Having Graded Composition Patents (Class 257/191)
  • Publication number: 20130015499
    Abstract: There are disclosed herein various implementations of composite semiconductor devices. In one implementation, such a composite semiconductor device includes a semiconductor on insulator (SOI) substrate including a diode and an insulator layer. The composite semiconductor device also includes a transition body formed over the diode, and a transistor formed over the transition body. The diode is connected across the transistor using through-semiconductor vias, external electrical connectors, or a combination of the two.
    Type: Application
    Filed: July 9, 2012
    Publication date: January 17, 2013
    Applicant: International Rectifier Corporation
    Inventor: Michael A. Briere
  • Publication number: 20130015498
    Abstract: There are disclosed herein various implementations of composite semiconductor devices. In one implementation, such a composite semiconductor device includes a transition body formed over a diode, the transition body including more than one semiconductor layer. The composite semiconductor device also includes a transistor formed over the transition body. The diode may be connected across the transistor using through-semiconductor vias, external electrical connectors, or a combination of the two.
    Type: Application
    Filed: July 9, 2012
    Publication date: January 17, 2013
    Inventor: Michael A. Briere
  • Patent number: 8350288
    Abstract: Semiconductor structures comprising a III-nitride (e.g., gallium nitride) material region and methods associated with such structures are provided. In some embodiments, the structures include an electrically conductive material (e.g., gold) separated from certain other region(s) of the structure (e.g., a silicon substrate) by a barrier material in order to limit, or prevent, undesirable reactions between the electrically conductive material and the other component(s) which can impair device performance. In certain embodiments, the electrically conductive material may be formed in a via. For example, the via can extend from a topside of the device to a backside so that the electrically conductive material connects a topside contact to a backside contact. The structures described herein may form the basis of a number of semiconductor devices including transistors (e.g., PET), Schottky diodes, light-emitting diodes and laser diodes, amongst others.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: January 8, 2013
    Assignee: International Rectifier Corporation
    Inventors: Robert J. Therrien, Jerry W. Johnson, Allen W. Hanson
  • Patent number: 8350290
    Abstract: Provided is a light-receiving device which has light-receiving sensitivity superior to that of a conventional Schottky diode type light-receiving device and also has sufficiently-strengthened junction of a Schottky electrode. A first contact layer formed of AlGaN and having conductivity, a light-receiving layer formed of AlGaN, and a second contact layer formed of AlN and having a thickness of 5 nm are epitaxially formed on a predetermined substrate in the stated order, and a second electrode is brought into Schottky junction with the second contact layer, to thereby form MIS junction. Further, after the Schottky junction, heat treatment is performed under a nitrogen gas atmosphere at 600° C. for 30 seconds.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: January 8, 2013
    Assignee: NGK Insulators, Ltd.
    Inventors: Makoto Miyoshi, Mitsuhiro Tanaka
  • Patent number: 8343856
    Abstract: Semiconductor structures comprising a III-nitride (e.g., gallium nitride) material region and methods associated with such structures are provided. In some embodiments, the structures include an electrically conductive material (e.g., gold) separated from certain other region(s) of the structure (e.g., a silicon substrate) by a barrier material in order to limit, or prevent, undesirable reactions between the electrically conductive material and the other component(s) which can impair device performance. In certain embodiments, the electrically conductive material may be formed in a via. For example, the via can extend from a topside of the device to a backside so that the electrically conductive material connects a topside contact to a backside contact. The structures described herein may form the basis of a number of semiconductor devices including transistors (e.g., FET), Schottky diodes, light-emitting diodes and laser diodes, amongst others.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: January 1, 2013
    Assignee: International Rectifier Corporation
    Inventors: Robert J. Therrien, Jerry W. Johnson, Allen W. Hanson
  • Patent number: 8338831
    Abstract: Recesses are formed in a pMOS region 2, and a SiGe layer is then formed so as to cover a bottom surface and a side surface of each of the recesses. Next, a SiGe layer containing Ge at a lower content than that in the SiGe layer is formed on each of the SiGe layers.
    Type: Grant
    Filed: June 29, 2010
    Date of Patent: December 25, 2012
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Naoyoshi Tamura, Yosuke Shimamune, Hirotaka Maekawa
  • Patent number: 8330036
    Abstract: A method of fabricating a multi-junction solar cell on a separable substrate, and structure formed thereby are provided. The method comprises establishing a substrate having a semiconductive composition and forming a sacrificial layer upon the substrate. A solar cell portion is formed upon the sacrificial layer, such that the solar cell portion includes a plurality of multi junction layers. A stabilizing cell layer of semiconductor material is then formed on the solar cell portion, with the stabilizing cell layer having a predetermined thickness greater than a thickness of any individual one of the III-V multi junction layers. Etching is thereafter carried out to remove the sacrificial layer for releasing the solar cell portion from the substrate.
