Gas Withdrawal Patents (Class 204/278)
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Patent number: 6585882Abstract: An object of the present invention is to provide a process and an apparatus for treating a gas containing reducing substances to efficiently degrade and remove the reducing substances. As a means to achieve this object, the present invention provides a process for treating a gas containing reducing substances by hydrothermal electrolysis, comprising supplying a gas containing reducing substances into a reactor charged with an aqueous medium containing a halide ion under application of a direct current at a temperature of 100° C. or more but the critical temperature of said aqueous medium or less and at a pressure that allows said aqueous medium to be kept in the liquid phase.Type: GrantFiled: August 10, 2001Date of Patent: July 1, 2003Assignee: Ebara CorporationInventors: Qingquan Su, Roberto Masahiro Serikawa, Masahiro Isaka, Tatsuya Nishimura, Yoko Kubota
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Patent number: 6572740Abstract: Improved electrolytic cells are described. The cells comprise the novel electrolyte K2HPO4, or a less alkaline phosphate buffer solution, electrodes having a modified composition, or a combination of the new electrolyte and a modified composition electrode. The K2HPO4 electrolyte, or less alkaline phosphate buffer solution, and modified electrodes can be used in liquid delivery devices which deliver a liquid agent at a constant rate or a controlled variable rate over a period of time.Type: GrantFiled: April 11, 2001Date of Patent: June 3, 2003Assignee: Elan Pharma International LimitedInventors: Maya Rosenblum, Gilad Lavi, Gil Yigal
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Patent number: 6555055Abstract: A system having a fluid source and a pasteurizer coupled with a disinfectant unit in flow communication with the fluid source for use in disinfecting dental or other water lines. The combination of pasteurizer and disinfectant unit is adapted to receive water from the fluid source. A fluid delivery unit is provided in flow communication with the pasteurizer and disinfectant unit combination. The disinfectant unit has a means for supplying hydrogen and oxygen and a means for generating hydrogen peroxide in flow communication with the means for supplying hydrogen and oxygen.Type: GrantFiled: July 30, 1999Date of Patent: April 29, 2003Assignee: Lynntech, Inc.Inventors: Alan J. Cisar, Adrain Denvir, G. Duncan Hitchens, Thomas D. Rogers
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Publication number: 20030075448Abstract: The invention relates to an electrochemical gas generator including a substrate for providing a surface for electrode deposition, a first electrode deposited on the surface for providing an electrical connection with a conducting medium, a second electrode deposited on the substrate for generating a gas, and a plurality of members extending from at least one side of the first electrode placed alternately with a plurality of extensions protruding from at least one side of the second electrode for improving generator efficiency.Type: ApplicationFiled: October 22, 2001Publication date: April 24, 2003Inventors: Avinash Dalmia, Otto J. Prohaska
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Patent number: 6527923Abstract: An electrode of use in electrolytic cells, particularly water electrolyser cells for the production of hydrogen, and comprising an electrically conductive first metal sheet having an electrochemically active gas-evolving planar surface; an electrically conductive second metal electrochemically active gas-evolving screen intimately adjacent and parallel to the planar surface to define an electrolyte and gas-evolving chamber between the sheet and the screen having a narrow width. The electrode provides improvements in voltage and efficiency, longer-term electrode stability and opportunity for periodic depolarization.Type: GrantFiled: March 22, 2001Date of Patent: March 4, 2003Inventors: Donald W. Kirk, John W Graydon
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Patent number: 6524453Abstract: The present invention is directed to an electrochemical apparatus comprising of an electrode assembly, an internal reservoir and an internal dryer. The internal dryer consists of a chamber filled with a multitude of balls to create mechanical obstacles removing moisture from gasses present inside, reducing the volume of accumulated gasses and acting as anti-splash for the electrolyte. The invention is also directed to an electrode assembly of monopolar electrodes for use in electrical apparatus. The bipolar electrode assembly comprises a pair of electrodes (12, 14), each of the electrodes having a plurality of electrode plates (16, 18) connected in series together. The electrode plates of each of the electrodes are connected to the next electrode plate in the series by a bridging member (20) contiguous with each of the interconnected electrode plates. The invention is also directed to an electrode for use in an electrode assembly.Type: GrantFiled: December 18, 2000Date of Patent: February 25, 2003Assignee: FatPower Inc.Inventors: Mario De Souza, Gabi Balan
