Recirculation Patents (Class 204/237)
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Publication number: 20120298527Abstract: An apparatus and a method for electrochemical modification of liquid streams using at least one anode and cathode assemblies arranged to contain liquid electrolytes anolyte and catholyte, a plurality of electrically conducting anode and cathode particulates forming anode and cathode particulate beds, and current feeder and current collector devices in contact with the particulate bed, where the anode particulates and cathode particulates are in motion substantially independent of bulk electrolytes flow.Type: ApplicationFiled: May 27, 2011Publication date: November 29, 2012Applicant: Blue Planet Strategies, L.L.C.Inventors: Patrick I. James, George Stejic
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Publication number: 20120247974Abstract: Process and apparatus to remove colloids and nitrogen compounds from contaminated water by coagulating the colloids and separating them from the water. The water is then continuously oxidized with chlorine electrolytically to destroy the nitrogen compounds.Type: ApplicationFiled: April 17, 2012Publication date: October 4, 2012Applicant: POTABLE WATER SYSTEMS LTD.Inventors: Jorge Miller, Luisa Kling Miller
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Publication number: 20120222954Abstract: The invention relates to an electrolytic reaction system (1) for generating gaseous hydrogen and oxygen, comprising a reaction chamber (2) for accommodating an electrolyte and an electrode arrangement (3) comprising a plurality of anodic and cathodic electrodes (5, 6). The electrode arrangement (3) comprises a plurality of plate-shaped electrodes (5, 6) fanned out in a star-shaped arrangement, and a virtual fanning axis (7) of the star-shaped electrode arrangement (3) lies at least approximately on a virtual, central cylinder or vertical axis (8) or is congruent with a virtual, central cylinder or vertical axis (8) of the reaction chamber (2). At least one electromagnetic coil (13) is disposed above and/or underneath the star-shaped electrode arrangement (3) in the axial direction of the virtual cylinder or vertical axis (8), the electromagnetic field of which acts on the electrolyte and on the electrode arrangement (3) when exposed to electrical energy.Type: ApplicationFiled: September 29, 2010Publication date: September 6, 2012Applicant: NEW ENERGY AGInventor: Adolf Lothring
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Publication number: 20120145537Abstract: This is an electrolytic apparatus and process for the production of Hypochlorous Acid (HClO) and Sodium Hydroxide (NaOH) in a closed-loop arrangement. A brine solution in an electrolyzer cell is subjected to an electric current, causing HClO and/or NaOH to be produced in water circulated through the cell. The produced solution is recirculated through the cell as its chemical properties are monitored by a sensor, connected by a controller which controls a recirculating pump and the electric current, until the sensor indicates that the concentration of the solution has reached a desired value, and the controller stops the process.Type: ApplicationFiled: January 18, 2011Publication date: June 14, 2012Inventor: John Kuiphoff
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Publication number: 20120118727Abstract: This disclosure relates to a dry cell system for separating water into hydrogen and oxygen in combination with catalytic-type chemicals and materials. The separated hydrogen/oxygen are provided into the air intake system of an internal combustion engine and used therein to greatly improve the operation of said internal combustion engine, both in regards to fuel consumption as well as detrimental exhaust products.Type: ApplicationFiled: February 2, 2011Publication date: May 17, 2012Inventor: Brian McDugle
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Patent number: 8178416Abstract: A method of fabricating an electrically conductive mechanical interconnection element (12) comprises: a first stage of electrochemically depositing a structure comprising a plurality of metal wires (2a) of sub-micrometric diameter projecting from the likewise metallic surface of a substrate (2); and a second stage of controlled partial dissolution of said wires to reduce their diameter. A method of making a mechanical and/or electrical interconnection, the method comprising the steps consisting in: fabricating two interconnection elements by a method as described above; and placing said interconnection elements face to face and pressing one against the other so as to cause the nanometric wires projecting from the surfaces of said elements to interpenetrate and tangle together. A three-dimensional electronic device comprising a stack of microelectronic chips mechanically and electrically connected to one another by such interconnection elements.Type: GrantFiled: October 24, 2008Date of Patent: May 15, 2012Assignees: Centre National de la Recherche Scientifique, Universite Paul SabatierInventors: Patrice Simon, Pierre-Louis Taberna, Thierry Lebey, Jean Pascal Cambronne, Vincent Bley, Quoc Hung Luan, Jean Marie Tarascon
