Abstract: A microscope apparatus 1A is formed with a CCD camera 30 that acquires an image of a sample S, a light guiding optical system 20 that guides an optical image of the sample S to the camera 30, an optical system driving section 25 that drives the camera 30 and the optical system 20 to change a focal position on the sample S in a z-axis direction, and a control device 50 that includes a focal point control section 51. The focal point control section 51 calculates a first focal point measurement value from a plurality of images acquired by a first focal point measurement that is executed while continuously changing the focal position in one direction, calculates a second focal point measurement value from a plurality of images acquired by a second focal point measurement that is executed while continuously changing the focal position in a direction opposite that of the first focal point measurement, and determines an in-focus position for the sample S based on the first and second focal point measurement values.

Abstract: An observation light generated by an observation-purpose light source has a beam cross section where the light intensity (light quantity) is substantially uniform. A mask portion masks a part of the observation light so that the light intensity of a region corresponding to a reticle image at the beam cross section is substantially zero. The observation light including a shadow region formed corresponding to the reticle image is reflected from a beam splitter and applied to an object to be measured. Based on the contrast (difference between light and dark parts) of a reflected image corresponding to the reticle image projected on the object to be measured, the focus state of the measurement light on the object to be measured is determined.

Abstract: A method of capturing a focused image of a continuously moving slide/objective arrangement is provided. A frame grabber device is triggered to capture an image of the slide through an objective at a first focus level as the slide continuously moves laterally relative to the objective. Alternatingly with triggering the frame grabber device, the objective is triggered to move to a second focus level after capture of the image of the slide. The objective moves in discrete steps, oscillating between minimum and maximum focus levels. The frame grabber device is triggered at a frequency as the slide continuously moves laterally relative to the objective so multiple images at different focus levels overlap, whereby a slide portion is common to each. The image having the maximum contrast value within overlapping images represents an optimum focus level for the slide portion, and thus the focused image. Associated apparatuses and methods are also provided.

Abstract: A method of capturing a focused image of a continuously moving slide/objective arrangement is provided. A frame grabber device is triggered to capture an image of the slide through an objective at a first focus level as the slide continuously moves laterally relative to the objective. Alternatingly with triggering the frame grabber device, the objective is triggered to move to a second focus level after capture of the image of the slide. The objective moves in discrete steps, oscillating between minimum and maximum focus levels. The frame grabber device is triggered at a frequency as the slide continuously moves laterally relative to the objective so multiple images at different focus levels overlap, whereby a slide portion is common to each. The image having the maximum contrast value within overlapping images represents an optimum focus level for the slide portion, and thus the focused image. Associated apparatuses and methods are also provided.

Abstract: The present invention relates to the analysis of specimens. Specifically, the invention relates to methods and apparatus for reviewing specimen slides, including apparatus for holding the slides. The invention also relates to an automatic focusing method for an imaging system and methods for accommodating vibration in the imaging system. In particular, the methods and apparatus may be applied to the automated analysis of cytological specimen slides.

Abstract: Disclosed is a real time confocal microscope using a dispersion optics comprising: a broad band light source for supplying light; an illumination optics for illuminating onto a slit aperture by collecting the light emitted from the light source; the slit aperture for only passing a region of the slit among the light illuminated from the illuminating optics; a tube lens for making the lights passing through the slit aperture to be parallel lights; a first dispersion optics for making the parallel lights emitted from the tube lens propagate in different angles according to wavelengths; an objective lens for illuminating the lights emitted from the first dispersion optics on a specimen; a first image formation lens for making the lights reflected from the specimen and passing through the slit aperture 805 to be parallel lights; a second dispersion optics for making the parallel lights emitted from the first image formation lens propagate in different angles according to wavelengths; a second image formation lens

Abstract: A clear fluorescence image is easily obtained irrespective of variation of scattering due to variation of the depth of a focus position in a specimen.

