Abstract: Near-field optical microscope with a probe tip which is arranged on one side of a light-transmitting specimen and moved in a scanning manner. The probe tip serves as a point light source. Optics for collecting light transmitted through the specimen and transmitting it to a detection unit or for collecting illumination light are provided on the other side of the specimen. The movement of the probe tip is adapted to on the detection side, or the probe serves to detect specimen light. A detection unit is arranged following the probe in the direction of illumination, and a scanning illumination adapted to the probe movement is carried out on the other side of the specimen.

Abstract: The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.

Abstract: The present focusing method is used in a focus detecting apparatus comprising an objective lens, means for entering a luminous flux for focus detection into a target object from a position inconsistent with an optical axis of the objective lens through at least the objective lens, a condenser lens for converging the luminous flux after it is reflected by the target object and again passes through the objective lens, two two-division sensors disposed with the same optical inclination in front of and behind a position where the reflected luminous flux is converged by the condenser lens when a focus of the objective lens is adjusted to the surface of the target object, and a signal processing circuit for performing operational processing of signals from the two two-division sensors. The focus detecting apparatus detects whether the focus of the objective lens is adjusted to the surface of the target object.

Abstract: There are provided an automatic image collection apparatus and method capable of acquiring and automatically classifying fast an image of a defect part caused in a semiconductor wafer production process detected by a defect inspection unit. The image collection apparatus for automatically imaging and collecting images of a plurality of observed parts on a semiconductor wafer is provided with a scheduling portion for deciding the imaging order of the defects and stage moving velocities based on the positional relation of the plurality of observed parts on the wafer and a control portion for feed backing the stage movement amount to the beam deflection amount, thereby imaging and collecting images via an optimal route while moving the stage.

Abstract: A laser microscope includes a pulse laser which generates irradiation light having a pulse string, a laser scanner which irradiates a specimen by scanning the irradiation light on the specimen, a detector which detects emitted light generated from the specimen, a shutter which is inserted in an optical path of the irradiation light, and intercepts and transmits the irradiation light for a time period shorter than a scanning time during which a small region on the specimen is scanned, wherein the detector obtains a light amount for each scanning time, and a controller which controls the shutter to intercept a predetermined number of pulses of the pulse string of the irradiation light for each scanning time.

Abstract: An optical near field probe of high resolution and high efficiency is disclosed. A near field light is generated using a tapered, plane scatterer formed on a substrate surface. The intensity of the near field light is enhanced by making the area of the scatterer smaller than that of a light spot and by selecting the material, shape, and size of the scatterer so as to generate plasmon resonance. An optical near field generator having a high light utilization efficiency can be obtained.

Abstract: An improved confocal microscope utilizes an array of light sources imaged onto an object, and an array of small detectors to detect the light from each source. Cross talk between the beams of light is prevented by temporally modulating the sources at different frequencies. Light from one source is temporally modulated at a first frequency, for example in the megahertz region. A reference signal at the same frequency plus an offset frequency is also sent to the detector assigned to that source. The detected signal and the reference signal are then beat together, and heterodyne detection is used to detect only the light from the assigned source, which will beat with the reference signal and produce a signal at the offset frequency. Light from other sources beat with the reference signal to produce different frequency beat signals, which are filtered out using bandpass filters.

Abstract: An operating microscope is disclosed which has a variable magnification observing optical system capable of varying according to an observing magnification the exit position of illuminating light to be irradiated onto an observation target. For example, during low-magnification observation using a wide observing light flux, illuminating light is made to exit toward the observation target from a position distant from an observing optical axis, whereas during high-magnification observation using a narrow observing light flux, illuminating light is made to exit toward the observation target from a position close to the observing optical axis. Accordingly, the observation target can be illuminated from a direction as close as possible to the observing optical axis without allowing a member for illumination to interfere with an observing light flux.

Abstract: A focus point detection device comprises an illuminator that illuminates a specimen obliquely by letting a light flux at an angle to an optical axis of an objective lens enter in such a way that the optical axis and the light flux cross each other in the vicinity of a point in focus at an object side of the objective lens, an image-forming device that forms an image of the observation plane by converging a light from the observation plane of the specimen via the objective lens and a light amount detector that detects amount of light in response to the image formed by the image-forming device with a light sensor, wherein the light amount detector detects a light other than a regular reflection light from a surface of the specimen. Also, a fluorescence microscope comprises the focus point detection device and the infinity objective lens.

