With Agitator Patents (Class 204/273)
  • Patent number: 11717796
    Abstract: A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: August 8, 2023
    Assignee: EBARA CORPORATION
    Inventors: Yasuyuki Masuda, Masashi Shimoyama, Jumpei Fujikata, Yohei Wakuda, Shao Hua Chang
  • Patent number: 11173513
    Abstract: The purpose of the present invention is to provide a surface treatment device and a paddle with improved strength and uniform plating thickness by uniformly stirring surface treatment solution near an object to be plated. Also, the purpose of the present invention is to provide a surface treatment method capable of stirring for a long period of time, by uniformizing plating thickness, and by improving a strength of a paddle.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: November 16, 2021
    Assignee: C. Uyemura & Co., Ltd.
    Inventors: Tomoji Okuda, Daisuke Matsuyama, Masayuki Kiso, Daisuke Hashimoto, Akira Okada, Keita Taniguchi
  • Patent number: 10946351
    Abstract: A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: March 16, 2021
    Assignee: EBARA CORPORATION
    Inventors: Yasuyuki Masuda, Masashi Shimoyama, Jumpei Fujikata, Yohei Wakuda, Shao Hua Chang
  • Patent number: 10480094
    Abstract: The disclosure provides a method comprising inducing a first current between a source of a countercharge and a first electrode, the first current being through an electrolyte. In some instances, the first current is not present. A second current, in the form of waveform, is induced across the first electrode, the second current being transverse to the first current, and the second current inducing a relativistic charge across the first electrode. Metal from the electrolyte is deposited on the substrate or corroded from the substrate, among other things. The methods, as well as associated apparatus, improve deposition, bonding, corrosion, and other effects.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: November 19, 2019
    Assignee: Iontra LLC
    Inventors: Daniel A. Konopka, Jason A. Seedig
  • Patent number: 10153479
    Abstract: A fabricating method and a fabricating apparatus for a lithium-ion secondary battery having stable charge characteristics and lifetime characteristics are provided. A positive electrode is subjected to an electrochemical reaction in a large amount of electrolyte solution in advance before a secondary battery is completed. In this manner, the positive electrode can have stability. In a manner similar to that of the positive electrode, a negative electrode is also subjected to the electrochemical reaction in a large amount of the electrolyte solution in advance, whereby a high reliable secondary battery can be manufactured.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: December 11, 2018
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junpei Momo, Yohei Momma
  • Patent number: 10077390
    Abstract: A working fluid in cooperation with a solar thermal system comprises a heat conduction medium and a plurality of metal particles mixed in the heat conduction medium. Each of the metal particles includes a metal particle and a protection layer, and the protection layer is an oxide and covers the metal particle. A manufacturing method of metal particles is also disclosed.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: September 18, 2018
    Assignee: National Tsing Hua University
    Inventors: Yu-Lun Chueh, Ming-Chang Lu, Chih-Chung Lai, Shih-Ming Lin, Yuan-Da Chu
  • Patent number: 9938164
    Abstract: An apparatus for separating hydrocarbons from water, comprising a tank segment with a fluid inlet subsequent a housing with a liquid-gas mixer. The fluid inlet through a cylindrical tank wall, and further through the wall of a conical wall segment, a pipe spread, combining radial and axial flow over ring mounted guide vanes at the upper part of the conical wall segment. A hydro carbon outlet is located at a top end and a water outlet at a bottom end of tank-segment. A pipe for scale and debris removal is connected to the lower part of the bowl. The inner conical wall segment extends to the top end of the tank segment and at this location comprises a ring of vertically mounted guide vanes.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: April 10, 2018
    Assignee: Stauper Offshore AS
    Inventor: Jørn Folkvang
  • Patent number: 9911614
    Abstract: One embodiment of the present invention one embodiment of the present invention is a method for electrofilling a metal or alloy inside at least one opening surrounded by a field on a front surface of a substrate, wherein at least one surface inside the at least one opening includes an exposed metallic surface, said method including steps of: (a) immersing the substrate in an activation or wetting solution; (b) applying ultrasonic or megasonic vibrations to the substrate; and, after commencing applying ultrasonic or megasonic vibrations to the substrate, (c) applying high pressure jets of an electrolyte to the substrate, said electrolyte includes metallic ions of said metal or alloy; and (d) applying an electroplating current to the substrate to electroplate said metal or alloy inside the at least one opening.