    Type: Grant
    Filed: August 31, 2009
    Date of Patent: December 11, 2012
    Inventor: Seoijin Park
  • Publication number: 20120280278
    Abstract: A normally-off transistor includes a first region of III-V semiconductor material, a second region of III-V semiconductor material on the first region, a third region of III-V semiconductor material on the second region and a gate electrode adjacent at least one sidewall of the third region. The first region provides a channel of the transistor. The second region has a band gap greater than the band gap of the first region and causes a 2-D electron gas (2DEG) in the channel. The second region is interposed between the first region and the third region. The third region provides a gate of the transistor and has a thickness sufficient to deplete the 2DEG in the channel so that the transistor has a positive threshold voltage.
    Type: Application
    Filed: May 4, 2011
    Publication date: November 8, 2012
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Gilberto Curatola, Oliver Häberlen, Gianmauro Pozzovivo
  • Publication number: 20120235208
    Abstract: A system and method for reducing density mismatch is disclosed. An embodiment comprises determining a conductor density and an active area density in a high density area and a low density area of a semiconductor device. Dummy material may be added to the low density area in order to raise the conductor density and the active area density, thereby reducing the internal density mismatches between the high density area and the low density area. Additionally, a similar process may be used to reduce external mismatches between different regions on the semiconductor substrate. Once these mismatches have been reduced, empty regions surrounding the different regions may additionally be filled in order to reduce the conductor density mismatch and the active area density mismatches.
    Type: Application
    Filed: March 15, 2011
    Publication date: September 20, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hui Chen, Ruey-Bin Sheen, Yung-Chow Peng, Po-Zeng Kang, Chung-Peng Hsieh
  • Patent number: 8264001
    Abstract: A semiconductor wafer includes a substrate, a buffer region formed on one main surface of the substrate and formed from a compound semiconductor, and a main semiconductor region formed in the buffer region and formed from a compound semiconductor, wherein the buffer region includes a first multi-layer structured buffer region and a second multi-layer structured buffer region stacked with a plurality of alternating first layers and second layers, and a single layer structured buffer region arranged between the first multi-layer structured buffer region and the second multi-layer structured buffer region, the first layer is formed from a compound semiconductor which has a lattice constant smaller than a lattice constant of a material which forms the substrate, the second layer is formed from a compound semiconductor which has a lattice constant between a lattice constant of a material which forms the substrate and a lattice constant of a material which forms the first layer, and wherein the single layer structu
    Type: Grant
    Filed: March 11, 2010
    Date of Patent: September 11, 2012
    Assignee: Sanken Electric Co., Ltd.
    Inventor: Ken Sato
  • Patent number: 8263853
    Abstract: A method of forming a plurality of discrete, interconnected solar cells mounted on a carrier by providing a first semiconductor substrate; depositing on the first substrate a sequence of layers of semiconductor material forming a solar cell structure; forming a metal back contact layer over the solar cell structure; mounting a carrier on top of the metal back contact; removing the first substrate; and lithographically patterning and etching the solar cell structure to form a plurality of discrete solar cells mounted on the carrier.
    Type: Grant
    Filed: August 7, 2008
    Date of Patent: September 11, 2012
    Assignee: Emcore Solar Power, Inc.
    Inventor: Tansen Varghese
  • Patent number: 8264004
    Abstract: A method of fabricating a quantum well device includes forming a diffusion barrier on sides of a delta layer of a quantum well to confine dopants to the quantum well.
    Type: Grant
    Filed: March 1, 2010
    Date of Patent: September 11, 2012
    Assignee: Intel Corporation
    Inventors: Been-Yih Jin, Jack T. Kavalieros, Suman Datta, Amlan Majumdar, Robert S. Chau
  • Patent number: 8227291
    Abstract: A method of manufacturing a stacked-layered thin film solar cell with a light-absorbing layer having a band gradient is provided. The stacked-layered thin film solar cell includes a substrate, a back electrode layer, a light-absorbing layer, a buffer layer, a window layer, and a top electrode layer stacked up sequentially. The light-absorbing layer has a band gradient structure and is essentially a group I-III-VI compound, wherein the group III elements at least include indium (In) and aluminum (Al). Moreover, the Al/In ratio in the upper half portion of the light-absorbing layer is greater than that in the lower half portion of the light-absorbing layer, wherein the upper half portion is proximate to a light incident surface.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: July 24, 2012
    Assignee: Nexpower Technology Corp.
