With Radiation Modifying Member Patents (Class 250/503.1)
  • Patent number: 10888709
    Abstract: A medical apparatus and method of operating a medical apparatus are disclosed. The apparatus includes a radiation source for emitting electromagnetic radiation towards one or both eyes of a patient; wherein the apparatus is configured to emit electromagnetic radiation having a ratio of scotopic luminous intensity to photopic luminous intensity of at least 1.85:1.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: January 12, 2021
    Assignee: Polyphotonix Limited
    Inventors: Duncan John Hill, Thomas Snell
  • Patent number: 10770282
    Abstract: The light source contains a gas filled chamber with a region of radiating plasma sustained by a focused beam of a CW laser. The means for plasma ignition is a pulsed laser system generating a first and a second laser beams focused in the chamber. The first laser beam provides the optical breakdown, after which the second laser beam ignites the plasma, whose volume and density are sufficient for stationary plasma sustenance by CW laser after finishing the second laser pulse. Preferably, the first laser beam is generated in Q-switching mode and the second laser beam is generated in free-running mode. The technical result consists in ensuring high reliability of igniting the plasma, in creating in this basis electrodeless high-brightness broadband light sources with the high spatial and power stability, and in providing an ability to collect broadband plasma radiation in a spatial angle of more than 9 sr.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: September 8, 2020
    Assignee: RnD-ISAN, Ltd
    Inventors: Dmitry Borisovich Abramenko, Robert Rafilevich Gayasov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash
  • Patent number: 10757798
    Abstract: A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different dose.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: August 25, 2020
    Assignee: ETM Electronics, Inc.
    Inventors: William L. Nighan, Jr., Maarten Korringa, John Howard Rolin, Devin Kirk Henderlong
  • Patent number: 10734698
    Abstract: A lens and antenna assembly technique that includes a first bladder that is configured to be filled with a first fluid and the first fluid having a first index of refraction. The technique further includes a second bladder nested within the first bladder. The second bladder is configured to be filled with a second fluid and the second fluid has a second index of refraction. This technique is for deploying an inflatable lens that includes inflating a first bladder with a first fluid and inflating a second bladder with a second fluid. The second bladder is nested within the first bladder. The technique for deploying an inflatable lens further includes replacing the first fluid with a third fluid and replacing the second fluid with a fourth fluid.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: August 4, 2020
    Assignee: Orbital Composites Inc.
    Inventor: Cole Nielsen-Cole
  • Patent number: 10578974
    Abstract: The disclosure relates to an optical element, in particular for a microlithographic projection exposure apparatus. The optical element has an optical effective surface. The optical element includes a substrate, a layer system that is present on the substrate, and a protective cover extending over an edge region of the optical element that is adjacent to the optical effective surface. During operation of the optical element, the protective coating reduces an ingress of hydrogen radicals into the layer system in comparison with an analogous design without the protective cover, wherein a gap is formed between the protective cover and the layer system.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: March 3, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ralf Moser, Florian Herold, Arno Schmittner, Holger Kierey, Wolfgang Merkel, Georgo Metalidis
  • Patent number: 10420201
    Abstract: A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different dose.
    Type: Grant
    Filed: April 10, 2017
    Date of Patent: September 17, 2019
    Assignee: ETM Electromatic, Inc.
    Inventors: William L. Nighan, Jr., Maarten Korringa, John Howard Rolin, Devin Kirk Henderlong
  • Patent number: 10309798
    Abstract: Simplify, downsize and reduce power of devices which comprise the satellite navigation system used in approach and docking in space. The navigation system 1 which estimates an attitude of a target object T in space comprises: an optical marker 10 that is attached to the target T and reflects light; a lighting device 20 that irradiates the target object T with light of a predetermined wavelength band; an image acquisition device 30 that acquires an image of the optical marker 10 which has reflected the light of the predetermined wavelength band; and an image processing device 40 that processes the image acquired by the image acquisition device 30 and thereby estimates the attitude of the target object T. The lighting device 20 and the image processing device 30 are loaded on an aerospace vehicle 2.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: June 4, 2019
    Inventor: Ken Maeda
  • Patent number: 10257966
    Abstract: The present invention relates to a shielding device to reduce the impact of radiation, that contains a container (10) with a receptacle (14) and a functional filling (20) placed into the receptacle (14) of the container (10), where the functional filling (20) is composed of a collecting component (21) that contains a mixture of inorganic substances and a utilizing component (22) that contains a mixture of organic components.