    Type: Grant
    Filed: June 12, 2010
    Date of Patent: March 6, 2018
    Inventor: Uri Cohen
  • Patent number: 9738980
    Abstract: Metal objects are treated by anodizing (P, SE) the metal object in contact with an acidic solution, and then subjecting the anodized metal object to a reversed voltage (VR). The anodizing is performed in two stages, firstly to passivate (P) with the formation of a surface layer, and secondly to form pits in this surface layer (SE). The second stage (SE) of anodizing is performed at a lower voltage than the first stage (P). After the reversed voltage step (VR) the metal object is then contacted with a biocidal metal-containing solution. Biocidal metal is absorbed into the surface of the metal object, resulting in improved biocidal properties. The lower voltage of the second stage anodizing (SE) results in reduced processing time.
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: August 22, 2017
    Assignee: Accentus Medical Limited
    Inventors: James Timothy Shawcross, David Richard Lewis, Andrew Derek Turner
  • Patent number: 9730337
    Abstract: The invention eliminates defects generated in a metal filling a through hole of a printed board by changing an angle at which a plating solution is sprayed or by changing a posture of the printed board at a time point in a process of precipitating the metal from the plating solution and filling the through hole with the precipitated metal while the plating solution or air bubbles are being sprayed onto the printed board.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: August 8, 2017
    Assignee: C. UYEMURA & CO., LTD.
    Inventors: Toshihisa Isono, Shinji Tachibana, Naoyuki Omura, Kanako Matsuda
  • Patent number: 9551083
    Abstract: A paddle for a plating system has a housing with a back portion, a front portion, a first side portion, a second side portion, a first end portion, and a second end portion. A first fin is disposed laterally along a first external surface of the first side portion and offset and coupled to the first external surface to define a first passageway between the first external surface of the first side portion and a first internal surface of the first fin for flow of the electrolyte through the first passageway. A second fin is disposed laterally along a second external surface of the second side portion and offset and coupled to the second external surface to define a second passageway between the second external surface of the second side portion and a second internal surface of the second fin for flow of the electrolyte through the second passageway.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: January 24, 2017
    Assignee: Invensas Corporation
    Inventor: Cyprian Emeka Uzoh
  • Patent number: 9530653
    Abstract: One embodiment is a method for producing void-free electroplated metallic conductors inside openings by electrochemical deposition (ECD), said method including steps of: forming at least one opening in a substrate, said at least one opening having an aspect ratio in a range from 8:1 to 28:1; forming at least one barrier layer over the sidewalls of the at least one opening; depositing at least one seed layer over the at least one barrier layer; immersing the substrate in an electrolyte contained in an ECD cell, the ECD cell including at least one anode and a cathode, wherein the electrolyte includes plating metallic ions and at least one inhibitor additive; providing agitation of the electrolyte across the surface of the substrate by moving multiple non-contacting wiping blades relative to the substrate, wherein the agitation facilitates a limiting current density larger by at least an order of magnitude than a limiting current density without the agitation; and applying an average electroplating current densi
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: December 27, 2016
    Inventor: Uri Cohen
  • Patent number: 9421505
    Abstract: A device for creating turbulent flow in a fluid including a tank having an inlet, an outlet, and an interior; at least one jet in an inflow assembly in the interior of the tank, the jet being in fluid communication with the inlet, the jet circulating fluid in the tank; a plurality of holes in an outflow assembly in the interior of the tank, the plurality of holes being in fluid communication with the outlet; and a deflector positioned to circulate the bulk of the fluid away from the plurality of holes. Methods of using the device are also provided.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: August 23, 2016
    Assignee: Creative Water Solutions, LLC
    Inventors: Benjamin Joseph Schaffer, Thomas Raymond Schaffer, Richard Thomas Schaffer, David R. Knighton, Vance D. Fiegel
  • Patent number: 9273409
    Abstract: One embodiment is a method for producing void-free electroplated metallic conductors, the method including steps of: (a) providing a substrate having an insulating mask formed over a metallic seed layer, said insulating mask having at least one opening formed therein, wherein inside the at least one opening only the bottom surface includes exposed metallic seed layer; (b) immersing the substrate in an electrolyte contained in an electrochemical deposition (ECD) cell, the ECD cell including at least one anode and a cathode, wherein the cathode includes at least the exposed metallic seed layer at the bottom of the at least one opening, and wherein the electrolyte includes plating metallic ions and at least one inhibitor additive, said metallic ions and said at least one inhibitor additive having concentrations; (c) providing agitation of the electrolyte across the surface of the substrate; (d) electroplating inside the at least one opening wherein (i) the agitation and the concentrations of the plating metallic
    Type: Grant
    Filed: May 6, 2015
    Date of Patent: March 1, 2016
    Inventor: Uri Cohen
  • Publication number: 20150147593
    Abstract: An electrode for use in bio-electrochemical systems is described, including: a substantially planar electrode material; a frame comprising a non-conductive substance; and one or more first conductive substances linked or secured to the frame. Bio-electrochemical systems, racks for inserting the electrode, and methods of using the racks are also described.