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Publication number: 20030006136Abstract: In a water electrolyzing system of a solar-power-generating type, a low power generated by a photovoltaic generator and not reaching a level required for the operation of a water electrolyzer is utilized effectively. A water electrolyzing system includes a water electrolyzer, a first photovoltaic generator which is a power source of the water electrolyzer, and at least one electric device, for example, an accumulating device and a heater for raising the temperature of water to be electrolyzed. When a power generated by the first photovoltaic generator is lower than a level required for the operation of the water electrolyzer, if the temperature of the water to be electrolyzed is lower than 80°, the generated power is supplied to the temperature-raising heater, or if T≧80°, the generated power is supplied to the accumulating device and accumulated therein.Type: ApplicationFiled: April 16, 2002Publication date: January 9, 2003Inventors: Yutaka Hiki, Katsutoshi Nosaki, Hisashi Nagaoka, Satoshi Taguchi
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Publication number: 20030006135Abstract: The plating solution held in tanks (1, 2) alternatively circulates a plating chamber (20) by the operations of valves (21 to 24). In the circulating tank (1 or 2) in suspension, a TOCUV lamp (11 or 12) lights up. Material inhibiting the plating processing, which is organic matter generated by decomposition of additives during the plating processing, is decomposed to be harmless by TOCUV. Deficient additives are replenished from a component adjuster (33) to the circulating tank (1 or 2) in suspension. Thus, using a plating solution of which components are adjusted properly, plating processing can be performed continuously without dumping the plating solution.Type: ApplicationFiled: March 26, 2002Publication date: January 9, 2003Applicant: MITSUBISHI DENKI KABUSHIKI KAISHAInventor: Cozy Ban
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Publication number: 20020195334Abstract: An autonomous pushed liquid recirculation system (APLRS) is installed in a vessel, such as an electroplating tank. It situates around the interior perimeter and adjusts to changes in the level of liquid, maintaining the same location and orientation respective to the liquid's surface. It establishes a current near the surface that pushes liquid across the narrow horizontal dimension of the tank from a front wall to a rear wall. The current serves to push any bubbles resultant from operations within the tank to the rear wall. Over the rear wall is mounted an abbreviated exhaust hood covering only a short width of the surface of the tank along the rear wall. Because the exhaust system has to scavenge only a portion of the surface since all bubbles now burst along the rear wall, a much smaller air handling apparatus may be specified with an attendant savings in energy costs.Type: ApplicationFiled: August 20, 2002Publication date: December 26, 2002Inventors: Kent James Hay, Shaoying Qi
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Patent number: 6495025Abstract: The method of producing O2 from water, that includes subjecting water to electrolysis, to produce H2 and O2, returning H2 to a water storage zone, drying the produced O2, using air as a drying agent, flowing a stream of that drying agent air to the cathode side of fuel cell, flowing a stream of produced hydrogen to the anode side of the fuel cell, for reaction with O2 in the agent air to produce water electrical energy and heat, and using electrical energy produced by fuel cell in the electrolysis.Type: GrantFiled: April 20, 2001Date of Patent: December 17, 2002Assignee: Aerovironment, Inc.Inventor: Omourtag Velev
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Patent number: 6468412Abstract: An apparatus and method for venting hydrogen from an electrolytic cell. A brine solution is supplied to an electrolytic cell where hypochlorite and hydrogen gas are produced. A non-combustible gas is introduced into the electrolyzer containing the electrolytic cell and the concentration of hydrogen in the electrolyzer is reduced to a concentration below the LEL of hydrogen.Type: GrantFiled: December 20, 2000Date of Patent: October 22, 2002Assignee: United States Filter CorporationInventors: Jared K. Bryan, Gregory E. Stockinger, Manor M. Parikh
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Patent number: 6432283Abstract: A hydrogen replenishment system for providing hydrogen to a hydrogen-receiving apparatus, the system comprising (i) an electrolytic cell for providing source hydrogen; (ii) a compressor means for providing outlet hydrogen at an outlet pressure; (iii) means for feeding the source hydrogen to the compressor means; (iv) means for feeding the outlet hydrogen to the hydrogen-receiving apparatus; (v) central processing unit means for controlling the cell and the compressor; and (vi) user activation means for operably activating the central processing unit means. The invention provides a practical user interface in the treatment of data provided, computed, measured and stored, to offer a convenient, essentially self-contained, hydrogen fuel replenishment system for vehicles based on water electrolysis. The apparatus has virtually no stored hydrogen and provides pressurized hydrogen on the demand of a user.Type: GrantFiled: July 16, 1999Date of Patent: August 13, 2002Assignee: Stuart Energy Systems CorporationInventors: Matthew J. Fairlie, William J. Stewart, Andrew T.B. Stuart, Steven J. Thorpe, Charlie Dong
