Abstract: A proton beam therapy system with a cantilever gantry. The cantilever gantry has one end portion (the fixed end portion) affixed to an external structure that supports the weight of the gantry. The remainder of the gantry is suspended and the free end portion is coupled to a beam nozzle. A main bearing is coupled to the fixed end portion and enables the gantry to rotate in a full range of 360° around the iso-center. A large counterweight can be disposed in the fixed end portion to keep the system center of mass close to the bearing. The gantry may have a monocoque housing, including a cantilever section enclosing the magnets and other components of the gantry beamline and a drum section on which the bearing is placed.

Abstract: In one aspect, a charged particle tomography and radiation therapy system includes a charged particle tomography scanner (CPTS) unit to detect at least some of the charged particles of an emitted charged particle beam delivered to a region of interest of a subject. A processing unit can determine energy loss of the charged particle beam based on the detected trajectory information. An incoming detector is positioned to detect trajectory information of the at least some of the charged particles entering the subject. An outgoing detector is positioned to detect trajectory information of the at least some of the charged particles passing through and exiting the subject. A motion control unit can control movement of the incoming and outgoing detectors. The incoming and outgoing detectors are sized to cover at least an area substantially equivalent to the beam's cross-section. The processing unit can map radiation dose of the region of interest.

Abstract: This present disclosure generally relates to devices, methods, and systems for producing large numbers of SiO2 coated silicon chips with uniform film thickness controlled to angstrom and sub angstrom levels. The disclosure further relates to etching plates configured for receiving a plurality of chips mounted thereon.

Abstract: Ion beams are efficiently extracted with an accelerator that includes a circular vacuum container including a pair of circular return yokes facing each other. Six magnetic poles are radially disposed from the injection electrode at the periphery thereof in the return yoke. Six recessions are disposed alternately with the respective magnetic poles in the circumferential direction of the return yoke. In the vacuum container, a concentric trajectory region, in which multiple beam turning trajectories centered around the injection electrode are present, is formed, and an eccentric trajectory region, in which multiple beam turning trajectories eccentric from the injection electrode are present, is formed around the region. In the eccentric trajectory region, the beam turning trajectories are dense between the injection electrode and the inlet of the beam extraction path. Gaps between the beam turning trajectories are wide in a direction 180° opposite to the inlet of the beam extraction path.

Abstract: Disclosed is a tumor surface dose enhancing radiotherapy apparatus using a magnetic field, including a radiation beam generating unit that irradiates a radiation beam towards a tumor of a patient, a magnetic field generating unit that forms a magnetic field that is parallel to the radiation beam between the radiation beam generating unit and the tumor of the patient, and a control unit that controls a surface dose of the tumor by adjusting an intensity and an effective area of the magnetic field of the magnetic field generating unit.

Abstract: The invention comprises a method and apparatus for determining a radiation beam treatment path to a tumor, comprising the steps of: (1) delivering charged particles from an accelerator, along a first beam transport path, through an output nozzle, and along a treatment path to the tumor relative to a calibrated reference beam path from the output nozzle toward a patient position and (2) prior to the step of delivering, a main controller verifying an unobstructed linear path of the treatment path using a set of fiducial indicators positioned at least: on a first element physically affixed and co-movable with the output nozzle and on a moveable object in the treatment room. Optionally, voxels of the treatment beam path and potentially obstructing objects are defined in the treatment room using an axis system relative to the calibrated reference beam path and a reference beam point.

Abstract: A gantry applies particle beams to a subject. An ultrasonic diagnostic apparatus scans the subject with ultrasonic waves via an ultrasonic probe, and acquires an ultrasonic image concerning a radiotherapy target region of the subject. A processing circuitry specifies a first planned point of a Bragg peak in the ultrasonic image, which anatomically coincides approximately with a second planned point of the Bragg peak decided in radiotherapy planning. The processing circuitry estimates a sighting point of the Bragg peak of a particle beam based on a body surface position of the subject and an actual range of the particle beam. The display displays the ultrasonic image to indicate the first planned point and the sighting point.

