Fragile Or Sensitive (e.g., Glass Mirror) Patents (Class 206/454)
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Patent number: 7188736Abstract: A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main legs in a direction of the long sides or the short sides of the substrate, a first side support bar coupled to the first and second protrusions and supporting an edge of one long side or one short side of the substrate, a second side support bar coupled to the third and fourth protrusions and supporting an edge of the other long side or the other short side of the substrate, at least one auxiliary leg disposed between the first and second main legs, or the second and third main legs, or the third and fourth main legs, or the fourth and first main legs, and at least two central support bars coupled to the auxiliary leg, extended parallel to the long sides or the short sides of the substrate, and supporting a central portion of the substrate.Type: GrantFiled: June 28, 2004Date of Patent: March 13, 2007Assignee: LG.Philips LCD Co., Ltd.Inventor: Lee-Ho Choi
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Patent number: 7175026Abstract: A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite end walls each have a U-shaped recess extending downwardly from the open top, a top cover with a rectangular top portion and two end portions extend downwardly to cover the U-shaped recess. The top cover latches to the cassette by way of a latching mechanism which includes a living hinge, an extension portion, and a hook portion all on each end portion. The hook portion cooperates and engages with a cooperative catch member on the cassette. The extension member is under tension to secure the top cover in place. In an alternate embodiment, recesses on the extension portion connect to nubs on the cassettes or on the bottom cover to secure the top cover in place.Type: GrantFiled: April 2, 2003Date of Patent: February 13, 2007Assignee: Maxtor CorporationInventor: Bruce Hachtmann
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Patent number: 7172068Abstract: A circular saw blade storage apparatus includes a panel having a first edge, a second edge, a third edge and a fourth edge. The first and second edges are positioned opposite of each other. A first housing is hingedly coupled to the first edge and a second housing is hingedly coupled to the second edge. The first and second housings each have a top side having a plurality of slots therein. The first and second housings may each be positioned on the panel so that the top sides face each other. Each of a plurality of saw blades may be removably extended into one of the slots so that the blades are stored within the housing.Type: GrantFiled: March 11, 2004Date of Patent: February 6, 2007Inventors: Jeffrey M. Griffin, Sandra L. Perez
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Patent number: 7168564Abstract: A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features.Type: GrantFiled: March 29, 2005Date of Patent: January 30, 2007Assignee: Entegris, Inc.Inventors: Sanjiv M. Bhatt, Shawn D. Eggum
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Patent number: 7159719Abstract: A thermophoretic source may be contained within the packaging of a reticle during transport or otherwise to protect the reticle from particle contamination. For example, in advanced lithography technologies, very small particles may be thermophoretically attracted away from the reticle during transport so that cleaning on arrival may not be necessary in some cases.Type: GrantFiled: July 31, 2003Date of Patent: January 9, 2007Assignee: Intel CorporationInventor: Janice M. Golda
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Patent number: 7156233Abstract: A tamper protected printed circuit board assembly including a printed circuit board and a tamper wrap attached to the printed circuit board. The tamper wrap includes a plurality of side tabs extending from a main body portion and a plurality of corner protection flaps extending from the side tabs. The tamper wrap covers the entirety of a first surface of the printed circuit board and at least a portion of a second surface opposite the first surface of the printed circuit board. Each of the side tabs covers at least a portion of one of the side walls of the printed circuit board and each of the corner flaps is folded around and covers a respective one of the corner edges of the printed circuit board. The printed circuit board may have a plurality of corner sentinels mounted adjacent to the corners of a surface thereof for protecting such corners.Type: GrantFiled: June 15, 2004Date of Patent: January 2, 2007Assignee: Pitney Bowes Inc.Inventors: Douglas A Clark, Kjell A Heitmann, Paul G Perreault