    Type: Grant
    Filed: February 1, 2017
    Date of Patent: April 9, 2019
    Inventors: Marianna Juhászné Molnár, János Juhász
  • Patent number: 10045753
    Abstract: A structure includes a silicon substrate having a plurality of recessed portions, each recessed portion having a bottom and a side wall, silicide layers, each silicide layer in contact with the bottoms of the plurality of recessed portions, and a metal structure including metal portions, each metal portion disposed in the plurality of recessed portions and in contact with the silicide layers. The silicide layers are electrically connected to each other through the silicon substrate.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: August 14, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takayuki Teshima, Arisa Oka
  • Patent number: 9919162
    Abstract: Methods and apparatuses for providing therapy, including light therapy, to a user positioned within an enclosure are described herein. A method includes generating and selecting therapy settings based on user information and positioning the user within an enclosure having a plurality of light sources. The enclosure is configured to focus light on the user at a location within the enclosure according to selected settings. Post-therapy user information is provided to generate a report regarding the user and may include the user's measured physical attributes, measured spectrum values, reported information, or survey information. Aromatherapy, audio therapy, or air therapy may be additionally provided. An apparatus includes an enclosure with a control system configured to perform a therapy method. An enclosure may be have the shape of an octagon or another shape. A computer readable non-transitory storage media includes instructions for providing therapy to a user positioned within the enclosure.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: March 20, 2018
    Assignee: Blu Room Enterprises, LLC
    Inventor: Judith Darlene Knight
  • Patent number: 9816670
    Abstract: A lamp is disclosed with a circuit board that is manufactured from a flexible material. The lamp may find particular use in a surgical or diagnostic environment. The flexible material allows the orientation of lamp elements to allow for a custom light beam. The flexible circuit board allows for interconnection between multiple lamp elements at different angles and rotation without having individual rigid circuit boards. Furthermore, the flexible circuit board may be mounted to a back panel, wherein the back panel is configured to act as a heat sink to dissipate heat generated, in operation, by the lamp element.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: November 14, 2017
    Assignee: Amico Clinical Solutions Corporation
    Inventors: Wayne Benson, Varun Chandan
  • Patent number: 9691592
    Abstract: A method to improve plasma discharge efficiency by attaching one or more booster chambers to the main discharge chamber is disclosed here. The booster chamber functions as a plasma discharge amplification device for the main discharge chamber. It improves plasma density significantly, especially at pressure below 50 mTorr. Compared with traditional inductively coupled plasma (ICP) source, the strength of the plasma source enhanced with booster chamber has been improved several folds at low pressure conditions. Booster chamber can also be used as a convenient high speed plasma etching and deposition processing chamber for small samples. A method to gauge plasma strength by measuring plasma emission intensity has also been disclosed in this application.
