Abstract: A microchip 100 is employed as target board of mass spectrometry. The microchip 100 includes a substrate 120, a plurality of sample-distributing sections, provided in the substrate 120 and contains samples that serve as a target of a mass spectrometry distributed therein, and a reference material-supplying channel provided in the substrate 120 and capable of being supplied with a reference material in the mass spectrometry. The plurality of sample-distributing sections are provided in the lateral side of the fine channel 102 for distributing the reference material along the fine channel 102 for distributing the reference material.

Abstract: The service lifetime of an ion source is enhanced or prolonged by the source having provisions for in-situ etch cleaning of the ion source and of an extraction electrode, using reactive halogen gases (F or Cl), and by having features that extend the service duration between cleanings. The latter include accurate vapor flow control, accurate focusing of the ion beam optics, and thermal control of the extraction electrode that prevents formation of deposits or prevents electrode destruction. An apparatus comprised of an ion source for generating dopant ions for semiconductor wafer processing is coupled to a remote plasma source which delivers F or Cl ions to the first ion source for the purpose of cleaning deposits in the first ion source and the extraction electrode. These methods and apparatus enable long equipment uptime when running condensable feed gases such as sublimated vapor sources, and are particularly applicable for use with so-called cold ion sources.

Abstract: Electrospray ionization emitter arrays, as well as methods for forming electrosprays, are described. The arrays are characterized by a radial configuration of three or more nano-electrospray ionization emitters without an extractor electrode. The methods are characterized by distributing fluid flow of the liquid sample among three or more nano-electrospray ionization emitters, forming an electrospray at outlets of the emitters without utilizing an extractor electrode, and directing the electrosprays into an entrance to a mass spectrometry device. Each of the nano-electrospray ionization emitters can have a discrete channel for fluid flow. The nano-electrospray ionization emitters are circularly arranged such that each is shielded substantially equally from an electrospray-inducing electric field.

Abstract: A compact, low power ambient pressure pyroelectric ionization source. The source can be constructed using a z-cut lithium niobate or lithium tantalate crystal with an attached resistive heater mounted in front of the atmospheric pressure inlet of an ion trap mass spectrometer. Positive and negative ion formation alternately results from thermally cycling the crystal over a narrow temperature range. Ionization of molecules such as 1,1,1,3,3,3-hexafluoroisopropanol or benzoic acid results in the observation of the singly deprotonated species and their clusters in the negative ion mass spectrum. Ionization of molecules such as triethylamine or triphenylamine with the source results in observation of the corresponding singly protonated species of each in the positive ion mass spectrum. The pyroelectric crystals are thermally cycled by as little as 30 K from ambient temperature. Ion formation is largely unaffected by contamination of the crystal faces. This ion source is robust.

Abstract: The invention relates generally to sample ionization, and provides ionization probe assemblies, systems, computer program products, and methods useful for this purpose.

Abstract: Methods and systems are provided for the soft desorption of analyte from a sample, in which an optical beam absorbed within an irradiate zone of the sample causes vibrational excitations of a component within the sample. The optical beam, providing sufficient energy to superheat the component, is provided for a time interval that is less than the time duration required for the loss of energy out of the irradiated zone due to thermal diffusion and acoustic expansion. The superheated component thus drives ablation within the irradiated zone, resulting in the soft desorption of analyte without ionization and fragmentation. The ejected ablation plume may be directed towards the inlet of a mass analysis device for detection of the desorbed analyte, which is preferably ionized by a linear resonant photo-ionization step.

Abstract: The present invention provides a charged particle beam system which can perform evacuation on an electron gun chamber or an ion-gun chamber having a non-evaporable getter pump in a short time and can maintain the ultra-high vacuum for a long time, and a technology of evacuation therefor.

Abstract: An ion source a first ionizer comprising: an electrospray needle comprising a tip; and a conduit disposed annularly about the needle and configured to pass an inert gas in proximity of the tip to nebulize a fluid emerging from the tip, the nebulized fluid comprising analytes and a mobile phase. The ion source comprises a capillary in tandem with the first ionizer and configured to receive the droplets; a heater configured to heat the capillary to a temperature at which mobile phase vaporizes; and a second ionizer in tandem with the capillary and configured to receive the vaporized mobile phase and the analytes. A method is also described.

