J-fet (junction Field Effect Transistor) Patents (Class 257/134)
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Patent number: 10930591Abstract: Trench MOSFET with self-aligned body contact with spacer. In accordance with an embodiment of the present invention, a plurality of gate trenches are formed into a semiconductor substrate. A body contact trench is formed into the semiconductor substrate in a mesa between the gate trenches. Spacers are deposited on sidewalls of the body contact trench. An ohmic body contact is implanted into the semiconductor substrate through the body contact trench utilizing the spacers to self-align the implant. A body contact trench extension may be etched into the semiconductor substrate through the body contact trench utilizing the spacers to self-align the etch, prior to the implant.Type: GrantFiled: April 4, 2019Date of Patent: February 23, 2021Assignee: Vishay-Siliconix, LLCInventors: Lingpeng Guan, Kyle Terrill, Seokjin Jo
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Patent number: 10672746Abstract: An integrated circuit includes a first chip including a high-voltage depletion-mode transistor and a second chip including an enhancement-mode device. The chips have first and second gate contact pads, first and second source contact pads and first and second drain contact pads, respectively, on their front sides. Chips are joined together via their front sides, and the area of the first chip is larger than that of the second chip. The first chip includes an additional contact pad on its front side that is electrically insulated from the high-voltage depletion-mode transistor and that contacts the second gate contact pad. The first gate contact pad contacts the second source contact pad and/or the first source contact pad contacts the second drain contact pad. The first gate contact pad and the additional contact pad extend at least partially into a peripheral portion of the first chip.Type: GrantFiled: November 20, 2017Date of Patent: June 2, 2020Assignee: ExaganInventors: Domenico Lo Verde, Laurent Guillot, Fabrice Letertre
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Patent number: 10622381Abstract: As a display device has higher definition, the number of pixels is increased and thus, the number of gate lines and signal lines is increased. When the number of gate lines and signal lines is increased, it is difficult to mount IC chips including driver circuits for driving the gate lines and the signal lines by bonding or the like, whereby manufacturing cost is increased. A pixel portion and a driver circuit for driving the pixel portion are provided on the same substrate, and at least part of the driver circuit comprises a thin film transistor including an oxide semiconductor sandwiched between gate electrodes. A channel protective layer is provided between the oxide semiconductor and a gate electrode provided over the oxide semiconductor. The pixel portion and the driver circuit are provided on the same substrate, which leads to reduction of manufacturing cost.Type: GrantFiled: December 27, 2018Date of Patent: April 14, 2020Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hidekazu Miyairi, Takeshi Osada, Shunpei Yamazaki
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Patent number: 10411124Abstract: A semiconductor structure includes a substrate, a III-Nitride intermediate stack including the protrusion propagation body situated over the substrate, a transition body over the III-Nitride intermediate stack, a III-Nitride buffer layer situated over the transition body, and a III-Nitride device fabricated over the group III-V buffer layer. The protrusion propagation body includes at least a protrusion generating layer and two or more protrusion spreading multilayers.Type: GrantFiled: February 19, 2018Date of Patent: September 10, 2019Assignee: Infineon Technologies Americas Corp.Inventors: Chan Kyung Choi, Mihir Tungare, Peter Wook Kim
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Patent number: 10121886Abstract: This application provides a high power semiconductor device, which is characterized by forming two diodes connected in parallel and a schottky contact on a channel layer to lower the turn-on voltage and turn-on resistance of the high power semiconductor device at the same time and to enhance the breakdown voltage.Type: GrantFiled: July 31, 2017Date of Patent: November 6, 2018Assignee: EPISTAR CORPORATIONInventors: Ming-Chin Chen, Yi-Chih Lin, Shang-Ju Tu
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Patent number: 9929090Abstract: Techniques and circuitry are disclosed for efficiently implementing programmable memory array circuit architectures, including both non-volatile and volatile memories. The memory circuitry employs an antifuse scheme that includes an array of 1 T bitcells, wherein each bitcell effectively contains one gate or transistor-like device that provides both an antifuse element and a selector device for that bitcell. In particular, the bitcell device has asymmetric trench-based source/drain contacts such that one contact forms a capacitor in conjunction with the spacer and gate metal, and the other contact forms a diode in conjunction with a doped diffusion area and the gate metal. The capacitor serves as the antifuse element of the bitcell, and can be programmed by breaking down the spacer. The diode effectively provides a Schottky junction that serves as a selector device which can eliminate program and read disturbs from bitcells sharing the same bitline/wordline.Type: GrantFiled: March 24, 2014Date of Patent: March 27, 2018Assignee: INTEL CORPORATIONInventors: Ting Chang, Chia-Hong Jan, Walid M. Hafez