Abstract: The invention relates to an optical system for determining the distribution, environment, or activity of fluorescently labeled reporter molecules in cells for the purpose of screening large numbers of compounds for specific biological activity. The invention involves providing cells containing fluorescent reporter molecules in an array of locations and scanning numerous cells in each location with a fluorescent microscope, converting the optical information into digital data, and utilizing the digital data to determine the distribution, environment or activity of the fluorescently labeled reporter molecules in the cells. The array of locations may be an industry standard 96 well or 384 well microtiter plate or a microplate which is a microplate having a cells in a micropaterned array of locations. The invention includes apparatus and computerized method for processing, displaying and storing the data.

Abstract: A scanning electron microscope equipped with a laser defect detection function has an automatic focusing function that performs the steps of: obtaining a deviation (offset) amount between focal positions of an optical microscope and a scanning electron microscope; detecting a defect by a laser dark-field image of the optical microscope; analyzing the dark-field image to readjust a focus of the optical microscope to adjust a height of the optical microscope; and automatically adjusting a focus of the scanning electron microscope by adding a readjusted amount of the focus of the optical microscope to the offset amount before an observation is conducted by the scanning electron microscope.

Abstract: The invention relates to reverse focusing and methods and systems which employ reverse focusing. In a particular example, an automated focusing microscope uses one or more reverse focusing steps to acquire a focused image. Computer programs having instructions for instructing a computer to acquire a focused image by reverse focusing are also included.

Abstract: The invention is directed to an autofocusing device, preferably for microscopes for wafer inspection, in which a point-shaped illumination diaphragm (1) which is illuminated by laser light is imaged in an observed object (5). An image of the point illuminated on the observed object (5) is formed in a measurement diaphragm arrangement conjugate to the illumination diaphragm (1), the position of maximum intensity of this image is determined by a position-sensitive detector (11) and this position is compared to a position corresponding to the focus position, and an actuating signal for autofocusing is obtained from the deviation between the two positions.

Abstract: A scanning probe microscope uses two different scanners (also called “scanning stages”) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called “x-y scanner”) scans a sample in a plane (also called “x-y plane”), while the other scanner (called “z scanner”) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called “z direction”) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.

Abstract: A microscope having a light source that emits light pulses for illumination of a specimen, the light pulses containing photons having a photon energy, is disclosed. The microscope is characterized in that a detector, which has an energy band gap between a quiescent state and an active state that is greater than the photon energy, is provided for determination of a time-defined pulse width of the light pulses. Also described are a detector for determination of a time-defined pulse width of light pulses for illumination of a microscopic specimen, and a method for microscopy.

Abstract: A scanning microscope has at least one illumination source for emitting a light beam, which is fed via a microscope optic to a specimen and scans the latter. In order to correct the imaging defect of the microscope optic, said defect is determined and a correction value is determined therefrom. This correction value is used for influencing control signals which control the impinging of the light beam on the specimen.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u, v) with a periodical analytical function determining a pitch o

Abstract: A confocal macroscope is disclosed. According to one embodiment of the present invention an imaging system includes a specimen stage, a source of a collimated excitation beam centered on a beam axis, and a scan-head movably positioned to focus the collimated excitation beam on a focal point in an object plane above the specimen stage and to receive light emitted or reflected from the object plane. According to another embodiment of the present invention the imaging system has three orthogonal motion axes that harness the quality of a collimated infinity space to stretch in scanning a specimen.

Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Abstract: The apparatus for automatically focusing an image in a microscope includes onto an object plane includes an optical system configured to form an optical image of a sample plane to be observed, an autofocusing detection system, and a focus correction system. The autofocusing system includes an autofocusing light beam source for generating autofocusing light beams. The autofocusing system further includes a detection system lens for directing autofocusing light beams to an autofocusing detection device, and an autofocusing detection device for determining the amount of displacement of the image of the object plane from a desired focused reference plane. The focusing correction system includes a feedback controller and focus adjusting device for automatically adjusting the distance between an objective lens and the sample plane in order to properly focus the image in the optical system. A related method of automatically focusing an image of an object plane in a microscope.

Abstract: The quality of images produced by confocal microscopy, and especially scanning laser confocal microscopy, is enhanced especially for images obtained in turbid mediums such as many biological tissue specimens, by reducing speckle from scatterers that exist outside (above and below) the section which is being imaged by utilizing sheared beams, both of which are focused to laterally or vertically offset spots and polarizing the beams to have opposite senses of circular polarization (right and left handed circular polarization). The return light from the section of certain polarization is detected after passing through the confocal aperture of the confocal microscope. Images can be formed using optical coherence detection of the return light. Light from scatterers outside the section of interest, which are illuminated by both of the sheared beams, interfere thereby reducing speckle due to such scatterers, and particularly scatters which are adjacent to the section being imaged.