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Patent number: 7147107Abstract: A platform (40) has a rigid body with an adjustable thickness (t) to selectively occupy any remaining space within a container (20) used for packaging items such as semiconductor wafers (22). The platform (40) in one example has a first portion (42) and a second portion (44). Adjusting the positions of the first and second portions (42, 44) relative to each other selectively varies the thickness (t) of the platform (40) to achieve the desired thickness.Type: GrantFiled: March 11, 2003Date of Patent: December 12, 2006Assignee: e.PAK International, Inc.Inventors: Clifton C. Haggard, James R. Thomas, Song Ping Chen, Ru Zheng Liu
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Patent number: 7143901Abstract: An adjustable rack for a stone slab or plate glass has a base with adjustable poles positioned on the base, with the base also having a durable wood strip secured therein in order to support the stone slab thereon. Two adjustable racks are preferred for at least one stone slab. Three adjustable racks are preferred for at least one sheet of plate glass.Type: GrantFiled: August 5, 2004Date of Patent: December 5, 2006Inventor: Henry R. Groves
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Patent number: 7114618Abstract: A unitary foam packing element including a planar piece of foam which is precut with a plurality of score lines. The score lines define a first planar portion and a second planar portion, and enable the first planar portion to be folded over onto the second planar portion to thereby form a flat cavity between the first planar portion and the second planar portion. The score lines further define an end panel adjacent the second planar portion, which is adapted to be folded along a respective one of the score lines so as to form a first end wall of the flat cavity, and an intermediate portion between the first planar portion and the second planar portion, which is adapted to form a second end wall of the flat cavity that is opposite the first end wall.Type: GrantFiled: November 4, 2003Date of Patent: October 3, 2006Assignee: SCA North America-Packaging Division, Inc.Inventor: Mark Hanley Arnold
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Patent number: 7108141Abstract: An apparatus for holding a fragile item which includes a support frame and a support panel mounted within the support frame. The support frame includes at least one elongated, longitudinal channel on an exterior surface thereof to provide an area of attachment to the support frame. A fastener is provided to attach accessory components to the support frame. The fastener is preferably a spring nut and bolt arrangement, although any suitable fastener may be used. Such accessory components include substantially clear panels for displaying the items, shelf brackets, pipes and pipe fittings, covers, and elongated extensions to create a cavity box formed from at least two spaced apart support frames. The apparatus can be used to store, transport or display fragile items such as paintings, sculptures and tapestries.Type: GrantFiled: October 5, 2001Date of Patent: September 19, 2006Inventor: Ani Gonzalez-Rivera
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Patent number: 7080735Abstract: A windshield packaging system that provides effective support for the windshield during substantial vertical drops, protects the windshield against side impacts, is simple in design, requires only modest skill to effectively assemble, protects windshields of different size with the same size carton, and minimizes inventory management problems. The windshield packaging system includes jaw components having a synergistic effect, horizontally-running flutes, and pressure-regulated clamps.Type: GrantFiled: April 14, 2005Date of Patent: July 25, 2006Assignee: Honda Motor Co., Ltd.Inventor: David Allison
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Patent number: 7077270Abstract: A double-seal mechanism is provided on a cover member for sealing closed a container main body. The double-seal mechanism includes an inner seal piece that seals an interior of the container main body and is positioned between an inner seal reception section of a flange of the container main body and a seal pressing section of the cover. An outer seal piece forms a second seal between the container main body and the periphery of the cover member. The inner seal piece has a rounded distal end fitted into a fitting groove in the flange. A cover member fixing unit of the cover member includes a latch shaft that is linearly projected from and retracted, a latch roller attached to a tip end of the latch shaft, and a crank mechanism that linearly projects and retracts the latch shaft as the crank mechanism rotates. The latch roller travels along an inclined retracting surface on the container main body which forces the cover member inward into sealing engagement with the container main body.Type: GrantFiled: March 10, 2004Date of Patent: July 18, 2006Assignee: Miraial Co., Ltd.Inventor: Chiaki Matsutori