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Patent number: 9735769Abstract: Systems and methods for controlling current or mitigating electromagnetic or radiation interference effects using multiple different semi-conductive channel regions generating structures formed by multiple different semi-conductive electrical current or voltage control structures. One embodiment includes providing a first and second metal oxide semiconductor field effect transistor (MOSFET) sections formed on opposite sides of a metal-semiconductor field effect transistor (MESFET) such that operation of the MESFET modulates or controls current otherwise controlled by an electrical path of the MOSFET sections. A control system for determining when an embodiment of the invention is to be operated is also provided to include automated systems including sensors as well as manually operated systems. Automated systems can include radiation sensors as well as other control systems such as high voltage radio frequency transmitter or receiver systems. Methods of operation for a variety of modes are also provided.Type: GrantFiled: October 2, 2015Date of Patent: August 15, 2017Assignee: The United States of America as represented by the Secretary of the NavyInventor: Jeffrey L. Titus
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Patent number: 9716170Abstract: Embodiments of the invention are directed to a vertical FET device having gate and source or drain features. The device includes a fin formed in a substrate and a source or a drain region formed in the substrate. The device further includes a trench formed in the source or the drain region and a dielectric region formed in the trench. The device further includes a gate formed along vertical sidewalls of the fin and positioned such that a space between the gate and the source or the drain region includes at least a portion of the dielectric region. In some embodiments, the device further includes a bottom spacer formed over an upper surface of the dielectric region and positioned such that the space between the gate and the source or the drain region further includes at least a portion of the bottom spacer.Type: GrantFiled: September 30, 2016Date of Patent: July 25, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Ruilong Xie, Tenko Yamashita, Chun-chen Yeh
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Patent number: 9698594Abstract: Components can be damaged if they are exposed to excess voltages. A device is disclosed herein which can be placed in series with a component and a node that may be exposed to high voltages. If the voltage becomes too high, the device can autonomously switch into a relatively high impedance state, thereby protecting the other components.Type: GrantFiled: November 10, 2015Date of Patent: July 4, 2017Assignee: ANALOG DEVICES GLOBALInventor: Edward John Coyne
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Patent number: 9608092Abstract: A method for forming a field-effect semiconductor device includes: providing a wafer having a main surface and a first semiconductor layer of a first conductivity type; forming at least two trenches from the main surface partly into the first semiconductor layer so that each of the at least two trenches includes, in a vertical cross-section substantially orthogonal to the main surface, a side wall and a bottom wall, and that a semiconductor mesa is formed between the side walls of the at least two trenches; forming at least two second semiconductor regions of a second conductivity type in the first semiconductor layer so that the bottom wall of each of the at least two trenches adjoins one of the at least two second semiconductor regions; and forming a rectifying junction at the side wall of at least one of the at least two trenches.Type: GrantFiled: August 10, 2015Date of Patent: March 28, 2017Assignee: Infineon Technologies AGInventors: Jens Konrath, Hans-Joachim Schulze, Roland Rupp, Wolfgang Werner, Frank Pfirsch
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Patent number: 9461115Abstract: A switching power supply has a start-up circuit that includes a field effect transistor (JFET), which has a gate region (a p-type well region) formed in a surface layer of a p-type substrate and a drift region (a first n-type well region). A plurality of source regions (second n-type well regions) are formed circumferentially around the drift region. A drain region (a third n-type well region) is formed centrally of the source region. The drain region and the source regions can be formed at the same time. A metal wiring of the source electrode wiring connected to source regions is divided into at least two groups to form at least two junction field effect transistors.Type: GrantFiled: August 27, 2012Date of Patent: October 4, 2016Assignee: FUJI ELECTRIC CO., LTD.Inventors: Masaru Saito, Koji Sonobe
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Patent number: 9455701Abstract: Apparatuses and methods for modulating current/voltage response using multiple semi-conductive channel regions (SCR) produced from different integrated semiconductor structures are provided. In particular, embodiments include systems and methods for controlling current or mitigating electromagnetic or radiation interference effects using combined integrated functions of a lateral double-diffused metal-oxide semiconductor field effect transistor (LDMOSFET) and metal-semiconductor field effect transistor (MESFET) disposed in proximity of a LDMOSFET's SCR within a certain orientation forming a second SCR.Type: GrantFiled: October 2, 2015Date of Patent: September 27, 2016Assignee: The United States of America as represented by the Secretary of the NavyInventor: Jeffrey L. Titus
