Abstract: A sample analyzing apparatus includes a micro-aperture probe, which is provided with a light passage aperture having a diameter shorter than wavelengths of light, the light passage aperture being formed at a radiating end of the micro-aperture probe, and a light source, which produces light for sample analysis. An incidence optical system causes the light for sample analysis to enter into the micro-aperture probe from an entry end of the micro-aperture probe. A sample supporting member supports a sample at a position that is exposed to near field light radiated out of the radiating end of the micro-aperture probe. An image sensor receives light scattered by the sample and detects an intensity distribution pattern of the scattered light. A display device displays the detected intensity distribution pattern.

Abstract: This invention provides an angled-dual-axis confocal scanning microscope comprising a fiber-coupled, angled-dual-axis confocal scanning head and a vertical scanning unit. The angled-dual-axis confocal scanning head is configured such that an illumination beam and an observation beam intersect optimally at an angle &thgr; within an object and the scanning is achieved by pivoting the illumination and observation beams using a single scanning element, thereby producing an arc-line scan. The vertical scanning unit causes the angled-dual-axis confocal scanning head to move towards or away from the object.

Abstract: A high-precision displacement measurement device and linear or rotational displacement measurement method using a unit displacement sensor based on a confocal theory. This device is simpler in construction, lower in cost and superior in resolution to other displacement measurement devices, and is capable of measuring a much wider area than other measurement equipment. The present device is adapted to project a spot of light from a light source on an object whose displacement is to be measured and measure a relative displacement of the object from a displacement of the projected light spot.

Abstract: The present invention provides systems, methods, screens, reagents and kits for optical system analysis of cells to rapidly determine the distribution, environment, or activity of fluorescently labeled reporter molecules in cells for the purpose of screening large numbers of compounds for those that specifically affect particular biological functions.

Abstract: A near-field optical heterodyne measurement system for measuring characteristic of high-frequency and high-speed devices includes a combining unit for combining two optical beams to produce a submicron-size optical beam, wherein the two optical beams have different frequency from each other, a near-field fiber-optic probe for injecting the submicron-size optical beam into a sample device to be measured, a position controlling unit for controlling a position of the near-field fiber-optic probe, and a measuring unit for receiving a millimeter wave exited from the sample device to measure characteristics of the sample device.

Abstract: An apparatus and method are disclosed for reviewing defects on an object. The apparatus includes a stage for receiving the object thereon, and both an optical microscope and a scanning electron microscope (SEM). The optical microscope is used to redetect previously mapped defects on the object surface, and includes an illumination source that directs a beam of light toward a selected portion of the object surface. The optical microscope is configured to generate either, or both, bright field and dark field illumination. Once the defect has been redetected, a translation system moves the stage a predetermined displacement such that the defect is positioned for review by the SEM. The apparatus can be configured to automatically focus the defect for viewing by the SEM, and rotate the stage to obtain varying perspectives of the defect.

Abstract: A video microscope having an observation stand whose position is fixed relative to an object, a lens body tube having a lens system arranged at one end thereof along an imaging optical path with respect to the object and that is inserted into the observation stand so as to movable in the optical axis direction, a video signal converting section tube that has an image pick-up element arranged at a predetermined position that corresponds to the lens system, and movable in the optical axis direction relative to the observation stand and movable relative to the lens body tube. The video microscope further includes an object distance adjustment drive motor that moves the lens body tube in the optical axis direction by driving an object distance adjusting mechanism and an objective distance position detecting system.

Abstract: A focus detection unit being applicable to various workpiece and capable of reducing production cost and an optical measuring instrument having the focus detection unit are provided. The focus detection unit is for forming image of first focusing pattern and second focusing pattern onto an image surface of an optical system, projecting the image onto the workpiece, and adjusting relative position of the first focusing pattern and the second focusing pattern for focusing, the focus detection unit including: a slide plate having a plurality of pair of the first focusing pattern and the second focusing pattern; a switching member for switching the slide plate to project the image of either one of the first focusing patterns and the second pattern corresponding thereto onto the workpiece; and a projector for projecting the image of the focusing patterns switched by the switching member onto the workpiece.

