Abstract: The present invention is directed to an improved electroplating method, chemistry, and apparatus for selectively depositing tin/lead solder bumps and other structures at a high deposition rate pursuant to manufacturing a microelectronic device from a workpiece, such as a semiconductor wafer. An apparatus for plating solder on a microelectronic workpiece in accordance with one aspect of the present invention comprises a reactor chamber containing an electroplating solution having free ions of tin and lead for plating onto the workpiece. A chemical delivery system is used to deliver the electroplating solution to the reactor chamber at a high flow rate. A workpiece support is used that includes a contact assembly for providing electroplating power to a surface at a side of the workpiece that is to be plated. The contact contacts the workpiece at a large plurality of discrete contact points that isolated from exposure to the electroplating solution.

Abstract: A device for the purification of polluted water, especially adapted to remove therefrom organic pollutants. The device makes use of a reactor wherein the polluted water is subjected to the combined action of an ozone containing gas in the presence of an oxidation reaction catalyst that is produced in situ by electrolysis. A method of use of this device is also disclosed.

Abstract: An apparatus and a method for electroplating for forming a metal film by an electroplating method. The apparatus comprises a plating bath provided in a non-oxidative atmosphere, and in the method, an article to be plated is immersed in a plating bath through a non-oxidative atmosphere.

Abstract: An ozone storage/recovery method comprises a process for supplying an ozone-containing gas, generated by an ozone generator, to an ozone adsorbent tank filled with an ozone adsorbent contained at least one high-silica material selected from the group consisting of a high-silica pentacile zeolite, a dealumination faujasite and a mesoporous silicate, causing the adsorbent to adsorb ozone at a temperature of 0° C. or below, and storing the ozone, and a process for desorbing the ozone adsorbed by the adsorbent in the ozone adsorbent tank and recovering the ozone from the adsorbent tank, whereby ozone can be supplied as required.

Abstract: A flame adjusting device includes a tank for receiving a fluid and includes an upper portion and a lower portion coupled to a coupler with hoses. The coupler is coupled to a gas generator. A control device is disposed between the coupler and an upper hose and is used for controlling the gas to flow through the hoses and to adjust the gas flowing out of the tank. The gas is a gaseous fuel and is supplied to a facility for generating a flame. The temperature generated by the flame may thus also be adjusted.

Abstract: The present invention provides a bladder assembly 130 for use in an electroplating cell 100. The bladder assembly 130 comprises a mounting plate 132, a bladder 136, and an annular manifold 146. One or more inlets 142 are formed in the mounting plate 146 and are coupled to a fluid source 138. The manifold 146 is adapted to be received in a recess 140 formed in the lower face of the mounting plate 132 and secures the bladder 136 thereto. Outlets 154 formed in the manifold 146 communicate with the inlets 142 to route a fluid from the fluid source 138 into the bladder 136 to inflate the same. A substrate 121 disposed on a contact ring 114 opposite the bladder 136 is thereby selectively biased toward a seating surface of the contact ring 114. A pumping system 159 coupled at the backside of the substrate 121 provides a pressure or vacuum condition.

Abstract: The process comprises the oxidation, in an electrolytic cell provided with at least one anodes of pollutants which contaminate wastewaters, and is characterized in that oxygen is diffused in the electrolytic cell cathode or cathodes subjected to a voltage lower than 100 V in order to reduce said gas to a dissolution oxidizing species selected among hydrogen peroxide or hydroxyl and/or peroxydril (HO2·) radicals. The equipment for implementing said process comprises an elecrolytic cell continuously supplied and provided with an anode (1) and two oxygen diffusion cathodes (2) and is sealed on either side with a frame (3), said frames and cathodes delimiting the compartments (4) which are supplied with oxygen gas and/or gas mixtures containing oxygen through inlets (6); similarly, the cathode and the anode delimit the compartments (5) through which circulates the contaminated water entering through the inlet (5) and coming out through outlets (8).