    Type: Application
    Filed: November 24, 2014
    Publication date: May 28, 2015
    Inventors: Matthew SILVER, Justin BUCK, Casey CHARTIER, Mark BAROSKY, James Ryan HAWKINS, Zhen HUANG, Quynh Anh Le TRAN, Tzipora WAGNER
  • Patent number: 9017530
    Abstract: An apparatus and method for synthesis and treatment of electrocatalyst particles in batch or continuous fashion is provided. In one embodiment, the apparatus comprises a sonication bath and a two-compartment chamber submerged in the sonication bath. The upper and lower compartments are separated by a microporous material surface. The upper compartment comprises a cover and a working electrode (WE) connected to a Pt foil contact, with the foil contact connected to the microporous material. The upper chamber further comprises reference counter electrodes. The lower compartment comprises an electrochemical cell containing a solution of metal ions. In one embodiment, the method for synthesis of electrocatalysts comprises introducing a plurality of particles into the apparatus and applying sonication and an electrical potential to the microporous material connected to the WE.
    Type: Grant
    Filed: March 22, 2012
    Date of Patent: April 28, 2015
    Assignee: Brookhaven Science Associates, LLC
    Inventors: Radoslav Adzic, Junliang Zhang, Kotaro Sasaki
  • Publication number: 20150053570
    Abstract: A method for producing amino acids includes collecting feather waste into a container, with the feather waste having a pH value between 8 to 9.5; mixing from 5 weight percent to 8 weight percent of an alkaline solution having a pH value between 10 to 12 with from 30 weight percent to 40 weight percent of the feather waste and from 52 weight percent to 65 weight percent of water at room temperature for 12 to 48 hours to produce a preproduct; electrolyzing the preproduct to produce a product mixture; adding from 3 weight percent to 5 weight percent of an acid solution having a pH value between 3 to 6 into from 95 weight percent to 97 weight percent of first mixture to produce a second product via neutralization reaction.
    Type: Application
    Filed: March 30, 2014
    Publication date: February 26, 2015
    Inventor: Ting-Yu Chang
  • Patent number: 8920616
    Abstract: An electroplating method is disclosed that selectively deposits a greater thickness of a metal or alloy layer on a region of wafer that has a higher thickness loss during a subsequent chemical mechanical polish process. A paddle assembly has three rectangular sides joined at their edges to form a triangle shape from an end view, and a notch in a bottom side that faces a wafer during the plating process. The notch extends along second and third paddle sides to a height up to about 50% of the paddle thickness. The thickness in a K-block region that has two sides formed parallel to the wafer flat is selectively increased by aligning a first side of the paddle notch side directly over one K-block side and aligning a second notch side directly over a second K-block side during a paddle movement cycle. The notch may be rectangular shaped or tapered.
    Type: Grant
    Filed: June 18, 2012
    Date of Patent: December 30, 2014
    Assignee: Headway Technologies, Inc.
