Abstract: An apparatus and method for synthesis and treatment of electrocatalyst particles in batch or continuous fashion is provided. In one embodiment, the apparatus comprises a sonication bath and a two-compartment chamber submerged in the sonication bath. The upper and lower compartments are separated by a microporous material surface. The upper compartment comprises a cover and a working electrode (WE) connected to a Pt foil contact, with the foil contact connected to the microporous material. The upper chamber further comprises reference counter electrodes. The lower compartment comprises an electrochemical cell containing a solution of metal ions. In one embodiment, the method for synthesis of electrocatalysts comprises introducing a plurality of particles into the apparatus and applying sonication and an electrical potential to the microporous material connected to the WE.

Abstract: The invention relates to an electrolytic reaction system (1) for generating gaseous hydrogen and oxygen, comprising a reaction chamber (2) for accommodating an electrolyte and an electrode arrangement (3) comprising a plurality of anodic and cathodic electrodes (5, 6). The electrode arrangement (3) comprises a plurality of plate-shaped electrodes (5, 6) fanned out in a star-shaped arrangement, and a virtual fanning axis (7) of the star-shaped electrode arrangement (3) lies at least approximately on a virtual, central cylinder or vertical axis (8) or is congruent with a virtual, central cylinder or vertical axis (8) of the reaction chamber (2). At least one electromagnetic coil (13) is disposed above and/or underneath the star-shaped electrode arrangement (3) in the axial direction of the virtual cylinder or vertical axis (8), the electromagnetic field of which acts on the electrolyte and on the electrode arrangement (3) when exposed to electrical energy.

Abstract: A substrate or semiconductor wafer processing apparatus has an agitator plate adjacent to an upper end of a process vessel. A workpiece holder holds a workpiece in the vessel at a processing position above the agitator plate. A vertical actuator assembly supporting the agitator plate oscillates the agitator plate vertically. The agitator plate may also rotate while oscillating vertically. In one design, the agitator plate has a spiral vane and a spiral slot. In a related metal plating apparatus, electrodes and a dielectric field shaping unit are in the vessel, below the agitator plate, and a shield ring is adjacent to the upper end of the vessel, above the agitator plate.

Abstract: A composition for plating copper includes an electrolyte solution, an accelerator, a suppressor and a leveler. The electrolyte solution includes a soluble copper salt, sulfuric acid and hydrochloric acid. The accelerator includes about 20 to about 60 ppm of a disulfide compound. The suppressor includes about 40 to about 100 ppm of a polyethyleneoxide (PEO)-polypropyleneoxide (PPO)-polyethyleneoxide (PEO) triblock copolymer. The PEO-PPO-PEO triblock copolymer has a weight average molecular weight of about 300 to about 10,000. The leveler includes about 0.01 to about 100 ppm of arylated polyethyleneimine.

Abstract: A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.

Abstract: An apparatus is described for producing gaseous hydrogen, including: a container provided with an input for water; an acoustic-wave generator suitable for inducing sonolysis in the water introduced in the container; an electromagnetic radiation source configured to induce photolysis in the water introduced in the container; a device adapted to induce electrolysis and arranged subsequent to the acoustic-wave generator and at the source of the electromagnetic radiation.

Abstract: A water treatment system includes a reservoir for holding water to be treated, one or more primary electrode pairs at least partially immersed in water held in the reservoir, a power supply adapted to power the one or more primary electrode pairs, and an agitator operable to cause movement in the water and particles and gases therein. Water is treated in the system by performing at least a first electrolysis phase wherein one or more of the primary electrode pairs are powered using electrical current of a first polarity such that for each powered primary electrode pair one electrode provides dissolved ions which act as an attractant for impurities to aid removal of the impurities from the water. The agitator can be operated during the first electrolysis phase to cause movement in the water and particles and gases therein to aid carriage of ions and impurities away from the electrodes.

Abstract: This procedure allows for the splitting of the water molecule into its basic components of two hydrogen gas ions, one oxygen gas ion, and two free electrons. Polarized electrodes are placed in a water bath then subjected to pulsed voltage fields at sub resonant frequencies which results in the fission process of the water molecule. The Hydrogen gas and Oxygen gas (Hydroxy) can provide fuel to a combustion process where only clean water is exhausted. The Hydrogen and Oxygen may also be separated and feed a fuel cell that generates clean electricity. The free electrons can be extracted and provide additional electrical power.