Abstract: The invention relates to an optical system for determining the distribution, environment, or activity of fluorescently labeled reporter molecules in cells for the purpose of screening large numbers of compounds for specific biological activity. The invention involves providing cells containing fluorescent reporter molecules in an array of locations and scanning numerous cells in each location with a fluorescent microscope, converting the optical information into digital data, and utilizing the digital data to determine the distribution, environment or activity of the fluorescently labeled reporter molecules in the cells. The array of locations may be an industry standard 96 well or 384 well microtiter plate or a microplate which is a microplate having a cells in a micropaterned array of locations. The invention includes apparatus and computerized method for processing, displaying and storing the data.

Abstract: A scanning microscope. An objective lens receives light emitted from a sample in object space and propagates it to image space thereof. A collection lens receives light from the objective lens and propagates it to a focal point in image space of the collection lens. A motor has an axis of rotation that is offset from and extends in substantially the same direction as the optical axis. The motor rotates the objective lens about the axis of rotation to scan across a sample in object space of said objective lens. The sample is mounted on a stage. After each rotation of the objective lens, the stage is advanced in a radial direction with respect to the axis of rotation so that each subsequent scan covers a new part of the sample. For fluorescence microscopy, a laser light source is provided. A wavelength-selective beamsplitter directs the laser light toward the objective lens, while allowing fluorescence or reflected light emitted from the sample to pass through to the collection lens.

Abstract: Arrangement and method for focus monitoring in a microscope with digital image generation, preferably in a confocal microscope.

Abstract: An automatic focal point sensing device comprises an image sensor on which an optical image is projected and which photoelectrically converts the image pixel by pixel to generate image data, a first calculation circuit which generates more than one pixel block, each pixel block being the sum of consecutive pixel data items, calculates one of the sum of the differences between two adjacent pixel blocks and the sum of the square of each of the differences of two adjacent pixel blocks as the contrast value, and which determines more than one contrast value by changing a combination of pixel data items contained in each pixel block each time image data is inputted, and a second calculation circuit for calculating the sum of the contrast values determined by the first calculation circuit as an evaluation value and determining the degree of focusing on the basis of the evaluation value.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u,v) with a periodical analytical function determining a pitch of

Abstract: A confocal macroscope is disclosed. According to one embodiment of the present invention an imaging system includes a specimen stage, a source of a collimated excitation beam centered on a beam axis, and a scan-head movably positioned to focus the collimated excitation beam on a focal point in an object plane above the specimen stage and to receive light emitted or reflected from the object plane. According to another embodiment of the present invention the imaging system has three orthogonal motion axes that harness the quality of a collimated infinity space to stretch in scanning a specimen.

Abstract: An optical near field probe of high resolution and high efficiency is disclosed. A near field light is generated using a tapered, plane scatterer formed on a substrate surface. The intensity of the near field light is enhanced by making the area of the scatterer smaller than that of a light spot and by selecting the material, shape, and size of the scatterer so as to generate plasmon resonance. An optical near field generator having a high light utilization efficiency can be obtained.

Abstract: The object of the invention is to provide a near-field spectrometer that can efficiently obtain a true spectral information.

Abstract: A biochemical substance is efficiently observed with focusing accurately and rapidly on the substance disposed on an inside of a container. A focusing mark, which is used as a reference when a focal point of an optical system is adjusted, is disposed on the outside of a transparent bottom of each well in a micro plate. A focus-shift-distance corresponding to a distance between the mark and a desired position to be observed is determined. The optical system focuses on the mark, and then, the focal point the optical system is shifted by the focus-shift-distance. This shift allows an object to be focused on accurately and rapidly even when unclear images are obtained.

Abstract: An apparatus and method for measuring an aperture of a near-field optical probe is provided. The apparatus includes a light source, an optical detector, and a filter. The light source radiates light to the near-field optical probe. The optical detector is positioned before the near-field optical probe and receives the light transmitted through the near-field optical probe to detect light intensity. The filter is disposed between the light source and the optical detector and transmits only light of wavelengths in a specific mode from the light transmitted through the near-field optical probe. Thus, an aperture diameter of the near-field optical probe can accurately be measured in real-time without damaging the near-field optical probe.

Abstract: An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological and chemical sensors and the sample or a probe in surface profilometry. The invention involves the use of one or more diffractive optical elements, including diffraction gratings and holograms, combined with conventional optical elements, to form a plurality of light beams, each with a selectable shape and intensity, from a single light source, reflect the beams off mechanical objects and process the reflected beams, all to the end of measuring the position of such objects with a high degree of precision. The invention may also be used to effect mechanical changes in such objects.

