Abstract: A wafer container for supporting semi-conductor wafer disks and for interfacing with processing equipment and methods for constructing the same. Wafer supports are positioned within an enclosure portion, the wafer supports having a plurality of vertically stacked shelves for defining slots. The wafer supports are secured within the enclosure portion rigidly at the bottom margin and resiliently at the top margin. In preferred embodiments resilient plastic spring members extend between the closed top and the wafer supports to substantially constrain lateral or forward-back movement of the wafer supports with respect to the closed top and to permit some vertical movement of the wafer support with respect to the closed top. The spring members may be configured as a leaf spring integral with an extending from the top margin of each wafer support.

Abstract: A container is provided for storing a lithographic printing mask. A first container section is formed of a sturdy material which defines a central inner recess area that is shaped to house a mask and to hold outer edges of a mask without touching a pattern on the mask. A second identical container section is placed against the first container section with a mask housed within recesses of, both to form a container which has a common pressure level all around and therein. A higher pressure level is then applied outside the container causes the first and second sections of the container to be held together. To remove the mask from the container, the pressure outside the container is reduced to substantially the pressure level inside the container and the first and second sections are pulled apart.

Abstract: A PDP module packing apparatus includes PDP module packing units, each unit including a support member and a coupling unit for coupling a PDP module to a respective support member for supporting and preventing deformation of the PDP module; and shock absorbing units for receiving and supporting several PDP module packing units, a respective shock absorbing unit being locatable at each of upper and lower ends of the PDP module packing units and receiving one of the upper and lower ends for maintaining spacing between PDP module packing units, and absorbing mechanical shock. Thus, PDP modules can be safely shipped to a destination without receiving external vibration and shock in the PDP module packing apparatus.

Abstract: Disclosed is a cassette for receiving glass substrates therein. The cassette includes lower and upper rectangular plates, support bars vertically installed between the lower and upper rectangular plates and having a plurality of first gap maintenance rings aligned lengthwise along the support bars, and glass substrate stoppers vertically located between the lower and upper rectangular plates at positions corresponding to both longitudinal sides of the lower and upper rectangular plates. The glass substrate stoppers have second gap maintenance rings aligned lengthwise along the glass substrate stoppers while forming a uniform interval therebetween. The glass substrates are prevented from being broken caused by a collision of the glass substrates against an unloading robot, so a yield rate of thin film transistor liquid crystal display devices is improved.

Abstract: A flexible substrate storage equipment of the present invention includes at least a pair of opposed members that constitute an outer frame of a storage equipment main body, wherein the pair of opposed members are disposed so as to maintain a predetermined interval to wedge a plurality of flexible substrates in between to hold them in a shape of a curve. As a result, a flexible substrate storage equipment for surely storing and holding a plastic substrate or other flexible substrate with a simple structure, and a storing method of such substrate can be realized.

Abstract: A wafer carrier for transporting or holding wafers in a horizontal axially aligned arrangement has minimal four point regions of wafer support at the edge portion of the wafers. A preferred embodiment is an H-bar carrier with a plurality of slots defined by elongate wafer guides on the carrier sidewalls. Upwardly extended protrusions support the wafers with minimal contact with the carrier. The protrusions are sufficient in number and configuration to preclude contact with the top surface of the guides.

Abstract: A packing structure supports an article in a carton, especially a generally trapezoidal vehicle windshield, to be shipped in a corrugated craft carton. The article (possibly a windshield) is suspended by spacers, preferably made of integral die cut and folded blanks, that form resilient cradles along the elongated edge of the article. The carton can be rectilinear, having at each end two spaced side walls coupled by an end wall, generally forming an internal channel portion of the carton, with corners at junctions of the end wall and the side walls. A spacer is arranged to fit into this channel, so as to bear against the sidewalls and the end wall. The spacer defines an elongated substantially V-shaped fold between two V-wall panels. The edge of the article rests in a bottom of the V-shaped fold. The spacer also has two bearing legs that can be coextensive with the V-wall panels. These legs stand in the corners of the internal channel of the carton.

Abstract: A wafer carrier for carrying a plurality of axially aligned thin circular wafers. The wafer carrier has a framework portion formed from a pair of end members connected by a plurality of side support members. A pair of opposing sidewall assemblies is positioned between the pair of end members, and is attached to at least one side support member. Each sidewall assembly has a plurality of shelves defining a plurality of slots for receiving a wafer. The sidewall assemblies are formed from a plurality of stacked together individual shelf members. Each shelf member has a body portion with an upper surface and a lower surface. The lower surface has a plurality of pegs which are positioned to be received by a plurality of apertures formed in the upper surface of an immediately adjacent individual shelf member.