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Patent number: 7073999Abstract: The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a plurality of second objects to be processed, the second objects to be processed being larger than the first objects to be processed; a supporting part provided at an inside wall surface of the box case, the supporting part being capable of supporting the second objects to be processed in a tier-like manner; an open-close lid provided at an opening part of the box case in a removable and attachable manner; and a positioning-engaging part provided at a bottom part of the box case in a removable and attachable manner. The open-close lid is capable of sealing the box case. The positioning-engaging part is capable of engaging with a positioning part provided at a lower surface of a bottom part of the cassette to position the cassette.Type: GrantFiled: May 26, 2003Date of Patent: July 11, 2006Assignee: Tokyo Electron LimitedInventor: Katsuhiko Oyama
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Patent number: 7073667Abstract: A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.Type: GrantFiled: October 22, 2004Date of Patent: July 11, 2006Assignee: Entegris, Inc.Inventors: John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes, Mark V. Smith
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Patent number: 7059473Abstract: A panel module includes a panel in which a pair of substrates at least having a transparent front substrate is disposed facing each other with a discharge space in between and electrodes are disposed on substrates; a chassis for holding this panel; and a display driving circuit for applying a signal to the panel attached to the chassis for display. A resin front protective cover having substantially the same dimensions as a front frame of a finished plasma display device is provided on a periphery of the panel module for protecting the periphery of the panel module.Type: GrantFiled: April 5, 2002Date of Patent: June 13, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Hiroshi Watanabe, Hidenori Tougo, Shozo Sasaki
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Patent number: 7059475Abstract: The invention relates to transport and shipping containers for wafers that are processed into semiconductor units. The wafer transport system provides wafer carriers that provide damage protection and particulate protection with minimal contamination of the wafers in the shipper. The invention includes a wafer cushion for cushioning semiconductor wafers that is made of a closed-cell polyethylene material with a surface resistivity of less than 5×107 ohms per square that has less than 1800 ng/g Cl?, 400 ng/g F?/Acetate, 270 ng/g NO3?, 350 ng/g SO42?, and 60 ng/g PO43?ions leachable under moderate conditions. The wafer cushion optimally has no detectable outgassing organics under stringent conditions. The static control properties are the result of carbon that is part of the structure of the material.Type: GrantFiled: October 4, 2001Date of Patent: June 13, 2006Assignee: Entegris, Inc.Inventors: Michael C. Zabka, Matthew Nicolas, David Molitor
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Patent number: 7040487Abstract: A protective shipper comprises a cover and a base that are held together by a latching member. The base is configurable to retain and protect semiconductor wafers or film frames with wafers within a storage pocket. The base comprises latching member and a support wall that defines a storage pocket. The cover encloses the storage pocket. One or both of the cover may receive recesses for gripability. The cover may receive one or more latching apertures configured to minimize unintended unlatching. The shipper of the present invention may be manufactured in a mold capable of producing film frame or wafer containing configurations of the shipper by using an interchangeable mold insert.Type: GrantFiled: July 12, 2002Date of Patent: May 9, 2006Assignee: Entegris, Inc.Inventors: Michael Zabka, James Nigg
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Patent number: 7032758Abstract: A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.Type: GrantFiled: February 20, 2004Date of Patent: April 25, 2006Assignee: Industrial Technology Research InstituteInventors: Wei-Ming Pai, Dar-Zen Chen, Jyh-Jone Lee, Tzong-Ming Wu, Hui-Chih Lin
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Patent number: 7017749Abstract: A presser member (1) of the present invention is formed of different materials for the contacting part (5) to press-hold the precision substrates (15) and for the parts other than the contacting part (5). The presser member (1) is shaped from a thermoplastic elastomer for a rectangular frame part, and the contacting part (5) has a pair of structuring parts (4) provided in such a fashion as to inwardly extend from each of a pair of oppositely facing sides. A second contacting part (11) is formed in the extension peripheral part extending via a supporting part (10). The other parts are shaped from a thermoplastic resin. The aforementioned contacting part (5) is provided with grooves of a V-shaped cross section with inclinations changed in the middle for receiving the peripheries of precision substrates (15), and V-grooves for press-holding the peripheries of precision substrates are provided in resilient pieces (12) separated and protruding in a comb teeth-like fashion to form the second contacting part (11).Type: GrantFiled: May 30, 2002Date of Patent: March 28, 2006Assignee: Shin-Etsu Polymer Co., Ltd.Inventors: Toshitsugu Yajima, Masato Hosoi, Hideo Kudo, Takashi Matsuo