    Inventors: Chao-Peng Chen, Jaswant Chudasama, Pradeep Mishra, Chen-Li Lin, David Wagner
  • Patent number: 8877032
    Abstract: The disclosure teaches an apparatus for circulating electrically conductive solutions between electro-chemical cells. The apparatus is able to decrease the size or surface area of the cells and operate the electro-chemical at reduced amperage. Movement of the solution over the plates also facilitates reduced build up of scale on the plates. The flow rate or treatment dwell time can be controlled.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: November 4, 2014
    Inventor: Dan Prokop
  • Publication number: 20140262803
    Abstract: An electroplating apparatus includes an anode configured to electrically communicate with an electrical voltage and an electrolyte solution. A cathode module includes a cathode that is configured to electrically communicate with a ground potential and the electrolyte solution. The cathode module further includes a wafer in electrical communication with the cathode. The wafer is configured to receive metal ions from the anode in response to current flowing through the anode via electrodeposition. The electroplating apparatus further includes at least one agitating device interposed between the wafer and the anode. The agitating device is configured to apply a force to gas bubbles adhering to a surface of the wafer facing the agitating device.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Shafaat Ahmed, Michael P. Chudzik, Lubomyr T. Romankiw
  • Publication number: 20140251797
    Abstract: An etching device for the electrolytic etching of copper on an etching material, includes a first mixing device, which is designed to receive an acid electrolyte containing copper ions, and an oxygen gas or ozone gas in order to form a first liquid-gas mixture which can be channeled from a first outlet of the first mixing device into a connecting line coupled thereto; a container, which contains a container liquid, a second mixing device, which is arranged in the container and is surrounded by the container liquid, wherein the second mixing device includes a suction opening in order to suction in the container liquid present in the region of the suction opening, wherein the second mixing device is connected to the connecting line and is designed to channel the first liquid-gas mixture and the suctioned container liquid into a constricted zone of the second mixing device so that the suctioned container liquid mixes with the first liquid-gas mixture and is thus able to form a second liquid-gas mixture, wherein
    Type: Application
    Filed: October 8, 2011
    Publication date: September 11, 2014
    Inventor: Christoph Herkle
  • Patent number: 8795535
    Abstract: An apparatus is disclosed for separating minerals in drilling fluid based primarily on density. The separator creates and maintains a slurry with a controllable density for separating minerals from drill cuttings. The density is controlled through the use of an electrode array. The separator comprises a housing have a fluid inlet for the fluid mixture, at least one rotating disk having an electrode array positioned inside the housing to suspend a first material of the fluid mixture, and a mechanism configured to rotate the disk. A second and third material is separated from the fluid via use of the suspended first material.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: August 5, 2014
    Assignee: National Oilwell Varco, L.P.
    Inventor: Thomas R. Larson
  • Patent number: 8795480
    Abstract: Described are apparatus and methods for electroplating one or more metals onto a substrate. Embodiments include electroplating apparatus configured for, and methods including, efficient mass transfer during plating so that highly uniform plating layers are obtained. In specific embodiments, the mass transfer is achieved using a combination of impinging flow and shear flow at the wafer surface.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: August 5, 2014
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, David W. Porter
  • Publication number: 20140209471
    Abstract: A method and apparatus for electrochemically forming an oxide layer on a flat conductive surface which involves positioning a working electrode bearing the flat conductive surface in opposed parallel spaced apart relation to a flat conductive surface of a counter electrode such that the flat conductive surface of the working electrode and the flat conductive surface of the counter electrode are generally opposed, horizontally oriented, and define a space therebetween.
    Type: Application
    Filed: September 8, 2011
    Publication date: July 31, 2014
    Applicant: CLEAR METALS, INC.
    Inventors: Leonid Borisovich Rubin, Alexander Sergeyevich Osipov, Elena Borisovna Neburchilova
  • Patent number: 8758577
    Abstract: A system for electroplating a rotogravure cylinder out of a plating solution having a concentration of copper ions wherein the cylinder is connectable to a current source is provided. The system includes a plating apparatus configured to copper plate the cylinder comprising a non-dissolvable anode, a plating tank configured to receive the cylinder, a controller configured to control operation of the apparatus, and a tube for delivering a mixture of a hardener and the plating solution to the plating tank.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: June 24, 2014
    Assignee: Chema Technology, Inc.
    Inventor: Hubert F. Metzger
  • Publication number: 20140158528
    Abstract: An installation (20) for continuously electroplating a plurality of elongated metal elements (21, 21?, 21?) with another metal comprises a bath (22) of an electrolyte wherein the elongated metal elements (21, 21?, 21?) are travelling. The bath (22) comprises a collector space (24) positioned under the elongated metal elements (21, 21?, 21?) and the bath further comprises a distribution plate (26) between the collector space (24) and the elongated metal elements (21, 21?, 21?). The installation (20) further comprises a pump (25) for circulating the electrolyte in the bath (22) from the collector space (24) through the distribution plate (26). The collector space (24) causes first flow losses to the flow of the electrolyte. The distribution plate (26) has a multiplicity of openings for allowing the flow of the electrolyte and these openings cause second flow losses to the flow of the electrolyte. Each of the second flow losses is at least five times greater than the first flow losses.