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Publication number: 20020100682Abstract: A self-contained hydrogen recharging system (5) for a fuel cell metal hydride storage canister (100). A water reservoir (10) provides water (15) to an electrolyzer (20), where the water is converted into hydrogen gas (22) and oxygen gas (24). The hydrogen gas is dried (26) and then stored in an accumulator (30). When the metal hydride storage canister is ready to be refilled, it is connected by the user to the recharging system. A heat exchanger (55) heats the fuel cell hydride storage canister prior to transfer of the stored hydrogen gas, and then cools the fuel cell hydride storage canister during transfer of the stored hydrogen gas. The hydrogen gas stored in the accumulator is rapidly transferred to the hydride storage canister by means of a pump (60) and stowed in the canister as a metal hydride.Type: ApplicationFiled: January 29, 2001Publication date: August 1, 2002Inventors: Ronald J. Kelley, Steven D. Pratt, Sivakumar Muthuswamy, Robert W. Pennisi
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Patent number: 6423194Abstract: A gas diffusion cathode suitable for oxygen cathodes in an ion-exchange membrane type brine electrolytic bath, a gas diffusion cathode with a gas chamber and a brine electrolytic bath using it. A gas diffusion electrode is supported on a metal frame and gas diffusion electrode is joined to the metal frame via a silver member or a silver surface-carrying member. The joining portions are free from liquid or gas leakage, thereby to eliminate the need of a packing between the gas diffusion electrode and the electrolytic bath frame. At least two openings are provided in the metal frame and a gas diffusion electrode is joined by hot-pressing to each opening via a silver member or a silver surface-carrying member to provide a large gas diffusion electrode.Type: GrantFiled: October 24, 2000Date of Patent: July 23, 2002Assignees: Toagosei Co., Ltd., Mitsui Chemicals, Inc., Kaneka CorporationInventor: Nagakazu Furuya
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Patent number: 6416647Abstract: The invention provides an electro-chemical deposition cell for face-up processing of semiconductor substrates comprising a substrate support member, a cathode connected to the substrate plating surface, an anode disposed above the substrate support member and an electroplating solution inlet supplying an electroplating solution fluidly connecting the anode and the substrate plating surface. Preferably, the anode comprises a consumable metal source disposed in a liquid permeable structure, and the anode and a cavity ring define a cavity for holding and distributing the electroplating solution to the substrate plating surface. Preferably, the substrate support member comprises a vacuum chuck having vacuum ports disposed on the substrate supporting surface that serves to provide suction during processing and to provide a blow-off gas flow to prevent backside contamination during substrate transfers.Type: GrantFiled: April 19, 1999Date of Patent: July 9, 2002Assignee: Applied Materials, Inc.Inventors: Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome
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Publication number: 20020074236Abstract: A conditioning system for reducing an oxygen content of water carried in a subsystem of an industrial plant includes an electrolysis unit having a hydrogen side, an anode, and a cathode. The anode and cathode are connected to the subsystem to decompose water into hydrogen and oxygen. A hydrogen/oxygen recombination catalyst is connected to the subsystem. The hydrogen/oxygen recombination catalyst follows the anode and cathode on the hydrogen side. A method for reducing an oxygen content of water carried in a subsystem of an industrial plant, includes the steps of electrolytically decomposing water from a subsystem of an industrial plant into hydrogen and oxygen, and using the hydrogen generated at the same time for recombining the oxygen contained in the water.Type: ApplicationFiled: March 19, 2001Publication date: June 20, 2002Inventor: Anwer Puthawala
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Publication number: 20020070127Abstract: Disclosed are a reactor and a method for processing hazardous gas, capable of improving a removing rate of the hazardous gas and the selectivity of a reacting process using a dielectric heat produced by a non-thermal plasma and a catalyst at a process of decomposing the hazardous gas. The reactor comprises a body having an inlet and an outlet; a plurality of planar electrodes arranged parallel in the body and spaced apart from each other at a certain interval, in which the plurality of planar electrodes are alternately connected to an alternating current power, and a ground such that every other planar electrode is connected to the alternating current power and the remaining planar electrodes are connected to the ground; and a power supply unit for applying a voltage of an alternating current frequency to the planar electrodes.Type: ApplicationFiled: September 27, 2001Publication date: June 13, 2002Inventors: Young-Hoon Song, Min-Suk Cha, Jae-Ok Lee, Yeon-Seok Choi, Wan-Ho Shin, Kwan-Tae Kim, Seock-Joon Kim
