Having Graded Composition Patents (Class 257/191)
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Patent number: 12148699Abstract: A semiconductor component includes an area of dielectric material extending below an uppermost surface of a substrate. The semiconductor component further includes a trench formed so as to extend from above the uppermost surface of the substrate into the area of dielectric material. The semiconductor component further includes a non-metal liner coating interior surfaces of the trench. The semiconductor component further includes a metal liner coating interior surfaces of the non-metal liner. The semiconductor component further includes a power rail formed in the trench in direct contact with at least one of the metal liner or the non-metal liner such that the power rail extends into the area of dielectric material and above the uppermost surface of the substrate.Type: GrantFiled: June 13, 2022Date of Patent: November 19, 2024Assignee: International Business Machines CorporationInventors: Sagarika Mukesh, Devika Sarkar Grant, Fee Li Lie, Hosadurga Shobha, Thamarai selvi Devarajan, Aakrati Jain
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Patent number: 12132296Abstract: A laser device includes a laser and a controller. The laser has an optical cavity that includes an active gain section and a phase shifter. The controller is configured to excite the active gain section to lase light out of the optical cavity. The controller is further configured to, while the light is being lased out of the optical cavity, modulate a refractive index of the phase shifter to shift an optical phase of lasing modes of the lased light to thereby reduce coherence of the lased light.Type: GrantFiled: May 14, 2021Date of Patent: October 29, 2024Assignee: Microsoft Technology Licensing, LLCInventors: Shiva Shahin, Dale Eugene Zimmerman
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Patent number: 11777019Abstract: Disclosed is a semiconductor structure including a device, such as a lateral heterojunction bipolar transistor (HBT), made up of a combination of at least three different semiconductor materials with different bandgap sizes for improved performance. In the device, a base layer of the base region can be positioned laterally between a collector layer of a collector region and an emitter layer of an emitter region and can be physically separated therefrom by buffer layers. The base layer can be made of a narrow bandgap semiconductor material, the collector layer and, optionally, the emitter layer can be made of a wide bandgap semiconductor material, and the buffer layers can be made of a semiconductor material with a bandgap between that of the narrow bandgap semiconductor material and the wide bandgap semiconductor material. Also disclosed herein is a method of forming the structure.Type: GrantFiled: January 28, 2022Date of Patent: October 3, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Hong Yu, Vibhor Jain, Judson R. Holt
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Patent number: 11756998Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device having a channel area including a channel III-V material, and a source area including a first portion and a second portion of the source area. The first portion of the source area includes a first III-V material, and the second portion of the source area includes a second III-V material. The channel III-V material, the first III-V material and the second III-V material may have a same lattice constant. Moreover, the first III-V material has a first bandgap, and the second III-V material has a second bandgap, the channel III-V material has a channel III-V material bandgap, where the channel material bandgap, the second bandgap, and the first bandgap form a monotonic sequence of bandgaps. Other embodiments may be described and/or claimed.Type: GrantFiled: January 14, 2022Date of Patent: September 12, 2023Assignee: Intel CorporationInventors: Cheng-Ying Huang, Tahir Ghani, Jack Kavalieros, Anand Murthy, Harold Kennel, Gilbert Dewey, Matthew Metz, Willy Rachmady, Sean Ma, Nicholas Minutillo
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Patent number: 11393904Abstract: The nitride-based semiconductor device includes a carrier traveling layer 1 composed of non-doped AlXGa1-XN (0?X<1); a barrier layer 2 formed on the carrier traveling layer 1 and composed of non-doped or n-type AlYGa1-YN (0<Y?1, X<Y) having a lattice constant smaller than that of the carrier traveling layer 1; a threshold voltage control layer 3 formed on the barrier layer 2 and composed of a non-doped semiconductor having a lattice constant equal to that of the carrier traveling layer 1; and a carrier inducing layer 4 formed on the threshold voltage control layer 3 and composed of a non-doped or n-type semiconductor having a lattice constant smaller than that of the carrier traveling layer 1. The nitride-based semiconductor device further includes a gate electrode 5 formed in a recess structure, a source electrode 6 and a drain electrode 7.Type: GrantFiled: September 11, 2019Date of Patent: July 19, 2022Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Masahiko Kuraguchi
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Patent number: 11362205Abstract: A group III nitride enhancement-mode HEMT based on a composite barrier layer structure and a manufacturing method thereof are provided. The HEMT includes first and second semiconductors respectively serving as a channel layer and a barrier layer, a third semiconductor serving as a p-type layer, a source, a drain and a gate, wherein a recessed structure is formed in the region of the barrier layer corresponding to the gate, which is matched with the third semiconductor and the gate to form a p-type gate, and the second semiconductor includes first and second structure layers successively arranged on the first semiconductor; relative to the selected etching reagent, the first structure layer has higher etching resistance than the second structure layer.Type: GrantFiled: April 10, 2018Date of Patent: June 14, 2022Assignee: SUZHOU INSTITUTE OF NANO-TECH AND NANO-BIONICS (SINANO), CHINESE ACADEMY OF SCIENCESInventors: Qian Sun, Yu Zhou, Yaozong Zhong, Hongwei Gao, Meixin Feng, Hui Yang