    Inventor: Feng-Chien Hsieh
  • Patent number: 8212288
    Abstract: A compound semiconductor substrate which inhibits the generation of a crack or a warp and is preferable for a normally-off type high breakdown voltage device, arranged that a multilayer buffer layer 2 in which AlxGa1-xN single crystal layers (0.6?X?1.0) 21 containing carbon from 1×1018 atoms/cm3 to 1×1021 atoms/cm3 and AlyGa1-yN single crystal layers (0.1?y?0.5) 22 containing carbon from 1×1017 atoms/cm3 to 1×1021 atoms/cm3 are alternately and repeatedly stacked in order, and a nitride active layer 3 provided with an electron transport layer 31 having a carbon concentration of 5×1017 atoms/cm3 or less and an electron supply layer 32 are deposited on a Si single crystal substrate 1 in order. The carbon concentrations of the AlxGa1-xN single crystal layers 21 and that of the AlGa1-yN single crystal layers 22 respectively decrease from the substrate 1 side towards the above-mentioned active layer 3 side. In this way, the compound semiconductor substrate is produced.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: July 3, 2012
    Assignee: Covalent Materials Corporation
    Inventors: Jun Komiyama, Kenichi Eriguchi, Hiroshi Oishi, Yoshihisa Abe, Akira Yoshida, Shunichi Suzuki
  • Patent number: 8202794
    Abstract: The contact resistance between an Ohmic electrode and an electron transit layer is reduced compared with a case in which the Ohmic electrode is provided to a depth less than the heterointerface. As a result, for an Ohmic electrode provided in a structure comprising an electron transit layer formed of a first semiconductor layer formed on a substrate, an electron supply layer comprising a second semiconductor layer forming a heterojunction with the electron transit layer and having a smaller electron affinity than the first semiconductor layer, and a two-dimensional electron layer induced in the electron transit layer in the vicinity of the heterointerface, the end portion of the Ohmic electrode is positioned in the electron transit layer in penetration into the electron supply layer at a depth equal to or greater than the heterointerface.
    Type: Grant
    Filed: April 5, 2011
    Date of Patent: June 19, 2012
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Juro Mita, Katsuaki Kaifu
  • Patent number: 8198652
    Abstract: Disclosed is an HJFET 110 which comprises: a channel layer 12 composed of InyGa1-yN (0?y?1); a carrier supply layer 13 composed of AlxGa1-xN (0?x?1), the carrier supply layer 13 being provided over the channel layer 12 and including at least one p-type layer; and a source electrode 15S, a drain electrode 15D and a gate electrode 17 which are disposed facing the channel layer 12 through the p-type layer, and provided over the carrier supply layer 13. The following relational expression is satisfied: 5.6×1011x<NA×?×t [cm?2]<5.6×1013x, where x denotes an Al compositional ratio of the carrier supply layer, t denotes a thickness of the p-type layer, NA denotes an impurity concentration, and ? denotes an activation ratio.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: June 12, 2012
    Assignee: NEC Corporation
    Inventors: Yuji Ando, Hironobu Miyamoto, Tatsuo Nakayama, Yasuhiro Okamoto, Takashi Inoue, Yasuhiro Murase, Kazuki Ota, Akio Wakejima, Naotaka Kuroda
  • Publication number: 20120119189
    Abstract: An ohmic contact to a semiconductor layer including a heterostructure barrier layer and a metal layer adjacent to the heterostructure barrier layer is provided. The heterostructure barrier layer can form a two dimensional free carrier gas for the contact at a heterointerface of the heterostructure barrier layer and the semiconductor layer. The metal layer is configured to form a contact with the two dimensional free carrier gas.
    Type: Application
    Filed: November 15, 2011
    Publication date: May 17, 2012
    Inventors: Remigijus Gaska, Michael Shur
  • Patent number: 8173891
    Abstract: Modeling a monolithic, multi-bandgap, tandem, solar photovoltaic converter or thermophotovoltaic converter by constraining the bandgap value for the bottom subcell to no less than a particular value produces an optimum combination of subcell bandgaps that provide theoretical energy conversion efficiencies nearly as good as unconstrained maximum theoretical conversion efficiency models, but which are more conducive to actual fabrication to achieve such conversion efficiencies than unconstrained model optimum bandgap combinations. Achieving such constrained or unconstrained optimum bandgap combinations includes growth of a graded layer transition from larger lattice constant on the parent substrate to a smaller lattice constant to accommodate higher bandgap upper subcells and at least one graded layer that transitions back to a larger lattice constant to accommodate lower bandgap lower subcells and to counter-strain the epistructure to mitigate epistructure bowing.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: May 8, 2012
    Assignee: Alliance for Sustainable Energy, LLC
    Inventors: Mark W. Wanlass, Angelo Mascarenhas
  • Publication number: 20120037957
    Abstract: We have observed anomalous behavior of II-VI semiconductor devices grown on certain semiconductor substrates, and have determined that the anomalous behavior is likely the result of indium atoms from the substrate migrating into the II-V layers during growth. The indium can thus become an unintended dopant in one or more of the II-VI layers grown on the substrate, particularly layers that are close to the growth substrate, and can detrimentally impact device performance. We describe a variety of semiconductor constructions and techniques effective to deplete the migrating indium within a short distance in the growth layers, or to substantially prevent indium from migrating out of the substrate, or to otherwise substantially isolate functional II-VI layers from the migrating indium, so as to maintain good device performance.