Abstract: A microscope digital image acquiring system 1 includes a microscope 2 composed of a microscope unit 10 forming an enlarged image of an object O and a microscope controller 20 controlling movement of the microscope unit 10, an imaging instrument 3 composed of a camera head unit 30 that is attached to the microscope 2 and has an imaging device detecting the enlarged image of the object O and a camera controller 40 that receives a detected signal output from the imaging device and outputs image information of the object O. The microscope controller 20 and the camera controller 40 operate cooperatively in response to control commands sent externally. The system 1 has a connecting cable 52 connecting with both instruments 20 and 40 to carry out communication with each other. Both instruments 20 and 40 operate cooperatively by communicating control commands with each other through the connecting cable 52.

Abstract: An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source; a beam splitter which is disposed between the white light source and the chromatic aberration lens and by which a reflected beam of the white beam irradiating the work therewith is split; a first condenser lens for condensing the reflected beam split by the beam splitter; a diffraction grating by which the reflected beam condensed by the first condenser lens is converted into a diffracted beam; a second condenser lens for condensing the diffracted beam diffracted by the diffraction grating; and a wavelength detecting unit for detecting the wavelength of the diffracted beam condensed by the second condenser lens.

Abstract: A laser scanning microscope which focuses light beams from a laser beam source to a sample by means of an objective lens and detects transmission light from the sample, reflection light, or fluorescence generated from the sample, includes an observation laser scanning optical system which irradiates coherent light from one side of the sample and which carries out scanning the sample, a stimulation laser scanning optical system which irradiates coherent light from an opposite side across the sample and which carries out scanning the sample, an observation light detector provided to be branched from the observation laser scanning optical system, and a light invasion preventing section which prevents the coherent light irradiated from the stimulation laser scanning optical system from invading the observation light detector.

Abstract: A method of capturing a focused image of a continuously moving slide/objective arrangement is provided. A frame grabber device is triggered to capture an image of the slide through an objective at a first focus level as the slide continuously moves laterally relative to the objective. Alternatingly with triggering the frame grabber device, the objective is triggered to move to a second focus level after capture of the image of the slide. The objective moves in discrete steps, oscillating between minimum and maximum focus levels. The frame grabber device is triggered at a frequency as the slide continuously moves laterally relative to the objective so multiple images at different focus levels overlap, whereby a slide portion is common to each. The image having the maximum contrast value within overlapping images represents an optimum focus level for the slide portion, and thus the focused image. Associated apparatuses and methods are also provided.

Abstract: A Device for coupling a short pulse laser into a microscope beam path, wherein the spectral components of the laser radiation are spatially separated by means of a dispersive element, the individual spectral components are manipulated and are then spatially superimposed again by means of another dispersive element.

Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.

Abstract: Method and device for determining one or more Z distances from an object surface to a reference plane, for example the primary plane of the primary objective of a microscope. By projecting an optical pattern onto an object, and subsequently detecting and computationally evaluating the object's reflection of this pattern by means of an image processing unit, it is possible to obtain relief-like imaging of the object and to identify the individual Z distances, irrespective of the object's contouring.

Abstract: A microscope which comprises: an optical system for magnifying a sample; a focus adjuster for adjusting a focus of the optical system on the sample; an optical detector for detecting light through the optical system; a position estimator for estimating a position of the focus of the optical system, which stays with respect to the sample, based on the light detected by the optical detector while the optical system is vibrating with respect to the sample; and a controller for controlling the focus adjuster based on the position of the focus estimated by the position estimator, is disclosed. An auto focusing method for a microscope is also disclosed.

Abstract: Disclosed is a method for analyzing biological samples by means of a scanning microscope. According to said method, at least one screen dot is repeatedly and successively illuminated with a manipulating light beam and an exciting light beam. The interval between the time of illumination with the manipulating light beam and the time of illumination with the exciting light beam is modified, and the fluorescent light yield is measured in accordance with said interval.