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Patent number: 11322588Abstract: A nonplanar MOSFET device such as a FinFET or a sacked nanosheets/nanowires FET has a substrate, one or more nonplanar channels disposed on the substrate, and a gate stack enclosing the nonplanar channels. A first source/drain (S/D) region is disposed on the substrate on a source side of the nonplanar channel and second S/D region is disposed on the substrate on a drain side of the nonplanar channel. The first and second S/D regions made of silicon-germanium (SiGe). In some embodiments, both S/D regions are p-type doped. Contact trenches provide a metallic electrical connection to the first and the second source/drain (S/D) regions. The S/D regions have two parts, a first part with a first concentration of germanium (Ge) and a second part with a second, higher Ge concentration that is a surface layer having convex shape and aligned with one of the contact trenches.Type: GrantFiled: October 14, 2019Date of Patent: May 3, 2022Assignee: International Business Machines CorporationInventors: Fee Li Lie, Choonghyun Lee, Kangguo Cheng, Hemanth Jagannathan, Oleg Gluschenkov
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Patent number: 11271078Abstract: A p-type field effect transistor (pFET) includes a gate structure on a substrate, a channel region in the substrate directly under the gate structure, and a source/drain region adjacent to two sides of the gate structure. Preferably, the channel region includes a top portion and a bottom portion, in which a concentration of germanium in the bottom portion is lower than a concentration of germanium in the top portion and a depth of the top portion is equal to a depth of the bottom portion.Type: GrantFiled: April 1, 2020Date of Patent: March 8, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Patent number: 11258406Abstract: A power amplifier circuit includes a first transistor, a second transistor, a first bias circuit supplying a first bias current or voltage, a second bias circuit supplying a second bias current or voltage, a first inductor, and a first capacitor. A power supply voltage is supplied to a collector of the first transistor, and an emitter thereof is grounded. A radio frequency signal and the first bias current or voltage are supplied to a base of the first transistor. The power supply voltage is supplied to a collector of the second transistor, and an emitter thereof is connected to the collector of the first transistor via the first capacitor and is grounded via the first inductor. The second bias current or voltage is supplied to a base of the second transistor. An amplified radio frequency signal is output from the collector of the second transistor.Type: GrantFiled: July 1, 2019Date of Patent: February 22, 2022Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Satoshi Tanaka, Masatoshi Hase, Yuri Honda, Kazuo Watanabe, Takashi Soga
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Patent number: 11145654Abstract: A device comprising a substrate and a first transistor formed over the substrate. The first transistor includes a first source disposed over the substrate, a first drain disposed over the substrate, a first plurality of channels coupled to the first source and the first drain, and a first gate surrounding the first plurality of channels. The first plurality of channels is located between the first source and the first drain. At least one channel includes silicon germanium (SiGe). The transistor is a field effect transistor (FET). The transistor is a gate all around (GAA) FET. The transistor may be configured to operate as a negative channel metal oxide semiconductor (NMOS) transistor. The transistor may be configured to operate as a positive channel metal oxide semiconductor (PMOS) transistor.Type: GrantFiled: October 16, 2019Date of Patent: October 12, 2021Assignee: QUALCOMM IncorporatedInventors: Kwanyong Lim, Stanley Seungchul Song, Jun Yuan, Kern Rim
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Patent number: 11094805Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first portion of a first semiconductor layer defines an emitter, a first portion of a second semiconductor layer defines a collector, and a base includes respective second portions of the first and second semiconductor layers that are laterally positioned between the first portion of the first semiconductor layer and the first portion of the second semiconductor layer. The first portion of the first semiconductor layer has a first thickness, and the first portion of the second semiconductor layer has a second thickness that is greater than the first thickness. The first portion and the second portion of the first semiconductor layer adjoin at a first junction having the first thickness. The first portion and the second portion of the second semiconductor layer adjoin at a second junction having the second thickness.Type: GrantFiled: January 17, 2020Date of Patent: August 17, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Alexander Derrickson, Edmund K. Banghart, Alexander Martin, Ryan Sporer, Jagar Singh, Katherina Babich, George R. Mulfinger
