Abstract: Disclosed is a method of forming a semiconductor device using a self-assembly (DSA) patterning process. The method includes forming a patterned feature over a substrate; applying an orientation material that includes a first polymer and a second polymer over the substrate, wherein the first polymer has a first activation energy and the second polymer has a second activation energy; baking the substrate at first temperature thereby forming a first orientation layer that includes the first polymer; baking the substrate at second temperature thereby forming a second orientation layer that includes the second polymer; and performing a directed self-assembly (DSA) process over the first and the second orientation layers.

Abstract: A method of operating an acceleration system comprises injecting charged particles into an RF accelerator, providing RF power to the accelerator, and accelerating the injected charged particles. The accelerated charged particles may impact a target to generate radiation. The RF power is based, at least in part, on past performance of the system, to compensate, at least partially, for dose and/or energy instability. A controller may provide a compensated control voltage (“CCV”) to an electric power source based on the past performance, to provide compensated electric power to the RF source. A decreasing CCV, such as an exponentially decreasing CCV, may be provided to the electric power source during beam on time periods. The CCV to be provided may be increased, such as exponentially increased toward a maximum value, during beam off time periods. The controller may be configured by a compensation circuit and/or software. Systems are also described.

Abstract: For the purpose of providing a particle beam therapy apparatus which is unnecessary to be separately verified for operational integrity of its dose monitors and is unnecessary to have an additional failure diagnosis function, a particle beam therapy apparatus is so configured that, by a dose-monitoring system controller, the main and sub roles of two dose monitors are switched therebetween at every radiation and their corresponding dose monitor circuits are controlled accordingly, so that operation checking of the two dose monitors can be performed during a therapeutic flow, without the need of a special operation.

Abstract: New techniques for controlling electromagnetic and other forms of radiation are provided. In some aspects of the invention, multiple sources of radiation with characteristics that are projected to constructively interfere at a target are provided. In other aspects, spatially-encoded source signals create a decrypted resulting beam at a planned, target location. In still other aspects, a variable shield which is also a lens is inserted between a radiation target and collateral material.

Abstract: The present disclosure provides systems and methods associated with data storage using atomic films, such as graphene, boron nitride, or silicene. A platter assembly may include at least one platter that has one or more substantially planar surfaces. One or more layers of a monolayer atomic film, such as graphene, may be positioned on a planar surface. Data may be stored on the atomic film using one or more vacancies, dopants, defects, and/or functionalized groups (presence or lack thereof) to represent one of a plurality of states in a multi-state data representation model, such as a binary, a ternary, or another base N data storage model. A read module may detect the vacancies, dopants, and/or functionalized groups (or a topographical feature resulting therefrom) to read the data stored on the atomic film.

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, while cooling equipment and the biomass to prevent overheating and possible distortion and/or degradation. The biomass is conveyed by a conveyor, which conveys the biomass under an electron beam from an electron beam accelerator. The conveyor can be cooled with cooling fluid. The conveyor can also vibrate to facilitate exposure to the electron beam. The conveyor can be configured as a trough that can be optionally cooled.

Abstract: The invention relates to a method for sterilizing packaging material, comprising an emitter that is adapted to emit charge carriers, in particular electrons, wherein the charge carriers form at least one cloud, and wherein the emitter and the packaging material are moved relative to each other so that a flow of a gaseous medium is established in between the emitter and the packaging material. The method comprises the steps of: controlling a movement profile between the emitter and the packaging material; sterilizing the flow of the medium in between the emitter and the packaging material by adjusting the movement profile so that the flow of the medium in between the emitter and the packaging material is sterilized. Also disclosed is a device for sterilizing packaging material.

Abstract: A charged particle irradiation system is capable of shortening the irradiation time and the treatment time by performing efficient irradiation even when irregular variation occurs in the irradiation object during the gating irradiation. The extraction of the beam is stopped upon reception of a regular extraction permission end signal which is outputted based on a regular movement signal. An extractable state maintaining function operates upon the reception of the extraction permission end signal. When a preset standby time elapses without receiving an extraction permission start signal again during the standby time, the extractable state maintaining function finishes its operation and a charged particle beam generator decelerates the beam. Also, the extraction of the beam is stopped due to reception of an irregular extraction permission end signal during the irradiation. When the extraction permission start signal is received again during the standby time, the extraction of the beam is restarted.

