With Sample Vaporizing Means Patents (Class 250/425)
  • Patent number: 10347457
    Abstract: A system and method for varying the temperature of a faceplate for an ion source is disclosed. The faceplate is held against the chamber walls of the ion source by a plurality of fasteners. These fasteners may include tension springs or compression springs. By changing the length of the tension spring or compression spring when under load, the spring force of the spring can be increased. This increased spring force increases the compressive force between the faceplate and the chamber walls, creating improved thermal conductivity. In certain embodiments, the length of the spring is regulated by an electronic length adjuster. This electronic length adjuster is in communication with a controller that outputs an electrical signal indicative of the desired length of the spring. Various mechanisms for adjusting the length of the spring are disclosed.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: July 9, 2019
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Alexander S. Perel, Sr., David P. Sporleder, Adam M. McLaughlin, Craig R. Chaney, Neil J. Bassom
  • Patent number: 10179215
    Abstract: Apparatus and methods are described for use with a vaporizer that vaporizes at least one active ingredient of a plant material. In response to receiving a first input to the vaporizer, the plant material is heated, in a first heating step. An indication of the temperature of the plant material is detected, and, in response to detecting an indication that the temperature of the plant material is at a first temperature, the first heating step is terminated, by withholding causing further temperature increase of the plant material. The first temperature is less than 95 percent of the vaporization temperature of the active ingredient. Subsequently, a second input is received at the vaporizer. In response thereto, the plant material is heated to the vaporization temperature, in a second heating step. Other applications are also described.
    Type: Grant
    Filed: March 19, 2015
    Date of Patent: January 15, 2019
    Assignee: Altria Client Services LLC
    Inventor: Yossef Raichman
  • Patent number: 9165752
    Abstract: The invention generally relates to systems and methods for sample analysis. In certain embodiments, the invention provides a system for analyzing a sample that includes a probe including a material connected to a high voltage source, a device for generating a heated gas, and a mass analyzer.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: October 20, 2015
    Assignee: Purdue Research Foundation
    Inventors: Robert Graham Cooks, Guangtao Li, Xin Li, Zheng Ouyang
  • Patent number: 9120107
    Abstract: Femtoliter to milliliter volumes of one or a plurality of different liquids are accurately transported, dispensed and/or treated where the fluids are energized purely electrokinetically or in a hybrid mode where auxiliary coordinated energy sources including but not limited to pneumatic, piezoelectric; peristaltic; ultrasonic; thermal; gravitational, acoustic are employed concurrently or sequentially to transport liquids for various purposes from diverse devices to targets of all types being made of a conductive, non-conductive or semiconductive materials. Liquids in nested Gaussian surfaces or common liquid handling devices (e.g.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: September 1, 2015
    Inventor: Andrew Daniel Sauter, Jr.
  • Patent number: 9024273
    Abstract: An apparatus that generates molecular ions and methods to generate molecular ions are disclosed. At least a first species is ionized in an ion source. The first species ions and/or first species combine to form molecular ions. These molecular ions may be transported to a second chamber, which may be an arc chamber or diffusion chamber, and are extracted. The molecular ions may have a larger atomic mass than the first species or first species ions. A second species also may be ionized with the first species to form molecular ions. In one instance, the first and second species are both molecules.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: May 5, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Ludovic Godet, Svetlana Radovanov, Christopher R. Hatem
  • Patent number: 9018598
    Abstract: A system and method comprising an ion production chamber having a plasma source disposed in said chamber, a harvest gas disposed to flow through the chamber from an inlet to an outlet, and a jet, said jet operable to introduce a sample into the harvest gas flow. In some embodiments the system includes using helium as the harvest gas. Certain embodiments include introducing a sample perpendicular to the harvest gas flow and using multiple sample introduction jets to increase mixing efficiency. The charge sample may be coupled to a MEMS-based electrometer.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: April 28, 2015
    Assignee: Brechtel Manufacturing, Inc.
    Inventor: Fredrick J Brechtel
  • Patent number: 9006679
    Abstract: Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer.
    Type: Grant
    Filed: June 4, 2013
    Date of Patent: April 14, 2015
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hidetoshi Morokuma, Koji Ishiguro, Shun Kumano
  • Patent number: 8963101
    Abstract: The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: February 24, 2015
    Assignee: Ionsense, Inc.
