With Means To Prevent Edge Breakdown Patents (Class 257/483)
  • Patent number: 8115270
    Abstract: An electrostatic discharge protection device includes a first bipolar transistor having a collector terminal connected with a first power supply terminal, an emitter terminal connected with the input/output terminal, and a base terminal connected with a second power supply terminal, a second bipolar transistor having a collector terminal connected with the second power supply terminal, an emitter terminal connected with the input/output terminal, and a base terminal connected with the first power supply terminal, one of the first and second bipolar transistors ensuring a continuity between the collector terminal and emitter terminal under such conditions that a potential difference between the first or second power supply terminal and the input/output terminal is lower than a breakdown voltage at a PN junction between the emitter terminal and the base terminal of the other bipolar transistor.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: February 14, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Takayuki Nagai
  • Publication number: 20110227135
    Abstract: Improved Schottky diodes with reduced leakage current and improved breakdown voltage are provided by building a JFET with its current path of a first conductivity type serially located between a first terminal comprising a Schottky contact and a second terminal. The current path lies (i) between multiple substantially parallel finger regions of a second, opposite, conductivity type substantially laterally outboard of the Schottky contact, and (ii) partly above a buried region of the second conductivity type that underlies a portion of the current path, which regions are electrically coupled to the first terminal and the Schottky contact and which portion is electrically coupled to the second terminal. When reverse bias is applied to the first terminal and Schottky contact, the current path is substantially pinched off in vertical or horizontal directions or both, thereby reducing the leakage current and improving the breakdown voltage of the device.
    Type: Application
    Filed: June 1, 2011
    Publication date: September 22, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
  • Patent number: 7973381
    Abstract: A schottky diode of the trench variety which includes a trench termination having a thick insulation layer that is thicker than the insulation layer inside the trenches in its active region.
    Type: Grant
    Filed: September 8, 2004
    Date of Patent: July 5, 2011
    Assignee: International Rectifier Corporation
    Inventor: Davide Chiola
  • Patent number: 7939905
    Abstract: According to an embodiment of the present invention, an electrostatic breakdown protection method protects a semiconductor device from a surge current impressed between a first terminal and a second terminal, the semiconductor device including: a diode impressing a forward-bias current from the first terminal to the second terminal; and a bipolar transistor impressing a current in a direction from the second terminal to the first terminal under an ON state, a continuity between a collector terminal and an emitter terminal of the bipolar transistor being attained before a potential difference between the first terminal and the second terminal reaches such a level that the diode is broken down.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: May 10, 2011
    Assignee: Renesas Electronics Corporation
    Inventor: Takayuki Nagai
  • Patent number: 7923911
    Abstract: Metal induced polycrystallized silicon is used as the anode in a light emitting device, such as an OLED or AMOLED. The polycrystallized silicon is sufficiently non-absorptive, transparent and made sufficiently conductive for this purpose. A thin film transistor can be formed onto the polycrystallized silicon anode, with the silicon anode acting as the drain of the thin film transistor, thereby simplifying production.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: April 12, 2011
    Assignee: The Hong Kong University of Science and Technology
    Inventors: Hoi Sing Kwok, Man Wong, Zhiguo Meng, Jiaxin Sun, Xiuling Zhu
  • Patent number: 7923804
    Abstract: A MOSFET switch which has a low surface electric field at an edge termination area, and also has increased breakdown voltage. The MOSFET switch has a new edge termination structure employing an N-P-N sandwich structure. The MOSFET switch also has a polysilicon field plate configuration operative to enhance any spreading of any depletion layer located at an edge of a main PN junction of the N-P-N sandwich structure.
    Type: Grant
    Filed: February 9, 2009
    Date of Patent: April 12, 2011
    Assignee: MaxPower Semiconductor Inc.
    Inventors: Jun Zeng, Mohamed N. Darwish, Shih-Tzung Su
  • Patent number: 7898056
    Abstract: Disclosed is a seal-ring architecture that can minimize noise injection from noisy digital circuits to sensitive analog and/or radio frequency (RF) circuits in system-on-a-chip (SoC) applications. In order to improve the isolation, the seal-ring structure contains cuts and ground connections to the segment which is close to the analog circuits. The cuts are such that the architecture is fully compatible with standard design rules and that the mechanical strength of the seal rings is not significantly sacrificed. Some embodiments also include a grounded p-tap ring between the analog circuits and the inner seal ring in order to improve isolation. Some embodiments also include a guard strip between the analog circuits and the digital circuits to minimize the noise injection through the substrate.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: March 1, 2011
    Assignee: Alvand Technology, Inc.