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Patent number: 8163142Abstract: A hydrogen system for internal combustion engines, comprising a housing assembly having at least three internal chambers divided by at least two dividing plates. The two dividing plates include a lower dividing plate and an upper dividing plate. Each comprises a plurality of through holes to allow aqueous solution to flow and circulate through the three internal chambers. A hydrogen generator is mounted onto the housing assembly at a predetermined angle. The hydrogen generator comprises a first predetermined number of negative charged plates, a second predetermined number of neutral plates, and a third predetermined number of positive charged plates. The hydrogen generator generates oxygen and hydrogen gas for use in an internal combustion engine to improve combustion efficiency and to decrease emissions. The hydrogen generator serves as an electrolysis cell to generate the oxygen and hydrogen gas with electric current from a power source being passed through the aqueous solution.Type: GrantFiled: April 7, 2009Date of Patent: April 24, 2012Inventor: Giulio Stama
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Publication number: 20120090989Abstract: A water electrolysis system includes a water electrolysis apparatus, a low-pressure gas-liquid separator, a high-pressure gas-liquid separator, water pipe, and a decompression water supply device. The high-pressure gas-liquid separator separates the hydrogen received from a cathode of the water electrolysis apparatus and permeation water that has permeated from the anode. The water pipe connects the high-pressure gas-liquid separator and the low-pressure gas-liquid separator and is used for returning the water from the high-pressure gas-liquid separator to the low-pressure gas-liquid separator. The decompression water supply device is arranged at the water pipe and is to decompress the water discharged from the high-pressure gas-liquid separator.Type: ApplicationFiled: September 22, 2011Publication date: April 19, 2012Applicant: HONDA MOTOR CO., LTD.Inventors: Eiji HARYU, Koji NAKAZAWA, Masanori OKABE
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Publication number: 20120067732Abstract: A plating apparatus includes a plating bath configured to perform plating processing of a substrate with a plating solution including an inorganic constituent and an organic constituent introduced into the plating bath, a chemical supplying unit configured to supply each chemical of the inorganic constituent and the organic constituent, an electrode configured to dispose in the plating solution and the electrode configured to selectively adsorb a by-product produced from the organic constituent, and an electric current applying unit configured to apply a predetermined electric current to the electrode.Type: ApplicationFiled: March 8, 2011Publication date: March 22, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Fumito Shoji, Hiroshi Ota
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Publication number: 20120067740Abstract: A method for concentrating dilute sulfuric acid involves feeding dilute sulfuric acid through at least two electrolytic cells depolarized by sulfur dioxide, and through a cation conductive membrane separating the cathode and anode sides in the electrolytic cell. Also provided is an apparatus for concentrating sulfuric acid, wherein at least a first electrolytic cell is in fluid communication with a second electrolytic cell, and wherein a cation conductive membrane separates the cathode and anode sides in the electrolytic cells.Type: ApplicationFiled: May 25, 2010Publication date: March 22, 2012Applicant: Outotec OYJInventors: Michael Gasik, Anu Lokkiluoto, Heljä Peltola, Pekka Taskinen
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Patent number: 8128791Abstract: In a copper electroplating apparatus having separate anolyte and catholyte portions, the concentration of anolyte components (e.g., acid or copper salt) is controlled by providing a diluent to the recirculating anolyte. The dosing of the diluent can be controlled by the user and can follow a pre-determined schedule. For example, the schedule may specify the diluent dosing parameters, so as to prevent precipitation of copper salt in the anolyte. Thus, precipitation-induced anode passivation can be minimized.Type: GrantFiled: October 30, 2006Date of Patent: March 6, 2012Assignee: Novellus Systems, Inc.Inventors: Bryan Buckalew, Jonathan Reid, John Sukamto, Zhian He, Seshasayee Varadarajan, Steven T. Mayer
