Abstract: The invention provides a thin film semiconductor element and a method of manufacturing the same to achieve lowering the resistance of gate electrodes, lowering the capacitance of source electrodes, and enhancing etching characteristics. The thin film semiconductor element can include a semiconductor film provided on a substrate, source and drain electrodes connected to the semiconductor film, and a gate electrode provided on the semiconductor film with an insulating film interposed therebetween. The film thickness of the source and drain electrodes can be smaller than the film thickness of the gate electrode.

Abstract: An optical device having a high reflector tunable stress coating includes a micro-electromechanical system (MEMS) platform, a mirror disposed on the MEMS platform, and a multiple layer coating disposed on the mirror. The multiple layer coating includes a layer of silver (Ag), a layer of silicon dioxide (SiO2) deposited on the layer of Ag, a layer of intrinsic silicon (Si) deposited on the layer of SiO2, and a layer of silicon oxynitride (SiOxNy) deposited on the layer of Si. The concentration of nitrogen is increased and/or decreased to tune the stress (e.g., tensile, none, compressive).

Abstract: A method for manufacturing an infrared sensor, including preparing a substrate including a supporting member made of single crystalline silicon, a first layer made of silicon oxide formed on the supporting member, and a second layer made of single crystalline silicon formed on the first layer, embedding a silicon oxide layer over the second layer, forming an infrared detection pixel in the second layer, the infrared detection pixel having a function of converting heat into an electric signal, fanning a supporting beam line including a U-shaped electric conductor on the silicon oxide layer, while forming a gate electrode of a MOS transistor of a peripheral circuit on the second layer, the gate electrode having an electric conductor with U-shaped cross section, forming an infrared absorption layer on the second layer, the infrared absorption layer having a function of converting an infrared ray into heat, and etching the second layer to form a hole for isolating the infrared detection pixel from of the substrat

Abstract: The present invention discloses a control TFT structure (i.e. a driving TFT) for reducing leakage in an OLED display. A semiconductor layer, such as a polysilicon layer, is deposited on a transparent substrate as a channel region. A lightly doped region and a drain region are disposed on one side of the polysilicon layer and a source region is disposed on the opposite side of the polysilicon layer. An insulating layer is deposited covering the surface of the polysilicon layer, the lightly doped region, and the source/drain regions. Source and drain electrodes are disposed in the insulating layer, electrically connecting the source and drain region respectively. A gate metal layer is disposed on the insulating layer, at approximately the top right portion of the polysilicon layer to form a transistor structure.

Abstract: A photodetector for use with relatively thin (i.e., sub-micron) silicon optical waveguides formed in a silicon-on-insulator (SOI) structure comprises a layer of poly-germanium disposed to couple at least a portion of the optical signal propagating along the silicon optical waveguide. Tight confinement of the optical signal within the waveguide structure allows for efficient evanescent coupling into the poly-germanium detector. The silicon optical waveguide may comprise any desired geometry, with the poly-germanium detector formed to either cover a portion of the waveguide, or be butt-coupled to an end portion of the waveguide. When covering a portion of the waveguide, poly-germanium detector may comprise a “wrap-around” geometry to cover the side and top surfaces of the optical waveguide, with electrical contacts formed at opposing ends of the detector.

Abstract: A CMOS imager having an epitaxial layer formed below pixel sensor cells is disclosed. An epitaxial layer is formed between a semiconductor substrate and a photosensitive region to improve the cross-talk between pixel cells. The thickness of the epitaxial layer is optimized so that the collection of signal carriers by the photosensitive region is maximized.

Abstract: White defects caused by a dark-current of a solid-state imaging device is reduced by effectively bringing out gettering capability of a buried getter sink layer. A buried getter sink layer is formed by introducing to the semiconductor substrate a substance of a second element which is a congener of a first element composing a semiconductor substrate, a crystal growth layer is formed by crystal growing a substance of the first element on a surface of the semiconductor substrate, and a solid-state imaging element is formed inside and on the crystal growth layer at a lower temperature than that in the case of forming an extrinsic getter sink layer by introducing a substance of a third element of a different group from the first element on a back surface of the semiconductor substrate.