    Inventors: Mansour Keramat, Syed S. Islam, Mehrdad Heshami
  • Patent number: 7829970
    Abstract: A junction barrier Schottky diode has an N-type well having surface and a first impurity concentration; a p-type anode region in the surface of the well, and having a second impurity concentration; and an N-type cathode region in the surface of the well and horizontally abutting the anode region, and having a third impurity concentration. A first N-type region vertically abuts the anode and cathode regions, and has a fourth impurity concentration. An ohmic contact is made to the anode and a Schottky contact is made to the cathode. The fourth impurity concentration is less than the first, second and third impurity concentrations.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: November 9, 2010
    Assignee: Intersil Americas Inc.
    Inventors: Dev Alok Girdhar, Michael David Church
  • Patent number: 7825017
    Abstract: A silicon carbide semiconductor device provided as a semiconductor chip includes a substrate, a drift layer on the substrate, an insulation film on the drift layer, a semiconductor element formed in a cell region of the drift layer, a surface electrode formed on the drift layer and electrically coupled to the semiconductor element through an opening of the insulation film, and a passivation film formed above the drift layer around the periphery of the cell region to cover an outer edge of the surface electrode. The passivation film has an opening through which the surface electrode is exposed outside. A surface of the passivation film is made uneven to increase a length from an inner edge of the opening of the passivation film to a chip edge measured along the surface of the passivation film.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: November 2, 2010
    Assignees: DENSO CORPORATION, Toyota Jidosha Kabushiki Kaisha
    Inventors: Takeo Yamamoto, Takeshi Endo, Eiichi Okuno, Masaki Konishi
  • Patent number: 7821095
    Abstract: In one embodiment, a Schottky diode is formed on a doped region having a thickness less than about eighteen microns.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: October 26, 2010
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Rogelio J. Moreno, Linghui Chen
  • Patent number: 7781869
    Abstract: A semiconductor device including a base layer of a first conductivity type having a first main surface and a second main surface opposite the first main surface, a first main electrode layer connected to the first main surface, control regions arranged inside grooves penetrating the first main electrode layer and reach inside the base layer, and a second main electrode layer of the first conductivity type and connected to the second main surface.
    Type: Grant
    Filed: August 4, 2006
    Date of Patent: August 24, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tomoki Inoue, Koichi Sugiyama, Hideaki Ninomiya, Tsuneo Ogura
  • Patent number: 7741693
    Abstract: Trenches are formed in a semiconductor substrate, where the trenches include an outer trench and multiple inner trenches within the outer trench. A metal-oxide semiconductor (MOS) device and a trench MOS Schottky barrier (TMBS) device are also formed in the semiconductor substrate using the trenches. The MOS device could include the outer trench, and the TMBS device could include the inner trenches. At least one of the inner trenches may contact the outer trench, and/or at least one of the inner trenches may be electrically isolated from the outer trench. The MOS device could represent a trench vertical double-diffused metal-oxide semiconductor (VDMOS) device, and the TMBS device may be monolithically integrated with the trench VDMOS device in the semiconductor substrate. A guard ring that covers portions of the inner trenches and that is open over other portions of the inner trenches could optionally be formed in the semiconductor substrate.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: June 22, 2010
    Assignee: National Semiconductor Corporation
    Inventor: Terry Dyer
  • Patent number: 7692262
    Abstract: A vertical rectifying and protection power diode, formed in a lightly-doped semiconductor layer of a first conductivity type, resting on a heavily-doped substrate of the first conductivity type, having a first ring-shaped region, of the first conductivity type more heavily-doped than the layer and more lightly doped than the substrate, surrounding an area of the layer and extending to the substrate; and a second ring-shaped region, doped of the second conductivity type, extending at the surface of the first region and on either side thereof; a first electrode having a thin layer of a material capable of forming a Schottky diode with the layer, resting on the area of the layer and on at least a portion of the second ring-shaped region with which it forms an ohmic contact.
    Type: Grant
    Filed: July 7, 2004
    Date of Patent: April 6, 2010
    Assignee: STMicroelectronics S.A.
