Abstract: A system and apparatus for enhancing convection in electrolytes for improved electrodeposition of copper and other non ferrous metals in industrial electrolytic cells at given a current density providing exact geometric locations of the electrolyte jet infeed supply system used to impart forced convection in the electrolyte, the gas bubbling system for low pressure/low volume convection enhancement, and the electrode bottom and lateral distancing system, and range of operational parameters, for correct electrolyte flow and air bubbling flow improving cell productivity, quality of metal plates with increased electrical efficiency for its industrial application. The system and apparatus can also be used in industrial cells with same optimal results but at increased current densities, provided sufficient suitable electrolyte and additional electric power is available.

Abstract: An insulated vibration-stirring apparatus comprising: a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration lined with the vibration generating means, and vibrating vanes installed on this vibrating rod. An electrical insulation area made from hard rubber is installed on a section nearer to the installation section to the installation piece than the section where the vibrating vanes are mounted on the vibrating rod. An electrical line is connected to the lower section of the vibrating rod on the electrical insulation area side where the vibrating vanes are installed. This electrical line conducts power to the vibrating vanes by way of the lower section of the vibrating rod.

Abstract: A cooking appliance comprising an electrolyzer which produces a combustible fuel, a burner downstream from the electrolyzer, and, an electrically heatable cooking surface on which food is receivable for cooking, the electrically heatable cooking surface being operable simultaneously with the electrolyzer.

Abstract: A process and apparatus are provided for producing hydrogen from a hydrocarbon fuel by combining the fuel with a gas comprising both oxygen and steam, and passing the resulting mixture through a plasma generated by a microwave plasma generator between opposed electrodes. At least one of the electrodes defines a duct for outflow of gaseous material from the vicinity of the plasma, and the gas mixture emerging from the outflow duct contains hydrogen. The fuel undergoes partial oxidation and steam reforming, the reactions being initiated by the plasma rather than by a catalyst.

Abstract: Silver ions and the like are efficiently eluted in the water by the action of electrolysis occurring between the silver ion eluting bodies 51a and the like stirred by the stream in each chamber of the electrolytic cell 32a and turned into positive poles in a chamber and the same turned into negative poles in another chamber and the action of contact between the silver ion eluting bodies 51a and the like with the stream of water. And the stirred silver ion eluting bodies 51a and the like remove attachments on their surface by their mutual frictional movements and prevent any decline in the elution effect of silver ions and the like.

Abstract: An apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.

Abstract: A method can form a conductive structure, which is useful for three-dimensional packaging with via plugs, in a shorter time by shortening the conventional long plating time that is an impediment to the practical use of electroplating. The method includes forming a conductive film on an entire surface, including interior surfaces of via holes, of a substrate having the via holes formed in the surface; forming a resist pattern at a predetermined position on the conductive film; carrying out first electroplating under first plating conditions, using the conductive film as a feeding layer, thereby filling a first plated film into the via holes; and carrying out second electroplating under second plating conditions, using the conductive film and the first plated film as a feeding layer, thereby allowing a second plated film to grow on the conductive film and the first plated film, both exposed in the resist openings of the resist pattern.

Abstract: A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.

Abstract: An electroplating cell employable with an electroplating tool and method of operating the same. In one embodiment, the electroplating cell includes a cover configured to substantially seal the electroplating cell to an outside atmosphere during an electroplating process, and a porous tube couplable to an inert gas source configured to bubble an inert gas through an electrolyte containable therein. The electroplating cell also includes an anode, encased in an envelope of a semipermeable membrane, formed with an alloy of electroplating material, and a magnet configured to orient an axis of magnetization of the electroplating material for application to a wafer couplable thereto during an electroplating process.