    Inventors: Jordan Krechmer, Brian D. Musselman
  • Patent number: 8937288
    Abstract: The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: January 20, 2015
    Assignee: Purdue Research Foundation
    Inventors: Robert Graham Cooks, Ahmed Mohamed Hamid, Alan Keith Jarmusch, Zheng Ouyang
  • Patent number: 8932875
    Abstract: The invention generally relates to systems and methods for sample analysis. In certain embodiments, the invention provides a system for analyzing a sample that includes a probe including a material connected to a high voltage source, a device for generating a heated gas, and a mass analyzer.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: January 13, 2015
    Assignee: Purdue Research Foundation
    Inventors: Robert Graham Cooks, Guangtao Li, Xin Li, Zheng Ouyang
  • Patent number: 8927942
    Abstract: A ion source comprises: a chamber, an injection to inject matter into the chamber, wherein said matter comprises at least a first species, a tip with an apex located in the chamber, wherein the apex has a surface made of a metallic second species, a generator to generate ions of said species, and a regulation system adapted to set operative conditions of the chamber to alternatively generate ions from the gaseous first species, and ions from the non-gaseous metallic second species.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: January 6, 2015
    Assignees: Centre National de la Recherche Scientifique—CNRS, Universite Claude Bernard Lyon
    Inventors: Jacques Gierak, Nicolas Allemandou, Klaus Hasselbach, Jean-Paul Leggeri, Guillaume Donnier-Valentin, Stephen Purcell, Pauline Gavand
  • Patent number: 8920658
    Abstract: Methods and apparatus for desolvating flowing liquid streams while retaining temporal resolution of dissolved substrates are disclosed. A novel small-scale self-regulating spray dryer preserves temporal resolution while desolvating a liquid chromatography eluent stream and depositing the solute onto an optical surface for infrared spectrographic analysis. The liquid eluent is pumped through a heated nebulizer to create a high-speed jet of solute containing liquid and solvent vapor. This jet is directed circumferentially inside a hot cylindrical cavity. Centrifugal force causes the larger liquid droplets to travel along the outer diameter of the cavity. The cavity surface is heated to cause the droplets to film boil. Film boiling reduces droplet contact with the cavity surface thereby retaining the solute in the droplets. The solute temperature is limited by controlling the pressure into which the solvent evaporates from the droplets.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: December 30, 2014
    Assignee: Spectra Analysis Instruments, Inc.
    Inventors: William W. Carson, Sidney Bourne
  • Patent number: 8901524
    Abstract: An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: December 2, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Takeshi Asayama, Kouji Kakizaki, Akira Endo, Shinji Nagai
  • Patent number: 8872127
    Abstract: The present invention relates to the design and use of an ion source with a rapid beam current controller for experimental and medicinal purposes. More particularly, the present invention relates to the design and use of a laser ion source with a magnetic field applied to confine a plasma flux caused by laser ablation.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: October 28, 2014
    Assignee: Brookhaven Science Associates, LLC
    Inventor: Masahiro Okamura
  • Patent number: 8859986
    Abstract: The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: October 14, 2014
    Assignee: Purdue Research Foundation
    Inventors: Robert G. Cooks, Ahmed M. Hamid, Alan K. Jarmusch, Zheng Ouyang
  • Patent number: 8822949
    Abstract: The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.
    Type: Grant
    Filed: February 2, 2012
    Date of Patent: September 2, 2014
    Assignee: Ionsense Inc.
    Inventors: Jordan Krechmer, Brian D. Musselman
  • Publication number: 20140227527
    Abstract: PVD and HPHT methods and apparatus for producing materials, for example nitrides, are disclosed.
    Type: Application
    Filed: September 27, 2012
    Publication date: August 14, 2014
    Applicant: Nitride Solutions Inc.
    Inventors: Daniel Brors, Richard Ernest De-Maray, David Slutz
  • Patent number: 8796617
    Abstract: The invention relates generally to sample ionization, and provides ionization probe assemblies, systems, computer program products, and methods useful for this purpose.
    Type: Grant
    Filed: January 3, 2012
    Date of Patent: August 5, 2014
    Assignee: Ibis BioSciences, Inc.