Abstract: A system carried by a watercraft for reducing the population of microorganisms in a body of water, including an electrolytic apparatus for producing antimicrobial chlorine-containing compounds and conduits for discharging electrolyzed water into the body of water.

Abstract: Apparatus and methods dissociate water into hydrogen and oxygen gases on a more efficient basis. By modifying the environmental conditions of the water through increased covalent and hydrogen bond movement, increasing the rate of self ionization, and with enhanced induced magnetic susceptibility, water electrolysis is achieved with reduced energy input. In the preferred embodiments, electrolysis is performed by the individual and balanced cumulative application of acoustic cavitation, a high-energy magnetic field to support enhanced magnetic susceptibility, and specific wavelength infrared energy to increase bond vibrational modes of water molecules. It has been discovered that the combination of acoustic cavitation, vibrational enhancement, and increased magnetic susceptibility significantly enhances proton-hopping and electric field fluctuations leading to an enhanced return on energy invested water electrolysis.

Abstract: In a producing apparatus and a producing method of effectively and safely producing hypochlorous acid water suitable for sterilization in a desired amount of production and in a desired concentration, the producing apparatus is compact and includes an electrolytic vessel to which dilute hydrochloric acid is supplied and in which no diaphragm exists between an anode and a cathode for generating a chlorine gas, a storage tank in which water is stored, a circulation pipe into which water flows from the storage tank, in which the water circulates, and from which the water returns into the storage tank, and a mixing pipe which couples between the electrolytic vessel and the circulation pipe, mixes the chlorine gas from the electrolytic vessel with the water in the circulation pipe, and produces hypochlorous acid water.

Abstract: In a method for treating sludge (1), at least two electrodes (2) are provided for generating an electric field. Water present in the biosludge is electrolyzed and OH° radicals (OH°) are generated at least in part.

Abstract: A manufacturing apparatus, of a grinding stone which is manufactured by attaching abrasive grains respectively having polyhedral shapes in which mutually opposed surfaces are parallel to each other to a base member, is provided with: an abrasive grains classifying apparatus adapted to classify the abrasive grains based on sizes of the abrasive grains defined by face-to-face distances between the mutually opposed surfaces; and an attaching apparatus adapted to attach the abrasive grains classified by the abrasive grains classifying apparatus to the base member.

Abstract: Apparatus for producing hydrogen gas comprise a container adapted to contain an aqueous electrolyte solution containing hydrogen, at least one first electrode, wherein the at least one first electrode is adapted to be in contact with a solution, at least one second electrode, wherein the at least one second electrode is adapted to be in contact with a solution, and wherein the at least one first electrode is a cylindrically-shaped cathode and the at least one second electrode is a cylindrically-shaped hollow anode capable of accommodating the cylindrically-shaped cathode within it, and wherein the cylindrically-shaped cathode is located along the central axis of the cylindrically-shaped hollow anode.

Abstract: The current systems for stirring electrolyte in the cells for the electrolytic production of metals consists of introducing into the production cells, air or compressed neutral gases at low pressure in ventilators, and distribute them in the cell by means of perforated pipes to stir the electrolyte. These pipes are firmly attached to the structure of the cell or to a supporting structure of insulating material, in the case of the newly designed cells. With use, the crystallization of salts dissolved in the electrolyte, the depositing of solids and of anodic sludge will obstruct the perforations of the pipes, limiting the circulation of the electrolyte stirring air. During the operation of the cell, breakdowns or failures occur in the ventilators, distribution ducts and perforated pipes of this system for different reasons whose reparation or cleaning implies losing production time.

Abstract: The invention relates to a method and to a device for scrubbing liquid effluents laden with dissolved or undissolved organic and/or inorganic substances and continuously fed at a flow rate Df. After a preliminary effluent-floating operation if required, the method comprises carrying out at least one treatment cycle, the treatment cycle including a first step in which the effluents are subjected to an electrolytic treatment by circulation in a first compartment while generating a very strong turbulence, followed by a second step in which the undissolved elements contained in the effluents are agglomerated by coagulation/flocculation before circulating the effluents in a second free surface compartment, with the scraping of the sludge carried out at the upper portion, while bubbling and maintaining a reduced turbulence in said second compartment.

