Enhancement Mode (e.g., So-called Sits) Patents (Class 257/136)
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Patent number: 7635600Abstract: A photovoltaic (PV) structure is provided, along with a method for forming a PV structure with a conductive nanowire array electrode. The method comprises: forming a bottom electrode with conductive nanowires; forming a first semiconductor layer of a first dopant type (i.e., n-type) overlying the nanowires; forming a second semiconductor layer of a second dopant type, opposite of the first dopant type (i.e., p-type), overlying the first semiconductor layer; and, forming a top electrode overlying the second semiconductor layer. The first and second semiconductor layers can be a material such as a conductive polymer, a conjugated polymer with a fullerene derivative, and inorganic materials such as CdSe, CdS, Titania, or ZnO. The conductive nanowires can be a material such as IrO2, In2O3, SnO2, or indium tin oxide (ITO).Type: GrantFiled: November 16, 2005Date of Patent: December 22, 2009Assignee: Sharp Laboratories of America, Inc.Inventors: Fengyan Zhang, Robert A. Barrowcliff, Sheng Teng Hsu
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Patent number: 7510955Abstract: A multi-fin field effect transistor includes a substrate, an oxide layer, a conductive layer, a gate oxide layer, and a doped region is provided. The substrate is surrounded by a trench, and there are at least two fin-type silicon layers formed in the substrate in a region prepared to form a gate thereon. The oxide layer is disposed in the trench and the top surface of the oxide layer is lower than that of the fin-type silicon layers. The conductive layer is disposed in the region prepared to form a gate. The top surface of the conductive layer is higher than that of the fin-type silicon layers. The gate oxide layer is disposed between the conductive layer and the fin-type silicon layers and disposed between the conductive layer and the substrate. The doped region is disposed in the substrate on both sides of the conductive layer.Type: GrantFiled: August 2, 2006Date of Patent: March 31, 2009Assignee: ProMOS Technologies Inc.Inventor: Hsiao-Che Wu
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Patent number: 7508013Abstract: The present, invention provides a system for providing a cross-lateral junction field effect transistor (114) having desired high-performance desired voltage, frequency or current characteristics. The cross-lateral transistor is formed on a commercial semiconductor substrate (102). A channel structure (124) is formed along the substrate, having source (120) and drain (122) structures laterally formed on opposites sides thereof. A first gate structure (116) is formed along the substrate, laterally adjoining the channel structure orthogonal to the source and drain structures. A second gate structure (118) is formed along the substrate, laterally adjoining the channel structure, orthogonal to the source and drain structures and opposite the first gate structure.Type: GrantFiled: August 16, 2007Date of Patent: March 24, 2009Assignee: Texas Instruments IncorporatedInventors: Gregory E Howard, Leland Swanson
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Publication number: 20090072269Abstract: A diode device can include an enhancement mode gallium nitride transistor having a gate, a drain and a source, wherein the gate is connected to the drain to enable the device to perform as a diode. In some embodiments, an integrated switching-diode is described that includes a substrate, a gallium nitride switching transistor on the substrate and a free wheeling diode on the substrate and coupled to the switching transistor.Type: ApplicationFiled: September 17, 2007Publication date: March 19, 2009Inventors: Chang Soo Suh, James Honea, Umesh Mishra
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Patent number: 7488992Abstract: The present invention comprises an integrated circuit fabricated on a single substrate where the integrated circuit comprises a first block comprising an enhancement mode pHEMT transistor on a substrate; a second block comprising a depletion mode pHEMT transistor on the substrate, the second block operatively connected to the first block; and a third block comprising a power pHEMT transistor on the substrate, the third block operatively connected to at least one of the first block and the second block. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope of meaning of the claims.Type: GrantFiled: December 4, 2003Date of Patent: February 10, 2009Assignee: Lockheed Martin CorporationInventor: Kevin L. Robinson
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Patent number: 7482649Abstract: Multi-bit nonvolatile memory devices and related methods of manufacturing the same are described. In some multi-bit nonvolatile memory devices, a semiconductor substrate has a recessed region defined therein. An insulating layer, which can include an ONO layer, is configured to store data within programming regions therein, and covers a sidewall and a lower surface of the recess region. A gate electrode is on the insulating layer in the recessed region. At least one pair of impurity regions are in the semiconductor substrate. The impurity regions adjoin a side surface of the insulating layer in the recess region and form a relative angle that is less than 120° therebetween with respect to a center of the gate electrode.Type: GrantFiled: January 19, 2006Date of Patent: January 27, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Min Kim, Eun-Jung Yun
