluoromethylpentane and 1,1,1,2,2,5,5,5-octafluoro-4-trifluoromethylpentane with alcohols, ethers, esters, ketones, nitrogen-containing organic compounds, and halogenated hydrocarbons are disclosed; as is a process for cleaning a solid surface which comprises treating the surface with said mixtures. Ternary mixtures of about 88 to 96 weight percent total of said two fluorocarbon compounds with methanol (including at least about 11 weight percent 1,1,1,2,2,3,5,5,5-nonafluoro-4-trifluoromethylpentane and at least about 13 weight percent 1,1,1,2,2,5,5,5-octafluoro-4-trifluoromethylpentane) and with ethanol (including at least about 28 weight percent 1,1,1,2,2,3,5,5,5-nonafluoro-4-triluoformethylpentane and at least about 16 weight percent 1,1,1,2,2,5,5,5-octafluoro-4-trifluoromethyl-pentane) are disclosed as quasiazeotrope compositions that are useful where recovery and reuse of solvents is practiced.Type: GrantFiled: November 29, 1990Date of Patent: December 31, 1991Assignee: E. I. Du Pont de Nemours and CompanyInventor: Douglas R. Anton
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Patent number: 5075982Abstract: A vapor degreasing open topped defluxer is disclosed in which cleaning solvent vapors are generated by boiling a liquid solvent in an open topped tank with the parts to be cleaned inserted therein through the open top. The open topped tank is formed from plural upright sidewalls connected to a bottom wall. Heating elements disposed in the tank bottom vaporize the solvent such that the generated heated solvent vapors rise above the liquid solvent to contact the parts to be cleaned and dissolve the grease on the parts. A condenser coil supported within the tank above the liquid solvent condenses the solvent vapors and defines an upper limit or vapor line of the solvent vapor zone located above the liquid solvent and below uppermost edges of the upright sidewalls. The light rising solvent vapors have a natural tendency to rise upwardly out of the tank by following a convection flow path generally along the inner surfaces of the sidewalls and upwardly past the uppermost edges thereof.Type: GrantFiled: September 25, 1990Date of Patent: December 31, 1991Assignee: Allied-Signal Inc.Inventors: Joel E. Rodgers, Sr., Thomas W. Godlewski