Abstract: Methods, systems and apparatus for automatically maintaining a pressure differential for the continuous delivery of a liquid to semiconductor manufacturing equipment. A refillable bulk liquid delivery system includes a plurality of canisters residing along a liquid flow path, whereby an over pressure is detected within at least one of the canisters. The over pressure may be detected using an automatic venting circuit or a programmable logic controller programmed for detecting such over pressures. The over pressure is then exhausted by removing excess pressure from the canister through a venting valve to maintain a Delta pressure across the canisters for continuously delivering the liquid along the liquid flow path.

Abstract: Methods are provided for making a treatment composition by loading active components into a high pressure vessel and pressurizing the high pressure vessel with carbon dioxide to reach a pressure within the high pressure vessel of about 400 pounds per square inch to about 1,070 pounds per square inch. The active components can include a protein denaturant and a surfactant, and optionally an acaricide. In one particular embodiment, this method can be used to clean a substrate, by loading the substrate into the high pressure vessel prior to pressurizing with carbon dioxide. Methods are also provided for treating a substrate to clean it from dust mites by delivering dry ice particles to the substrate, and vacuuming the substrate. Treatment compositions are also generally provided.

Abstract: A method and system of gas refilling management for gas storage canister utilizing identification accessing control includes an identification information transmission device, a control device, and a gas refilling equipment, which are applicable for management of refilling of at least one storage canister. The storage canister is provided with an information identification label, which contains at least one record of canister information. By using the identification information transmission device to first read the information contained in the label of a storage canister, the control device may then set a refilling condition based on which the gas refilling equipment carries out a refilling operation to the storage canister, so as to suit for management of refilling various types of gas storage canisters to provide the best performance in a practical application.

Abstract: A hydrogen dispensing station and method of operating a hydrogen dispensing station for dispensing to multiple receiving vessels. The station and method limit receiving vessel gas temperature during dispensing. Various components used to limit receiving vessel gas temperature during dispensing are mutual to multiple hydrogen service ports. Receiving vessel gas temperature during dispensing may be affected by pressure ramp rate control, cooling of hydrogen in a heat exchanger, and/or use of a lower temperature hydrogen source stream.

Abstract: Preferred processes are provided for unloading a particulate substance from a container using a cover system comprising a cover and a wand extending through the cover. The processes can include installing the cover system on the container so that the cover mates with the container and the wand extends into the particulate substance, connecting a pipe or a hose to the wand, and drawing the particulate substance through the wand and the pipe or hose.

Abstract: Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove.

Abstract: The present invention describes in particular a method for stabilizing a pharmaceutical composition by contacting said composition with a polymeric material comprising in particular an ethylene oxide sterilization step.

Abstract: An in-structure air delivery system comprises a control panel and a plurality of air delivery lines. The control panel is located at a first location in the structure and has an air supply inlet. Each air delivery line extends from the control panel to a different location in the structure. Valves are configured to selectively control the flow of air through each of the air delivery lines. In a method of use, a high pressure air supply such as a portable compressor is connected to the inlet of the system. Air is selectively delivered to one or more of the delivery lines. A control unit is connected to the outlet of the delivery line. Air is supplied to the control unit. The control unit is used to regulate the flow of air to a component of breathing equipment, such as to a firefighter's breathing equipment air cylinder to be re-filled.

Abstract: The present invention provides a CNG time fill system, comprising a compression system including a gas dryer and one or more gas compressors, a gas storage system for storing the natural gas, a manifold time fill system for filling a plurality of natural gas vehicles with the natural gas, a pressure transducer or pressure transmitter for detecting the pressure within the manifold time fill system, and an automatic shut off valve for selectively stopping the flow of gas into the manifold time fill system.

Abstract: A kit for inflating and repairing inflatable articles, in particular tires, the kit having a compressor assembly, a container of sealing liquid and connectors for connecting the container to the compressor assembly and to an inflatable article for repair or inflation; the compressor assembly being housed in an outer casing defining a seat for the container of sealing liquid. The container is housed removably in the seat and functionally connected to the compressor assembly so as to form a compact unit ready for use.

Abstract: Various systems and methods are described for a controlling a flow of reformate fuel in a fuel system which includes a reformer and a storage tank coupled to an engine in a vehicle. The system includes a pump located between the reformer and the storage tank that is selectively operated in order to reduce parasitic losses on the system.

Abstract: A tank assembly including a tank for storing fluid, the tank having a fluid refill path. The assembly includes a blocking valve coupled to the tank, the blocking valve being positioned in the fluid refill path and configured to selectively generally seal the fluid refill path. The assembly further includes an overfill valve in fluid communication with the fluid refill path and configured to generally block the fluid refill path when sufficient fluid is in the tank. The blocking valve is positioned to prevent vapors which are introduced into the fluid refill path via the overfill valve from escaping from the tank.

