Bipolar Transistor Patents (Class 257/197)
  • Patent number: 9082741
    Abstract: A semiconductor device includes a first semiconductor region including a first semiconductor material. The semiconductor device further includes a second semiconductor region adjoining the first semiconductor region. The second semiconductor region includes a second semiconductor material different from the first semiconductor material. The semiconductor device further includes a drift or base zone in the first semiconductor region. The semiconductor device further includes an emitter region in the second semiconductor region. The second semiconductor region includes at least one type of deep-level dopant. A solubility of the at least one type of deep-level dopant is higher in the second semiconductor region than in the first semiconductor region.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: July 14, 2015
    Assignee: Infineon Technologies AG
    Inventors: Stephan Voss, Franz-Josef Niedernostheide, Hans-Joachim Schulze
  • Patent number: 9082616
    Abstract: The disclosure relates to a method for manufacturing a III-V device and the III-V device obtained therefrom. The method comprises providing a semiconductor substrate including at least a recess area and forming a buffer layer overlying the semiconductor substrate in the recess area. The buffer layer includes a binary III-V compound formed at a first growth temperature by selective epitaxial growth from a group III precursor and a group V precursor in the presence of a carrier gas. The first growth temperature is equal or slightly higher than a cracking temperature of each of the group III precursor and of the group V precursor.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: July 14, 2015
    Assignee: IMEC
    Inventor: Clement Merckling
  • Patent number: 9070734
    Abstract: Fabrication methods, device structures, and design structures for a heterojunction bipolar transistor. A trench isolation region and a collector are formed in a semiconductor substrate. The collector is coextensive with the trench isolation region. A first semiconductor layer is formed that includes a of single crystal section disposed on the collector and on the trench isolation region. A second semiconductor layer is formed that includes a single crystal section disposed on the single crystal section of the first semiconductor layer and that has an outer edge that overlies the trench isolation region. The section of the first semiconductor layer has a second width greater than a first width of the collector. The section of the second semiconductor layer has a third width greater than the second width. A cavity extends laterally from the outer edge of section of the second semiconductor layer to the section of the first semiconductor layer.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: June 30, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Patent number: 9059007
    Abstract: Complementary circuits based on junction (or heterojunction) field effect transistor devices and bipolar junction (or heterojunction) transistor devices comprised of thin crystalline semiconductor-on-insulator substrates are provided which are compatible with low-cost and/or flexible substrates. Only one substrate doping type (i.e., n-type or p-type) is required for providing the complementary circuits and thus the number of masks (typically three or four) remains the same as that required for either n-channel or p-channel devices in the TFT level.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: June 16, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Tze-Chiang Chen, Bahman Hekmatshoar-Tabari, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 9059016
    Abstract: A lateral heterojunction bipolar transistor is formed on a substrate including a top semiconductor layer of a first semiconductor material having a first band gap and of a first conductivity type. A stack of an extrinsic base and a base cap is formed over the top semiconductor layer. A dielectric spacer is formed around the stack. Ion implantation of dopants of a second conductivity type is performed to dope regions of the top semiconductor layer that are not masked by the stack and the dielectric spacer, thereby forming an emitter region and a collector region. A second semiconductor material having a second band gap greater than the first band gap, having a doping of the second conductivity type and being lattice matched to the first semiconductor material is selectively deposited to form an emitter contact region and a collector contact region, respectively.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: June 16, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Bahman Hekmatshoar-Tabari, Tak H. Ning, Dae-Gyu Park, Ghavam G. Shahidi
  • Patent number: 9048366
    Abstract: Embodiments generally relate to optoelectronic semiconductor devices such as photovoltaic cells. In one aspect, a method for forming a device includes forming an absorber layer made of gallium arsenide (GaAs) and having one type of doping, and forming an emitter layer made of a different material and having a higher bandgap than the absorber layer. An intermediate layer can be formed between emitter and absorber layers. A heterojunction and p-n junction are formed between the emitter layer and the absorber layer, where the p-n junction is formed at least partially within the different material at a location offset from the heterojunction. A majority of the absorber layer can be outside of a depletion region formed by the p-n junction. The p-n junction causes a voltage to be generated in the cell in response to the cell being exposed to light at a front side.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: June 2, 2015
    Assignee: ALTA DEVICES, INC.
    Inventors: Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
  • Publication number: 20150145005
    Abstract: Disclosed is a transistor having a first region of a first conductivity type for injecting charge carriers into the transistor and a laterally extended second region) of the first conductivity type having a portion including a contact terminal for draining said charge carriers from the transistor, wherein the first region is separated from the second region by an intermediate region of a second conductivity type defining a first p-n junction with the first region and a second p-n junction with the second region, wherein the laterally extended region separates the portion from the second p-n junction, and wherein the transistor further comprises a substrate having a doped region of the second conductivity type, said doped region being in contact with and extending along the laterally extended second region and a further contact terminal connected to the doped region for draining minority charge carriers from the laterally extended second region.