Abstract: Microscopes, including viewing and other microscopic systems, employ a hinged, tiltable plate to adjust focus on a flat object such as a microscope slide or biochip by motion, achieved by tilting, which is substantially normal to the focus point on the plane of the object. By employing two such tiltable arrangements, relatively long scan lines of e.g., flying objective, single pixel on-axis scanning can be accommodated. The tilting support plate is specifically constructed to provide tailored locations for different objects in series along the Y axis of the plate. The plate can accommodate heaters and cooled plates and/or the flat object being examined. In a fluorescence scanning microscope, locations are specifically adapted to receive microscope slides and biochip cartridges such as Affymetrix's “Gene Chip®”. A scanning microscope under computer control, employing such a focusing action, enables unattended scanning of biochips with a simple and economical instrument.

Abstract: An inspection system for and a method of inspecting defects on opposite sides of a glass specimen are set forth wherein a focusing filament is positioned in the light path of an inspection system having an objective lens. The filament is focused to the same plane that the objective lens uses to image a defect on the glass surface, so as to produce a shadow of the filament in the field of view when the objective is focused on either a front or back surface of the specimen. The utilization of the focusing filament provides an absolute surface reference that can automatically compensate for variations of the glass specimen position relative to a plane.

Abstract: A probe for a near-field optical microscope was conceived in which a tube is thermally bent in the form of a hook; a microscopic aperture of the tube which has been thermally extended and cut away is provided at an end thereof; a part of the tube opposite to the microscopic aperture is removed to form an aperture at the removed portion to thereby provide a structure having no obstacle in the space between said aperture at the end and a near-field optical microscope utilizing the same was configured.

Abstract: An object is illuminated by a light source, and a periodic pattern of transparent and non-transparent stripes is superimposed onto the object. At least three images are recorded at different spatial phases of the pattern by means of a microscope of shallow focal depth, and a three-dimensional image containing only in-focus detail is then derived from the recorded images.

Abstract: For the purpose of calibration which is simple and can also be carried out as often as desired, an arrangement and a method for calibrating a preferably confocal laser scanning microscope, it being possible for an object (1) to be scanned by a scanning beam (2), are defined by calibration means (12) which are arranged in the plane of an intermediate image (11) and can likewise be scanned by the scanning beam (2).

Abstract: A confocal optical system is disclosed that utilizes fiber optic components in its construction. The system includes a light source, two detection units, an aperture and an optical element all optically coupled to a fiber optic coupler via optical fibers. In addition, a novel automatic focusing device is disclosed which utilizes chromatic aberration to maintain a target object in optimal focus. The device includes two light sources having different wavelengths of light, an optical element, an aperture, two detection units and a beam splitter. One light source is used to achieve initial focus and to illuminate the target object. The second light source is used to maintain the target object in optical focus. Light reflected off the target object is measured by one of the detection units. The magnitude of the light of the second wavelength measured by the detection unit is utilized to maintain focus.

Abstract: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactuate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

Abstract: A beam splitting optical system for an automatic focusing apparatus includes a telescopic system having an objective optical system and a viewing optical system, a beam splitter which splits object-carrying light transmitted through the objective optical system from the telescopic optical system by a splitter surface, and a focus detection optical system having a pair of light receivers which receive beams of the object-carrying light split by the splitter surface. The focus detection optical system is arranged so that beams of the object-carrying light to be respectively received by the light receiver are incident upon the splitter surface of the beam splitter at different incident angles. The transmittance and reflectance of the splitter surface of the beam splitter is not uniform in distribution and changes depending on the incident angle of the object-carrying light incident thereupon.

Abstract: The present invention relates to a device and to a method for examining and manipulating microscopic objects (1), with a microscope (2), a light source (3, 4) used to illuminate the object (1), an illumination beam path (5), a detector (6) used to detect the light returning from the object (1), a detection beam path (7), a light source (8) used for the object manipulation and a manipulation light beam path (9). The device according to the invention and the method according to the invention are intended to permit three-dimensional examination and manipulation of objects (1) whose dimension along the optical axis is greater than the depth of focus of the microscope objective used, with the additional intention that object manipulation should be possible at all sites of the three-dimensional object (1).