Abstract: A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that enhance the performance of the design over comparable instruments. An efficient ion source enables relatively low power consumption without sacrificing measurement resolution. Variable geometry mechanical filters allow for variable resolution. An onboard ion pump removes the need for an external pumping source. A magnet and magnetic yoke produce magnetic field regions with different flux densities to run the ion pump and a magnetic sector mass analyzer. An onboard digital controller and power conversion circuit inside the vacuum chamber allows a large degree of flexibility over the operation of the mass spectrometer while eliminating the need for high-voltage electrical feedthroughs. The miniature mass spectrometer senses fractions of a percentage of inlet gas and returns mass spectra data to a computer.

Abstract: The present invention discloses a heat radiator, especially an infrared radiator, having at least one radiation source by means of which supplied electrical energy is convertible into heat radiation, as well as a control. This control comprises at least one frequency converter having a first, a second and a third output so that between the first and the third output a first alternating current is providable and between the second and the third output a second alternating current is providable by means of which the at least one radiation source is operable.

Abstract: A method of processing a solar cell is disclosed, where a chained patterned ion implant is performed to create a workpiece having a lightly doped surface having more heavily doped regions. This configuration may be used in various embodiments, such as for selective emitter solar cells. Additionally, various mask sets that can be used to create this desired pattern are also disclosed. The mask set may include one or more masks that have an open portion and a patterned portion, where the union of the open portions of the masks comprises the entirety of the surface to be implanted. The patterned portions of the masks combine to create the desired pattern of heavily doped regions.

Abstract: A mirror arrangement for an EUV projection exposure apparatus for microlithography comprises a plurality of mirrors each having a layer which is reflective in the EUV spectral range and to which EUV radiation can be applied, and having a main body. In this case, at least one mirror of the plurality of mirrors has at least one layer comprising a material having a negative coefficient of thermal expansion. Moreover, a method for operating the mirror arrangement and a projection exposure apparatus are described. At least one heat source is arranged, in order to locally apply heat in a targeted manner to the at least one layer having a negative coefficient of thermal expansion of the at least one mirror.

Abstract: An ion implantation system measurement system has a scan arm that rotates about an axis and a workpiece support to translate a workpiece through the ion beam. A first measurement component downstream of the scan arm provides a first signal from the ion beam. A second measurement component with a mask is coupled to the scan arm to provide a second signal from the ion beam with the rotation of the scan arm. The mask permits varying amounts of the ion radiation from the ion beam to enter a Faraday cup based on an angular orientation between the mask and the ion beam. A blocking plate selectively blocks the ion beam to the first faraday based on the rotation of the scan arm. A controller determines an angle and vertical size of the ion beam based on the first signal, second signal, and orientation between the mask and ion beam as the second measurement component rotates.

Abstract: A radiotherapy system is disclosed. The radiotherapy system comprises an electron beam generator for generating an electron beam and a magnetic field generator for generating a magnetic field. In some embodiments of the present invention, the system further comprises a controller for controlling the electron beam and the magnetic field generators such that the electron beam is dynamically shifted and the magnetic field is dynamically redirected synchronously with the shifting.

Abstract: A linear proton accelerator includes a plurality of accelerator components arranged after one another, and a proton source and a plurality of accelerating units. The accelerator further includes a reticular support structure for supporting the accelerator components. The support structure is shaped as a prism with a polygonal cross-section, and has a plurality of side faces joining opposite ends of the prism. The support structure is arranged concentrically with respect to the accelerator components.

Abstract: The invention comprises a charged particle cancer therapy system used to seal a periphery of a tumor, such as through use of a proton or carbon ion beam searing the outer edges of the tumor, which prevents/hinders nutrient delivery to the tumor resultant in stunted growth of the tumor, halted growth of the tumor, and/or starvation/necrosis of the tumor. Optionally, a tumor sealing layer is formed using multiple passes, of a treatment beam of the charged particle cancer therapy system, across a tumor/healthy tissue boundary layer or voxel.