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Patent number: 9406762Abstract: A semiconductor device includes a substrate including silicon carbide; a drift layer disposed over the substrate including a drift region doped with a first dopant and conductivity type; and a second region, doped with a second dopant and conductivity type, adjacent to the drift region and proximal to a surface of the drift layer. The semiconductor device further includes a junction termination extension adjacent to the second region with a width and discrete regions separated in a first and second direction doped with varying concentrations of the second dopant type, and an effective doping profile of the second conductivity type of functional form that generally decreases away from the edge of the primary blocking junction. The width is less than or equal to a multiple of five times the width of the one-dimensional depletion width, and the charge tolerance of the semiconductor device is greater than 1.0×1013 per cm2.Type: GrantFiled: May 15, 2013Date of Patent: August 2, 2016Assignee: GENERAL ELECTRIC COMPANYInventors: Stephen Daley Arthur, Alexander Viktorovich Bolotnikov, Peter Almern Losee, Kevin Sean Matocha, Richard Joseph Saia, Zachary Matthew Stum, Ljubisa Dragoljub Stevanovic, Kuna Venkat Satya Rama Kishore, James William Kretchmer
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Patent number: 9331068Abstract: A hybrid semiconductor bipolar switch in which a normally-on high-voltage wide-bandgap semiconductor bipolar switch and a normally-off field effect transistor are connected in a cascode (Baliga-pair) configuration. The switch may be constructed as a stacked hybrid device where a discrete transistor is bonded on top of a bipolar switch. Power systems may use plural switches paired with anti-parallel diodes.Type: GrantFiled: October 30, 2014Date of Patent: May 3, 2016Assignee: United Silicon Carbide, Inc.Inventors: Leonid Fursin, Anup Bhalla
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Patent number: 9293548Abstract: According to one embodiment, a semiconductor device includes a first major electrode, a first semiconductor layer, a first conductivity-type base layer, a second conductivity-type base layer, a second semiconductor layer, a buried layer, a buried electrode, a gate insulating film, a gate electrode, and a second major electrode. The buried layer of the second conductivity type selectively is provided in the first conductivity-type base layer. The buried electrode is provided in a bottom portion of a trench which penetrates the second conductivity-type base layer to reach the buried layer. The buried electrode is in contact with the buried layer. The gate electrode is provided inside the gate insulating film in the trench. The second major electrode is provided on the second semiconductor layer and is electrically connected to the second semiconductor layer and the buried electrode.Type: GrantFiled: April 13, 2015Date of Patent: March 22, 2016Assignee: Kabushiki Kaisha ToshibaInventor: Tsuneo Ogura
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Patent number: 9291874Abstract: An optical deflection element is provided with a substrate; an optical waveguide film made of an electro-optic medium, and constituting an optical waveguide formed on the substrate; a first electrode pair disposed on an incident side of the optical waveguide film at a position facing a film thickness direction of the optical waveguide film, and configured to deflect a light beam transmitting through the optical waveguide film in an in-plane direction of the optical waveguide film in accordance with a first applied voltage; and a second electrode pair disposed on an output side of the optical waveguide film at a position facing the film thickness direction of the optical waveguide film, and configured to deflect the light beam deflected in the in-plane direction of the optical waveguide film by the first electrode pair in the film thickness direction of the optical waveguide film in accordance with a second applied voltage. The second electrode pair includes a first electrode and a second electrode.Type: GrantFiled: January 28, 2014Date of Patent: March 22, 2016Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventor: Norihito Fujinoki
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Patent number: 9136397Abstract: A field-effect semiconductor device having a semiconductor body with a main surface is provided. The semiconductor body includes, in a vertical cross-section substantially orthogonal to the main surface, a drift layer of a first conductivity type, a semiconductor mesa of the first conductivity type adjoining the drift layer, substantially extending to the main surface and having two side walls, and two second semiconductor regions of a second conductivity type arranged next to the semiconductor mesa. Each of the two second semiconductor regions forms a pn-junction at least with the drift layer. A rectifying junction is formed at least at one of the two side walls of the mesa. Further, a method for producing a heterojunction semiconductor device is provided.Type: GrantFiled: May 31, 2013Date of Patent: September 15, 2015Assignee: Infineon Technologies AGInventors: Jens Konrath, Hans-Joachim Schulze, Roland Rupp, Wolfgang Werner, Frank Pfirsch