Abstract: In a tire inflating station for inflating a tubeless tire arranged on a rim with a pressurized gas, arranged on a stand are a conveyor for receiving and conveying a wheel consisting of a wheel rim and a tire mounted on the wheel rim, and an inflation device above the conveyor and having an inflation opening which can be connected to a gas supply. The lower side of the inflation device has a carrier plate that is mounted to move backwards and forwards along an axis between at least two positions in a straight-line mechanism. There are inflation rings attached in tandem in a gas-tight manner to the lower side of a carrier plate. Inside the inflation rings, the carrier plate has a respective continuous opening. In each of the different working positions of the carrier plate, another of the continuous openings is connected to the inflation opening of the inflation device, which inflation opening is arranged on the upper side of the carrier plate.

Abstract: A fuel filling kit 10 includes a filling nozzle capable of being inserted into an opening of a fuel cartridge, a filling vessel capable of filling liquid fuel reserved in the inside thereof into the fuel cartridge through the filling nozzle, and an opening sealing sheet for sealing the opening. The opening sealing sheet has a methanol blocking portion having a resisting property to liquid fuel and a sticking portion capable of being attached to the fuel cartridge.

Abstract: A hydrogen dispenser comprises a programmable controller and a user interface operably connected to the programmable controller. The programmable controller has a plurality of user-selectable hydrogen dispensing rate algorithms. The user interface offers the plurality of user-selectable hydrogen dispensing rate algorithms and is used for setting a user-selected dispensing rate algorithm from among the plurality of user-selectable hydrogen dispensing rate algorithms.

Abstract: Methods and systems for reducing a pressure of compressed natural gas and for delivering natural gas are disclosed. A regulator comprising a vortex tube may be used to reduce the pressure of compressed natural gas while a temperature thereof is also reduced. The temperature reduction associated with a pressure drop in the compressed natural gas is achieved by throttling the gas at constant enthalpy from 3,000 PSIG to 150 PSIG through the regulator. At least one heat exchanger may be utilized to increase the temperature of the compressed natural gas to a temperature suitable for injection delivery. A pressure-reducing regulator may be used to further reduce a pressure of the gas to about 45 PSIG for delivery to an end-user.

Abstract: A container filling plant for filling containers, such as demijohns and kegs, which filling plant has filler elements for filling of large volume containers with a liquid product, and method therefor. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

Abstract: The invention provides a hydrogen dispensing system comprising: a feed vessel for storing liquid hydrogen having an inlet and an outlet; a flash drum having an inlet and an outlet; a dispenser for dispensing gaseous hydrogen at a pressure of greater than 300 bar, having an inlet and an outlet wherein the feed vessel outlet is in fluid communication with the flash drum inlet, the flash drum outlet is in fluid communication with the dispenser inlet and there is no compression apparatus between the feed vessel outlet and the dispenser outlet. The invention also provides a method of providing gaseous hydrogen to a vehicle.

Abstract: An apparatus (10) for fuelling an aircraft, in particular during performing a tank leakage test on the aircraft, comprises a fuel supply line (14) for supplying fuel to an aircraft tank system (12), at least one pressure sensor (26) for sensing a pressure within the aircraft tank system (12) and for providing a signal indicative of the pressure within the aircraft tank system (12), an electronic control unit (ECU) for processing the signal of the pressure sensor (26) and for generating an emergency shut-off signal, if the pressure within the aircraft tank system (12) exceeds a first predetermined level, and an emergency shut-off device (24) which is controlled by the electronic control unit (ECU) and which is adapted to interrupt the supply of fuel to the aircraft tank system (12) in response to the emergency shut-off signal from the electronic control unit (ECU).

Abstract: A conventional liquid spray gun having a compressed air supply equipped with a liquid, e.g. paint, container for supplying the liquid to be sprayed onto a target surface. The container has a closed bottom, an open top and a cylindrical sidewall. A removable cover is attached over the open top of the container, and the cover has a pair of apertures extending through it, one of which holds a proximal end of a rigid tube whose distal end extends to a point close to the container's bottom. Slidingly mounted on the rigid tube is a generally circular, movable plunger whose periphery engages the cylindrical sidewall of the container. Pressurized air injected through the second aperture in the cover forces the plunger against the liquid's surface and causes the liquid to flow through the lumen of the rigid tube to the liquid inlet port of the spray gun.