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Patent number: 7453107Abstract: A semiconductor device includes a substrate of semiconductor material. A source region, a drain region, and a conducting region of the semiconductor device are formed in the substrate and doped with a first type of impurities. The conducting region is operable to conduct current between the drain region and the source region when the semiconductor device is operating in an on state. A gate region is also formed in the substrate and doped with a second type of impurities. The gate region abuts a channel region of the conducting region. A stress layer is deposited on at least a portion of the conducting region. The stress layer applies a stress to the conducting region along a boundary of the conducting region that strains at least a portion of the conducting region.Type: GrantFiled: May 4, 2007Date of Patent: November 18, 2008Assignee: DSM Solutions, Inc.Inventor: Ashok K. Kapoor
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Patent number: 7439563Abstract: A high-breakdown-voltage semiconductor device comprises a high-resistance semiconductor layer, trenches formed on the surface thereof in a longitudinal plane shape and in parallel, first regions formed on the semiconductor layer to be sandwiched between adjacent ones of the trenches and having an impurity concentration higher than that of the semiconductor layer, a second region having opposite conductivity to the first regions and continuously disposed in a trench sidewall and bottom portion, a sidewall insulating film disposed on the second region of the trench sidewall, a third region disposed on the second region of the trench bottom portion and having the same conductivity as and the higher impurity concentration than the second region, a fourth region disposed on the back surface of the semiconductor layer, a first electrode formed on each first region, a second electrode connected to the third region, and a third electrode formed on the fourth region.Type: GrantFiled: June 9, 2006Date of Patent: October 21, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 7335928Abstract: A silicon carbide semiconductor device such as JFET, SIT and the like is provided for accomplishing a reduction in on-resistance and high-speed switching operations. In the JFET or SIT which turns on/off a current with a depletion layer extending in a channel between a gate region formed along trench grooves, a gate contact layer and a gate electrode, which can be supplied with voltages from the outside, are formed on one surface of a semiconductor substrate or on the bottom of the trench groove. A metal conductor (virtual gate electrode) is formed in ohmic contact with a p++ contact layer of the gate region on the bottom of the trench grooves independently of the gate electrode. The virtual gate electrode is electrically isolated from the gate electrode and an external wire.Type: GrantFiled: May 25, 2007Date of Patent: February 26, 2008Assignees: Hitachi, Ltd., Denso CorporationInventors: Takasumi Ohyanagi, Atsuo Watanabe, Rajesh Kumar Malhan, Tsuyoshi Yamamoto, Toshiyuki Morishita
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Patent number: 7314765Abstract: A switching device has an S (Superconductor)-N (Normal Metal)-S superlattice to control the stream of electrons without any dielectric materials. Each layer of said Superconductor has own terminal. The superlattice spacing is selected based on “Dimensional Crossover Effect”. This device can operate at a high frequency without such energy losses as devices breaking the superconducting state. The limit of the operation frequency in the case of the Nb/Cu superlattice is expected to be in the order of 1018 Hz concerning plasmon loss energy of the normal metals (Cu; in the order of 103 eV).Type: GrantFiled: October 26, 2005Date of Patent: January 1, 2008Inventor: Katsuyuki Tsukui
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Patent number: 7288800Abstract: The present invention provides a system for providing a cross-lateral junction field effect transistor (114) having desired high-performance desired voltage, frequency or current characteristics. The cross-lateral transistor is formed on a commercial semiconductor substrate (102). A channel structure (124) is formed along the substrate, having source (120) and drain (122) structures laterally formed on opposites sides thereof. A first gate structure (116) is formed along the substrate, laterally adjoining the channel structure orthogonal to the source and drain structures. A second gate structure (118) is formed along the substrate, laterally adjoining the channel structure, orthogonal to the source and drain structures and opposite the first gate structure.Type: GrantFiled: January 7, 2005Date of Patent: October 30, 2007Assignee: Texas Instruments IncorporatedInventors: Gregory E. Howard, Leland Swanson
