With Means To Prevent Edge Breakdown Patents (Class 257/483)
  • Patent number: 11676995
    Abstract: A semiconductor device includes a semiconductor body, an electrode provided on a surface of the semiconductor body. The semiconductor body includes a first semiconductor layer and a second semiconductor layer provided between the first semiconductor layer and the second electrode. The second semiconductor layer includes first and second regions arranged along the surface of the semiconductor body. The first region has a surface contacting the electrode, and the second region includes second conductivity type impurities with a concentration lower than a concentration of the second conductivity type impurities at the surface of the first region. The second semiconductor layer has a first concentration of second conductivity type impurities at a first position in the second region, and a second concentration of second conductivity type impurities at a second position between the first position and the electrode, the second concentration being lower than the first concentration.
    Type: Grant
    Filed: June 21, 2019
    Date of Patent: June 13, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Masato Izumi, Kazutoshi Nakamura
  • Patent number: 11322581
    Abstract: According to one embodiment, a semiconductor device includes first, second, and third electrodes, first and fourth semiconductor regions of a first conductivity type, and second and third semiconductor regions of a second conductivity type. The third semiconductor region is provided around the second semiconductor region along a first plane crossing a first direction from the first electrode toward the first semiconductor region and is separated from the second semiconductor region. The fourth semiconductor region is provided around the third semiconductor region along the first plane, and has a greater impurity concentration of the first conductivity type than the first semiconductor region. The second electrode is provided on the second semiconductor region and is electrically connected to the second semiconductor region.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: May 3, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Kenichi Matsushita
  • Patent number: 10964825
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: March 30, 2021
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 10930798
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: February 23, 2021
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 10763339
    Abstract: A semiconductor device includes an n-doped monocrystalline semiconductor substrate having a substrate surface, an amorphous n-doped semiconductor surface layer at the substrate surface of the n-doped monocrystalline semiconductor substrate, and a Schottky-junction forming material in contact with the amorphous n-doped semiconductor surface layer. The Schottky-junction forming material forms at least one Schottky contact with the amorphous n-doped semiconductor surface layer.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: September 1, 2020
    Assignee: Infineon Technologies Austria AG
    Inventors: Jens Peter Konrath, Ronny Kern, Stefan Krivec, Ulrich Schmid, Laura Stoeber
  • Patent number: 10665728
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: May 26, 2020
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 10497816
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of SiC, a Schottky electrode formed to come into contact with at least a portion of a surface of the semiconductor layer, a field region surrounding the Schottky electrode, an annular trench formed on the field region and surrounding the Schottky electrode and a second conductivity type layer formed under a portion of the Schottky electrode outside at least the portion of the surface of the semiconductor layer.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: December 3, 2019
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 10333005
    Abstract: In a general aspect, a device can include a substrate, a first pillar of a first conductivity type, a second pillar of a second conductivity type, the first pillar and the second pillar being alternately disposed, and a metal layer having a first portion disposed on the first pillar and a second portion disposed on the second pillar. The first portion of the metal layer can be wider than the second portion of the metal layer.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: June 25, 2019
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Wonhwa Lee, Kwangwon Lee, Jaegil Lee
  • Patent number: 10249794
    Abstract: A diode including a vertical stack of first and second semiconductor regions having opposite conductivity types, and a first electrode for biasing its first region arranged in a trench extending from the surface of the second region opposite to the first region, the first electrode including, in top view, the following conductive elements: a polygonal ring; for each vertex of the polygonal ring, a first rectilinear bar extending between the vertex and the center of the ring, substantially along a direction running from the vertex to the center of the ring; and for each first bar, a plurality of second rectilinear bars extending from the first bar substantially parallel to the sides of the ring, starting from the vertex forming the origin of the first bar.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: April 2, 2019
    Assignee: Commissariat à l'Énegie Atomique et aux Énergies Alternatives
    Inventors: Hubert Bono, Jonathan Garcia
  • Patent number: 10229889
    Abstract: Aspects of the disclosure provide an integrated circuit (IC) formed on a die. The IC includes first one or more electronic circuits and a seal ring structure. The first one or more electronic circuits are disposed on a first semiconductor substrate. The first semiconductor substrate is diced from a semiconductor wafer. The seal ring structure is configured to surround the first one or, more electronic circuits. The seal ring structure is formed by patterning one or more layers of metal compounds on the semiconductor wafer using two or more circuit formation process steps. The seal ring structure includes a remaining portion of a complete seal ring structure after a dicing process step that cuts the complete seal ring structure. The complete seal ring structure has been formed on the semiconductor wafer to surround the first one or more electronic circuits and at least second one or more electronic circuits on a second semiconductor substrate that is diced from the semiconductor wafer.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: March 12, 2019
    Assignee: Marvell Israel (M.I.S.I.) Ltd.