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Patent number: 7017750Abstract: A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.Type: GrantFiled: November 14, 2003Date of Patent: March 28, 2006Assignee: Miraial Co., Ltd.Inventors: Chiaki Matsutori, Takaharu Oyama
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Patent number: 7009689Abstract: An apparatus suitable for holding a photomask comprises a photomask holder having a plurality of through holes and a plurality of protrusions detachably connected to the photmask holder via the through holes. The photomask is positioned on supporting ridges of the protrusions so that the friction between the protrusions and the photomask is prevented, and the generation of particulates can be effectively reduced.Type: GrantFiled: May 26, 2004Date of Patent: March 7, 2006Assignee: Gudeng Precision Industrial Co., Ltd.Inventor: Ming-Chien Chiu
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Patent number: 6997318Abstract: A liquid crystal display module packing apparatus having a rectangular lower plate, first and second side walls that extend from sides of the lower plate, and an upper plate that extends from an upper edge of the first side wall. To provide structural support, a plurality of auxiliary side walls extend from the ends and the middle of the first and second side walls. A plurality of fixing jaws are located on inner surfaces of the packing apparatus. Those fixing jaws receive and retain liquid crystal display modules. A plurality of grooves are located at side edges of the upper plate, and at upper edges of the first and second side walls. The liquid crystal display module packing apparatus can be unfolded into a flat structure.Type: GrantFiled: February 8, 2001Date of Patent: February 14, 2006Assignee: LG.Philips LCD Co., Ltd.Inventor: Sun-Im Park
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Patent number: 6993809Abstract: A wafer box with a handle device is provided. A wafer box includes a wafer box main body for carrying at least one wafer, a handle device having a holding portion being evenly and securely held by an operator with digits so as to transport the wafer box conveniently, and a connecting component for connecting the wafer box main body to the handle device. The connecting component further includes an engaging portion for being engaged with the wafer box main body, a positioning portion for positioning the connecting component on the wafer box main body, and an urging portion for urging against the wafer box main body.Type: GrantFiled: February 27, 2004Date of Patent: February 7, 2006Assignee: Power Geode Technology Co., Ltd.Inventor: Chang Chin-Kang
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Patent number: 6994217Abstract: A shipper for memory disks comprises a cassette having an open top and an open bottom, a top cover to cover the open top, and a bottom cover to cover the bottom. The body portion has opposing side walls and opposing end walls. The two side walls each have with a vertical upper portions and an inwardly converging bottom portion. Said sidewalls have inwardly facing elongate teeth or spacers defining slots to hold the substrates in a vertically positioned and spaced array. Each tooth is continuous from the open top to the open bottom and each tooth has a upper vertical portion at the vertical upper portion of the side wall and a converging lower portion at the bottom portion of the side walls. The converging lower portion of each tooth follows the convergence of the bottom portions of the sidewalls.Type: GrantFiled: October 12, 2004Date of Patent: February 7, 2006Assignee: Entegris, Inc.Inventors: Joy A. Duban-Hu, Steven P. Kolbow
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Patent number: 6981594Abstract: An assembly to facilitate the transport of semiconductor wafers comprises rigid first and second end plates, and a plurality of interconnected flexible pockets provided between these first and second end plates. Each of the pockets is configured to store a semiconductor wafer therein. A method of facilitating the transport of semiconductor wafers comprises inserting semiconductor wafers into pockets of a wafer transport assembly, the assembly having rigid first and second end plates, and a plurality of interconnected flexible pockets attached therebetween. The method further comprises collapsing the pockets down onto the semiconductor wafers by moving the first end plate toward the second end plate. A method of fabricating an assembly to facilitate the transport of semiconductor wafers comprises providing a plurality of interconnected flexible pockets between rigid first and second end plates, each of these pockets being configured to store a semiconductor wafer therein.Type: GrantFiled: June 17, 2003Date of Patent: January 3, 2006Assignee: National Semiconductor CorporationInventor: Roger P. Sarver