    Type: Application
    Filed: May 3, 2012
    Publication date: June 12, 2014
    Inventors: David Mertens, Dominiek Seynaeve
  • Patent number: 8721869
    Abstract: The present invention provides a high volume, foul-resistant electrolytic process for treating contaminated water comprising at least one upflow electroflocculation cell consisting of (i) a lower (or “bottom”) electrode (3) in form of a porous, non-fluidized bed of loose iron or aluminium granules kept in periodic motion by pulsed gas injections and (ii) an upper (or “top”) vibrating electrode (4) made of an iron or aluminium grid mesh or ribmesh. A voltage potential between the upper (4) and lower (3) electrode causes ions to be released from the moving electrodes. These ions oxydise and/or render insoluble contaminants in the ascending flow of wastewater and create easy filterable insoluble contaminants resulting in substantially cleansed water. Such moving electrodes electroflocculation cells are useful at municipal water works and commercial and industrial applications were large amounts of raw water have to be processed.
    Type: Grant
    Filed: June 6, 2006
    Date of Patent: May 13, 2014
    Inventor: Holger Blum
  • Publication number: 20140083845
    Abstract: Provided is a water treatment apparatus using an apparatus for generating fine bubbles having a positive charge. The water treatment apparatus comprises: an apparatus for generating fine bubbles having a positive charge; a treatment bath into which the fine bubbles generated in the apparatus for generating fine bubbles are supplied and in which raw water is stored; and an ultrasonic oscillator for generating ultrasonic waves having a predetermined intensity when power is applied to explode the fine bubbles floating up to a water level after the fine bubbles are supplied into said treatment bath. Thus, germs attached to the fine bubbles may be sterilized by an exploding force generated when the fine bubbles are exploded.
    Type: Application
    Filed: February 1, 2012
    Publication date: March 27, 2014
    Applicant: SNU R&DB Foundation
    Inventors: Moo Young Han, Tschung Kim, III
  • Publication number: 20140076732
    Abstract: The present invention provides a device for single-sided electrolytic treatment of a flat substrate. The device comprises a bath for electrolytic fluid and conveying means for conveying the flat substrate in a conveying direction at the free surface of the fluid in the bath, with the flat substrate being horizontally oriented such that the underside of the flat substrate makes contact with the free surface of the fluid in the bath. The conveying means comprise two conveying elements disposed opposite each other, which extend along two respective conveying paths, which conveying paths each comprise an electrolytic part, which electrolytic parts extend on two opposite longitudinal sides of the bath.
    Type: Application
    Filed: October 6, 2011
    Publication date: March 20, 2014
    Applicant: MECO EQUIPMENT ENGINEERS B.V.
    Inventor: Peter Jacobus Gerardus Loermans
  • Publication number: 20130334036
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Application
    Filed: August 15, 2013
    Publication date: December 19, 2013
    Applicant: TEL NEXX, INC.
    Inventors: Arthur KEIGLER, John HARRELL, Zhenqiu LIU, Qunwei WU
  • Patent number: 8591707
    Abstract: A hydrogen generating device comprising an anode, a cathode, a housing having an internal cavity and a perforated wall within the cavity electrically connected to the anode or the cathode and separating an end portion of the cavity from a main portion of the cavity. The device includes water in the housing extending continuously from the main portion of the cavity through the perforated wall and into the end portion of the cavity. The housing includes two ends and a perforated wall within the cavity near each end separating end portions of the cavity from a main portion of the cavity, the anode or the cathode extending through one end of the housing through one perforated wall into the main portion of the cavity, through the other perforated wall into the other end portion of the cavity and through the other end of the housing.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: November 26, 2013
    Assignee: Hydroripp, LLC
    Inventor: Scott Gotheil-Yelle
  • Publication number: 20130299361
    Abstract: Disclosed is a system and method for treatment of wastewater to destroy organic contaminants using an electrochemical advanced oxidation process. In particular, the method comprises a multistep process, comprising a) generating a concentrated oxidant solution comprising a peroxy oxidant species, such as persulfate or hydrogen peroxide; b) mixing wastewater comprising organic contaminants with the concentrated oxidant solution to provide a mixture comprising wastewater and diluted oxidant, the wastewater and concentrated oxidant solution being mixed in a prescribed ratio to provide a desired concentration ratio of oxidant species to contaminants; and c) in an electrochemical cell comprising a diamond anode, electrolyzing the mixture of wastewater and diluted oxidant, comprising electrochemically activating the peroxy oxidant species for oxidation and destruction of the contaminants.
