Abstract: Methods, devices, systems, and apparatuses are provided for the image analysis of measurement of biological samples.

Abstract: Method and apparatus for generating an at least two-dimensional image of at least part of a sample. The method involves scanning the sample. Acquiring at least one light signal by an optoelectronic detector for different areas of the sample. Converting the light signal into an electrical signal. Distributing the electrical signal onto several parallel evaluation channels whose signal evaluations differ from each other so that their dynamic ranges are different. Generating a result signal in each evaluation channel. Selecting at least one of the result signals as a function of one of the result signals in order to generate the image for the sample range concerned. It is also possible to generate one intermediate result signal for each channel, typically from the respective actual result signal and one or more other sources. Thus the signal selection depending on both the result signals and the intermediate result signals are possible.

Abstract: A component measurement apparatus includes a confocal optical system including a laser emitting laser light, a collimating lens collimating the laser light emitted from the laser, an objective lens condensing the collimated light having exited the collimating lens in order to illuminate internal tissue of an object of measurement, a half mirror redirecting reflected light reflected by the internal tissue of the object of measurement and refracted by the objective lens, a pin hole through which the reflected light redirected by the half mirror passes, and a light-receiving element receiving the reflected light having passed through the pin hole. The component measurement apparatus also includes a data analyzer section measuring a component of the object of measurement in accordance with data output from the light-receiving element. In the component measurement the apparatus, a focal position of the objective lens is adjustable along an optical axis.

Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Abstract: The invention relates to a microscope having a stage for supporting a sample to be examined, a recording sensor, an imaging optic for imaging the sample onto the recording sensor, a moving unit by means of which the distance between the stage and the imaging optic can be changed, a control unit for controlling an image recording of the sample and a focus-holding unit for maintaining a prescribed focal position for image recording of the sample at temporal intervals, wherein the focus-holding device comprises at least one hardware element and one software module, wherein the focus-holding unit is fully integrated in the control unit, on both the hardware and software sides.

Abstract: A component measurement apparatus includes a laser that emits non-collimated laser light, an objective lens that condenses the non-collimated laser light emitted from the laser in order for the laser light to illuminate internal tissue of an object of measurement without collimating the laser light, a half mirror that redirects reflected light reflected by the internal tissue of the object of measurement and refracted by the objective lens, a pin hole through which the reflected light redirected by the half mirror passes, a light-receiving element that receives the reflected light having passed through a pin hole, and a data analyzer section that measures a component of the object of measurement in accordance with data output from the light-receiving element.

Abstract: Light enhancement devices, applications for the light enhancement devices, and methods for making the light enhancement devices are provided. The light enhancement devices include a substrate and a film of metal disposed over the substrate, the film of metal including at least one cavity. The cavity may be of various shapes depending on the desired application.

Abstract: The power input to the light source of a microscope is varied as necessary to maintain a constant degree of detector saturation as the objective is moved toward a best-focus position. Focus is found by tracking the source's intensity necessary to maintain the detector irradiance at a constant level. The in-focus position is reached when the power input (and correspondingly the intensity of the light emitted by the source) reaches a minimum. The concept can be applied in a similar manner to minimize or eliminate tilt in a sample.

Abstract: A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.

Abstract: Embodiments of the present invention are directed to autofocus subsystems within optical instruments that continuously monitor the focus of the optical instruments and adjust distances within the optical instrument along the optical axis in order to maintain a precise and stable optical-instrument focus at a particular point or surface on, within, or near a sample. Certain embodiments of the present invention operate asynchronously with respect to operation of other components and subsystems of the optical instrument in which they are embedded.

Abstract: In microscopes, particularly laser scanning microscopes, for detecting light coming from a sample, it is known to protect detectors from excessively high light outputs by means of shutters in the detection beam path. Further, in order to measure the light output impinging on the detector when the detection beam path is closed, a portion of the light is coupled out of the detection beam path and directed to a monitor diode. Constructions of this kind are complicated and costly. In the microscope according to the invention, a monitor diode is arranged on the shutter in such a way that the monitor diode is situated in the detection beam path when the shutter is closed. This makes it possible in a simple manner to measure the light output in a microscope when the detection beam path is closed even without additionally coupling light out of the detection beam path.