    Inventors: Jean-Luc Morand, Emmanuel Collard, André Lhorte
  • Patent number: 7612426
    Abstract: A Schottky barrier diode includes a first semiconductor layer and a second semiconductor layer successively formed above a semiconductor substrate with a buffer layer formed between the first and second semiconductor layers and the semiconductor substrate. A Schottky electrode and an ohmic electrode spaced from each other are formed on the second semiconductor layer, and a back face electrode is formed on the back face of the semiconductor substrate. The Schottky electrode or the ohmic electrode is electrically connected to the back face electrode through a via penetrating through at least the buffer layer.
    Type: Grant
    Filed: November 15, 2005
    Date of Patent: November 3, 2009
    Assignee: Panasonic Corporation
    Inventors: Manabu Yanagihara, Yasuhiro Uemoto, Tsuyoshi Tanaka, Daisuke Ueda
  • Patent number: 7602036
    Abstract: A trench type junction barrier rectifier has silicon dioxide spacers at the bottom of trenches in a silicon surface and beneath the bottom of a conductive polysilicon filler in the trench. A Schottky barrier electrode is connected to the tops of the mesas and the tops of the polysilicon fillers. Further oxide spacers may be formed in the length of the polysilicon fillers.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: October 13, 2009
    Assignee: International Rectifier Corporation
    Inventors: Carmelo Sanfilippo, Rossano Carta
  • Publication number: 20090236679
    Abstract: An integrated circuit structure includes a semiconductor substrate; a well region of a first conductivity type over the semiconductor substrate; a metal-containing layer on the well region, wherein the metal-containing layer and the well region form a Schottky barrier; an isolation region encircling the metal-containing layer; and a deep-well region of a second conductivity type opposite the first conductivity type under the metal-containing layer. The deep-well region has at least a portion vertically overlapping a portion of the metal-containing layer. The deep-well region is vertically spaced apart from the isolation region and the metal-containing layer by the well region.
    Type: Application
    Filed: March 24, 2008
    Publication date: September 24, 2009
    Inventors: Puo-Yu Chiang, Tsai Chun Lin, Chih-Wen Albert Yao, David Ho
  • Patent number: 7576011
    Abstract: A method of forming a contact plug in a semiconductor device includes the steps of forming a plurality of select lines and a plurality of word lines on a semiconductor substrate; forming a first etching stop layer on the select lines and the word lines; forming a second etching stop layer on the first etching stop layer; forming an insulating layer on the second etching stop layer; removing the insulating layer placed between the select lines, the second etching stop layer and the first etching stop layer to form a contact hole through which a portion of the semiconductor substrate is exposed; and filling the contact hole with conductive material to form a contact plug, and so the nitride layer is thinly formed and the high dielectric layer is then formed to form the etching stop layer. Due to the above, a layer stress caused by the nitride layer can be minimized, and it is possible to resolve a problem of exposing the semiconductor substrate caused by a damage of the etching stop layer.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: August 18, 2009
    Assignee: Hynix Semiconductor Inc.
    Inventor: Chan Sun Hyun
  • Patent number: 7498651
    Abstract: Disclosed are a variety of junction termination structures for high voltage semiconductor power devices. The structures are specifically aimed at providing a high breakdown voltage while being constructed with a minimal number of process steps. The combination of an RIE etch and/or implantation and anneal process with a finely patterned mesh provides the desired radial gradient for maximum breakdown voltage. The structures provide control of both the conductivity and charge density within the region. These structures can beneficially be applied to all high voltage semiconductor device structures, but are of particular interest for wide bandgap devices as they tend to have very high breakdown fields and scaled dimensions of the depletion layer width.
    Type: Grant
    Filed: November 23, 2005
    Date of Patent: March 3, 2009
    Assignee: Microsemi Corporation
    Inventor: Bart Van Zeghbroeck
  • Patent number: 7388272
    Abstract: A chip package including a carrier, a chip, a stiffener and a molding compound is provided. A producing method of the chip package includes the steps of disposing a bottom surface of the chip on the carrier; covering an edge of a top surface of the chip with the stiffener for protecting the edge; then wire bonding the top surface of the chip with the carrier; and forming the molding compound for encapsulating the chip, the stiffener and parts of the carrier.