Abstract: A focus control method able to further correctly control a focal point of an optical system or optical apparatus. A reference system of the system as a whole is set by using a reference pattern for focal point control. A focal point of an optical apparatus for inspecting a sample or measuring a physical quantity of the sample and the focal point of an auto-focus mechanism are matched with the reference system. Then, a displaced object of the auto-focus mechanism is set on a sample surface, a displacement amount of the sample surface from a reference point is measured, and the focal point of an object lens of the optical apparatus is controlled by using the displaced point as an operation point of the control of the auto-focus mechanism. When setting the reference system, the focus is judged by utilizing the Becke effect for the reference pattern.

Abstract: An auto focus device and method are provided. The device comprises a beam splitter set; a laser emitting device disposed at a first side of the beam splitter set for providing a laser beam to the beam splitter; a lens set disposed at a second side of the beam splitter set and opposing to the testing subject positioned at a third side of the beam splitter set for refracting a reflected beam from a testing subject for generating a light spot; and a photo detecting device disposed with respect to the lens set for receiving the light spot and generating a driving signal.

Abstract: A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in LM stages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of N×LM stages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated LK times at a magnification that is 1/LK times the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number. (1) The respective beams perform scanning in the Y direction at a sampling interval that is LK times that at the maximum magnification. (2) When scanning of LM-K stages is completed in the Y direction, and the repetition is less than the LKth time, the scanning skips ((N?1)×LM-K+1) stages.

Abstract: Aspects of the subject matter described herein relate to attributing light emissions to spots a light was scanned over. In aspects, the scanned light includes light capable of increasing light emissions from at least one type of matter. A detector detects emitted light that comes from spots the light was previously scanned over. Circuitry attributes emitted light with spots within the area. Data representing light that reflects from each spot may be combined with data representing light that emits (if any) from each spot to create an image. The emitted light may be assigned a false color in the image to distinguish it from reflected light in the image. Emitted light may occur as a result of fluorescent activity. Other aspects are described in the specification.

Abstract: The present invention relates to the analysis of specimens. Specifically, the invention relates to methods and apparatus for reviewing specimen slides, including apparatus for holding the slides. The invention also relates to an automatic focusing method for an imaging system and methods for accommodating vibration in the imaging system. In particular, the methods and apparatus may be applied to the automated analysis of cytological specimen slides.

Abstract: A focusing method is provided for the high speed digitalization of microscope slides using an imaging device, wherein the slide is divided into fields of view according to the imaging device and focusing is performed. During rough focusing, several images are captured within the focus range using large focus steps. On the basis of this set of images the position of the best contrast is determined. Fine focusing is performed by adjusting the focus according to the focus distance already determined for another field of view and by focusing with fine steps. A slide displacing device is provided, which enables the displacement of a slide parallel to the optical axis. The slide displacing device includes slide holding elements affixed to one side of a supporting member having two parallel sides, which are connected by stiffening elements defining at least two parallel planes.

Abstract: In the optical pickup unit configured to guide a laser beam emitted from a laser source to an objective lens, to converge the laser beam with the objective lens to be irradiated to a disk, and to guide the laser beam reflected and returned by the disk to the photo detector including a light reception region constituted by a plurality of segments, the photo detector is disposed with each amplifier corresponding to each segment of the light reception region, is disposed with each output terminal that outputs each light reception output corresponding to each segment from the photo detector via each amplifier, and is disposed with an output setting circuit that sets each light reception output from each of the output terminals by changing the gain of each of the amplifiers and/or by attenuating the input or output of each of the amplifiers with an attenuator.

Abstract: A distance measuring device capable of being used in microscopes or other optical systems. Embodiments of the invention employ one or more scanning mirrors to scan a reference beam over a target to be inspected. The reference beam is returned and detected by a photodetector. The reference beam may be created by using a knife-edge element which allows the outgoing reference beam and incoming reference beam to follow the same path so that the apparent motion of the spot on the target surface is not detected by the photodetector. The photodetector generates an electronic signal corresponding to the displacement of the target away from the ideal focal point. The electrical signal may be used to drive a servomechanism to displace either the target or the microscope objective lens to bring the target in focus.