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Patent number: 9041049Abstract: In general, in a semiconductor active element such as a normally-off JFET based on SiC in which an impurity diffusion speed is significantly lower than in silicon, gate regions are formed through ion implantation into the side walls of trenches formed in source regions. However, to ensure the performance of the JFET, it is necessary to control the area between the gate regions thereof with high precision. Besides, there is such a problem that, since a heavily doped PN junction is formed by forming the gate regions in the source regions, an increase in junction current cannot be avoided. The present invention provides a normally-off power JFET and a manufacturing method thereof and forms the gate regions according to a multi-epitaxial method which repeats a process including epitaxial growth, ion implantation, and activation annealing a plurality of times.Type: GrantFiled: August 19, 2013Date of Patent: May 26, 2015Assignee: Renesas Electronics CorporationInventors: Koichi Arai, Yasuaki Kagotoshi, Nobuo Machida, Natsuki Yokoyama, Haruka Shimizu
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Patent number: 9041120Abstract: A transistor device comprises: at least one individual transistor cell arranged in a transistor cell field on a semiconductor body, each individual transistor cell comprising a gate electrode; a gate contact, electrically coupled to the gate electrodes of the transistor cells and configured to switch on the at least one transistor cell by providing a gate current in a first direction and configured to switch off the at least one transistor cell by providing a gate current in a second direction, the second direction being opposite to the first direction; at least one gate-resistor structure monolithically integrated in the transistor device, the gate-resistor structure providing a first resistance for the gate current when the gate current flows in the first direction, and providing a second resistance for the gate current, which is different from the first resistance, when the gate current flows in the second direction.Type: GrantFiled: July 25, 2013Date of Patent: May 26, 2015Assignee: Infineon Technologies AGInventors: Stephan Voss, Peter Tuerkes, Holger Huesken
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Patent number: 8901603Abstract: A protection circuit for metal-oxide-semiconductor field-effect transistors (MOSFETs) that are used as active bypass diodes in photovoltaic solar power systems is disclosed. The protection circuit comprises, a detection circuit for detecting the start of a surge event, a switch disposed to connect the MOSFET's drain to it's gate in response to the start of the surge, a diode in series with the switch, a bistable circuit for keeping the switch closed during the surge, and a means of resetting the bistable circuit after the surge.Type: GrantFiled: March 27, 2013Date of Patent: December 2, 2014Inventor: Steven Andrew Robbins
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Patent number: 8890109Abstract: Provided are resistive random access memory (ReRAM) cells including resistive switching layers and thermally isolating structures for limiting heat dissipation from the switching layers during operation. Thermally isolating structures may be positioned within a stack or adjacent to the stack. For example, a stack may include one or two thermally isolating structures. A thermally isolating structure may directly interface with a switching layer or may be separated by, for example, an electrode. Thermally isolating structures may be formed from materials having a thermal conductivity of less than 1 W/m*K, such as porous silica and mesoporous titanium oxide. A thermally isolating structure positioned in series with a switching layer generally has a resistance less than the low resistance state of the switching layer. A thermally isolating structure positioned adjacent to a switching layer may have a resistance greater than the high resistance state of the switching layer.Type: GrantFiled: December 20, 2012Date of Patent: November 18, 2014Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Yun Wang, Tony P. Chiang, Tim Minvielle, Takeshi Yamaguchi
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Publication number: 20140291721Abstract: A protection circuit for metal-oxide-semiconductor field-effect transistors (MOSFETs) that are used as active bypass diodes in photovoltaic solar power systems is disclosed. The protection circuit comprises, a detection circuit for detecting the start of a surge event, a switch disposed to connect the MOSFET's drain to it's gate in response to the start of the surge, a diode in series with the switch, a bistable circuit for keeping the switch closed during the surge, and a means of resetting the bistable circuit after the surge.Type: ApplicationFiled: March 27, 2013Publication date: October 2, 2014Applicant: SUNFIELD SEMICONDUCTOR INC.Inventor: Steven Andrew Robbins
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Patent number: 8841698Abstract: A method is disclosed that provides a self-aligned nitrogen-implant particularly suited for a Junction Field Effect Transistor (JFET) semiconductor device preferably comprised of a silicon carbide (SiC). This self-aligned nitrogen-implant allows for the realization of durable and stable electrical functionality of high temperature transistors such as JFETs. The method implements the self-aligned nitrogen-implant having predetermined dimensions, at a particular step in the fabrication process, so that the SiC junction field effect transistors are capable of being electrically operating continuously at 500° C. for over 10,000 hours in an air ambient with less than a 10% change in operational transistor parameters.Type: GrantFiled: April 1, 2011Date of Patent: September 23, 2014Assignee: The United States of America as Represented by the Administrator of National Aeronautics and Space AdministrationInventor: Philip G. Neudeck