Abstract: A wafer container and improved door. The wafer container door has a latch mechanism cover adapted to retain and guide the latch mechanism components. The latch mechanism cover is form fitted to the latch mechanism components and may have apertures, creating a cover with an open architecture. The open architecture is of benefit for making the area under the mechanism cover more easily cleanable.

Abstract: A storage cassette (1) for accommodating substrates includes: a box-shaped case (10) having a space for retaining substrates and defining an entrance for inserting the substrates into the space; and a pair of stopping mechanisms (60) each including a top first locating mechanism (30), a bottom second locating mechanism (50) and a stopper (40) engaged therebetween. The stopping mechanisms are located at opposite sides of the entrance. Each locating mechanism defines a first locating means, a second locating means closer to a corresponding side of the case than the first locating means, and a connecting means interconnecting the first and second locating means. In a first position, the stopper is engaged in the first locating means, and substrates accommodated in the cassette cannot be displaced; in a second position, the stopper is engaged in the second locating means, and the substrates can be freely slid out from the space.

Abstract: A wafer cassette for storing and transporting wafers that is equipped with sensors such as piezoelectric sensors or capacitance sensors on the surface of the dividers for sensing the presence or absence of wafers positioned on top of the dividers is described. The sensors are capable of detecting any defective placement of wafers such as a cross-slot placement or a double placement such that the condition can be corrected by a machine operator and a wafer cassette can be stopped before it is loaded into an internal buffer of a process machine.

Abstract: A substrate transfer apparatus, for removing a substrate from a substrate accommodating tray accommodating the substrate in a horizontal state, includes a plurality of support pins for raising the substrate accommodated in the substrate accommodating tray above the substrate accommodating tray. The substrate accommodating tray includes a plurality of openings through which the plurality of support pins are to be inserted. The plurality of support pins are moved up relative to the substrate accommodating tray and are inserted through the plurality of openings of the substrate accommodating tray, so as to raise the substrate. The plurality of support pins each have a length sufficient to be vertically inserted through a plurality of substrate accommodating trays stacked vertically.

Abstract: A receptacle for receiving plates having a sensitive surface is disclosed which is particularly suited for receiving glass plates having a sensitized surface. The receptacle comprises a container part (12) having four walls (16, 18) and a bottom (24), whereby a hollow space is circumscribed. The receptacle further comprises a removable top (14) for closing the container part (12). The container part (12) comprises guide grooves (28) located at two opposite walls (16, 18) for receiving plates (56). A flexible element (40) formed as a bent tongue is provided integrally with the bottom or cover for securing plates received within the receptacle (10) against movement in longitudinal direction.

Abstract: A memory device protective carrier is disclosed for protecting small memory devices. The container includes a non-deformable, rigid exterior case having first and second shells and a securing mechanism to adjustably secure the shells in an open or closed position so that a containment chamber is defined between the shells in the closed position. A deformable, resilient receiving insert and a resilient securing insert are secured respectively within the first and second shells. Sealing lips of the inserts are compressed in the closed position to form a fluid seal so that a memory device secured within the containment chamber is protected by the rigid case and resilient inserts against damage from impact injury or fluid contaminants.

Abstract: A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafers. Additionally, the side walls of the shell have recessed portions with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to lock into place in the recesses on the side walls of the carrier. Attachment of the handles to the side walls is accomplished without breaks between the interior and exterior of the module and without separate fastners.

Abstract: A glass sheet, and a shipping case for the sheet are disclosed. The shipping case comprises two paperboard sheets with central portions which are substantially coextensive with and on opposite sides of the major surfaces of the sheet, and pairs of opposed, substantially coextensive flaps which surround the central portions. An adhesive prevents movement of the opposed flaps relative to one another and of the sheet within the case. In a preferred embodiment the flaps of one of the pairs are integral with one another and are disposed on opposite sides of a fold line. In another preferred embodiment, the shipping case additionally includes at least one flap which is structurally integral with one of the paperboard sheets along an edge thereof, and is folded around a peripheral edge of the article and adhered to the exterior surface of the central portion of the other sheet.

Abstract: The present invention relates to a supporting plate (10) and a cassette (20) for accommodating substrates using the same. The supporting plate includes a main body (11) and at least two stiff shafts (13). The main body includes a plurality of wing panels (15) extending from the main body and at least two through grooves (18). A space interval (17) is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions (151) extending from the free side of each wing panel, and the wing panels slope down. The two stiff shafts being received in the two through grooves.