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Patent number: 6391184Abstract: An apparatus for decontamination contaminated groundwater in-situ by increasing the quantity of dissolved oxygen in the contaminated groundwater and generating reactive initiators to remediate the contaminated groundwater. The apparatus includes a submersible pump, an electrolytic cell, a chlorine filter, and a distribution chamber. The distribution chamber is vertically oriented and longitudinally-extending from the outlet of the cell. As the groundwater flows across charging plates of the cell, some of the molecules break into their component parts of hydrogen gas and oxygen gas. A selected vertical length of the chamber provides a resident time for the fluid allowing a majority of the gaseous oxygen to transition to dissolved oxygen.Type: GrantFiled: August 8, 2000Date of Patent: May 21, 2002Assignee: H2O Technologies, Ltd.Inventors: John J. Orolin, Vaughn A. Sucevich, Sr., Troy T. Johnson, Scott A. Schorzman
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Publication number: 20020056637Abstract: A hydrogen station includes a water electrolyzer for producing hydrogen containing moisture, a first dewatering device capable of capturing the moisture from the hydrogen to provide the hydrogen in a dry state, a tank for storage of the hydrogen in the dry state, a second dewatering device adapted to replace the first dewatering device when the function of the first dewatering device has declined with an increase in amount of moisture captured, and regenerating equipment for regenerating the first dewatering device after being replaced, thereby recovering the water-capturing ability thereof.Type: ApplicationFiled: November 14, 2001Publication date: May 16, 2002Inventor: Kazuhisa Sato
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Patent number: 6387228Abstract: A device as described for the generation of high purity carbon dioxide (CO2) and hydrogen (H2) by electrochemical decomposition of aqueous solutions of liquid and solid organic acids. A d.c. power source is used to apply a preselected current to an electrochemical cell, consisting of an ion permeable membrane and two electrodes. The generation rate of CO2 and H2 is continuous and proportional to the applied current; it can be stopped instantaneously by interrupting the current. Small Battery operated generators can produce propellant CO2 and H2 to deliver fluids from containers. Other uses include the creation of anaerobic environments in incubation chambers.Type: GrantFiled: August 3, 2000Date of Patent: May 14, 2002Inventor: Henri J. R. Maget
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Patent number: 6372100Abstract: A rich oxygen gas generator includes an electrolytic tank for electrolyzing water to hydrogen and oxygen gases, a mixing tank containing a carbon hydrogen compound solvent and hydrogen and oxygen gases from the electrolytic tank, a pump for pumping air to the mixing tank to speed up evaporation of the carbon hydrogen compound solvent and a burner to receive mixing hydrogen and oxygen gas from the electrolytic tank and compound solvent gas from the mixing tank to produce flame. Flame temperature and heat may be changed and adjusted through controlling flow rate and volume of the pumping air.Type: GrantFiled: August 4, 2000Date of Patent: April 16, 2002Inventor: Yang-Chen Lin
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Patent number: 6368472Abstract: An apparatus for generating electrolytic products, including chlorine and ozone, that includes an electrolytic cell having a cathode in a cathode chamber, an anode in an anode chamber, an electrode chamber separating element disposed between the cathode and anode and sight tubes for visualizing the amount of catholyte and anolyte in the electrolytic chambers is provided. The cathode and the anode include first sides, that are contained within the electrode chambers and participate in the cell's oxidation-reduction reactions, and second sides that project outside of the electrode chambers and which may serve as replacement surfaces for the first sides.Type: GrantFiled: November 3, 1999Date of Patent: April 9, 2002Inventor: Byron Duvon McGuire
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Patent number: 6358398Abstract: A method for separating contaminants from a aqueous source containing contaminants. In one embodiment, the method involves the use of a high powdered oxidant dissolved within the aqueous system. The gas is dissolved within a reservoir in the aqueous solution and the pressure within the reservoir is controllable. This allows maximum contact of the oxidizing dissolved gas with the contaminant material. Once oxidized, the outlet of the reservoir is adapted to permit hydraulic cavitation. The net effect of the cavitation is to induce a foam formation which foam transports a floc into a separate phase from the aqueous solution. In this manner, the process is effectively a dissolved oxidizing gas mass transfer process. In another embodiment, the process may be augmented by electrocoagulation. This involves the use of an electric cell which is disposed within the reservoir containing the oxidant material.Type: GrantFiled: July 25, 2000Date of Patent: March 19, 2002Assignee: Applied Oxidation Technologies (2000) Inc.Inventors: Jacob Halldorson, Lawrence Lambert, Steve Kresnyak