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Patent number: 11070028Abstract: A semiconductor light emitting element includes: a GaN substrate; a first semiconductor layer located above the GaN substrate and including a nitride semiconductor of a first conductivity type; an active layer located above the first semiconductor layer and including a nitride semiconductor including Ga or In; an electron barrier layer located above the active layer and including a nitride semiconductor including Al; and a second semiconductor layer located above the electron barrier layer and including a nitride semiconductor of a second conductivity type. The electron barrier layer includes: a first region having an Al composition ratio changing at a first change rate; and a second region having an Al composition ratio changing at a second change rate larger than the first change rate. In the first second regions, the Al composition ratio monotonically increases at the first change rate in the direction from the active layer toward second semiconductor layer.Type: GrantFiled: September 10, 2020Date of Patent: July 20, 2021Assignee: NUVOTON TECHNOLOGY CORPORATION JAPANInventors: Toru Takayama, Shinji Yoshida, Kunimasa Takahashi
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Patent number: 10991819Abstract: The present disclosure, in some embodiments, relates to a transistor device. The transistor device includes a layer of GaN over a substrate. A mobility-enhancing layer of AlzGa(1-z)N is over the layer of GaN and has a first molar fraction z in a first range of between approximately 0.25 and approximately 0.4. A resistance-reducing layer of AlxGa(1-x)N is over the mobility-enhancing layer and has a second molar fraction x in a second range of between approximately 0.1 and approximately 0.15. A source has a source contact and an underlying source region. A drain has a drain contact and an underlying drain region. The source and drain regions extend through the resistance-reducing layer of AlxGa(1-x)N and into the mobility-enhancing layer of AlzGa(1-z)N. The source and drain regions have bottoms over a bottom of the mobility-enhancing layer of AlzGa(1-z)N. A gate structure is laterally between the source and drain contacts.Type: GrantFiled: September 17, 2018Date of Patent: April 27, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
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Patent number: 10964799Abstract: A FinFET includes a semiconductor fin including an inner region, and a germanium-doped layer on a top surface and sidewall surfaces of the inner region. The germanium-doped layer has a higher germanium concentration than the inner region. The FinFET further includes a gate dielectric over the germanium-doped layer, a gate electrode over the gate dielectric, a source region connected to a first end of the semiconductor fin, and a drain region connected to a second end of the semiconductor fin opposite the first end. Through the doping of germanium in the semiconductor fin, the threshold voltage may be tuned.Type: GrantFiled: November 15, 2019Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jeffrey Junhao Xu
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Patent number: 10830950Abstract: An optical transmitter-receiver includes an optical integrated device in which at least an optical modulator and an optical detector are integrated as optical devices over the same substrate and an insulating layer is provided between the optical modulator and the substrate and between the optical detector and the substrate, and an electronic circuit chip that is connected to the optical integrated device and includes an electronic circuit including a ground wiring line. The optical integrated device includes a shield electrode between the optical modulator and the optical detector, and the shield electrode is provided sandwiching the insulating layer with the substrate to configure a capacitance and is connected to the ground wiring line of the electronic circuit chip.Type: GrantFiled: October 31, 2019Date of Patent: November 10, 2020Assignees: FUJITSU LIMITED, PHOTONICS ELECTRONICS TECHNOLOGY RESEARCH ASSOCIATIONInventors: Shinsuke Tanaka, Tatsuya Usuki
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Patent number: 10778262Abstract: A power amplification module includes a first amplification transistor that receives a first signal outputs an amplified second signal from the collector thereof; and a bias circuit that supplies a bias current to the base of the first amplification transistor. The first bias circuit includes a first transistor that is diode connected and is supplied with a bias control current; a second transistor that is diode connected, the collector thereof being connected to the emitter of the first transistor; a third transistor, the base thereof being connected to the base of the first transistor, and the bias current being output from the emitter thereof; a fourth transistor, the collector thereof being connected to the emitter of the third transistor and the base thereof being connected to the base of the second transistor; and a first capacitor between the base and the emitter of the third transistor.Type: GrantFiled: May 3, 2019Date of Patent: September 15, 2020Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masatoshi Hase
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Patent number: 10777675Abstract: A semiconductor device according to an embodiment includes a SiC layer having a first and a second plane, a first SiC region of a first conductivity type, second and third SiC regions of a second conductivity type provided between the first SiC region and the first plane, a fourth SiC region of the first conductivity type provided between the second SiC region and the first plane, a fifth SiC region of the first conductivity type provided between the third SiC region and the first plane, a gate electrode provided between the second SiC region and the third SiC region, a gate insulating layer, a sixth SiC region of the second conductivity type provided between the first SiC region and the second SiC region, and a seventh SiC region of the second conductivity type provided between the first SiC region and the third SiC region.Type: GrantFiled: February 13, 2017Date of Patent: September 15, 2020Assignee: Kabushiki Kaisha ToshibaInventors: Teruyuki Ohashi, Ryosuke Iijima, Hiroshi Kono, Tatsuo Shimizu