Abstract: The present invention relates to an irradiation device for irradiating objects with electron beams. The irradiation device comprises at least one electron beam emitter having an electron exit window and at least one sensor device for detecting a first dose control parameter of the electron beam. The electron beam emitter is adapted to move past the sensor device such that the electron beam emitted from the electron exit window passes within a sensing area of the sensor device. The sensor device comprises more than one conductor each having a conductor surface in the sensing area of the sensor device, and the conductor surface is adapted to be exposed to electrons of the electron beam. The invention also relates to a method.

Abstract: An example particle therapy system includes a particle accelerator to output a particle beam, where the particle accelerator includes: a particle source to provide pulses of ionized plasma to a cavity, where each pulse of the particle source has a pulse width corresponding to a duration of operation of the particle source to produce the corresponding pulse, and where the particle beam is based on the pulses of ionized plasma; and a modulator wheel having different thicknesses, where each thickness extends across a different circumferential length of the modulator wheel, and where the modulator wheel is arranged to receive a precursor to the particle beam and is configured to create a spread-out Bragg peak for the particle beam.

Abstract: A multi charged particle beam writing apparatus includes a dividing circuitry to divide first irradiation time data into k pieces of second irradiation time data, where each of the k pieces of second irradiation time data has a different number of bits and the total of different numbers of bits is n-bits, in multi-pass writing of k or more passes by using multi charged particle beams, a data transmission circuitry to transmit, for each of k passes, corresponding second irradiation time data, for a beam concerned in multi charged particle beams, a resolution information transmission circuitry to transmit, for each of k passes, corresponding resolution information, and an irradiation time calculation circuitry to calculate an irradiation time of a corresponding beam in the multi charged particle beams of a pass concerned by using input second irradiation time data and resolution information.

Abstract: Methods for extreme ultraviolet (EUV) mask defect mitigation by using multi-patterning lithography techniques. In one exemplary embodiment, a method for fabricating an integrated circuit including identifying a position of a defect in a first EUV photolithographic mask, the photolithographic mask including a desired pattern and transferring the desired pattern to a photoresist material disposed on a semiconductor substrate. Transferring the desired pattern further transfers an error pattern feature to the photoresist material as a result of the defect in the first EUV photolithographic mask. The method further includes, using a second photolithographic mask, transferring a trim pattern to the photoresist material, wherein the trim pattern removes the error pattern feature from the photoresist material.

Abstract: An example particle therapy system includes: a particle accelerator to output a beam of charged particles; and a scanning system to scan the beam across at least part of an irradiation target. An example scanning system includes: a scanning magnet to move the beam during scanning; and a control system (i) to control the scanning magnet to produce uninterrupted movement of the beam over at least part of a depth-wise layer of the irradiation target so as to deliver doses of charged particles to the irradiation target; and (ii) to determine, in synchronism with delivery of a dose, information identifying the dose actually delivered at different positions along the depth-wise layer.

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, while cooling equipment and the biomass to prevent overheating and possible distortion and/or degradation. The biomass is conveyed by a conveyor, which conveys the biomass under an electron beam from an electron beam accelerator. The conveyor can be cooled with cooling fluid. The conveyor can also vibrate to facilitate exposure to the electron beam. The conveyor can be configured as a trough that can be optionally cooled.

Abstract: The present disclosure provides a method for detecting signal charged particles in a charged particle beam device. The method includes emitting a primary charged particle beam, illuminating a specimen with the primary charged particle beam, wherein the primary charged particle beam has a landing energy on the specimen of less than 40 keV, wherein signal charged particles with a first energy spectrum are generated, energy filtering the signal charged particles such that signal charged particles in an energy range from an energy of 85% of the landing energy to 100% propagate for subsequent detection, and detecting the signal charged particles within the energy range using at least one detector.

Abstract: A method of compensating for breathing and other motions of a patient during treatment includes periodically generating internal positional data about an internal target region. The method further includes generating external positional data about external motion of the patient's body using an external sensor and generating a correlation between one or more positions of the internal target region and one or more positions of an external region using the external positional data of the external sensor and the internal positional data of the internal target region. The method further includes predicting the position of the internal target region at some later time based on the correlation model.