    Type: Grant
    Filed: April 7, 2016
    Date of Patent: June 27, 2017
    Inventor: Ximan Jiang
  • Patent number: 9662410
    Abstract: A system for sanitizing a tray table may include a sanitation assembly operatively coupled to the tray table. The sanitation assembly includes an ultraviolet (UV) light source configured to emit UV light, and a sanitation control unit operatively coupled to the UV light source. The sanitation control unit operates the UV light source to emit the UV light onto the tray table when the tray table is secured in an upright position, and prevents the UV light source from emitting the UV light when the tray table is not secured in the upright position.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: May 30, 2017
    Assignee: The Boeing Company
    Inventor: Steven George Mackin
  • Patent number: 9541482
    Abstract: Provided are a device and method for using bilirubin photoisomerization to reduce bilirubin interference with laboratory blood tests for other chemical analytes.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: January 10, 2017
    Inventors: Viraj Mane, Edward Wong
  • Patent number: 9506871
    Abstract: Methods and systems are described herein for producing high radiance illumination light suitable for semiconductor metrology. A cold gas is repeatedly ignited by a pulsed laser to periodically generate accessible, high brightness illumination light generated during each break-down event. The pulse duration and repetition period are set to ignite, but not sustain fully formed plasma. The central plasma core emits high color temperature light before a cooler plasma region forms around the central core. Thus, after ignition, the plasma is extinguished before the arrival of the next laser pulse. The repeated plasma ignition/extinction cycle generates illumination light at high color temperature that is accessible for illumination purposes in a metrology application. In one embodiment, a bulb filled with Xenon gas at 10 atmospheres is repeatedly ignited with a pulsed laser having pulse duration of 10 nanoseconds to generate illumination light with a color temperature of approximately 60,000 Kelvin.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: November 29, 2016
    Assignee: KLA-Tencor Corporation
    Inventor: Klaus Flock
  • Patent number: 9510434
    Abstract: Provided is an extreme ultraviolet light generating apparatus that may include: a chamber containing one or more kinds of gases; a light concentration optical system provided in an optical path of pulsed laser light outputted from a laser unit, and configured to concentrate the pulsed laser light into a concentrated beam; and an image pickup section provided at a position out of the optical path of the pulsed laser light, and configured to pick up a plasma emission image that is an image of plasma emission in the chamber. The plasma emission is caused by application of the concentrated beam to the one or more kinds of gases in the chamber.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: November 29, 2016
    Assignee: GIGAPHOTON INC.
    Inventors: Hakaru Mizoguchi, Yasufumi Kawasuji, Osamu Wakabayashi
  • Patent number: 9271793
    Abstract: Disclosed is a skin treatment device for personal use. The device includes an optical radiation providing module operating in pulsed or continuous operation mode, a mechanism for continuously displacing the device across the skin, and a device displacement speed monitoring arrangement. When the device is applied to skin, the optical pulses repetition rate establishes the power of the optical radiation as a function of the device displacement speed. The device a hair removal mechanism configured to mechanically remove hair from the treated segment of the skin.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: March 1, 2016
    Inventors: Shimon Eckhouse, Tuvia Dror Kutscher, Boris Vaynberg
  • Patent number: 9259595
    Abstract: Analysis of the production of 11C fragments mainly by projectile fragmentation of a stable monodirectional and monoenergetic primary 12C beam in different decelerating materials are presented and the optimal target choice have been identified to obtain the highest possible beam quality of decelerated 11C beam at arbitrary energies and therapeutic ranges. The optimal 11C-generating target is made of hydrogen preferably followed by a digitally variable decelerator of a hydrogen rich compound, such as polyethylene, to maximize the quality of the 11C beam.
    Type: Grant
    Filed: September 6, 2011
    Date of Patent: February 16, 2016
    Assignee: RADINOVA AB
    Inventors: Anders Brahme, Marta Lazzeroni
  • Patent number: 9182507
    Abstract: A customizable and upgradable imaging system is provided. Imaging detector columns are installed in a gantry to receive imaging information about a subject. Imaging detector columns can extend and retract radially as well as be rotated orbitally around the gantry. The system can provide detector columns that include both high and low energy collimation. The detector columns may also use side shielding and adaptively disable detector elements based on emission information and shielding information. This system can be a Nuclear Medicine (NM) imaging system to acquire Single Photon Emission Computed Tomography (SPECT) image information.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: November 10, 2015
    Assignee: General Electric Company
    Inventors: Yaron Hefetz, Jean-Paul Bouhnik, Arie Eshco
  • Publication number: 20150137009
    Abstract: The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape. The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 21, 2015
    Inventors: Willem Henk URBANUS, Marco Jan-Jaco WIELAND
  • Publication number: 20150137010
    Abstract: The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 21, 2015
    Inventors: Willem Henk URBANUS, Marco Jan-Jaco WIELAND
  • Publication number: 20150123017
    Abstract: The invention relates to methods, devices, systems and uses of such systems for the generation and detection of electromagnetic fields carrying orbital angular momentum. An electromagnetic wave placed in a resonator having a closed-loop waveguide supporting a guided wave propagating at resonance with angular order, p, and with an angular grating patterned in the closed-loop waveguide, the angular grating having a integer number, q, of grating elements. The angular grating selectively couples the guided wave mode to a free space radiation mode having an OAM quantity, l, and out-of-plane wave vector component, krad,z, and wherein significant coupling to the grating occurs only when the following wave matching condition is satisfied: l=p?mq where: m is the diffraction order of the angular grating, m=1, 2, 3, . . . ,.