    Inventors: Abed Tatour, Carol Pincu
  • Patent number: 10157979
    Abstract: We disclose a high voltage semiconductor device comprising a semiconductor substrate of a second conductivity type; a semiconductor drift region of the second conductivity type disposed over the semiconductor substrate, the semiconductor substrate region having higher doping concentration than the drift region; a semiconductor region of a first conductivity type, opposite to the second conductivity type, formed on the surface of the device and within the semiconductor drift region, the semiconductor region having higher doping concentration than the drift region; and a lateral extension of the first conductivity type extending laterally from the semiconductor region into the drift region, the lateral extension being spaced from a surface of the device.
    Type: Grant
    Filed: September 17, 2015
    Date of Patent: December 18, 2018
    Assignee: Anvil Semiconductors Limited
    Inventors: Peter Ward, Neophytos Lophitis, Tanya Trajkovic, Florin Udrea
  • Patent number: 10056502
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: August 21, 2018
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 9966462
    Abstract: Implementations of semiconductor devices may include: a plurality of drain fingers and a plurality of source fingers interdigitated with one another; at least one gate; and at gate bus formed to completely surround the plurality of drain fingers and the plurality of source fingers; wherein the gate bus is mechanically and electrically coupled to the at least one gate.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: May 8, 2018
    Assignee: Semiconductor Components Industries LLC
    Inventors: Woochul Jeon, Chun-Li Liu, Ali Salih
  • Patent number: 9627552
    Abstract: A method for fabricating a diode is disclosed. In one embodiment, the method includes forming a Schottky contact on an epitaxial layer of silicon carbide (SiC) and annealing the Schottky contact at a temperature in the range of 300° C. to 700° C. The Schottky contact is formed of a layer of molybdenum.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: April 18, 2017
    Assignee: VISHAY-SILICONIX
    Inventor: Giovanni Richieri
  • Patent number: 9595617
    Abstract: A MOS P-N junction diode includes a semiconductor substrate, a mask layer, a guard ring, a gate oxide layer, a polysilicon structure, a central conductive layer, a silicon nitride layer, a metal diffusion layer, a channel region, and a metal sputtering layer. For manufacturing the MOS P-N junction diode, a mask layer is formed on a semiconductor substrate. A gate oxide layer is formed on the semiconductor substrate, and a polysilicon structure is formed on the gate oxide layer. A guard ring, a central conductive layer and a channel region are formed in the semiconductor substrate. A silicon nitride layer is formed on the central conductive layer. A metal diffusion layer is formed within the guard ring and the central conductive layer. Afterwards, a metal sputtering layer is formed, and the mask layer is partially exposed.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: March 14, 2017
    Assignee: PFC DEVICE HOLDINGS LTD
    Inventors: Hung-Hsin Kuo, Mei-Ling Chen
  • Patent number: 9496420
    Abstract: A method for fabricating a diode is disclosed. In one embodiment, the method includes forming a Schottky contact on an epitaxial layer of silicon carbide (SiC) and annealing the Schottky contact at a temperature in the range of 300° C. to 700° C. The Schottky contact is formed of a layer of molybdenum.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: November 15, 2016
    Assignee: Vishay-Siliconix
    Inventor: Giovanni Richieri
  • Patent number: 9446947
    Abstract: A MEMS device is formed by forming a sacrificial layer over a substrate and forming a first metal layer over the sacrificial layer. Subsequently, the first metal layer is exposed to an oxidizing ambient which oxidizes a surface layer of the first metal layer where exposed to the oxidizing ambient, to form a native oxide layer of the first metal layer. A second metal layer is subsequently formed over the native oxide layer of the first metal layer. The sacrificial layer is subsequently removed, forming a released metal structure.