Abstract: A single electrode electrochemical/electrospray ionization source using a corona discharge and a method of analyzing a sample using a corona discharge single electrode electrochemical/electrospray ionization source are provided. In the corona discharge single electrode electrochemical/electrospray ionization technique electrons are removed from the metal tip of the device through gases present in the electrospray ion source resulting in electrochemical ionization of the sample of interest. The resulting odd electron sample cation (positive ion mode) or anion (negative ion mode) can then be analyzed by an appropriate technique, such as, for example, a mass spectrometer.

Abstract: A method and apparatus are described to increase the efficiency with which a sample vapor is ionized prior to being introduced into an analyzer. Excellent contact between the vapor and the charging agent is achieved in the ionization chamber by separating it from the analyzer by means of a perforated impaction plate. As a result, some desired fraction of the gas going into the analyzer or coming out of the analyzer can be controlled independently from the flow of sample through the ionization chamber. Furthermore, penetration into said ionization chamber of said desired fraction of the gas going into or out of the analyzer is minimized by controlling the dimensions of said perforated impaction plate. Ions formed in the ionization chamber are driven partly by electric fields through said hole in said perforated impaction plate into the inlet to the analyzer.

Abstract: A liquid in which fine solid Sn particles are dispersed in a resin is accommodated inside the heated tank 4. The resin pressurized by a pressurizing pump is conducted to a nozzle 1, so that a liquid-form resin is caused to jet from the tip end of the nozzle 1 that is disposed inside a vacuum chamber 7. The liquid-form resin which is caused to jet from the nozzle 1 assumes a spherical shape as a result of surface tension, and is solidified by being cooled in a vacuum, so that a solid-form target 2 is formed. A laser introduction window 10 used for the introduction of laser light is formed in the vacuum chamber 7, and laser light generated from a laser light source 8 disposed on the outside of the vacuum chamber 7 is focused by a lens 9 and conducted into the vacuum chamber 7, so that the target is converted into a plasma, thus generating EUV light.

Abstract: An ion source is disclosed incorporating various aspects of the invention including i) a vaporizer, ii) a vaporizer valve, iii) a gas feed, iv) an ionization chamber, v) an electron gun, vi) a cooled mounting frame, and vii) an ion exit aperture. The ion source includes means for introducing gaseous feed material into the ionization chamber, means for vaporizing solid feed materials and introducing their vapors into the ionization chamber, means for ionizing the introduced gaseous feed materials within the ionization chamber, and means for extracting the ions thus produced from an ion exit aperture adjacent to the ionization region. In addition, means for accelerating and focusing the exiting ions are provided. The vaporizer, vaporizer valve, gas feed, ionization chamber, electron gun, cooled mounting frame, and ion exit aperture are all integrated into a single assembly in preferred embodiments of the novel ion source.

Abstract: The invention comprises apparatus for use with atmospheric pressure ionization sources in which an aerosol is formed from a solution of a sample. The aerosol is received in a hollow member and discharged outside the chamber of the ionization source in order to reduce contamination of the ionization source itself by involatile material in the solution and by previously analysed samples. The hollow member is easily removable from the ionization source to facilitate cleaning and replacement. Ionization sources, mass spectrometers, and ion mobility spectrometers comprising the apparatus are also described.

Abstract: A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber. The temperature of the vaporizer is determined by closed-loop control to a set-point temperature. The mechanical throttle valve is electrically controlled, e.g. the valve position is under closed-loop control to the output of the pressure gauge. In this way the vapor flow rate can be generally proportional to the pressure gauge output. All surfaces exposed to the vapor from the vaporizer to the vacuum chamber are heated to prevent condensation.

Abstract: An apparatus and method for generating analyte ions from a sample. An ion generating device is provided having a chamber with an outlet and a surface having a material and means for applying a high velocity gas flow through the chamber toward the outlet such that charged particles are produced by physical interaction between the high velocity gas and the material. The charged particles then induce the generation of primary ions by interaction with molecules of the high velocity gas. The primary ions are emitted from the outlet of the ion generating device toward a sample-bearing surface and analyte ions are generated by impact of the primary ions on the analyte sample on the surface.