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Patent number: 8829482Abstract: A programmable impedance memory device structure can include a multi-layer variable impedance memory element formed on a planar surface of a first barrier layer, the multi-layer variable impedance memory element comprising a plurality of layers substantially parallel to the planar surface, including a memory material layer in contact with the planar surface, the first barrier layer being formed above a first insulating layer; and a second barrier layer formed over the memory element having a top surface substantially parallel with the planar surface. The first and second barrier layers can have lower mobility rates for at least one element within the memory material layer than the first insulating layer, and the memory material layer can be programmable by application of an electrical field between at least two different impedance states.Type: GrantFiled: September 23, 2011Date of Patent: September 9, 2014Assignee: Adesto Technologies CorporationInventors: Antonio R. Gallo, Chakravarthy Gopalan, Yi Ma
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Patent number: 8829573Abstract: A semiconductor device with minimized current flow differences and method of fabricating same are disclosed. The method includes forming a semiconductor stack including a plurality of layers that include a first layer having a first conductivity type and a second layer having a first conductivity type, in which the second layer is on top of the first layer, forming a plurality of mesas in the semiconductor layer stack, and forming a plurality of gates in the semiconductor layer stack having a second conductivity type and situated partially at a periphery of the mesas, in which the plurality of gates are formed to minimize current flow differences between a current flowing from the first layer to the plurality of mesas at a first applied gate bias and a current flowing from the first layer to the plurality of mesas at a second applied gate bias when voltage is applied to the semiconductor device.Type: GrantFiled: February 28, 2014Date of Patent: September 9, 2014Assignee: Northrop Grumman Systems CorporationInventor: John V. Veliadis
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Patent number: 8796738Abstract: There are disclosed herein various implementations of a semiconductor structure and method. The semiconductor structure comprises a substrate, a transition body over the substrate, and a group III-V intermediate body having a bottom surface over the transition body. The semiconductor structure also includes a group III-V device layer over a top surface of the group III-V intermediate body. The group III-V intermediate body has a continuously reduced impurity concentration wherein a higher impurity concentration at the bottom surface is continuously reduced to a lower impurity concentration at the top surface.Type: GrantFiled: September 5, 2012Date of Patent: August 5, 2014Assignee: International Rectifier CorporationInventor: Michael A. Briere
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Patent number: 8791510Abstract: A semiconductor device includes a gate structure on a semiconductor substrate, an impurity region at a side of the gate structure and the impurity region is within the semiconductor substrate, an interlayer insulating layer covering the gate structure and the impurity region, a contact structure extending through the interlayer insulating layer and connected to the impurity region, and an insulating region. The contact structure includes a first contact structure that has a side surface surrounded by the interlayer insulating layer and a second contact structure that has a side surface surrounded by the impurity region. The insulating region is under the second contact structure.Type: GrantFiled: June 5, 2012Date of Patent: July 29, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: Young-Kyu Lee
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Patent number: 8778758Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming a plurality of electrode structures above a substrate. The method includes forming an insulating film on the plurality of electrode structures to make a gap between mutually-adjacent electrode structures. The method includes forming a silicon nitride film having compressive stress above the insulating film. The method includes forming a planarization film above the silicon nitride film. The method includes planarizing a surface of the planarization film by polishing by CMP (chemical mechanical polishing) method.Type: GrantFiled: December 3, 2012Date of Patent: July 15, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Hiroshi Kubota
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Patent number: 8723235Abstract: Devices and methods for providing JFET transistors with improved operating characteristics are provided. Specifically, one or more embodiments of the present invention relate to JFET transistors with a higher diode turn-on voltage. For example, one or more embodiments include a JFET with a doped silicon-carbide gate, while other embodiments include a JFET with a metal gate. One or more embodiments also relate to systems and devices in which the improved JFET may be employed, as well as methods of manufacturing the improved JFET.Type: GrantFiled: February 20, 2012Date of Patent: May 13, 2014Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 8710543Abstract: A semiconductor device including: an FET; a MOSFET having a drain thereof connected with a source of the FET; a resistor having one end thereof connected with a gate of the FET and having the other end thereof connected with a source of the MOSFET; and a diode having an anode thereof connected with the gate of the FET and having a cathode thereof connected with the source of the MOSFET.Type: GrantFiled: April 30, 2012Date of Patent: April 29, 2014Assignee: Sharp Kabushiki KaishaInventor: Yuhji Ichikawa