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Patent number: 10541321Abstract: In a manufacturing method of a semiconductor device according to the present invention, a buffer layer including a first nitride semiconductor layer, a channel layer including a second nitride semiconductor layer, and a barrier layer including a third nitride semiconductor layer are sequentially laminated, and a fourth nitride semiconductor layer is further laminated thereover. Then, a laminate of a gate insulating film and a gate electrode is formed over a first region of the fourth nitride semiconductor layer, and a silicon nitride film is formed over the fourth nitride semiconductor layer and the laminate. By bringing the fourth nitride semiconductor layers on both sides of the gate electrode into contact with the silicon nitride film in this way, the function of suppressing 2DEG can be lowered, and the 2DEG that has been eliminated after the formation of the fourth nitride semiconductor layer can be restored.Type: GrantFiled: July 5, 2018Date of Patent: January 21, 2020Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Yasuhiro Okamoto
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Patent number: 10355093Abstract: Non-planar semiconductor devices having omega-fins with doped sub-fin regions and methods of fabricating non-planar semiconductor devices having omega-fins with doped sub-fin regions are described. For example, a semiconductor device includes a plurality of semiconductor fins disposed above a semiconductor substrate, each semiconductor fin having a sub-fin portion below a protruding portion, the sub-fin portion narrower than the protruding portion. A solid state dopant source layer is disposed above the semiconductor substrate, conformal with the sub-fin region but not the protruding portion of each of the plurality of semiconductor fins. An isolation layer is disposed above the solid state dopant source layer and between the sub-fin regions of the plurality of semiconductor fins. A gate stack is disposed above the isolation layer and conformal with the protruding portions of each of the plurality of semiconductor fins.Type: GrantFiled: June 26, 2014Date of Patent: July 16, 2019Assignee: Intel CorporationInventors: Gopinath Bhimarasetti, Walid M. Hafez, Joodong Park, Weimin Han, Raymond E. Cotner, Chia-Hong Jan
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Patent number: 10326481Abstract: A power amplification module includes a first amplification transistor that receives a first signal outputs an amplified second signal from the collector thereof; and a bias circuit that supplies a bias current to the base of the first amplification transistor. The first bias circuit includes a first transistor that is diode connected and is supplied with a bias control current; a second transistor that is diode connected, the collector thereof being connected to the emitter of the first transistor; a third transistor, the base thereof being connected to the base of the first transistor, and the bias current being output from the emitter thereof; a fourth transistor, the collector thereof being connected to the emitter of the third transistor and the base thereof being connected to the base of the second transistor; and a first capacitor between the base and the emitter of the third transistor.Type: GrantFiled: March 31, 2017Date of Patent: June 18, 2019Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masatoshi Hase
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Patent number: 10319811Abstract: A finFET semiconductor device includes at least one semiconductor fin on an upper surface of a substrate. The semiconductor fin includes a channel region interposed between opposing source/drain regions. A gate stack is on the upper surface of the substrate and wraps around sidewalls and an upper surface of only the channel region. The channel region further includes a condensed portion formed of a first semiconductor material and a second semiconductor material. The source/drain regions are formed of the first semiconductor material while excluding the second semiconductor material.Type: GrantFiled: November 24, 2015Date of Patent: June 11, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Hong He, Effendi Leobandung, Gen Tsutsui, Tenko Yamashita
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Patent number: 10312344Abstract: A semiconductor device includes a first semiconductor layer formed of a compound semiconductor, provided over a substrate; a second semiconductor layer formed of a compound semiconductor including In and Al, provided over the first semiconductor layer; source and drain electrodes provided on the second semiconductor layer; and a gate electrode provided between the source and drain electrodes, on the second semiconductor layer. The compound semiconductor in the second semiconductor layer has a first In composition ratio in a region on a side facing the substrate and a second In composition ratio in a region on an opposite side, the second In composition ratio being lower than the first In composition ratio, and the source and drain electrodes are provided in contact with the region having the first In composition ratio, and the gate electrode is provided on the region having the second In composition ratio.Type: GrantFiled: July 18, 2017Date of Patent: June 4, 2019Assignee: FUJITSU LIMITEDInventor: Shirou Ozaki