Abstract: Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current/high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

Abstract: In one embodiment, a method is for creating writing data used in a multi charged particle beam writing apparatus. The method includes partitioning a polygonal figure included in design data into a plurality of trapezoids that each include at least one pair of opposite sides parallel along a first direction and that join so as to be continuous in a second direction orthogonal to the first direction while a side parallel to the first direction serves as a common side, and creating the writing data by, when a first trapezoid, a second trapezoid, and a third trapezoid join along the second direction, representing a position of a common vertex shared by the second trapezoid and the third trapezoid using displacements in the first direction and the second direction from a position of a common vertex shared by the first trapezoid and the second trapezoid. In at least one of the plurality of trapezoids, different dose amounts are defined in the first direction.

Abstract: The present disclosure establishes new dissociation parameters that may be used to determine the collision energy (CE) needed to achieve a desired extent of dissociation for a given analyte precursor ion using collision cell type collision-induced dissociation. This selection is based solely on the analyte precursor ion's molecular weight, MW, and charge state, z. Metrics are proposed that may be used as a parameter for the “extent of dissociation”, and then predictive models are developed of the CEs required to achieve a range of values for each metric. Each model is a simple smooth function of only MW and z of the precursor ion. Coupled with a real-time spectral deconvolution (m/z to mass) algorithm, methods in accordance with the invention enable control over the extent of dissociation through automated, real-time selection of collision energy in a precursor-dependent manner.

Abstract: An example particle therapy system includes: a particle accelerator to output a beam of charged particles; and a scanning system to scan the beam across at least part of an irradiation target. An example scanning system includes: a scanning magnet to move the beam during scanning; and a control system (i) to control the scanning magnet to produce uninterrupted movement of the beam over at least part of a depth-wise layer of the irradiation target so as to deliver doses of charged particles to the irradiation target; and (ii) to determine, in synchronism with delivery of a dose, information identifying the dose actually delivered at different positions along the depth-wise layer.

Abstract: Example compact ion beam sources are provided that can be used to generate ion beams using chemical species and field emitter elements or field emitter arrays. In some example, the compact ion beam source can be implemented as neutron sources based on ion beam bombardment of neutron-rich targets.

Abstract: An internal surface electron beam-irradiating device sterilizes the internal surface of a vial by irradiation with an electron beam. The internal surface electron beam-irradiating device includes an electron beam generator that generates the electron beam, a vacuum chamber containing the electron beam generator, an output window that emits the electron beam to the outside of the vacuum chamber, and an extension nozzle that guides an electron cloud formed by extending the electron beam emitted from the output window. The extension nozzle includes a leaking section that leaks the electron cloud. The leaking section includes empty portions that discharge part of the electron cloud to the outside, and a component portion that guides the electron cloud into the leaking section.

Abstract: Disclosed is a method for determining a deviation of the position of an anatomical body part relative to a predetermined position defined by a radiation treatment plan. A monitoring image is taken of the anatomical body part at the instant that a predetermined control point defined in the treatment plan has been reached. The monitoring image is compared to a simulated image simulated from a planning image of the anatomical body from the perspective of a monitoring camera used to generate the monitoring image. The comparison allows for a determination of whether there is a positional deviation.

Abstract: A charged particle beam treatment apparatus includes an accelerator that emits a charged particle beam by accelerating a charged particle, an irradiation unit that irradiates an irradiation target body with the charged particle beam, a beam transport line that connects the accelerator and the irradiation unit to each other, and that transports the charged particle beam from the accelerator to the irradiation unit, and a control unit that controls the irradiation unit in irradiating the irradiation target body with the charged particle beam. The irradiation unit includes a scanning unit that scans each layer with the charged particle beam. After one layer is scanned with the charged particle beam by using a first current value, the control unit controls the irradiation unit so as to scan and irradiate the one layer with the charged particle beam by using a second current value which is different from the first current value.

Abstract: There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

Abstract: A system and method for obtaining a composite image by combining multiple sub-images are provided. In some embodiments, the method may include retrieving overlapping images corresponding to sub-mages including 3D volume data, generating two-dimensional (2D) projection images and pixel maps based on the overlapping images, performing one or more registrations based on the 2D projection images and the pixel maps, calibrating the sub-images based on the results of the registration(s), and fusing the sub-images to produce a composite image. In some embodiments, the method may include setting a plurality of parameters relating to an X-radiation source or a radiation detector based on a preliminary number of exposures and a preliminary exposure region, controlling, based on at least one of the plurality of parameters, a motion of the X-radiation source or a motion of the radiation detector to capture a plurality of sub-images, and combining the plurality of sub-images.