Abstract: A data package assembly includes at least one data card having a first substrate with opposite faces, and indicia correlated with a prepaid account. A package has a second substrate separate from the first substrate, the data card being detachably connected to the second substrate. Personal identifying indicia correlated with the account are concealed by the package. In addition, first account verification indicia on the card, and second account verification indicia on the package, both different from the personal identifying indicia and both correlated with the same account, are visibly exposed, the package including an aperture visibly exposing the first account verification indicia.

Abstract: A door for a wafer carrier having a latching mechanism with a rotatable actuating member. The rotatable actuating member is actuated from outside the wafer carrier using a key inserted into a key slot in the rotatable actuating member. The key slot is formed in an hourglass shape and comprised of abrasion resistant material to reduce generation of particulate contaminants.

Abstract: A rack for shipping and storing a plurality of glass panels includes a frame which holds a bottom support and a rear support in planes that intersect at substantially a right angle. The bottom and rear supports have notches to receive edges of the panels. The rear support has a plurality of channels with a separate retainer slidably received in each channel for engaging an upper edge of a panel placed in the rack. A spring loaded mechanism maintains the retainers in engagement with the respective panel, thereby holding the panels in the rack.

Abstract: Various methods and apparatus are provided for merging and demerging pairs of disks. In one embodiment, pairs of merged disks are first separated and then transferred to separate cassettes such that all of the disks in the separate cassettes are oriented in the same way within the cassette. In a second embodiment, two separate cassettes of substrate disks are combined into a single cassette. The merged substrate disks may be positioned in gap merge pairs, contact merge pairs or may be equally spaced in the cassette depending upon the orientation needed for the next process.

Abstract: A semiconductor wafer cassette has a first side wall, a second side wall opposite the first side wall, a front surface, and a back surface opposite the front surface. A body defines an internal bay portion with slots for vertically receiving wafers, each slot of the internal bay portion having one support slab. The body also includes two parallel legs for supporting the cassette and a handle for handling the cassette.

Abstract: A packaging system for packing and transporting CRT components, having a base portion, a top portion, and a center portion arranged between the base portion and the top portion. A first layer of CRT components can be arranged in retaining cells of the base and a second layer of CRT components can be arranged between the center portion and the top portion. A method for packaging CRT funnels or CRT face panels in a packaging system. The components can be formed from expandable foam material.

Abstract: A display substrate accommodating tray includes a bottom section for mounting a display substrate thereon in a substantially horizontal fashion; and a frame for surrounding at least a part of the display substrate when the display substrate is mounted on the bottom section. A plurality of openings are formed in the bottom section through which a plurality of supporting members are to be inserted for, when the display substrate is mounted on the bottom section, raising the mounted display substrate above the bottom section.

Abstract: A container which is formed from a one-piece blank so as to define a pair of side wall structures which support a fragile article in spaced relation from all external sides of the container. The side wall structures are folded so as to form generally tubular configurations which define respective elongate channels disposed in opposed relation with one another on opposite sides of the container. Opposite edges of the article are inserted into the respective channels so as to be spaced from the top, bottom and all sides of the container to provide protection against impact, for example during storage or transport.

Abstract: The present invention is shipping and storage container for storing and transporting a plurality of disc shaped objects, such as wafers and the like, while protecting the items from vibration, abrasion, impact, particulation, static electricity, and outgassing. Although the carrier of the present invention may be configured to carry many kinds of thin disc shaped objects, the invention is particularly suited for safely storing and transporting wafers. In its broadest sense, the shipping container of the invention comprises a separable base and cover. The base is configured to hold a plurality of wafers stacked one on top of the other within a cylindrical storage area. The upper wafers are supported by wafers below, and ultimately by the flat bottom of the container. The cover is configured to fit over portions of the base to enclose the stored wafers.

Abstract: A packaging box with cleaning function comprising a carrier in tray shape and a top cover, several slots are on the carrier, several indentations are vertically on both sides of the slot, every corresponding pair of the indentations is to place a optical coating lens; the bottom of the slot has a long open, the bottom is inclined downward; a plurality numbers of small hole are on top of the carrier. The optical coating lenses can be placed into indentations directly for supersonic wave cleaning or washing, and drying up, then have the top cover on to achieve simplified and fast packaging.

Abstract: The presser member (1) of the present invention is shaped from different materials for the contacting part (5) to press-hold the precision substrates (15) and for the parts excepting the said contacting part (5). The presser member (1) is shaped from a thermoplastic elastomer for a rectangular frame part, a contacting part (5) formed in a pair of structuring parts (4) provided in such a fashion as to inwardly extend from each of a pair of oppositely facing two sides and a second contacting part (11) formed in the extension peripheral part extending via a supporting part (10), the other parts being shaped from a thermoplastic resin.