    Type: Grant
    Filed: December 12, 2005
    Date of Patent: June 17, 2008
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventor: Yi-Chuan Ding
  • Patent number: 7307329
    Abstract: An electronic device includes a substrate, an insulating layer arranged on the substrate, the insulating layer having an opening in an area of the surface of the substrate, an active layer arranged within the opening on the surface of the substrate, the active layer including a guard ring in those areas of the surface and of the active layer which are adjacent to the insulating layer, and a contacting layer arranged on an area of the active layer, the contact layer being adjacent to an area of the guard ring. The device may be produced by a process of three-fold self-alignment, to be precise utilizing a spacer process by means of which a diffusion source having a lateral extension far below the lithography limit is made possible.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: December 11, 2007
    Assignee: Infineon Technologies AG
    Inventors: Cartens Ahrens, Ulf Bartl, Bernd Eisener, Wolfgang Hartung, Christian Herzum, Raimund Peichl, Stefan Pompl, Hubert Werthmann
  • Patent number: 7265436
    Abstract: A method of forming an improved seal ring structure is described. A continuous metal seal ring is formed along a perimeter of a die wherein the metal seal ring is parallel to the edges of the die and sloped at the corner of the die so as not to have a sharp corner and wherein the metal seal ring has a first width at the corners and a second width along the edges wherein the first width is wider than the second width.
    Type: Grant
    Filed: February 17, 2004
    Date of Patent: September 4, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-Chun Huang, Chih-Hsiang Yao, Kuan-Shou Chi
  • Patent number: 7211500
    Abstract: A pre-process before cutting a wafer is described. The wafer includes a plurality of scribe lines and a plurality of dies defined by the scribe lines, and a material layer covers the wafer. A pre-processing step is performed to remove the material layer on the scribe lines close to the corner regions of the dies. Removing the material layer at the corner regions before cutting the wafer is able to preserve the integrity of the corner regions of the cut dies.
    Type: Grant
    Filed: September 27, 2004
    Date of Patent: May 1, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Kuo-Ming Chen, Kun-Chih Wang, Hermen Liu, Paul Chen, Kai-Kuang Ho
  • Patent number: 7199442
    Abstract: A SiC Schottky barrier diode (SBD) is provided having a substrate and two or more epitaxial layers, including at least a thin, lightly doped N-type top epitaxial layer, and an N-type epitaxial layer on which the topmost epitaxial layer is disposed. Multiple epitaxial layers support the blocking voltage of the diode, and each of the multiple epitaxial layers supports a substantial portion of the blocking voltage. Optimization of the thickness and dopant concentrations of at least the top two epitaxial layers results in reduced capacitance and switching losses, while keeping effects on forward voltage and on-resistance low. Alternatively, the SBD includes a continuously graded N-type doped region whose doping varies from a lighter dopant concentration at the top of the region to a heavier dopant concentration at the bottom.
    Type: Grant
    Filed: July 15, 2004
    Date of Patent: April 3, 2007
    Assignee: Fairchild Semiconductor Corporation
    Inventor: Praveen M. Shenoy
  • Patent number: 7176537
    Abstract: A semiconductor device having a metal/metal silicide gate and a Schottky source/drain and a method of forming the same are provided. The semiconductor device includes a gate dielectric overlying a semiconductor substrate, a metal or metal silicide gate electrode having a work function of less than about 4.3 eV or greater than about 4.9 eV overlying the gate dielectric, a spacer having a thickness of less than about 100 ? on a side of the gate electrode, and a Schottky source/drain having a work function of less than about 4.3 eV or greater than about 4.9 eV wherein the Schottky source/drain region overlaps the gate electrode. The Schottky source/drain region preferably has a thickness of less than about 300 ?.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: February 13, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lee, Chung-Hu Ke, Min-Hwa Chi
  • Patent number: 7129558
    Abstract: A chip-scale schottky package which has at least one cathode electrode and at least one anode electrode disposed on only one major surface of a die, and solder bumps connected to the electrode for surface mounting of the package on a circuit board.
    Type: Grant
    Filed: November 6, 2002
    Date of Patent: October 31, 2006
    Assignee: International Rectifier Corporation
    Inventor: Slawomir Skocki
  • Patent number: 7112865
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: March 3, 2005
    Date of Patent: September 26, 2006
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 7102207
    Abstract: A semiconductor device including a base layer of a first conductivity type having a first main surface and a second main surface opposite the first main surface, a first main electrode layer connected to the first main surface, control regions arranged inside grooves penetrating the first main electrode layer and reach inside the base layer, and a second main electrode layer of the first conductivity type and connected to the second main surface.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: September 5, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tomoki Inoue, Koichi Sugiyama, Hideaiki Ninomiya, Tsuneo Ogura
  • Patent number: 7078783
    Abstract: A vertical unipolar component formed in a semiconductor substrate. An upper portion of the substrate includes insulated trenches filled with a vertical multiple-layer of at least two conductive elements separated by an insulating layer, the multiple-layer depth being at most equal to the thickness of the upper portion.