    Type: Application
    Filed: November 17, 2014
    Publication date: May 28, 2015
    Inventors: Viet Thanh Dinh, Tony Vanhoucke, Evelyne Gridelet, Anco Heringa, Jan Willem Slotboom, Dirk Klaassen
  • Patent number: 9041059
    Abstract: A manufacturing method for antenna switching circuit includes the following steps of: providing a GaAs wafer, which includes a capping layer; disposing an isolation layer to the GaAs wafer for forming a device area; and disposing a gate metal on the capping layer within the device area, wherein an interface between the gate metal and the capping layer forms a Schottky contact, and the Schottky contact is parallel connected with an impedance. The present invention also discloses a semiconductor structure for antenna switching circuit.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: May 26, 2015
    Assignee: MAXTEK TECHNOLOGY CO., LTD.
    Inventors: Ke-Kung Liao, Tung-Sheng Chang, Chun-Yen Ku, Shih-Yu Chen
  • Publication number: 20150137185
    Abstract: Fabrication methods, device structures, and design structures for a heterojunction bipolar transistor. A collector is formed in a semiconductor substrate, an intrinsic base is formed on the semiconductor substrate, and an extrinsic base is formed on the intrinsic base. An airgap is located vertically between the extrinsic base and the collector. A contact surface is located adjacent to the airgap. The contact surface is coupled with the collector. A spacer is located laterally between the airgap and the subcollector contact surface.
    Type: Application
    Filed: November 19, 2013
    Publication date: May 21, 2015
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater, Anthony K. Stamper
  • Publication number: 20150137186
    Abstract: Disclosed is a trench formation technique wherein an opening having a first sidewall with planar contour and a second sidewall with a saw-tooth contour is etched through a semiconductor layer and into a semiconductor substrate. Then, a crystallographic wet etch process expands the portion of the opening within the semiconductor substrate to form a trench. Due to the different contours of the sidewalls and, thereby the different crystal orientations, one sidewall etches faster than the other, resulting in an asymmetric trench. Also disclosed is a bipolar semiconductor device formation method that incorporates the above-mentioned trench formation technique when forming a trench isolation region that undercuts an extrinsic base region and surrounds a collector pedestal.
    Type: Application
    Filed: November 19, 2013
    Publication date: May 21, 2015
    Applicant: International Business Machines Corporation
    Inventors: Robert K. Leidy, Mark D. Levy, Qizhi Liu, Gary L. Milo
  • Patent number: 9035426
    Abstract: A bipolar junction transistor (BJT) formed using a fin field-effect transistor (FinFET) complimentary metal-oxide-semiconductor (CMOS) process flow is provided. The BJT includes an emitter fin, a base fin, and a collector fin formed on a substrate. The base fin encloses the emitter fin and collector fin encloses the emitter fin. In some embodiments, the emitter fin, base fin, and collector fin have a square shape when viewed from above and are concentric with each other.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh
  • Patent number: 9035375
    Abstract: Embodiments relate to a field-effect device that includes a body region, a first source/drain region of a first conductivity type, a second source/drain region, and a pocket implant region adjacent to the first source/drain region, the pocket implant region being of a second conductivity type, wherein the second conductivity type is different from the first conductivity type. The body region physically contacts the pocket implant region.
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: May 19, 2015
    Assignee: Infineon Technologies AG
    Inventors: Mayank Shrivastava, Harald Gossner, Ramgopal Rao, Maryam Shojaei Baghini
  • Patent number: 9035358
    Abstract: A semiconductor element includes a collector contact layer of a high concentration N-type semiconductor layer. An N-type collector layer, a base layer, being a high concentration P-type semiconductor layer with a top surface, laminated on the collector layer, and an N-type emitter layer laminated on a part of the top surface, are laminated on the collector contact layer. A base-collector layer junction is located on a bonded surface, between the base layer and the collector layer. An inactive portion is located outside an outside end of a base electrode on the top surface, in a plan view. The inactive portion is formed by implanting ions of one of helium and argon into the first and second semiconductor layers. The inactive portion extends from the top surface to a position below the base-collector layer junction.