Abstract: Disclosed is an apparatus for electrochemical treatment of waste water by electroflocculation. The apparatus uses an arrangement of electrodes and an anode scraping device, whereby the sword-shaped anode(s) are flanked by cathodes made in the same manner, on which the support structure for the anode scraping devices is supported. Transport of the oxide crusts scraped off the anode surface towards the lower reactor end is supported by a gas stream fed into the electrolytic gap through hollow sections which serve the purpose of spacers for the electrodes. The anodes may consist of several individual sheets, with intermediate layers for lowering the frictional resistance when withdrawing individual sheets. The liquid seal of the upper reactor side in the area of the scraping device is achieved by a plug of elastic, electrically nonconductive material.

Abstract: A vessel for contacting a plurality of objects with a fluid and including at least one bottom wall inclined downwardly from at least one sidewall to an inlet for providing an upwardly directed stream of fluid, and a distribution shield arranged in spaced relation to the bottom wall. The fluid stream causes the objects to flow upward from a moving bed thereof to a disengaging position. The distribution shield has an upper surface inclined downwardly and extending away from the vicinity of the object disengaging position to a return position such that disengaged objects fall on the upper surface of the distribution shield and move downward thereon to the return position from which they fall onto an upper portion of the inclined bottom wall and move downward thereon to a feed position.

Abstract: The invention relates to an electrochemical half cell (1) comprising at least one electrode space (3, 15) for receiving an electrolyte (100), a gas space (2), and at least one gas diffusion electrode (14) as anode or cathode separating the gas space (2) and electrode space (3, 15), in which the gas space (2) is subdivided into two or more superimposed gas pockets (2a, 2b), in which gas inflow and gas outflow takes place through separate openings (7) and (12a, 12b, 12c, 12d) and the pressure on the electrolyte side of the electrode (14) is compensated by an opening in the respective gas pocket (2a, 2b) for the electrolyte.

Abstract: An electrolytic cell for producing a brine containing hydrogen peroxide is disclosed. Units for hydrogen peroxide production 3 and units for water electrolysis 2 are alternately arranged in the same electrolytic cell 1. Electrolysis is conducted while supplying hydrogen gas and oxygen gas generating in the respective water electrolysis units to a gas diffusion anode 11 and a gas diffusion cathode 13 of each unit for hydrogen peroxide production, to thereby obtain a brine containing hydrogen peroxide in a high concentration. Furthermore, because the anode of the hydrogen peroxide production units is a hydrogen gas diffusion anode having a reduced oxidizing ability, halogen ions contained in the seawater do not yield harmful halogenated organic substances.

Abstract: An efficient method of producing hydrogen by high temperature steam electrolysis that will lower the electricity consumption to an estimated 65 percent lower than has been achievable with previous steam electrolyzer systems. This is accomplished with a natural gas-assisted steam electrolyzer, which significantly reduces the electricity consumption. Since this natural gas-assisted steam electrolyzer replaces one unit of electrical energy by one unit of energy content in natural gas at one-quarter the cost, the hydrogen production cost will be significantly reduced. Also, it is possible to vary the ratio between the electricity and the natural gas supplied to the system in response to fluctuations in relative prices for these two energy sources. In one approach an appropriate catalyst on the anode side of the electrolyzer will promote the partial oxidation of natural gas to CO and hydrogen, called Syn-Gas, and the CO can also be shifted to CO.sub.2 to give additional hydrogen.

Abstract: An on-site process and apparatus for producing hydrogen peroxide at a high efficiency substantially from brine and oxygen-containing gas alone as raw materials while removing alkaline earth metals. Sea water concentrated by an electrodialytic apparatus 2 or the like as a raw material is supplied to an impurity removing apparatus 10 where caustic soda produced in an acid-alkali producing apparatus 11 at a subsequent stage and/or carbon dioxide gas is added to remove alkaline earth metals contained in sea water in the form of a hydroxide or carbonate precipitate. Separately, the acid-alkali producing apparatus 11 performs a salt separating operation to produce caustic soda which is then supplied to a hydrogen peroxide generator 28 to produce an alkaline aqueous solution of hydrogen peroxide.