    Type: Application
    Filed: April 30, 2010
    Publication date: February 16, 2012
    Inventors: Thomas J. Miller, Michael A. Haase, Xiaoguang Sun
  • Patent number: 8110427
    Abstract: A stacked-layered thin film solar cell and a manufacturing method thereof are provided. The stacked-layered thin film solar cell includes a front electrode layer, a stacked-layered light-absorbing structure, and a back electrode layer. The stacked-layered light-absorbing structure has a p-i-n-type layered structure and consists essentially of I-III-VI compounds, wherein the group III elements at least include indium (In) and aluminum (Al). The p-type layer of the stacked-layered light-absorbing structure is near the front electrode layer while the n-type layer is near the back electrode layer. The Al/In concentration ratio in the p-type layer is higher than that in the n-type layer.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: February 7, 2012
    Assignee: Nexpower Technology Corp.
    Inventor: Feng-Chien Hsieh
  • Patent number: 8106424
    Abstract: A field effect transistor with a heterostructure includes a strained monocrystalline semiconductor layer formed on a carrier material, which has a relaxed monocrystalline semiconductor layer made of a first semiconductor material (Si) as the topmost layer. The strained monocrystalline semiconductor layer has a semiconductor alloy (GexSi1-x), where the proportion x of a second semiconductor material can be set freely. Furthermore, a gate insulation layer and a gate layer are formed on the strained semiconductor layer. To define an undoped channel region, drain/source regions are formed laterally with respect to the gate layer at least in the strained semiconductor layer. The possibility of freely setting the Ge proportion x enables a threshold voltage to be set as desired, whereby modern logic semiconductor components can be realized.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: January 31, 2012
    Assignee: Infineon Technologies AG
    Inventor: Klaus Schruefer
  • Publication number: 20120018779
    Abstract: A method for producing micromechanical patterns having a relief-like sidewall outline shape or an angle of inclination that is able to be set, the micromechanical patterns being etched out of a SiGe mixed semiconductor layer that is present on or deposited on a silicon semiconductor substrate, by dry chemical etching of the SiGe mixed semiconductor layer; the sidewall outline shape of the micromechanical pattern being developed by varying the germanium proportion in the SiGe mixed semiconductor layer that is to be etched; a greater germanium proportion being present in regions that are to be etched more strongly; the variation in the germanium proportion in the SiGe mixed semiconductor layer being set by a method selected from the group including depositing a SiGe mixed semiconductor layer having varying germanium content, introducing germanium into a silicon semiconductor layer or a SiGe mixed semiconductor layer, introducing silicon into a germanium layer or an SiGe mixed semiconductor layer and/or by therm
    Type: Application
    Filed: October 13, 2008
    Publication date: January 26, 2012
    Inventors: Franz Laermer, Tino Fuchs, Christina Leinenbach
  • Publication number: 20120007144
    Abstract: A semiconductor device comprises an Si substrate 10 and a compound layer 11 of Si1-XGeX disposed on the substrate 10. X is varied from 0 to 0.2 away from the substrate 10 towards the upper surface of the compound layer 11, with the rate of change of X increasing through the layer. The increasing rate of change of X significantly improves the defectivity levels and the surface roughness at the surface of layer 11.
    Type: Application
    Filed: June 6, 2011
    Publication date: January 12, 2012
    Applicant: IQE SILICON COMPOUNDS LTD
    Inventors: Maurice Howard Fisher, Benoit Alfred Louis Roumiguires, Aled Owen Morgan
  • Patent number: 8076684
    Abstract: A group III nitride semiconductor light emitting element, comprising having a light emitting layer with a multiquantum well structure formed of a group III nitride semiconductor. The light emitting layer has plural well layers, and the plural well layers are formed to coincide in emission wavelength with each other.
    Type: Grant
    Filed: April 5, 2007
    Date of Patent: December 13, 2011
    Assignee: Toyoda Gosei Co., Ltd.