Abstract: The invention relates to methods and devices for the decontamination of fluid, particularly the removal of heavy metals and/or arsenic and/or their compounds from water, by means of electrolysis, wherein the water to be purified subjected to electrodes of different polarities. The invention can include means for control of the pH of the fluid. The invention can also include control systems that allow self-cleaning of electrodes, self-cleaning of filters, and automatic monitoring of maintenance conditions.

Abstract: A method and an apparatus for providing a substance for the analysis of isotope ratios, at least some of the substance being contained in a liquid phase in which the liquid phase is subjected to electrolysis and, in the process, the substance or a pre-product for the latter is formed.

Abstract: Described are apparatus and methods for electroplating one or more metals onto a substrate. Embodiments include electroplating apparatus configured for, and methods including, efficient mass transfer during plating so that highly uniform plating layers are obtained. In specific embodiments, the mass transfer is achieved using a combination of impinging flow and shear flow at the wafer surface.

Abstract: The invention concerns a device to conduct an electrochemical reaction on the surface of a semiconductor substrate (S), characterized in that the device comprises: a container (10) intended to contain an electrolyte (E), a support (20) arranged in the container, said support being adapted for attachment of the semiconductor substrate (S) on said support (20), a counter-electrode (30) arranged in the container (10), illumination means (50) comprising a source (51) emitting light rays and means (52) to homogenize the light rays on all of said surface of the semiconductor substrate (S), so as to activate the surface of the semiconductor substrate (S), and an electric supply (40) comprising connection means for connection to the semiconductor substrate and to the counter-electrode in order to polarize said surface of said semiconductor substrate (S) at an electric potential permitting the electrochemical reaction.

Abstract: In an electrolytic apparatus for removing contaminants from water, a set (110) of spaced apart conductive electrodes (40) in a reaction chamber (54, 112, 114), is arranged in oppositely charged groups of first and second interleaved electrodes with flow paths between them. Non-conductive turbulence inducers (158, 168) on the faces of electrodes (40) are applied to water in the flow paths. One variety is modular elements (1 58) with stepped increases in width to present a narrow leading edge in the direction of flow. Another variety is a continuous set of wave guides (168) bordering the flow path. Electrodes (40) are selectively powered in patterns creating turbulence, with effective patterns including a first and last electrode powering pattern and a mini-cell electrode powering pattern.

Abstract: The present application relates to a method and to a device for producing a low-wear nickel and boron-containing hard coating on a metal surface. In the method according to the invention, boron or boron compound particles are dispersed in a nickel-containing electrolyte by way of gases flowing through the electrolyte. The gas flows through a liquid impermeable but gas permeable area of the container floor into the electrolytes and disperses the particles present in the electrolytes.

Abstract: A system and method is described to convert ambient carbon dioxide (CO2) to graphite and oxygen by splitting the carbon oxygen bonds. By using this process, CO2 from point sources or from ambient air can be reduced or effectively eliminated, and thus the system can play an important role in the fight against CO2 emissions and global warming. The system first introduces CO2 and electrolyte solution to one or a series of specially designed pipes rotating pipes to create induction inside the pipes, resulting in breaking of the carbon-oxygen bonds and production of solid carbon and gaseous oxygen. The solid carbon and gaseous oxygen are then separated.

Abstract: A system and method is described for electropolising tubular metallic prostheses. In one aspect, the system provides a continuously changing set of points of contact between anode and prosthesis. In another aspect, the cathode is given a conical shape to correct for current concentrations that would otherwise exist and unevenly affect the amount of electropolishing over the length of the prosthesis.

Abstract: Manufacture of semiconductor products such as LCD driver requires a bump plating step for forming a gold bump electrode having a size of from about 15 to 20 ?m. This bump plating step is performed by electroplating with a predetermined plating solution, but projections intermittently appear on the bump electrode during a mass production process. In the invention, abnormal growth of projections over the gold bump electrode is prevented by adding, prior to the gold bump plating step, a step of circulating and stirring a plating solution while erecting a plating cup and efficiently dissolving/discharging a precipitate. This step is performed for each wafer to be treated.