Abstract: The invention relates to an electrochemical half-cell (1) with a gas diffusion electrode (7) as cathode or anode wherein the gas chamber (6) is divided in particular into two or more gas pockets (6a, 6b, 6c) arranged one above another, the electrode chamber (2) of the half-cell (1) being divided into compartments (2a, 2b, 2c) which for the passage of the electrolyte (23), are connected to one another in cascade fashion via chutes (17), (18), (19).

Abstract: A method and a reactor for electrochemical conversion of a material (21) being insoluble in a fluid into a material being soluble in the fluid, which method comprises that a flow of the fluid is passed to a reaction zone which comprises an internal circuit consisting of: one or more working electrodes (12), one or more counter-electrodes (13), and one or more ion-selective electrolytes (11), and which internal circuit is applied with an electrical voltage difference sufficient for the electrochemical processes; and use thereof for removal of soot particles from flue gasses and removal of oil in waste water.

Abstract: A process for removing NO from exhaust in which NO-containing exhaust is guided to a first electrode on which the NO is anodically oxidized to NO.sup.+, the NO.sup.+ is subsequently transported through an NO.sup.+ -conducting solid electrolyte to a second electrode on which the NO is cathodically reduced.

Abstract: An electrochemical autothermal reformer (EATR) provides hydrogen. The EATR includes an autothermal reformer region, a reformer anode supply region, and a composite membrane layer separating the reformer anode from the autothermal reformer region. The composite membrane layer includes a mechanically stable porous ceramic support member with a thin gas permeable ceramic substrate layer overlaying the support member. Overlaying the substrate layer is a first thin metallic catalyst layer which promotes the dissociation of H.sub.2 to 2H.sup.+ +2e.sup.-. Overlaying the first catalyst layer is a metallic oxide layer capable of conducting 2H.sup.+ +2e.sup.- at elevated temperatures. Overlaying the metallic oxide layer is a second thin metallic catalyst layer which promotes the recombination of 2H.sup.+ +2e.sup.- to H.sub.2.

Abstract: A ceramic element is provided which can be injection molded from an electrolyte and a binder. The ceramic element includes a tube support portion and a plurality of tubes extending from the tube support portion. The plurality of tubes are arranged in rows and columns. A plurality of vias extend from one surface of the tube support portion to an opposite surface of the tube support portion. The ceramic element is coated with an electrically conductive coating and a current collector coating. The vias are coated with the electrically conductive coating and plugged. After the coatings are removed in selected areas of the ceramic element, the tubes of the ceramic element form a series-parallel array because tubes in the same column are connected in parallel electrically and tubes in adjacent rows are connected in series electrically. Two ceramic elements are sealed together to form a modular electrochemical device. The electrochemical device can be either an oxygen generator or a fuel cell.

Abstract: There is disclosed a cell sealing mean particularly for a chlor-alkali diaphragm cell. The sealing means will usually be contained along a rim portion at the outer edge of an electrode assembly of the diaphragm cell. The sealing means comprises a pneumatic gasket system. In one embodiment, the system can have an outer gasket member comprising a solid and thick, elongated elastomeric strip element. The strip element will generally have front and back major faces, with the front face containing a channel, and with a side face typically having a flange. Combined with the outer gasket member in this embodiment is an inner gasket member that is a thin, elongated elastomeric strip member. It has an inflatable hollow and flexible tube element forming at least a portion of the inner gasket member. It is desirable that the element be a laminate of differing laminate materials.

Abstract: Method for the regeneration of active carbon and polymeric adsorbents having oxidizable, organic pollutants adsorbed thereon by electrochemical and chemical means and apparatus therefor. The method involves a desorption step and a decomposition step. Desorption is accomplished in one embodiment by flowing an aqueous stream at a preselected pH through the adsorbent material. Generally, decomposition is accomplished by contacting an aqueous stream containing an organic pollutant with hydroxyl radicals. Sequential or simultaneous desorption and decomposition can also take place during electrolysis in an electrolytic cell. During decomposition the active carbon can be made a carbon bed electrode of the cell. Electrolysis to produce peroxide can take place in the presence of a transition metal or a chelate of a transition metal while feeding an oxygen containing gas to the electrolysis cell.