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Patent number: 7230283Abstract: A silicon carbide semiconductor device such as JFET, SIT and the like is provided for accomplishing a reduction in on-resistance and high-speed switching operations. In the JFET or SIT which turns on/off a current with a depletion layer extending in a channel between a gate region formed along trench grooves, a gate contact layer and a gate electrode, which can be supplied with voltages from the outside, are formed on one surface of a semiconductor substrate or on the bottom of the trench groove. A metal conductor (virtual gate electrode) is formed in ohmic contact with a p++ contact layer of the gate region on the bottom of the trench grooves independently of the gate electrode. The virtual gate electrode is electrically isolated from the gate electrode and an external wire.Type: GrantFiled: May 27, 2005Date of Patent: June 12, 2007Assignees: Hitachi, Ltd., DENSO CorporationInventors: Takasumi Ohyanagi, Atsuo Watanabe, Rajesh Kumar Malhan, Tsuyoshi Yamamoto, Toshiyuki Morishita
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Patent number: 7173290Abstract: A semiconductor switch includes a thyristor and a current shunt, preferably a transistor in parallel with and controlled by the thyristor, which shunts thyristor current at turn-off. The thyristor includes a portion of a bottom drift layer, with a p-n junction formed below a gate adjacent to the bottom drift layer to establish a depletion region with a high potential barrier to thyristor current flow at turn-off. The bottom drift layer also provides the transistor base, as well as a current path allowing the transistor base current to be controlled by the thyristor. The switch is voltage-controlled device using an insulated gate for turn-on and turn-off.Type: GrantFiled: August 15, 2003Date of Patent: February 6, 2007Assignee: Teledyne Licensing, LLCInventor: Hsueh-Rong Chang
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Patent number: 7119380Abstract: A junction field effect transistor is described. The transistor is made from a wide bandgap semiconductor material. The device comprises source, channel, drift and drain semiconductor layers, as well as p-type implanted or Schottky gate regions. The source, channel, drift and drain layers can be epitaxially grown. The ohmic contacts to the source, gate, and drain regions can be formed on the same side of the wafer. The devices can have different threshold voltages depending on the vertical channel width and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used for digital, analog, and monolithic microwave integrated circuits. Methods for making the transistors and integrated circuits comprising the devices are also described.Type: GrantFiled: December 1, 2004Date of Patent: October 10, 2006Assignee: SemiSouth Laboratories, Inc.Inventors: Igor Sankin, Jeffrey B. Casady, Joseph N. Merrett
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Patent number: 7082248Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region defined along an optical waveguide. The absorption region includes a first type of semiconductor material having a first refractive index. The apparatus also includes a multiplication region defined along the optical waveguide. The multiplication region is proximate to and separate from the absorption region. The multiplication region includes a second type of semiconductor material having a second refractive index. The first refractive index greater than the second refractive index such that an optical beam directed through the optical waveguide is pulled towards the absorption region from the multiplication region and absorbed in the absorption region to create electron-hole pairs from the optical beam. The multiplication region includes first and second doped regions defined along the optical waveguide.Type: GrantFiled: October 4, 2005Date of Patent: July 25, 2006Assignee: Intel CorporationInventor: Michael T. Morse
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Patent number: 7045397Abstract: JFET and MESFET structures, and processes of making same, for low voltage, high current and high frequency applications. The structures may be used in normally-on (e.g., depletion mode) or normally-off modes. The structures include an oxide layer positioned under the gate region which effectively reduces the junction capacitance (gate to drain) of the structure. For normally off modes, the structures reduce gate current at Vg in forward bias. In one embodiment, a silicide is positioned in part of the gate to reduce gate resistance. The structures are also characterized in that they have a thin gate due to the dipping of the spacer oxide, which can be below 1000 angstroms and this results in fast switching speeds for high frequency applications.Type: GrantFiled: May 3, 2005Date of Patent: May 16, 2006Assignee: Lovoltech, Inc.Inventors: Ho-Yuan Yu, Valentino L. Liva
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Patent number: 6998697Abstract: A chalcogenide comprising material is formed to a first thickness over the first conductive electrode material. The chalcogenide material comprises AxBy. A metal comprising layer is formed to a second thickness over the chalcogenide material. The metal comprising layer defines some metal comprising layer transition thickness for the first thickness of the chalcogenide comprising material such that when said transition thickness is met or exceeded, said metal comprising layer when diffused within said chalcogenide comprising material transforms said chalcogenide comprising material from an amorphous state to a crystalline state. The second thickness being less than but not within 10% of said transition thickness. The metal is irradiated effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal into the chalcogenide material.Type: GrantFiled: December 17, 2003Date of Patent: February 14, 2006Assignee: Micron Technology, Inc.Inventors: Kristy A. Campbell, John T. Moore