Abstract: A hydrogen-oxygen gas generator comprising an electrolytic cell, an electrode group formed from an anode and a cathode mutually installed in that electrolytic cell, a power supply for applying a voltage across the anode and cathode, a gas trapping means for collecting the hydrogen-oxygen gas generated by electrolyzing the electrolyte fluid and a vibration-stirring means. The gas trapping means is comprised of a lid member installed on the electrolytic cell, a hydrogen-gas extraction tube connecting to the hydrogen-oxygen gas extraction outlet of that lid member. A vibration-stirring means for stirring and agitating the electrolytic fluid is supported by support tables. The distance between the adjacent positive electrode and negative electrode within the electrode group is set within a range of 1 to 20 millimeters.

Abstract: The invention concerns a surface treatment electrode (11) to treat at least one object (1). It comprises at least one cavity (23) enclosing the object (1) to be treated during the treatment, having a geometry ensuring free movement of the object (1), this cavity (23) being delimited by a wall (24) comprising at least one opening (25) communicating the inside of the cavity (23) with a treatment solution (5) in which the electrode (11) is immersed during the surface treatment. The cavity (23) is substantially cylindrical and its diameter is approximately 50 to 100 micrometers larger than a maximum size of the object (1).

Abstract: A chlorine generator includes a main water channel for connecting to a pool and a subsidiary water channel connected between two points on the main water channel. A feed valve, a brine tank, a pump and an electrolytic tank are located on the subsidiary water channel. Salt is added into the brine tank and dissolved in water drawn in from the main water channel, and the high concentration saline solution is pumped from the brine tank into the electrolytic tank where chlorine is generated from the saline. The chlorinated solution from the electrolytic tank is then mixed with the water in the main water channel. A stirring device is provided at the bottom of the brine tank to stir the water therein to facilitate the generation of high concentration saline solution. Salt is electrolyzed without being dissolved into the swimming pool directly, thereby reducing harmful effects to swimmers.

Abstract: A hydrogen-oxygen gas generator comprising an electrolytic cell, an electrode group formed from an anode and a cathode mutually installed in that electrolytic cell, a power supply for applying a voltage across the anode and cathode, a gas trapping means for collecting the hydrogen-oxygen gas generated by electrolyzing the electrolyte fluid and a vibration-stirring means. The gas trapping means is comprised of a lid member installed on the electrolytic cell, a hydrogen-gas extraction tube connecting to the hydrogen-oxygen gas extraction outlet of that lid member. A vibration-stirring means for stirring and agitating the electrolytic fluid is supported by support tables. The distance between the adjacent positive electrode and negative electrode within the electrode group is set within a range of 1 to 20 millimeters.

Abstract: In a reverse pulse plating of a substrate (110), the electrolytic solution is agitated with a greater power on forward pulses (210) than on reverse pulses (220). An ultrasound agitation source (170) can be positioned at the bottom of the substrate (110) if the anode (134) is at the top. The ultrasound source may contact the substrate's bottom. Other features are also provided.

Abstract: An electrowinning cell, having a tank with an opened upper end defined by a tank edge, electrolyte within the tank and a plurality of flat, metallic electrode plates disposed within the tank in side-by-side, spaced-apart, parallel relationship. Adjacent electrode plates define an electrode gap therebetween. An injector manifold is disposed at the bottom of the tank for feeding electrolyte into the tank at locations below the electrode plates. A collector grid, comprised of a plurality of collectors having ports, define an upper level of electrolyte by collecting the electrolyte from the tank. The ports are disposed in spaced-apart relationship within the open upper end defined by the tank edge. The collector grid and the injector creating a flow of electrolyte upward between the plates as the electrolyte flows from the manifold locations below the plates to the ports.

Abstract: An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.

Abstract: A hybrid electro-deposition process for soft magnetic cobalt alloy films comprises providing a plating bath that includes cobalt and a reducing agent, providing a cobalt-containing anode in the plating bath coupled to a power supply, providing a substrate in the plating bath coupled to the power supply, wherein the substrate functions as a cathode, applying a magnetic field across the plating bath, and applying an electrical current to the plating bath by way of the power supply to cause the cobalt to deposit onto the substrate and form a soft magnetic film.