    Type: Grant
    Filed: May 13, 2014
    Date of Patent: May 19, 2015
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Yoshio Takahara, Takeshi Miura
  • Patent number: 9029955
    Abstract: An integrated circuit includes a semiconductor substrate, a silicon layer, a buried isolating layer arranged between the substrate and the layer, a bipolar transistor comprising a collector and emitter having a first doping, and a base and a base contact having a second doping, the base forming a junction with the collector and emitter, the collector, emitter, base contact, and the base being coplanar, a well having the second doping and plumb with the collector, emitter, base contact and base, the well separating the collector, emitter and base contact from the substrate, having the second doping and extending between the base contact and base, a isolating trench plumb with the base and extending beyond the layer but without reaching a bottom of the emitter and collector, and another isolating trench arranged between the base contact, collector, and emitter, the trench extending beyond the buried layer into the well.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 12, 2015
    Assignees: Commissariat á l'énergie atomique et aux énergies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9030014
    Abstract: An upper surface of a plug (PL1) is formed so as to be higher than an upper surface of an interlayer insulating film (PIL) by forming the interlayer insulating film (PIL) on a semiconductor substrate (1S), completing a CMP method for forming the plug (PL1) inside the interlayer insulating film (PIL), and then, making the upper surface of the interlayer insulating film (PIL) to recede. In this manner, reliability of connection between the plug (PL1) and a wiring (W1) in a vertical direction can be ensured. Also, the wiring (W1) can be formed so as not to be embedded inside the interlayer insulating film (PIL), or a formed amount by the embedding can be reduced.
    Type: Grant
    Filed: June 14, 2010
    Date of Patent: May 12, 2015
    Assignee: Renesas Electronics Corporation
    Inventor: Takeshi Kawamura
  • Patent number: 9029952
    Abstract: A semiconductor structure includes a substrate, a first well having a first conductive type, a second well having a second conductive type, a body region, a first doped region, a second doped region, a third doped region and a field plate. The first and second wells are formed in the substrate. The body region is formed in the second well. The first and second doped regions are formed in the first well and the body region, respectively. The second and first doped regions have the same polarities, and the dopant concentration of the second doped region is higher than that of the first doped region. The third doped region is formed in the second well and located between the first and second doped regions. The third and first doped regions have reverse polarities. The field plate is formed on the surface region between the first and second doped regions.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: May 12, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
  • Patent number: 9018672
    Abstract: Provided is a semiconductor device including: a semiconductor element arranged on a substrate and having two electrodes; a conductive strip in contact with one of the two electrodes; and a dielectric arranged between another one of the two electrodes and the conductive strip, in which the conductive strip has an opening formed therein, the dielectric has a void formed therein, and the opening and the void are connected to each other.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: April 28, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Ryota Sekiguchi, Alexis Debray, Yasushi Koyama, Kosuke Asano, Satoshi Yokoyama, Atsushi Kemmochi
  • Patent number: 9018681
    Abstract: Consistent with an example embodiment, there is method of manufacturing a bipolar transistor comprising providing a substrate including an active region; depositing a layer stack; forming a base window over the active region in said layer stack; forming at least one pillar in the base window, wherein a part of the pillar is resistant to polishing; depositing an emitter material over the resultant structure, thereby filling said base window; and planarizing the deposited emitter material by polishing. Consistent with another example embodiment, a bipolar transistor may be manufactured according to the afore-mentioned method.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: April 28, 2015
    Assignee: NXP B.V.
    Inventors: Evelyne Gridelet, Tony Vanhoucke, Johannes Josephus Theodorus Marinus Donkers, Hans Mertens, Blandine Duriez
  • Patent number: 9019028
    Abstract: An integrated structure of compound semiconductor devices is disclosed. The integrated structure comprises from bottom to top a substrate, a first epitaxial layer, an etching-stop layer, a second epitaxial layer, a sub-collector layer, a collector layer, a base layer, and an emitter layer, in which the first epitaxial layer is a p-type doped layer, the second epitaxial layer is an n-type graded doping layer with a gradually increased or decreased doping concentration, and the sub-collector layer is an n-type doped layer. The integrated structure can be used to form an HBT, a varactor, or an MESFET.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: April 28, 2015
    Assignee: WIN Semiconductors Corp.
    Inventors: Cheng-Kuo Lin, Szu-Ju Li, Rong-Hao Syu, Shu-Hsiao Tsai
  • Publication number: 20150108549
    Abstract: Disclosed is a trench formation technique wherein a first etch process forms an opening through a semiconductor layer into a semiconductor substrate and then a second etch process expands the portion of the opening within the substrate to form a trench. However, prior to the second etch, a doped region is formed in the substrate at the bottom surface of the opening. Then, the second etch is performed such that an undoped region of the substrate at the sidewalls of the opening is etched at a faster etch rate than the doped region, thereby ensuring that the trench has a relatively high aspect ratio. Also disclosed is a bipolar semiconductor device formation method. This method incorporates the trench formation technique so that a trench isolation region formed around a collector pedestal has a high aspect ratio and, thereby so that collector-to-base capacitance Ccb and collector resistance Rc are both minimized.