Abstract: Provided are gas storage medium, a gas storage apparatus having the same and a method thereof. The gas storage medium includes a plurality of material layers each having a variable valence, wherein each of the material layers includes redundant electrons that are not participated in chemical bonding.

Abstract: Heavier noble gases such as xenon and argon can reduce the run-in period for vacuum tubes and in particular flame detector tubes. The tubes can be filled with a run-in gas and then run-in. The run-in gas can then be exchanged for an end gas, such as neon, and the tube sealed. A final conditioning step of running in the tube with the end gas can further smooth the tube's anode and cathode to thereby improve performance and operating life.

Abstract: The invention relates to a gas filling and dispensing device that includes a body to be provided in the opening of a pressurized gas storage tank, a gas tapping circuit extending between a first upstream end to be connected to the inside of the tank and a second downstream end to be connected to a gas user, a filling duct having a first upstream end to be connected to the inside of the tank and a second downstream end to be connected to a filling member, said filling duct including at least one portion distinct from the tapping circuit, and the filling duct including a first valve, characterized in that the filling duct includes a second isolation valve arranged in series with the first valve.

Abstract: There are disclosed systems and methods of delivering sterile fluids aseptically to a sealed canister. In an embodiment, a includes a canister having an inlet, a vent, and a drain outlet, a reagent manifold in communication with the inlet, a bubbler in communication with the vent, and a fluid communicator from the drain outlet. In another embodiment, a method includes providing a canister having an inlet, a vent, and a drain outlet; selectively providing reagents to the canister from a reagent manifold in communication with the inlet, allowing excess gasses to leave the canister with a bubbler in communication with the vent, and selectively purging the reagents from the canister through the drain outlet. Other embodiments are also disclosed.

Abstract: The present invention describes methods and systems of oxygen transfill that includes the step of delivering a quantity of liquid oxygen to an evaporation chamber in a liquid oxygen evaporation device. Next, at least a portion of the liquid oxygen in the evaporation chamber is evaporated and a quantity of gaseous oxygen is maintained at a predetermined pressure level in the evaporation chamber. The method includes filling a portable compressed oxygen device with at least a portion of the gaseous oxygen.

Abstract: A hydrogen filling apparatus fills a hydrogen tank, for example, mounted on a fuel cell vehicle with hydrogen stored in a hydrogen storage tank. After the hydrogen tank has started to be filled with hydrogen in a hydrogen filling process, the hydrogen filling process is stopped for a predetermined time, and a temperature and a pressure in the hydrogen tank are detected while the hydrogen filling process is being stopped. Thereafter, a time needed to fill the hydrogen tank with a predetermined amount of hydrogen is calculated based on detected values of the temperature and the pressure, and the calculated time is displayed on a display unit.

Abstract: The present invention is a mobile storage unit for use within a mobile storage unit system that includes an environmental monitoring system on the storage unit. The monitoring system includes one or more sensors disposed on one or more of the mobile storage units that are configured to sense a particular environmental condition in the environment surrounding the mobile storage unit. The sensors are each operably connected to a controller associated with the mobile storage system that is capable of receiving signals from the sensors and analyzing the signals to determine the presence or absence of the environmental condition to be sensed by the sensors. If the condition is present, the controller can transmit an alert signal to an alarm system or to a separate notification device, such as a telephone or computer terminal, in order to alert an individual or the appropriate authorities to the presence of the hazardous environmental condition in the vicinity of the mobile storage system.

Abstract: A source of compressed air, such as one or more air compressors and/or one or more tanks of compressed air, is used to sequentially fill a plurality of compressed air storage cylinders. A plurality of pressure-sensitive, one way check valves cause the storage cylinders to be automatically filled up, one at a time, in a determined sequence. The outputs of the storage cylinders are connected through a plurality of differential air pressure valves to a fill station, to cause the storage cylinders to fill up individual air breathing tanks, in which the storage cylinders are depleted in a determined sequence, one at a time. By depleting first the first to be filled storage cylinder, first in—first out, the same filling procedure can be used to refill the air storage cylinders.

Abstract: The present invention provides a method for controlling a hydrogen supply system for a fuel cell, the method comprising: a hydrogen filling step in which high pressure hydrogen is supplied to a high pressure line connecting first to Nth hydrogen tanks to be filled in the first to Nth hydrogen tanks; a hydrogen supply step in which only hydrogen in the first hydrogen tank provided adjacent to a fuel cell stack is supplied to the fuel cell stack during driving of a vehicle; and a hydrogen transfer step in which hydrogen is transferred from the second to Nth hydrogen tanks to the first hydrogen tank during parking or stopping of the vehicle.

Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

Abstract: A liquid storage and dispensing system for storing and dispensing diesel exhaust fluid to a vehicle. The system includes a diesel exhaust fluid storage tank surrounded by a housing in which the interior temperature is maintained above a first temperature at or below which salting of the fluid occurs, and below a second temperature at or above which an ammonia constituent of the fluid evaporates. The system further includes filling and dispensing systems for refilling the storage tank and dispensing the fluid.

Abstract: An enclosure is filled with a filling gas according to the disclosed method. An enclosure is provided having an interior, a width, a height, a thickness, and fluid filling and exit holes fluidly communicating with the interior. Filling of the enclosure is commenced by directing a flow of the filling gas at a filling flow rate into the fluid filling hole. An oxygen concentration of gas exiting the fluid exit hole is sensed. The filling of the enclosure is stopped when the sensed oxygen concentration reaches a threshold concentration, wherein the threshold oxygen concentration and/or the filling flow rate are selected by a Decision Support Tool based upon the width, height, and/or the thickness.

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract: Described is a method for filling a storage container with a gaseous, pressurized medium, preferably with gaseous, pressurized hydrogen. According to the invention, a determination of the internal storage container pressure takes place at the onset of the filling process by means of a pressure test impact and a filling process with time-controlled pressure increase up to the desired internal storage container pressure takes place subsequently as a function of the established internal storage container pressure.

Abstract: A fuel dispensing nozzle system including a spout configured to dispense fuel flowing therethrough, and a flow shaper positioned in the spout such that fuel flowing through the spout passes through the flow shaper. The flow shaper includes a central cavity and a plurality of outer cavities positioned about the central cavity. The central cavity and the plurality of outer cavities each have a L/D ratio, wherein the L/D ratio of the central cavity is less than the L/D ratio of each of the outer cavities.

Abstract: In the present invention methods for storing gaseous hydrogen employing an ionic liquid are disclosed. The ionic liquid is used to displace the volume in the storage tanks. By displacing the volume in the storage tanks with the ionic liquid, the storage pressure can remain constant and the “stranded” gas can be eliminated. This constant pressure will also allow for a reduction in the number of storage tanks needed to provide the required inventory at hydrogen fueling stations. In addition, this constant pressure will provide a complete and fast fill to the vehicle.

Abstract: A particulate feed arrangement used in pulverized coal gasification under pressure is provided. The arrangement includes a reservoir for stocking the pulverized coal, a plurality of powder injection tubes, and a metering unit. Pure carbon dioxide is fed to the components that are at operating pressure, namely the power injection tube and the metering unit, as the inerting and flow medium or fluidizing medium. The carbon dioxide-carrying components are heated in such a manner that the temperature is above the threshold of the diphase range. A method is also provided. The method allows elimination of any nitrogen in the product gas, which nitrogen is caused by the powder injection system, especially when used in pulverized coal gasification under pressure to produce a synthesis gas for the production of different hydrocarbons.

Abstract: The present invention relates to a gas pressure vessel having a prescribed maximum filling pressure for the uptake, storage and release of a gas, which comprises the gas and a mixture comprising, in each case based on the total weight of the mixture, a) from 2 to 60% by weight of a latent heat storage component A and b) from 40 to 98% by weight of a framework component B, wherein the component A comprises at least one microencapsulated latent heat storage material and the component B comprises at least one porous metal organic framework comprising at least one at least bidentate organic compound coordinated to at least one metal ion and the at least one porous metal framework can adsorptively store at least part of the gas. The invention furthermore relates to a process for filling a gas pressure vessel with the abovementioned mixture for the uptake, storage and release of a gas.

Abstract: The invention relates to a method and an apparatus for the supply of a gas or a gas mixture at a predetermined temperature to a processing station in a filling machine in which gas or gas mixture pressurised to above atmospheric is passed through an electrically heated heating unit (2, 3; 6, 7). This includes a sensor sensing the temperature of the gas whose output signal is fed back to a gas temperature regulator unit (not shown) which in its turn is coupled to the heating unit with a view to regulating the temperature of the gas flowing out from the heating unit (2, 3; 6, 7). The heating unit (7) is formed to an electrically conductive shell or a cavity (6) through which the gas or gas mixture is passed positively and regulated.

Abstract: A method for operating a device for filling a tank for storing fuel as condensed gas for a consumer that can be operated with cryogenically stored fuel. Included is at least one filling line and one extraction line for connecting to a filling device on a gas-station-side. In a first time period for cooling the tank, the condensed gas is introduced into the tank, at least the large part is extracted again in the form of gas via the extraction line, and in a second subsequent time period, the tank is filled with condensed gas at the same time as at least the displaced gas is extracted. In a subsequent third time period, the filling line is closed and the extraction line is maintained open in order to guide the gas from the tank back until the pressure and/or the temperature in the tank is/are lowered to defined values.