Abstract: A material for decorative wrap including a sheet of non-corrugated material having a first side, a second side, a first edge, and a second edge; a plurality of scores formed into the first side extending from the first edge to the second edge; and a plurality of scores formed into the second side extending from the first edge to the second edge. The plurality of scores formed into the first side and the plurality of scores formed into the second side may alternate such that every other score is formed into the first side and the remaining scores are formed into the second side. Each score formed into the first and second sides may extend substantially perpendicular to at least one of the first and second edges.

Abstract: Support arrangement for supporting a radiation projection system in a substrate processing apparatus, the support arrangement comprising: a support body for supporting the radiation projection system; electrical wiring for supplying voltages to components within the radiation projection system and/or for supplying control data for modulation of radiation to be projected onto a target surface by the radiation projection system; optical fibers, for supplying control data for modulation of radiation to be projected onto a target surface by the radiation projection system, and a cooling arrangement comprising one or more fluid conduits for cooling the radiation projection system; the electrical wiring, the optical fibers, and the cooling arrangement being at least partly accommodated in and/or supported by the support body.

Abstract: A portal imaging device is used to determine an amount of radiation that is delivered to at least one point while administering a radiation treatment therapy to a patient. Upon detecting that the amount of radiation that is delivered to that at least one point exceeds a predetermined amount of radiation (for example, a planned amount of radiation per the radiation treatment plan), administration of radiation treatment therapy to the patient can be automatically halted.

Abstract: Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.

Abstract: The invention comprises a system for controlling a charged particle beam shape and direction relative to a controlled and dynamically positioned patient and/or an imaging surface, such as a scintillation plate of a tomography system and/or a first two-dimensional imaging system coupled to a second two-dimensional imaging system. Multiple interlinked beam/patient/imaging control stations allow safe zone operation and clear interaction with the charged particle beam system and the patient. Both treatment and imaging are facilitated using automated sequences controlled with a work-flow control system.

Abstract: An accelerator 4 includes a circular vacuum container including circular return yokes 5A, 5B. An injection electrode 18 is disposed closer to an inlet of a beam extraction path 20 in the return yoke 5B than a central axis C of the vacuum container. Magnetic poles 7A to 7F are radially disposed from the injection electrode 18 at the periphery of the injection electrode 18 in the return yoke 5B. Recessions 29A to 29F are disposed alternately with the magnetic poles 7A to 7F in the circumferential direction of the return yoke 5B. In the vacuum container, a concentric trajectory region, in which multiple beam turning trajectories centered around the injection electrode 18 are present, is formed, and an eccentric trajectory region, in which multiple beam turning trajectories eccentric from the injection electrode 18 are present, is formed around the region.

Abstract: Provided are a respiratory guiding device (100) and method used in respiratory gated ion beam irradiation, the respiratory guiding device (100) comprising: a respiratory signal detecting unit (101), for measuring a respiratory motion trajectory curve during free breathing and deep breathing, and a real-time respiratory motion position signal in the case of guided respiration; a respiratory signal processing unit (102), for modeling free breathing and deep breathing according to an average respiratory cycle and an average respiratory amplitude calculated on the basis of the respiratory motion trajectory curve and setting a preset breath-hold time at the tail end of a function curve of a free breathing model and a deep breathing model to establish a respiratory guiding curve; a control unit (103), for adjusting the magnetic excitation cycle of a synchrotron according to the respiratory cycle represented by the respiratory guiding curve during free breathing or deep breathing, thus synchronizing the magnetic exc

Abstract: In some embodiments, a sensor assembly for continuous measurement of at least one dose control parameter of an electron beam during a substantial part of the duration of a sterilizing process of package material includes an electron beam emitter adapted to emit electron beam (e?) from an electron exit window and a sensor device that includes: a sensor surface having an electron excitable material arranged to be radiated with at least a part of said electron beam (e?), so as to excite said electron excitable material so that said electron excitable material emits luminescence and a detector arranged and adapted to detect said luminescence. The electron beam emitter is adapted to emit a continuous electron beam (e?) during a predetermined time period so as to irradiate and sterilize package material.