Abstract: A charged particle beam irradiation apparatus includes: an accelerator which accelerates charged particles and emits a charged particle beam; an irradiation unit which irradiates an irradiation target with the charged particle beam; a transport line which transports the charged particle beam emitted from the accelerator, to the irradiation unit; an energy adjustment unit which is provided at the transport line and adjusts energy of the charged particle beam; a plurality of electromagnets provided further toward the downstream side than the energy adjustment unit in the transport line; an electromagnet power source provided to correspond to each of the electromagnets; and a control unit which controls a parameter of the electromagnet according to the energy of the charged particle beam, wherein the electromagnet power source has a storage unit which stores the parameter of the electromagnet for each layer which is irradiated with the charged particle beam, in the irradiation target.

Abstract: Systems and methods of controlling characteristics of a proton beam emitted from a nozzle of a proton treatment system including one or more beam modifying members to define a characteristic of an emitted proton beam, and a clamping member mounted to the nozzle, the clamping member having one or more receiving portions to receive the one or more beam modifying members therein. In some embodiments, the beam modifying members comprise plate structures and the receiving portions include a plurality of slots spaced apart from one another on opposing surfaces of the clamping member to receive opposing ends of the plate structures.

Abstract: In various embodiments, a system and method for manufacturing and using an optical enhancement assembly in combination with an image-capturing device are presented. In example embodiments, the optical enhancement assembly is affixed over an aperture on the image-capturing device using a securing agent. Light is allowed to travel through the optical enhancement assembly and into the aperture of the image-capturing device such that the light can be recorded as a still image or video. The optical enhancement assembly includes at least a unique fractalized diffraction pattern that impacts light traveling into the aperture and causes a unique diffraction effect on the image or video recorded by the image-capturing device.

Abstract: A radiotherapy system includes a radiotherapy device, such as a LINAC, operable to direct a radiation beam from a head thereof during operation, a field detector positioned to be within the radiation beam during operation of the radiotherapy device and operable to generate a beam measurement signal, a reference detector positioned to be outside of the radiation beam during operation of the radiotherapy device and operable to generate a reference signal, and at least one computer in signal communication with the field detector and the reference detector and configured with software to normalize the beam measurement signal based on the reference signal and to output a normalized beam measurement.

Abstract: A charged particle cancer therapy system is used to accelerate an anion, such a C?, and to convert the anion to a cation, such as C6+, through use of one or more electron extraction subsystems. A first example of an electron extraction subsystem is a hydrogen gas electron stripping system. A second example of an electron extraction subsystem is a carbon foil electron stripping system. The resultant cation is accelerated in a synchrotron, transported along a beam-line, and targeted to a tumor resulting in ablation of the tumor.

Abstract: Various embodiments relate to a microbeam radiation therapy (microbeam radiosurgery) system, including: a radiation beam source; a collimator with slits, wherein the collimator only passes a radiation beam from the radiation beam source through the slits; a filtering and limiting system; a source shutoff controller connected to the radiation beam source; and a detector configured to detect events requiring the shutdown of the radiation beam source.

Abstract: A method for producing an irradiation plan for a target volume includes preparing a modulation curve that characterizes modulation of particle numbers at target points in the target volume that lie one behind another in a direction of the beam. The method also includes determining a current position of the target volume and defining a plurality of target points that fully cover the target volume in the current position. Particle numbers are assigned to the plurality of current target points using the modulation curve.

Abstract: Systems and methods of controlling a proton beam in a proton therapy system, the system including a proton beam delivery system including at least one achromatic beamline having a first power setting to direct a proton beam having a first predetermined range of proton beam energies to a target treatment area, and a second power setting to direct a proton beam having a second predetermined range of proton beam energies to the target treatment area, and a power changing unit configured to control an energy level of the proton beam and a power setting of the at least one achromatic beamline such that the power changing unit changes the power setting of the at least one achromatic beamline between the first power setting and the second power setting based on changes in proton beam energy that occur within the first predetermined range of proton beam energies.