Abstract: A method and apparatus is described for producing a large number of identical parts from a bar of material by electrochemical machining without the intervention of an operator. The apparatus comprises a spindle for supporting the bar and periodically feeding it in the direction of its axis, and an electrochemical machining assembly comprising cathodes for shaping the leading end portion of the bar to form the part. After the part has been shaped, it is electrochemically cut from the bar, and the bar is advanced longitudinally by the spindle in order to proceed with the machining of the next part.

Abstract: A device in the form of a flow cell for the chemical or electrolytic surface treatment of plate-shaped articles has first feed elements in the form of tubes with outlet openings for the directed supply of a process liquid to the articles to be treated and, in accordance with the invention, additional, second feed means in the process liquid for the directed introduction of air into the active area of guide elements, which consist of flow gratings, maintained at a distance on both sides of the articles to be treated, with small plates arranged in the manner of a shutter, which are inclined upward and downward in the direction parallel with the main plane of the flat plate articles.This principle of admixing air in connection with the design of the guide elements as flow gratings has the effect that the emerging air bubbles pass the flow gratings in an upward direction and carry the surrounding process liquid along.

Abstract: An electrochemical apparatus and system for extracting and recovering metals from their compounds using electrochemical cells where the anolyte 10 is connected electrically to the catholyte 11 through an independent set of electrodes 13, 14 immersed in each electrolyte and connected to each other by a conductor 16. The specification details the application of this principle to commercial size cells and systems to extract metals from solutions, from ores in-situ, from ores in heaps and fixed beds, from fine metal concentrates dissolved either at the anode cell or in a separate leaching vessel. Alkaline electrolytes are also given for the extraction and recovery of nickel and copper from their oxide ores. A method for extracting gold from ores or residues is also included.

Abstract: A ceramic oxygen generator is described which is capable of modular construction to permit the oxygen generation capacity to be expanded. An ionically conducted ceramic electrolyte is formed into a series of rows and columns of tubes on a tube support member and like electrolyte bodies can be connected together to form a manifold therebetween for oxygen produced in the interiors of the rubes. An electrical connection between tubes is formed such that the anodes and cathodes of tubes in a column are connected in parallel while the tubes in the row are, respectively, connected anode to cathode to form a series connection.

Abstract: An electrowinning cell comprised of a tank; an electrolytic solution within the tank defining a solution surface at a predetermined level within the tank; a plurality of flat metallic electrode plates, each of the plates having a support beam along an edge thereof; a support assembly disposed outside the tank for supporting a plurality of the electrodes by the support beams, the support assembly dimensioned to position the electrodes in side-by-side, spaced apart, parallel relationship with a lower portion of the electrodes immersed in the electrolytic solution and an upper portion disposed above the solution surface, the upper portions of the electrodes and the solution surface forming parallel channels extending from one side of the tank to a second side of the tank; a plurality of apertures formed in the tank wall along the one side of the tank, the apertures being disposed above the solution surface and positioned wherein at least one of the plurality of apertures is located between an adjacent pair of th

Abstract: An electroplating apparatus includes an electroplating tank having a generally flat base on which a semiconductor substrate may be placed with a surface to be electroplated oriented upwardly. A first seal seals a tank body to the flat base and a second seal seals the tank body to a peripheral portion of the surface of the semiconductor substrate. A substantially sealed volume adjacent the surface of the semiconductor substrate is produced. A gas supply tube for pressurizing the volume and an electrolyte discharge arrangement for discharging electrolyte from the volume when pressurized by a gas introduced through the gas supply tube are also provided. The discharge tube extends through a wall of the tank body to a position immediately above the surface of the semiconductor substrate within the volume.

Abstract: A method of treating a body of conducting material electrolytically which comprises the steps of placing the material to be treated in an aqueous oxidising electrolyte, passing an electric current through the electrolyte and the material to be treated and sparging the electrolyte with gas. The material to be treated is placed in a basket comprising a conducting frame having an insulating container fitted therein, the basket being insertable in and removable from the electrolyte as desired. The insulating container is removable from the conducting frame, the frame having retaining means for receiving the insulating container. The container includes a base having perforations to allow electrolyte to contact the material to be treated. The electrolyte is sparged with gas in the region where the material to be treated is in contact with it, the gas being supplied by a plurality of pipes (21, 22) extending across the electrolyte at a location beneath the perforated base of the insulating container.