Abstract: A wafer shipping and storage container includes a base, a tray, and a lid. The base is rigid providing a platform for the tray. The base has a tray recess dimensioned to be slightly larger than the tray. The tray recess has a plurality of elastic pillars attached that project away from the top surface. Each pillar is encompassed by an elastic stop shorter than the pillars. The tray has a wafer recess dimensioned to accept a disk. The perimeter of the top surface has a plurality of holes passing through the tray that correspond in size and placement to accept the pillars from the base. An additional adhesive recess may be recessed within the disk recess. The adhesive recess is sized to contain a gel adhesive or other releasable adhesive containing a plurality of support strands, which may be used to support and hold the disk within the tray. One or more vacuum openings may extend to the adhesive recess to pull the adhesive away from the disk when the disk is being removed from the tray.

Abstract: A reticle carrier used in semiconductor manufacture. The carrier includes a bottom cover and a top cover having a transparent window. A protective lid may also be included. The box includes ports to allow nitrogen gas to enter and purge the inside. The transparent window is used for inspection and photochemical clean. However, since no material is available which can suitably handle smaller wavelength radiation, the reticle is removed from the carrier when exposure at these wavelengths is required.

Abstract: A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door.

Abstract: A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite end walls each have a U-shaped recess extending downwardly from the open top, a top cover with a rectangular top portion and two end portions extend downwardly to cover the U-shaped recess. The top cover latches to the cassette by way of a latching mechanism which includes a living hinge, an extension portion, and a hook portion all on each end portion. The hook portion cooperates and engages with a cooperative catch member on the cassette. The extension member is under tension to secure the top cover in place. In an alternate embodiment, recesses on the extension portion connect to nubs on the cassettes or on the bottom cover to secure the top cover in place.

Abstract: The invention includes both a lens box blank and a lens box. The lens box blank that is folded into a lens box may, for example, comprise: a cross-bar alignment of box segments and a vertical stem alignment of box segments; the vertical stem alignment of segments including at least a front flap, a top flap, a bottom flap, and a rear flap separated by folding lines between flaps; the cross-bar alignment of box elements comprising in symmetry about the bottom flap at least two side flaps, at least two support frame top flaps, at least two lens support frame flaps with an opening in each lens support frame flap to nestle a lens, and at least two lens support frame securing flaps. The lens box blank may have at least one of the rear flap segment and the bottom flap has a flap extension thereon. The lens box blank may also have the lens box support frame flap openings as at least partially arcuate.

Abstract: A cassette for releasing substrates is disclosed in the present invention. The cassette includes a frame, and a plurality of support plates protruding from both lateral sides of the frame whereon the support plates have a width and length large enough to support the substrates without a bending and to provide a releasing space for a robot arm from the cassette after the robot arm transports the substrate on the support plates.

Abstract: A substrate transport container is provided. Substrate transport container includes a container and a cover. The container includes an open top portion and a closed bottom portion, each having a perimeter greater than the middle portion of the container. The cover further includes a carrier, which is used for transporting information pertaining to the substrate.

Abstract: Methods and apparatus for the point-of-sale packaging of a card are disclosed. A package in accordance with an exemplary embodiment of the present invention comprises a pocket for receiving the card and a passageway communicating with a pocket. The package preferably also includes at least one locking tab for selectively obstructing the passageway. A method in accordance with present invention may include the steps of inserting the card into the pocket so that the card overlays the at least one locking tab, urging the package to assume a generally bent shape, and allowing the package to assume a generally planar shape in which the at least one locking tab overlays the card.

Abstract: A frame of a wafer boat is retrofitted with brace assemblies. The frame has left and right vertically extending, horizontally spaced supports. Each support has a plurality of slots above one another. A plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers in respective ones of the slots of the left support and respective right edges of the wafers in respective ones of the slots of the right support. Each brace assembly includes a plurality of braces. Each brace has a respective upper surface in a respective position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted.

Abstract: A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door.

Abstract: A wafer cassette pod that is equipped with at least one position sensing device to avoid the accidental falling of a cassette pod door resulting in wafer breakage. The wafer cassette pod is provided with at least one position sensing device mounted in the sidewall of the cassette pod with a finger member protruding from the end surface of the sidewall forming the cassette pod opening. When the wafer cassette pod is not properly positioned, or docked on the loadport, the spring force of the position sensing device pushes the cassette pod away from the entrance of the loadport and thus, preventing the accidental falling of a cassette pod poor resulting in possible wafer breakage problems.