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Patent number: 6917054Abstract: A semiconductor device includes a trench formed on a source side of a drift region, a p-type gate region and a gate formed at the bottom of the trench, and the source formed over the entire surface of the unit device through an insulating film. The narrowest portion of a channel of the device is deeper than one-half the junction depth of the p-type gate region. This allows the width of the channel on the drain side to be reduced even when a lower energy ion implantation manufacturing process is used.Type: GrantFiled: October 9, 2003Date of Patent: July 12, 2005Assignee: Hitachi, Ltd.Inventors: Hidekatsu Onose, Hideo Homma, Atsuo Watanabe
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Patent number: 6897493Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n? region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n? region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: June 10, 2003Date of Patent: May 24, 2005Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6894346Abstract: A structure is provided that ensures a low on-resistance and a better blocking effect. In a lateral type SIT (Static Induction Transistor) in which a first region is used as a p+ gate and a gate electrode is formed on the bottom of the first region, the structure is built such that the p+ gate and an n+ source are contiguous. An insulating film is formed on the surface of an n? channel, and an auxiliary gate electrode is formed on the insulating film. In addition, the auxiliary gate electrode and the source electrode are shorted.Type: GrantFiled: August 13, 2003Date of Patent: May 17, 2005Assignee: Hitachi, Ltd.Inventors: Hidekatsu Onose, Atsuo Watanabe
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Patent number: 6867437Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n? region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n? region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: August 20, 2002Date of Patent: March 15, 2005Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6849880Abstract: A power semiconductor device includes second layers of a second conductivity type disposed in a first layer of a first conductivity type. The second layers extend in a depth direction and are arrayed at intervals. Third layers of the second conductivity type are disposed respectively in contact with the second layers. Fourth layers of the first conductivity type are respectively formed in surfaces of the third layers. A gate electrode faces, through a first insulating film, a channel region, which is each of portions of the third layers interposed between the fourth layers and the first layer. An additional electrode is disposed on each of the second layers through a second insulating film, and faces, through each of the second layers, the first main electrode. The additional electrode is electrically connected to the gate electrode.Type: GrantFiled: March 9, 2004Date of Patent: February 1, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Ichiro Omura, Satoshi Aida
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Patent number: 6838729Abstract: The invention relates to a semiconductor component with enhanced avalanche ruggedness. At the nominal current of this semiconductor component, in the event of an avalanche the voltage applied between two electrodes is 6 % or more above the static reverse voltage at the same temperature.Type: GrantFiled: April 29, 2002Date of Patent: January 4, 2005Assignee: Infineon Technologies AGInventors: Andreas Schlögl, Markus Schmitt, Hans-Joachim Schulze, Markus Vossebürger, Armin Willmeroth
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Patent number: 6831328Abstract: The invention concerns an anode voltage sensor of a vertical power component selected from the group consisting of components called thyristor, MOS, IGBT, PMCT, EST, BRT transistor, MOS thyristor, turn-off MOS thyristor, formed by a lightly doped N-type substrate (1) whereof the rear surface (2) having a metallizing coat corresponds to the component anode. Said sensor comprises, on the front surface side, a substrate zone (12) surrounded at least partly by a P-type region with low potential in front of an anode potential, said zone (12) being coated with a metallizing coat (M) in ohmic contact with it, whereon is provided an image of the anode voltage.Type: GrantFiled: May 16, 2003Date of Patent: December 14, 2004Assignee: Centre National de la Recherche ScientifiqueInventors: Patrick Austin, Jean-Pierre Laur, Olivier Causse, Marie Breil, Jean-Louis Sanchez, Jean Jalade