    Inventor: Tetsuya Taki
  • Patent number: 8067786
    Abstract: Semiconductor structures comprising a III-nitride (e.g., gallium nitride) material region and methods associated with such structures are provided. In some embodiments, the structures include an electrically conductive material (e.g., gold) separated from certain other region(s) of the structure (e.g., a silicon substrate) by a barrier material in order to limit, or prevent, undesirable reactions between the electrically conductive material and the other component(s) which can impair device performance. In certain embodiments, the electrically conductive material may be formed in a via. For example, the via can extend from a topside of the device to a backside so that the electrically conductive material connects a topside contact to a backside contact. The structures described herein may form the basis of a number of semiconductor devices including transistors (e.g., FET), Schottky diodes, light-emitting diodes and laser diodes, amongst others.
    Type: Grant
    Filed: July 24, 2009
    Date of Patent: November 29, 2011
    Assignee: International Rectifier Corporation
    Inventors: Robert J. Therrien, Jerry W. Johnson, Allen W. Hanson
  • Patent number: 8067687
    Abstract: A monolithic, multi-bandgap, tandem solar photovoltaic converter has at least one, and preferably at least two, subcells grown lattice-matched on a substrate with a bandgap in medium to high energy portions of the solar spectrum and at least one subcell grown lattice-mismatched to the substrate with a bandgap in the low energy portion of the solar spectrum, for example, about 1 eV.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: November 29, 2011
    Assignee: Alliance for Sustainable Energy, LLC
    Inventor: Mark W. Wanlass
  • Patent number: 8067787
    Abstract: A semiconductor electronic device comprises a substrate; a buffer layer formed on the substrate, the buffer layer including not less than two layers of composite layer in which a first semiconductor layer formed of a nitride-based compound semiconductor layer having a lattice constant smaller than a lattice constant of the substrate and a thermal expansion coefficient larger than a thermal expansion coefficient of the substrate and a second semiconductor layer formed of a nitride-based compound semiconductor having a lattice constant smaller than a lattice constant of the first semiconductor layer and a thermal expansion coefficient larger than a thermal expansion coefficient of the substrate are alternately laminated; an intermediate layer provided between the substrate and the buffer layer, the intermediate layer being formed of a nitride-based compound semiconductor having a lattice constant smaller than a lattice constant of the first semiconductor layer and a thermal expansion coefficient larger than a t
    Type: Grant
    Filed: February 3, 2009
    Date of Patent: November 29, 2011
    Assignee: The Furukawa Electric Co., Ltd
    Inventors: Takuya Kokawa, Sadahiro Kato, Yoshihiro Sato, Masayuki Iwami
  • Patent number: 8039835
    Abstract: A semiconductor device includes a substrate, a transparent oxide layer disposed on one surface side of the substrate, a gate disposed apart from the transparent oxide layer, and a gate insulating layer disposed between the transparent oxide layer and the gate. The transparent oxide layer includes a source, a drain, and a channel formed integrally between the source and the drain, and is made of a transparent oxide material as the main material. The gate provides an electric field to the channel. The gate insulating layer insulates the source and the drain from the gate. The average thickness of the channel is smaller than the average thickness of the source and the drain so that the source and the drain function as conductors and the channel functions as a semiconductor.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: October 18, 2011
    Assignees: Shinshu University, National University Corporation, Seiko Epson Corporation
    Inventors: Musubu Ichikiwa, Kiyoshi Nakamura, Taketomi Kamikawa
  • Publication number: 20110235665
    Abstract: A compositionally graded semiconductor device and a method of making same are disclosed that provides an efficient p-type doping for wide bandgap semiconductors by exploiting electronic polarization within the crystalline lattice. The compositional graded semiconductor graded device includes a graded heterojunction interface that exhibits a 3D bound polarization-induced sheet charge that spreads in accordance with ??(z)=??·P(z), where ??(z) is a volume charge density in a polar (z) direction, and ? is a divergence operator, wherein the graded heterojunction interface is configured to exhibit substantially equivalent conductivities along both lateral and vertical directions relative to the graded heterojunction interface.
    Type: Application
    Filed: December 14, 2010
    Publication date: September 29, 2011
    Inventors: John SIMON, Debdeep JENA, Huili XING
  • Patent number: 8017977
    Abstract: A GaN heterojunction FET has an AlxGa1-xN first graded layer and an AlyGa1-yN second graded layer, which are formed sequentially on a channel layer. The Al mole fraction x of the first graded layer decreases linearly from, for example, 0.2 at an interface of the first graded layer with the channel layer to 0.1 at an interface thereof with the second graded layer. The Al mole fraction y of the second graded layer increases from, for example, 0.1 at an interface of the second graded layer with the first graded layer to 0.35 at a surface located on the opposite side from the first graded layer. Because the intrinsic polarization of AlGaN depends on the Al mole fraction, fixed negative charge is generated in the AlxGa1-xN first graded layer, and fixed positive charge is generated in the AlyGa1-yN second graded layer.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: September 13, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventor: John Twynam
  • Patent number: 8012592
    Abstract: Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a semiconductor structure includes a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The semiconductor structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region, a monocrystalline silicon layer disposed over the insulating layer in the first region, and a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region. The second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon.