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Publication number: 20120048728Abstract: The regeneration unit includes a tubular portion having the inner circumferential surface functioning as an anode, and a cathode provided inside the tubular portion and extending along the extension direction of the tubular portion in a state of separation from the inner circumferential surface. The treatment liquid used for desmearing treatment is fed through a gap between the inner circumferential surface of the tubular portion and the cathode. A feed-side conduit is connected by a downstream end portion thereof to the tubular portion and guides the treatment liquid discharged from a desmearing treatment tank into a regeneration unit. A return-side conduit is connected by an upstream end portion thereof to the tubular portion and guides the treatment liquid discharged from the regeneration unit into the desmearing treatment tank.Type: ApplicationFiled: August 26, 2011Publication date: March 1, 2012Applicant: C. UYEMURA & CO., LTD.Inventors: Yoshikazu SAIJO, Hisamitsu YAMAMOTO, Takahiro ISHIZAKI
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Publication number: 20120043221Abstract: A method and device for charging a metal hydride hydrogen store (13) is described. It comprises generating gaseous hydrogen in an electrolyser (1), transporting the gaseous hydrogen to the metal hydride store and feeding the metal hydride store with the hydrogen. For having the hydrogen free of water contamination, the gaseous hydrogen is first transported under a first pressure of at least 1 MPa which pressure is then reduced by a pressure adjusting means (11) to a second, designated pressure lower to the first pressure, the second pressure being the feeding pressure to the metal hydride store. FIG. 1.Type: ApplicationFiled: July 22, 2011Publication date: February 23, 2012Inventors: Zhijun Gu, Zheng Yang
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Patent number: 8114257Abstract: An electrolytic cell and a method for accelerating the reduction of gamma ray emissions from a radioactive substance. The cell includes a non-conductive housing and a conductive end member sealingly positioned in and extending from each open end of the housing. Gamma ray emitting material such as powder, granules or gases in an admixture with palladium black powder or particles are closely packed into the chamber. A longitudinal gas passage extends through each end member in gas communication with the chamber. Each gas passage is sealably closeable, one gas passage being connectable to a source of pressurized hydrogen or deuterium gas deliverable under pressure into the chamber to charge the catalytic particles. A distal end of each end member is connected to an electric power source wherein, when electric current flows through the chamber, the gamma ray emission count decays at an abnormally high rate.Type: GrantFiled: April 23, 2008Date of Patent: February 14, 2012Inventor: John A. Thompson
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Publication number: 20120024696Abstract: An apparatus and method for simultaneously electroplating at least two parts in a series electrical configuration in an electroplating system using a shared electrolyte with excellent consistency in thickness profiles, coating weights and coating microstructure. Parts in high volume and at low capital and operating cost are produced as coatings or in free-standing form.Type: ApplicationFiled: October 7, 2011Publication date: February 2, 2012Applicant: INTEGRAN TECHNOLOGIES INC.Inventor: Klaus Tomantschger
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Publication number: 20120012468Abstract: The electrolysing apparatus (10) produces and separates combustible fluid, particularly combustible fluid containing predominately oxygen and hydrogen, formed during the electrolysis of an electrolytic solution disposed in the apparatus (10). The apparatus (10) comprises a first outer electrode (12), being an anode, a second outer electrode (14), being a cathode and two spaced apart foraminous members, a first foraminous member (16) and a second foraminous member (18), arranged generally parallel to one another and located between the two end electrodes (12 and 14).Type: ApplicationFiled: December 9, 2009Publication date: January 19, 2012Applicant: HYDROX HOLDINGS LIMITEDInventor: George Anagnostopoulos
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Patent number: 8097132Abstract: A metal-containing material is introduced in the container with an anode inserted therein, the container is introduced in a tank filled with an electrolyte, with a cathode opposed to it, and direct current is passed through ((+) anode and (?) cathode) to recover the desired metal.Type: GrantFiled: June 28, 2007Date of Patent: January 17, 2012Inventor: Luis Antonio Canales Miranda