Abstract: A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

Abstract: A microscope system has a stage on which an observation sample, including an observation object and a transparent member, is to be placed. An objective lens is placed to face the observation sample placed on the stage, and a focusing unit moves at least one of the stage and the objective lens to perform a focusing operation. An autofocus unit controls a focusing driving unit by a so-called Through-the-Lens: TTL system. After autofocus is performed for the transparent member by the autofocus unit, the focusing driving unit makes at least one of the stage and the objective lens move by a predetermined constant amount.

Abstract: A laser scanning microscope includes an acousto-optic element or an electro-optic element in an illumination optical system which introduces a laser beam from a laser beam source of the laser scanning microscope into a microscope. The laser scanning microscope further includes a beam expander disposed between the laser beam source and the acousto-optic element or the electro-optic element.

Abstract: A scanning optical microscope including: a light source; a lens for altering the cross-sectional shape aspect ratio of a beam of light emitted from the light source; at least one lens for converging beams of light of different cross-sectional shape aspect ratio to create a linear light; a first light modulation member able to impart shade to the converged linear light; a lens that can form the light to which the shade has been imparted as a parallel light; a scanning member that can alter the angle of illumination; a lens for focusing the light to which the shade has been imparted; an objective lens for projecting the light to which the shading has been imparted to a sample body; and a lens for imaging the reflected light from the sample body or the light generated by the sample body on to a sensor.

Abstract: The invention is directed to a method for improving the depth discrimination in optically imaging systems. It is applicable in particular in light microscopy for improving image quality when examining three-dimensionally extending objects. It is applicable in the method of structured illumination as described in WO 97/6509. For this purpose, influences due to variations in the brightness of the light source, positioning of the imaged periodic structure and bleaching of the object in fluorescence illumination are determined and taken into account in the calculation of the object structure.

Abstract: Provided is a laser scanning microscope having a first focusing-position control unit; and a confocal detecting unit. The first focusing-position control unit shifts a first focusing position of a laser beam on a sample in a direction of an optical axis of an objective lens. The confocal detecting unit has a confocal aperture for a confocal detection of a light emitted from the first focusing position. The microscope may include a second focusing-position control unit shifts a second focusing position of the light emitted from the first focusing position focused by the confocal detecting unit in a direction of an optical path thereof.

Abstract: A method for manufacturing a microstructure device using a near field scanning optical microscope (NSOM) laser micromachining system. A microstructure device preform, including an existing feature, is provided. The NSOM probe tip is scanned over a portion of the preform selected such that a plurality of scan lines cross the existing feature. Scanned locations of the existing feature in at least two scan lines are determined. The orientation of the existing feature is determined based on the scanned locations and the shape of the existing feature. At least one expected machining location in a subsequent scan line is determined based on the shape and orientation of the existing feature. The micro-machining laser is pulsed as the NSOM probe is scanned through the expected machining location(s) during the subsequent scan lines to form at least one fine feature on the microstructure device preform, thus, completing the microstructure device.

Abstract: A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.

Abstract: A surface texture measuring instrument provided with a near-field measuring unit (30) including a near-field probe (33) that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source (35) that generates the laser beam to be irradiated on the near-field probe (33), a detection element (38) that detects scattering effect of the near-field light generated when the near-field probe (33) is moved close to a workpiece (1), and an actuator (32) that displaces the near-field probe (33) and the workpiece (1) in a direction moving close to/away from each other, includes: a laser length-measuring unit (20) that measures a relative distance between a reference position and the workpiece (1) in the vicinity of the tip end of the near-field probe (33) or a relative distance between the reference position and the near-field probe (33).

Abstract: A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordings, the positions of these marks are determined and are used to quantify the slice thickness removed between consecutive image recordings.