    Type: Grant
    Filed: August 25, 2014
    Date of Patent: September 20, 2016
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Earl Vedere Atnip, Raul Enrique Barreto, Kelly J. Taylor
  • Patent number: 9224860
    Abstract: A trench-gate type semiconductor device that can prevent breakdown of a gate insulating film caused by a displacement current flowing into a protective diffusion layer at a portion of a trench underlying a gate electrode at a turn-off time and simultaneously improves a current density by narrowing a cell pitch. The semiconductor device includes a gate electrode embedded into a trench penetrating a base region. The gate electrode is disposed into a lattice shape in a planar view, and a protective diffusion layer is formed in a drift layer at the portion underlying thereof. At least one of blocks divided by the gate electrode is a protective contact region on which the trench is entirely formed. A protective contact for connecting the protective diffusion layer at a bottom portion of the trench and a source electrode is disposed on the protective contact region.
    Type: Grant
    Filed: December 5, 2011
    Date of Patent: December 29, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yasuhiro Kagawa, Akihiko Furukawa, Shiro Hino, Hiroshi Watanabe, Masayuki Imaizumi
  • Patent number: 9159562
    Abstract: A Schottky junction type semiconductor device in which the opening width of a trench can be decreased without deteriorating the withstanding voltage. The cross sectional shape of a trench has a shape of a sub-trench in which the central portion is higher and the periphery is lower at the bottom of the trench, and a p type impurity is introduced vertically to the surface of the drift layer thereby forming a p+ SiC region, which is formed in contact to the inner wall of the trench having the sub-trench disposed therein, such that the junction position is formed more deeply in the periphery of the bottom of the trench than the junction position in the central portion of the bottom of the trench.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: October 13, 2015
    Assignee: Hitachi, Ltd.
    Inventors: Kumiko Konishi, Natsuki Yokoyama, Norifumi Kameshiro
  • Patent number: 9000538
    Abstract: A downsized semiconductor device having an excellent reverse characteristic, and a method of manufacturing the semiconductor device is sought to improve. The semiconductor device comprises a semiconductor body having a polygonal contour. An active area is formed in the semiconductor body. An EQR electrode is formed so as to surround the active area and to have curved portions of the EQR electrode along the corners of the semiconductor body. An interlayer insulating film is formed to cover the active area and the EQR electrode. The EQR electrode is embedded in the interlayer insulating film around the active area. EQR contacts are in contact with the curved portions of the EQR electrode and the semiconductor body outside the curved portions, and have at least side walls covered with the interlayer insulating film.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: April 7, 2015
    Assignee: Renesas Electronics Corporation
    Inventor: Kouichi Murakawa
  • Patent number: 8975720
    Abstract: A superjunction device and methods for layout design and fabrication of a superjunction device are disclosed. A layout of active cell column structures can be configured so that a charge due to first conductivity type dopants balances out charge due to second conductivity type dopants in a doped layer in an active cell region. A layout of end portions of the active cell column structures proximate termination column structures can be configured so that a charge due to the first conductivity type dopants in the end portions and a charge due to the first conductivity type dopants in the termination column structures balances out charge due to the second conductivity type dopants in a portion of the doped layer between the termination column structures and the end portions.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: March 10, 2015
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Lingpeng Guan, Madhur Bobde
  • Patent number: 8963273
    Abstract: A method for forming a back-side illuminated image sensor, including the steps of: a) forming, from the front surface, doped polysilicon regions, of a conductivity type opposite to that of the substrate, extending in depth orthogonally to the front surface and emerging into the first layer; b) thinning the substrate from its rear surface to reach the polysilicon regions, while keeping a strip of the first layer; c) depositing, on the rear surface of the thinned substrate, a doped amorphous silicon layer, of a conductivity type opposite to that of the substrate; and d) annealing at a temperature capable of transforming the amorphous silicon layer into a crystallized layer.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: February 24, 2015
    Assignees: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SAS
    Inventors: Michel Marty, François Roy, Jens Prima
  • Patent number: 8957494
    Abstract: A high-voltage Schottky diode and a manufacturing method thereof are disclosed in the present disclosure. The diode includes: a P-type substrate and two N-type buried layers, a first N-type buried layer is located below a cathode lead-out area, and a second N-type buried layer is located below a cathode region; an epitaxial layer; two N-type well regions located on the epitaxial layer, a first N-type well region is a lateral drift region and it is provided with a cathode lead-out region, and a second N-type well region is located on the second N-type buried layer and it is a cathode region; a first P-type well region located on the second N-type buried layer and surrounding the cathode region; a field oxide isolation region located on the lateral drift region; an anode located on the cathode region and a cathode located on the surface of the cathode lead-out region.