    Type: Application
    Filed: October 22, 2013
    Publication date: April 23, 2015
    Applicant: International Business Machines Corporation
    Inventors: John J. Benoit, James R. Elliott, Qizhi Liu
  • Publication number: 20150108548
    Abstract: According to a bipolar transistor structure having a transistor top and a transistor bottom herein, a silicon substrate located at the transistor bottom has a collector region of a first conductivity type. An epitaxial base layer of a second conductivity type overlies, relative to the transistor top and bottom, a portion of the collector region. The epitaxial base layer has a bottom surface on the silicon substrate and a top surface opposite the bottom surface. A top region, relative to the transistor top and bottom, of the epitaxial base layer comprises a concentration of germanium having atomic compositions sufficient to avoid impacting transistor parameters, and sufficient to be resistant to selective chemical etching. A silicon emitter layer of the first conductivity type overlies, relative to the transistor top and bottom, a portion of the epitaxial base layer adjacent to the top surface of the epitaxial base layer.
    Type: Application
    Filed: October 22, 2013
    Publication date: April 23, 2015
    Applicant: International Business Machines Corporation
    Inventors: James S. Dunn, Qizhi Liu, James S. Nakos
  • Patent number: 9012279
    Abstract: A SiGe HBT is disclosed, which includes: a silicon substrate; shallow trench field oxides formed in the silicon substrate; a pseudo buried layer formed at bottom of each shallow trench field oxide; a collector region formed beneath the surface of the silicon substrate, the collector region being sandwiched between the shallow trench field oxides and between the pseudo buried layers; a polysilicon gate formed above each shallow trench field oxide having a thickness of greater than 150 nm; a base region on the polysilicon gates and the collector region; emitter region isolation oxides on the base region; and an emitter region on the emitter region isolation oxides and a part of the base region. The polysilicon gate is formed by gate polysilicon process of a MOSFET in a CMOS process. A method of manufacturing the SiGe HBT is also disclosed.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: April 21, 2015
    Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.
    Inventors: Donghua Liu, Wenting Duan, Wensheng Qian, Jun Hu, Jing Shi
  • Patent number: 9012291
    Abstract: The present invention discloses a bipolar transistor with an embedded epitaxial external base region, which is designed to solve the problem of the TED effect with the prior art structures. The bipolar transistor with an embedded epitaxial external base region of the present invention comprises at least a collector region, a base region and an external base region on the collector region, an emitter on the base region, and sidewalls at both sides of the emitter. The external base region is grown through an in-situ doping selective epitaxy process and is embedded in the collector region. A portion of the external base region is located beneath the sidewalls. The present invention discloses a method of forming a bipolar transistor with an embedded epitaxial external base region.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: April 21, 2015
    Assignee: Tsinghua University
    Inventors: Yu-dong Wang, Jun Fu, Jie Cui, Yue Zhao, Zhi-hong Liu, Wei Zhang, Gao-qing Li, Zheng-li Wu, Ping Xu
  • Publication number: 20150102389
    Abstract: A heterojunction bipolar transistor includes a base mesa, an emitter assembly formed over the base mesa, and a base contact. The emitter assembly includes multiple circular sectors. Each circular sector is spaced apart from one another such that a sector gap is formed between radial sides of adjacent circular sectors. The base contact, which is formed over the base mesa, has a central portion and multiple radial members. Each radial member extends outward from the central portion of the base contact along a corresponding sector gap. As such, each of the circular sectors of the emitter assembly is separated by a radial member of the base contact. The number of circular sectors may vary from one embodiment to another. For example, the emitter assembly may have three, four, six, or more circular sectors.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 16, 2015
    Applicant: RF Micro Devices, Inc.
    Inventors: Brian G. Moser, Robert Saxer, Jing Zhang
  • Publication number: 20150091063
    Abstract: A semiconductor element includes a collector contact layer of a high concentration N-type semiconductor layer. An N-type collector layer, a base layer, being a high concentration P-type semiconductor layer with a top surface, laminated on the collector layer, and an N-type emitter layer laminated on a part of the top surface, are laminated on the collector contact layer. A base-collector layer junction is located on a bonded surface, between the base layer and the collector layer. An inactive portion is located outside an outside end of a base electrode on the top surface, in a plan view. The inactive portion is formed by implanting ions of one of helium and argon into the first and second semiconductor layers. The inactive portion extends from the top surface to a position below the base-collector layer junction.
    Type: Application
    Filed: May 13, 2014
    Publication date: April 2, 2015
    Applicant: Mitsubishi Electric Corporation
    Inventors: Yoshio Takahara, Takeshi Miura
  • Patent number: 8994069
    Abstract: A high electron mobility bipolar transistor including a substrate, a pseudomorphic high electron mobility transistor (pHEMT) sub structure, a sub collector/separating layer and a heterojunction bipolar transistor (HBT) sub structure sequentially stacked from bottom to top is disclosed. The sub collector/separating layer and the pHEMT sub structure are combined to form a pHEMT, and the sub collector/separating layer and the HBT sub structure are combined to form an HBT. The carbon concentration in the sub collector/separating layer is within 5×1017 cm?3 and 1×1020 cm?3, and/or the oxygen concentration within 5×1018 cm?3 and 1×1020 cm?3. The lattice during the process of epitaxy growth is stabilized and it is possible to prevent the dopants, the elements, the vacancies or the defects from diffusing into the neighboring layers, thereby improving the problem of mobility degradation and resistance increase, and sustaining the stability of the manufacturing process.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: March 31, 2015
    Assignee: Visual Photonics Epitaxy Co., Ltd.