Abstract: A spherical section electrochemical cell stack is disclosed for generating a product gas such as oxygen from a supply fluid such as water. In a preferred embodiment, the invention includes a spherical section top end plate; a spherical section bottom end plate; one or more spherical section electrochemical cells secured between the top and bottom end plates so that curvature dimensions of the top and bottom end plates and cell are in parallel alignment to thereby minimize any distances between the end plates and cell; and a spherical section pressure header secured to the bottom end plate so that curvature dimensions of the bottom end plate and pressure header are in opposed alignment to thereby define an integral high pressure chamber between the bottom end plate and pressure header. The integral high pressure chamber may be filled with a drying and/or filtering agent so that the product gas may pass through the chamber before leaving the cell.

Abstract: Gas shielding is employed to prevent metal plating on contacts during electroplating to reduce particulate contamination and increase thickness uniformity. In another embodiment, gas shielding is employed to prevent deposition on the backside and edges of a semiconductor wafer during plating.

Abstract: The plate-shaped workpieces (W) are conducted through a treatment cell (BZ) containing a treatment bath in vertical attitude on a horizontal conveying path with the assistance of contacting and conveying means, the end walls of said treatment cell having vertical slots for the passage of the workpieces (W). The bath liquid emerging from the treatment (BZ) is collected in a collecting tank and is returned such into the treatment cell (BZ) with the assistance of a pump that an at least largely vertical flow direction (SR) derives at both sides of the conveying path. The bath liquid is diverted toward the surface of the workpieces (W) with guide devices (LV) arranged at both sides of the convoying path in the treatment cell (BZ). An improved ion exchange in the region of the workpieces (W) is effected by the guide devices (LV). In, for example, the electrolytic treatment of printed circuit boards, the metal deposition can thus be undertaken with high current densities.

Abstract: A processing-liquid reservation unit for a discharge processing apparatus which reserves processing liquid supplied from a processing-liquid supply unit and generates, in the processing liquid, a discharge in a small gap between an electrode and a work piece to be processed so as to process the work piece, the processing-liquid reservation unit for a discharge processing apparatus comprising: a processing tank having an opening portion; a door for opening/closing the opening portion of the processing tank; a tubular elastic member for sealing a space between the door and the opening portion of the processing tank in a state where the door is closed; and a fluid control unit for filling the tubular elastic member with fluid and discharging the same from the tubular elastic member.

Abstract: An apparatus and a method for reducing harmful substances, particularly nitrogen oxides, in combustion exhaust gases in a combustion process performed with an oxygen-nitrogen-air mixture (atmosphere). At least one conduit (chamber 48) that conducts the oxygen-nitrogen-air mixture is provided and associated with an exhaust gas conduit (34) that is connected to a combustion chamber, with the conduit being provided with an intermediate wall (44) that separator the chamber is permeable to the oxygen or stores it. Of the oxygen-nitrogen-air mixture, only the oxygen is supplied to a combustion waste gas that is conducted to a combustion chamber.

Abstract: Production of air containing minus alkali ion. As shown in FIG. 2, there is shown an electric stone fine powder 20 having the grain size of 0.3 to 3 microns on the average, an electric stone carrier having the electric stone fine powder 20 uniformly mixed therewith, which is in the form of clothes having a volume intrinsic DC electric resistance of 10.sup.7 to 10.sup.10 .OMEGA..cm. This constitutes a vent contact reaction portion 2 as shown in FIG. 3. This portion 2 is located above an air intake 1a at the lower part of a box 1 and extended over the whole internal surface of the box 1. Ventilation means 3 formed from an electric fan causes the electric stone carrier 30 to subject to direct forced ventilation into contact with air, and minus alkali ion is prepared from water molecules which are moisture in air. The air containing the minus alkali ion is delivered from an air port 1b provided at the upper part of the box 1 to an installation spot.