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Patent number: 6976585Abstract: A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily “roll off” without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.Type: GrantFiled: June 3, 2003Date of Patent: December 20, 2005Assignee: Entegris, Inc.Inventor: Charles W. Extrand
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Patent number: 6976586Abstract: The packaging system comprises a first plurality of interlaced fingers disposed in the upper portion of a box, and a second plurality of interlaced fingers disposed in a lower portion. The fingers provide provide a soft support for a product placed between the fingers.Type: GrantFiled: May 10, 2002Date of Patent: December 20, 2005Assignee: ASM America, Inc.Inventor: Michael W. Halpin
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Patent number: 6971519Abstract: A configuration of a flat carrier with a chip module in a padded envelope, which can be transported in a transport device in the direction of one of the envelope's side edges, includes disposing the chip module in the padded envelope such that wire connections in the chip module extend over a side of the semiconductor chip that runs parallel to the transport device. Such a configuration is made possible by the fact that the flat carrier is applied in a standard way to a further carrier, which is folded in a suitable way.Type: GrantFiled: November 27, 2002Date of Patent: December 6, 2005Assignee: Infineon Technologies AGInventor: Manfred Fries
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Patent number: 6955382Abstract: A wafer container, and methods of constructing a wafer container. The wafer container has an enclosure portion with at least a top, a bottom, a pair of opposing sides, a back, an open front, and a door to close the open front. The door includes a door chassis with at least a first latching mechanism. The latching mechanism has a rotatable cam member and at least one latching arm. The latching arm has a bifurcate cam follower portion that engages with the periphery of the cam member.Type: GrantFiled: December 11, 2002Date of Patent: October 18, 2005Assignee: Entegris, Inc.Inventor: Shawn D. Eggum
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Patent number: 6951284Abstract: In a preferred embodiment of the invention, a wafer retaining arrangement is incorporated into a transport module suitable for 300 mm wafers. The wafer retaining arrangement attaches to an interior of a door of the transport module and includes a framework, and a first and a second plurality of wafer engaging members that secure semiconductor wafers within the transport module and that extend laterally from respective first and second sidewall portions and are preferably parallel to one another. Each of the wafer engaging members includes an arm portion and a wafer engagement head spaced laterally from the respective sidewall portion, wherein the wafer engagement heads of the first plurality of wafer engaging members are in close proximity to the wafer engagement heads of the second plurality of wafer engaging members.Type: GrantFiled: November 14, 2002Date of Patent: October 4, 2005Assignee: Entegris, Inc.Inventors: Shawn Cheesman, Shawn D. Eggum
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Patent number: 6948619Abstract: A pod for transporting reticles is made with a reticle support that has a ?-shape and is provided with pins, whose arrangement matches the location of chrome-free areas on a reticle base. Due to that, the pins, when supporting the reticle, come into contact with the reticle in chrome-free areas thereof. Thus, scratching the metallic areas and releasing metallic particles is prevented from occurring.Type: GrantFiled: July 5, 2002Date of Patent: September 27, 2005Assignee: Taiwan Semiconductor Manufacturing Co., LTDInventors: Wei-Yu Su, Li-Kong Tern, Dong-Hsu Cheng
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Patent number: 6945405Abstract: A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two latching portions from the edge portion of each opposite side of the door and into and out of latch receptacles on the frame. Each latching mechanism utilizes a sliding plate with a handle connected thereto and exposed on the front of the door. The sliding plate has a pair of lifting linkages cooperating with a pair of latching linkages. Moving the handles outwardly extends the latching portions into the latching receptacles, then pulls the door inwardly to seal the door to the container portion. The sliding plate includes a rack portion engaged with a pinion accessible from the front of the door by a latch key whereby the mechanism can be operated robotically.Type: GrantFiled: July 6, 2000Date of Patent: September 20, 2005Assignee: Entegris, Inc.Inventors: Gregory Bores, Michael C. Zabka