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Patent number: 8097145Abstract: The invention relates to methods and devices for the decontamination of fluid, particularly the removal of heavy metals and/or arsenic and/or their compounds from water, by means of electrolysis, wherein the water to be purified subjected to electrodes of different polarities. The invention can include means for control of the pH of the fluid. The invention can also include control systems that allow self-cleaning of electrodes, self-cleaning of filters, and automatic monitoring of maintenance conditions.Type: GrantFiled: March 31, 2010Date of Patent: January 17, 2012Assignee: ARS USA LLCInventors: Andrew Polnicki, Giselher Klose
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Publication number: 20120000793Abstract: A method of cleaning metal-containing deposits from a metal surface of a process chamber component includes immersing the metal surface in an electrochemical cleaning bath solution. A negative electrical bias is applied to the metal surface to electrochemically clean the metal-containing deposits from the metal surface. The cleaning method is capable of removing metal-containing deposits such as tantalum-containing deposits from the metal surface substantially without eroding the surface, and may be especially advantageous in the cleaning of components having textured surfaces.Type: ApplicationFiled: June 10, 2011Publication date: January 5, 2012Inventors: Hong Wang, Kenneth Tsai
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Publication number: 20110297551Abstract: A method for fabricating an electronic component according to an Embodiment, includes a seed film forming process and an electro-plating process. In the seed film forming process, a seed film is formed above a substrate. In the electro-plating process, electro-plating is performed by soaking the seed film in a plating solution in a plating bath to which the plating solution being bubbled by a nitrogen gas is supplied, using the seed film as a cathode.Type: ApplicationFiled: March 17, 2011Publication date: December 8, 2011Inventors: Toshiyuki MORITA, Satoshi Wakatsuki
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Publication number: 20110290661Abstract: A system and method is described to convert ambient carbon dioxide (CO2) to graphite and oxygen by splitting the carbon oxygen bonds. By using this process, CO2 from point sources or from ambient air can be reduced or effectively eliminated, and thus the system can play an important role in the fight against CO2 emissions and global warming. The system first introduces CO2 and electrolyte solution to one or a series of specially designed pipes rotating pipes to create induction inside the pipes, resulting in breaking of the carbon-oxygen bonds and production of solid carbon and gaseous oxygen. The solid carbon and gaseous oxygen are then separated.Type: ApplicationFiled: August 8, 2008Publication date: December 1, 2011Inventor: Yoshio Niioka
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Patent number: 8048276Abstract: Solid oxide stacks used as fuel cells generate electricity from hydrogen or other sources. By an electrolysis process such standard fuel cells can be operated in order to create hydrogen or other electro chemical by-products. Unfortunately stacks generally operate at relatively high temperatures which will be difficult to sustain purely on economic grounds. In such circumstances less efficient operation can be achieved at lower temperatures where the air-specific resistance is higher by balancing with the electrical power input in order to cause the disassociation required. In such circumstances by provision of an incident heat source, whether that be through a heat exchanger heating the compressed air flow, or recycling of a proportion of exhaust from the stack, or combustion of a product from stack disassociation the result will be a sustaining electrolysis operation reducing the amount of expensive electrical supply required to achieve dissociation.Type: GrantFiled: April 22, 2008Date of Patent: November 1, 2011Assignee: Rolls-Royce plcInventors: Cristiano Balestrino, Gerard D. Agnew, Michele Bozzolo
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Publication number: 20110233069Abstract: An apparatus, a system and a method for electrochemical generation of hydrogen are disclosed. The apparatus may include a cathode, a polymer electrolyte membrane surrounding the cathode and a housing surrounding the polymer electrolyte membrane. The housing may include an anode electrically connected to the cathode. The system for electrochemical generation of hydrogen may include a water purifier in fluid communication with a hydrogen generating unit, an electrolyte source in fluid communication with the hydrogen generation unit and a power source electrically connected to the hydrogen generating unit. The method may include passing water and electrolyte into the hydrogen generation unit and applying a voltage between the anode and the cathode to generate hydrogen gas.Type: ApplicationFiled: March 24, 2011Publication date: September 29, 2011Applicant: RASIRCInventors: Jeffrey J. Spiegelman, Daniel Alvarez, JR.