    Inventors: Yu-Chung Chin, Chao-Hsing Huang
  • Patent number: 8994075
    Abstract: A heterojunction bipolar transistor includes a base mesa, an emitter assembly formed over the base mesa, and a base contact. The emitter assembly includes multiple circular sectors. Each circular sector is spaced apart from one another such that a sector gap is formed between radial sides of adjacent circular sectors. The base contact, which is formed over the base mesa, has a central portion and multiple radial members. Each radial member extends outward from the central portion of the base contact along a corresponding sector gap. As such, each of the circular sectors of the emitter assembly is separated by a radial member of the base contact. The number of circular sectors may vary from one embodiment to another. For example, the emitter assembly may have three, four, six, or more circular sectors.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: March 31, 2015
    Assignee: RF Micro Devices, Inc.
    Inventors: Brian G. Moser, Robert Saxer, Jing Zhang
  • Patent number: 8987785
    Abstract: According to one exemplary embodiment, a heterojunction bipolar transistor includes a base situated on a substrate. The heterojunction bipolar transistor can be an NPN silicon-germanium heterojunction bipolar transistor, for example. The heterojunction bipolar transistor further includes a cap layer situated on the base, where the cap layer includes a barrier region. The barrier region can comprises carbon and has a thickness, where the thickness of the barrier region determines a depth of an emitter-junction of the heterojunction bipolar transistor. An increase in the thickness of the barrier region can cause a decrease in the depth of the emitter-base junction. According to this exemplary embodiment, the heterojunction bipolar transistor further includes an emitter situated over the cap layer, where the emitter comprises an emitter dopant, which can be phosphorus. A diffusion retardant in the barrier region of the cap layer impedes diffusion of the emitter dopant.
    Type: Grant
    Filed: January 21, 2009
    Date of Patent: March 24, 2015
    Assignee: Newport Fab, LLC
    Inventor: Greg D. U'ren
  • Patent number: 8981430
    Abstract: Embodiments of the present invention provide a bipolar transistor with low resistance base contact and method of manufacturing the same. The bipolar transistor includes an emitter, a collector, and an intrinsic base between the emitter and the collector. The intrinsic base extends laterally to an extrinsic base. The extrinsic base further includes a first semiconductor material with a first bandgap and a second semiconductor material with a second bandgap that is smaller than the first bandgap.
    Type: Grant
    Filed: December 11, 2012
    Date of Patent: March 17, 2015
    Assignee: International Business Machines Corporation
    Inventors: Francois Pagette, Kathryn T. Schonenberg
  • Publication number: 20150060950
    Abstract: Device structures, fabrication methods, and design structures for a bipolar junction transistor. A first isolation region is formed in a substrate to define a lateral boundary for an active device region and an intrinsic base layer is formed on the substrate. The intrinsic base layer has a section overlying the active device region. After the intrinsic base layer is formed, the first isolation region is partially removed adjacent to the active device region to define a trench that is coextensive with the substrate in the active device region and that is coextensive with the first isolation region. The trench is at least partially filled with a dielectric material to define a second isolation region.
    Type: Application
    Filed: October 29, 2014
    Publication date: March 5, 2015
    Inventors: Renata Camillo-Castillo, Marwan H. Khater
  • Publication number: 20150053982
    Abstract: Fabrication methods, device structures, and design structures for a heterojunction bipolar transistor. A trench isolation region and a collector are formed in a semiconductor substrate. The collector is coextensive with the trench isolation region. A first semiconductor layer is formed that includes a of single crystal section disposed on the collector and on the trench isolation region. A second semiconductor layer is formed that includes a single crystal section disposed on the single crystal section of the first semiconductor layer and that has an outer edge that overlies the trench isolation region. The section of the first semiconductor layer has a second width greater than a first width of the collector. The section of the second semiconductor layer has a third width greater than the second width. A cavity extends laterally from the outer edge of section of the second semiconductor layer to the section of the first semiconductor layer.
    Type: Application
    Filed: October 30, 2014
    Publication date: February 26, 2015
    Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Publication number: 20150054036
    Abstract: A device includes a semiconductor die. The semiconductor die includes a plurality of semiconductor layers disposed on a GaAs substrate, including a first semiconductor layer having a first band-gap and a second semiconductor layer having a second band-gap. The semiconductor die further includes a contact layer disposed epitaxially upon the first semiconductor layer. The contact layer has a thickness that is less than a critical thickness. The second semiconductor layer is epitaxially disposed upon the contact layer. The contact layer has a third band-gap that is less than the first band-gap and the second band-gap. The semiconductor die further includes a conductive layer disposed upon the contact layer to form an ohmic contact. The conductive layer comprises one or more metal layers compatible with silicon processing techniques.