    Type: Application
    Filed: May 29, 2013
    Publication date: May 7, 2015
    Applicant: The University of Bristol
    Inventors: Siyuan Yu, Mark Thompson, Xinlun Cai
  • Patent number: 8993987
    Abstract: A target supply device may include a receptacle for holding a liquid target material, a first electrode disposed within the receptacle, a nozzle portion provided in the receptacle, a second electrode provided with a first path and disposed facing the nozzle portion, a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material released from the nozzle portion, a first power source that applies a first potential that is higher than a common potential to the first electrode, a second power source that applies a second potential that is lower than the common potential to the third electrode, and a third power source that applies a third potential that is no greater than the first potential and is no less than the second potential to the second electrode.
    Type: Grant
    Filed: August 28, 2013
    Date of Patent: March 31, 2015
    Assignee: Gigaphoton Inc.
    Inventor: Hiroshi Umeda
  • Patent number: 8984800
    Abstract: An insect decoy is provided that includes a vapor-isolated vessel, a chemical compound disposed within the vapor-isolated vessel, and an excitation energy source. The chemical compound may have one or more absorption bands at a set of absorption wavelengths and have one or more emission bands at a set of emission wavelengths. The excitation energy source may be configured to produce electromagnetic radiation at the absorption wavelengths so as to fluoresce the chemical compound and release photons at the emission wavelengths. The vapor-isolated vessel may be configured with at least one infrared transmissive window that is substantially transparent to the released photons at the emission wavelengths of the chemical compound.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: March 24, 2015
    Assignee: Technology SG, L.P.
    Inventors: Eric L. Canfield, Thomas M. Dykstra, Scott J. Soma, Robert E. Rasmussen, Robert P. Alston
  • Publication number: 20150069272
    Abstract: A light-emitting source for curing applications is disclosed. The light-emitting source comprises a first housing having a top wall and one or more side walls. The top wall and the one or more side walls define a first enclosure having a first open end. The light-emitting source further comprises a plurality of light-emitting devices arranged within the first enclosure of the first housing. One side of each of the plurality of light-emitting devices faces outward from the first open end of the first enclosure. The plurality of light-emitting devices is configured to emit light from the first open end to produce a substantially uniform area of illumination on a facing portion of a surface of a target.
    Type: Application
    Filed: September 5, 2014
    Publication date: March 12, 2015
    Inventors: Darrin Leonhardt, Pradyumna Kumar Swain
  • Patent number: 8957397
    Abstract: A photon collimator, suitable for use in medical imaging equipment, is constructed from a block of photon-attenuating material, such as solid tungsten or molybdenum alloy that defines a plurality of integrally formed septa slats. Each slat has an elongated length dimension greater than thickness and depth dimensions, and is oriented in an opposed pattern array that is laterally spaced relative to its respective thickness dimension. An aperture channel is defined between each pair of opposed slats. Rows of integrally formed slats in one block or separately affixed blocks may be stacked on each other at skewed angles to form two-dimensional grids of apertures having polygonal cross sections. The slats may be formed by electric discharge or laser thermal ablation machining, such as by a sequential passing of an EDM wire cutting head along the pattern array, repeating sequential cutting of respective channel depth and width.