    Type: Grant
    Filed: January 29, 2004
    Date of Patent: July 18, 2006
    Assignee: STMicroelectronics S.A.
    Inventor: Frédéric Lanois
  • Patent number: 7071525
    Abstract: A Merged P-i-N Schottky device in which the oppositely doped diffusions extend to a depth and have been spaced apart such that the device is capable of absorbing a reverse avalanche energy comparable to a Fast Recovery Epitaxial Diode having a comparatively deeper oppositely doped diffusion region.
    Type: Grant
    Filed: January 27, 2004
    Date of Patent: July 4, 2006
    Assignee: International Rectifier Corporation
    Inventors: Davide Chiola, Kohji Andoh, Silvestro Fimiani
  • Patent number: 6936905
    Abstract: A power Schottky rectifier device and method of making the same are disclosed. The Schottky rectifier device including a LOCOS structure and two p-type doping regions, which are positioned one above another therein to isolate cells so as to avoid premature of breakdown voltage. The Schottky rectifier device comprises: an n? drift layer formed on an n+ substrate; a cathode metal layer formed on a surface of the n+ substrate opposite the n? drift layer; a pair of field oxide regions and termination region formed into the n? drift layer and each spaced from each other by the mesas, where the mesas have metal silicide layer formed thereon. A top metal layer formed on the field oxide regions and termination region and contact with the silicide layer.
    Type: Grant
    Filed: April 24, 2003
    Date of Patent: August 30, 2005
    Assignees: Chip Integration Tech Co., Ltd.
    Inventor: Shye-Lin Wu
  • Patent number: 6855999
    Abstract: A method for fabricating a Schottky diode using a shallow trench contact to reduce leakage current in the fabrication of an integrated circuit device is described. An insulating layer is deposited over a thermal oxide layer provided overlying a silicon semiconductor substrate. A contact opening is etched through the insulating layer and the thermal oxide layer to the silicon substrate. The contact opening is overetched whereby a shallow trench is formed within the silicon substrate underlying the contact opening wherein the shallow trench has a bottom and sidewalls comprising the silicon substrate. A first metal layer is deposited over the insulating layer and within the contact opening and within the shallow trench.
    Type: Grant
    Filed: September 6, 2002
    Date of Patent: February 15, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co.
    Inventors: Jei-Fung Hwang, Ruey-Hsing Liou, Chih-Kang Chiu
  • Patent number: 6798034
    Abstract: A passive mechanism suppresses injection, into any active guard regions interposed between the edge of a photodiode array chip and the outer photodiode pixels or into the outer pixels themselves, of minority carrier current generated in the physically disrupted region at the edge of the semiconductor die created by cleaving, sawing or otherwise separating the chip from the remainder of the wafer on which the die was fabricated. A thin metallic layer covers all or part of the edge region, thereby creating a Schottky barrier. This barrier generates a depletion region in the adjacent semiconductor material. The depletion region inherently creates an energy band distribution which preferentially accelerates minority carriers generated or near the metal-semiconductor interface towards the metal, thereby suppressing collection of these carriers by any active regions of the guard structure or by the photodiode pixels.
    Type: Grant
    Filed: August 7, 2002
    Date of Patent: September 28, 2004
    Assignee: Diglrad Corporation
    Inventor: Lars S. Carlson
  • Patent number: 6787871
    Abstract: An integrated Schottky barrier diode chip includes a compound semiconductor substrate, a plurality of Schottky barrier diodes formed on the substrate and an insulating region formed on the substrate by an on implantation. The insulating region electrically separates a portion of a diode at a cathode voltage from a portion of the diode at an anode voltage. Because of the absence of a polyimide layer and trench structures, this planar device configuration results in simpler manufacturing method and improved device characteristics.
    Type: Grant
    Filed: October 30, 2002
    Date of Patent: September 7, 2004
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Tetsuro Asano, Katsuaki Onoda, Yoshibumi Nakajima, Shigeyuki Murai, Hisaaki Tominaga, Koichi Hirata, Mikito Sakakibara, Hidetoshi Ishihara
  • Patent number: 6740951
    Abstract: A Schottky rectifier includes a semiconductor structure having first and second opposing faces each extending to define an active semiconductor region and a termination semiconductor region. The semiconductor structure includes a cathode region of the first conductivity type adjacent the first face and a drift region of the first conductivity type adjacent the second face. The drift region has a lower net doping concentration than that of the cathode region. A plurality of trenches extends from the second face into the semiconductor structure and defines a plurality of mesas within the semiconductor structure. At least one of the trenches is located in each of the active and the termination semiconductor regions. A first insulating region is located adjacent the semiconductor structure in the plurality of trenches. A second insulating region electrically isolates the active semiconductor region from the termination semiconductor region.