    Type: Application
    Filed: May 8, 2013
    Publication date: November 14, 2013
    Inventors: Ian Wylie, John A. Carlisle, Prabhu Arumugam
  • Patent number: 8551305
    Abstract: A method and apparatus for treating water or wastewater for drinking and/or industrial use. The method and apparatus comprises of a plurality of vertically positioned electrodes, which are placed in a treating chamber and wherein the electrodes are interconnected to one another. The positive and negative electrodes are insulated there-between. The polarity of the direct current supply is changeable at regular intervals in order to prevent passivation of the electrodes when reaching an even abrasion. The current can preferably be pulsatory. In order to be able to keep the current density between the electrodes at a desired value, the most efficient possible electrolysis is achieved by means of a minimum total current and wherein the spacing between the electrodes are adjustable.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: October 8, 2013
    Assignees: Singapore Technologies Dynamics PTE Ltd, Innovum Innovative Umwelttechnik
    Inventor: Bernd Leopold Behr
  • Publication number: 20130248377
    Abstract: The present invention relates to an apparatus for preparing electrolyzed sterilizing water. More specifically, the present invention relates to an apparatus for preparing electrolyzed sterilizing water, wherein a rotator is provided inside a mixing portion, thereby uniformly mixing and dispersing an electrolysis product and feed water.
    Type: Application
    Filed: May 16, 2011
    Publication date: September 26, 2013
    Applicant: SION TECH CO., LTD.
    Inventors: Kyung Seok Kang, Ho Il Lee, Hyun Jong Park
  • Publication number: 20130233724
    Abstract: A system for electrolytic deburring of metal workpieces includes a power supply case, an electrolyte chamber, an anode, a cathode and a nozzle. The power supply case includes an anode connector and a cathode connector. Electrolyte is received in the electrolyte chamber. The anode holds at least one of workpiece and is immersed in the electrolyte, and electrically connected to the anode connector. The cathode is positioned in the electrolyte chamber and electrically connected to the cathode connector , and at least a part of the cathode is immersed in the electrolyte. The nozzle is positioned in the electrolyte chamber and sprays the electrolyte under pressure to form a vortex and turbulence for deburring metal. The disclosure also supplies a method of electrolytic deburring of metal.
    Type: Application
    Filed: December 17, 2012
    Publication date: September 12, 2013
    Applicants: Hon Hai Precision Industry Co., Ltd., Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd
    Inventors: HSING-JEN HSU, HAO-CHUNG LEE, YAO-GANG ZHANG, WEN-LI WANG, TIAN-FENG HUANG
  • Publication number: 20130220818
    Abstract: One embodiment is for the close agitation of electroplating solution substantially near an electrode in an electroplating cell. The agitation occurs within the Nernst diffusion layer allowing for ion replenishment of the electroplating solution at the working electrode face. The system operates by producing a flat agitation face (180) and a working electrode (350) face that are brought to within 10 microns of one another during the plating process whilst the agitator 380 is being actuated. In one embodiment, the working electrode is rigid such as a semiconductor wafer. In another embodiment, the working electrode is a flexible material (600) such as fabric or flexible electronics. Other embodiments are described and shown.
    Type: Application
    Filed: August 13, 2012
    Publication date: August 29, 2013
    Inventors: Trevor Graham Niblock, Michael Glickman
  • Patent number: 8512543
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: August 20, 2013
    Assignee: Tel Nexx, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Patent number: 8486234
    Abstract: A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.