Abstract: A method and apparatus is disclosed for utilizing sulfur as a consumable fuel in an electrochemical cell. The principal of the above described invention is that sulfur is oxidized or acts as an oxidizing agent to produce energy while avoiding the production of harmful gases and other byproducts, traditionally associated with the burning of sulfur.

Abstract: A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.

Abstract: Herein is described a device for pretreating fuel to provide a suitable fuel for combustion in a fuel burning apparatus having a fuel intake system and an exhaust system, the device comprising: a volatilization chamber for volatilizing the fuel in the volatilization chamber; a heated processor tube through which the volatilized fuel flows; a processor rod mounted in the processor tube around which the volatilized fuel flows as it flows through a reactor tube; a space between the processor rod and the heated processor tube through which the volatilized fuel flows forming a reaction zone thereby creating reacted fuel; and inlet means for directing the reacted fuel into the intake system of the fuel burning apparatus.

Abstract: The invention relates to a cavitation and electrocoagulation reactor comprising a hollow cylindrical cathode having a cylindrical anode coaxially disposed therein to form an annular interelectrode gap between the contact surfaces. An inlet sleeve and an outlet sleeve disposed in the respective inlet and outlet of the cathode and abutting against opposite ends of the anode seal the interelectrode gap from the respective inlet and outlet of the cathode. A set of channels disposed in the wall of the inlet sleeve connect the inlet to the interelectrode gap. Similarly, a set of openings disposed in the outlet sleeve connect the interelectrode gap to the cathode outlet. An electrical source has first and second terminals respectively connected to the anode and the cathode. The method for removing contaminants from a contaminated fluid flow involves the simultaneous application of hydrodynamic cavitation and electrocoagulation to the contaminated fluid flow.

Abstract: A liquid material comprising hydrogen and oxygen is produced by electrolyzing an electrolysis solution containing 5 to 30% by weight of an electrolyte in an electrolysis tank using a group of electrodes disposed, within the electrolysis tank, while maintaining a spacing of 3 to 10 mm between adjacent electrodes under conditions of a current density of 5 to 20 A/dm2, a bath temperature of 20 to 70° C., and pH 14 or more (strongly alkaline) while applying vibration stirring, bringing the pressure of the resultant gas comprising hydrogen and oxygen to 0.1 to 0.5 MPa, and cooling the gas to ?190 to ?250° C. to liquefy the gas. The liquid material is stored, is returned to room temperature, and is gasified to produce a regasified gas comprising hydrogen and oxygen.

Abstract: Apparatus and processes are disclosed for electrowinning metal from a fluid stream. A representative apparatus comprises at least one spouted bed reactor wherein each said reactor includes an anolyte chamber comprising an anode and configured for containing an anolyte, a catholyte chamber comprising a current collector and configured for containing a particulate cathode bed and a flowing stream of an electrically conductive metal-containing fluid, and a membrane separating said anolyte chamber and said catholyte chamber, an inlet for an electrically conductive metal-containing fluid stream; and a particle bed churning device configured for spouting particle bed particles in the catholyte chamber independently of the flow of said metal-containing fluid stream. In operation, reduced heavy metals or their oxides are recovered from the cathode particles.

Abstract: A method and system for purifying liquid is disclosed that includes combining powdered metal particles with the fluid to be treated. The mixture of powdered metal particles and liquid to be treated is then passed through an electrolytic cell. The cells forms ions which attach to contaminants in the liquid and are subsequently separated out from the liquid using conventional solid/liquid separation techniques.

Abstract: The present invention pertains to an electrolytic copper plating method characterized in employing pure copper as the anode upon performing electrolytic copper plating, and performing electrolytic copper plating with the pure copper anode having a crystal grain diameter of 10 ?m or less or 60 ?m or more. Provided are an electrolytic copper plating method and a pure copper anode for electrolytic copper plating used in such electrolytic copper plating method capable of suppressing the generation of particles such as sludge produced on the anode side within the plating bath upon performing electrolytic copper plating, and capable of preventing the adhesion of particles to a semiconductor wafer, as well as a semiconductor wafer plated with the foregoing method and anode having low particle adhesion.

Abstract: An apparatus for electroplating a substrate includes a substrate supporting member that supports the substrate such that a plating surface of the substrate faces upwardly, an anode electrode disposed at an upper part of the substrate supporting member, a power source for applying a voltage to the anode electrode and the substrate, and a plating solution supply member for supplying a plating solution onto the substrate.