    Type: Grant
    Filed: November 1, 2006
    Date of Patent: September 6, 2011
    Assignee: Massachuesetts Institute of Technology
    Inventor: Eugene A. Fitzgerald
  • Patent number: 7923753
    Abstract: The contact resistance between an Ohmic electrode and an electron transit layer is reduced compared with a case in which the Ohmic electrode is provided to a depth less than the heterointerface. As a result, for an Ohmic electrode provided in a structure comprising an electron transit layer formed of a first semiconductor layer formed on a substrate, an electron supply layer comprising a second semiconductor layer forming a heterojunction with the electron transit layer and having a smaller electron affinity than the first semiconductor layer, and a two-dimensional electron layer induced in the electron transit layer in the vicinity of the heterointerface, the end portion of the Ohmic electrode is positioned in the electron transit layer in penetration into the electron supply layer at a depth equal to or greater than the heterointerface.
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: April 12, 2011
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Juro Mita, Katsuaki Kaifu
  • Publication number: 20110079821
    Abstract: A method of fabricating an integrated circuit on a compound semiconductor III-V wafer including at least two different types of active devices by providing a substrate; growing a first epitaxial structure on the substrate; growing a second epitaxial structure on the first epitaxial structure; and processing the epitaxial structures to form different types of active devices, such as HBTs and FETs.
    Type: Application
    Filed: December 9, 2010
    Publication date: April 7, 2011
    Applicant: Emcore Corporation
    Inventors: Paul Cooke, Richard W. Hoffman, Victor Labyuk, Sherry Qianwen Ye
  • Patent number: 7915640
    Abstract: A metamorphic buffer layer is formed on a semi-insulating substrate by an epitaxial growth method, a collector layer, a base layer, an emitter layer and an emitter cap layer are sequentially laminated on the metamorphic buffer layer, and a collector electrode is provided in contact with an upper layer of the metamorphic buffer layer. The metamorphic buffer layer is doped with an impurity, in a concentration equivalent to or higher than that in a conventional sub-collector layer, by an impurity doping process during crystal growth so that the metamorphic buffer layer will be able to play the role of guiding the collector current to the collector electrode. Since the sub-collector layer, which is often formed of a ternary mixed crystal or the like having a high thermal resistance, can be omitted, the heat generated in the semiconductor device can be rapidly released into the substrate.
    Type: Grant
    Filed: May 19, 2006
    Date of Patent: March 29, 2011
    Assignee: Sony Corporation
    Inventor: Masaya Uemura
  • Publication number: 20110018031
    Abstract: Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
    Type: Application
    Filed: September 29, 2010
    Publication date: January 27, 2011
    Inventors: Anand Murthy, Boyan Boyanov, Suman Datta, Brian S. Doyle, Been-Yih Jin, Shaofeng Yu, Robert Chau
  • Patent number: 7821044
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Grant
    Filed: January 15, 2008
    Date of Patent: October 26, 2010
    Assignee: Intel Corporation
    Inventors: Mark T. Bohr, Steven J. Keating, Thomas A. Letson, Anand S. Murthy, Donald W. O'Neill, Willy Rachmady
  • Patent number: 7791106
    Abstract: Gallium nitride material-based semiconductor structures are provided. In some embodiments, the structures include a composite substrate over which a gallium nitride material region is formed. The gallium nitride material structures may include additional features, such as strain-absorbing layers and/or transition layers, which also promote favorable stress conditions. The reduction in stresses may reduce defect formation and cracking in the gallium nitride material region, as well as reducing warpage of the overall structure. The gallium nitride material-based semiconductor structures may be used in a variety of applications such as transistors (e.g. FETs) Schottky diodes, light emitting diodes, laser diodes, SAW devices, and sensors, amongst others devices.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: September 7, 2010
    Assignee: Nitronex Corporation
    Inventors: Edwin L. Piner, Pradeep Rajagopal, John C. Roberts, Kevin J. Linthicum
  • Publication number: 20100200894
    Abstract: An energy level Ec in a vicinity of an interface between a graded layer 1G a ballast resistor 1R is smoothly continuous. This is because an n-type impurity concentration CION in the vicinity of the interface is increased and thus an ionized donor (having a positive charge) exists in the vicinity of the interface. That is, the donor ion cancels out a spike-like potential barrier ?BARRIER protruding in the negative direction of the potential in the vicinity of this interface. Accordingly, the resistance value of an HBT at room temperature decreases and the high frequency characteristics are improved.