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Publication number: 20020029961Abstract: The present invention provides an electrochemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electrochemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells. Preferably, the electrochemical deposition system includes a spin-rinse-dry (SRD) station disposed between the loading station and the mainframe, a rapid thermal anneal chamber attached to the loading station, and a system controller for controlling the electrochemical deposition process and the components of the electrochemical deposition system.Type: ApplicationFiled: May 29, 2001Publication date: March 14, 2002Applicant: Applied Materials, Inc.Inventors: Yezdi Dordi, Donald J. Olgado, Ratson Morad, Peter Hey, Mark Denome, Michael Sugarman, Mark Lloyd, Anna Marie Lloyd, Joseph Stevens, Dan Marohl, Ho Seon Shin, Eugene Ravinovich, Robin Cheung, Ashok K. Sinha, Avi Tepman, Dan Carl, George Birkmaier
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Publication number: 20020027068Abstract: Improved electrolytic cells are described. The cells comprise the novel electrolyte K2HPO4, or a less alkaline phosphate buffer solution, electrodes having a modified composition, or a combination of the new electrolyte and a modified composition electrode. The K2HPO4 electrolyte, or less alkaline phosphate buffer solution, and modified electrodes can be used in liquid delivery devices which deliver a liquid agent at a constant rate or a controlled variable rate over a period of time.Type: ApplicationFiled: April 11, 2001Publication date: March 7, 2002Inventors: Maya Rosenblum, Gilad Lavi, Gil Yigal
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Patent number: 6352624Abstract: This invention relates to devices for separating oxygen from more complex gasses such as air which contains oxygen, and delivering the separated-oxygen at an elevated pressure for use immediately, or for storage and use later. More particularly, the invention relates to solid state electrochemical devices for separating oxygen from more complex gasses to produce the desired oxygen and delivering the oxygen at elevated pressures up to and exceeding 2000 psig.Type: GrantFiled: May 19, 2000Date of Patent: March 5, 2002Assignee: Northrop Grumman CorporationInventors: Victor P. Crome, Russell F. Hart, Scott R. Sehlin, Vincent L. Sprenkle, Mike E. Friestad
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Publication number: 20020023834Abstract: A fan flow sensor for a gas generating proton exchange member electrolysis cell includes a switching device and a sail disposed in communication with the switching device. The sail is pivotally mounted and movable in response to an airflow from a fan. The sail is further configured to actuate the switching device in response to the airflow from the fan.Type: ApplicationFiled: July 19, 2001Publication date: February 28, 2002Inventors: Lawrence C. Moulthrop, Ricky S. Scott, Charles Bennet McCollough, Richard A. Dubey, A. John Speranza
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Publication number: 20020025457Abstract: A system and method for the storage of electrical energy or of hydrogen, the method includes the steps of (a) electrolysis of water to yield hydrogen, (b) reaction of the hydrogen from step (a) with carbon dioxide to from at least one storage compound; (c) storage of the storage compound; and (d) subsequent conversion of the storage compound back to hydrogen or use of the storage compound to fuel an engine, such as an internal combustion engine, or to generate electricity directly or indirectly. One storage compound is methanol.Type: ApplicationFiled: April 27, 2001Publication date: February 28, 2002Inventors: Peter Jeremy Dodd, Alan Stockwell, Ian Duckels
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Publication number: 20020023836Abstract: A gas/liquid phase separator for an electrolysis cell includes a vessel and a float in operable communication with each other. The vessel includes a fluid inlet and first and second fluid outlets. A fluid stream comprising gas and liquid is received in the vessel through the fluid inlet, and at least a portion of the gas exits the vessel through the second fluid outlet. The float is configured to interface with the first fluid outlet and either maintain or prevent fluid communication across the first fluid outlet when the float is in at least partial contact with the first fluid outlet.Type: ApplicationFiled: July 18, 2001Publication date: February 28, 2002Inventors: Robert H. Byron, Michael J. Brown
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Patent number: 6332972Abstract: An apparatus for decontamination contaminated groundwater in-situ by increasing the quantity of dissolved oxygen in the contaminated groundwater and generating reactive initiators to remediate the contaminated groundwater. The apparatus includes a submersible pump, an electrolytic cell, and a distribution chamber attached to an outlet of the cell. The distribution chamber is vertically oriented and longitudinally-extending from the outlet of the cell. As the groundwater flows across charging plates of the cell, some of the molecules break into their component parts of hydrogen gas and oxygen gas. A selected vertical length of the chamber provides a resident time for the fluid allowing a majority of the gaseous oxygen to transition to dissolved oxygen.Type: GrantFiled: December 17, 1999Date of Patent: December 25, 2001Assignee: H20 Technologies, Ltd.Inventors: John J. Orolin, Vaughn A. Sucevich, Sr., Troy T. Johnson, Scott A. Schorzman