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Patent number: 6777722Abstract: A method for fabricating a junction field effect transistor (JFET) with a double dose gate structure. A trench is etched in the surface of a semiconductor substrate, followed by a low dose implant to form a first gate region. An anneal may or may not be performed after the low dose implant. A gate definition spacer is then formed on the wall the trench to establish the lateral extent of a second, high dose implant gate region. After the second implant, the gate is annealed. The double dose gate structure produced by the superposition of two different and overlapping regions provides an additional degree of flexibility in determining the ultimate gate region doping profile. A further step comprises using the gate definition spacer to define the walls of a second etched trench that is used to remove a portion of the p-n junction, thereby further reducing the junction capacitance.Type: GrantFiled: July 2, 2002Date of Patent: August 17, 2004Assignee: Lovoltech, Inc.Inventors: Ho-Yuan Yu, Valentino L. Liva, Pete Pegler
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Patent number: 6774408Abstract: In a trench MOS gate structure of a semiconductor device where trenches (T) are located between an n-type base layer (1) and an n-type source layer (3), a p-type channel layer (12) is formed adjacent to side walls of the trenches, having an even concentration distribution along a depthwise dimension of the trenches. The p-type channel layer enables saturation current to decrease without a raise of ON-resistance of the device, and resultantly a durability against short-circuit can be enhanced. The n-type source layer formed adjacent to the side walls of the trench also further enhances the durability against short-circuit. Providing contacts of the emitter electrode (7) with the n-type source layer at the side walls of the trenches permits a miniaturization of the device and a reduction of the ON-resistance as well.Type: GrantFiled: June 28, 2002Date of Patent: August 10, 2004Assignee: Kabushiki Kaisha ToshibaInventor: Hideaki Ninomiya
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Patent number: 6750477Abstract: In a static induction transistor, in addition to a first gate layer (4), a plurality of second gate layers (41) having a shallower depth and a narrower gap therebetween than those of the first gate layer (4) are provided in an area surrounded by the first gate layer (4), thereby an SiC static induction transistor with an excellent off characteristic is realized, while ensuring a required processing accuracy during production thereof.Type: GrantFiled: April 15, 2002Date of Patent: June 15, 2004Assignee: Hitachi, Ltd.Inventors: Tsutomu Yatsuo, Toshiyuki Ohno, Hidekatsu Onose, Saburo Oikawa
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Patent number: 6693310Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: May 23, 2001Date of Patent: February 17, 2004Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6653666Abstract: J-FET having a first semiconductor region (2, 3), which comprises a first contact (7) with a highly doped contact layer (8) serving as a source disposed between two second contacts (9) serving as a gate on its first surface (4). The three contacts (7, 9) are each connected to a respective second semiconductor region (5, 6). The first and second semiconductor regions (2, 3, 5, 6) are of opposite conductivity types. The second semiconductor regions (5) connected to the second contacts (9) extend in the first semiconductor region (2, 3) below the second semiconductor region (6) that is connected to the first contact (7), with the result that the three second semiconductor regions (5, 6) at least partially overlap in a projection onto a horizontal plane and a channel region (11) is formed between the three second semiconductor regions (5, 6) in the first semiconductor region (2, 3).Type: GrantFiled: January 23, 2001Date of Patent: November 25, 2003Assignee: SiCED Electronics Development GmbH & Co. KGInventors: Heinz Mitlehner, Ulrich Weinert
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Publication number: 20030201455Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: ApplicationFiled: June 10, 2003Publication date: October 30, 2003Applicant: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6555878Abstract: Described is a MOS gate-controlled SCR (UGSCR) structure with a U-shaped gate (UMOS) for an ESD protection circuit in an IC device which is compatible with shallow trench isolation (STI) and self-aligned silicide (salicide) fabrication technology. The UMOS gate is located in a p-substrate and is surrounded by an n-well on either side. Adjacent to one side of the UMOS gate, a first n+ diffusion is formed which straddles the first n-well. The n+ diffusion together with a p+ pickup diffused next to it form the cathode of the SCR (thyristor). Adjacent to the other side of the UMOS gate, a second n+ and p+ diffusion are formed in a second n-well. The second n+ and p+ diffusion together with the UMOS gate form the anode of the SCR and the input terminal of the circuit to be protected. The SCR is formed by the first n+ diffusion/n-well (cathode), the p-substrate, the second n-well and the second p+/n+ diffusion (anode).Type: GrantFiled: September 3, 2002Date of Patent: April 29, 2003Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Jun Song, Guang ping Hua, Keng-Foo Lo