    Type: Grant
    Filed: August 16, 2012
    Date of Patent: February 17, 2015
    Assignee: Siemens Medical Solutions USA, Inc.
    Inventor: Ronald E. Malmin
  • Publication number: 20150021500
    Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
    Type: Application
    Filed: October 9, 2014
    Publication date: January 22, 2015
    Inventor: Donald K. Smith
  • Patent number: 8927951
    Abstract: A target supply device may include a tank having a nozzle, a first electrode provided with a first through-hole, a second electrode provided with a second through-hole, a third electrode disposed within the tank, an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that insulation among the nozzle, the first electrode, and the second electrode is maintained, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole, a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode and that is configured to project toward the nozzle, and a second projecting portion that is an integrated part of at least the second electrode and that is configured to project so as to be positioned between the first electrode and the second electrode.
    Type: Grant
    Filed: November 19, 2013
    Date of Patent: January 6, 2015
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Umeda, Takashi Ohara, Osamu Wakabayashi
  • Publication number: 20150001424
    Abstract: When using micro-resonant structures, a resonant structure may be turned on or off (e.g., when a display element is turned on or off in response to a changing image or when a communications switch is turned on or off to send data different data bits). Rather than turning the charged particle beam on and off, the beam may be moved to a position that does not excite the resonant structure, thereby turning off the resonant structure without having to turn off the charged particle beam. In one such embodiment, at least one deflector is placed between a source of charged particles and the resonant structure(s) to be excited. When the resonant structure is to be turned on (i.e., excited), the at least one deflector allows the beam to pass by undeflected. When the resonant structure is to be turned off, the at least one deflector deflects the beam away from the resonant structure by an amount sufficient to prevent the resonant structure from becoming excited.
    Type: Application
    Filed: September 16, 2014
    Publication date: January 1, 2015
    Inventors: Jonathan Gorrell, Mark Davidson, Michael E. Maines
  • Patent number: 8901521
    Abstract: A module for producing extreme ultraviolet radiation includes a supply configured to supply droplets of an ignition material to a predetermined target ignition position and a laser arranged to be focused on the predetermined target ignition position and to produce a plasma by hitting such a droplet which is located at the predetermined target ignition position in order to change the droplet into an extreme ultraviolet producing plasma. Also, the module includes a collector mirror having a mirror surface constructed and arranged to reflect the radiation in order to focus the radiation on a focal point. A fluid supply is constructed and arranged to form a gas flow flowing away from the mirror surface in a direction transverse with respect to the mirror surface in order to mitigate particle debris produced by the plasma.
    Type: Grant
    Filed: August 25, 2008
    Date of Patent: December 2, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski
  • Patent number: 8890099
    Abstract: A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated. The fuel droplet generator has nozzle, fuel supply line, and reservoir, with a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets. The fuel droplet generator has a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, to deter nozzle blockage by solid particulate impurities in the fuel.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: November 18, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Ronald Johannes Hultermans, Antonius Theodorus Wilhelmus Kempen, Bernard Van Essen
  • Patent number: 8890100
    Abstract: A beam filter positioning device includes a first and a second axes operable to move a body supporting one or more collimators, one or more photon flattening filters, one or more electron foils, and field light mirror etc. The collimators may be configured to collimate radiation to define a treatment beam suitable for radiosurgery. A controller is programmed to control the servo motor of the first and second axes to accurately position the beam filters. Radiation apparatuses and systems incorporating the beam filter positioning device or assembly are also provided.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: November 18, 2014
    Assignee: Varian Medical Systems, Inc.