Abstract: In a light raster scanning microscope with illumination arrangement (2) in the form of a line which provides an illumination beam for the illumination of a sample (23) in the form of points or point groups, a scanning arrangement (3, 4) which guides the illumination beam in the form of points or point groups over the sample in a manner so as to scan, a spot detector arrangement (5) which images, via the scanning arrangement (3, 4), the illuminated point or point group spot of the sample (23) by means of at least one confocal aperture (26) on at least one detector unit (28), and a control unit which controls the scanning arrangement (3, 4) and reads out the spot detector arrangement (5), it is provided that, in addition, a wide-field illumination source (29, 34) is provided which illuminates the sample (23) and that the control unit controls the scanning arrangement (3, 4) during the operation of the wide-field illumination source (29, 34) and reads out the spot detector arrangement (5) in such a manner that a

Abstract: A confocal laser scanning microscope acquires confocal images of a sample. The microscope is provided with an optical-microscope optical system which acquires non-confocal images of the sample by detecting measurement light coming from the sample. The optical-microscope optical system includes optical systems corresponding to at least two observation methods, and one of the optical systems is selected during use.

Abstract: A focusing method for an examination apparatus that can quickly and easily perform focusing for fluoroscopy is provided. The focusing method, for an examination apparatus that can observe fluorescence emitted from a specimen, includes a first step of irradiating the specimen with light via an objective lens to generate reflected light and fluorescence; a second step of performing focusing with respect to the surface of the specimen using the reflected light from the specimen; and a third step of performing focusing for the fluorescence based on the focal position of the specimen surface in the second step.

Abstract: A tracking auto-focus system maintains a microscope pointed at a TFT array continuously in focus so as to eliminate the auto-focusing time that would otherwise be required. The tracking auto-focus system includes, in part, a microscope Z actuator, an auto-focus sensor, an analog-to-digital converter (ADC), a signal conditioner, a digital proportional integrating and differentiating (PID) controller, and a digital-to-analog converter. The actuator adjusts the distance between the microscope's objective lens and the target and includes, in part, an amplifier, a linear motor, and a linear encoder which provides positional feedback. The auto-focus sensor together with the ADC and signal conditioner continuously monitor and detect the distance between the microscope's objective lens and the target and supply the measured distance to the amplifier. The PID controller together with the DAC stabilizes the distance separating the microscope's objective lens and the target to maintain the best focus.

Abstract: The invention relates to an autofocus system for an optical instrument (1) that images a specimen (11), having an irradiation optical system (7) for generating an irradiation beam path that generates an autofocus pattern on the specimen (11), the irradiation beam path being directed onto the specimen by means of a deflection element (10), and having an autofocus analysis unit (19) to which is conveyed, by means of a deflection element (15), a detector beam path that encompasses radiation, reflected from the specimen (11), of the irradiation beam path, a micromirror array (20) having individually controllable and adjustable micromirrors being provided in combined fashion as a deflection element (10) for the irradiation beam path and as a deflection element (15) for the detector beam path.

Abstract: A scanning microscope having a light source that emits an illuminating light beam, for illumination of a sample. The illuminating light beam extends along an illumination beam path and can be guided over and/or through the sample using a beam deflection device. A mirror which can be introduced in guided fashion into the illumination beam path directs a manipulating light beam via the beam deflection device onto the sample.

Abstract: An image acquisition apparatus is disclosed that includes: an image pickup element that acquires images obtained using a microscope; a change detector that detects the amount of change between an image acquired by the image pickup element and a subsequent image acquired by the image pickup element; and a data-reduction processor that enables reduced-data images to be output, as well as images that have not been subject to data reduction or that have been subject to a different rate of data-reduction depending on the amount of change detected by the change detector. An image recording system that uses the image acquisition apparatus is also disclosed, as well as an associated method.

Abstract: A problem in the inspection of transparent wafers and disks is the detection of top surface particles. More precisely, it is being able to assign a scattering site as being due to a particle at the top or bottom surface of a transparent wafer. A method of the present invention is to use an elliptical mirror, with a pinhole at its top focus, together with a focused beam. The focused beam will diverge as it passes through the transparent wafer and as a result any particle on the bottom surface will see a lower optical intensity and will appear weaker than a top surface particle. The suppression of scattered light from the bottom surface occurs because the source of the scattered light (the bottom surface) is far from the bottom foci of the elliptical mirror.