    Type: Application
    Filed: August 19, 2014
    Publication date: February 26, 2015
    Inventors: Yuefei Yang, Shing-Kuo Wang, Liping D. Hou
  • Patent number: 8962436
    Abstract: A bipolar junction transistor (BJT) and method for fabricating such. The transistor includes an emitter region, a collector region, and an intrinsic-base region. The intrinsic-base region is positioned between the emitter region and the collector region. Furthermore, the physical separation between the emitter region and the collector region is less than the sum of a base-emitter space-charge region width and a base-collector space-charge region width at the transistor's standby mode.
    Type: Grant
    Filed: June 29, 2013
    Date of Patent: February 24, 2015
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Tak H. Ning, Ghavam G. Shahidi, Jeng-Bang Yau
  • Patent number: 8963253
    Abstract: A bi-directional electrostatic discharge (ESD) protection device may include a substrate, an N+ doped buried layer, an N-type well region and two P-type well regions. The N+ doped buried layer may be disposed proximate to the substrate. The N-type well region may encompass the two P-type well regions such that a portion of the N-type well region is interposed between the two P-type well regions. The P-type well regions may be disposed proximate to the N+ doped buried layer and comprise one or more N+ doped plates, one or more P+ doped plates, one or more field oxide (FOX) portions, and one or more field plates. A multi-emitter structure is also provided.
    Type: Grant
    Filed: October 23, 2012
    Date of Patent: February 24, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Hsin-Liang Chen, Shuo-Lun Tu
  • Patent number: 8957455
    Abstract: A heterojunction bipolar transistor (HBT) having an emitter, a base, and a collector, the base including a first semiconductor layer coupled to the collector, the first semiconductor layer having a first bandgap between a first conduction band and a first valence band and a second semiconductor layer coupled to the first semiconductor layer and having a second bandgap between a second conduction band and a second valence band, wherein the second valence band is higher than the first valence band and wherein the second semiconductor layer comprises a two dimensional hole gas and a third semiconductor layer coupled to the second semiconductor layer and having a third bandgap between a third conduction band and a third valence band, wherein the third valence band is lower than the second valence band and wherein the third semiconductor layer is coupled to the emitter.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: February 17, 2015
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
  • Patent number: 8957456
    Abstract: Fabrication methods, device structures, and design structures for a heterojunction bipolar transistor. A trench isolation region and a collector are formed in a semiconductor substrate. The collector is coextensive with the trench isolation region. A first semiconductor layer is formed that includes a of single crystal section disposed on the collector and on the trench isolation region. A second semiconductor layer is formed that includes a single crystal section disposed on the single crystal section of the first semiconductor layer and that has an outer edge that overlies the trench isolation region. The section of the first semiconductor layer has a second width greater than a first width of the collector. The section of the second semiconductor layer has a third width greater than the second width. A cavity extends laterally from the outer edge of section of the second semiconductor layer to the section of the first semiconductor layer.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: February 17, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Publication number: 20150041862
    Abstract: Disclosed is a method of manufacturing an integrated circuit comprising a bipolar transistor, the method comprising providing a substrate (10) comprising a pair of first isolation regions (12) separated from each other by an active region (11) comprising a collector impurity said bipolar transistor; forming a base layer stack (14, 14?) over said substrate; forming a further stack of a migration layer (15) having a first migration temperature and an etch stop layer (20) over said base layer stack (14); forming a base contact layer (16) having a second migration temperature over the further stack, the second migration temperature being higher than the first migration temperature; etching an emitter window (28) in the base contact layer over the active region, said etching step terminating at the etch stop layer; at least partially removing the etch stop layer, thereby forming cavities (29) extending from the emitter window in between the base contact layer and the redistribution layer; and exposing the resultan
    Type: Application
    Filed: October 27, 2014
    Publication date: February 12, 2015
    Applicant: NXP B.V.
    Inventors: Johannes Josephus Theodorus Marinus DONKERS, Petrus Hubertus Cornelis MAGNEE, Blandine DURIEZ, Evelyne GRIDELET, Hans MERTENS, Tony VANHOUCKE
  • Publication number: 20150035011
    Abstract: Fabrication methods, device structures, and design structures for a heterojunction bipolar transistor. A trench isolation region and a collector are formed in a semiconductor substrate. The collector is coextensive with the trench isolation region. A first semiconductor layer is formed that includes a of single crystal section disposed on the collector and on the trench isolation region. A second semiconductor layer is formed that includes a single crystal section disposed on the single crystal section of the first semiconductor layer and that has an outer edge that overlies the trench isolation region. The section of the first semiconductor layer has a second width greater than a first width of the collector. The section of the second semiconductor layer has a third width greater than the second width. A cavity extends laterally from the outer edge of section of the second semiconductor layer to the section of the first semiconductor layer.