    Inventors: Steven A. Hofstadler, Jose R. Gutierrez, James C. Hannis, Jared J. Drader, Rex O. Bare, Jeffrey C. Smith, Paul J. Gleason, Jared Nathanson
  • Patent number: 8785881
    Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: July 22, 2014
    Assignee: Massachusetts Institute of Technology
    Inventors: Paulo C. Lozano, Steven Mark Arestie
  • Patent number: 8753586
    Abstract: An apparatus for chemical separations includes a microfluidic substrate having an outlet aperture for outputting an eluent of a sample, a spray unit having an inlet to receive the eluent and an outlet to emit a spray of the eluent, and a force-applying unit. The spray unit has a deformable portion defining the inlet and having an elastic modulus that is lower than an elastic modulus of the microfluidic substrate. The force-applying unit, such as a spring, is disposed to urge the deformable portion in contact with the substrate to form a substantially fluid-tight seal.
    Type: Grant
    Filed: March 5, 2010
    Date of Patent: June 17, 2014
    Assignee: Waters Technologies Corporation
    Inventors: David P. Prentice, Russell L. Keene, Stanilaw Koziol, Joseph D. Michienzi, Paul E. Linderson
  • Patent number: 8742334
    Abstract: A spinning cell device is described for fast and convenient standardization and analysis of constituents and isotopes in solid samples by laser ablation inductively coupled plasma (LA-ICP) spectrometry. The method and apparatus for performing the method require the sample under test and a standard to be spun during ablation allowing the quasi-simultaneous ablation of both materials. The aerosols resulting from the ablation of sample and standard are mixed in the ablation cell allowing quantification of the ablated metals by the method of standard addition or isotope dilution. The relative proportion of standard verses sample ablated can be changed by altering the trajectory of the laser beam. The ablated aerosol is swept into an inductively coupled plasma by a carrier gas and analyzed by mass spectrometry.
    Type: Grant
    Filed: April 19, 2013
    Date of Patent: June 3, 2014
    Assignee: The United States of America, as represented by the Secretary of Commerce, the National Institute of Standards and Technology
    Inventors: John L. Molloy, Naomi Bier, Fanny Claverie, Julien F. C. Malherbe
  • Patent number: 8723110
    Abstract: An apparatus for generating ions includes an Electrospray ionization source configured to provide a spray of charged droplets from a sample solution during operation of the apparatus; an atmospheric pressure chemical ionization (APCI) source including a corona discharge needle configured to produce a corona discharge that further ionizes the spray during operation of the apparatus; and a gas delivery system configured to deliver a gas flow to the corona discharge needle during operation of the apparatus, wherein the gas flow comprises a reagent ion gas which facilitates ionization of the spray by the corona discharge.
    Type: Grant
    Filed: August 26, 2011
    Date of Patent: May 13, 2014
    Assignees: PerkinElmer Health Sciences, Inc., Chem-Space Associates, Inc.
    Inventors: Craig M. Whitehouse, Thomas P. White, Ross C. Willoughby, Edward William Sheehan
  • Patent number: 8710473
    Abstract: A droplet generation and detection device may include: a droplet generation unit for outputting a charged droplet; at least one droplet sensor including a magnetic circuit including a coil configured of an electrically conductive material, the magnetic circuit being disposed such that the charged droplet passes around the magnetic circuit, and a current detection unit for detecting current flowing in the coil and outputting a detection signal; and a signal processing circuit for detecting the charged droplet based on the detection signal.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: April 29, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Hakaru Mizoguchi, Kouji Kakizaki, Osamu Wakabayashi, Masahiro Inoue
  • Patent number: 8710459
    Abstract: A UV liquid treatment system comprises least one UV treatment unit including a unit container having a container interior; a liquid distribution head carried by the unit container; at least one liquid inlet passage in the liquid distribution head and disposed in fluid communication with the unit container interior of the unit container; at least one liquid outlet passage in the liquid distribution head and disposed in fluid communication with the unit container interior of the unit container; a transparent light bulb shield carried by the liquid distribution head and having a shield interior; an assembly cavity in the liquid distribution head and communicating with the shield interior of the light bulb shield; a UV light assembly having a UV light bulb removably seated in the assembly cavity, the UV light bulb disposed in the shield interior of the light bulb shield; and a power source electrically connected to the UV light bulb of the UV light assembly.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: April 29, 2014