Abstract: The disclosure teaches an apparatus for circulating electrically conductive solutions between electro-chemical cells. The apparatus is able to decrease the size or surface area of the cells and operate the electro-chemical at reduced amperage. Movement of the solution over the plates also facilitates reduced build up of scale on the plates. The flow rate or treatment dwell time can be controlled.

Abstract: Reactors with agitators and methods for processing microfeature workpieces with such reactors. The agitators are capable of obtaining high, controlled mass-transfer rates that result in high quality surfaces and efficient wet chemical processes. The agitators generate high flow velocities in the fluid and contain the high energy fluid proximate to the surface of the workpiece to form high quality surfaces when cleaning, etching and/or depositing materials to/from a workpiece. The agitators also have short stroke lengths so that the footprints of the reactors are relatively small. As a result, the reactors are efficient and cost effective to operate. The agitators are also designed so that electrical fields in the processing solution can effectively operate at the surface of the workpiece.

Abstract: A method of plating a plurality of semiconductor devices includes: applying an electrical power source to an anode terminal and a cathode terminal; placing the plurality of semiconductor devices on a non-conductive platform in a plating solution; moving conductive parts across surfaces of the semiconductor devices to be plated, wherein the conductive parts electrically connect the surfaces of the semiconductor devices to the cathode; and wherein plating particles connected to the anode terminal move to and plate the surfaces of the semiconductor devices.

Abstract: A plating method includes providing an article in a plating bath, covering a surface of the article with an insulating member in the plating bath, and electrolytically plating the article while moving one of the insulating member and the article relative to each other.

Abstract: Novel devices for synthesizing ferrate and uses thereof are described. One aspect of the invention relates to devices and systems for synthesizing ferrate at a site proximal to the site of use.

Abstract: A plating apparatus for use in forming a plated film in trenches, via holes, or resist openings that are defined in a surface of a semiconductor wafer, and forming bumps to be electrically connected to electrodes of a package, on a surface of a semiconductor wafer. The plating apparatus has a plating tank for holding a plating solution, a holder for holding a workpiece and bringing a surface to be plated of the workpiece into contact with the plating solution in the plating tank, and a ring-shaped nozzle pipe disposed in the plating tank and having a plurality of plating solution injection nozzles for injecting the plating solution to the surface to be plated of the workpiece held by the holder to supply the plating solution into the plating tank.

Abstract: An apparatus for treating the surface of an object to be treated comprising introducing a surface treatment fluid into a reaction vessel (4) capable of receiving an object, introducing the surface treatment fluid into a separation vessel (14) after the object is subjected to surface treatment, and circulating the surface treatment fluid, from which a contaminant has already been removed, to the reaction vessel (4). At the time of treatment on the surface of the object, a circulation passage for the surface treatment fluid including the reaction vessel (4) is communicated and the surface treatment fluid is constantly circulated through the circulation passage.

Abstract: The present invention relates generally to an antibacterial coating which is composed of silver, to medical tools and to implants comprising such a coating and to a method as well to an apparatus for the production of such a coating. The medical tools or the dental or orthopaedic implant comprises a metal or metal alloy having a treated surface wherein the treated surface is at least partially converted to an oxide film by plasma electrolytic oxidation using a colloid-dispersed system and wherein the converted surface is partially covered by islands formed by colloid-dispersed silver-particles of the colloid-dispersed system. An Ag—TiO2 coating shows excellent properties in terms of antibacterial efficacy (even against multi-resistant strains), adhesion and biocompatibility. The life-time of an implant in a human body is increased. The antibacterial coating can be used in the field of traumatology, orthopaedic, osteosynthesis and/or endoprothesis, especially where high infection risk exists.

Abstract: A device for removing mineral deposits from the electrode of a pool chlorinator cell, which has a housing with liquid inlet and outlet ports and in which the electrode is submerged, has: (a) a container having an opening, with this opening being affixed proximate an aperture that is placed in the housing, (b) an ultrasonic membrane which covers the aperture, (c) an ultrasonic transducer mounted in the container and coupled to the membrane in such a manner so as to cause specified, ultrasonic vibrations in the membrane and throughout the liquid contained in the housing, and (d) a frequency modulated power source that drives the transducer. In a preferred embodiment, this device is powered such that the energy projected to the electrodes is in range of 100 to 200 watts and the flux of energy supplied to the membrane is in the range of 4 to 25 watts per square inch of membrane surface area.