Abstract: An ion implantation method includes measuring a beam energy of an ion beam that is generated by a high-energy multistage linear acceleration unit operating in accordance with a tentative high-frequency parameter, adjusting a value of the high-frequency parameter based on the measured beam energy, and performing ion implantation by using the ion beam generated by the high-energy multistage linear acceleration unit operating in accordance with the adjusted high-frequency parameter. The tentative high-frequency parameter provides a value different from a value of the high-frequency parameter for achieving a maximum acceleration in design to a high-frequency resonator in a part of stages including at least a most downstream stage. The adjusting includes changing at least one of a voltage amplitude and a phase set for the high-frequency resonator in the part including the at least most downstream stage.

Abstract: In one embodiment, a charged particle beam writing method includes writing a first pattern statically in central part of a first substrate having Charge Dissipation Layer (CDL), calculating, based on a position of the written first pattern, a first correction coefficient, writing a second pattern statically applying with the first correction coefficient in central part of a second substrate having no CDL, calculating, based on a position of the written second pattern, a second correction coefficient, writing a third pattern continuously applying with the first correction coefficient in central part of a third substrate having CDL, calculating, based on a position of the written third pattern, a third correction coefficient, writing a fourth pattern statically applying with the first correction coefficient in wide range of a fourth substrate having CDL, and calculating, based on a position of the written fourth pattern, a fourth correction coefficient.

Abstract: A medical imaging system has improved positioning possibilities which facilitate the workflow during an intervention. A medical imaging apparatus (10) has an image acquisition arrangement (12), which is positionable in relation to an object (16) to acquire image data (18) of the object from different directions. An output unit (14) is arranged to provide the image data. First movement direction indicators (22) are provided to indicate possible movement directions of the image acquisition arrangement in relation to the object. A display apparatus (24), includes a display area (26) to display image data (30) of the object provided by the image acquisition arrangement and a movement direction indication (28) The movement direction indication is configured to provide second movement direction indicators (32) in relation to the displayed image data of the object to indicate possible movement directions of the image acquisition arrangement in relation to the object.

Abstract: A beam current measuring device capable of performing measurement of a beam current distribution of a charged particle beam seamlessly and continuously in an arbitrary direction is provided. The beam current measuring device includes collector electrodes whose detection regions seamlessly continue in an arrangement direction thereof.

Abstract: An apparatus for generating at least one particle shield. The at least one particle shield includes a first component and a second component. The first component and the second component are usable to form a first particle shield of the at least one particle shield for blocking particles from contacting a proximate surface of an object, the first particle shield is substantially parallel to and physically separated from the proximate surface of the object, and the first particle shield includes an energy gradient force or a velocity gradient force.

Abstract: Disclosed is a method of forming a semiconductor device using a self-assembly (DSA) patterning process. The method includes forming a patterned feature over a substrate; applying an orientation material that includes a first polymer and a second polymer over the substrate, wherein the first polymer has a first activation energy and the second polymer has a second activation energy; baking the substrate at first temperature thereby forming a first orientation layer that includes the first polymer; baking the substrate at second temperature thereby forming a second orientation layer that includes the second polymer; and performing a directed self-assembly (DSA) process over the first and the second orientation layers.

Abstract: An apparatus for generating at least one particle shield in photolithography includes a first component and a second component. The first component and the second component are operable to form a first particle shield of the at least one particle shield for blocking particles from contacting a proximate surface of an object. The first component includes a first gas injector, and the second component includes a first gas extractor corresponding to the first gas injector. The first gas injector is configured to blow out a gas, thereby forming the first particle shield. The first gas extractor is configured to work with the first gas injector for providing gas pressure gradient for the first particle shield.