Abstract: The present invention relates to an apparatus for producing a radioisotope by irradiating a target fluid comprising a precursor of said radioisotope with a particle beam produced by a particle accelerator, the apparatus comprising: —a housing comprising a target cavity for receiving said target fluid, said housing having an opening for allowing the passage of the said particle beam into the said cavity; —a dual foil flange for closing said opening of the target cavity, said dual foil flange comprising: —a standoff comprising a central hole; —a first and a second foil able to allow the passage of the said particle beam and located respectively on a first side and a second side of the said standoff, covering the said central hole and forming a cooling cavity; —a first flange and a second flange for sealing respectively the said first and second foil on said standoff; —at least an inlet channel and at least an outlet channel, for flowing a cooling fluid through the cavity of the dual foil flange; —guiding means

Abstract: A particle beam treatment system includes an accelerator system that accelerates a charged particle beam and a beam transport system that transports a high-energy beam emitted from the accelerator to an irradiation location, wherein the beam transport system is provided with at least one steering electromagnet and at least one beam position monitor corresponding to the at least one steering electromagnet, and wherein the at least one beam position monitor supplies an excitation current for correcting a beam position, which periodically varies, to the at least one steering electromagnet.

Abstract: Methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. A first component or node on an integrated circuit is coupled to a second component or node on the same integrated circuit. After an external bias is applied to the first component or node, a focused ion beam is applied to the integrated circuit and an image is taken using an electron detector. The features or components on the integrated circuit which are coupled to the second component or node will show up in high contrast on the resulting image. The method may also involve applying a bias to a node or component and then using focused ion beam imaging techniques (through an electron detector) to arrive at an image of the integrated circuit. Components coupled to the node will appear in high contrast in the resulting image.

Abstract: New techniques for radiotherapy and radiosurgery are provided. In some aspects of the invention, multiple sources of radiation with characteristics that are projected to constructively interfere at a treatment target are provided. In other aspects, hardware directs multiple radiation sources from the same side of a treatment target, and focuses the initiation of substantial interference on a leading structure in the target. In other aspects, refractive models updated by live feedback are used to improve dosage distribution by, among other things, optimizing the number, length, superposition, overlap, angle and nature of radiation beams. In additional aspects, interstitial beacons and radiation path diversion structures are inserted to improve dosage distribution to a target and avoid critical neighboring structures. In particle therapy, regionally actuable external magnetic fields are also provided, to improve dosage accuracy and avoid collateral damage.

Abstract: A linear proton accelerator includes a plurality of accelerator components arranged after one another, and a proton source and a plurality of accelerating units. The accelerator further includes a reticular support structure for supporting the accelerator components. The support structure is shaped as a prism with a polygonal cross-section, and has a plurality of side faces joining opposite ends of the prism. The support structure is arranged concentrically with respect to the accelerator components.

Abstract: A charged particle beam pattern writing method according to an embodiment, includes measuring a position displacement amount of a stage above which a target object is placed, in a rotation direction; and writing a pattern of a beam image on the target object above the stage while the beam image is rotated, by using a plurality of electrostatic lenses at least one of which is arranged in a magnetic field of each of the plurality of electromagnetic lenses whose magnetic fields are in opposite directions, to avoid a focus displacement of a charged particle beam passing through the plurality of electromagnetic lenses and to correct the position displacement amount measured, in the rotation direction of the stage.

Abstract: A scanning candidate route extracting unit which extracts plural candidates of scanning routes in which each of the scanning routes connects all spot positions in one layer is provided, in an evaluation function using necessary scanning time Tk and weight coefficient wk for a kth partial route among partial routes which are routes between the spot positons which are adjacent on one of the plural candidates of scanning routes, and number n of spot in the layer, wk with respect to a partial route which passes through affected tissue is set to be 1, wk with respect to a partial route which passes through normal tissue is set to be bigger than 1, and wk with respect to a partial route which passes through an important internal organ is set to be bigger than wk with respect to a partial route which passes through normal tissue.

Abstract: In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and an object lens for condensing the primary electron beam and irradiating a sample with the beam, a unit to decelerate the secondary electrons deflected in the ExB deflector, and a magnetic generator for deflecting the decelerated secondary electron are provided, and a plurality of energy filters and detectors are arranged around the magnetic generator. That is, by separating loci of the secondary electrons incident on the energy filters and of the secondary electrons reflected at the energy filters by the magnetic generator, both of the secondary electrons are concurrently detected.