Abstract: This invention provides an angled-dual-axis confocal scanning microscope comprising a fiber-coupled, angled-dual-axis confocal scanning head and a vertical scanning unit. The angled-dual-axis confocal scanning head is configured such that an illumination beam and an observation beam intersect optimally at an angle &thgr; within an object and the scanning is achieved by pivoting the illumination and observation beams using a single scanning element, thereby producing an arc-line scan. The vertical scanning unit causes the angled-dual-axis confocal scanning head to move towards or away from the object.

Abstract: The invention relates to reverse focusing and methods and systems which employ reverse focusing. In a particular example, an automated focusing microscope uses one or more reverse focusing steps to acquire a focused image. Computer programs having instructions for instructing a computer to acquire a focused image by reverse focusing are also included.

Abstract: A scanning microscope for examination of a sample (31), having at least one optical component (89) that exhibits a wavelength-dependent characteristic and having an apparatus for wavelength-dependent detection that acquires measured values in at least two wavelength regions each characterized by a spectral width and a spectral position, is disclosed. The scanning microscope is characterized in that the wavelength-dependent characteristic of the at least one optical component (89) can be ascertained, can be at least temporarily stored in the form of a data set in a memory (49, 81), and can be considered upon acquisition and/or upon utilization of the measured values.

Abstract: This invention provides an angled-dual-axis optical coherence scanning microscope comprising a fiber-coupled, high-speed angled-dual-axis confocal scanning head and a vertical scanning unit. The angled-dual-axis confocal scanning head is configured such that an illumination beam and an observation beam intersect optimally at an angle &thgr; within an object and the scanning is achieved by pivoting the illumination and observation beams jointly using a high-speed scanning element. The vertical scanning unit causes the angled-dual-axis confocal scanning head to move towards or away from the object, thereby yielding a vertical cross-section scan of the object, while keeping the optical path lengths of the illumination and observation beams unchanged. By incorporating MEMS scanning mirrors and fiber-optic components, the angled-dual-axis optical coherence scanning microscope of the present invention can be miniaturized to provide a particularly powerful tool for in vivo medical imaging applications.

Abstract: A phosphor coated waveguide for efficient collection and detection of back-scattered electrons in an electron beam apparatus such as a scanning electron microscope is disclosed. The waveguide for directing photons to an optical detector generally comprises a first waveguide portion having opposing first and second faces defining a beveled hole therebetween to allow an electron beam to pass therethrough, the beveled hole decreasing in cross-sectional size from the first to the second face. A phosphor coating on the second face around the beveled hole converts the back-scattered electrons to photons. The first waveguide portion may include angled faces at an end further from the optical detector. A surface defined by the beveled hole and/or the angled faces may have a reflective coating. The waveguide may also include a second waveguide portion that adjoins and flares out relative to the first waveguide portion to further increase waveguide efficiency.

Abstract: A nanowire array supports axially-propagating TEM modes. The resolution of the array is determined by the interwire spacing rather than by the optical wavelength. The resolution can be made smaller than the optical wavelength. A bipartite honeycomb configuration is the preferred structure to support the TEM modes. Each nearest neighbor wire pair in the array (from opposite classes in a bipartite nanowire array) can be viewed as a two-wire transmission line, embedded in the surrounding matrix. Selective pairs of nanowires can be activated with wire loops, in a manner similar to that used to couple light to coaxes. The pattern of the wire loops determines where the array is excited; hence where light is transmitted. In effect, loop positioning provides a method of “writing” a desired transmission pattern into a pristine array in a similar manner as lithography.

Abstract: A microscope which is capable of quickly switching different methods of observation such as phase contrast observation and bright field observation. The microscope comprises a condenser lens for condensing an illumination light, a diaphragm disposed on the optical axis of the condenser lens and having a variable aperture area, an aperture setting means for setting the an aperture area of the diaphragm, a slider disposed on the light condensing side of the condenser lens and having a first aperture portion having a ring slit and a second aperture portion, a first control means for restricting the aperture area to the full open aperture side when the first aperture portion is disposed on the optical axis of the condenser lens, and a second control means for releasing the restriction on the aperture portion when the second aperture portion is disposed on the optical axis of the condenser lens.

Abstract: A near-field optical microscope comprises an illumination part, a probe, a light detection part, and a scanning part. The illumination part illuminates a sample surface with light. The probe is provided at a position near the sample surface illuminated with the light. The light detection part detects light scattered by the probe. The scanning part scans the sample and a top end of the probe relatively to each, other. The top end of the probe is a top end of an extending part extending in one direction from a body of the probe. In the side of the top end of the extending part, the extending part is at most three times or less as thick as a top end diameter, over a length of a wavelength of the illuminating light. The near-field optical microscope further comprises means for vibrating the probe in a lengthwise direction of the extending part.