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Patent number: 6938774Abstract: A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the tray carrier. In the invention, entire surfaces or portions of surfaces of a tray carrier are made ultraphobic. The ultraphobic surfaces of the tray carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily “roll off” without leaving a liquid film or substantial quantity of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality and facilitating economical reuse of the tray carrier. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.Type: GrantFiled: June 3, 2003Date of Patent: September 6, 2005Assignee: Entegris, Inc.Inventor: Charles W. Extrand
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Patent number: 6923325Abstract: A cassette, particularly suitable for storing film frames, in a preferred embodiment utilizes an integral shell portion with a plurality of shelves to support a plurality of axially aligned horizontally stacked film frames. A door, preferably vacuum-formed, covers the open front of the shell to enclose the film frames therein. The cassette may have a robotic top and collapsible handles. In a preferred embodiment the handles are U-shaped and slideably engaged with a pair of brackets integral with the sidewall. In another embodiment the handles pivot about an axis parallel to the top of the cassette and attach by a pair of split prongs insertable into a pair of receiving holes. A pair of film frame retention members are pivotally and rotatably attached at the sides of the shell inside the front opening.Type: GrantFiled: July 11, 2002Date of Patent: August 2, 2005Assignee: Entegris, Inc.Inventors: Joy Duban-Hu, James Nigg, Brian Wiseman
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Patent number: 6915906Abstract: An injection molded container for storing and transporting wafers includes a base having a wafer area upon which to place a stack of a plurality of wafers. A protective wall surrounds the wafer area, and extends upward, having a first perimeter at the base and a second perimeter at a top wall extremity that is greater than the first perimeter, resulting in the wall being positioned with a draft angle to a line perpendicular to a plane of the base so as to facilitate removal of the container from an injection mold. This invention provides a plurality of wafer positioning columns, each having a surface with a line of contact rising perpendicular to the plane of the base. The lines of contact are positioned so as to restrict movement of a stack of wafers placed in the container.Type: GrantFiled: July 14, 2003Date of Patent: July 12, 2005Assignee: Peak Plastic & Metal Products (International) LimitedInventors: James D. Pylant, Scott C. Bradley
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Patent number: 6910583Abstract: A substrate carrying device is disclosed. The substrate carrying device, in cooperation with at least a substrate, comprises two end plates having a plurality of fixing holes and mounting holes, at least two partition plates each having side faces, side edges and a plurality of parallel slots wherein the parallel slots are formed on each side face of the partition plate to receive the substrate, a plurality of assembling units, a plurality of fixing poles having binding holes, and at least a bottom rail having a plurality of fixing pins. The substrate carrying device is capable of strengthening the structure of the device, protecting the substrates, simplifying adjustment of the size of the device, and facilitating draining and stacking.Type: GrantFiled: November 25, 2003Date of Patent: June 28, 2005Assignee: AU Optronics Corp.Inventors: Chien Chih Chen, Chien Chih Lu, Wu Sung Chou, Huan Ming Wen
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Patent number: 6902059Abstract: The disk carrier is used to house and secure a plurality of disks and comprises a disk cassette having an open top, an open bottom, and end wall ingresses; a top cover; and a bottom cover. The top cover has flaps to cover the end wall ingresses. To reduce particulation from opening and closing the disk carrier, one embodiment of the disk carrier implements an articulation in the flaps. Another embodiment implements a living hinge on the bottom cover. The disk carrier also has a path to ground for dissipating static and other electrical charge away from the disks.Type: GrantFiled: July 30, 2002Date of Patent: June 7, 2005Assignee: Entegris, Inc.Inventors: Thomas J. Whalen, Michael S. Adams, Garry Anderson