Abstract: A fluorescence microscopy imaging system is used for detecting a fluorescence signal of a sample, and includes a module for detecting fluorescence and a module for focusing control. The module for detecting fluorescence includes a fluorescence excitation light source generator (FELSG) and a fluorescence detector. The FELSG is capable of generating an excitation light beam having a first wavelength to excite the sample to emit fluorescence. The fluorescence detector is used to read the fluorescence signal of the sample. The module for focusing control generates a servo light beam having a second wavelength. A servo light beam reflecting film disposed on an observation plane is used to reflect the servo light beam. A return beam signal is analyzed using a focusing detection method. An actuator is used to move the objective for focusing, so as to enable the fluorescence excitation light beam to excite the sample to emit fluorescence.

Abstract: An inverted microscope includes: a microscope main body; a stage that is supported by the microscope main body; and an observation optical system that allows observing a sample placed on the stage from underneath, the microscope main body, in which an optical device can be attached between an objective lens and a tube lens which constitute the observation optical system including a plurality of stage supporting parts that support the stage; and a beam part that connects, in a manner of locating between the tube lens and the objective lens, at least a pair of stage supporting parts at front and back sides together among the plurality of stage supporting parts.

Abstract: A plate solving methodology determines celestial coordinates of an image. Star locations are extracted from the image in terms of pixel coordinates. A group of four stars, referred to as a “test quad”, is identified. A signature for the test quad is generated. In one embodiment, this test signature is derived by determining the separations of the four stars in the test quad, normalized by the largest separation. In one embodiment, the signature also includes the sum of these normalized separations. A query is performed, using the generated signature, against a database of reference signatures for known groups of stars (referred to as “reference quads”). A geometric transform is determined, establishing the relationship between the test quad and a reference quad that matches within a specified tolerance. This geometric transform defines the celestial coordinates of the image. Additional verification steps can be performed to confirm the accuracy of the match.

Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing a light source unit including a laser diode; providing a slider having a thermally-assisted magnetic recording head section thereon, the thermally-assisted magnetic recording head section including a magnetic pole, an optical waveguide, and a plasmon generator, the magnetic pole and the optical waveguide both extending toward an air bearing surface, the plasmon generator being located between the magnetic pole and the optical waveguide; driving the laser diode to allow a light beam to be emitted therefrom, the light beam including both a TE polarization component and a TM polarization component; performing an alignment between the light source unit and the thermally-assisted magnetic recording head section, based on a light intensity distribution of the TE polarization component in the light beam which has been emitted from the laser diode and then passed through the optical waveguide; and bonding the light source unit

Abstract: A microscope system includes a light amount ratio changing unit for changing a ratio of the amount of light directed to a first optical path for directing an optical image of the sample to an eyepiece lens and a second optical path for directing an optical image of the sample to an image capturing unit, an image capturing controlling unit for controlling an exposure time of the image capturing unit, and a controlling unit for obtaining a first exposure time from the image capturing controlling unit, for calculating a second exposure time on the basis of the first exposure time and a second ratio of the amount of light, and for controlling the image capturing controlling unit to set the second exposure time as the exposure time if the light amount ratio changing unit changes to the second ratio of the amount of light.

Abstract: Methods and devices are provided for the trapping, including optical trapping; analysis; and selective manipulation of particles on an optical array. A device parcels a light source into many points of light transmitted through a microlens optical array and an Offner relay to an objective, where particles may be trapped. Preferably the individual points of light are individually controllable through a light controlling device. Optical properties of the particles may be determined by interrogation with light focused through the optical array. The particles may be manipulated by immobilizing or releasing specific particles, separating types of particles, etc.

Abstract: A microscope system improves the operability of a user in performing a microscope observation. The microscope system attains the improvement by including: a microscope apparatus including a plurality of drive units; a display unit for displaying an operation screen for operation of the microscope apparatus; a pointing device for inputting by a pointer an operation instruction to the microscope apparatus on the operation screen; and a control unit for switching the drive units depending on the position of the pointer on the operation screen, and controlling the operation of the switched drive units depending on the operation of the pointing device.

Abstract: Systems and techniques for an optical scanning microscope and/or other appropriate imaging system includes components for scanning and collecting focused images of a tissue sample and/or other object disposed on a slide. The focusing system described herein provides for determining best focus for each snapshot as a snapshot is captured, which may be referred to as “on-the-fly focusing.” The devices and techniques provided herein lead to significant reductions in the time required for forming a digital image of an area in a pathology slide and provide for the creation of high quality digital images of a specimen at high throughput.

Abstract: An autofocus apparatus and a method achieve a higher level of speed and robustness, and are particularly suited for fluorescence microscopy of biological samples, automated microscopy and scanning microscopy. A high speed is achieved via a light pattern in the sample, detected spatially resolved by a detector generating at least two signals corresponding to a reflex pattern of the light pattern. The two signals are subtracted generating a positioning signal and the focus of the objective in the sample is adjusted depending on the positioning signal.