    Inventor: Thomas W. Davis, III
  • Patent number: 8704194
    Abstract: Target molecules in a sample can be detected at an improved sensitivity by means of a mass spectrometer. A sample with or without a matrix is placed on a substrate and irradiated with a converged and pulsed primary beam selected from an ion beam, a neutral particle beam or a laser beam. Secondary ions and neutral molecules are emitted along with protons from the irradiated point of the sample as an electric field is applied between the substrate and an extraction electrode disposed above the substrate. A proton-control electrode is arranged in axial symmetry with the trajectory of the primary beam. A voltage is applied thereto so that the generated electric field decelerates the flying protons to raise their adhering efficiency to the flying neutral molecules.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: April 22, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventors: Manabu Komatsu, Hiroyuki Hashimoto
  • Patent number: 8698114
    Abstract: An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: April 15, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Hideo Hoshino, Hakaru Mizoguchi, Osamu Wakabayashi
  • Patent number: 8695813
    Abstract: Methods and apparatus for desolvating flowing liquid streams while retaining temporal resolution of dissolved substrates are disclosed. A novel small-scale self-regulating spray dryer preserves temporal resolution while desolvating a liquid chromatography eluent stream and depositing the solute onto an optical surface for infrared spectrographic analysis. The liquid eluent is pumped through a heated nebulizer to create a high-speed jet of solute containing liquid and solvent vapor. This jet is directed circumferentially inside a hot cylindrical cavity. Centrifugal force causes the larger liquid droplets to travel along the outer diameter of the cavity. The cavity surface is heated to cause the droplets to film boil. Film boiling reduces droplet contact with the cavity surface thereby retaining the solute in the droplets. The solute temperature is limited by controlling the pressure into which the solvent evaporates from the droplets.
    Type: Grant
    Filed: December 8, 2007
    Date of Patent: April 15, 2014
    Assignee: Spectra Analysis Instruments, Incorporated
    Inventors: William W. Carson, Sidney Bourne
  • Patent number: 8629409
    Abstract: A device and associated methods of operations are disclosed for interfacing on ion trap to a mass analyzer, such as a TOF mass analyzer. The device includes a plurality of sequentially arranged confinement cells having fixed locations. A group of ions, e.g., ions within a relatively narrow window of mass-to-charge ratio, is received by the device from the ion trap, undergoes fragmentation, and is transported through the device from a first to final confinement cell by a series of transfers between adjacent cells. The ion group is confined in each cell for a prescribed cooling period. By providing a suitable aggregate ion confinement time and by enabling concurrent transport and cooling of successively ejected ion groups, the ions are cooled sufficiently to enable the acquisition of mass spectra at high resolution, without having to substantially delay the ejection of a subsequent group of ions from the ion trap until cooling of the previous group is completed.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: January 14, 2014
    Assignee: Thermo Finnigan LLC
    Inventor: Viatcheslav V. Kovtoun
  • Publication number: 20130341503
    Abstract: An Atmospheric Pressure Chemical Ionization (APCI) source interfaced to a mass spectrometer is configured with a corona discharge needle positioned inside an APCI inlet probe assembly. Liquid sample flowing into the APCI inlet probe is nebulized and vaporized prior to passing through the corona discharge region all contained in the APCI inlet probe assembly. The APCI probe is configured to shield the electric field from the corona discharge region while allowing penetration of an external electric field to focus APCI generated ions into an orifice into vacuum for mass to charge analysis. Ions that exit the APCI probe are directed only by external electric fields and gas flow maximizing ion transmission into a mass to charge analyzer. Sample ions and gas phase reagent ions are generated in the APCI probe from liquid or gas inlet species or mixtures of both.
    Type: Application
    Filed: August 5, 2013
    Publication date: December 26, 2013
    Applicant: PerkinElmer Health Sciences, Inc.