Abstract: A method may include providing an initial mask feature in a mask disposed on a substrate, the initial mask feature comprising a first material, the substrate defining a substrate plane; directing ions as an ion beam to the initial mask feature at a non-zero angle of incidence ? with respect to a perpendicular to the substrate plane, wherein a composite mask feature is formed, the composite mask feature comprising a cap material disposed on the initial mask feature, the cap material comprising the ions; and performing a substrate etch, wherein an etch feature is formed in the substrate, wherein at least a portion of the initial mask feature remains after the substrate etch, wherein the substrate etch etches the first material at a first etch rate and etches the cap material at a second etch rate, the first etch rate being greater than the second etch rate.

Abstract: Disclosed is a method of diagnosing a conversion process for converting a format of image data including unit data corresponding to charged particle beams into a format suitable for an aperture array, the aperture array having a plurality of controllers provided to match a plurality of the charged particle beams to control the charged particle beams, and a driver configured to drive the controllers. The method includes: extracting the unit data having an identical first rank based on an arrangement of the unit data in the image data from the unit data of each block including a predetermined number of the unit data and calculating a first checksum of each of the first rank; extracting the unit data having an identical second rank after the conversion process from the unit data of each block and calculating a second checksum of each of the second rank; and comparing the first and second checksums.

Abstract: The invention comprises a method and apparatus for imaging a tumor of a patient using one or more imaging systems positionable about the tumor and treating the tumor using positively charged particles, such as a process of: (1) rotating a gantry support and/or gantry, connected to at least a portion of a beam transport system configured to pass a charged particle treatment beam, circumferentially about the patient and a gantry rotation axis; (2) translating a translatable imaging system past the patient on a path parallel to an axis perpendicular to the gantry rotation axis; (3) imaging the tumor using the translatable imaging system; and (4) treating the tumor using the rotatable treatment beam.

Abstract: A method for sterilizing packaging material comprises an emitter that is adapted to emit charge carriers, in particular electrons, wherein the charge carriers form at least one cloud, and wherein the emitter and the packaging material are moved relative to each other so that a flow of a gaseous medium is established in between the emitter and the packaging material. The method comprises the steps of: controlling a movement profile between the emitter and the packaging material; sterilizing the flow of the medium in between the emitter and the packaging material by adjusting the movement profile so that the flow of the medium in between the emitter and the packaging material is sterilized. Also disclosed is a device for sterilizing packaging material.

Abstract: Power system for supplying high voltage to an electron beam emitter, which is adapted to sterilize a packaging container or a packaging material by electron beam irradiation, the power system comprising a voltage multiplier for generating a high voltage, a first voltage measurement device for measuring an output voltage level of the voltage multiplier and providing a first measured voltage value, and an actuator for modifying the output voltage level of the voltage multiplier based on the first measured voltage value provided by the first voltage measurement device, characterized in that the power system further comprises a second voltage measurement device adapted to independently measure the output voltage level of the voltage multiplier and provide a second measured voltage value.

Abstract: One object is to provide an electron beam sterilization apparatus for sterilizing a preform product (P) by applying an electron beam while conveying the preform product (P), the apparatus comprising: an input star wheel (21) configured to convey the preform product (P) in a circular path; and an outer-surface electron beam application device and an inner-surface electron beam application device configured to apply an electron beam to the preform product (P) being conveyed by the input star wheel (21). A blocking short tube (31) is provided on a lower surface of the star wheel plate (22) of the input star wheel (21) so as to block radioactive rays produced by application of the electron beam and surround a central axis (1v) of the input star wheel (21). The blocking short tube (31) includes a ventilation space (34) formed therein.

Abstract: The invention comprises a method and apparatus for treating a tumor with protons using multiple beamline positions not having an isocenter, including the steps of: (1) delivering the protons from a synchrotron along a redirectable beam transport path to yield a plurality of incident vectors, each of the plurality of incident vectors directed toward the treatment room and (2) redirecting the protons traveling along each of the plurality of incident vectors, with an output nozzle, to the tumor, where a first vector, of the plurality of incident vectors, comprises a first direction intersecting the tumor and where a second vector, of the plurality of incident vectors, comprises a second direction passing by the tumor without entering the tumor. The step of redirecting directs the protons traveling along the first and second incident vectors, respectively, to a first and second path intersecting a front and the back of the tumor.