Abstract: A solar collector can be rotated and tilted about a polar mount. The solar collector can be designed such that the center of gravity of the collector is aligned with the axis of the polar mount facilitating the use of smaller positioning devices. The collector can be placed in a position to prevent damage by inclement weather and allow easy access for maintenance and installation.

Abstract: This is a microscope image pickup apparatus for shooting and forming the observation images of a specimen in order to observe it by a microscope. The microscope image pickup apparatus comprises an image pickup unit for shooting and forming the observation images, a display unit for dynamically displaying the observation images shot and formed by the image pickup unit in succession and an operating state detection unit for detecting an operating state of a microscope operation part in order to operate the microscope on the basis of the change of the observation images dynamically displayed on the display unit. The present invention provides a microscope image pickup apparatus, a microscope image pickup program product, a microscope image pickup program transmission medium and a microscope image pickup method which are capable of displaying an optimum moving image according to the operating state of the microscope.

Abstract: An electron beam apparatus equipped with a height detection system includes an electron beam unit emitting an electron beam to the specimen, and a height detection system for detecting height of the specimen which is set on a table. The height detection system includes an illumination system configured to direct first and second beams of light through a mask with a multi-slit pattern to a surface of the specimen at substantially opposite azimuth angles and at substantially equal angles of incidence, first and second detectors which respectively detect first and second multi-slit images of the first and second beams reflected from the specimen and generate output signals thereof, and a device which receives the output signals and generates a comparison signal which is responsive to the height of the specimen. An objective lens of the electron beam unit is controlled in accordance with the comparison signal.

Abstract: A confocal microscope includes an objective lens for converging light which is emitted from a light source to a sample, a scanning mechanism for relatively scanning the sample with the light converged to the sample, and a plurality of confocal diaphragm apertures that are arranged at positions optically conjugate to the light-gathering position of the objective lens and have different diaphragm diameters. The confocal microscope further includes a plurality of photodetectors for detecting the intensities of lights respectively transmitting through the confocal diaphragm apertures, and a weighting/combining arithmetic processing unit for combining signals output from the photodetectors after weighting the signals.

Abstract: A method of autofocusing includes capturing first, second and third images of a sample, at respective first, second and third sample distances and respective first, second and third lateral positions determined with respect to an objective; determining a quantitative characteristic for the first, second and third images; determining a primary sample distance based upon at least the quantitative characteristics for the first, second, and third images; and capturing a primary image of the sample at the primary sample distance and at a primary lateral position that is offset from the first, second and third lateral positions.

Abstract: Provided are devices and methods for determining the spatial orientation of a target sample, which devices and methods are useful in auto focus systems. The devices and methods function by correlating (a) the location of radiation on a radiation detector of radiation reflected by the sample with (b) the position of the sample, and in some embodiments, adjusting the position of the sample, the position of an optical device, or both, in accordance with the location of radiation reflected by the sample onto the detector so as to maintain the sample in focus.

Abstract: An autofocus device, comprises: a stage for mounting a sample; an objective lens; a focusing unit driving stage or the objective lens in an optical axis direction in order to control the position relative to each other of the stage and the objective lens; a lighting unit onto the sample; a detection unit detecting an optical image; a projection state changing unit being provided in an optical path, changing a state of the optical image projected onto the detection unit; a first in-focus state determination unit determining an in-focus state of the sample on the basis of a detection result; and a first in-focus state adjustment unit controlling a position of the projection state changing unit such that a state in which the stage and the objective lens are held at prescribed positions under control of the driving unit is determined to be an in-focus state.

Abstract: Light emitter excitation light (108) of a wavelength ?1 emitted by a light source (101) is collected on a light emitter (107) by a collective lens (102). The light emitter (107) is held on a substrate (104), and emits fluorescent light of a wavelength ?2 when the light emitter excitation light (108) of the wavelength ?1 is irradiated. A diameter of the light emitter (107) being formed to be smaller than the wavelength ?2, this fluorescent light includes evanescent waves, and advances through the substrate (104) as an object illuminating light (109) having the light emitter (107) as a point light source.

Abstract: A new optical substrate design allows a target to be illuminated with minimal illumination of undesired surfaces within the image collection ray path.