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Patent number: 10249714Abstract: A semiconductor device including a gate structure on a channel region portion of a fin structure, and at least one of an epitaxial source region and an epitaxial drain region on a source region portion and a drain region portion of the fin structure. At least one of the epitaxial source region portion and the epitaxial drain region portion include a first concentration doped portion adjacent to the fin structure, and a second concentration doped portion on the first concentration doped portion. The second concentration portion has a greater dopant concentration than the first concentration doped portion. An extension dopant region extending into the channel portion of the fin structure having an abrupt dopant concentration gradient of n-type or p-type dopants of 7 nm per decade or greater.Type: GrantFiled: June 27, 2017Date of Patent: April 2, 2019Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, RENESAS ELECTRONICS CORPORATIONInventors: Dechao Guo, Shogo Mochizuki, Andreas Scholze, Chun-Chen Yeh
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Patent number: 10243086Abstract: A memory cell for storing one or more bits of information has a control gate, a source terminal and a drain terminal. A semiconductor substrate is located between the source and drain terminals, and a floating gate is disposed between the control gate and the semiconductor substrate. The floating gate is electrically isolated from the control gate by a charge trapping barrier, and is electrically isolated from the semiconductor substrate by a charge blocking barrier. At least one of the charge trapping barrier and the charge blocking barrier contains a III-V semiconductor material. The charge trapping barrier is adapted to enable the selective passage of charge carriers between the control gate and the floating gate, in use, to modify the one or more bits of information stored by the memory cell.Type: GrantFiled: October 23, 2015Date of Patent: March 26, 2019Assignee: Lancaster University Business Enterprises LimitedInventor: Manus Hayne
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Patent number: 10109729Abstract: The present disclosure relates to a transistor device having a donor bi-layer configured to provide low-resistance to source and drain contacts while maintaining a high-mobility two-dimensional electron gas within a channel layer, and an associated method of formation. In some embodiments, the transistor device has a channel layer disposed over a substrate and a donor bi-layer disposed over the channel layer. The donor bi-layer includes a mobility-enhancing layer of AlzGa(1-z)N disposed over the channel layer and having a first molar fraction z in a first range, and a resistance-reducing layer of AlxGa(1-x)N disposed on and in contact with the mobility-enhancing layer of AlzGa(1-z)N and having a second molar fraction x in a second range less than the first range. Source and drain contacts are over the resistance-reducing layer of AlxGa(1-x)N. The donor bi-layer has a conduction band energy that monotonically decreases from top to bottom surfaces of the donor bi-layer.Type: GrantFiled: August 22, 2016Date of Patent: October 23, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
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Patent number: 9960265Abstract: In one embodiment, a III-V high electron mobility semiconductor device includes a semiconductor substrate including a GaN layer, an AlGaN layer on the GaN layer wherein a 2 DEG is formed near an interface of the GaN layer and the AlGaN layer. An insulator may be on at least a first portion of the AlGaN layer and a P-type GaN gate region may be overlying a second portion of the AlGaN layer wherein the 2 DEG does not underlie the P-type GaN gate region.Type: GrantFiled: February 2, 2017Date of Patent: May 1, 2018Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Abhishek Banerjee, Peter Moens, Gordon M. Grivna
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Patent number: 9953839Abstract: This invention relates to an apparatus, system, and method for creating a high-k gate stack structure that includes a passivation layer. The passivation layer can be constructed from a deposition of silicon carbide. The silicon carbide provides robustness against oxidation, which can reduce the capacity of the stack. The silicon carbide is thermodynamically stable during the deposition process and results in a clean interface.Type: GrantFiled: August 18, 2016Date of Patent: April 24, 2018Assignee: International Business Machines CorporationInventors: Chiara Marchiori, Federico Zipoli
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Patent number: 9917154Abstract: Embodiments are directed to a method of forming a feature of a semiconductor device. The method includes forming the feature from a semiconductor material having compressive strain that extends throughout a cut region of the feature and throughout a preserve region of the feature. The method further includes converting the cut region of the feature to a dielectric.Type: GrantFiled: June 29, 2016Date of Patent: March 13, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Juntao Li, Peng Xu
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Patent number: 9806194Abstract: A semiconductor device is provided. A fin is disposed on a substrate. The fin, including a first material and a second material, includes a first fin area and a second fin area. A gate structure is disposed on the first fin area. A source region is in contact with the second fin area. The first fin area includes the first material at a first concentration, the second fin area includes the first material at a second concentration which is greater than the first concentration.Type: GrantFiled: July 15, 2015Date of Patent: October 31, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sung-Dae Suk, Kang-Ill Seo