Abstract: A center post electrochemical cell stack is disclosed for generating a product gas such as oxygen gas from a supply fluid such as water. The invention could be used to generate oxygen on board a space or aircraft and includes: a frame having a base plate and a wall affixed to the base plate so that the wall and base plate define a cell chamber for housing at least one electrochemical cell; and a T-cap having a top plate and a center post affixed to and projecting away from the top plate, wherein the top plate is secured to the wall of the frame to close the cell chamber and the center post passes through a central throughbore in an electrochemical cell within the chamber and is adjustably secured to the base plate of the frame. Consequently, the T-cap and frame cooperate to contain pressure generated by operation of the electrochemical cell.

Abstract: Electrolytic gas producer apparatus is provided wherein a water inlet has a pressure sensor and solenoid valve control passes water through a filter by pump to a reservoir. Cell chambers maintain electrolyte by supply pump and solenoid valve delivering to the cell via solenoid valves responsive to a level sensor. Gas outlet apertures extend into a polling manifold via solenoid valves and thence to a wash tank. The gas is removed from the tank via a manifold to a vacuum pump which draws the gas through a first filter including a drain line and a secondary filter for residual moisture removal. After the pump the gas passes under water in a flashback arrester filled with metal mesh. The gas then travels to a moisture removing filter and delivery pumps for delivery via intermediate solenoid valves, an outlet manifold, and final solenoid valves which control delivery to an electronically monitored outlet flashback arrester comprising infrared sensors to detect and signal a flashback condition.

Abstract: A method for catalytically reducing pollutants, in particular oxides of nitrogen in oxygen-containing exhaust gases of internal combustion engines, uses a catalyzer unit arranged in the exhaust gas flow of the engine. The catalyzer unit has a catalytic layer, an ion conducting layer and a counterelectrode. The catalytic layer exhibits a non-Faraday modification of the catalytic activity.

Abstract: Method for the regeneration of active carbon having oxidizable, organic pollutants adsorbed thereon by electrochemical and chemical means and apparatus therefor. The method involves a desorption step prior to a decomposition step. Each step involves conducting electrolysis in a cell using the active carbon as a carbon bed electrode. It is advantageous to conduct the electrolysis in the presence of a transition metal or a chelate of a transition metal while feeding an oxygen containing gas to the electrolysis cell.

Abstract: The invention relates to an electrochemical half-cell consisting in at least one electrode chamber 14 for accommodation an electrolyte, a gas chamber 23 and at least one gas-diffusion electrode 5 as anode or cathode separating gas chamber 23 and electrode chamber 14, in which the gas chamber 23 is divided into two or more gas pockets 20, 20' superimposed on one another after the manner of a cascade, with which the gas supply or gas discharge takes place through openings 11, 12 to the electrolyte 22.

Abstract: A fuel mixture combusting virtually free of pollutants and, in addition, requiring only very small quantities of combustible hydrocarbons is produced by introducing liquid fuel, low-nitrogen air and water into a chamber (9) provided with at least one ultrasonic oscillator (7); by decomposing the fuel introduced and at least partially decomposing the water by cavitation; by dispersing the water and the air in the decomposed fuel; and by at least partially electrolytically decomposing the water. The fuel mixture has a foam-like consistency, is very easily combustible and can be stored for a longer time.

Abstract: Waste water is purified by passing through a vessel in which small particles of insoluble cathodes interact with anodes to form galvanic couples. During this process, chemical reduction of ions of heavy metals in the water occurs by ions and hydroxides formed during electrochemical dissolution of anodes. The hydroxides are an excellent coagulating agent which absorbs impurities contained in the water. Pressurized air can saturate the waste water simultaneously with passing through the vessel with anodes in order to produce process floatation using hydroxides as coagulant. The temperature of the waste water can be increased in order to intensity the process of treatment.

Abstract: The electrochemical cell comprises a pair of electrodes (2a, 2b) whose electrode body (3a, 3b) consists of porous base material with a catalyst deposited on carbon particles. Between the electrodes, a membrane film (4) made of a hydrophillic, proton-conducting polymer material is arranged which acts as electrolyte and separator. The material of the membrane film (4) is a base polymer which is radiation-grafted with terminally sulphonated vinyl radicals and is selected from the group formed by substituted and unsubstituted polyolefins, substituted and unsubstituted vinyl polymers and their copolymers, the vinyl radicals being derived from vinyl monomers which are selected from the group formed by substituted and unsubstituted vinyl monomers.