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Patent number: 8025785Abstract: A cell for the electrowinning of aluminium (50) from alumina dissolved in a molten electrolyte comprises a generally horizontal cell bottom (5), preferably aluminium-wettable, on which a pool of product aluminium (50) is collected from at least one electrically conductive cathodic element (10) having aluminium-wettable cathode surfaces (11). The cathodic element comprises an inclined cathodic wall (10) in the electrolyte (60) above the generally horizontal cell bottom (5). The cathodic wall (10) has an upwardly-oriented inclined face (11) that forms a sloping upper aluminium-wettable drained active cathode surface on which aluminium is produced and drains into the aluminium pool (50), and a downwardly-oriented inclined face (12) which is in contact with the molten electrolyte (60) and which overlies the aluminium pool (50). The aluminium pool (50) covers substantially the entire cell bottom (5) including underneath the cathodic wall (10).Type: GrantFiled: August 29, 2002Date of Patent: September 27, 2011Assignee: Rio Tinto Alcan International LimitedInventor: Vittorio De Nora
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Publication number: 20110226614Abstract: An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.Type: ApplicationFiled: March 18, 2011Publication date: September 22, 2011Inventors: Robert Rash, Richard Abraham, David W. Porter, Steven T. Mayer
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Publication number: 20110226613Abstract: An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.Type: ApplicationFiled: March 16, 2011Publication date: September 22, 2011Inventors: Robert Rash, Richard Abraham, David W. Porter, Steven T. Mayer
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Patent number: 8016983Abstract: This invention relates to a system and method for producing a metal powder product using conventional electrowinning chemistry (i.e., oxygen evolution at an anode) in a flow-through electrowinning cell. The present invention enables the production of high quality metal powders, including copper powder, from metal-containing solutions using conventional electrowinning processes and/or direct electrowinning.Type: GrantFiled: May 18, 2010Date of Patent: September 13, 2011Assignee: Freeport-McMoran CorporationInventors: Antonioni C. Stevens, Stanley R. Gilbert, Scot P. Sandoval, Timothy G. Robinson, John O. Marsden
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Publication number: 20110210009Abstract: A water treatment system is disclosed having electrolytic cell for liberating hydrogen from a base solution. The base solution may be a solution of brine for generating sodium hypochlorite, or potable water to be oxidized. The cell has first and second opposing electrode endplates held apart from each other by a pair of supports such that the supports enclose opposing sides of the endplates to form a cell chamber. One or more inner electrode plates are spaced apart from each other in the cell chamber in between the first and second electrode plates. The supports are configured to electrically isolate the first and second electrode plates and the inner electrode plates from each other. The first and second electrode plates are configured to receive opposite polarity charges that passively charge the inner electrode plates via conduction from the base solution to form a chemical reaction in the base solution as the base solution passes through the cell chamber.Type: ApplicationFiled: February 14, 2011Publication date: September 1, 2011Applicant: PROCESS SOLUTIONS, INC.Inventors: Brent A. Simmons, Gunnar T. Thordarson, James C. Robertson
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Publication number: 20110203917Abstract: A system for producing hydrogen gas fuel used in powering an internal combustion engine of a vehicle comprising a hydrogen reactor which includes at least one set of electrode plates comprising a plurality of neutral, positively charged and negatively charged plates disposed in a predetermined sequence or position relative to one another to define a predetermined stacked array submerged within water maintained in the hydrogen reactor.Type: ApplicationFiled: May 2, 2011Publication date: August 25, 2011Inventors: Yehuda Shmueli, Eitan Shmueli, Doron Shmueli
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Publication number: 20110189302Abstract: There is provided an automated electrochemical device for generating a biocidal output solution, said device comprising: a flow-through electrochemical cell comprising an anodic chamber and a cathodic chamber for electrolysing an electrolyte to generate an anolyte solution and a catholyte solution; characterised in that the device further comprises: (i) a reservoir for storing catholyte; and (ii) a hydraulic circuit for recirculating catholyte from the reservoir to the anolyte on start-up of the cell, wherein input of catholyte of a compensating strength to the cell anodic chamber, is arranged so as to optimise the cell anolyte pH to produce a stable output solution at the start of the electrolysis process.Type: ApplicationFiled: July 29, 2009Publication date: August 4, 2011Applicant: TRUSTWATER LTD.Inventors: David-Lee Van Niekerk, Edmond O'Reilly, Kevin Keane, Eoin Croke, Michael Campion, Brendan Kennedy