Abstract: A charged particle beam writing apparatus includes a storage unit to store each pattern data of plural figure patterns arranged in each of plural small regions made by virtually dividing a writing region of a target workpiece to be written on which resist being coated. The charged particle beam writing apparatus further including an assignment unit to assign each pattern data of each figure pattern to be arranged in each of the plural small regions concerned, and a writing unit to write, for each of plural groups, each figure pattern in each of the plural small regions concerned by using a charged particle beam.

Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.

Abstract: A particle therapy system is capable of reducing an increase in treatment time caused by the initialization operation of magnets in the execution of the scanning irradiation method successively changing the energy level of a beam extracted from an accelerator. An irradiation control apparatus has a scheme that calculates setting vales of excitation current for bending magnets for a transport system on every irradiation condition (energy condition), and sets appropriate excitation current values according to the irradiation sequence. The irradiation control apparatus 35 prestores in a current supply control table 1 reference current values determined corresponding to energy levels of the ion beam, prestores in current supply compensation value tables 1, 2 compensation current values determined corresponding to energy levels of the ion beam and numbers of times of changing the energy level, and calculates the excitation current value of the magnets by using the values prestored in the tables.

Abstract: The present invention relates to a particle therapy apparatus used for radiation therapy. More particularly, this invention relates to a gantry for delivering particle beams which comprises means to analyse the incoming beam. Means are integrated into the gantry to limit the momentum spread of the beam and/or the emittance of the beam.

Abstract: An ion beam source includes a magnetic field unit including a first side facing a target object to be treated and a second side, where the first side is opened and the second side is closed, and the first side includes a plurality of magnetic pole portions arranged at predetermined intervals with an N-pole and an S-pole alternatively or with same magnetic poles and configured to form a closed loop of plasma electrons and an electrode unit arranged at a lower end of the closed loop. The ion beam source is configured to rotate the plasma electrons within a process chamber along the closed loop, to generate plasma ions from an internal gas within the process chamber, and to provide the plasma ions to the target object.

Abstract: A particle beam irradiation system comprises deflection electromagnets which scan by deflecting the particle beam in two dimensions in the lateral direction which is perpendicular to an irradiation direction of the particle beam, and an energy width expanding device through which the particle beam passes so as to expand an energy width of the particle beam and form a SOBP in a depth direction of the irradiation target, that is, in an irradiation direction of the particle beam, wherein the energy width expanding device is configured to form the SOBP in the depth direction along whole irradiation area in the depth direction of the irradiation target, and the deflection electromagnets are controlled so as for an irradiation spot which is formed in the irradiation target by the particle beam to move stepwise along whole irradiation area in the lateral direction of the irradiation target.

Abstract: A treatment device for sterilizing containers by an electron beam includes a carousel that comprises a rotary holding plate supporting a plurality of treatment stations, each station including a sterilization device comprising an electron beam emitter, and a holding device for holding a container under the emitter. The treatment device includes a protection system for stopping the rays emitted by the emitters, the protection system comprises an annular segment-shaped, open stationary channel that is mounted in a stationary manner under the holding plate and forms, with the latter, a protective chamber in which the holding device supporting the containers moves, the channel having an open upstream end, for the inlet of the containers to be treated into the protective chamber, and an open downstream end, for the outlet of the treated containers from the chamber.

Abstract: The present disclosure relates to a particle energy modulating device for variably changing the energy of the particles of a particle beam. The particle energy modulating device has a variable energy varying device with a control value correcting device for correcting a supplied control value. The control value correcting device corrects the supplied control values through the use of previously determined calibration data.

Abstract: A method and system for performing gas cluster ion beam (GCIB) etch processing of various materials is described. In particular, the GCIB etch processing includes using one or more molecular beams to optimize pressure at localized regions of the ion beam.

Abstract: Accelerated particle irradiation equipment is installed in a building having a multi-story structure. The accelerated particle irradiation equipment includes a particle accelerator and an irradiation device. The particle accelerator generates accelerated particles. The irradiation device performs irradiation of the accelerated particles generated by the particle accelerator, and is installed on at least one of the floor above and the floor below the floor on which the particle accelerator is installed.