Abstract: An electrospray-assisted laser desorption ionization device includes: an electrospray unit including a nozzle; a voltage supplying member disposed to establish between the nozzle and a receiving unit a potential difference such that liquid drops of the electrospray medium formed at the nozzle are laden with charges, and such that the liquid drops are forced to leave the nozzle toward the receiving unit along a traveling path; a laser desorption unit adapted to irradiate a sample such that, upon irradiation, analytes contained in the sample are desorbed to fly along a flying path which intersects the traveling path so as to enable the analytes to be occluded in the liquid drops, and such that as a result of dwindling in size of the liquid drops when moving along the traveling path, charges of the liquid drops will pass on to the analytes occluded therein to form ionized analytes.

Abstract: An emitter for a liquid metal ion source is provided. The emitter includes a wire comprising a substantially curved portion and a surface wherein at least a portion of the wire surface is tapered at the substantially curved portion to form an emitter tip. Furthermore, a manufacturing method for such an emitter is provided.

Abstract: An arc chamber for an ion implantation system includes an exit aperture positioned at a wall of the arc chamber, filaments respectively positioned at two opposing sides within the arc chamber, and repeller structures respectively positioned at two opposing walls within the arc chamber between the filaments and the arc chamber. The repeller structure includes a repeller substrate with a screw axis for fitting the repeller structure to the arc chamber, an insulator positioned underneath the repeller substrate providing an electrical isolation between the repeller substrate and the arc chamber, and a conductive spacer covering a portion of the insulator positioned in between the insulator and the arc chamber.

Abstract: Provided is an ionization emitter which can reduce a dead volume without deteriorating separating capacity. An ionization emitter (2) is provided with a tip (1) composed of a columnar or conical porous self-standing structure, and a channel for supplying a solution sample into the tip (1) from the base end side of the tip (1). The channel is formed by filling a pipe line with a packing, and the tip (1) is exposed from the pipe line of the channel. The packing and the porous self-standing structure constituting the tip (1) have an integrated structure composed of a same porous body formed at the same time.

Abstract: Techniques for providing ion source feed materials are disclosed. In one particular exemplary embodiment, the techniques may be realized as a container for supplying an ion source feed material. The container may comprise an internal cavity to be pre-filled with an ion source feed material. The container may also comprise an outer body configured to be removably loaded into a corresponding housing that is coupled to an ion source chamber via a nozzle assembly. The container may further comprise an outlet to seal in the pre-filled ion source feed material, the outlet being further configured to engage with the nozzle assembly to establish a flow path between the internal cavity and the ion source chamber. The container may be configured to be a disposable component.

Abstract: In accordance with the invention, auxiliary structures are used in conjunction with a microfluidic chip to form a microfluidic electrospray structure that allows gas assisted nebulization for use in a mass spectrometry system.

Abstract: A front-end reagent ion source for a mass spectrometer is disclosed. Reagent vapor is supplied to a reagent ionization volume located within a chamber of the mass spectrometer and maintained at a low vacuum pressure. Reagent ions are formed by interaction of the reagent vapor molecules with an electrical discharge (e.g., a glow discharge) within the ionization volume, and pass into the chamber of the mass spectrometer. At least one ion optical element located along the analyte ion path transports the reagent ions to successive chambers of the mass spectrometer. The reagent ions may be combined with the analyte ions to perform ion-ion studies such as electron transfer dissociation (ETD).

Abstract: An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.

Abstract: A method of controlling a plasma doping process using a time-of-flight ion detector includes generating a plasma comprising dopant ions in a plasma chamber proximate to a platen supporting a substrate. The platen is biased with a bias voltage waveform having a negative potential that attracts ions in the plasma to the substrate for plasma doping. A spectrum of ions present in the plasma is measured as a function of ion mass with a time-of-flight ion detector. The total number ions impacting the substrate is measured with a Faraday dosimetry system. An implant profile is determined from the measured spectrum of ions. An integrated dose is determined from the measured total number of ions and the calculated implant profile. At least one plasma doping parameter is modified in response to the calculated integrated dose.

Abstract: A system for the non-contact detection of analyte chemicals, including explosives, chemical warfare agents and the like, employs a non-equilibrium plasma that is maintained at a temperature sufficiently low so as to avoid thermal damage to a surface, such as clothing or skin, that is being examined to thereby produce analyte ions and other charged particles. The ions are collected and passed into a sensor for detection and identification.

Abstract: It is a technical challenge to provide a small-sized ion source excellent in operability.