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Patent number: 8581298Abstract: A semiconductor device includes: a semiconductor layer having a first end portion and a second end portion; a first main electrode provided on the first end portion and electrically connected to the semiconductor layer; a second main electrode provided on the second end portion and electrically connected to the semiconductor layer; a first gate electrode provided via a first gate insulating film in a plurality of first trenches formed from the first end portion toward the second end portion; and a second gate electrode provided via a second gate insulating film in a plurality of second trenches formed from the second end portion toward the first end portion. Spacing between a plurality of the first gate electrodes and spacing between a plurality of the second gate electrodes are 200 nm or less.Type: GrantFiled: March 15, 2010Date of Patent: November 12, 2013Assignee: Kabushiki Kaisha ToshibaInventor: Mitsuhiko Kitagawa
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Patent number: 8575648Abstract: A silicon carbide semiconductor device having a JFET or a MOSFET includes a semiconductor substrate and a trench. The semiconductor substrate has a silicon carbide substrate, a drift layer on the silicon carbide substrate, a first gate region on the drift layer, and a source region on the first gate region. The trench has a strip shape with a longitudinal direction and reaches the drift layer by penetrating the source region and the first gate region. The trench is filled with a channel layer and a second gate region on the channel layer. The source region is not located at an end portion of the trench in the longitudinal direction.Type: GrantFiled: December 22, 2010Date of Patent: November 5, 2013Assignee: DENSO CORPORATIONInventors: Yuuichi Takeuchi, Rajesh Kumar Malhan, Naohiro Sugiyama
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Patent number: 8569795Abstract: A semiconductor device of an embodiment includes: a silicon carbide substrate including first and second principal surfaces; a first conductive-type first silicon carbide layer provided on the first principal surface of the silicon carbide substrate; a second conductive-type first silicon carbide region formed on a surface of the first silicon carbide layer; a first conductive-type second silicon carbide region formed on a surface of the first silicon carbide region; a second conductive-type third silicon carbide region formed on the surface of the first silicon carbide region; a gate insulating film continuously formed on the surfaces of the first silicon carbide layer, the first silicon carbide region, and the second silicon carbide region; a first electrode formed of silicon carbide formed on the gate insulating film; a second electrode formed on the first electrode; an interlayer insulating film for covering the first and second electrodes; a third electrode electrically connected to the second silicon caType: GrantFiled: August 25, 2011Date of Patent: October 29, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Hiroshi Kono, Yukio Nakabayashi, Takashi Shinohe, Makoto Mizukami
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Patent number: 8564017Abstract: A drift layer has a thickness direction throughout which a current flows and has an impurity concentration N1d for a first conductivity type. A body region is provided on a portion of the drift layer, has a channel to be switched by a gate electrode, has an impurity concentration N1b for the first conductivity type, and has an impurity concentration N2b for the second conductivity type greater than the impurity concentration N1b. A JFET region is disposed adjacent to the body region on the drift layer, has an impurity concentration N1j for the first conductivity type, and has an impurity concentration N2j for the second conductivity type smaller than the impurity concentration N1j. N1j?N2j>N1d and N2j<N2b are satisfied.Type: GrantFiled: May 31, 2012Date of Patent: October 22, 2013Assignee: Sumitomo Electric Industries, Ltd.Inventors: Misako Honaga, Takeyoshi Masuda, Keiji Wada, Toru Hiyoshi
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Patent number: 8513675Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.Type: GrantFiled: May 21, 2012Date of Patent: August 20, 2013Assignee: Power Integrations, Inc.Inventors: David C. Sheridan, Andrew P. Ritenour
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Patent number: 8460976Abstract: The present invention relates to a manufacturing method of SOI devices, and in particular, to a manufacturing method of SOI high-voltage power devices.Type: GrantFiled: September 7, 2010Date of Patent: June 11, 2013Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of SciencesInventors: Xinhong Cheng, Zhongjian Wang, Yuehui Yu, Dawei He, Dawei Xu, Chao Xia