Abstract: Ions are released over time from an ion source into a beam area proximate a central axis. A radiofrequency (RF) system with a variable frequency and variable voltage accelerates the ions in orbiting trajectories expanding outward from the central axis. The ions are accelerated to different extraction energy levels within a given design range at a shared extraction radius from the central axis. An RF-frequency versus ion-time-of-flight scenario is set such that the frequency versus time scenario is the same for any ion extraction energy from the given design range, and a constant-or-variable-RF-voltage versus ion-time-of-flight scenario is adjusted to provide ion acceleration from injection to extraction for ions with different respective extraction energy levels within the given design range; and the ions are extracted at the different energy levels at the shared extraction radius.

Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

Abstract: An ion source having dual indirectly heated cathodes is disclosed. Each of the cathodes may be independently biased relative to its respective filament so as to vary the profile of the beam current that is extracted from the ion source. In certain embodiments, the ion source is used in conjunction with an ion implanter. The ion implanter comprises a beam profiler to measure the current of the ribbon ion beam as a function of beam position. A controller uses this information to independently control the bias voltages of the two indirectly heated cathodes so as to vary the uniformity of the ribbon ion beam. In certain embodiments, the current passing through each filament may also be independently controlled by the controller.

Abstract: An x-ray detector is disclosed, for a computed tomography system. In an embodiment, the x-ray detector includes a base plate and a number of detector modules, each including at least one detector field with a detector surface facing counter to an r-direction on a front face and each including a module support, fastened to the base plate. In at least one embodiment, the module support includes a bearing surface facing the base plate, perpendicular to the detector surface, for fastening purposes.

Abstract: Disclosed are a method and an apparatus for manufacturing a radiation intensity bolus.

Abstract: The invention comprises a system for redundantly determining the state of a charged particle beam, such as beam position, direction, energy, and/or intensity. For example, the charged particle beam state is determined: (1) in an extraction system from a synchrotron, (2) in a charged particle beam transport path, and/or (3) at or about a patient undergoing charged particle cancer therapy using one or more film layers designed to emit photons upon passage of a charged particle beam, which yields information on position and/or intensity of the charged particle beam. The emitted photons are used to calculate position, direction, and/or intensity of the treatment beam in imaging and/or during tumor treatment.

Abstract: A structure configuring a ridge filter has line symmetry about a line vertical to a depth direction passing the center of the structure. A small structure obtained in such a way that the structure is divided by this line has a bilaterally asymmetric shape about a center line in an iterative direction, and has a point symmetric shape about an intersection between the center line in the iterative direction and the center line in the depth direction. Thicknesses in the iterative direction of an uppermost stream surface and a lowermost stream surface in the depth direction are equal to each other. The structure is configured so that a thick portion in the iterative direction of the uppermost stream surface and the lowermost stream surface is not present in the depth direction.

Abstract: Various embodiments include measurement structures and methods for measuring integrated circuit (IC) images. In some cases, a measurement structure for use in measuring an image of an IC, includes: a first section having a positive shift spacing pattern; a second section, on an opposite side of the measurement structure, having a negative shift spacing pattern; and a third section having a reference spacing pattern for calibrating a measurement from at least one of the first section or the second section.

Abstract: A charged particle beam writing apparatus includes a processing circuitry configured to calculate a third proximity effect correction irradiation coefficient where at least one correction irradiation coefficient term up to k-th order term, in correction irradiation coefficient terms of from a first order term to a n-th order term for a first proximity effect correction irradiation coefficient which does not take account of a predetermined effect, are replaced by at least one correction irradiation coefficient term up to the k-th order term, for a second proximity effect correction irradiation coefficient which takes account of the predetermined effect; and a processing circuitry configured to calculate a dose by using the third proximity effect correction irradiation coefficient.

Abstract: A pattern inspection apparatus according to an embodiment includes an image capture and an output part. The image capture captures an image of a second pattern of an inspection target object obtained by enlarging the inspection target object having a first pattern. The output part outputs position information of the first or second pattern corresponding to divergent portions between a reference data generated from design data of the first pattern and a captured data generated by the image capture, other than prediction positions of first defects occurring when the inspection target object is enlarged.