    Inventors: Calvin J. Huntzinger, David K. Jensen, William A. Strachan
  • Publication number: 20140326903
    Abstract: The invention relates to antenna design and may be used in a variety of devices operating within a wide waveband range, including visible, UV, IR, shortwave, UHF, VHF, and other wavebands. The technical effect achieved by the present invention is making the device multifunctional, small, durable, economical, and efficient. The above technical effect is achieved in a multipurpose energy concentrator comprising a reflector and a radiation source or receiver, wherein the reflector is at least a part of the surface of a solid of revolution, and the radiation source or receiver is a distributed system of active or passive elements, respectively, positioned at an identical distance from the reflector equal to between 0.3 and 0.5 of the radius of curvature thereof.
    Type: Application
    Filed: December 29, 2011
    Publication date: November 6, 2014
    Inventor: Evgeny Vyacheslavovich Komrakov
  • Patent number: 8879690
    Abstract: Provided is an X-ray generator for generating X-rays from an X-ray focal point that is a region in which electrons emitted from a filament impinge upon a rotating anode. The X-ray generator has a Wehnelt electrode for surrounding the filament, an attachment part formed integrally with the Wehnelt electrode, a pedestal to which the attachment part is attached, and a casing for housing the pedestal and the anticathode. The width of the space in which the anticathode is housed by the casing is less than the width of the space in which the pedestal is housed by the casing. The Wehnelt electrode extends into the space in which the anticathode is housed by the casing, in a state in which the attachment part is attached to the pedestal.
    Type: Grant
    Filed: December 27, 2011
    Date of Patent: November 4, 2014
    Assignee: Rigaku Corporation
    Inventors: Tomohiro Chaki, Koichi Kato, Masahiro Nonoguchi, Masashi Kageyama, Masaru Kuribayashi
  • Publication number: 20140306115
    Abstract: The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various embodiments, a vacuum chamber is configured to contain a target material, wherein a laser or discharge produced plasma is generated in response to an excitation of the target material. One or more outlets within the chamber are configured to receive gas flowing from a fluidically coupled gas source and further configured to actively flow the gas towards a source of debris and away from the reflective optic or any other protected surface at a controlled flow rate.
    Type: Application
    Filed: April 7, 2014
    Publication date: October 16, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Alexey Kuritsyn, Alexander Bykanov, Oleg Khodykin
  • Patent number: 8853062
    Abstract: A laser crystallization device includes a first light source providing a first light and a second light source providing a second light. The device further includes a first lens set receiving the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion. The device further includes a second lens set receiving the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion, the second profile error portion corresponding to the first non-error portion, the second non-error portion corresponding to the first profile error portion. The device further includes an optical system combining the first transmitted light with the second transmitted light.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: October 7, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Hiroshi Okumura
  • Patent number: 8853655
    Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: October 7, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi
  • Publication number: 20140286147
    Abstract: The present invention relates to a plasmon generator, in which a surface plasmon is excited by application of light. The plasmon generator extends along one direction. The plasmon generator includes a first end surface that is positioned on one end in the one direction and at which near-field light is generated along with the excitation of the plasmon; and a second cross section that is substantially parallel to the first end surface and is away from the first end surface. The first end surface has a polygonal shape that does not have a substantially acute inner angle. The second cross section has an upper part that has a shape substantially the same as or similar to that of the first end surface and a flare shaped lower part that is connected to the upper part and has a width that increases as it is far from the upper part.
    Type: Application
    Filed: March 25, 2013
    Publication date: September 25, 2014
    Inventors: Susumu AOKI, Kosuke TANAKA, Keita KAWAMORI, Hiroki KAWATO, Takeshi TSUTSUMI
  • Publication number: 20140239202
    Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.