    Type: Grant
    Filed: May 22, 2001
    Date of Patent: May 25, 2004
    Assignee: General Semiconductor, Inc.
    Inventors: Yan Man Tsui, Fwu-Iuan Hshieh, Koon Chong So
  • Publication number: 20040089908
    Abstract: A Schottky diode is fabricated by a sequence of fabrication by a sequence of fabrication steps. An active region of a semiconductor substrate is defined in which a Schottky diode is fabricated. At least first and second layers of insulating material are applied over the active area. A first layer of insulating material, having a first etching rate, is applied over the active area. A second layer of insulating material having a second, greater, etch rate is applied over the first layer of insulating material to a thickness that is about twice the thickness of the first layer of insulating material. The insulating material is patterned and a window is etched through the layers of insulating material to the semiconductor substrate. Metal is applied and unwanted metal is etched away leaving metal in the window forming a Schottky contact therein. One or more barrier layers may be employed.
    Type: Application
    Filed: October 29, 2003
    Publication date: May 13, 2004
    Inventors: John Charles Desko, Michael J. Evans, Chung-Ming Hsieh, Tzu-Yen Hsieh, Bailey R. Jones, Thomas J. Krutsick, John Michael Siket, Brian Eric Thompson, Steven W. Wallace
  • Patent number: 6734520
    Abstract: A semiconductor component includes a first layer and at least one adjacent semiconductor layer or metallic layer, which forms a rectifying junction with the first layer. Further semiconductor layers and metallic layers are provided for contacting the component. Insulating or semi-insulating structures are introduced into the first layer in a plane parallel to the rectifying junction. These structures are shaped like dishes with their edges bent up towards the rectifying junction. A method of producing such a semiconductor component is also provided.
    Type: Grant
    Filed: May 18, 2001
    Date of Patent: May 11, 2004
    Assignee: Infineon Technologies AG
    Inventors: Holger Kapels, Dieter Silber, Robert Plikat
  • Patent number: 6717229
    Abstract: A diode (20), having first and second conductive layers (24,26), a conductive pad (28), and a distributed reverse surge guard (22), provides increased protection from reverse current surges. The surge guard (22) includes an outer loop (42) of P+-type surge guard material and an inner grid (44) of linear sections (46, 48) which form a plurality of inner loops extending inside the outer loop (42). The surge guard (22) distributes any reverse current over the area of the conductive pad (28) to provide increased protection from transient threats such as electrostatic discharge (ESD) and during electrical testing.
    Type: Grant
    Filed: March 11, 2002
    Date of Patent: April 6, 2004
    Assignee: Fabtech, Inc.
    Inventors: Walter R. Buchanan, Roman J. Hamerski, Wayne A. Smith
  • Patent number: 6707127
    Abstract: A Schottky rectifier is provided. The Schottky rectifier comprises: (a) a semiconductor region having first and second opposing faces, with the semiconductor region comprising a cathode region of first conductivity type adjacent the first face and a drift region of the first conductivity type adjacent the second face, and with the drift region having a lower net doping concentration than that of the cathode region; (b) one or more trenches extending from the second face into the semiconductor region and defining one or more mesas within the semiconductor region; (c) an insulating region adjacent the semiconductor region in lower portions of the trench; (d) and an anode electrode that is (i) adjacent to and forms a Schottky rectifying contact with the semiconductor at the second face, (ii) adjacent to and forms a Schottky rectifying contact with the semiconductor region within upper portions of the trench and (iii) adjacent to the insulating region within the lower portions of the trench.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: March 16, 2004
    Assignee: General Semiconductor, Inc.
    Inventors: Fwu-Iuan Hshieh, Max Chen, Koon Chong So, Yan Man Tsui
  • Patent number: 6707128
    Abstract: A semiconductor device comprises a first semiconductor layer of a first conductivity type provided on a semiconductor substrate of the first conductivity type, a base layer of a second conductivity type provided in the first semiconductor layer, for defining a vertical MISFET including source regions and a gate electrode on a gate insulation film, a Schottky barrier diode (SBD)-forming region provided in the first semiconductor layer around the base layer, a guard ring region of the second conductivity type provided around SBD-forming region, a first main electrode disposed above the first semiconductor layer and provided in common as both a source electrode of the MISFET and an anode of the SBD, a surface gate electrode disposed above the first semiconductor layer, and a second main electrode provided in common as a drain electrode of the MISFET and a cathode of the SBD.