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Patent number: 8436397Abstract: In a junction FET of a normally-off type, a technique capable of achieving both of improvement of a blocking voltage and reduction of an ON resistance is provided. In a junction FET using silicon carbide as a substrate material, impurities are doped to a vicinity of a p-n junction between a gate region and a channel-formed region, the impurities having a conductive type which is reverse to that of impurities doped in the gate region and same as that of impurities doped in the channel-formed region. In this manner, an impurity profile of the p-n junction becomes abrupt, and further, an impurity concentration of a junction region forming the p-n junction with the gate region in the channel-formed region is higher than those of a center region in the channel-formed region and of an epitaxial layer.Type: GrantFiled: December 16, 2009Date of Patent: May 7, 2013Assignee: Renesas Electronics CorporationInventors: Haruka Shimizu, Natsuki Yokoyama
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Patent number: 8421119Abstract: A GaN related compound semiconductor element includes: a channel layer made of a GaN related compound semiconductor; and a source layer and a drain layer, which are disposed in a manner of sandwiching the channel layer. The source layer includes two adjacent ridge portions which are formed by selective growth. A source electrode is formed over the surface, sandwiched by the ridge portions, of the channel layer, and the surfaces of the respective two adjacent ridge portions. The selective-growth mask formed between the two ridge portions is removed by wet etching. In addition, as another embodiment, a gate electrode is formed in a manner that the direction of the longer dimension of the gate electrode is aligned with the m plane of the channel layer. Moreover, as still another embodiment, the channel layer has a multilayer structure in which a GaN layer doped with no impurity is used as an intermediate layer.Type: GrantFiled: September 13, 2007Date of Patent: April 16, 2013Assignee: Rohm Co., Ltd.Inventor: Yukio Shakuda
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Patent number: 8415720Abstract: A vertical junction field-effect transistor in a CMOS base-technology. The vertical junction field-effect transistor includes a semiconductor substrate having a source region and a drain region, a main-channel region formed between the source region and the drain region, a well region formed on the main-channel region between the source region and the drain region, vertical pinch-off regions formed at both source and drain ends or only on the source-end of the well region on the main-channel region in the source region and the drain region respectively, a source contact on the vertical pinch-off region in the source region, a drain contact on the vertical pinch-off region in the drain region, a gate contact on the well region between the source contact and the drain contact and shallow trench isolations formed on the well region.Type: GrantFiled: June 29, 2011Date of Patent: April 9, 2013Assignee: Dongbu HiTek Co., Ltd.Inventors: Badih El-Kareh, Kyu Ok Lee, Joo Hyung Kim, Jung Joo Kim
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Patent number: 8399888Abstract: A p-type SiC semiconductor includes a SiC crystal that contains Al and Ti as impurities, wherein the atom number concentration of Ti is equal to or less than the atom number concentration of Al. It is preferable that the concentration of Al and the concentration of Ti satisfy the following relations: (Concentration of Al)?5×1018/cm3; and 0.01%?(Concentration of Ti)/(Concentration of Al)?20%. It is more preferable that the concentration of Al and the concentration of Ti satisfy the following relations: (Concentration of Al)?5×1018/cm3; and 1×1017/cm3?(Concentration of Ti)?1×1018/cm3.Type: GrantFiled: November 19, 2009Date of Patent: March 19, 2013Assignee: Toyota Jidosha Kabushiki KaishaInventors: Hiroaki Saitoh, Akinori Seki, Tsunenobu Kimoto
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Patent number: 8377755Abstract: A method of manufacturing a SOI high voltage power chip with trenches is disclosed. The method comprises: forming a cave and trenches at a SOI substrate; filling oxide in the cave; oxidizing the trenches, forming oxide isolation regions for separating low voltage devices at the same time; filling oxide in the oxidized trenches; and then forming drain regions, source regions and gate regions for a high voltage power device and low voltage devices. The process involves depositing an oxide layer overlapping the cave of the SOI substrate. A SOI high voltage power chip thus made will withstand at least above 700V voltage.Type: GrantFiled: September 7, 2010Date of Patent: February 19, 2013Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of SciencesInventors: Xinhong Cheng, Zhongjian Wang, Yuehui Yu, Dawei He, Dawei Xu, Chao Xia
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Patent number: 8334579Abstract: An integrated circuit device and method for fabricating the integrated circuit device is disclosed. The integrated circuit device includes a substrate, a diffusion source, and a lightly doped diffusion region in contact with a conductive layer. A junction of the lightly doped diffusion region with the conductive layer forms a Schottky region. An annealing process is performed to form the lightly doped diffusion region. The annealing process causes dopants from the diffusion source (for example, an n-well disposed in the substrate) of the integrated circuit device to diffuse into a region of the substrate, thereby forming the lightly doped diffusion region.Type: GrantFiled: October 7, 2010Date of Patent: December 18, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ping Chun Yeh, Der-Chyang Yeh, Chih-Ping Chao