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Patent number: 6899946Abstract: A restraint for packaging glass sheets includes a first leg and a second leg, each leg having an inner surface configured to contact at least a portion of the glass sheets and an outer surface. The first and second legs define a vertex. The inner surfaces are made at least partly of a compressible material and the outer surfaces are made at least partly of a material having a hardness greater than that of the compressible material.Type: GrantFiled: September 19, 2001Date of Patent: May 31, 2005Assignee: PPG Industries Ohio, Inc.Inventors: James R. Geary, George L. Noey
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Patent number: 6886692Abstract: A windshield packaging system that provides effective support for the windshield during substantial vertical drops, protects the windshield against side impacts, is simple in design, requires only modest skill to effectively assemble, protects windshields of different size with the same size carton, and minimizes inventory management problems. The windshield packaging system includes jaw components having a synergistic effect, horizontally-running flutes, and pressure-regulated clamps.Type: GrantFiled: July 26, 2002Date of Patent: May 3, 2005Assignee: Alfred E. Mann Institute for Biomedical Engineering at the University of Southern CaliforniaInventor: David Allison
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Patent number: 6874638Abstract: A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and the adapter of any type are united in a manner such that fitting portions of the case body are fitted individually in fitting holes of the adapter.Type: GrantFiled: December 17, 2002Date of Patent: April 5, 2005Assignees: Tokyo Electron Limited, Miraial Co., Ltd.Inventors: Toshihiko Iijima, Shuji Akiyama, Tadahiro Obayashi
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Patent number: 6871741Abstract: A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features.Type: GrantFiled: August 5, 2002Date of Patent: March 29, 2005Assignee: Entegris, Inc.Inventors: Sanjiv M. Bhatt, Shawn D. Eggum
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Patent number: 6848579Abstract: A shock absorber designed for insertion within a container. The shock absorber presents a support surface on one side intended to contact the surface of one or more items contained within the container, and a spring side including compression elements, in contact with an interior surface of the container, intended to urge the support surface into contact with the items contained within the container. Use of the Shock absorber of the invention may eliminate the need for foam inserts or cushions, which can greatly reduce outgassing of anions or cations generally associated with foam. The container and shock absorber may be suitable for reuse and recycling.Type: GrantFiled: December 20, 2002Date of Patent: February 1, 2005Inventor: Brian Cleaver
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Patent number: 6848578Abstract: A wafer container comprises a housing with a door frame, defining an opening for insertion and removal of wafers, and a door for insertion into the door frame. The door includes a wafer enclosure sealing arrangement for hermetically sealing the door with the door frame of the housing. The wafer enclosure sealing arrangement includes a first groove disposed about a perimeter of the interior surface of the door and a second groove disposed adjacent to the first groove and spaced laterally from the perimeter of the door. The sealing arrangement includes a support member disposed between the first and second grooves. The sealing arrangement also includes an elastomeric seal member having a first portion that is frictionally inserted into the second groove and extends around the door and a second portion that cantilevers downward into the second groove when the door and housing are joined.Type: GrantFiled: November 13, 2002Date of Patent: February 1, 2005Assignee: Entegris, Inc.Inventor: Shawn D. Eggum
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Patent number: 6837374Abstract: An interlockable film frame carrier has central and peripheral portions for securely storing a film frame, the film frame supporting a film, a semiconductor wafer disposed on the film. The central portion has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion of the film frame carrier includes structure for supporting a peripheral portion of the film frame and matable stacking members. When the film frame is stored, two film frame carriers are interlocked by mating the stacking members. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR §1.72 (b).Type: GrantFiled: July 12, 2002Date of Patent: January 4, 2005Assignee: Entegris, Inc.Inventors: James Nigg, Michael Zabka