Abstract: The invention relates to methods and apparatuses for the decontamination of fluid, particularly the removal of heavy metals and/or arsenic and/or their compounds from water, by means of electrocoagulation followed by adsorption, wherein the water to be purified subjected to electrodes of different polarities. The invention can include means for control of the pH of the fluid. The invention can also include control systems that allow self-cleaning of electrodes, self-cleaning of filters, and automatic monitoring of maintenance conditions.

Abstract: Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.

Abstract: Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.

Abstract: Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece.

Abstract: The present invention relates to a system single-metal plating, a system for binary-metal plating, and a system for solder-bump plating. The solder-bump plating system comprises a single-metal plating system for plating a preconditioned substrate to form a single-metal plated substrate; and a binary-metal plating system for plating the single-metal plated substrate. In a preferred implementation, the solder-bump plating system of the present invention is configured to single-metal plate a preconditioned substrate using a first plating solution to provide a single-plated substrate; to single-metal plate the single-plated substrate using a second plating solution to provide a double-plated substrate; and to binary-metal plate the double-plated substrate using a third plating solution to provide a solder-bump plated substrate.

Abstract: An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing fluid relative to a workpiece, wherein the portion of the workpiece to be processed and possibly the paddle is selectively immersed within the processing fluid. In accordance with a further independent aspect of the present invention, a paddle is provided for use proximate to a workpiece in a workpiece processing station. The paddle includes a one or more sets of delivery ports and one or more sets of fluid recovery ports. In at least one embodiment, the paddle provides for agitation of a processing fluid proximate to the surface of the workpiece. In at least another embodiment, the paddle provides for the delivery and/or recovery of one or more fluids to the portion of the workpiece to be processed.

Abstract: An insulated vibration-stirring apparatus comprising a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration linked with the vibration generating means, and vibrating vanes installed on this vibrating rod. An electrical insulation area made from hard rubber is installed on a section nearer to the installation section to the installation piece than the section where the vibrating vanes are mounted on the vibrating rod. An electrical line is connected to the lower section of the vibrating rod on the electrical insulation area side where the vibrating vanes are installed. This electrical line conducts power to the vibrating vanes by way of the lower section of the vibrating rod.

Abstract: A hydrogen-oxygen gas generator comprises an electrolytic bath (10A), a pair of electrodes composed of an anode member (2x) and cathode member (2y) both disposed in the bath, a power supply (34) for applying voltage between the anode and cathode members, vibratory mixing means (16) for vibratively mixing the electrolyte (14) in the bath, and gas collecting means for collecting the hydrogen-oxygen gas generated by the electrolysis using the electrolyte. The gas collecting means includes a lid member (10B) annexed to the electrolytic bath (10A) and a hydrogen-oxygen gas collecting pipe (10B?) connected to the hydrogen-oxygen gas output port (10B?). The vibratory mixing means (16) includes a vibrating motor (16d) vibrating at 10 Hz to 500 Hz and vibrating blades (16f) attached to a vibrating rod (16e) not rotatably but vibrating in the electrolytic bath interlockingly with the vibrating motor.

Abstract: An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing fluid relative to a workpiece, wherein the portion of the workpiece to be processed and possibly the paddle is selectively immersed within the processing fluid. In accordance with a further independent aspect of the present invention, a paddle is provided for use proximate to a workpiece in a workpiece processing station. The paddle includes a one or more sets of delivery ports and one or more sets of fluid recovery ports. In at least one embodiment, the paddle provides for agitation of a processing fluid proximate to the surface of the workpiece. In at least another embodiment, the paddle provides for the delivery and/or recovery of one or more fluids to the portion of the workpiece to be processed.