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Patent number: 9679996Abstract: A semiconductor device and a process to form the same are disclosed. The semiconductor device includes a support, an active semiconductor stack including a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer, the first to third semiconductor layers being sequentially stacked on the support, and an electrode on the third semiconductor layer. The first semiconductor layer and the second semiconductor layer provide a buried region in a portion under the electrode, the buried region being filled with a material having a first dielectric constant smaller than a second dielectric constant of the first semiconductor layer and a third dielectric constant of the second semiconductor layer.Type: GrantFiled: April 1, 2016Date of Patent: June 13, 2017Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventor: Masataka Watanabe
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Patent number: 9666702Abstract: Methods of manufacture of advanced electronic and photonic structures including heterojunction transistors, transistor lasers and solar cells and their related structures, are described herein. Other embodiments are also disclosed herein.Type: GrantFiled: October 1, 2014Date of Patent: May 30, 2017Inventor: Matthew H. Kim
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Patent number: 9640260Abstract: Memory devices are shown that include a body region and a connecting region that is formed from a semiconductor with a lower band gap than the body region. Connecting region configurations can provide increased gate induced drain leakage during an erase operation. Configurations shown can provide a reliable bias to a body region for memory operations such as erasing, and containment of charge in the body region during a boost operation.Type: GrantFiled: June 30, 2014Date of Patent: May 2, 2017Assignee: Micron Technology, Inc.Inventors: Haitao Liu, Jian Li, Chandra Mouli
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Patent number: 9590084Abstract: A device includes a source region, a drain region, and a semiconductor channel connecting the source region to the drain region. The semiconductor channel includes a source-side channel portion adjoining the source region, wherein the source-side channel portion has a first bandgap, and a drain-side channel portion adjoining the drain region. The drain-side channel portion has a second bandgap different from the first bandgap.Type: GrantFiled: November 26, 2014Date of Patent: March 7, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Richard Kenneth Oxland
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Patent number: 9553155Abstract: In an embodiment, a semiconductor device includes a High Electron Mobility Transistor (HEMT) including a floating gate. The floating gate includes two or more electrically separated floating gate segments.Type: GrantFiled: February 4, 2015Date of Patent: January 24, 2017Assignee: Infineon Technologies Austria AGInventors: Matthias Strassburg, Gerhard Prechtl
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Patent number: 9455338Abstract: Integrated circuits with bipolar transistors are provided. In one embodiment, a bipolar transistor may include an emitter region, a first base region that surrounds the emitter region, a collector region that surrounds the first base region, and a second base region that surrounds the collector region. Respective well taps may be formed within the emitter, collector, and the second base regions. A deep doped well having the same doping type as the base regions may extend beneath the emitter, collector, and base regions. In another embodiment, the bipolar transistor may include an emitter region, a base region that surrounds the emitter region, and a collector region that surrounds the base region. Respective well taps may be formed within the emitter, base, and collector regions. A deep doped well having the same doping type as the base region may extend beneath the emitter and only a portion of the base region.Type: GrantFiled: December 14, 2012Date of Patent: September 27, 2016Assignee: Altera CorporationInventors: Albert Ratnakumar, Yanzhong Xu
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Patent number: 9443897Abstract: In an X-Y address type solid state image pickup device represented by a CMOS image sensor, a back side light reception type pixel structure is adopted in which a wiring layer is provided on one side of a silicon layer including photo-diodes formed therein. and visible light is taken in from the other side of the silicon layer, namely, from the side (back side) opposite to the wiring layer. wiring can be made without taking a light-receiving surface into account, and the degree of freedom in wiring for the pixels is enhanced.Type: GrantFiled: February 18, 2015Date of Patent: September 13, 2016Assignee: Sony CorporationInventors: Ryoji Suzuki, Keiji Mabuchi, Tomonori Mori
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Patent number: 9425276Abstract: The present disclosure relates to a donor layer of bi-layer AlGaN and associated method of fabrication within a high electron mobility transistor (HEMT) configured to provide low-resistance ohmic source and drain contacts to reduce power consumption, while maintaining a high-mobility of a two-dimensional electron gas (2DEG) within a channel of the HEMT. The donor layer of bi-layer AlGaN comprises a mobility-enhancing layer of AlzGa(1-z)N, a resistance-reducing layer of AlxGa(1-x)N disposed over the mobility-enhancing layer, wherein the ohmic source and drain contacts connect to the HEMT. A channel layer of GaN is disposed beneath the mobility-enhancing layer, wherein a 2DEG resides, forming the channel of the HEMT.Type: GrantFiled: January 21, 2013Date of Patent: August 23, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