    Type: Application
    Filed: July 10, 2008
    Publication date: August 12, 2010
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Yasuyuki Kurita, Noboru Fukuhara
  • Patent number: 7768031
    Abstract: To provide a DC drive type inorganic light emitting device excellent in luminous efficiency, provided is a light emitting device, including: a substrate; and a first layer and a second layer laminated on the substrate, in which the second layer is formed of a first portion containing Zn and at least one element chosen from S and Se as its constituent elements; and a second portion containing at least one element chosen from Cu and Ag and at least one element chosen from S and Se as its constituent elements; the first layer is made of a light emitting layer formed of at least one element chosen from S and Se and of Zn; and, in the second layer, the second portion has a cross section parallel to the substrate which tapers toward the first layer.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: August 3, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Naho Itagaki, Tomoyuki Oike, Tatsuya Iwasaki, Toru Den
  • Patent number: 7755023
    Abstract: Electronically tunable and reconfigurable hyperspectral IR detectors and methods for making the same are presented. In one embodiment, a reconfigurable hyperspectral sensor (or detector) detects radiation from about 0.4 ?m to about 2 ?m and beyond. This sensor is configured to be compact, and lightweight and offers hyperspectral imaging capability while providing wavelength agility and tunability at the chip-level. That is, the sensor is used to rapidly image across diverse terrain to identify man-made objects and other anomalies in cluttered environments.
    Type: Grant
    Filed: October 9, 2007
    Date of Patent: July 13, 2010
    Assignee: HRL Laboratories, LLC
    Inventors: Rajesh D. Rajavel, David H. Chow, Andrew T. Hunter
  • Patent number: 7737466
    Abstract: A semiconductor device includes a substrate having a first area and a second area adjacent to the first area, a first silicon layer provided on the substrate in the first area, a relaxed layer which is provided on the substrate in the second area and which has a lattice constant greater than a lattice constant of the first silicon layer, and a strained-Si layer which is provided on the relaxed layer and which has a lattice constant substantially equivalent to the lattice constant of the relaxed layer.
    Type: Grant
    Filed: August 13, 2007
    Date of Patent: June 15, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kaoru Hiyama, Tomoya Sanuki, Osamu Fujii
  • Patent number: 7723749
    Abstract: A method for in situ formation of low defect, strained silicon and a device formed according to the method are disclosed. In one embodiment, a silicon germanium layer is formed on a substrate, and a portion of the silicon germanium layer is removed to expose a surface that is smoothed with a smoothing agent. A layer of strained silicon is formed on the silicon germanium layer. In various embodiments, the entire method is conducted in a single processing chamber, which is kept under vacuum.
    Type: Grant
    Filed: September 13, 2006
    Date of Patent: May 25, 2010
    Assignee: Intel Corporation
    Inventor: Mohamad A. Shaheen
  • Patent number: 7719031
    Abstract: A bipolar transistor 120 comprises a substrate 1, a intrinsic base region 11 and an extrinsic base region 12. The intrinsic base region 11 comprises a silicon buffer layer 109 comprised of silicon which is formed on the substrate 1, and a composition-ratio graded base layer 111 which is formed on the silicon buffer layer and comprises silicon and at least germanium and where a composition ratio of the germanium to the silicon varies in a thickness direction of the composition-ratio graded base layer 111. The extrinsic base region 12 comprises an extrinsic base formation layer 113 comprised of silicon which is formed on the substrate and adjacent to the silicon buffer layer. And the thickness of the extrinsic base formation layer 113 is not less than 40 nm.
    Type: Grant
    Filed: July 6, 2004
    Date of Patent: May 18, 2010
    Assignee: Panasonic Corporation
    Inventors: Tohru Saitoh, Takahiro Kawashima, Ken Idota, Yoshihiko Kanzawa, Teruhito Ohnishi
  • Patent number: 7700969
    Abstract: A semiconductor device exhibiting interband tunneling with a first layer with a first conduction band edge with an energy above a first valence band edge, with the difference a first band-gap. A second layer with second conduction band edge with an energy above a second valence band edge, with the difference a second band-gap, and the second layer formed permitting electron carrier tunneling transport. The second layer is between the first and a third layer, with the difference between the third valence band edge and the third conduction band edge a third band-gap. A Fermi level is nearer the first conduction band edge than the first valence band edge. The second valence band edge is beneath the first conduction band edge. The second conduction band edge is above the third valence band edge. The Fermi level is nearer the third valence band edge than to the third conduction band edge.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: April 20, 2010
    Assignee: HRL Laboratories, LLC
    Inventors: Joel N. Schulman, David H. Chow, Chanh Nguyen
  • Patent number: 7683400
    Abstract: A Si(1-x)MxC material for heterostructures on SiC can be grown by CVD, PVD and MOCVD. SIC doped with a metal such as Al modifies the bandgap and hence the heterostructure. Growth of SiC Si(1-x)MxC heterojunctions using SiC and metal sources permits the fabrication of improved HFMTs (high frequency mobility transistors), HBTs (heterojunction bipolar transistors), and HEMTs (high electron mobility transistors).