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Patent number: 6290836Abstract: An electrode (1) having an active surface for contacting an electrolyte. The electrode (1) comprises first and second metallic materials (2, 3) arranged to provide a number of first metallic material to second metallic material interfaces at the active surface. The invention also relates to a method of making such an electrode (1) and to an electrolysis cell provided with such an electrode (1).Type: GrantFiled: September 27, 1999Date of Patent: September 18, 2001Inventor: Christopher Robert Eccles
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Publication number: 20010017258Abstract: The present invention provides a technique for removing air remaining on the peripheral edge of a surface to be plated in a conventional wafer plating apparatus, and to provide a wafer plating apparatus capable of performing a more uniform plating up to the peripheral edge of the surface to be plated, and which is further capable of performing plating even with respect to a wafer coated with a seed metal. This wafer plating apparatus includes a wafer clamp 6 for holding a wafer 4, a wafer support member 7 for supporting the peripheral edge of the surface 5 to be plated, and a plating tank 2 which circulates a plating solution while making the plating solution overflow from an upper opening of the tank. The wafer plating apparatus is arranged so as to perform plating, while the surface 5 to be plated is laid face down, being in contact with the surface of the plating solution, in a state in which the wafer 4 is clamped by the wafer clamp 6 and the wafer support member 7.Type: ApplicationFiled: February 26, 2001Publication date: August 30, 2001Applicant: ELECTROPLATING ENGINEERS OF JAPAN LIMITEDInventors: Hirofumi Ishida, Yoshiyuki Harima
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Patent number: 6267864Abstract: Methods and devices for transforming less desirable chemical species into more desirable or useful chemical forms are disclosed. The specifications can be used to treat pollutants into more benign compositions and to produce useful chemicals from raw materials and wastes. The methods and devices disclosed utilize continuous or temporary pulse of electrical current induced by electromagnetic field and high surface area formulations. The invention can also be applied to improve the performance of existing catalysts and to prepare novel devices.Type: GrantFiled: April 6, 1999Date of Patent: July 31, 2001Assignee: Nanomaterials Research CorporationInventors: Tapesh K. Yadav, Bijan K. Meramadi
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Patent number: 6258220Abstract: The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells. Preferably, the electro-chemical deposition system includes a spin-rinse-dry (SRD) station disposed between the loading station and the mainframe, a rapid thermal anneal chamber attached to the loading station, and a system controller for controlling the electro-chemical deposition process and the components of the electro-chemical deposition system.Type: GrantFiled: April 8, 1999Date of Patent: July 10, 2001Assignee: Applied Materials, Inc.Inventors: Yezdi Dordi, Donald J. Olgado, Ratson Morad, Peter Hey, Mark Denome, Michael Sugarman, Mark Lloyd, Joseph Stevens, Dan Marohl, Ho Seon Shin, Eugene Ravinovich, Robin Cheung, Ashok K. Sinha, Avi Tepman, Dan Carl, George Birkmaier
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Patent number: 6258221Abstract: A flame adjusting device includes a tank for receiving a fluid and includes an upper portion and a lower portion coupled to a coupler with hoses. The coupler is coupled to a gas generator. A control device is disposed between the coupler and an upper hose and is used for controlling the gas to flow through the hoses and to adjust the gas flowing out of the tank. The gas is a gaseous fuel and is supplied to a facility for generating a flame. The temperature generated by the flame may thus also be adjusted.Type: GrantFiled: December 27, 1999Date of Patent: July 10, 2001Inventor: Wen Chang Lin
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Patent number: 6251251Abstract: An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface.Type: GrantFiled: November 16, 1998Date of Patent: June 26, 2001Assignee: International Business Machines CorporationInventors: Cyprian E. Uzoh, Panayotis C. Andricacos, John Owen Dukovic, Robert P. Westerfield, Jr.