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Patent number: 6837375Abstract: The disk carrier with spindle comprises an outer shell including an upper portion and a lower portion that connect together to form a chamber to enclose disks and constrain a spindle in place in the chamber. The spindle further comprises elongated portions or partial cylinder sections joined by a hinge so that the spindle can be moved into a contracted position to freely pass through a central aperture of a disk or into an expanded position to contact the inner perimeter of the disk and secure the disk.Type: GrantFiled: July 30, 2002Date of Patent: January 4, 2005Assignee: Entegris, Inc.Inventors: Thomas J. Whalen, Michael S. Adams
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Publication number: 20040256271Abstract: The invention relates to a container for receiving and transporting sensitive plate-like objects, in particular for transporting surface-modified glass substrates. The container comprises an upper part and a lower part. The lower part comprises two lateral sides, two longitudinal sides and a bottom which commonly circumscribe a hollow space for receiving plate-like objects. At each of the lateral sides a series of first ridges is arranged perpendicularly to the bottom, forming a plurality of guide grooves for the plate-like objects. The upper part comprises an inner surface which is parallel to the bottom when the container is closed. At the inner surface at least one second protruding ridge is arranged extending in parallel to both lateral sides along the total inner surface, thus limiting the mobility of the plate-like objects within the guide grooves.Type: ApplicationFiled: September 30, 2003Publication date: December 23, 2004Inventors: Roland Schnabel, Andreas Helbig, Wolfgang Hartenstein
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Patent number: 6825916Abstract: A carrier for a reticle used in photolithographic semiconductor processing, having a base portion and a cover portion. The base portion has a plurality of reticle supports and a plurality of reticle positioning members. The cover portion is adapted to sealingly mate with the base portion, and has an inner surface with a plurality of spaced apart reticle restraints and a pair of reticle positioning tabs projecting inwardly therefrom. Each reticle positioning tab has a diagonal edge portion, and is oriented so that the diagonal edge portion urges a reticle resting on the reticle supports into engagement with the reticle restraints when the cover portion is mated with the base portion.Type: GrantFiled: July 5, 2002Date of Patent: November 30, 2004Assignee: Entegris, Inc.Inventors: Brian Wiseman, Justin Strike
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Patent number: 6820752Abstract: A stackable, folding transport rack generally including a base, a plurality of supports, at least one foldable A-frame hingedly secured to the base and an optional securing assembly. The base of the transport rack is supported by a plurality of legs bearing supports which are adapted to support the lower edges of objects, such as glass sheets or other sheet materials to be carried by the transport rack. The supports are configured to be as low as possible to the resting surface of the transport rack so as to provide for a minimal lift height for loading and unloading. The low arrangement of the supports also maximizes the size of glass sheets that can be carried and maintains the lowest possible center of gravity. The top of the sheet supports may be cushioned with appropriate resilient material.Type: GrantFiled: January 9, 2004Date of Patent: November 23, 2004Assignee: Cardinal CG CompanyInventors: Marion Michael Jeskey, Michael Jeffery Wade
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Publication number: 20040226845Abstract: In accordance with an illustrative embodiment, a method and apparatus for transporting articles includes a container, which has at least one support member and at least one stabilizing member. The stabilizing elements are adapted to engage the articles and secure the articles to the support members, and disengage the articles during unloading.Type: ApplicationFiled: May 14, 2003Publication date: November 18, 2004Inventor: Babak R. Raj
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Patent number: 6817161Abstract: An interposing cushion and method of application for stabilizing a cylindrical container placed in a rectangular cavity of a cushion structure. The interposing cushion includes a rectangular shaped base member adapted to fit a rectangular cavity in a cushion structure made for stacking inside a shipping box. The cushion structure is produced to protect rectangular shaped containers containing fragile objects. The base member has a top surface and a bottom surface and four sides. Four corner support members longitudinally extend upwards from the top surface. The support members form circumscribed inner surface segments for supporting the cylindrical container. The bottom surface has four shock absorbing spacer legs formed inboard of each corner.Type: GrantFiled: May 17, 2002Date of Patent: November 16, 2004Assignee: Taiwan Semiconductor Manufacturing CompanyInventors: Yuan-Ming Wu, Chi-Sung Tsai, Tzu-Yen Lin, Chi-Yi Huang