    Type: Application
    Filed: February 18, 2014
    Publication date: August 28, 2014
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi
  • Publication number: 20140243576
    Abstract: One embodiment of a particle accelerator includes: a particle source from which a particle beam is extracted with a beam pulse width of not greater than 2 ?sec; a linear accelerator for accelerating the particle beam extracted from the particle source; a synchrotron for receiving the particle beam transported thereto from the linear accelerator and causing the particle beam to circulate in order to accelerate it until it gets to a predetermined energy level; a bump electromagnet for shifting the circulating path of the particle beam each time it makes a full turn; and a control unit for controlling the extent of magnetic excitation of the bump electromagnet and for controlling the timing of magnetic excitation of the bump electromagnet according to the pulse timing of the particle source.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 28, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Akiko Kakutani, Kiyokazu Sato, Takeshi Yoshiyuki, Takashi Yazawa
  • Patent number: 8816271
    Abstract: This device comprises a single radioactive source (44), capable of creating an incident beam (120), and a target (48) placed opposite the source (44). The target (48) is capable of creating the second beam (130) by interacting with a first part of the incident beam (120), a second part of the incident beam (120) passing through the target (48) to form the first beam (124).
    Type: Grant
    Filed: December 7, 2009
    Date of Patent: August 26, 2014
    Assignee: Geoservices Equipements
    Inventors: Damien Chazal, Pierre-Arnaud Foucher, Gérard Segeral
  • Patent number: 8816306
    Abstract: An infrared (IR) light device is provided comprising: a main casing filled with a gas to prevent condensation from forming on an interior surface of the visible light filter; and a plurality of IR light emitting diodes (LEDs) mounted in the main casing, wherein the casing includes heat dissipating features.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: August 26, 2014
    Assignee: Battelle Memorial Institute
    Inventors: Robert A. Yano, Jr., Joseph W. Martin, Darren J. Wolfe
  • Patent number: 8809820
    Abstract: A lamp head module includes a high aspect ratio, high fill factor array of light emitting devices and a submount. The array includes multiple groups of electrically seriesed light emitting devices that are connected in electrical parallel. The submount is of monolithic construction and includes multiple L-shaped patterned circuit material layers. Each of the L-shaped patterned circuit material layers includes an arm portion and a stem portion. The arm portion functions as a light emitting device bond pad and the stem portion functions as a wire bond pad and a circuit trace. Each light emitting device of a group is affixed to a corresponding arm portion of the submount. The stem portions are located external to the array, run parallel to the length of the array and perform a primary current carrying function for current flow between adjacent light emitting devices of the group.
    Type: Grant
    Filed: August 20, 2012
    Date of Patent: August 19, 2014
    Assignee: Heraeus Noblelight Fusion UV Inc.
    Inventor: Jonathan S. Dahm
  • Patent number: 8809817
    Abstract: A method and irradiator apparatus used for wort sterilization by radiation for production of ethanol from sugar cane, comprising a modular irradiation drum, radioactive source, ducts for transmission of a fluid through an apparatus for irradiation, and application of radiation to a fluid within an apparatus for sterilization of such fluid.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: August 19, 2014
    Inventors: Marcelo Gianatto Moreira, Airton Deppman, Pedro Carlos Russo Rossi
  • Publication number: 20140211184
    Abstract: According to a first aspect of the present invention, there is provided a radiation source comprising: a nozzle configured to direct a stream of fuel droplets (70) along a trajectory towards a plasma formation location; a laser configured to direct laser radiation at a fuel droplet at the plasma formation location to generate, in use, a radiation generating plasma; wherein the laser comprises: a seed laser (50) for providing a seed laser beam (52); a beam splitter (54) for receiving the seed laser beam from the seed laser; an optical amplifier (58) for receiving the seed laser beam from the beam splitter and performing optical amplification; a first reflector (60) located downstream of the optical amplifier, configured to direct the seed laser beam back through the optical amplifier and on to the beam splitter; and a second reflector (70) located further downstream of the beam splitter, configured to receive the seed laser beam from the beam splitter and to direct at least a portion of the seed laser beam bac
    Type: Application
    Filed: July 27, 2012
    Publication date: July 31, 2014
    Applicant: ASML Netherlands B.V.