Abstract: A processing container (610) for providing a flow of a processing fluid during immersion processing of at least one surface of a microelectronic workpiece is set forth. The processing container comprises a principal fluid flow chamber (505) providing a flow of processing fluid to at least one surface of the workpiece and a plurality of nozzles (535) disposed to provide a flow of processing fluid to the principal fluid flow chamber. The plurality of nozzles are arranged and directed to provide vertical and radial fluid flow components that combine to generate a substantially uniform normal flow component radially across the surface of the workpiece. An exemplary apparatus using such a processing container is also set forth that is particularly adapted to carry out an electroplating process.

Abstract: The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is tilted to promote turbulent electrolyte flow in a space between a bottom surface of the semiconductor wafer and top surface of the trough-shaped receptacle.

Abstract: A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of the substrate to fill a wiring recess formed in the semiconductor substrate with plating metal includes performing an electroless plating process of forming an initial layer on the substrate, and performing an electrolytic plating process of filling the wiring recess with the plating metal, while the initial layer serves as a feeding layer.

Abstract: A cup type plating apparatus in which plating is carried out by supplying plating solution to a wafer placed on an opening at a top of a plating tank while an anode and the wafer connected to a cathode provided in the plating tank are electrically connected, and the anode and the cathode are separated by diaphragm provided in the plating tank, provided with a division wall between the anode and the wafer formed in a shape capable of separating the anode and the wafer from each other and having a plurality of openings covered with diaphragm. The concentration of the plating solution supplied to the plating tank separated by the division wall is made to be appropriately controllable. Further, a unit for stirring is provided capable of forcibly altering the flow of plating solution at the target surface of plating.

Abstract: The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.

Abstract: An apparatus and method for coating or treating powdered material, particularly ultra-fine powders in the nanometer or submicron range of mean diameters, by electrolytic processes. A platen is mounted for rotation upon a fixed shaft, and a rotary flow-through electrolytic cell is mounted upon a platen for rotation thereon, the cell's axis of rotation being offset from the platen's axis of rotation. The cells axis of rotation revolves around the platen's axis as the platen rotates. The electrolytic cell accordingly undergoes a planetary rotation, as the cell revolves around the platen's axis of rotation. The planetary rotation of the cell allows the powdered material to be collected by centrifugal force and constantly agitated to promote uniform electroplating.

Abstract: A method and apparatus for microencapsulating or electrodeposited coating of ferromagnetic and soft-magnetic sub-micron or nano sized powderized material comprising use of a rotary flow-through device assisted by an electromagnet within the electrode ring to alternately position the powder at the face of the cathode ring and electroplate the powder and reorient it prior to another repositioning. The invention is also of a process and apparatus for forming a strip, mesh, or film from magnetic powderized material in an organized bipolar arrangement, which is particularly useful for electroforming foils with the magnetic particles positioned in a monolayer within a multilayer metallic foil.

Abstract: A plating apparatus is provided to allow the whole area of a target plating surface of a wafer to be subjected to more uniform plating treatment and moreover enables a target plating surface of a wider area to be subjected to positive and uniform plating treatment. In the plating apparatus which has a stirring bar within a plating tank and which performs plating treatment of a target plating surface of the wafer while stirring a plating solution near the target plating surface of the wafer by moving the stirring bar, the stirring bar is rotated while being oscillated in a motion plane substantially parallel to the target plating surface of the wafer. By this operation, the occurrence of an eddy flow of the plating solution is suppressed during stirring and it becomes possible to positively carry out more uniform plating treatment of a wider region.

Abstract: An electrowinning cell, having a tank with an opened upper end defined by a tank edge, electrolyte within the tank and a plurality of flat, metallic electrode plates disposed within the tank in side-by-side, spaced-apart, parallel relationship. Adjacent electrode plates define an electrode gap therebetween. An injector manifold is disposed at the bottom of the tank for feeding electrolyte into the tank at locations below the electrode plates. A collector grid, comprised of a plurality of collectors having ports, define an upper level of electrolyte by collecting the electrolyte from the tank. The ports are disposed in spaced-apart relationship within the open upper end defined by the tank edge. The collector grid and the injector creating a flow of electrolyte upward between the plates as the electrolyte flows from the manifold locations below the plates to the ports.