    Type: Grant
    Filed: April 10, 2012
    Date of Patent: July 16, 2013
    Assignee: Ebara Corporation
    Inventors: Nobutoshi Saito, Jumpei Fujikata, Tadaaki Yamamoto, Kenji Kamimura
  • Publication number: 20130153405
    Abstract: Apparatus and methods are provided for generating hydrogen gas from water and, in particular, apparatus and methods for dissociating hydrogen and oxygen atoms from water molecules using a rotating magnetic field.
    Type: Application
    Filed: June 14, 2012
    Publication date: June 20, 2013
    Applicant: Hydro-Magnetics, Inc.
    Inventor: Salvatore Benenati
  • Patent number: 8398829
    Abstract: A system for electrocoagulation fluid treatment having a tubular member with a plurality of electrocoagulation assemblies disposed therein. The assemblies having a first and second conductive plate that are angularly oriented in relation to one another. A non-conductive block is positioned between the plates to stabilize and orient them within the tubular member. The conductive plates may be provided with alternating negative and positive charges to combat corrosion.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: March 19, 2013
    Assignee: Water Rescue Services Holdings LLC
    Inventors: Bryon Tarbet, Wes W. Williams
  • Publication number: 20130052823
    Abstract: A system is provided that includes a power supply connectable to a semiconductor wafer including opposing, major front and back surfaces joined by a circumferential side, with the wafer undergoing processing including electroplating a damascene layer on the wafer. The system also includes an arrangement configured to apply a polymer coating to the side of the wafer before electroplating the damascene layer, with the system being configured to apply the polymer coating in accordance with an electrophoresis technique driven by the power supply. In this regard, the polymer coating is applied to the side but not at least a portion of the front and back surfaces of the wafer, and the polymer coating provides a barrier to formation of the damascene layer on the side of the wafer.
    Type: Application
    Filed: August 31, 2011
    Publication date: February 28, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Meng Tsung Ko, Yung Tai Hung, Chin Ta Su
  • Publication number: 20130020205
    Abstract: Disclosed is an apparatus and method for forming an oxidation layer on a manifold block for a fuel cell stack, which forms an oxidation layer uniformly over the entire surface of a long and complicated internal flow field of a manifold block. In particular, the apparatus for forming an oxidation layer on a manifold block for a fuel cell stack includes: an electrolyte bath which contains an electrolyte required for the formation of the oxidation layer, an electrode for supplying a required electron flow for the formation of the oxidation layer from a power supply to the manifold block immersed in the electrolyte of the electrolyte bath and to the electrolyte, and an air supply for supplying oxygen to the electrolyte. Even more particularly, the electrode connected to the electrolyte is inserted into each internal flow field of the manifold block to provide an effective electron flow therein.
    Type: Application
    Filed: November 22, 2011
    Publication date: January 24, 2013
    Applicants: HYUNDAI MOTOR COMPANY, WOOSHIN INDUSTRIAL CO., LTD., KIA MOTORS CORPORATION
    Inventors: Duck Whan Kim, Young Bum Kum, Sae Hoon Kim, Jung Han Yu, Chang Jun Lee, Young Hwan Ko
  • Patent number: 8354010
    Abstract: The electrolytic cell of the preferred embodiment includes an electrode pair and a cavitating jet. The electrode pair includes a cathode electrode and an anode electrode and defines an electrical path between the cathode electrode and the anode electrode. The cavitating jet, which is located along the electrical path between the cathode electrode and the anode electrode, functions to cavitate a fluid, such as water. The electrode pair and the cavitating jet cooperate to initiate a plasma state in the water. The water in the plasma state acts a virtual electrode with a higher current density than the cathode electrode and/or anode electrode. The plasma virtual electrode, through thermolysis and/or electrolysis, produces hydrogen.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: January 15, 2013
    Inventor: Benjamin Pless
  • Publication number: 20130008800
    Abstract: Methods and systems for capture of carbon dioxide and electrochemical conversion of the captured carbon dioxide to organic products are disclosed. A method may include, but is not limited to, steps (A) to (C). Step (A) may introduce a solvent to a first compartment of an electrochemical cell. Step (B) may capture carbon dioxide with at least one of guanidine, a guanidine derivative, pyrimidine, or a pyrimidine derivative to form a carbamic zwitterion. Step (C) may apply an electrical potential between an anode and a cathode sufficient for the cathode to reduce the carbamic zwitterion to a product mixture.
    Type: Application
    Filed: July 5, 2012
    Publication date: January 10, 2013
    Applicant: LIQUID LIGHT, INC.