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Patent number: 6193858Abstract: A vessel for contacting a plurality of objects with a fluid and including at least one bottom wall inclined downwardly from at least one sidewall to an inlet for providing an upwardly directed stream of fluid, and a distribution shield arranged in spaced relation to the bottom wall. The fluid stream causes the objects to flow upward from a moving bed thereof to a disengaging position. The distribution shield has an upper surface inclined downwardly and extending away from the vicinity of the object disengaging position to a return position such that disengaged objects fall on the upper surface of the distribution shield and move downward thereon to the return position from which they fall onto an upper portion of the inclined bottom wall and move downward thereon to a feed position.Type: GrantFiled: December 21, 1998Date of Patent: February 27, 2001Inventors: George Hradil, Edward Hradil
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Patent number: 6183611Abstract: A fluid containment ring for use in a processing chamber used to deposit a material onto a semiconductor wafer and/or remove material from a wafer by subjecting the wafer to an electric field and an electrolyte is described. The fluid containment ring is located at the base of the processing chamber in close proximity to the outside edge of the wafer being processed in the processing chamber. After each processing step is completed, the used electrolyte is diverted from the processing chamber into the fluid containment ring for containment such that no electrolyte contacts the unprocessed side (or back) of the wafer. One or more drains coupled to the fluid containment ring provide means for disposal and/or recirculation of the electrolyte.Type: GrantFiled: July 17, 1998Date of Patent: February 6, 2001Assignee: CuTek Research, Inc.Inventors: Chiu H. Ting, William H. Holtkamp
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Patent number: 6165332Abstract: The invention relates to an electrochemical half cell (1) comprising at least one electrode space (3, 15) for receiving an electrolyte (100), a gas space (2), and at least one gas diffusion electrode (14) as anode or cathode separating the gas space (2) and electrode space (3, 15), in which the gas space (2) is subdivided into two or more superimposed gas pockets (2a, 2b), in which gas inflow and gas outflow takes place through separate openings (7) and (12a, 12b, 12c, 12d) and the pressure on the electrolyte side of the electrode (14) is compensated by an opening in the respective gas pocket (2a, 2b) for the electrolyte.Type: GrantFiled: August 26, 1999Date of Patent: December 26, 2000Assignee: Bayer AktiengesellschaftInventors: Fritz Gestermann, Hans Dieter Pinter
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Patent number: 6159349Abstract: An electrolytic cell for producing a brine containing hydrogen peroxide is disclosed. Units for hydrogen peroxide production 3 and units for water electrolysis 2 are alternately arranged in the same electrolytic cell 1. Electrolysis is conducted while supplying hydrogen gas and oxygen gas generating in the respective water electrolysis units to a gas diffusion anode 11 and a gas diffusion cathode 13 of each unit for hydrogen peroxide production, to thereby obtain a brine containing hydrogen peroxide in a high concentration. Furthermore, because the anode of the hydrogen peroxide production units is a hydrogen gas diffusion anode having a reduced oxidizing ability, halogen ions contained in the seawater do not yield harmful halogenated organic substances.Type: GrantFiled: November 3, 1998Date of Patent: December 12, 2000Assignee: Permelec Electrode Ltd.Inventors: Shuhei Wakita, Yoshinori Nishiki, Takayuki Shimamune, Yasuo Nakajima, Masaaki Katoh, Yoshiyuki Kawaguchi, Takahiro Ashida, Masaharu Uno
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Patent number: 6153083Abstract: The invention relates to an electrolyzer for the electrolysis of water in hydrogen and oxygen with a number of electrolytic cells, each containing an anode and a cathode, connected in series in a cell block surrounded by a pressure vessel. At one end of the cell block is a first electrode, and at the opposite end of the cell block is a second electrode. Both are connected with leading-in cables, which run through the pressure vessel and conduct the electric current to the cell block, the interior of the pressure vessel being filled with pressurized water surrounding the cell block. In accordance with the invention, it is envisaged that the first electrode is placed inside the cell block so as to be electrically isolated, by encapsulation, with respect to the pressurized water, and that there is a channel, sealed against the pressurized water, that leads from the cell block through the pressurized vessel to the outside.Type: GrantFiled: August 19, 1999Date of Patent: November 28, 2000Assignee: MTU Motoren-und Turbinen-Union Friedrichshafen GmbHInventors: Hans Hofmann, Lutz Mueller-Froelich
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Patent number: 6153058Abstract: Water-derived fuel gas. An underwater carbon arc operated in the absence of hydrocarbons results in a mixture of gases, being non-self-combustible but combustible as a fuel gas in the presence of air, and comprising gaseous hydrogen in major amount and carbon oxides in minor amount, predominantly carbon monoxide. The fuel gas is adapted along with air to run an internal combustion engine, and along with oxygen to operate a cutting or welding torch.Type: GrantFiled: May 26, 1995Date of Patent: November 28, 2000Inventor: William H. Richardson, Jr.