Abstract: A method of operating a cell for electrowinning of copper, the cell including a plurality of anodes and cathodes therein, the method including the steps of introducing fresh electrolyte and sparging gas to a manifold system in the cell, controlling flow of fresh electrolyte and sparging gas in the manifold system and providing outlet openings in the manifold system such that streams of fresh electrolyte and sparging gas from the outlet openings are directed relatively uniformly across the cathodes in the cell.

Abstract: A plating apparatus according to the present invention has a plating tank (40) for holding a plating solution (10), an anode (56) disposed so as to be immersed in the plating solution (10) in the plating tank (40), a regulation plate (60) disposed between the anode (56) and a plating workpiece (W) disposed so as to face the anode (56), and a plating power supply (24) for supply a current between the anode (56) and the plating workpiece (W) to carry out plating. The regulation plate (60) is disposed so as to separate the plating solution (10) held in the plating tank (40) into a plating solution on the anode side and a plating solution on the plating workpiece side, and a through-hole group (68) having a large number of through-holes (66) is formed in the regulation plate (60).

Abstract: A reactor and a method of reacting a fluid are provided. The reactor comprises a chamber having an inlet and an outlet to receive and to output a fluid, respectively. A partition with a plurality of perforations is provided in the chamber to separate the fluid into fluid segments. A conductor coupled to the chamber generates a capacitance between the conductor and the partition to vibrate the partition.

Abstract: An insulated vibration-stirring apparatus comprising a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration linked with the vibration generating means, and vibrating vanes installed on this vibrating rod. An electrical insulation area made from hard rubber is installed on a section nearer to the installation section to the installation piece than the section where the vibrating vanes are mounted on the vibrating rod. An electrical line is connected to the lower section of the vibrating rod on the electrical insulation area side where the vibrating vanes are installed. This electrical line conducts power to the vibrating vanes by way of the lower section of the vibrating rod.

Abstract: A method and apparatus for turbulently exposing water flowing through a water system to a plurality of electrodes of an ion generator and having a self-contained tank through which water flows is provided with an inlet pipe that directs water flow between the electrodes. A tank cover serves as a non-electrical conducting head for the plurality of electrodes that extend downwardly from the underside of the cover. The electrodes are functionally configured to maximize water flow between them. Following the flow of water between the electrodes, a double vortex of water flow is created along one wall of the tank. A sight glass allows for visualization of the container contents, and in particular electrode wastage or wear, during operation.

Abstract: The present invention relates to a method of forming a conductive layer and an electroplating device, and in particular, to a method of forming a conductive layer that provides an electrically-conductive layer having both characteristics of increased adhesiveness to an electroplated body and increased uniformity. The electroplating apparatus and method can produce supersonic waves for electroplating. Thus, the electroplating device can include a wave generator. The electroplating device can further include a plating bath filled with an electrolyte solution that can propagate super sonic waves, a power supply, a plated body connected electrically to a first terminal of the power supply, and a plating body connected electrically to a second terminal of the power supply where the plating body provides ions the same as dissolved in the electrolyte solution to maintain a desired concentration of dissolved ions.

Abstract: A process for treating colored liquid comprises a step of contacting a colored liquid and functional water generated by electrolysis of a water solution of an electrolyte under light irradiation, to decolorize efficiently and stably to a low chromaticity.

Abstract: Electroplating methods and systems employing ultrasonic energy to enhance electroplating processes. The electroplating methods involve sweeping a plating surface with ultrasonic energy having an area of maximum ultrasonic energy density while simultaneously performing electroplating. The systems include movement apparatus providing relative movement between an ultrasonic energy source and a cathode while the ultrasonic energy source and the cathode are located within a plating tank.