Abstract: A position adjusting means is provided at an outer periphery of an objective lens opposite to an observation sample and the observation sample is moved by the position adjusting means in an optical axis direction of the objective lens to set a focal point of the objective lens to the observation sample.

Abstract: A beam splitting optical system for an automatic focusing apparatus includes a telescopic system having an objective optical system and a viewing optical system, a beam splitter which splits object-carrying light transmitted through the objective optical system of the telescopic optical system by a splitter surface, and a focus detection optical system having a pair of light receivers which receive beams of the object-carrying light split by the splitter surface. The focus detection optical system is arranged so that beams of the object-carrying light to be respectively received by the light receivers are incident upon the splitter surface of the beam splitter at different incident angles. An optical element is provided in a light path of at least the larger quantity of beams of the object-carrying light, among those to be received by the pair of light receivers so as to reduce the quantity of light to be transmitted therethrough.

Abstract: A filter-less imaging microscope and method for analyzing samples on a slide at multiple wavelengths of light comprising, a microscope (12), a light dispersive element (28) positioned to receive images from the microscope (12) at multiple wavelengths, the light dispersive element (28) producing an array of light from the image and a camera (30) positioned to detect the light array produced by the light dispersive element (28), wherein the camera (30) detects the light array dispersed by the light dispersive element (28) at multiple wavelengths, is disclosed. The camera (30) can detect the entire spectrum of light produced by the light dispersive element (28).

Abstract: The present invention concerns a method and an apparatus for stabilizing the temperature of optical, in particular optically active, electrooptical, or acoustooptical components, preferably in scanning microscopy, in particular in confocal scanning microscopy, such that the temperature of the component can be held in stable fashion at a constant value in a space-saving manner, as simply as possible, and with as few additional assemblies as possible, and is characterized in that the energy that interacts with the component serves for stabilization.

Abstract: An optical probe which comprises a substrate, an elastic body supported by the substrate and having a free end, a projection having a micro-aperture and arranged at the free end of the elastic body, and a refractive index micro-lens also arranged at the free end of the elastic body and adapted to focus light to the micro-aperture.

Abstract: A probe for detecting or irradiating light includes a displaceable support member on a substrate, a tip formed on the support member, and a bonding layer for bonding the tip onto the support member. The tip has a micro aperture. When a light-shielding layer is further formed on a surface of the tip, the micro aperture is formed on the light-shielding layer. The tip consists of a light transmission material.

Abstract: An electronic camera provided for the microscope comprises an imaging element for imaging an optical image split by an optical path split prism, a signal processing section for processing an imaging signal output from the imaging element, a memory section for recording image data based on the imaging signal processed by the signal processing section, an LCD monitor located near the eyepiece lens, for displaying the image based on the imaging signal processed by the signal processing section, and a casing integrally containing all of the imaging element, the signal processing section, the memory section, and the LCD monitor.

Abstract: An optical waveguide probe is disclosed which is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5.

Abstract: A microscopy system comprising a microscope including a stage, at least one magnifying lens, and a lens controller, a video capture device coupled to the microscope capturing a plurality of images of an object on the stage of the microscope and a processing subsystem receiving the plurality of images from the video capture device, in which the processing subsystem generates at least one resultant image as a function of the plurality of images. The at least one resultant image generated by the processing subsystem may include a mosaic, submosaic or a sequence of mosaics.

Abstract: A scan systems include at least one radiation source for directing at least one beam toward a spinning scan device. The scan device reflects these beams as rotating scan beams to track rotating scan lenses without translation between the scan beams and the scan lenses. The rotating scan lenses focus the scan beams into radiation spots and project them onto a scanned surface as moving scan spots. Relative movement between the scanned surface and the scan lenses produces an inner drum area scan. According to another version the system includes at least one radiation source for directing at least one beam toward a spinning scan device. The scan device reflects these beams as rotating scan beams to track rotating reflectors. The reflectors direct the beams to rotating tracking lenses without translation between the beams and the lenses. The lenses focus the scan beams into spots and project these onto a scanned surface as moving spots.