    Type: Application
    Filed: July 31, 2013
    Publication date: February 5, 2015
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Publication number: 20150035012
    Abstract: Methods and apparatus for bipolar junction transistors (BJTs) are disclosed. A BJT comprises a collector made of p-type semiconductor material, a base made of n-type well on the collector; and an emitter comprising a p+ region on the base and a SiGe layer on the p+ region. The BJT can be formed by providing a semiconductor substrate comprising a collector, a base on the collector, forming a sacrificial layer on the base, patterning a first photoresist on the sacrificial layer to expose an opening surrounded by a STI within the base; implanting a p-type material through the sacrificial layer into an area of the base, forming a p+ region from the p-type implant; forming a SiGe layer on the etched p+ region to form an emitter. The process can be shared with manufacturing a polysilicon transistor up through the step of patterning a first photoresist on the sacrificial layer.
    Type: Application
    Filed: September 15, 2014
    Publication date: February 5, 2015
    Inventors: Jui-Yao Lai, Yen-Ming Chen, Shyh-Wei Wang
  • Patent number: 8946861
    Abstract: Disclosed are bipolar devices, which incorporate an entirely monocrystalline link-up region between the intrinsic and extrinsic base layers, and methods of forming the devices. In the methods, a selective epitaxial deposition process grows monocrystalline semiconductor material for the extrinsic base layer on an exposed edge portion of a monocrystalline section of an intrinsic base layer. This deposition process is continued to intentionally overgrow the monocrystalline semiconductor material until it grows laterally and essentially covers a dielectric landing pad on a center portion of that same monocrystalline section of the intrinsic base layer. Subsequently, an opening is formed through the extrinsic base layer to the dielectric landing pad and the dielectric landing pad is selectively removed, thereby exposing monocrystalline surfaces only of the intrinsic and extrinsic base layers.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata A. Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Publication number: 20150014747
    Abstract: A method of forming a heterojunction bipolar transistor. The method includes providing a structure comprising at least an intrinsic base region and an emitter pedestal region. A stack is formed on the intrinsic base region. The stack comprises a polysilicon layer and a top sacrificial oxide layer. A trench is formed in the structure. The trench circumscribes the intrinsic base region and the stack. An extrinsic base is formed at two regions around the stack. The extrinsic base is formed by a selective epitaxial growth process to create a bridge over the trench. The bridge connects the two regions. An opening is provided in the stack. The opening exposes a portion of the intrinsic base region. An emitter is formed in the opening.
    Type: Application
    Filed: September 29, 2014
    Publication date: January 15, 2015
    Inventors: James W. Adkisson, Kevin K. Chan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Publication number: 20150014704
    Abstract: A bipolar transistor includes a semiconductor structure including an emitter area, a base area and a collector area. The emitter area is electrically connected to an emitter contact of the bipolar transistor. Further, the emitter area has a first conductivity type. The base area is electrically connected to a base contact of the bipolar transistor. Further, the base area has at least mainly a second conductivity type. The collector area is electrically connected to a collector contact of the bipolar transistor and has at least mainly the first conductivity type. Further, the collector area includes a plurality of enclosed sub areas having the second conductivity type or the base area includes a plurality of enclosed sub areas having the first conductivity type.
    Type: Application
    Filed: July 11, 2013
    Publication date: January 15, 2015
    Inventors: Jens Konrath, Hans-Joachim Schulze
  • Publication number: 20140374802
    Abstract: Embodiments of the present invention include a method for forming a semiconductor emitter and the resulting structure. The invention comprises forming an epitaxial base layer on a semiconductor substrate. A dielectric layer is deposited over the epitaxial base layer. An opening is etched in a portion of the dielectric layer exposing a portion of the epitaxial base layer and a spacer is deposited along the sidewall of the opening. The emitter is grown from the epitaxial base layer to overlap the top surface of the spacer and a portion of the dielectric layer. The single crystal emitter is formed without a mask and without the requirement of subsequent patterning processes.
    Type: Application
    Filed: June 25, 2013
    Publication date: December 25, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David L. Harame, Vikas K. Kaushal, Marwan H. Khater, Qizhi Liu
  • Publication number: 20140367745
    Abstract: A base region extends upward from a recessed semiconductor surface of a semiconductor material portion present on an insulator. The base region includes a vertical stack of, an extrinsic base region and an intrinsic base region. The extrinsic base region includes a first compound semiconductor material portion of a first conductivity type and a first dopant concentration. The intrinsic base region includes another first compound semiconductor material portion of the first conductivity type and a second dopant concentration which is less than the first dopant concentration. A collector region including a second compound semiconductor material portion of a second conductivity type opposite of the first conductivity type is located on one side on the base region. An emitter region including another second compound semiconductor material portion of the second conductivity type is located on another side on the base region.