    Inventors: Christian Wagner, Erik Roelof Loopstra
  • Patent number: 8766217
    Abstract: The invention comprises a multi-field charged particle irradiation method and apparatus. Radiation is delivered through an entry point into the tumor and Bragg peak energy is targeted to a distal or far side of the tumor from an ingress point. Delivering Bragg peak energy to the distal side of the tumor from the ingress point is repeated from multiple rotational directions. Preferably, beam intensity is proportional to radiation dose delivery efficiency. Preferably, the charged particle therapy is timed to patient respiration via control of charged particle beam injection, acceleration, extraction, and/or targeting methods and apparatus. Optionally, multi-axis control of the charged particle beam is used simultaneously with the multi-field irradiation. Combined, the system allows multi-field and multi-axis charged particle irradiation of tumors yielding precise and accurate irradiation dosages to a tumor with distribution of harmful irradiation energy about the tumor.
    Type: Grant
    Filed: May 21, 2009
    Date of Patent: July 1, 2014
    Inventor: Vladimir Yegorovich Balakin
  • Patent number: 8735848
    Abstract: There is provided a charged particle beam treatment planning device that creates a treatment plan and is connected to a charged particle beam irradiation apparatus that includes a scanning electromagnet, which scans a charged particle beam, and a degrader, which adjusts a range of the charged particle beam by reducing the energy of the charged particle beam, and irradiates an irradiation object with the charged particle beam. The charged particle beam treatment planning device includes a control unit that adjusts the dose of the charged particle beam, which is irradiated to a predetermined position of the irradiation object, on the basis of a passing distance of the charged particle beam within the degrader calculated using a deflection angle of the charged particle beam.
    Type: Grant
    Filed: July 11, 2013
    Date of Patent: May 27, 2014
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventor: Toru Asaba
  • Patent number: 8729511
    Abstract: Embodiments of the present invention relate to an electromagnetic wave beam splitter, comprising a functional layer made of at least one metamaterial sheet, wherein different metamaterial sheets have the same refractive index distribution; the metamaterial sheet may be divided into a circular region and an annular region concentric to the circular region; a refractive index increases continuously as a radius increases and refractive indices at the same radius are the same within the circular region; and a refractive index decreases continuously as a radius increases and refractive indices are the same at the same radius within the annular region.
    Type: Grant
    Filed: November 21, 2011
    Date of Patent: May 20, 2014
    Assignee: Kuang-Chi Innovative Technology Ltd.
    Inventors: Ruopeng Liu, Chunlin Ji, Yutao Yue, Yunnan Hong
  • Publication number: 20140131594
    Abstract: A method for testing the sensitivity of electronic components and circuits against particle and photon beams using laser-plasma interaction, in which the flexibility of the multifaceted interaction can produce several types of radiation such as electron, proton, ion, neutron and photon radiation, and combinations of these types of radiation, in a wide range of parameters that are relevant to the use of electronic components in space, such as satellites, at high altitudes or in facilities that work with radioactive substances such as nuclear power plants. Relevant radiation parameter ranges are accessible by this method, which are hardly accessible with conventional accelerator technology. Because of the compactness of the procedure and its versatility, radiation testing can be performed in smaller laboratories at relatively low cost.
    Type: Application
    Filed: December 13, 2013
    Publication date: May 15, 2014
    Inventors: Bernhard Hidding, James Rosenzweig, David Bruhwiler, Georg Pretzler
  • Patent number: 8723147
    Abstract: The extreme ultraviolet light source comprises a production site capable of producing extreme ultraviolet radiation in a laser-produced plasma (3), and a collector optics (6) for collimating the extreme ultraviolet radiation. A pressurized influx of gas forms a gas curtain between the production site and the collector optics (6) in order to protect the collector optics (6) from debris (4) generated at the production site. The gas influx is directed in a way that it follows the surface of the collector optics (6). By thus shielding the collector optics (6) from the debris (4) its lifetime is enhanced. The shielding gas can further be used for cooling the collector optics (6).
    Type: Grant
    Filed: March 25, 2010
    Date of Patent: May 13, 2014
    Assignee: ETH Zürich
    Inventors: Reza Abhari, Andrea Giovannini, Bob Rollinger, Davide Bleiner