Abstract: An apparatus and method for efficiently observing a biochemical substance with focusing accurately and rapidly on the substance disposed on an inside of a container is provided. A focusing mark, which is used as a reference when a focal point of an optical system is adjusted, is disposed on the outside of a transparent bottom of each wells in a micro plate. A focus-shift-distance corresponding to a distance between the mark and a desired position to be observed is determined. The optical system focuses on the mark, and then, the focal point the optical system is shifted by the focus-shift-distance. This shift allows an object to be focused on accurately and rapidly even when unclear images are obtained.

Abstract: Confocal microscope equipment which provides real time 3-dimensional display by scanning at high speeds in the direction of the optical axis, wherein sliced images of a sample are obtained by scanning the sample surface with a light beam using a confocal scanner having an objective lens actuator which scans the objective lens in the optical axis direction faster than a one image integrating time when photographing the slice images with an image pickup device or when observing the sliced images direction with the naked eye.

Abstract: There is disclosed a scanning probe microscope, such as an atomic force microscope or a friction force microscope, permitting an operator to easily adjust the position on a photodiode hit by light. The microscope includes an optical detector having a light-sensitive portion that is circular or polygonal and consists of a photodiode. The profile of the photodiode or graphical information about the photodiode is stored in memory. The photodiode is segmented into four elements. A calculator finds the center of the light incident on the photodiode from the output signals from the four elements. A picture of the photodiode is displayed on the viewing screen of a display unit according to the graphical information about the photodiode stored in memory. A marker indicating the incident position of the light is superimposed on the picture of the photodiode displayed on the viewing screen.

Abstract: The micro-scanning multislit confocal image acquisition apparatus of the present invention is a confocal image acquisition apparatus that comprises a nonscanning multislit confocal image acquisition system using a slit array instead of a pinhole array and a multislit-image microscanning mechanism for moving the image of the slit array in a small back and forth motion with respect to the object during each exposure of the two-dimensional arrayed photodetector in one complete measurement. Microscanning the image of the slit array with an amplitude equal to half the distance between adjacent slits increase the aperture ratio of the pixels to 100 percent, reducing blind regions to zero. As a result, this apparatus can measure a small object that cannot be measured by a conventional nonscanning confocal image acquisition apparatus because of blind regions.

Abstract: An improved image pickup device or method and an improved image processing device or method which directly projects a region specifying image on an object to specify and focus the object within a predetermined region without employing any image display unit so as to take an image of the object and judge the quality of the taken image. An image pickup device (2) includes an image pickup means (22) for taking an image of an object (1) which is focused through a lens (21), and a projecting means (25) for projecting an image (27p) of a predetermined shape on the object. An image processing device (4) compares the image taken by the image pickup device (2) with a predetermined image stored beforehand to produce a result of such comparison.

Abstract: An apparatus for enhanced light transmission through a perforated metal film is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, and first and second dielectric layers. The first dielectric layer is provided substantially adjacent to the first metal film surface, and the second dielectric layer is provided substantially adjacent to the second metal film surface. The respective refractive indices of the first and second dielectric layers are substantially equal. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film.

Abstract: A sample analyzing apparatus comprises a micro-aperture probe, which is provided with a light passage aperture having a diameter shorter than wavelengths of light, the light passage aperture being formed at a radiating end of the micro-aperture probe, and a light source, which produces light for sample analysis. An incidence optical system causes the light for sample analysis to enter into the micro-aperture probe from an entry end of the micro-aperture probe. A sample supporting member supports a sample at a position that is exposed to near field light radiated out of the radiating end of the micro-aperture probe. An image sensor receives light having been scattered by the sample and detects an intensity distribution pattern of the scattered light. A display device displays the detected intensity distribution pattern.