    Inventors: Craig M. Whitehouse, Victor Laiko
  • Patent number: 8586954
    Abstract: An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: November 19, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Takeshi Asayama, Kouji Kakizaki, Akira Endo, Shinji Nagai
  • Patent number: 8569723
    Abstract: An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: October 29, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki, Tamotsu Abe
  • Patent number: 8546753
    Abstract: An electrospray ion source apparatus comprises: a plurality of emitter capillaries, each comprising an internal bore for transporting a portion of a liquid sample from a source, an electrode portion for providing a first applied electric potential and an emitter tip for emitting a cloud of charged particles generated from the liquid sample portion; a counter electrode for providing a second applied electric potential different from the first applied electric potential; and at least one shield electrode disposed at least partially between the counter electrode and the emitter tip of at least one of the emitter capillaries for providing a third applied electric potential intermediate to the first and second applied electric potentials, wherein the at least one shield electrode is configured such that provision of the third applied electric potential to the at least one shield electrode minimizes electric field interference effects between the plurality of emitter capillaries.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: October 1, 2013
    Assignee: Thermo Finnigan LLC
    Inventors: Viatcheslav V. Kovtoun, Eloy R. Wouters, R. Paul Atherton
  • Patent number: 8541757
    Abstract: An assembly includes a cold ion source and a chip. The cold ion source is fixed to the chip so that ions from the ion source can enter an acceleration channel in the chip. In one specific example, the ion source includes an ion exchange membrane that produces cold ions in that the ions as produced have an energy of less than 30 eV. The chip includes a substrate (such as a semiconductor substrate or a glass substrate) and a dielectric layer disposed on substrate, where the acceleration channel is a channel formed into the dielectric layer. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system. The DWOW printing system is useful in semiconductor processing in that it can direct write an image onto a 300 mm diameter wafer in one minute.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: September 24, 2013
    Assignee: Transmute, Inc.
    Inventors: Kim L. Hailey, Robert O. Conn
  • Publication number: 20130234036
    Abstract: A laser-ablation plasma generator generates laser-ablation plasma from a target in a vacuum vessel. An ion beam extractor generates an ion beam by extracting ions included in the laser-ablation plasma from the vacuum vessel. An ion detector detects unintended ions other than intended ions, which are obtained by ionizing the elements in the target, out of ions in the vacuum vessel and outputs a detection signal representing a value which is a number of the unintended ions or a mixing ratio of the unintended ions to the intended ions as a detection result. The ion source using the laser beam makes it possible to normally monitor unintended ions other than intended ions out of ions in the vacuum vessel.
    Type: Application
    Filed: February 20, 2013
    Publication date: September 12, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Akiko KAKUTANI, Kiyoshi HASHIMOTO, Kiyokazu SATO, Takeshi YOSHIYUKI, Tsutomu KURUSU
  • Patent number: 8530834
    Abstract: A method of enhanced speciation of both positive and negatives species in an analyte is disclosed. The method can include producing a first analyte solution comprising an analyte composition and an effective amount of silver triflate, and analyzing the first analyte solution with an electrospray ionization mass spectrometer. The method can also include producing a second analyte solution comprising a portion of the analyte composition and an effective amount of a compound of formula I, and analyzing the second analyte solution with an electrospray ionization mass spectrometer. The compound of formula I is [NX+][OH?], where X is a linear, branched, or cyclic C1-C10 alkane; an aryl; a heterocyclic aromatic; or a heterocyclic moiety.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: September 10, 2013
    Assignee: Florida State University Research Foundation, Inc.
    Inventors: Alan G. Marshall, Priyanka Juyal, Ryan P Rodgers
  • Patent number: 8513596
    Abstract: An apparatus for electrospray ionization may include: a platform including an inlet port, a first channel connected to the inlet port, a second channel connected to the first channel, and an outlet port connected to the second channel; a nebulizer provided in the first channel and configured to spray inert gas to a sample sprayed into the first channel through the inlet port; and a focusing lens provided in the second channel and configured to focus ions produced from the sprayed sample toward the outlet port.
    Type: Grant
    Filed: December 23, 2010
    Date of Patent: August 20, 2013
    Assignee: Korea Basic Science Institute
    Inventors: Duk Jin Kang, Myoung Choul Choi, Jong Shin Yoo, Hyun Sik Kim
  • Patent number: 8507883
    Abstract: An extreme ultraviolet light source apparatus provided with a magnetic field forming unit having sufficient capability of protection against ions radiated from plasma while using a relatively small magnetic source. The apparatus includes: a target nozzle for injecting a target material; a driver laser for applying a laser beam to the target material to generate plasma; a collector mirror for collecting extreme ultraviolet light radiated from the plasma; and a magnetic field forming unit including at least one magnetic source and at least one magnetic material having two leading end parts projecting from the at least one magnetic source to face each other with a plasma emission point in between, and forming a magnetic field between a trajectory of the target material and the collector mirror.