Abstract: A microscope system according to the present invention comprises a stage on which a specimen is placed, an image forming optical system that forms an image of the specimen placed on the stage, an image-capturing device that captures the image of the specimen formed by the image forming optical system, a focused position detection device that detects a focused position for the specimen based upon the specimen image captured by the image-capturing device and a focused position storage device that stores in memory the focused position detected by the focused position detection device. The focused position detection device sets a search range centered around the focused position stored in memory at the focused position storage device and detects the focused position anew by causing the stage and the image forming optical system to move relative to each other over the search range thus set each time a focusing operation is executed.

Abstract: A microscope digital image acquiring system 1 includes a microscope 2 composed of a microscope unit 10 forming an enlarged image of an object O and a microscope controller 20 controlling movement of the microscope unit 10, an imaging instrument 3 composed of a camera head unit 30 that is attached to the microscope 2 and has an imaging device detecting the enlarged image of the object O and a camera controller 40 that receives a detected signal output from the imaging device and outputs image information of the object O. The microscope controller 20 and the camera controller 40 operate cooperatively in response to control commands sent externally. The system 1 has a connecting cable 52 connecting with both instruments 20 and 40 to carry out communication with each other. Both instruments 20 and 40 operate cooperatively by communicating control commands with each other through the connecting cable 52.

Abstract: The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zp at specimen points Xp, Yp are determined by means of a reference height Zref of the specimen (1) together with the running height profile of the scanning stage (2).

Abstract: In the manufacture of integrated circuits on a wafer, it is necessary to monitor the manufacturing process by inspecting the ICs as to whether errors or defects have occurred during production. It is already known to use a scattered-light device (32) to determine whether a defect is present on the wafer. According to the present invention, defect examination is now improved in that defect-suspected regions (33) are identified using the scattered-light device (32). With a further examination system (30, 28) different from the scattered-light device (32), a determination is then made as to whether the defect-suspected regions (33) are defects. The latter can then also be classified.

Abstract: A microscope system comprises a light guiding optical system 20 containing an objective lens 21 and a beam splitter 25 for splitting an optical image of a sample S to a first optical path and a second optical path, a photodetector 31 disposed on the first optical path used to acquire an image of the sample S, and a CCD camera 32 disposed on the second optical path for acquiring a two-dimensional image for focus control. The camera 32 is disposed being inclined at an angle of ? with respect to the optical path so that the optical path length in the light guiding optical system 20 varies along the z-axis direction. The image acquired by the camera 32 is analyzed by a focus controller 37, and the focal point for image pickup with respect to the sample S is controlled on the basis of the analysis result. Accordingly, there can be implemented a microscope system in which image acquisition of the sample and focus control for image pickup can be simultaneously performed.

Abstract: A confocal laser scanning microscope acquires confocal images of a sample. The microscope is provided with an optical-microscope optical system which acquires non-confocal images of the sample by detecting measurement light coming from the sample. The optical-microscope optical system includes optical systems corresponding to at least two observation methods, and one of the optical systems is selected during use.

Abstract: The present invention concerns a method for setting the system parameters of a scanning microscope, preferably a confocal scanning microscope, acquisition of an image of the specimen performed with the scanning microscope being controlled by a control computer. After an image of the specimen is acquired at least one image quality feature is inputted by a user and is converted by the control computer into at least one system parameter of the scanning microscope.

Abstract: An apparatus and method for performing surface microscopy of an optical device uses an optical fiber taper including a microsphere endpoint as a near field probe. A transmission fiber is disposed adjacent to the microsphere so as to evanescently couple an optical test signal into the microsphere. A series of extremely narrow whispering gallery mode (WGM) resonances are created within the microsphere, with an associated electromagnetic field radiating outward therefrom. The microsphere probe may then be moved over the surface of an optical device being analyzed (or the device translated underneath the microsphere), where any abnormalities in the surface (such as defects, scratches and the like) will perturb the electromagnetic field pattern and be reflected in changes in the measured output power from the microsphere.