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Patent number: 6486511Abstract: A solid state microwave switch having a plurality of adjacent parallel fingers covered with an oxide layer. One end of a finger is an N+ source region while the other end is an N+ drain region, with a current conducting N region between them. The oxide layer is covered with a gate layer to which a gate signal is applied for control of current between the N+ regions through the N region. The gate layer is highly resistive and has a sheet resistance on the order of millions of ohms per square. The length from the source to drain region is around 2 &mgr;m, and the fingers are spaced with a pitch of around 1 &mgr;m.Type: GrantFiled: August 30, 2001Date of Patent: November 26, 2002Assignee: Northrop Grumman CorporationInventors: Harvey C. Nathanson, Philip C. Smith, R. Chris Clarke, David M. Krafcsik, Lawrence E. Dickens
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Patent number: 6458632Abstract: Described is a method of creating a MOS gate-controlled SCR (UGSCR) structure with a U-shaped gate (UMOS) for an ESD protection circuit in an IC device which is compatible with shallow trench isolation (STI) and self-aligned silicide (salicide) fabrication technology. The UMOS gate is located in a p-substrate and is surrounded by an n-well on either side. Adjacent to one side of the UMOS gate, a first n+ diffusion is formed which straddles the first n-well. The n+ diffusion together with a p+ pickup diffused next to it form the cathode of the SCR (thyristor). Adjacent to the other side of the UMOS gate, a second n+ and p+ diffusion are formed in a second n-well. The second n+ and p+ diffusion together with the UMOS gate form the anode of the SCR and the input terminal of the circuit to be protected. The SCR is formed by the first n+ diffusion/n-well (cathode), the p-substrate, the second n-well and the second p+/n+ diffusion (anode).Type: GrantFiled: March 14, 2001Date of Patent: October 1, 2002Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Jun Song, Guang Ping Hua, Keng-Foo Lo
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Patent number: 6445012Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: May 23, 2001Date of Patent: September 3, 2002Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Publication number: 20020093029Abstract: A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line (BEOL) integration for wires the electronic devices together to form completed electrical circuits of the integrated circuit. The BEOL integration includes forming a multilayered structure of wiring levels on the layer of electronic devices. Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive wiring lines, etc.) embedded in insulative material. The battery is formed during BEOL integration within one or more wiring levels, and the conductive metallization conductively couples positive and negative terminals of the battery to the electronic devices.Type: ApplicationFiled: January 16, 2001Publication date: July 18, 2002Inventors: Arne W. Ballantine, Robert A. Groves, Jennifer L. Lund, James S. Nakos, Michael B. Rice, Anthony K. Stamper
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Publication number: 20020088990Abstract: A reliable super-junction semiconductor device is provided that facilitates relaxing the tradeoff relation between the on-resistance and the breakdown voltage and improving the avalanche withstanding capability under an inductive load. The super-junction semiconductor device includes an active region including a thin first alternating conductivity type layer and a heavily doped n+-type intermediate drain layer between first alternating conductivity type layer and an n++-type drain layer, and a breakdown withstanding region including a thick second alternating conductivity type layer. Alternatively, active region includes a first alternating conductivity type layer and a third alternating conductivity type layer between first alternating conductivity type layer and n++-type drain layer, third alternating conductivity type layer being doped more heavily than first alternating conductivity type layer.Type: ApplicationFiled: October 17, 2001Publication date: July 11, 2002Inventors: Susumu Iwamoto, Tatsuhiko Fujihira, Katsunori Ueno, Yasuhiko Onishi, Takahiro Sato
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Publication number: 20020036298Abstract: A photoelectric conversion device comprising a semiconductor and an organic electrically conducting agent, wherein the organic electrically conducting agent exhibits a melting temperature Tm which is lower than the operation temperature of the photoelectric conversion device.Type: ApplicationFiled: May 25, 2001Publication date: March 28, 2002Inventors: Gabriele Nelles, Akio Yasuda, Hans-Werner Schmidt, Thelakkat Mukundan, Haridas R. Karickal, Donal Lupo