    Type: Grant
    Filed: June 10, 2002
    Date of Patent: March 16, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kouji Moriguchi, Yoshitaka Hokomoto
  • Patent number: 6670688
    Abstract: A semiconductor device which can prevent an operation thereof from being uncontrollable to obtain a high reliability, and can be manufactured easily and can reduce a manufacturing cost. A p-type impurity layer containing a p-type impurity in a relatively high concentration is provided as an operation region of a diode in one of main surfaces of a silicon substrate containing an n-type impurity in a relatively low concentration and a plurality of ring-shaped Schottky metal layers are concentrically provided on the main surface of the silicon substrate around the p-type impurity layer with a space formed therebetween to surround the p-type impurity layer. A silicon oxide film is provided on the main surface of the silicon substrate around the p-type impurity layer and an anode electrode is provided on the p-type impurity layer.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: December 30, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Katsumi Satoh, Eisuke Suekawa
  • Patent number: 6653707
    Abstract: A preferred embodiment of the present invention provides a Schottky diode (100) formed from a conductive anode contact (102), a semiconductor junction layer (104) supporting the conductive contact (102) and a base layer ring (108) formed around at least a portion of the conductive anode contact (102). In particular, the base layer ring (108) has material removed to form a base layer material gap (118) (e.g., a vacuum gap) adjacent to the conductive anode contact (102). A dielectric layer (110) is also provided to form one boundary of the base layer material gap (118).
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: November 25, 2003
    Assignee: Northrop Grumman Corporation
    Inventors: Donald J. Sawdai, Augusto L. Gutierrez-Aitken
  • Patent number: 6627967
    Abstract: A Schottky barrier diode has a Schottky contact region formed in an n epitaxial layer disposed on a GaAs substrate and an ohmic electrode surrounding the Schottky contact region. The ohmic electrode is disposed directly on an impurity-implanted region formed on the substrate. An insulating region is formed through the n epitaxial layer so that an anode bonding pad is isolated form other elements of the device at a cathode voltage. The planar configuration of this device does not include the conventional polyimide layer, and thus has a better high frequency characteristics than conventional devices.
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: September 30, 2003
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Tetsuro Asano, Katsuaki Onada, Yoshibumi Nakajima, Shigeyuki Murai, Hisaaki Tominaga, Koichi Hirata, Mikito Sakakibara, Hidetoshi Ishihara
  • Patent number: 6583485
    Abstract: The invention relates to a semiconductor device, in particular a Schottky hybrid diode with a guard ring (S). The semiconductor device comprises a semiconductor substrate (1), an epitaxial layer (2) on which an insulating layer (3) with an opening (10) is deposited, with a Schottky metal layer (9) covering the epitaxial layer (2) lying at the bottom of the opening (10), and with an annular semiconductor region (4) which is present in the epitaxial layer (2). A doping region (6) is present in the epitaxial layer (2) along the outer contour of the semiconductor device, and in addition an oxide layer (8) is present on the epitaxial layer (2).
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: June 24, 2003
    Assignee: Koninklijke Philips Electronics N.V.
    Inventor: Thomas Epke
  • Patent number: 6576973
    Abstract: A vertical Schottky diode including an N-type silicon carbide layer of low doping level formed by epitaxy on a silicon carbide substrate of high doping level. The periphery of the active area of the diode is coated with a P-type epitaxial silicon carbide layer. A trench crosses the P-type epitaxial layer and penetrates into at least a portion of the height of the N-type epitaxial layer beyond the periphery of the active area. The doping level of the P-type epitaxial layer is chosen so that, for the maximum voltage that the diode is likely to be subjected to, the equipotential surfaces corresponding to approximately ¼ to ¾ of the maximum voltage extend up to the trench.
    Type: Grant
    Filed: December 22, 2000
    Date of Patent: June 10, 2003
    Assignee: STMicroelectronics S.A.
    Inventors: Emmanuel Collard, André Lhorte
  • Patent number: 6551911
    Abstract: A method for producing Schottky diodes having a protective ring in an edge region of a Schottky contact. The protective ring is produced by a protective ring material that is deposited onto a surface of a semiconductor layer, which surface is provided with a patterned masking layer beforehand, and the protective ring material subsequently being siliconized. In this case, the protective ring material constitutes a metal, in particular a high barrier metal, which has, in particular, platinum.