Abstract: A desorption atmospheric pressure chemical ionization (DAPCI) system delivers a primary ion beam composed of an inert, high velocity gas and solvent ions to a surface to effect desorption and ionization of both volatile and non-volatile species present on surfaces. A electrode having a tapered tip is connected to a high voltage power supply. The tapered tip projects outward from a capillary carrying a high-speed flow of gas. A vapor of a solvent is mixed into the annular gas flow surrounding the needle. The gaseous solvent vapor is ionized in close proximity to the tapered tip by virtue of the high voltage applied to the electrode. The high-speed flow of gas and solvent vapor ions extending outward from the capillary is directed toward a substrate on which an analyte of interest may have been deposited.

Abstract: An ion source is disclosed for forming multiply-charged analyte ions from a solid sample. A beam of pulsed radiation is directed onto a portion of the sample to desorb analyte molecules. A retaining structure holding a solvent volume is positioned proximate the sample. Desorbed analyte molecules contact a free surface of the solvent and pass into solution. The solution is then conveyed through an outlet passageway to an electrospray apparatus, which introduces a spray of charged solvent droplets into an ionization chamber.

Abstract: An in-spray glow discharge ionization method and apparatus are provided The in-spray glow discharge ionization apparatus has a supply port supplying a fluid containing a compound to be measured, a gas blowing port which surrounds the supply port and which blows a gas exhibiting Penning effect to nebulize the fluid supplied from the supply port, a ground-side discharge electrode provided at a generation port at which the nebulized flow is generated, and a voltage application-side discharge electrode which is disposed in the traveling direction of the nebulized flow and opposed to the ground-side discharge electrode. In this in-spray glow discharge ionization method, while the fluid is nebulized by a spray gas (1), components of the compound to be measured which constitutes the fluid are ionized by the excited spray gas (1) exhibiting Penning effect, so that measurement is performed by a mass spectrometer.

Abstract: A heat capacitor for a capillary aerosol generator comprises a phase change material that changes phases at a temperature approximately equal to a temperature sufficient to volatilize liquid material in a capillary passage of the capillary aerosol generator. The phase change material stores heat, which can be used to generate aerosol either continuously or intermittently over a given time. The use of stored heat in the phase change material to generate aerosol over time enables operation of the capillary aerosol generator remote from a large energy source.

Abstract: An ion source generates ions from analyte molecules which are desorbed from a sample on the surface of a sample support in a pressure range of approximately 30 to 300 pascal. Reactant ions are generated in a separate ion source and guided by ion guides to the point in front of the sample or to a reaction chamber in which the desorbed molecules are located. The reactant ions ionize the desorbed molecules to form analyte ions. The analyte molecules can be mixed in matrix material or adsorbed on the sample support surface without additives. The desorption can be continuous or pulsed, for example by light from lasers or diodes.

Abstract: An ion source generates ions from analyte molecules which are desorbed from a sample on the surface of a sample support in a pressure range of approximately 30 to 300 pascal. Reactant ions are generated in a separate ion source and guided by ion guides to the point in front of the sample or to a reaction chamber in which the desorbed molecules are located. The reactant ions ionize the desorbed molecules to form analyte ions. The analyte molecules can be mixed in matrix material or adsorbed on the sample support surface without additives. The desorption can be continuous or pulsed, for example by light from lasers or diodes.

Abstract: The present invention provides an apparatus and method for use with a mass spectrometer. The multimode ionization source of the present invention provides one or more atmospheric pressure ionization sources (e.g., electrospray, atmospheric pressure chemical ionization and/or atmospheric pressure photoionization) for ionizing molecules. A method of producing ions using the multimode ionization source is also disclosed. The apparatus and method provide the advantages of the combined ion sources without the inherent disadvantages of the individual sources. In an embodiment, the multimode ionization source includes an infrared emitter enclosed in an inner chamber for drying a charged aerosol. ESI/APCI multimode sources may include a corona needle shield and/or an auxiliary electrode.

Abstract: A laser spray method exhibiting a high detection sensitivity when applied to mass analysis has its sensitivity raised further. In a laser spray method of ionizing a liquid sample by irradiating, with a laser beam, the end of a capillary into which the sample has been introduced, use is made of an infrared laser as the laser beam, at least the end of the capillary is formed of a substance that does not readily absorb the laser beam used, and either the capillary is formed of a conductor and a high voltage is applied thereto, or the capillary is formed of an insulator, a conductive wire is placed inside a small cavity of the capillary and a high voltage is applied to the conductive wire.