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Patent number: 6355513Abstract: A semiconductor device efficiently providing the DC currents required in both discrete and integrated circuits operated at low DC supply voltages. The device disclosed in the present invention is an asymmetrical, enhancement mode, Junction Field Effect Transistor (JFET). The device consists of an epitaxial layer on the surface of a substrate, both of which are doped with the same polarity. The epitaxial layer has a graded doping profile with doping density increasing with distance from the substrate. A grill-like structure is constructed within the upper and lower bounds of, and extending throughout the length and width of the epitaxial layer, and is doped with a polarity opposite to that of the epitaxial layer. A first electrical connection made to the exposed side of the substrate is defined as the drain electrode. A second electrical connection made to the exposed surface of the epitaxial layer is defined as the source electrode.Type: GrantFiled: September 25, 2000Date of Patent: March 12, 2002Assignee: Lovoltech, Inc.Inventor: Ho-Yuan Yu
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Publication number: 20010045566Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: ApplicationFiled: May 23, 2001Publication date: November 29, 2001Applicant: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6265735Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: December 30, 1998Date of Patent: July 24, 2001Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 6259134Abstract: A MOS-controllable power semiconductor trench device has a gate in the form of a trench which extends through a region of p type silicon into an n type region of low conductivity. A discontinous buried p layer below the bottom of the trench forms part of a thyristor which in operation is triggered into conduction by conduction of a PIN diode which is produced when an accumulation layer is formed in the n type region adjacent to the trench under the action of an on-state gate signal. The device has a high on-state conductivity and is protected against high voltage breakdown in its off-state by the presence of the buried layer. An off-state gate signal causes removal of the accumulation layer and conduction of the PIN diode and the thyristor ceases in safe, reliable and rapid manner.Type: GrantFiled: July 9, 1998Date of Patent: July 10, 2001Assignee: Mitel Semiconductor LimitedInventors: Gehan A. J Amaratunga, Florin Udrea
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Patent number: 5977570Abstract: A pin diode is formed by a p.sup.+ collector region, an n type buffer region, an n.sup.- region and an n.sup.+ cathode region. A trench is formed from the surface of n.sup.+ cathode region through n.sup.+ cathode region to reach n.sup.- region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n.sup.+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n.sup.+ cathode region. An anode electrode is formed to be electrically connected to p.sup.+ collector region. The n.sup.+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.Type: GrantFiled: July 18, 1996Date of Patent: November 2, 1999Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
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Patent number: 5786609Abstract: A semiconductor detector structure consists of a unipolar or single-pole nsistor disposed or arranged on a substantially depleted semiconductor body, with a drain, a source, a resetting contact, a top gate and a potentially floating layer forming at least one gate of the unipolar transistor, as well as at least one capacitor. The source is directly connected to the first electrode or electrodes of the capacitor or capacitors. The capacitor or the capacitors are integrated jointly with or into the semiconductor structure.Type: GrantFiled: May 23, 1996Date of Patent: July 28, 1998Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaflen e.V.Inventors: Josef Kemmer, Gerhard Lutz, Rainer Richter, Karl-Ernst Ehwald
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Patent number: 5753938Abstract: A semiconductor switching device includes a plurality of adjacent heterojunction-gate static-induction transistor (SIT) unit cells connected in parallel in a monocrystalline silicon carbide substrate having first and second opposing faces, a relatively highly doped silicon carbide drain region adjacent the first face and a relatively highly doped silicon carbide source region adjacent the second face. A relatively lightly doped drift region is also provided in the substrate and extends between the drain region and source region. A plurality of trenches are also provided in the substrate so that sidewalls of the trenches extend adjacent the drift region. Each trench preferably contains a relatively highly doped second conductivity type nonmonocrystalline silicon gate region comprised of a material selected from the group consisting of polycrystalline silicon or amorphous silicon. These gate regions form P-N heterojunctions with the drift region at the sidewalls and bottoms of the trenches.Type: GrantFiled: August 8, 1996Date of Patent: May 19, 1998Assignee: North Carolina State UniversityInventors: Naresh I. Thapar, Praveen Muraleedharan Shenoy, Bantval Jyant Baliga