    Type: Grant
    Filed: January 26, 2000
    Date of Patent: April 22, 2003
    Assignee: Infineon Technologies AG
    Inventors: Reinhard Losehand, Hubert Werthmann
  • Publication number: 20030052383
    Abstract: A high-speed, soft-recovery semiconductor device that reduces leakage current by increasing the Schottky ratio of Schottky contacts to pn junctions. In one embodiment of the present invention, an n− drift layer is formed on an n+ cathode layer 1 by epitaxial growth, and ring-shaped ring trenches having a prescribed width are formed in the n− drift layer. Oxide films are formed on the side walls of each ring trench. The ring trenches are arranged such that the centers of the rings of the ring trenches adjacent to one another form a triangular lattice unit. A p− anode layer is formed at the bottom of each ring trench. Schottky contacts are formed at the interface between an anode electrode and the surface of the n− drift layer. Ohmic contact is established between the surfaces of polysilicon portions and the anode electrode.
    Type: Application
    Filed: August 2, 2002
    Publication date: March 20, 2003
    Applicant: Fuji Electric Co., Ltd.
    Inventors: Michio Nemoto, Tatsuya Naito, Masahito Otsuki, Mitsuaki Kirisawa
  • Patent number: 6531743
    Abstract: A device isolation region made up of a silicon oxide film, which is perfectly isolated up to the direction of the thickness of an SOI silicon layer, and an activation region of the SOI silicon layer, whose only ends are locally thinned, are formed on an SOI substrate. A source diffusion layer and a drain diffusion layer of a MOS field effect transistor in the activation region are provided so that according to the silicidization of the SOI silicon layer subsequent to the formation of a high melting-point metal, a Schottky junction is formed only at each end of the activation region and a PN junction is formed at a portion other than each end thereof.
    Type: Grant
    Filed: January 14, 2002
    Date of Patent: March 11, 2003
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Norio Hirashita, Takashi Ichimori
  • Publication number: 20030025175
    Abstract: A Schottky barrier diode has a Schottky electrode formed on an operation region of a GaAs substrate and an ohmic electrode surrounding the Schottky electrode. The ohmic electrode is disposed directly on an impurity-implanted region formed on the substrate. A nitride film insulates the ohmic electrode from a wiring layer connected to the Schottky electrode crossing over the ohmic electrode. The planar configuration of this device does not include the conventional polyimide layer, and thus has a better high frequency characteristics than conventional devices.
    Type: Application
    Filed: July 26, 2002
    Publication date: February 6, 2003
    Applicant: Sanyo Electric Company, Ltd.
    Inventors: Tetsuro Asano, Katsuaki Onoda, Yoshibumi Nakajima, Shigeyuki Murai, Hisaaki Tominaga, Koichi Hirata, Mikito Sakakibara, Hidetoshi Ishihara
  • Patent number: 6509622
    Abstract: An integrated circuit including a die having a circuit area and a plurality of guard rings. The circuit area includes active devices, passive devices, and interconnects connected to form an integrated circuit. The plurality of guard rings includes a plurality of stacked guard rings having substantially equal widths and encircling the circuit area. Alternatively, the plurality of guard rings includes metallization level guard rings interleaved with one or more via level guard rings. Each of the one or more via level guard rings includes one or more guard rings encircling the circuit area. Alternatively, the plurality of guard rings includes a plurality of concentric guard rings encircling the circuit area. Each of the plurality of guard rings is fabricated from a metal, such as aluminum, copper, or silver, or an alloy of aluminum, copper, or silver.
    Type: Grant
    Filed: August 23, 2000
    Date of Patent: January 21, 2003
    Assignee: Intel Corporation
    Inventors: Qing Ma, Jin Lee, Quan Tran, Harry Fujimoto
  • Patent number: 6476456
    Abstract: A Schottky contact is formed in the area of a MOSgated device semiconductor device chip which is occupied by a source pad. The Schottky contact is formed by the direct contact of the aluminum source electrode to the silicon chip in the source area. A different barrier metal can be used for the Schottky. A guard ring diffusion surrounds the Schottky metal.
    Type: Grant
    Filed: May 3, 2000
    Date of Patent: November 5, 2002
    Assignee: International Rectifier Corporation
    Inventor: Milton J. Boden, Jr.