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Patent number: 6126794Abstract: An apparatus for producing orthohydrogen and/or parahydrogen. The apparatus includes a container holding water and at least one pair of closely-spaced electrodes arranged within the container and submerged in the water. A first power supply provides a particular first pulsed signal to the electrodes. A coil may also be arranged within the container and submerged in the water if the production of parahydrogen is also required. A second power supply provides a second pulsed signal to the coil through a switch to apply energy to the water. When the second power supply is disconnected from the coil by the to switch and only the electrodes receive a pulsed signal, then orthohydrogen can be produced. When the second power supply is connected to the coil and both the electrodes and coil receive pulsed signals, then the first and second pulsed signals can be controlled to produce parahydrogen.Type: GrantFiled: June 26, 1998Date of Patent: October 3, 2000Assignee: Xogen Power Inc.Inventor: Stephen Barrie Chambers
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Patent number: 6123815Abstract: An apparatus for use in at least one of a plating and a pretreatment for plating, comprising:(A) a vibrationally stirring apparatus for a treatment bath, the vibrationally stirring apparatus (A) being provided with vibration generating means having an vibration motor, and vibrationally stirring means for vibrating a vibration vane at an amplitude of 0.5 to 3.0 mm and at a vibrational frequency of 200 to 800 times per minute, the vibration vane being fixed in one stage or in multistage to a vibrating bar which vibrates in the treatment bath interlockingly with the vibration generating means;(B) an aeration apparatus for the treatment bath;(C) an apparatus for swinging an electrode bar for suspending the plating target thereon; and(D) an apparatus for applying vibration to the electrode bar.Type: GrantFiled: January 14, 2000Date of Patent: September 26, 2000Assignee: Nihon Techno Kabushiki KaishaInventor: Ryushin Omasa
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Patent number: 6113759Abstract: An anode assembly includes a perforated anode and an electrical contact assembly attached to the anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface. The contact assembly includes a closed or substantially closed cylinder member of titanium or titanium alloy, a copper lining or disk disposed within the cylinder, and a titanium or titanium alloy post fixed and in electrical engagement with the lining or disk.Type: GrantFiled: December 18, 1998Date of Patent: September 5, 2000Assignee: International Business Machines CorporationInventor: Cyprian E. Uzoh
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Patent number: 6096178Abstract: The invention provides a water electrolyzer device for generating a premixed hydrogen and oxygen gas mixture and for directing said gas mixture into a flame ionization detector, the device including a water container for performing water electrolysis; an electrode for passing electrolysis current in the water; and a water mist and vapor pressure management system for the elimination of water mist and reduction of the water relative humidity below the saturation point, the system being located between the water electrolyzer and the flame ionization detector. A method based on water electrolysis for the provision of a combustible gas mixture for the operation of a flame ionization detector is also provided.Type: GrantFiled: August 24, 1998Date of Patent: August 1, 2000Assignee: Aviv AmiravInventors: Aviv Amirav, Nitzan Tzanani
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Patent number: 6080293Abstract: An electrolytic test machine is used for a corrosion resistance test for a test material comprised of a metal blank and a coating film. The electrolytic test machine is constructed so that an adverse influence, due to chlorine gas generated during a test, can be inhibited. The electrolytic test machine includes an electrolytic cell in which an aqueous solution of NaCl is stored so that a test material is immersed in the aqueous solution of NaCl. An electrode is immersed in the aqueous solution of NaCl. A DC power source supplies electric current between the electrode and the test material. A chlorine gas treating device collects chlorine gas which is generated with electrolysis of the aqueous solution of NaCl and which is released out of the aqueous solution of NaCl along with the aqueous solution of NaCl. The chlorine gas treating device includes a treating pipe line, a suction pump mounted on the treating pipe line, and a chlorine gas purifying member.Type: GrantFiled: June 10, 1997Date of Patent: June 27, 2000Assignees: Honda Giken Kogyo Kabushiki Kaisha, Mitsuba CorporationInventors: Toshihiro Takeuchi, Tadashi Imanaka, Shigeru Akutsu, Keiji Kiuchi, Yoshio Takada
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Patent number: 6068741Abstract: A gas generator includes a housing for receiving an electrolyte and has an outlet duct for collecting the gas. A number of cells are disposed in the housing for forming a number of spaces between the cells. A tube and a pipe are coupled together by a conduit and are engaged through the cells and each has a number of holes communicating with the spaces for allowing the electrolyte to be drawn out of the housing to a cool device and for allowing the electrolyte to be circulate into the housing via the pipe. An indicator is used for indicating the level of the electrolyte.Type: GrantFiled: September 2, 1998Date of Patent: May 30, 2000Inventor: Wen Chang Lin
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Patent number: 6056858Abstract: A device for gasifying water conducted in a subsystem of a technical installation with hydrogen includes an electrolysis unit connected in the subsystem for decomposing some of the water conducted therein into hydrogen and oxygen, and a dissipation system connected to the electrolysis unit for dissipating oxygen received therefrom.Type: GrantFiled: September 25, 1998Date of Patent: May 2, 2000Assignee: Siemens AktiengesellschaftInventor: Anwer Puthawala
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Patent number: 6054027Abstract: A filtering mechanism for especially well suited for corrosive mists which are generated from electro-refining systems. A layer of bristles forming a brush is secured to an electrode within the electro-refining system. As the electro-refining system produces a mist of corrosive chemicals above the slurry, the mist rises through the bristles. As the mist passes through the bristles, the corrosive chemical adheres to the bristles; hence, the corrosive chemical does not pass into the surrounding environment. Periodically, the bristles are washed to remove the corrosive chemicals. In one embodiment of the invention, the edge between the electrodes and the wall of the slurry bath are partially sealed with a pliable member which assists in directing the mist through the bristles.Type: GrantFiled: August 7, 1998Date of Patent: April 25, 2000Inventor: William Arthur Ebert