    Inventors: Prasad Lakkaraju, Kyle Teamey
  • Publication number: 20130001091
    Abstract: Provided is an electroplating apparatus including: a water tank that is filled with a non-polar solvent having a higher specific gravity than an electrolyte in which an electrolyte layer is formed on top of the non-polar solvent; a copper electrode that is installed at a portion where the electrolyte layer of the water tank is positioned; an insulating substrate that is disposed to be inserted into and withdrawn from the water tank and on which seed electrodes are formed; an actuator that escalates the insulating substrate up and down; and a power supply that applies electric current between the copper electrode and each of the seed electrodes, to thereby uniformly form thickness of a metal thin film on a large substrate and guarantee grain size.
    Type: Application
    Filed: July 14, 2011
    Publication date: January 3, 2013
    Inventors: Seung Ki JOO, Seung Jae YUN
  • Publication number: 20120305193
    Abstract: A system for fluid processing one or more substrate surfaces arrayed in a fluid. The system has a process module with a frame and a plurality of agitation members to fluid process the substrate surfaces without contacting the substrate surfaces. A substrate holder assembly has a holder frame and a number of substrate holders, each of which is coupled to the holder frame and configured to hold a substrate so that a different substrate is held by each substrate holder of the substrate holder assembly for transport therewith as a unit to and from the process module. The substrate holder assembly and each substrate holder of the substrate holder assembly are removably coupled to the process module frame and, when coupled to the process module frame, each substrate holder is independently moveable and positionable relative to the other substrate holders of the substrate holder assembly.
    Type: Application
    Filed: June 4, 2012
    Publication date: December 6, 2012
    Inventors: Arthur Keigler, Freeman Fisher, Daniel L. Goodman
  • Publication number: 20120305404
    Abstract: An apparatus for fluid processing at least one workpiece is provided. The apparatus includes a housing configured to hold a fluid, a workpiece holder disposed within the housing and configured to retain the at least one workpiece and an electric field shield plate disposed within the housing adjacent each of the at least one workpiece, the electric field shield plate having at least one contoured area configured to vary a distance between the electric field shield plate and a surface of the workpiece in a space between the at least one contoured area and a corresponding portion of the surface of the workpiece.
    Type: Application
    Filed: April 11, 2012
    Publication date: December 6, 2012
    Inventor: Arthur Keigler
  • Patent number: 8323462
    Abstract: A device for adjustment of the pH of a target liquid includes a working electrode (10), an electrolyte chamber (16) which holds an electrolyte (14), a counter electrode (12) in electrical contact with the electrolyte, a junction (18) which spaces the electrolyte from a target liquid (20) when the working electrode is in contact therewith, and a source of current (22), for supplying current to the working electrode for electrolysis of water at the working electrode, whereby the pH of the target solution is adjusted.
    Type: Grant
    Filed: June 27, 2005
    Date of Patent: December 4, 2012
    Assignee: Case Western Reserve University
    Inventors: Miklos Gratzl, Gautam Nithyanand Shetty
  • Publication number: 20120245019
    Abstract: An apparatus and method for the synthesis and treatment of electrocatalyst particles in batch or continuous fashion is provided. In one embodiment, the apparatus is comprised of a three-electrode cell which includes a cell body electrode, a reference electrode, and a counter electrode. A slurry containing non-noble metal ions and a plurality of particles is introduced into the apparatus. During operation an electrical potential is applied and the slurry is stirred. When particles in the slurry collide with the electrically conductive region of the cell body electrode the transferred charge facilitates deposition of an adlayer of the desired metal. In this manner film growth can commence on a large number of particles simultaneously. After the non-noble metal ions are deposited onto the particles, they are displaced by noble-metal ions by galvanic displacement. This process is especially suitable for forming catalytically active layers on nanoparticles for use in energy conversion devices.
    Type: Application
    Filed: March 22, 2012
    Publication date: September 27, 2012
    Applicant: Brookhaven Science Associates, LLC
    Inventors: Radoslav Adzic, Junliang Zhang, Kotaro Sasaki
  • Patent number: RE45687
    Abstract: A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: September 29, 2015
    Assignee: EBARA CORPORATION
    Inventors: Nobutoshi Saito, Jumpei Fujikata, Tadaaki Yamamoto, Kenji Kamimura