Abstract: Ion sources and methods for generating molecular ions in a cold operating mode and for generating atomic ions in a hot operating mode are provided. In some embodiments, first and second electron sources are located at opposite ends of an arc chamber. The first electron source is energized in the cold operating mode, and the second electron source is energized in the hot operating mode. In other embodiments, electrons are directed through a hole in a cathode in the cold operating mode and are directed at the cathode in the hot operating mode. In further embodiments, an ion beam generator includes a molecular ion source, an atomic ion source and a switching element to select the output of one of the ion sources.

Abstract: A mass spectroscopic reaction-monitoring method including: forcing charge-laden liquid drops to move along a traveling path; exposing to a laser beam a region to be formed of a liquid sample surface, the laser beam having an irradiation energy sufficient to cause analytes present behind the liquid sample surface to be desorbed to fly along a flying path; introducing to the region at successive points of time a liquid sample containing one reactant that undergoes an ongoing chemical reaction as a first analyte to form one product as a second analyte, and positioning the liquid sample surface relative to the laser beam at each point of time such that the flying path intersects the traveling path for enabling occlusion of at least one of the first and second analytes in at least one charge-laden liquid drop to thereby form at least a corresponding one of first and second ionized analytes.

Abstract: In one embodiment, an analytical apparatus is provided that includes a carriage; and a plurality of electrospray probes pivotably mounted on the carriage, wherein movement of the carriage engages a feature with a selected one of the electrospray probes whereby movement of the feature pivots the selected one of the electrospray probes with respect to the carriage.

Abstract: An ion sampling apparatus for use in a mass spectrometry system. The ion sampling apparatus includes a target support for receiving a sample, an irradiation source for emitting energetic radiation or particles toward the target support, and a conduit having a curved end and a longitudinal axis, the curved end having an inlet with a central axis, the conduit being adjacent to the target support. The longitudinal axis of the conduit and the central axis of the inlet intersect to define an angle that is between about 20 degrees and about 210 degrees.

Abstract: A multimode ionization source with improved ionization characteristics that comprises an electrospray ionization source for providing a charged aerosol, an atmospheric pressure chemical ionization (APCI) source including a corona needle having an end positioned downstream from the electrospray ionization source for producing a discharge that further ionizes the charged aerosol, an assist gas inlet positioned adjacent to the corona needle for providing assist gas, the assist gas facilitating ionization of the charged aerosol by the corona discharge, and a conduit having an orifice for receiving ions from the charged aerosol.

Abstract: An atmospheric pressure ionization mass spectrometry system has an atmospheric pressure ionization chamber for ionizing a sample, an evacuated intermediate evacuation chamber into which generated ions are introduced through a capillary tube, and a vacuum chamber further downstream therefrom into which ions are introduced for mass separation. A partition wall separating the atmospheric pressure ionization chamber from the intermediate evacuation chamber includes a small orifice having a diameter corresponding to an internal channel diameter of the capillary tube. The capillary tube is detachably installed on the partition wall so that an outlet end of the capillary tube abuts on the small orifice. The internal channel of the capillary tube is in communication with the small orifice. The capillary tube can be installed and removed from the system without breaching the vacuum.

Abstract: An ion source generating ions by matrix-assisted laser desorption/ionization (MALDI) comprising a MALDI sample support and a solid-state the laser system generating a pulsed laser beam, which has a wavelength in the range between 332 and 342 nanometers and is spatially shaped in the solid-state laser system such that the spatial intensity distribution of the laser beam on the MALDI sample support exhibits more than one intensity peak.

Abstract: A laser desorption ion source provides enhanced ion sampling efficiency and measurement sensitivity by using one or more ion guides to effectively capture ions in a plume emitted from the ion target and guide the ions through an aperture into a downstream vacuum chamber. In one configuration using two RF multipole ion guides, a first RF multipole ion guide disposed next to the ion target is selected to be sufficiently large to capture a substantial portion of the plume, while the second RF multipole ion guide disposed between the first multipole ion guide and the aperture has a smaller dimension to assist focusing of ions into the aperture. The first RF multipole ion guides the ions in the plume into the second RF multipole ion guide, which then focuses the ions so that they pass through the aperture into the downstream vacuum chamber.