Abstract: The present invention is an automatic focal point detection device. In a broad visual field and high resolution observation, when focusing is impossible in a splitting visual field obtained by splitting a specimen in a visual field in plural number, a stage is moved to an in-focus position stored in advance and focusing is executed. Besides the device is provided with an excitation light shutter for intercepting an excitation light with which a specimen is irradiated and when stray light corresponding to a difference detected by closing and opening the shutter in fluorescence observation is smaller than a specific value, specimen search is performed and focusing is executed at a level exceeding stray light, while the difference is equal to or larger than the specific value, focusing is executed with nothing more done.

Abstract: A multispot scanning optical microscope image acquisition system for confocal and conventional imaging, metrology, real-time viewing, inspection and review of an object features an array of multiple separate focused light spots illuminating the object and a corresponding array detector detecting light from the object for each separate spot. Scanning the relative positions of the array and object at a slight angle to the rows of the spots allows an entire field of the object to be successively illuminated and imaged in a swath of pixels. The scan speed and detector readout direction and speed are coordinated to provide precise registration of adjacent pixels despite delayed acquisition by the adjacent columns of light spots and detector elements. The detector elements are sized and spaced apart to minimize crosstalk for confocal imaging and the illuminating spots can likewise be apodized to minimize sidelobe noise.

Abstract: A sample analyzing apparatus includes a micro-aperture probe, which is provided with a light passage aperture having a diameter shorter than wavelengths of light, the light passage aperture being formed at a radiating end of the micro-aperture probe, and a light source, which produces light for sample analysis. An incidence optical system causes the light for sample analysis to enter into the micro-aperture probe from an entry end of the micro-aperture probe. A sample supporting member supports a sample at a position that is exposed to near field light radiated out of the radiating end of the micro-aperture probe. An image sensor receives light scattered by the sample and detects an intensity distribution pattern of the scattered light. A display device displays the detected intensity distribution pattern.

Abstract: A scanning probe microscope comprises a probe extending in a Z direction, a piezoelectric vibrating body for vibrating the probe relative to a surface of a sample, and a vibration detecting device having a quartz oscillator for detecting the probe vibration. A biasing member biases the probe into pressure contact with the quartz oscillator of the vibration detecting device to integrally connect the probe to the quartz oscillator. A coarse displacement device effects coarse displacement of the probe in the Z direction. A fine displacement device effects fine displacement of the probe in the Z direction. A scanning device scans the probe in X and Y directions relative to the surface of the sample to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.

Abstract: A probe for detecting or irradiating light includes a displaceable support member on a substrate, a tip formed on the support member, and a bonding layer for bonding the tip onto the support member. The tip has a micro aperture. When a light-shielding layer is further formed on a surface of the tip, the micro aperture is formed on the light-shielding layer. The tip consists of a light transmission material.

Abstract: An optical surface measurement device is disclosed. A beam of light is focused through an optical system into a spot on a sample and the optical system collects light reflected and scattered by the sample forming an image of the illuminated part of the sample on a focus detector. A control system responds to the focus detector moving the optical system to keep the spot in focus on the sample as the sample is tracked past the apparatus. The optical system may be moved as a whole or one of the lenses therein may be moved with respect to the others. Alternatively the movable lens may be set to oscillate and its position is recorded each time focus is achieved. The focus detector has two outputs one of which is larger than the other when the surface of the sample is above the plane focussed by the optical system and the other being larger when it is below. The control system uses both sum and difference signals calculated from those outputs to discriminate the point of focus.

Abstract: A method and apparatus for automatically focusing a high resolution microscope, wherein during setup the operator designates areas within each field of view where a measurement will be taken, and for each area of interest translates the microscope along its optical axis (Z-axis) while measuring the image intensities at discrete subareas within the area of interest. These image intensities are then evaluated, and those having the greatest signal-to-noise ratio and occurring at a common point along the Z-axis will be selected, and the corresponding subareas identified. During subsequent inspections of the area of interest, only light reflected from the identified subareas will be used to focus the microscope. The invention has application in both conventional microscopy and interferometry.