    Type: Grant
    Filed: September 15, 2009
    Date of Patent: August 13, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Akira Endo, Hideo Hoshino, Kouji Kakizaki, Tamotsu Abe, Akira Sumitani, Takanobu Ishihara, Shinji Nagai, Osamu Wakabayashi, Hakaru Mizoguchi
  • Patent number: 8471216
    Abstract: An electrostatic atomizing device comprises an electrostatic atomizing part (2) applying high-voltage to water supplied to an atomization electrode (1), thereby generating negatively-charged minute water particles, a positive ion generator (3) being configured to generate positive ions, and a controller (16) being configured to control operation of said electrostatic atomizing part (2) and said positive ion generator (3). Said controller (16) controls so as to cause said electrostatic atomizing part (2) to generate the negatively-charged minute water particles, after the positive ions are generated by said positive ion generator (3).
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: June 25, 2013
    Assignee: Panasonic Corporation
    Inventors: Hiroshi Suda, Yukiyasu Asano, Masaharu Machi, Jumpei Oe, Yasuhiro Komura
  • Patent number: 8461549
    Abstract: An electrospray ion source for a mass spectrometer for generating ions of an analyte from a sample comprising the analyte dissolved in a liquid solvent comprises: an electrode receiving the sample and comprising at least a first plurality of protrusions protruding from a base, each protrusion of the at least a first plurality of protrusions having a respective tip; and a voltage source, wherein, in operation of the electrospray ion source, the sample is caused to move, in the presence of a gas or air, from the base to each protrusion tip along a respective protrusion exterior so as to form a respective stream of charged particles emitted towards an ion inlet aperture of the mass spectrometer under application of voltage applied to the electrode from the voltage source.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: June 11, 2013
    Assignee: Thermo Finnigan LLC
    Inventors: Alexander A. Makarov, Eloy R. Wouters
  • Patent number: 8445877
    Abstract: A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus. This nozzle protection device includes a cooling unit which is formed with an opening for passing the target material therethrough, and which is formed with a flow path for circulating a cooling medium inside, and an actuator which changes a position or a shape of the cooling unit between a first state of evacuating the cooling unit from a trajectory of the target material and a second state of blocking heat radiation from the plasma to the nozzle by the cooling unit while securing a path of the target material in the cooling unit.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: May 21, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Someya, Tamotsu Abe, Hideo Hoshino
  • Patent number: 8395133
    Abstract: An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: March 12, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Hideo Hoshino, Osamu Wakabayashi, Hakaru Mizoguchi
  • Patent number: 8373119
    Abstract: An aerosol particle analyzer includes a laser ablation chamber, a gas-filled conduit, and a mass spectrometer. The laser ablation chamber can be operated at a low pressure, which can be from 0.1 mTorr to 30 mTorr. The ablated ions are transferred into a gas-filled conduit. The gas-filled conduit reduces the electrical charge and the speed of ablated ions as they collide and mix with buffer gases in the gas-filled conduit. Preferably, the gas filled-conduit includes an electromagnetic multipole structure that collimates the nascent ions into a beam, which is guided into the mass spectrometer. Because the gas-filled conduit allows storage of vast quantities of the ions from the ablated particles, the ions from a single ablated particle can be analyzed multiple times and by a variety of techniques to supply statistically meaningful analysis of composition and isotope ratios.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: February 12, 2013
    Assignee: UT-Battelle, LLC
    Inventor: Peter T. A. Reilly
  • Patent number: 8338797
    Abstract: The present invention relates to a debris mitigation device for use with a radiation source (2) generating optical radiation, in particular extreme ultraviolet radiation (EUV) or soft x-rays, and emitting undesired substances and/or particles which can deposit on optical surfaces in a radiation path of said radiation source (2), and to a corresponding drive assembly. The debris mitigation device comprises at least one rotating foil trap (5) and the drive assembly. The drive assembly comprises a driving motor (14) and a driving axis (10), to which the rotating foil trap (5) is fixed. The driving motor (14) and bearings (13) supporting the driving axis (10) are enclosed in a casing (20) having an aperture for the driving axis (10) and at least one outlet opening (21) for a sealing gas. The outlet opening (21) is connectable to a pump for pumping out the sealing gas.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: December 25, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Guenther Hans Derra, Michael Schaaf
  • Patent number: 8330119
    Abstract: An apparatus for direct analysis of the redox products, or intermediates, of an electrochemical reaction by coupling an electrochemical cell to desorption electrospray ionization mass spectrometry.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: December 11, 2012
    Assignee: Ohio University
    Inventors: Hao Chen, Jiwen Li, Zhixin Miao, Yun Zhang
  • Patent number: 8324593
    Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The microfabricated body can be formed of a porous metal compatible (e.g., does not react or result in electrochemical decaying or corrosion) with an ionic liquid or a room-temperature molten salt. The microfabricated body can have a pore size gradient that decreases from the base of the body to the tip of the body, so that the ionic liquid can be transported through capillarity from the base to the tip.