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Patent number: 9406517Abstract: The present disclosure relates to a transistor device having a germanium cap layer that is able to provide for a low interface trap density, while meeting effective oxide thickness scaling requirements, and a related method of fabrication. In some embodiments, the disclosed transistor device has a channel layer disposed within a semiconductor body at a location between a source region and a drain region. A germanium cap layer is disposed onto the channel layer. A gate dielectric layer is separated from the channel layer by the germanium cap layer, and a gate region is disposed above the gate dielectric layer. Separating the gate dielectric layer from the channel layer allows for the germanium cap layer to prevent diffusion of atoms from the channel layer into the gate dielectric layer, thereby provide for a low interface trap density.Type: GrantFiled: March 12, 2013Date of Patent: August 2, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Georgios Vellianitis
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Patent number: 9401583Abstract: A method of forming a laser on silicon using aspect ratio trapping (ART) growth. The method may include; forming a first insulator layer on a substrate; etching a trench in the first insulator layer exposing a top surface of the substrate; forming a buffer layer in the trench using ART growth; forming a laser on the buffer layer, the laser includes at least an active region and a top cladding layer; and forming a top contact on the top cladding layer and a bottom contact on the substrate.Type: GrantFiled: March 30, 2015Date of Patent: July 26, 2016Assignee: International Business Machines CorporationInventors: Cheng-Wei Cheng, Effendi Leobandung, Ning Li, Devendra K. Sadana, Kuen-Ting Shiu
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Patent number: 9362280Abstract: An integrated circuit with devices having dielectric layers with different thicknesses. The dielectric layers include a high-k dielectric and some of the dielectric layers include an oxide layer that is formed from an oxidation process. Each device includes a layer including germanium or carbon located underneath the electrode stack of the device. A silicon cap layers is located over the layer including germanium or carbon.Type: GrantFiled: May 13, 2013Date of Patent: June 7, 2016Assignee: FREESCALE SEMICONDUCTOR, INC.Inventors: Gauri V. Karve, Mark D. Hall, Srikanth B. Samavedam
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Patent number: 9293560Abstract: Vertically oriented nanowire transistors including semiconductor layers or gate electrodes having compositions that vary over a length of the transistor. In embodiments, transistor channel regions are compositionally graded, or layered along a length of the channel to induce strain, and/or include a high mobility injection layer. In embodiments, a gate electrode stack including a plurality of gate electrode materials is deposited to modulate the gate electrode work function along the gate length.Type: GrantFiled: November 5, 2014Date of Patent: March 22, 2016Assignee: Intel CorporationInventors: Brian S. Doyle, Roza Kotlyar, Uday Shah, Charles C. Kuo
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Patent number: 9293582Abstract: Semiconductor-on-insulator structures facilitate the fabrication of devices, including MOSFETs that are at least partially depleted during operation and FinFETs including bilayer fins and/or crystalline oxide.Type: GrantFiled: March 27, 2015Date of Patent: March 22, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Matthew T. Currie
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Patent number: 9276066Abstract: A semiconductor multi-layer substrate includes a substrate, a buffer layer formed on the substrate and made of a nitride semiconductor, an electric-field control layer formed on the buffer layer and made of a nitride semiconductor, the electric-field control layer having conductivity in the substrate's lateral direction, an electric-field relaxation layer formed on the electric-field control layer and made of a nitride semiconductor, and an active layer formed on the electric-field relaxation layer and made of an nitride semiconductor. A resistance in the substrate's lateral direction of the electric-field control layer is equal to or smaller than 10 times a resistance of the electric-field relaxation layer, and a ratio of an electric field share between the electric-field relaxation layer and the buffer layer is controlled by a ratio between a thickness of the electric-field relaxation layer and a thickness of the buffer layer.Type: GrantFiled: July 5, 2013Date of Patent: March 1, 2016Assignee: FUJI ELECTRIC CO., LTD.Inventors: Ryosuke Tamura, Kazuyuki Umeno, Tatsuyuki Shinagawa, Keishi Takaki, Ryohei Makino, Jiang Li
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Patent number: 9159835Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.Type: GrantFiled: June 4, 2012Date of Patent: October 13, 2015Assignee: Intel CorporationInventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