Abstract: Devices and methods are disclosed for extracting fluids from within a container sealed by a cork or septum without removal of the cork or septum or the contamination of the fluid 1.within the container by reactive gases or liquids. Embodiments of the device can include a needle connected to a valve which is in turn connected to a source of pressurized gas for displacing the fluid. Further embodiments of the device can comprise additional components that act to force the needle to be inserted through the cork or septum along a linear path, to aid in preventing buckling of the needle, to clamp the device to the container, to prevent expulsion of the cork or septum from the container, and to guide the needle through a specified region of the cork or septum. Various valves, pressure regulators, pressure ranges, needle geometries, gas selections are also presented. This device is particularly suited for the dispensing and preservation of wine.

Abstract: A method for the processing in one possible embodiment for the packaging of products using an oxygen-free process gas. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

Abstract: Disclosed herein are exemplary embodiments of devices and methods for removing excess air from containers and/or for preserving liquids, paints, and other materials (including semi-liquids and even some solids) that might otherwise dry out, oxidize, or turn bad in some way after being opened, such as paint, wine, food, beverages, etc., when seals of the containers holding the same might be compromised over the passage of time and/or from use, etc.

Abstract: An amusement item comprising a container filled with compressed air from a geographic location of interest. Compressed air from a geographic region is collected and transported to a manufacturing facility for the production of novelty containers containing the compressed air. Containers are labeled with the region/location from which the compressed air is obtained. Certification and quality is maintained by obtaining records of the chemical make-up of the air at the source and comparing that electronic record to cylinders of air from the geographic location to ensure accuracy of labeling and filling. The amusement items are sold as souvenirs.

Abstract: Vehicle tires are filled with perfluorocarbon gas to extend tire life.

Abstract: A method and system for dispensing fuel to a vehicle includes a sensor generating a fuel identifier signal associated with the vehicle and a fuel dispenser having a fuel type a fuel type selector generating a fuel type selector signal. The system also includes a control module in communication with the sensor and the fuel dispenser. The control module compares the fuel identifier with fuel type. When the fuel type corresponds to the fuel identifier, the control module enables a dispensing of fuel from the fuel dispenser. When the fuel type does not correspond to the fuel identifier, the control module prevents the dispensing of fuel.

Abstract: A portable device for delivering nitrogen to multiple tires includes a gas source and supply line connected to a controller. The device also includes a gas delivery line comprising a manifold with a plurality of outlets in fluid communication with each other. A gas delivery line is operably connected to the controller and a plurality of extension lines with engagement chucks are operably connected to the outlets. The controller controls the supply of gas to the gas delivery line and controls a relief valve for venting the gas delivery line. The device also includes a sensor and a processor connected the controller and sensor which accepts user inputs. The controller, manifold and processor are affixed to a stand.

Abstract: The high-pressure output (2) of a donor container is coupled to a user system (11) by means of a main transfer tube (4) through a pilot valve (5) controllable by an auxiliary line (6) which is connected (12) to an auxiliary circuit of the system (11), extends along the main tube (15) and is fixed thereto by the reduced length thereof at several distinct points (S<SUB>i</SUB>). In such a way, the rupture or inflammable leakage of the tube (4) generates the tearing off or meting of the auxiliary line (6) in such a way that the output valve (5) is immediately closed. Said invention is particularly suitable for an inflammable gas supply to stationary plants.

Abstract: A hydrogen storage tank for containing solid-state hydrogen storage media, and method for determining the hydrogen fill level in the tank. The tank has at least one compartment for storing the storage media, passages for transporting hydrogen gas to and from the compartment, and a heat distribution system for establishing a substantially uniform temperature in the storage media. A look-up table is generated for the tank that relates hydrogen pressure changes in the tank versus hydrogen fill levels in the tank as a function of temperature. The tank is filled to full capacity by adsorbing hydrogen on the storage media. Thereafter, hydrogen is released from the storage media for a time period during which there is a substantially constant demand on the tank, the change in pressure of the released hydrogen gas is measured, and the look-up table is applied to determine the hydrogen fill level in the tank.

Abstract: It is an object of the present invention to easily and securely perform the removal operation of contaminant or the like from a wafer housed in a FOUP. To achieve the object, a purging apparatus of the present invention removes contaminant or the like from a wafer by moving a gas supply nozzle along a direction in which wafers are superimposed at the front of an opening while a lid of the FOUP is separated from a body and spraying clean gas on each wafer from the gas supply nozzle.