    Type: Application
    Filed: June 13, 2013
    Publication date: December 18, 2014
    Inventors: Cheng-Wei Cheng, Tak H. Ning, Ghavam G. Shahidi, Kuen-Ting Shiu
  • Patent number: 8912574
    Abstract: A method of making a semiconductor structure includes forming a trench through a shallow trench isolation (STI) structure and into a substrate, and forming a liner including an electrical insulator material on sidewalls of the trench. The method also includes forming a core including a high thermal conductivity material in the trench and on the liner, and forming a cap in the trench and on the core.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: December 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: Mattias E. Dahlstrom, Dinh Dang, Qizhi Liu, Ramana M. Malladi
  • Publication number: 20140361303
    Abstract: Complementary circuits based on junction (or heterojunction) field effect transistor devices and bipolar junction (or heterojunction) transistor devices comprised of thin crystalline semiconductor-on-insulator substrates are provided which are compatible with low-cost and/or flexible substrates. Only one substrate doping type (i.e., n-type or p-type) is required for providing the complementary circuits and thus the number of masks (typically three or four) remains the same as that required for either n-channel or p-channel devices in the TFT level.
    Type: Application
    Filed: June 5, 2013
    Publication date: December 11, 2014
    Inventors: Tze-Chiang Chen, Bahman Hekmatshoar-Tabari, Ghavam G. Shahidi, Davood Shahrjerdi
  • Publication number: 20140353725
    Abstract: Disclosed are devices and methods of forming the devices wherein pair(s) of first openings are formed through a dielectric layer and a first semiconductor layer into a substrate and, within the substrate, the first openings of each pair are expanded laterally and merged to form a corresponding trench. Dielectric material is deposited, filling the upper portions of the first openings and creating trench isolation region(s). A second semiconductor layer is deposited and second opening(s) are formed through the second semiconductor and dielectric layers, exposing monocrystalline portion(s) of the first semiconductor layer between the each pair of first openings. A third semiconductor layer is epitaxially deposited with a polycrystalline section on the second semiconductor layer and monocrystalline section(s) on the exposed monocrystalline portion(s) of the first semiconductor layer. A crystallization anneal is performed and a device (e.g.
    Type: Application
    Filed: May 29, 2013
    Publication date: December 4, 2014
    Applicant: International Business Machines Corporation
    Inventors: James W. Adkisson, Peng Cheng, Vibhor Jain, Vikas Kumar Kaushal, Qizhi Liu, John J. Pekarik
  • Publication number: 20140353726
    Abstract: A bipolar junction transistor (BJT) and method for fabricating such. The transistor includes an emitter region, a collector region, and an intrinsic-base region. The intrinsic-base region is positioned between the emitter region and the collector region. Furthermore, the physical separation between the emitter region and the collector region is less than the sum of a base-emitter space-charge region width and a base-collector space-charge region width at the transistor's standby mode.
    Type: Application
    Filed: May 29, 2013
    Publication date: December 4, 2014
    Applicant: International Business Machines Corporation
    Inventors: Jin Cai, Tak H. Ning, Ghavam G. Shahidi, Jeng-Bang Yau
  • Patent number: 8901611
    Abstract: Bipolar field effect transistor (BiFET) structures and methods of forming the same are provided. In one embodiment, an apparatus includes a substrate and a plurality of epitaxial layers disposed over the substrate. The plurality of epitaxial layers includes a first epitaxial layer, a second epitaxial layer disposed over the first epitaxial layer, and a third epitaxial layer disposed over the second epitaxial layer. The first epitaxial layer includes at least a portion of a channel of a first field effect transistor (FET) and the third epitaxial layer includes at least a portion of a channel of a second FET.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: December 2, 2014
    Assignee: Skyworks Solutions, Inc.
    Inventors: Peter J. Zampardi, Jr., Hsiang-Chih Sun
  • Patent number: 8901669
    Abstract: A method of manufacturing an integrated circuit comprising bipolar transistors including first and second type bipolar transistors, the method comprising providing a substrate comprising first isolation regions each separated from a second isolation region by an active region comprising a collector impurity of one of the bipolar transistors; forming a base layer stack over the substrate; forming a first emitter cap layer of a first effective thickness over the base layer stack in the areas of the first type bipolar transistor; forming a second emitter cap layer of a second effective thickness different from the first effective thickness over the base layer stack in the areas of the second type bipolar transistor; and forming an emitter over the emitter cap layer of each of the bipolar transistors. An IC in accordance with this method.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: December 2, 2014
    Assignee: NXP, B.V.
    Inventors: Hans Mertens, Johannes Theodorus Marinus Donkers, Evelyne Gridelet, Tony Vanhoucke, Petrus Hubertus Cornelis Magnee