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Patent number: 9129891Abstract: A semiconductor device includes a first semiconductor layer provided over a substrate; an electron transit layer contacting a top of the first semiconductor layer; and a second semiconductor layer contacting a top of the electron transit layer, wherein the electron transit layer has a dual quantum well layer having a structure where a first well layer, an intermediate barrier layer, and a second well layer are sequentially stacked, an energy of a conduction band of the intermediate barrier layer is lower than an energy of conduction band of the first semiconductor layer and the second semiconductor layer, and a ground level is generated in the first and second well layers, and a first excitation level is generated in the dual quantum well layer.Type: GrantFiled: September 25, 2012Date of Patent: September 8, 2015Assignees: FUJITSU LIMITED, NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGYInventors: Akira Endoh, Issei Watanabe
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Patent number: 9093589Abstract: Solid state lighting devices that can produce white light without a phosphor are disclosed herein. In one embodiment, a solid state lighting device includes a first semiconductor material, a second semiconductor material spaced apart from the first semiconductor material, and an active region between the first and second semiconductor materials. The active region includes a first sub-region having a first center wavelength and a second sub-region having a second center wavelength different from the first center wavelength.Type: GrantFiled: August 27, 2013Date of Patent: July 28, 2015Assignee: Micron Technology, Inc.Inventors: Zaiyuan Ren, Thomas Gehrke
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Patent number: 9048362Abstract: According to one embodiment, a semiconductor light emitting device includes n-type and p-type semiconductor layers containing a nitride semiconductor and a light emitting layer. The emitting layer includes a barrier layer containing III group elements, and a well layer stacked with the barrier layer and containing III group elements. The barrier layer is divided into a first portion on an n-type semiconductor layer side and a second portion on a p-type semiconductor layer side, an In composition ratio in the III group elements of the second portion is lower than that of the first portion. The well layer is divided into a third portion on an n-type semiconductor layer side and a fourth portion on a p-type semiconductor layer side, an In composition ratio in the III group elements of the fourth portion is higher than that of the third portion.Type: GrantFiled: February 27, 2012Date of Patent: June 2, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Shigeya Kimura, Yoshiyuki Harada, Hajime Nago, Koichi Tachibana, Shinya Nunoue
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Patent number: 9048363Abstract: A vertical stack including a p-doped GaN portion, a multi-quantum-well including indium gallium nitride layers, and an n-doped transparent conductive material portion is formed on an insulator substrate. A dielectric material liner is formed around the vertical stack, and is patterned to physically expose a surface of the p-doped GaN portion. A selective low temperature epitaxy process is employed to deposit a semiconductor material including at least one elemental semiconductor material on the physically exposed surfaces of the p-doped GaN portion, thereby forming an elemental semiconductor material portion. The selective low temperature epitaxy process can be performed at a temperature lower than 600° C., thereby limiting diffusion of materials within the multi-quantum well and avoiding segregation of indium within the multi-quantum well. The light-emitting diode can generate a radiation of a wide range including blue and green lights in the visible wavelength range.Type: GrantFiled: May 20, 2013Date of Patent: June 2, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Anirban Basu, Wilfried Haensch, Bahman Hekmatshoartabari, Davood Shahrjerdi
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Patent number: 9048379Abstract: A light-emitting device of an embodiment of the present application comprises a semiconductor layer sequence provided with a first main side, a second main side, and an active layer; a beveled trench formed in the semiconductor layer sequence, having a top end close to the second main side, a bottom end, and an inner sidewall connecting the top end and the bottom end. In the embodiment, the inner sidewall is an inclined surface. The light-emitting device further comprises a dielectric layer disposed on the inner sidewall of the beveled trench and the second main side; a first metal layer formed on the dielectric layer; a carrier substrate; and a first connection layer connecting the carrier substrate and the semiconductor layer sequence.Type: GrantFiled: December 2, 2013Date of Patent: June 2, 2015Assignee: EPISTAR CORPORATIONInventors: Chao-Hsing Chen, Yu-Chen Yang, Li-Ping Jou, Hui-Chun Yeh, Yi-Wen Ku
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Patent number: 9018679Abstract: A semiconductor device includes: an operation layer that is provided on a substrate and is made of a GaAs-based semiconductor; a first AlGaAs layer provided on the operation layer; a gate electrode provided on the first AlGaAs layer; an second AlGaAs layer having n-type conductivity and provided on the first AlGaAs layer of both sides of the gate electrode, an Al composition ratio of the second AlGaAs layer being larger than that of the first AlGaAs layer and being equal to or more than 0.3 and equal to or less than 0.5; an n-type GaAs layer selectively provided on the second AlGaAs layer; and a source electrode and a drain electrode that contain Au and are provided on the n-type GaAs layer.Type: GrantFiled: March 29, 2013Date of Patent: April 28, 2015Assignee: Sumitomo Electric Device Innovations, Inc.Inventor: Yasuyo Kurachi