Abstract: A multiple source array for illuminating an object including: a reflective mask having an array of spatially separated apertures; at least one optic positioned relative to the mask to form an optical cavity with the mask; and a source providing electromagnetic radiation to the optical cavity to resonantly excite a mode supported by the optical cavity, wherein during operation a portion of the electromagnetic radiation built-up in the cavity leaks through the mask apertures towards the object.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “noncooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A confocal microscope for observing the image of an object to be observed by scanning a spot light for illuminating the object through an objective lens, comprises an aperture stop for adjusting the numerical aperture of the objective lens; and a control unit for calculating a contrast of the image of the object corresponding to each focal position while varying the focal position of the objective lens along the direction of the optical axis so as to determine the height of the unevenness on the surface of the object from a change of the contrast, thereby setting the aperture stop to have the focal depth substantially equal to the height of the unevenness.

Abstract: A near-field optical head which reproduces, with high S/N, information recorded with extreme density and is compact in structure. On an electrode (2) is formed a recording medium (3) that emits a light by applying an electric field. Brought into proximity to a recording medium (3) is a near-field optical head (101) having a slider (31) formed with an inverted cone formed hole such that an apex thereof is rendered as a microscopic aperture (6). A microscopic electrode (5) is formed on a side surface (32) of the inverted cone formed hole. An electric field (9) is applied only to a microscopic region to cause light emission. It is possible at the aperture (6) to detect a light emitted only by the microscopic region.

Abstract: A method and a device used in an optical microscope apparatus and for automatic focusing, and using an image contrast detection method which is not affected by noise. In order to remove a noise component, a contour component of an image picked up by the microscope is detected as a contour signal obtained by a difference between an original image and a delayed signal of the original image. A difference in level in maximum and minimum values of this contour signal is adopted as an image contrast signal. Such image contrast signals are produced at various microscope focusing direction positions. A position where a maximum image contrast signal is obtained is made to be an in-focus position.

Abstract: This invention provides an angled-dual-axis optical coherence scanning microscope comprising a fiber-coupled, high-speed angled-dual-axis confocal scanning head and a vertical scanning unit. The angled-dual-axis confocal scanning head is configured such that an illumination beam and an observation beam intersect optimally at an angle &thgr; within an object and the scanning is achieved by pivoting the illumination and observation beams jointly using a high-speed scanning element, thereby producing an arc-line scan. The vertical scanning unit causes the angled-dual-axis confocal scanning head to move towards or away from the object. Optical coherence detection is employed to provide temporal gating, thus detecting mostly single-scattered light and preventing multiple-scattered light from dominating the signal when imaging in a scattering medium.

Abstract: An image enhancement technique for use, for example in infrared or photoemission microscopy, comprises obtaining an in-focus image of the sample and an out of focus image achieved by relative movement of the sample and the microscope, and subtracting the out of focus image from the in-focus image. As a result the low frequency components are subtracted out, together with the lens and focal plane array aberrations, providing an enhanced resultant image. Because of the high levels of magnification, only small movement is required to obtain the out of focus image, allowing an enhanced image to be obtained in real time.

Abstract: A near-field optical microscope comprising an optical probe which is arranged in opposition to a sample and irradiates the sample with an evanescent wave, a plurality of photodetectors which detect respective components of light scattered in different directions, among components of the scattered light generated by scattering of the evanescent wave by the sample, and a processor which analyzes characteristics of the sample on the basis of respective detection signals of the plurality of photodetectors.

Abstract: A confocal microscope has a motorized scanning table for moving the sample perpendicularly to the optical axis of the microscope. The object is illuminated simultaneously at many places by means of a light source array. The light reflected or scattered at the object is detected by means of a diaphragm array, which is conjugate to the object and to the light source array. A sensor array is provided as a detector and makes a displacement of charges possible between individual positions in the scanning direction. The sensor is a so-called TDI sensor. The displacement of the charges is synchronized with the motion of the object corresponding to the motion of the image points in the plane of the sensor array. The image data can thereby be recorded during the motion of the object, so that even large object fields can be sensed in a short time with high lateral resolution.

Abstract: A method for operating a preferably confocal laser scanning microscope, the laser system (1) comprising at least one solid-state laser or a diode laser, is characterized in that, in order to avoid undesired distortions of the image information, the scanning procedure or the recording of data is synchronized with the phase of an at least largely continuous emission of intensity from the laser system (1). The laser system (1) and the data recording system (3) are synchronized by a control unit (2).