Abstract: An integrated circuit is provided that includes a substrate incorporating a semiconductor photodiode device having a p-n junction. The photodiode device includes at least one capacitive trench buried in the substrate and connected in parallel with the junction. In a preferred embodiment, the substrate is formed from silicon, and the capacitive trench includes an internal doped silicon region partially enveloped by an insulating wall that laterally separates the internal region from the substrate. Also provided is a method for fabricating an integrated circuit including a substrate that incorporates a semiconductor photodiode device having a p-n junction.

Abstract: A P type channel dope impurity region and a P− type punch-through stopper impurity region are not formed in a part of a channel region between an N− type photodiode impurity region and an N+ type floating diffusion impurity region. As a result, it will be more difficult for a potential harrier or a potential drop to trap charges transferred from N− type photodiode impurity region to N+ type floating diffusion impurity region. Consequently, since the charges generated in the photodiode impurity region is more easily transferred, a semiconductor device is obtained which has a solid-state image pickup element using a charge transfer transistor in which degradation of an image quality due to noise is suppressed.

Abstract: A constant voltage device includes n-type and p-type doped layers. The n-type doped layer is formed by heavily doping with an n-type impurity an upper portion of a p-type silicon semiconductor substrate, in an active region defined by an isolating insulator film. The p-type doped layer is formed by doping the region under the n-type doped layer with a p-type impurity. The n-type and p-type doped layers are provided to form two layers in parallel with the substrate surface of the semiconductor substrate, whereby a pn junction formed between the n-type and p-type doped layers creates a diode structure. Impurity concentration in the p-type doped layer is established so that the impurity concentration of a portion adjacent the isolating insulator film is lower that that of the rest.

Abstract: The present invention provides a semiconductor device including a silicon substrate; a heat insulating layer including a silicon oxide film; and a heat detecting portion, in which the heat insulating layer includes a closed cavity and/or a hole, an interior of the hole has a greater diameter than an opening of the hole, and at least a portion of the closed cavity or the hole is formed within the silicon oxide film. The invention also provides a method of manufacturing this semiconductor device.

Abstract: The present invention relates to bioelectronic devices comprising lipid vesicles which are in contact with a chip, particularly with at least one gate of a field effect transistor. The vesicles/bilayers may comprise effector molecules in their membrane and thus are suitable as bioelectronic sensors. The chip may also have a capacitive stimulating spot, with which the electrical or functional state of the membrane or its incorporated molecules may be affected.

Abstract: A charge coupled device (CCD) with multi-focus lengths is provided. The arrays of optical sensors with a plurality of transparent plates in parallel disposed thereon are disposed on a substrate. By way of either of changing the thicknesses of the transparent plates and changing the position levels of the arrays of the optical sensors, each of the arrays of the optical sensors obtains a different focal length. And thus, the depth of focus of the present charge coupled device is improved.

Abstract: The present invention provides a semiconductor device including a silicon substrate; a heat insulating layer including a silicon oxide film; and a heat detecting portion, in which the heat insulating layer includes a closed cavity and/or a hole, an interior of the hole has a greater diameter than an opening of the hole, and at least a portion of the closed cavity or the hole is formed within the silicon oxide film. The invention also provides a method of manufacturing this semiconductor device.

Abstract: An image sensor capable of preventing the degradation of pinned photodiodes and the generation of leakage current between neighboring pinned photodiodes is provided. The disclosed image sensor contains a plurality of pixel units, each pixel unit having a photodiode region. The image sensor includes a semiconductor substrate of a first conductivity type; a device isolation layer formed in the semiconductor substrate; a field stop layer formed beneath the device isolation layer; a trench formed in the semiconductor substrate, wherein the trench surrounds the photodiode region; a first doping region of the first conductivity type formed beneath the surface of the semiconductor substrate and beneath the surfaces of the trench; an insulating member filling the trench; and a second doping region of a second conductivity type formed in the semiconductor substrate under the first doping region.

Abstract: A CMOS imager having an epitaxial layer formed below pixel sensor cells is disclosed. An epitaxial layer is formed between a semiconductor substrate and a photosensitive region to improve the cross-talk between pixel cells. The thickness of the epitaxial layer is optimized so that the collection of signal carriers by the photosensitive region is maximized.