    Type: Grant
    Filed: October 23, 2012
    Date of Patent: February 17, 2015
    Assignee: CSMC Technologies FAB1 Co., Ltd.
    Inventor: Lihui Gu
  • Patent number: 8946725
    Abstract: A semiconductor structure includes a GaN substrate with a first surface and a second surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. A first electrode is electrically coupled to the second surface of the GaN substrate. The semiconductor structure further includes a first GaN epitaxial layer of the first conductivity type coupled to the first surface of the GaN substrate and a second GaN layer of a second conductivity type coupled to the first GaN epitaxial layer. The first GaN epitaxial layer comprises a channel region. The second GaN epitaxial layer comprises a gate region and an edge termination structure. A second electrode coupled to the gate region and a third electrode coupled to the channel region are both disposed within the edge termination structure.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: February 3, 2015
    Assignee: Avogy, Inc.
    Inventors: Donald R. Disney, Hui Nie, Isik C. Kizilyalli, Richard J. Brown
  • Publication number: 20150028445
    Abstract: In a Schottky diode having an n+-type substrate, an n-type epitaxial layer, at least two p-doped trenches introduced into the n-type epitaxial layer, mesa regions between adjacent trenches, a metal layer functioning as a cathode electrode, and another metal layer functioning as an anode electrode, the thickness of the epitaxial layer is more than four times the depth of the trenches.
    Type: Application
    Filed: November 12, 2012
    Publication date: January 29, 2015
    Inventors: Ning Qu, Alfred Goerlach
  • Patent number: 8921969
    Abstract: A chip-scale schottky package which has at least one cathode electrode and at least one anode electrode disposed on only one major surface of a die, and solder bumps connected to the electrode for surface mounting of the package on a circuit board.
    Type: Grant
    Filed: October 18, 2006
    Date of Patent: December 30, 2014
    Assignee: Siliconix Technology C. V.
    Inventor: Slawomir Skocki
  • Publication number: 20140312452
    Abstract: A termination region structure of a semiconductor device is provided, which includes: a semiconductor layer; a plurality of trenches, formed on a surface of the semiconductor layer; a connecting trench, formed on the surface of the semiconductor layer, for connecting two adjacent trenches in the plurality of trenches; a first insulating layer, formed on surfaces of the plurality of trenches, the connecting trench, and the semiconductor layer; a conductive material, formed in the plurality of trenches and the connecting trench; a second insulating layer, covering part of a surface of the first insulating layer and part of a surface of the conductive material; and a metal layer, covering part of a surface of the second insulating layer.