Abstract: A hydrogen-oxygen gas generator comprising an electrolytic cell, an electrode group formed from an anode and a cathode mutually installed in that electrolytic cell, a power supply for applying a voltage across the anode and cathode, a gas trapping means for collecting the hydrogen-oxygen gas generated by electrolyzing the electrolyte fluid and a vibration-stirring means. The gas trapping means is comprised of a lid member installed on the electrolytic cell, a hydrogen-gas extraction tube connecting to the hydrogen-oxygen gas extraction outlet of that lid member. A vibration-stirring means for stirring and agitating the electrolytic fluid is supported by support tables. The distance between the adjacent positive electrode and negative electrode within the electrode group is set within a range of 1 to 20 millimeters.

Abstract: The present invention relates to an electrowinning cell adapted to recover metal ions from a solution as their corresponding elementary metals. The electrowinning cell includes a reservoir and a filter in fluid communication with the reservoir. The filter is operative to receive a solution containing metal ions from a location proximate to the cathode and to retain a first portion of the solution having a first concentration of metal ions and to remove a second portion of the solution having a second concentration of metal ions lower than the first concentration. The electrowinning cell additionally includes return means operative to return the first portion of the solution to the reservoir. The present invention also relates to a method of concentrating metal ions in a solution for use in an electrochemical cell and to a system for reducing metal ions in a solution to their corresponding elementary metals.

Abstract: Object of the invention is an anodic structure for mercury cathode cells for the industrial electrolysis of sodium chloride. The new structure is constituted by a grid array comprising a multiplicity of vertically disposed and mutually parallel titanium blades, covered by an electrocatalytic coating specific for the discharge of chlorine. The ratio between the thickness and the height of the blades is comprised between 1:16 and 1:100 and the ratio between the surface of free passage between the blades and the projected surface is comprised between 15:17 and 25:30. The new grid array is perpendicularly fixed to new or existing frames having the function of mechanical support and current conduction to the grid array. Scope of the invention is simultaneously reducing the energetic consumption of the cell and the costs for restoring the exhausted electrocatalytic coating.

Abstract: The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.

Abstract: A plating apparatus and a plating liquid removing method removes a plating liquid remaining on a substrate-contacting portion, or portions in its vicinity, of a substrate holding member. The plating apparatus comprises a head having a rotatable housing provided with a substrate holding member for holding a substrate, a plating process container, disposed below the head, for holding a plating liquid therein, and a plating liquid removing mechanism for removing plating liquid remaining on the substrate-contacting portion, or the portions in its vicinity, at an inner circumferential edge of the substrate holding member.

Abstract: An apparatus for continuously electrolyzing waste liquid has a series (10) of tanks comprising a plurality of electrolytic tanks each having an anode (22) and a cathode (23), the electrolytic tanks being connected in series, vibrating flow generating means (16) which is equipped to each of the electrolytic tanks and generates vibrating flow in waste liquid (14) to be treated, and a power supply circuit (34) for applying a voltage between the anode (22) and the cathode (23). The vibrating flow generating means (16) has a vibration motor (16d), vibration transmitting rods (16e) which are operationally connected to the vibration motor (16d) so as to vibrate in the waste liquid (14) to be treated; and vibrating vanes (16f) fixed to the vibration transmitting rods (16e). The distance between the anode (22) and the cathode (23) is equal to 5 to 50 mm.

Abstract: The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto metal seeded semiconductor substrates having sub-micron, high aspect ratio features. The invention provides an electrochemical deposition cell comprising a substrate holder, a cathode electrically contacting a substrate plating surface, an electrolyte container having an electrolyte inlet, an electrolyte outlet and an opening adapted to receive a substrate plating surface and an anode electrically connect to an electrolyte. Preferably, a vibrator is attached to the substrate holder to vibrate the substrate in at least one direction, and an auxiliary electrode is disposed adjacent the electrolyte outlet to provide uniform deposition across the substrate surface.