Abstract: A photodiode that is used in an optical communication system using two different wavelengths, &lgr;1 and &lgr;2(&lgr;1<&lgr;2), and that enables a reduction in the optical crosstalk caused by outgoing light having a longer wavelengths, &lgr;2. A photodiode that receives light having a shorter wavelengths, &lgr;1, is provided with an absorption layer made of a material having a bandgap wavelength, &lgr;g(&lgr;1<&lgr;g<&lgr;2), to detect the light having &lgr;1. A filter layer that absorbs unwanted light having &lgr;2 is provided over the absorption layer so that the light having &lgr;2 cannot return to the absorption layer after passing through it once.

Abstract: A semiconductor device has plural output circuits. Each of the plural output circuits has a semiconductor switching element and a heat protection circuit including a diode. When the heat protection circuit in a predetermined output circuit detects that heat emitted from the semiconductor switching element in the predetermined output circuit, the heat protection circuit turns off the semiconductor switching element in the predetermined output circuit. The plural output circuits are thermally isolated from each other by a trench and an insulation film. The trench and the insulation film prevent the heat from being transmitted from the predetermined output circuit to an adjacent output circuit. Therefore, even if the heat, by which the semiconductor switching element in the predetermined output circuit is turned off, is generated at the predetermined output circuit, the semiconductor switching element in the adjacent output circuit is not turned off by the heat.

Abstract: A CMOS image sensor structure that includes a substrate, a sensing layer and a dopant layer. The substrate is formed using a first conductive type material. The sensing region is buried within the substrate. The sensing layer is a second type conductive material layer. The dopant layer is formed above the sensing layer. The dopant layer is a first type conductive material layer.

Abstract: An improved light responsive semiconductor switch with shorted load protection capable of successfully interrupting a load overcurrent. The switch is includes an output transistor which is triggered by a photovoltaic element to connect a load to a power source thereof, and an overcurrent sensor which provides an overcurrent signal upon seeing an overcurrent condition in the load. A shunt transistor is connected in series with a current limiting resistive element across the photovoltaic element to define a shunt path of flowing the current from the photovoltaic element through the current limiting resistive element away from the output transistor. A latch circuit is included to be energized by the photovoltaic element and to provide an interruption signal once the overcurrent signal is received and hold the interruption signal.

Abstract: This invention provides a manufacturing process for a charge transfer device comprising an N-type well formed in a P-type well on a semiconductor substrate for transferring a signal charge, an N+region formed on both sides along the charge transfer direction of the N-type well and containing a dopant in a higher concentration than that in the N-type well, a P-type region formed around the N+ region, and a gate electrode covering the N+ region and the N-type well and formed via a gate insulator, comprising ion-implanting an N-type dopant into the region to be the N-type well and the N+ region using the first mask and ion-implanting a P-type dopant into the region to be the N-type well using the second mask. Thus, there can be provided a charge transfer device which has a structure where there is an N+ region on both sides of the N-type well, a large maximum transferable charge and a compact CCD with a width up to 3 times the minimum design dimension.

Abstract: A negative voltage detector is disclosed wherein a resistor divider circuit is used to translate a negative voltage into a standard CMOS logic low or logic high value. The small area consumed by the negative voltage divider of the present invention allows multiple device placement within a logic device without the consumption of much area on the logic device. Additionally, the multiple devices placed may detect different negative voltage thresholds with a simple tuning of device components.

Abstract: A semiconductor imaging system preferably having an active pixel sensor array compatible with a CMOS fabrication process. Color-filtering elements such as polymer filters and wavelength-converting phosphors can be integrated with the image sensor.

Abstract: The semiconductor device of the present invention is equipped with a plurality of photodiodes, a horizontal transfer part and a vertical transfer part, and in particular, the horizontal transfer part or the vertical transfer part has a configuration described as in the following. Namely, the device has a semiconductor region which is formed by regularly and consecutively arranging a plurality of blocks of the same conductivity type, where each of the plurality of the blocks is equipped with three regions of mutually different impurity concentrations, clock pulses are applied to two regions out of the three regions and the voltage of the high level or low level of the clock pulse is applied to the remaining region out of the three regions as a constant potential.