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Publication number: 20110147212Abstract: A capacitive deionization device includes; at least one flow path configured to receive influent fluid, at least one pair of electrodes, at least one charge barrier disposed between the at least one flow path and a corresponding electrode of the at least one pair of electrodes, at least one electrolyte solution disposed between at least one of the at least one pair of electrodes and a corresponding charge barrier of the at least one charge barrier, and at least one electrolyte compensation device in fluid communication with the at least one electrolyte solution, wherein the at least one electrolyte solution differs from the influent fluid.Type: ApplicationFiled: August 13, 2010Publication date: June 23, 2011Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Chang-hyun KIM, Hyo-rang KANG, Ho-jung YANG, Hyun-seok KIM
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Patent number: 7959772Abstract: A cell for the electrowinning of aluminum (50) from alumina, comprises an inclined plate-like or grid-like open anode structure (25) which has a generally v-shaped configuration in cross-section. The anode structure (25) has a downwardly-oriented sloping electrochemically active surface that is generally v-shaped in cross-section and spaced above an upwardly-oriented corresponding sloping cathode surface (11) by an anode-cathode gap (40) in which alumina dissolved in a circulating electrolyte (60) is electrolysed. The anode structure (25) has a plurality of anode through-passages (45) distributed thereover for an up-flow of alumina-depleted electrolyte (60) from the anode-cathode gap (40).Type: GrantFiled: August 29, 2002Date of Patent: June 14, 2011Assignee: Riotinto Alcan International LimitedInventor: Vittorio De Nora
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Patent number: 7959790Abstract: An improved method for the electro-coagulation c treatment of water and waste water includes an electrolytic cell having an anode and a helical cathode mounted longitudinally within a duct for receiving the contaminated water or waste water at one end and for discharging the treated water and electro-coagulated precipitates at the other end. The electro-coagulated precipitates can be subsequently separated by conventional flocculation, settlement and filtration systems. The anode forms a central longitudinal sacrificial rod defining a cylindrical outer surface and the helical cathode comprises an elongate wire coiled helically around and along the anode so as form a plurality of turns of the wire which turns are wrapped around the anode surface in the form of a constant helix of constant diameter with the turns spaced each from the next and spaced from the anode surface.Type: GrantFiled: April 11, 2003Date of Patent: June 14, 2011Inventors: David Lorne Woytowich, Daniel Robert Oger, Ronald Bruce Oger, Christopher Paul Marino Davie
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Patent number: 7947158Abstract: The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of the process liquid from below. This can be done by feeding the process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of the flow distributor and a main volume of the tank. Before leaving the tank through an outlet, the process liquid flows through a flow barrier.Type: GrantFiled: September 25, 2009Date of Patent: May 24, 2011Assignee: GlobalFoundries Inc.Inventors: Helge Hartz, Markus Nopper, Axel Preusse
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Publication number: 20110114508Abstract: The present invention relates to an electrolyte and a process for the electrochemical machining of metallic components, wherein the electrolyte comprises a protic solvent.Type: ApplicationFiled: August 4, 2008Publication date: May 19, 2011Applicant: EXTRUDE HONE GMBHInventors: Rene Wodrich, Ulrich Franz Burmester
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Publication number: 20110114509Abstract: A method and system for purifying liquid is disclosed that includes combining powdered metal particles with the fluid to be treated. The mixture of powdered metal particles and liquid to be treated is then passed through an electrolytic cell. The cells forms ions which attach to contaminants in the liquid and are subsequently separated out from the liquid using conventional solid/liquid separation techniques.Type: ApplicationFiled: November 19, 2009Publication date: May 19, 2011Applicant: Water Vision IncorporatedInventor: Bruce E. Norris
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Publication number: 20110094877Abstract: Metal recovery apparatus (20) being a diaphragm-less electrolytic cell arrangement where oxidizing reactions are achieved in a cathode cell (32) in an anode mode and reducing reactions in the anode cell (43) in a cathode mode by changing the direction of current flow. Better performance is achieved by pulsing (27b) the DC power (27b) to the electrodes and in some applications, installing plastic mesh (165) over the surface of the solution electrodes (24, 31) to reduce unwanted side reaction.Type: ApplicationFiled: August 6, 2007Publication date: April 28, 2011Inventor: Rodolfo Antonio M. Gomez
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Patent number: 7931786Abstract: Reactors with agitators and methods for processing microfeature workpieces with such reactors. The agitators are capable of obtaining high, controlled mass-transfer rates that result in high quality surfaces and efficient wet chemical processes. The agitators generate high flow velocities in the fluid and contain the high energy fluid proximate to the surface of the workpiece to form high quality surfaces when cleaning, etching and/or depositing materials to/from a workpiece. The agitators also have short stroke lengths so that the footprints of the reactors are relatively small. As a result, the reactors are efficient and cost effective to operate. The agitators are also designed so that electrical fields in the processing solution can effectively operate at the surface of the workpiece.Type: GrantFiled: November 22, 2006Date of Patent: April 26, 2011Assignee: Semitool, Inc.Inventors: Gregory J. Wilson, Paul R. McHugh, Daniel J. Woodruff