Abstract: A self-sustaining, fully automated, hydrogen generator that utilizes the ocean's currents, tides, and water to produce vast amounts of hydrogen and oxygen. Additional electricity may be supplied by locally generated means including offshore wind, offshore geothermal, as well as wave powered generation. Hydrogen is exported as well as the oxygen not consumed by the life support systems. Residue collected from the ocean water purification process is collected and exported for use elsewhere or dispersed locally around the underwater facility. Systems orchestration is achieved by control systems that operate independently of one another with no single point of failure.

Abstract: The invention relates to a system and a method of plating metal alloys, as well as to the structures thus obtained. The system for plating metal alloys comprises an electrolytic cell containing an electrolytic solution (3) in which an anode (4,4a,4b), a cathode (5), and a plurality of metal components to be plated onto the cathode are immersed, the anode (4,4a,4b) and the cathode (5) being electrically connected to means (6) adapted to apply a potential difference between said anode (4,4a,4b) and said cathode (5). The invention is characterized in that the means (6) adapted to apply a potential difference between said cathode (5) and said anode (4,4a,4b) impose a potential difference value that changes over time according to a predefined law.

Abstract: The present invention relates to an integral system for treating the water for cooling towers and other processes such as reverse osmosis rejection, regeneration of the anionic units of demineralization systems, aircraft blue water and wastewater, in which it is desired to reduce and/or eliminate contaminants such as silica, total, of calcium and magnesium hardness, suspended solids, organic matter and microorganisms, heavy metals, detergents or arsenic, for obtaining a water quality that enables it to be reused in different industrial processes, generating savings in terms of water and chemicals.

Abstract: A system is disclosed for treating hydrogen isotopes. Specifically, the system includes a treatment chamber that has an elongate housing through which liquid and gas isotopes flow longitudinally from an inlet port to an outlet port thereof. An elongate ultrasonic waveguide assembly extends within the housing and is operable at a predetermined ultrasonic frequency and a predetermined electrical potential to ultrasonically enhance the concentration of dissolved hydrogen gas isotopes within the housing or energize and electrolyze the liquid and gas isotopes within the housing. An elongate ultrasonic horn of the waveguide assembly is disposed at least in part intermediate the inlet and outlet ports, and has a plurality of discrete agitating members in contact with and extending transversely outward from the horn intermediate the inlet and outlet ports in longitudinally spaced relationship with each other.

Abstract: A method of plating a plurality of semiconductor devices includes: applying an electrical power source to an anode terminal and a cathode terminal; placing the plurality of semiconductor devices on a non-conductive platform in a plating solution; moving conductive parts across surfaces of the semiconductor devices to be plated, wherein the conductive parts electrically connect the surfaces of the semiconductor devices to the cathode; and wherein plating particles connected to the anode terminal move to and plate the surfaces of the semiconductor devices.

Abstract: The invention relates to methods and devices for the decontamination of fluid, particularly the removal of heavy metals and/or arsenic and/or their compounds from water, by means of electrolysis, wherein the water to be purified subjected to electrodes of different polarities. The invention can include means for control of the pH of the fluid. The invention can also include control systems that allow self-cleaning of electrodes, self-cleaning of filters, and automatic monitoring of maintenance conditions.

Abstract: Disclosed is a continuous electrorefining device for recovering metal uranium. The electrorefining device comprises an electrolytic cell 10 having an internal accommodating space filled with electrolyte; a cathode unit 20 including a top plate 22, connecting rods 21 whose top ends are joined to the top plate 22, and cathode electrodes 24 whose top end is joined to lower plates; an anode unit 40 which is placed in a cylinder shape surrounding the cathode electrodes 24; a uranium recovery unit 50 for drawing out the uranium metal by a first drawing-out means; and a transition metal recovery unit 60 for drawing out the metal particles by a second drawing-out means. The cathode unit 20 further comprises an insulating and vibration absorbing member that is interposed between the top plate 22 and the cover plate 12; and a vibration means which is mounted on the top plate 22 to transmit vibration and impact force to the cathode electrode 24 through the connecting rods 21.