Abstract: A technique for boron implantation is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for boron implantation. The apparatus may comprise a reaction chamber. The apparatus may also comprise a source of pentaborane coupled to the reaction chamber, wherein the source is capable of supplying a substantially pure form of pentaborane into the reaction chamber. The apparatus may further comprise a power supply that is configured to energize the pentaborane in the reaction chamber sufficiently to produce a plasma discharge having boron-bearing ions.

Abstract: A mass spectrometry quantitation technique enables high-throughput quantitation of small molecules using a laser-desorption (e.g., MALDI) ion source coupled to a triple-quadrupole mass analyzer. The ions generated from the ion source are collisionally damped/cooled, and then quantitatively analyzed using the triple-quadrupole analyzer operated in the multiple-reaction-monitoring (MRM) mode. Significantly improved measurement throughput is obtained by applying the laser to each sample spot on the target for an irradiation duration significantly shorter than the time required to deplete the sample material in the sample spot. The irradiation duration may be set based on a determination of the MRM peak broadening caused by the ion optics.

Abstract: The invention described herein provides a matrix-based ion source including a gas heating device for providing heated gas at a defined temperature to the ionization region of the ion source. The ion source may also include a temperature sensor. The heating device and temperature sensor may be operably connected to work as a closed feedback loop to provide gas at a constant, pre-determined, temperature to the ionization region. Also disclosed is a mass spectrometer system having the matrix-based ion source. A method of producing ions employing gas that is heated to a pre-determined temperature is also provided.

Abstract: A new ionization source named Surface Activated Chemical Ionization (SACI) has been discovered and used to improve the sensitivity of the mass spectrometer. According to this invention the ionization chamber of a mass spectrometer is heated and contains a physical new surface to improve the ionization process. The analyte neutral molecules that are present in gas phase are ionized on this surface. The surface can be made of various materials and may also chemically modified so to bind different molecules. This new ionization source is able to generate ions with high molecular weight and low charge, an essential new key feature of the invention so to improve sensitivity and reduce noise. The new device can be especially used for the analysis of proteins, peptides and other macromolecules. The new invention overcomes some of the well known and critical limitations of the Electrospray (ESI) and Matrix Assisted Laser Desorption Ionization (MALDI) mass spectrometric techniques.

Abstract: The present invention relates to an apparatus for producing ions from an electrospray assembly. The apparatus comprises an ionization chamber, an electrospray assembly, an isolating electrode, an isolated ionization region within the ionization chamber and optionally, a vacuum interface at a vacuum interface voltage and a vacuum chamber. Sample is introduced into the ionization chamber from an electrospray assembly and transported to an electric field region that is isolated from the electric field created by the electrospray assembly.

Abstract: The present invention comprehends a compact and economical apparatus for producing high intensities of a wide variety of wanted positive and negative molecular and atomic ion beams that have been previously impossible to previously produce at useful intensities. In addition, the invention provides a substantial rejection of companion background ions that are frequently simultaneously emitted with the wanted ions. The principle underlying the present invention is resonance ionization-transfer where energy differences between resonant and non-resonant processes are exploited to enhance or attenuate particular charge-changing processes. This new source technique is relevant to the fields of Accelerator Mass Spectroscopy; Molecular Ion Implantation; Generation of Directed Neutral Beams; and Production of Electrons required for Ion Beam Neutralization within magnetic fields.

Abstract: A heat capacitor for a capillary aerosol generator comprises a phase change material that changes phases at a temperature approximately equal to a temperature sufficient to volatilize liquid material in a capillary passage of the capillary aerosol generator. The phase change material stores heat, which can be used to generate aerosol either continuously or intermittently over a given time. The use of stored heat in the phase change material to generate aerosol over time enables operation of the capillary aerosol generator remote from a large energy source.

Abstract: Disclosed is a method for controlling a vaporizer in ion implantation equipment during indium implantation process. The method comprises the steps of: (a) injecting a solid indium trichloride in a vaporizer; (b) raising a vaporizer temperature up to a first temperature at which water is able to be vaporized; (c) conditioning the vaporizer temperature in a temperature range between the first temperature and a second temperature at which the solid indium trichloride is able to be hydrolyzed, until water contained in the solid indium chloride can be removed; and (d) raising the vaporizer temperature up to a third temperature at which the indium trichloride is able to be vaporized.