Abstract: A rack for shipping and storing a plurality of glass panels includes a frame which holds a bottom support and a rear support in planes that intersect at substantially a right angle. The bottom and rear supports have notches to receive edges of the panels. The rear support has a plurality of channels with a separate retainer slidably received in each channel for engaging an upper edge of a panel placed in the rack. A spring loaded mechanism maintains the retainers in engagement with the respective panel, thereby holding the panels in the rack.

Abstract: A third disk holding member 13 is interposed between the inner surfaces of first and second disk holding members 11 and 12 so as to be movable relative to the first and second disk holding members 11 and 12.

Abstract: A door for a wafer carrier having a latching mechanism with a rotatable actuating member. The rotatable actuating member is actuated from outside the wafer carrier using a key inserted into a key slot in the rotatable actuating member. The key slot is formed in an hourglass shape and comprised of abrasion resistant material to reduce generation of particulate contaminants.

Abstract: In a preferred embodiment of the invention, a wafer retaining arrangement is incorporated into a transport module suitable for 300 mm wafers. The wafer retaining arrangement attaches to an interior of a door of the transport module and includes a framework, and a first and a second plurality of wafer engaging members that secure semiconductor wafers within the transport module and that extend laterally from respective first and second sidewall portions and are preferably parallel to one another. Each of the wafer engaging members includes an arm portion and a wafer engagement head spaced laterally from the respective sidewall portion, wherein the wafer engagement heads of the first plurality of wafer engaging members are in close proximity to the wafer engagement heads of the second plurality of wafer engaging members.

Abstract: A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.

Abstract: Methods and apparatus for handling material for the insulating glass industry are disclosed. One method of handling material for the insulating glass industry in accordance with the present invention includes the step of arranging a plurality of bars into a plurality of stacks with adjacent stacks defining spaces dimensioned to receive a bar engaging member. The stacks of bars may then be transported to a desired destination. A bar engaging member may be inserted into a space defined by the stacks, and one or more bars may be grasped using the bar engaging member. A container for handling material for the insulating glass industry is also disclosed. The container may advantageously include a plurality of prearranged bar locating members configured to hold a predetermined type of bar stock.

Abstract: A shipping container for holding a plurality of parallel panels, the shipping container including a floor, a generally upright rear wall, and a frame supporting the floor and the rear wall at right angles to each other for vertically supporting the parallel panels. The edges of the panels can be supported by the floor and rear wall, with the panels being supported in parallel planes perpendicular to the planes of the rear wall and floor. The floor can have numerous parallel grooves for receiving the panel edges and numerous upwardly protruding holding members slidably disposed along a direction transverse to the floor grooves and received panel edges. The holding members can have a relaxed position for permitting removal of the panels and the gripping position for inhibiting movement of the panels.

Abstract: A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the second substantially U-shaped plate. Several retention springs are attached to the first substantially U-shaped plate. The retention springs hold the semiconductor cassette reducer in a FOUP (front opening unified pod).

Abstract: A transportation container comprises: a container body for housing a plurality of semiconductor wafers; a detachable lid adapted to engage in and cover an open front face of the container body via a seal gasket; and a locking mechanism adapted to fix the lid engaged into the open front face of the container body. The locking mechanism has a pair of protrusions formed at the opposing sides of a rim of the open end face of the container body. The locking mechanism also has a pair of clamp plates which are pivotally supported on the opposing sides of the lid to clamp the protrusions. Each protrusion has, on the back thereof, a groove with a semi-circular cross-section to be clamped. Each clamp plate has attachment shafts for the lid formed in one end of the clamp plate. The clamp plate also has operated parts for automatized operation formed in the other end of the clamp plate. The operated part has a Y-shape in cross-section.

Abstract: A wafer container for supporting semi-conductor wafer disks and for interfacing with processing equipment and methods for constructing the same. Wafer supports are positioned within an enclosure portion, the wafer supports having a plurality of vertically stacked shelves for defining slots. The wafer supports are secured within the enclosure portion rigidly at the bottom margin and resiliently at the top margin. In preferred embodiments resilient plastic spring members extend between the closed top and the wafer supports to substantially constrain lateral or forward-back movement of the wafer supports with respect to the closed top and to permit some vertical movement of the wafer support with respect to the closed top. The spring members may be configured as a leaf spring integral with an extending from the top margin of each wafer support.

Abstract: A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.