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: March 23, 2010
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Narsingh B. Singh, Brian P. Wagner, David J. Knuteson, Michael E. Aumer, Andre Berghmans, Darren Thomson, David Kahler
  • Publication number: 20100066451
    Abstract: A lower electron supply layer is disposed over a lower electron transport layer made of compound semiconductor. The lower electron supply layer is made of n-type compound semiconductor having an electron affinity smaller than that of the lower electron transport layer. An upper electron transport layer is disposed over the lower electron supply layer. The upper electron transport layer is made of compound semiconductor having a doping concentration lower than that of the lower electron supply layer or non-doped compound semiconductor. An upper electron supply layer is disposed over the upper electron transport layer. The upper electron supply layer is made of n-type compound semiconductor having an electron affinity smaller than that of the upper electron transport layer. A source and drain electrodes are disposed over the upper electron supply layer. A gate electrode is disposed over the upper electron supply layer between the source and drain electrodes.
    Type: Application
    Filed: November 24, 2009
    Publication date: March 18, 2010
    Applicant: FUJITSU LIMITED
    Inventors: Toshihide Kikkawa, Kenji Imanishi
  • Patent number: 7655546
    Abstract: A depletion mode (D-mode) field effect transistor (FET) is monolithically integrated with an enhancement mode (E-mode) FET in a multi-layer structure. The multi-layer structure includes a channel layer overlaid by a barrier layer overlaid by an ohmic contact layer. Source and drain contacts of the D-mode and E-mode FETs are coupled to the ohmic contact layer. A gate contact of the D-mode and E-mode FETs is coupled to the barrier layer. An amorphized region is provided beneath the E-mode gate contact within the barrier layer. The amorphized region forms a buried E-mode Schottky contact with the barrier layer. An alternative embodiment couples the gate contact of the D-mode transistor to a first layer that overlies the barrier layer, and provides a similar D-mode amorphized region within the first layer.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: February 2, 2010
    Assignee: TriQuint Semiconductor, Inc.
    Inventor: Walter Anthony Wohlmuth
  • Patent number: 7633083
    Abstract: A semiconductor device is supported by a substrate with a smaller lattice constant. A metamorphic buffer provides a transition from the smaller lattice constant of the substrate to the larger lattice constant of the semiconductor device. In one application, the semiconductor device has a lattice constant of between approximately 6.1 and 6.35 angstroms, metamorphic buffer layers include Sb (e.g., AlInSb buffer layers), and the substrate has a smaller lattice constant (e.g., Si, InP or GaAs substrates).
    Type: Grant
    Filed: March 10, 2005
    Date of Patent: December 15, 2009
    Assignee: STC.UNM
    Inventors: Luke F. Lester, Larry R. Dawson, Edwin A. Pease
  • Patent number: 7629627
    Abstract: A field effect transistor (FET) having at least two independently biased gates can provide uniform electric field in the channel region of the FET. The same AC voltage may be applied to each gate for modulating the FET. One of the gates is positioned closer to the channel region than the other gate. Such a FET allows tailoring the electric field in the channel region of the FET so that it is substantially uniform. The FET exhibits desirable performance characteristics, including having a constant transconductance.
    Type: Grant
    Filed: April 18, 2006
    Date of Patent: December 8, 2009
    Assignee: University of Massachusetts
    Inventors: Samson Mil'shtein, John F. Palma
  • Patent number: 7605407
    Abstract: A semiconductor device includes a semiconductor substrate, a gate stack on the semiconductor substrate, and a stressor adjacent the gate stack and having at least a portion in the semiconductor substrate, wherein the stressor comprises an element for adjusting a lattice constant of the stressor. The stressor includes a lower portion and a higher portion on the lower portion, wherein the element in the lower portion has a first atomic percentage, and the element in the higher portion has a second atomic percentage substantially greater than the first atomic percentage.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: October 20, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Yin-Ping Wang