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Publication number: 20110083965Abstract: An electroplating apparatus for filling recessed features on a semiconductor substrate includes an electrolyte concentrator configured for concentrating an electrolyte having Cu2+ ions to form a concentrated electrolyte solution that would have been supersaturated at 20° C. The electrolyte is maintained at a temperature that is higher than 20° C., such as at least at about 40° C. The apparatus further includes a concentrated electrolyte reservoir and a plating cell, where the plating cell is configured for electroplating with concentrated electrolyte at a temperature of at least about 40° C. Electroplating with electrolytes having Cu2+ concentration of at least about 60 g/L at temperatures of at least about 40° C. results in very fast copper deposition rates, and is particularly well-suited for filling large, high aspect ratio features, such as through-silicon vias.Type: ApplicationFiled: October 12, 2009Publication date: April 14, 2011Applicant: NOVELLUS SYSTEMS, INC.Inventors: Jonathan D. Reid, Seshasayee Varadarajan, Steven T. Mayer
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Publication number: 20110056840Abstract: An electrolytic plating equipment includes: a plating tank for holding plating solution; and a separate tank apart from the plating tank, for holding the plating solution circulating between the plating tank and the separate tank. The separate tank contains a first space and a second space located downstream from the first space. The plating solution in the first space in an amount exceeding a specific height flows from the first space into the second space, and the plating solution falls through air in the second space.Type: ApplicationFiled: September 7, 2010Publication date: March 10, 2011Applicant: C. UYEMURA & CO., Ltd.Inventors: Toshihisa Isono, Shinji Tachibana, Naoyuki Omura, Shunsaku Hoshi, Kanako Matsuda, Koji Shimizu
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Patent number: 7897024Abstract: A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode.Type: GrantFiled: March 4, 2008Date of Patent: March 1, 2011Assignee: Ebara CorporationInventors: Mitsutoshi Yahagi, Kenichi Abe, Yuji Araki, Yoshio Minami, Tomoyasu Nagayumi
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Patent number: 7842170Abstract: This invention relates generally to a method and apparatus for electroplating selected portions of a high contact force, high elastic response range pin-receiving and cylindrical electrical contact having a pair of spaced apart cantilever beams which extend forwardly from a base to a pin-receiving end. In accordance with the invention at least one plating cell is provided including a cavity type of enclosure thereof in general matching the outer contour of the lower portion and pin receiving end of the contact whereas plating solution is ejected towards the pin receiving end including at least one conducting device for electric current is provided adjacent to the opposite region of the contact for engaging with thereof whereas electric current is being conducted.Type: GrantFiled: November 2, 2009Date of Patent: November 30, 2010Inventor: Volker von Detten
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Patent number: 7833389Abstract: Durable replication tools are disclosed for replication of relief patterns in desired media, for example in optical recording or data storage media. Methods of making such durable replication tools are disclosed, including recording and developing a relief pattern on a selected surface of a support cylinder, creating a durable layer with a complementary relief replica of the pattern, separating the durable layer from the support cylinder. Apparatus are disclosed for fabricating such replication tools, including systems and apparatus for recording a desired relief pattern on a surface of a support cylinder. Also disclosed are electro deposition cells for forming a durable tool sleeve having a desired relief pattern. The replication tool relief features may have critical dimensions down to the micron and nanometer regime.Type: GrantFiled: August 24, 2006Date of Patent: November 16, 2010Assignee: Microcontinuum, Inc.Inventor: W. Dennis Slafer
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Publication number: 20100273085Abstract: The present invention describes a method and an apparatus for the electrochemical deposition of fine catalyst particles onto carbon fibre-containing substrates which have a compensating layer (“microlayer”). The method comprises the preparation of a precursor suspension containing ionomer, carbon black and metal ions. This suspension is applied to the substrate and then dried. The deposition of the catalyst particles onto the carbon fibre-containing substrate is effected by a pulsed electrochemical method in an aqueous electrolyte. The noble metal-containing catalyst particles produced by the method have particle sizes in the nanometer range. The catalyst-coated substrates are used for the production of electrodes, gas diffusion electrodes and membrane electrode units for electrochemical devices, such as fuel cells (membrane fuel cells, PEMFC, DMFC, etc.), electrolysers or electrochemical sensors.Type: ApplicationFiled: February 15, 2008Publication date: October 28, 2010Applicant: SOLVICORE GMBH & CO. KGInventors: Harald Natter, Vivien Keller, Rolf Hempelmann, Marco Lopez