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Publication number: 20120199875Abstract: A switching device includes a low voltage normally-off transistor and a control circuit built into a common die. The device includes source, gate and drain electrodes for the transistor and one or more auxiliary electrodes. The drain electrode is on one surface of a die on which the transistor is formed, while each of the remaining electrodes is located on an opposite surface. The one or more auxiliary electrodes provide electrical contact to the control circuit, which is electrically connected to one or more of the other electrodes.Type: ApplicationFiled: February 3, 2011Publication date: August 9, 2012Inventors: Anup Bhalla, Sik Lui, Jun Hu, Fei Wang
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Patent number: 8227831Abstract: A semiconductor device having a junction FET having improved characteristics is provided. The semiconductor device has a junction FET as a main transistor and has a MISFET as a transistor for control. The junction FET has a first gate electrode, a first source electrode, and a first drain electrode. The MISFET has a second gate electrode, a second source electrode, and a second drain electrode. The MISFET is an n-channel type MISFET and has electric characteristics of an enhancement mode MISFET. The second gate electrode and the second drain electrode of the MISFET are connected to each other by short-circuiting. The first gate electrode of the junction FET and the second source electrode of the MISFET are connected to each other by short-circuiting.Type: GrantFiled: March 2, 2010Date of Patent: July 24, 2012Assignee: Renesas Electronics CorporationInventor: Hidekatsu Onose
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Patent number: 8222649Abstract: A semiconductor device and a method of manufacturing the same, to appropriately determine an impurity concentration distribution of a field relieving region and reduce an ON-resistance. The semiconductor device includes a substrate, a first drift layer, a second drift layer, a first well region, a second well region, a current control region, and a field relieving region. The first well region is disposed continuously from an end portion adjacent to the vicinity of outer peripheral portion of the second drift layer to a portion of the first drift layer below the vicinity of outer peripheral portion. The field relieving region is so disposed in the first drift layer as to be adjacent to the first well region.Type: GrantFiled: November 17, 2006Date of Patent: July 17, 2012Assignee: Mitsubishi Electric CorporationInventors: Naruhisa Miura, Keiko Fujihira, Kenichi Otsuka, Masayuki Imaizumi
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Patent number: 8202772Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.Type: GrantFiled: October 1, 2010Date of Patent: June 19, 2012Assignee: SS SC IP, LLCInventors: David C. Sheridan, Andrew P. Ritenour
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Patent number: 8188540Abstract: A double-gate semiconductor device includes a MOS gate and a junction gate, in which the bias of the junction gate is a function of the gate voltage of the MOS gate. The breakdown voltage of the double-gate semiconductor device is the sum of the breakdown voltages of the MOS gate and the junction gate. The double-gate semiconductor device provides improved RF capability in addition to operability at higher power levels as compared to conventional transistor devices. The double-gate semiconductor device may also be fabricated in a higher spatial density configuration such that a common implantation between the MOS gate and the junction gate is eliminated.Type: GrantFiled: November 22, 2010Date of Patent: May 29, 2012Assignee: ACCO Semiconductor, Inc.Inventors: Denis A. Masliah, Alexandre G. Bracale, Francis C. Huin, Patrice J. Barroul
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Patent number: 8159001Abstract: A graded junction space decreasing an implant concentration gradient between n-well and p-well regions of a semiconductor device is provided for enhancing breakdown voltage in high voltage applications. Split or unified FOX regions may be provided overlapping with the graded junction space. By using a p-well blocking layer to separate the p-well(s) and the n-well, breakdown voltage characteristic is improved without the cost of an additional mask or process change.Type: GrantFiled: July 19, 2006Date of Patent: April 17, 2012Assignee: Synopsys, Inc.Inventor: Bin Wang
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Patent number: 8120072Abstract: Devices and methods for providing JFET transistors with improved operating characteristics are provided. Specifically, one or more embodiments of the present invention relate to JFET transistors with a higher diode turn-on voltage. For example, one or more embodiments include a JFET with a doped silicon-carbide gate, while other embodiments include a JFET with a metal gate. One or more embodiments also relate to systems and devices in which the improved JFET may be employed, as well as methods of manufacturing the improved JFET.Type: GrantFiled: July 24, 2008Date of Patent: February 21, 2012Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Publication number: 20120007138Abstract: The present invention provides a smoke-free ESD protection structure used in integrated circuit devices. A JFET or n-channel MOS transistor is coupled between an I/O pad, and a transistor and diode, wherein the JFET or n-channel MOS transistor limits the current flowing through the diode and transistor to prevent the integrated circuit device from heating up and catching on fire or smoke during the smoke test. Moreover, the integrated circuit device will not be damaged by the smoke test.Type: ApplicationFiled: July 12, 2010Publication date: January 12, 2012Inventor: James Nguyen