Abstract: It is possible to generate image data of a biological tissue in a short time. A focus information generating device (2) receives a first reflected light beam (Lr1) split from a reflected light beam (Lr) and a second reflected light beam (Lr2) passing through a pin-hole plate (36). A signal processing unit (13) calculates a uniform reflectance (RE) representing a light amount ratio of the second reflected light beam (Lr2) to the first reflected light beam (Lr1) along with a sum signal (SS) and a difference signal (SD). An integrated control unit (11) detects a position (Z1) corresponding to a top surface (104A) of a cover glass (104) on the basis of the sum signal (SS) and the difference signal (SD) and detects a position (Z3) representing a biological tissue (102) on the basis of the sum signal (SS) and the uniform reflectance (RE).

Abstract: Disclosed herein is an automatic focus control unit including: a first light-emitting element; a line sensor; a second light-emitting element; a slit member; a shifting mechanism; and a controller.

Abstract: A fluorescence microscopy imaging system is used for detecting a fluorescence signal of a sample, and includes a module for detecting fluorescence and a module for focusing control. The module for detecting fluorescence includes a fluorescence excitation light source generator (FELSG) and a fluorescence detector. The FELSG is capable of generating an excitation light beam having a first wavelength to excite the sample to emit fluorescence. The fluorescence detector is used to read the fluorescence signal of the sample. The module for focusing control generates a servo light beam having a second wavelength. A servo light beam reflecting film disposed on an observation plane is used to reflect the servo light beam. A return beam signal is analyzed using a focusing detection method. An actuator is used to move the objective for focusing, so as to enable the fluorescence excitation light beam to excite the sample to emit fluorescence.

Abstract: A spherical aberration adjustment system is disclosed, which includes a plurality of objective lenses, where at least one of the plurality of objective lenses has a spherical aberration collar. The plurality of objective lenses are mounted onto an objective holder, where the objective holder is configured to place the at least one of the plurality of objective lenses in an imaging position. A driving mechanism is coupled by a mechanical link to the at least one of the plurality of objective lenses, where the mechanical link is configured to transmit motion from the driving mechanism to the spherical aberration collar. A control system is configured to manipulate the driving mechanism to move the spherical aberration collar of the at least one of the plurality of objective lenses in the imaging position to a specific spherical aberration adjustment setting.

Abstract: In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.

Abstract: An optical device, in particular a microscope (1), that includes a beam path in which is arranged at least one deflection element (5, 6a to 6f) for deflecting the beam path, at least one vibration sensor (34) being arranged in or on the optical device; at least one of the deflection elements (5, 6a to 6f) including a mirror having a controllably deformable mirror surface (50); and a control unit (32) being provided that, as a function of the output signal of the vibration sensor (34), applies control to the at least one deflection element (5, 6a to 6f) in order to adjust the mirror surface (50) in such a way that vibrations of the optical device are compensated for by a correspondingly opposite-phase adjustment of the mirror surface (50).

Abstract: The present disclosure includes systems and techniques relating to focusing in automated microscope systems. In general, in one implementation, the technique includes obtaining an image of at least a portion of a scan region, analyzing the image to find an area in the image representing a sample, determining a nature of the sample at a selected focus point location in the area in the image, selecting an automated focusing process for use at the selected focus point location based on the determined nature of the sample at the selected focus point location, and focusing the selected automated focusing process. The selecting can include selecting different automated focusing processes for different focus point locations based on different tissue characteristics at the locations.

Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.

Abstract: A microscope system comprises a microscope including a motorized stage on which is mounted a container containing a specimen and which can adjust the position of the container, a scanner scanning laser light radiated onto the specimen, an objective lens focusing the scanned laser light, an image-acquisition unit acquiring a specimen image by detecting fluorescence produced in the specimen, and a dark box containing these components; a storage unit storing the mounting position of the container on the motorized stage; an image-acquisition-position setting unit setting acquisition positions of partial images of the inside of the container, on the basis of the stored mounting position of the container; a control section controlling the microscope so as to acquire the partial images for each container on the basis of the set acquisition positions; and a map-image generating section arranging the partial images to generate a map image.

Abstract: Provided is a microscope equipped with an automatic focusing mechanism, comprising an illumination light source; an objective lens for focusing first light emitted from the illumination light source onto an object to be detected; an illumination light source for imaging the first light that is reflected by the object to be detected and passes through the objective lens; and a focal-point detector for detecting a positional shift of a microtiter plate from a focal position of the objective lens, wherein the focal-point detector includes a focal-point-detection light source for emitting focal-point-detection light serving as second light, a focal-point detection light acquisition unit on which the focal-point-detection light is focused, and a region setting unit which can set an in-focus assessable region of the focal-point-detection light acquired by the focal-point detection light acquisition unit to any position on the focal-point detection light acquisition unit.