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Patent number: 7811440Abstract: A plating apparatus performs a plating process while placing a work in a pod disposed in a plating bath storing a plating solution. The pod has a pair of meshes that allow the plating solution to pass but substantially inhibit the work from passing. The plating apparatus is provided with a solution flowing mechanism for flowing the plating solution out of the pod through one of the pair of meshes.Type: GrantFiled: July 28, 2006Date of Patent: October 12, 2010Assignee: TDK CorporationInventors: Kou Onodera, Hiroshi Shindo, Takashi Sakurai
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Patent number: 7799184Abstract: Process for the electrochemical decomposition of precursors in powder form by introducing a powder batch between two electrodes of an electrolysis cell, electrodes being designed to be liquid-permeable, and the electrolyte flowing through the powder batch perpendicularly to the electrode surfaces, and electrolysis cell suitable therefor, which is essentially characterized in that at least one electrode has a structure which consists of a supporting pierced plate (5), an electrode plate (3) provided with perforations, and a filter cloth (4) arranged between the supporting pierced plate (5) and the electrode plate (3), and in that the cathode (6) is shielded from the cell by means of a liquid-permeable separator (7).Type: GrantFiled: November 9, 2006Date of Patent: September 21, 2010Assignee: H.C. Starck GmbHInventors: Armin Olbrich, Juliane Meese-Marktscheffel, Gerhard Gille, Viktor Stoller, Wolfgang Mathy
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Patent number: 7794573Abstract: Systems and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, a system includes (a) a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece, (b) an electrode unit having an electrode and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrode, (c) a barrier between the processing unit and the electrode unit to separate the first and second processing fluids, and (d) a water balance unit for maintaining the concentration of water in the first processing fluid within a desired range.Type: GrantFiled: August 31, 2005Date of Patent: September 14, 2010Assignee: Semitool, Inc.Inventor: John L. Klocke
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Publication number: 20100181188Abstract: An anodizing apparatus includes a first electrode member electrically connected to a processing subject formed with a circumferential groove at an outer circumferential surface thereof, a second electrode member including an inner circumferential surface, facing each of the outer circumferential surface and the circumferential groove of so as to include an interval, elastic seal members for sealing a clearance generated between the outer circumferential surface of and the inner circumferential surface, and a thrusting mechanism thrusting the elastic seal members to the second electrode member, and thereby elastically deforming the elastic seal members so as to seal the clearance. The thrusting mechanism is switchable between a thrusting state and a released state.Type: ApplicationFiled: December 29, 2009Publication date: July 22, 2010Applicant: AISIN SEIKI KABUSHIKI KAISHAInventors: Takeyo Wada, Masaki Kato
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Publication number: 20100163426Abstract: A polishing pad for an electrochemical planarization tool comprises a patterned surface that forms appropriate electrolyte flow channels for directing an electrolyte from the center to the periphery thereof. Consequently, a continuous electrolyte flow may be established, thereby significantly reducing the accumulation of contaminants in the polishing pad, thereby contributing to enhanced process uniformity so that frequent rinsing of the polishing pad and replacement of the electrolyte solution may be avoided.Type: ApplicationFiled: December 23, 2009Publication date: July 1, 2010Inventors: Axel Kiesel, Johannes Groschopf
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Publication number: 20100166634Abstract: Method and equipment for production of high purity silicon (Si) metal from reduction of silicon tetrachloride (SiCl4) by liquid zinc metal. The Zn reduction of SiCl4 and the production of Zn by electrolysis of ZnCl2 take place in a common, combined reactor and electrolysis cell using a molten salt as electrolyte. The reactor and electrolysis cell may preferably be provided in a common housing which is divided into two or more communicating compartments (13, 1, 2) by a first or more partition walls (15, 8, 7). Further, the electrolysis of ZnCl2, performed by means of suitable electrodes, is taking place in at least one compartment (1, 2) and the Zn reduction of SiCl4 takes place in at least one other compartment (13), where Zn metal flows between the chamber/s (1,2) of the ZnCl2 electrolysis to the chamber/s (13) of SiCl4 reduction, and where the electrolyte circulates between the chamber/s of ZnCl2 electrolysis to the chamber/s of SiCl4 reduction.Type: ApplicationFiled: March 17, 2008Publication date: July 1, 2010Inventor: Christian Rosenkilde