Abstract: A liquid decontamination method and apparatus uses a series of pulsed electrical arcs across electrodes placed within a liquid stream which passes through a decontamination module. Sufficient energy is delivered by a pulse generator to the electrodes whereby lethal ultraviolet radiation and mechanical shock waves are created by the arcs within the decontamination module. A plurality of modules can be operated in parallel or in series to vary the capacity of the apparatus. Gas is injected through one of the electrodes to facilitate the generation of arcs within the liquid.

Abstract: A composite plating apparatus is disclosed in which an insertion electrode is loosely inserted into a hollow cylinder having a space, air bubbles are mixed into a composite plating solution fed from a liquid feeding pipe toward the space in the cylinder, and the hollow cylinder is connected to a base electrode so as to perform a composite plating on the inner surface of the hollow cylinder. An air bubble dispersing member having at least one passage hole with a diameter the same as or larger than a length of a gap defined between the insertion electrode and the inner surface of the cylinder is arranged upstream of a plating solution inlet portion of the hollow cylinder as an apparatus for dispersing air bubbles within the composite plating solution. The air bubble dispersing member can also be used as an electrode engaging member for engaging a tip end portion of the electrode inserted into the hollow cylinder.

Abstract: The present invention encompasses a semiconductor processing device having a processing chamber in which is positioned an electrolyte oxygen pump assembly and tubing for transferring an oxygen containing gas from outside the reaction chamber to within the interior of the electrolyte oxygen pump assembly and tubing for removal of the oxygen depleted gas from within the interior of the electrolyte oxygen pump assembly. In addition, the semiconductor processing tool may further have heating elements for heating a semiconductor substrate within the processing chamber independently from heating of the electrolyte.

Abstract: An electrochemical fluid delivery device according to the present invention includes an electrochemical cell and a flexible bladder having a first chamber for reservoiring a fluid and a second chamber into which gas generated by the electrochemical cell is introduced. The gas compresses the first chamber to deliver the fluid from a delivery port of the first chamber. The bladder is formed of three sheets that are stacked, and their edge portions are joined to each other so that first and second sheets form the first chamber as well as the second sheet and a third sheet form the second chamber. A fluid delivery port and a gas introduction port are provided in the first and second chambers, respectively. The fluid delivery port is also used as a fluid pour port. Alternatively, the fluid pour port is independently provided.

Abstract: In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.

Abstract: The present invention is a liquid-liquid contactor which employs an electrostatic field to mix an organic phase with an aqueous phase and to coalesce the aqueous phase in order to accomplish extraction of a component present in the aqueous phase. The electrostatic field is formed between a rod electrode located within a gaseous phase adjacent the top of the contactor and a plate electrode located within the aqueous phase adjacent the bottom of the contactor by applying a high voltage to the rod electrode. The extraction process consists of an extraction stage where the component is extracted out of the aqueous phase by the organic phase and a subsequent stripping stage where the component is stripped out of the organic phase by ion exchange with a second aqueous phase.

Abstract: A process is described for the electrochemical preparation of organosilicon compounds having at least one SiC-bound organic radical, a solution which contains at least one halosilane being subjected to an electrochemical reaction, an anode which contains a noble metal or an alloy consisting essentially of one or more noble metals having a halogen scavenger flowing around said anode.

Abstract: A hollow member whose internal surface is to be applied with composite plating is held in a condition in which a generatrix of the internal surface extends vertically. An electrode is inserted into the hollow member with a predetermined clearance to the internal surface of the hollow member. A composite plating liquid supply passage has a discharge opening which is in communication with an opening at a lower end of the hollow member. A gas is entrained in a form of bubbles into a composite plating liquid which is supplied into the clearance through the supply passage.

Abstract: A method and apparatus for purifying water is provided for use in both recreational and industrial settings. The present invention significantly lessens or eliminates the need to use toxic chemicals in the purification process and achieves purification by altering the molecular structure of the water to free radical forms of oxygen.