    Type: Grant
    Filed: May 6, 2009
    Date of Patent: December 4, 2012
    Assignee: Massachusetts Institute of Technology
    Inventors: Paulo Lozano, Robert Scott Legge, Jr.
  • Patent number: 8319194
    Abstract: The mass spectrometer includes an ion source; a mass spectrometry part; a sample container; a heater for the sample container; a first gas tube connected to the sample container to introduce a gas into the sample container; and a second gas tube connected to the sample container to transfer a headspace gas of the sample container to the ion source, in which the ion source generates ions of the headspace gas and the mass spectrometry part performs mass spectrometry of the ions. Thereby, the mass spectrometer as a drug detection equipment can analyze various drugs in urine rapidly and with high sensitivity.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: November 27, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Makoto Hashimoto, Takefumi Yokokura, Masuyoshi Yamada, Hiroyuki Inoue, Hidetoshi Morokuma
  • Patent number: 8309917
    Abstract: The present invention maintains a stable emission amount from an emitter. In an embodiment of the present invention, a solid sample or a liquid sample is heated to gasify an object to be measured contained in the solid sample or the liquid sample, thereby forming a neutral gaseous molecule, and a metal ion emitted from an emitter having an oxidized surface is attached to the neutral gaseous molecule to ionize the neutral gaseous molecule, which is subjected to mass spectrometry. The solid sample or the liquid sample is a sample that emits a reducing gas by heating. The heating for gasifying the object to be measured is performed at a temperature lower than the vaporization temperature of the solid sample or the liquid sample and not less than the vaporization temperature of the object to be measured, and an oxidizing gas is provided to the emitter.
    Type: Grant
    Filed: December 7, 2009
    Date of Patent: November 13, 2012
    Assignee: Canon Anelva Corporation
    Inventors: Yoshiro Shiokawa, Harumi Maruyama, Yasuyuki Taneda, Megumi Nakamura
  • Patent number: 8299444
    Abstract: This invention relates to a desorption/ionization source operated under ambient conditions for direct analysis of solid or liquid samples on a surface. The source comprises of a laser desorption system and a UV/electrospray combined ionization system. The source is suitable for simultaneously ionizing samples with different polarity in a complex mixture. At the same time, the compact design of the source with multiple channels can maintain the level of local concentration of the analyte ions inside the source for higher efficiency of sample ionization and introduction.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: October 30, 2012
    Assignee: Shimadzu Research Laboratory (Shanghai) Co. Ltd.
    Inventors: Li Ding, Wenjian Sun
  • Patent number: 8294129
    Abstract: An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV light source apparatus includes: the EUV light generation chamber; a target material supply unit; an EUV light collector mirror; a driver laser; a window; a parabolic mirror which focuses collimated laser beam by reflection and is disposed within the EUV light generation chamber; an energy detector detecting energy of the laser beam diffused without being applied to a target material after being focused by the laser beam focusing optics when the EUV light is not generated; and a processing unit for judging the deterioration of the window and the parabolic mirror according to the laser beam energy detected by the energy detector.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: October 23, 2012
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu, Akira Sumitani, Osamu Wakabayashi
  • Patent number: RE44147
    Abstract: An electrically conductive heat-blocking plate 11 with an opening 12 for allowing thermions to pass through is provided between a filament 3, whose temperature can be as high as 2000° to 3000° C., and an ionization chamber 2. The heat-blocking plate 11 is thermally connected via an aluminum block 10 to a heater for maintaining the ionization chamber 2 within a range temperature from 200° to 300° C., and also electrically set at a ground potential, which is approximately equal to the potential of the ionization chamber 2. The heat-blocking plate 11 blocks the radiation heat that the filament 3 emits when energized. Thus, the wall of the ionization chamber 2 is prevented from being locally heated to an abnormally high temperature. As a result, the inner space of the ionization chamber 2 is maintained at an approximately uniform temperature, and the noise due to the decomposition of a metallic material by abnormal heating is prevented.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: April 16, 2013
    Assignee: Shimadzu Corporation
    Inventors: Shuichi Kawana, Manabu Shimomura