Abstract: This invention provides an analyzer for judging whether or not a tangible component is present in a sample in a preparation, and analyzing, if a tangible component is present, the tangible component with efficiency and high accuracy. For this purpose, an analyzer (100) of the present invention analyzes a tangible component in a sample (23) held by a preparation (20). The analyzer (100) checks whether or not a tangible component is present in the sample (23) by extensively observing an area in a certain visual field in which area the tangible component is assumed to be present. If the tangible component is judged to be present, the analyzer (100) analyzes the tangible component. Then, another visual field is selected, and another analysis is started therein so as to analyze only in the vicinity of the area where the tangible component was judged to be present.

Abstract: An reference light emitted from an LED for auto focus enters a glass cover, on which a sample is adhered to, via a half mirror to an objective lens. The reference light that entered the glass cover is reflected by the boundary surface to be reflected light, and this reflected light enters a dichroic mirror via an objective lens. A part transmits the reflected light and allows the light to enter the camera via the dichroic mirror to the lens. A user rotates a motor-operated mirror while viewing the image of the reference light captured by a camera, so as to shift the reference light image position on the boundary surface.

Abstract: A device for optically sensing a specimen with a large depth of field has a lighting module which illuminates a zone of the specimen during a predetermined measurement period with a pattern whose phase is modified in time during the measurement period, generating a specimen light to which a corresponding time-variable phase is imparted. The device also includes a detection module having a space-resolving detection zone which records the specimen zone and has multiple recording pixels, two analysis channels which can be connected to the recording pixels, and an analysis unit is connected to both analysis channels.

Abstract: For a confocal scanning microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable image length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

Abstract: A positioning system and method for focusing a charge coupled device (CCD) lens on a selected surface of an object to be measured is provided. The positioning system and method moves the CCD lens downwards to approximate an estimate Z-axis coordinate of the CCD lens, and moves the CCD lens upwards to find an accurate Z-axis coordinate of the CCD lens according to the selected surface of the object. The system and method further moves the CCD lens to a position corresponding to the accurate Z-axis coordinate to focus the CCD lens on the selected surface.

Abstract: A camera head acquires a sample image by shooting a scaled up image of a sample obtained by a microscope body. A memory device records the sample image in a record medium. A CPU detects the completion of the sighting on an observed portion of a sample in a microscope body on the basis of a R. G. B data value of each pixel configuring a microscope image detected by the R. G. B data value. Furthermore, the CPU detects the completion of the focusing on the observed portion by the microscope boundary on the basis of the height of the contrast of the microscope image detected by the focusing completion detection unit. When both completion of the sighting and completion of focusing are detected, the CPU controls a memory device to record a sample image acquired by a camera head on a record medium.

Abstract: The focus detecting apparatus comprises an objective lens, a point light source which irradiates illumination light for generating a focusing signal to a transparent substrate through the objective lens, a mask means having a first shading part for shading one of areas of the luminous of the illumination light, and a photodetector having two light receiving parts, wherein the mask means is formed so as to have a shape similar to one of light receiving parts in the photodetector, and has a second shading part that intercepts a part of luminous flux passing through another area so that reflected light from one of the surfaces may enter into the two light receiving parts, and reflected light from another surface may pass through an area which is located off the light receiving part arranged at one of the areas, when a focus of the objective lens is positioned near one of surfaces out of the first or second surface in the transparent substrate.

Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.

Abstract: An auto focus device and method are provided. The device comprises a beam splitter set; a laser emitting device disposed at a first side of the beam splitter set for providing a laser beam to the beam splitter; a lens set disposed at a second side of the beam splitter set and opposing to the testing subject positioned at a third side of the beam splitter set for refracting a reflected beam from a testing subject for generating a light spot; and a photo detecting device disposed with respect to the lens set for receiving the light spot and generating a driving signal.

Abstract: A method for auto focus searching of optical microscopes is revealed. At first, sample a plurality of image signals according to a plurality of sampling positions. Then process the plurality of image signals to get a plurality of energy values. Next calculate a plurality of sharpness values of adjacent energy values and also calculate an absolute value corresponding to the sharpness value. Later check and find out a maximum value of the absolute values to get a sampling position corresponding to the image with the maximum value and use that position as the optimal focus position of the optical microscopes. By the sampling way, the energy values of the image signals are captured so as to save calculation time. Moreover, a sharpness value of adjacent energy value is also calculated so as to check the image captured at the best focus position quickly and reduce focus searching time of the optical microscope. Therefore, the focusing efficiency of the optical microscope is improved.

Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.