Abstract: An integrated circuit photodetector includes a transimpedance amplifier including a differential amplifier stage with PNP emitter-coupled transistors and a PNP input transistor which are biased only by base currents of the emitter-coupled transistors, to achieve low input bias current. Low noise operation is achieved by bypass capacitors coupled between the bases and emitters of the input transistors, respectively. A constant current source supplies a current which develops a small pedestal voltage across a resistor to bias the non-inverting input of the transimpedance amplifier so as to avoid nonlinear amplification of low level light signals. A positively biased N-type guard tub surrounds the photodetector, which is formed in a junction-isolated N region on a P substrate, to collect electrons generated in the substrate by deep-penetrating IR light to prevent them from causing amplification errors.

Abstract: A solid-state image pick-up device 20 having a photoreceiving section 3 disposed on the obverse surface of a substrate 2 and performing photoelectric conversion. A readout gate 5 is disposed at one end of the photoreceiving section 3. A channel stop 8 is disposed at the other end of the photoreceiving section 3. A vertical transfer register 7 is provided for each of the readout gate 5 and the channel stop 8 at the end opposite to the photoreceiving section 3. A transfer electrode 10 is located in a position substantially right above the vertical transfer register 7. A light-shielding film 21 is disposed in such a manner that the transfer electrode 10 can be covered and that the portion right above the photoreceiving section 3 can be at least partially opened. The width W.sub.3 of the readout gate 5 is formed greater than the width W.sub.4 of the channel stop 8. The width W.sub.5 of the projecting portion 21b of the light-shielding film 21 adjacent to the readout gate 5 is formed smaller than the width W.sub.

Abstract: In a semiconductor wafer according to this invention, an epitaxial layer is formed on the surface of a semiconductor substrate, a second element which is not the same but homologous as a first element constituting the semiconductor substrate is present to have a peak concentration on the semiconductor substrate side rather than the surface, and this peak concentration is 1.times.10.sup.16 atoms/cm.sup.3 or more.

Abstract: An infrared solid-state image sensing apparatus is provided with a plurality of photoelectric converting sections arranged vertically and horizontally in a matrix pattern on a semiconductor substrate of a first conducting type; a plurality of vertical CCDs which have first buried channels of a second conducting type and electrodes disposed thereon with an insulating film between and which are disposed adjacently to the photoelectric converting sections; and a horizontal CCD having a second buried channel of the second conducting type and electrodes disposed thereon with an insulating film between and which is disposed adjacently to one side of the vertical CCDs. The first and second buried channels are provided with a low-concentration region having a uniform diffusion depth. Further, the surface of each first buried channel is provided with a high-concentration region of the second conducting type having a higher concentration than that of the surface of the second buried channel.

Abstract: In a CCD solid state image sensing device in which a photosensitive section is constructed by a photodiode formed by a PN junction between a first P-type well region and an N-type impurity diffusion region formed on an N-type silicon substrate, the N-type impurity diffusion region is formed by the ion implantation of single substance of arsenic (As). According to this CCD solid state image sensing device, a bright flaw on an image sensing screen, which is one of the defects encountered with an image sensing screen, can be reduced. Also, the n-type impurity diffusion region constructing the PN Junction can be reduced in size and the CCD solid state image sensing device itself can be made compact in size. Further, a method of manufacturing a CCD solid state image sensing device also is provided.

Abstract: The impurity density of a photoelectric transducer n-layer (7) and the impurity density of a p-layer (6) of an impurity region in which the electric transducer (7) and a transfer channel (9) are formed, are each distributed to have its maximum value in a more interior part from the surface of a semiconductor substrate (5). Alternatively, i) a thin, high-density p-layer (34) and ii) a thick, low-density p-layer (33) of an impurity region in which the electric transducer (7) and the transfer channel (9) are formed may be formed. Each minimum potential in these two p-layers (33, 34) is made to have a different dependence on the voltage applied to an n-type semiconductor substrate (5). The thick, low-density p-layer (33) is formed in such a way that it comes into contact with part of the photoelectric transducer n-layer (7) at its bottom portion.

Abstract: An acceleration resistant packaging for integrated circuits. Integrated circuits are usually packaged in plastic or ceramic housings. However, due to the great accelerations that occur, circuits packaged in that manner cannot be employed in projectiles. According to the invention each integrated circuit (5, 6) is arranged and between two thin sheets (1, 2) and the circumference of these sheets is clamped into a clamping frame (3, 4).