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Patent number: 5665987Abstract: In a gate insulated static induction thyristor with a split gate type shorted cathode structure, a first gate of the split gate structure is used as a cathode short-circuit gate and the cathode region is formed in the second gate. A MOS structure is formed on the second gate as a control gate electrode isolated therefrom. Since the channel integration density is high, the area efficiency increases. The MOS gate structure suppresses the minority carrier (hole) storage effect to permit high-speed swtching of the thyristor, and the shorted cathode structure provides for increased maximum controllable current/voltage durability. The split gate structure can be used in combination with planar, buried, recessed and double gate structures.Type: GrantFiled: March 31, 1995Date of Patent: September 9, 1997Assignees: Toyo Denki Seizo Kabushiki Kaisha, Takashige TamamushiInventors: Kimihiro Muraoka, Yoshinobu Ohtsubo, Toshio Higuchi, Makoto Iguchi, Takashige Tamamushi
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Patent number: 5663582Abstract: A recess-gate type static induction transistor having a high breakdown voltage is provided, which includes an n-type channel region provided over an n.sup.+ -type drain region, p.sup.+ -type elongated gate regions provided in grooves of the channel region, n.sup.+ -type elongated regions formed on the channel region so as to be arranged in parallel with the gate regions, each of which is disposed between the gate regions, and a p.sup.+ -type guard ring region provided in the channel region and arranged to surround the gate regions. The elongated gate regions are coupled to the guard ring region at both edges. In addition, the outer-most elongated gate regions are coupled to the guard ring region along the longitudinal direction, respectively, thereby increasing the breakdown voltage of the device.Type: GrantFiled: May 21, 1996Date of Patent: September 2, 1997Assignee: Zaidan Hojin Handotai Kenkyu ShinkokaiInventors: Junichi Nishizawa, Kaoru Motoya, Akira Ito
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Patent number: 5648665Abstract: A P.sup.+ layer is formed on the lower surface of an N.sup.- substrate, and recesses are defined in the upper surface of the N.sup.- substrate. Then, P.sup.+ gate regions and bottom gate regions are formed in side walls and bottoms of the recesses. The N.sup.- substrate and an N.sup.- substrate are ultrasonically cleaned to remove impurities therefrom, then cleaned by pure water, and dried by a spinner. Then, while lands on the upper surface of the N.sup.- substrate are being held against the surface of the N.sup.- substrate, the N.sup.- substrate are joined to each other by heating then at 800.degree. C. in a hydrogen atmosphere.Type: GrantFiled: April 26, 1995Date of Patent: July 15, 1997Assignee: NGK Insulators, Ltd.Inventor: Yoshio Terasawa
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Patent number: 5602405Abstract: A semiconductor device, by which a base in which gates are buried can be formed by the junction of semiconductor substrates to each other at a lower temperature, and a fabrication process thereof are provided. Recesses are defined in the top of an N.sup.- substrate. A P.sup.+ layer is formed on the underside of the N.sup.- substrate. P.sup.+ -Gate regions are each formed in an area ranging from the bottom to lower side portions of the recesses. A metal layer composed of an Au-Sb alloy is formed on the underside of the N.sup.+ substrate. The N.sup.- substrate and the N.sup.+ substrate are subjected to a treatment for removing impurities thereon with an aqueous solution of sulfuric acid and hydrogen peroxide, washed with purified water and dried by a spin dryer. The N.sup.- substrate and the N.sup.+ substrate are heated at about 350.degree. C.Type: GrantFiled: June 6, 1995Date of Patent: February 11, 1997Assignee: NGK Insulators, Ltd.Inventor: Yoshio Terasawa
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Patent number: 5559346Abstract: A field-effect semiconductor device for reducing on-state source-drain voltage and increasing breakdown voltage, has a one conductivity type semiconductor region, a source region of one conductivity type, a drain region, and gate regions of other conductivity type. The source region, the drain region and the gate regions are formed in the semiconductor region and contiguous to a surface of the semiconductor region. The gate regions are located so as to sandwich a portion of the semiconductor region coupling the source region and the drain region.Type: GrantFiled: October 18, 1994Date of Patent: September 24, 1996Assignee: Toyota Jidosha Kabushiki KaishaInventor: Tomoyoshi Kushida
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Patent number: 5545905Abstract: The present invention is to provide a Static Induction semiconductor device with a Static Induction Schottky shorted structure where the main electrode region is composed of regions of higher and lower impurity densities relative to each other, the main electrode forms an ohmic contact with the higher impurity density region and also forms a Schottky contact with a Static Induction Schottky shorted region of the lower impurity density region surrounded by tile higher impurity density region, and it is excellent in turn-off performance and easy to use, by substantially reducing tile minority carrier storage time, the fall time and the quantity of gate pull-out charges in order that charges may easily be pulled out from the cathode or source electrode as well as from the gate electrode at turn-off.Type: GrantFiled: April 18, 1994Date of Patent: August 13, 1996Assignees: Toyo Denki Seizo Kabushiki Kaisha, Takashige TamamushiInventors: Kimihiro Muraoka, Naohiro Shimizu, Takashige Tamamushi