    Type: Application
    Filed: April 18, 2014
    Publication date: October 23, 2014
    Applicant: ECONOMIC SEMICONDUCTOR CORPORATION
    Inventor: WEN-BIN LIN
  • Patent number: 8860169
    Abstract: The present invention aims to enhance the reliability of a semiconductor device equipped with a Schottky barrier diode within the same chip, and its manufacturing technology. The semiconductor device includes an n-type n-well region formed over a p-type semiconductor substrate, an n-type cathode region formed in part thereof and higher in impurity concentration than the n-well region, a p-type guard ring region formed so as to surround the n-type cathode region, an anode conductor film formed so as to integrally cover the n-type cathode region and the p-type guard ring region and to be electrically coupled thereto, n-type cathode conduction regions formed outside the p-type guard ring region with each separation portion left therebetween, and a cathode conductor film formed so as to cover the n-type cathode conduction regions and to be electrically coupled thereto. The anode conductor film and the n-type cathode region are Schottky-coupled to each other.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: October 14, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Kunihiko Kato, Hideki Yasuoka, Masatoshi Taya, Masami Koketsu
  • Patent number: 8836131
    Abstract: A semiconductor module is disclosed, including a substrate and at least one semiconductor component in bottom contact with the substrate. The semiconductor component including a main current branch sandwiched between the bottom and top of the semiconductor component. The side edges of a barrier layer zone coincide with the side edge portions of the semiconductor component between the top and the bottom. The space above the substrate and to the side of the semiconductor component is packed with an insulating compound at least up to the level of the top of the semiconductor component. Topping the semiconductor component and parallel thereto is a patterned or unpatterned metallization connected to a contact pad on the top of the semiconductor component.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: September 16, 2014
    Assignee: Infineon Technologies AG
    Inventors: Peter Kanschat, Indrajit Paul
  • Patent number: 8759935
    Abstract: A power semiconductor device includes an active device region disposed in a semiconductor substrate, an edge termination region disposed in the semiconductor substrate between the active device region and a lateral edge of the semiconductor substrate and a trench disposed in the edge termination region which extends from a first surface of the semiconductor substrate toward a second opposing surface of the semiconductor substrate. The trench has an inner sidewall, an outer sidewall and a bottom. The inner sidewall is spaced further from the lateral edge of the semiconductor substrate than the outer sidewall, and an upper portion of the outer sidewall is doped opposite as the inner sidewall and bottom of the trench to increase the blocking voltage capacity. Other structures can be provided which yield a high blocking voltage capacity such as a second trench or a region of chalcogen dopant atoms disposed in the edge termination region.
    Type: Grant
    Filed: June 3, 2011
    Date of Patent: June 24, 2014
    Assignee: Infineon Technologies Austria AG
    Inventor: Gerhard Schmidt
  • Patent number: 8759937
    Abstract: A Schottky junction diode device having improved performance and a multiple well structure is fabricated in a conventional CMOS process. A substrate including a material doped to a first conductivity type is formed. A first well is disposed over the substrate. The first well includes a material doped differently, such as to a second conductivity type opposite that of the first conductivity type. A second well is disposed within the first well. A region of metal-containing material is disposed in the second well to form a Schottky junction at an interface between the region of metal-containing material and the second well. In one embodiment, a second well contact is disposed in a portion of the second well.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: June 24, 2014
    Assignee: Synopsys, Inc.
    Inventors: Yanjun Ma, Ronald A. Oliver, Todd E. Humes, Jaideep Mavoori
  • Patent number: 8736013
    Abstract: In one general aspect, an apparatus includes a metal or metal silicide contact layer disposed on an n-well region of a semiconductor substrate to form a primary Schottky diode. The apparatus includes a p-well guard ring region of the semiconductor substrate abutting the primary Schottky diode. The metal silicide contact layer has a perimeter portion extending over the p-well guard ring region of the semiconductor substrate and the p-well guard ring region has a doping level establishing a work function difference relative to the perimeter portion of the metal silicide contact layer to form a guard ring Schottky diode. The guard ring Schottky diode is in series with a p-n junction interface of the p-well region and the n-well region and the guard ring Schottky diode has a polarity opposite to that of the primary Schottky diode.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: May 27, 2014
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Chris Nassar, Dan Hahn, Sunglyong Kim, Jongjib Kim
  • Patent number: 8710590
    Abstract: In a method for producing an electronic component, a substrate is doped by introducing doping atoms. In the doped substrate, at least one connection region of the electronic component is formed by doping with doping atoms. Furthermore, at least one additional doped region is formed at least below the at least one connection region by doping with doping atoms. Furthermore, at least one well region is formed in the substrate by doping with doping atoms in such a way that the well region doping is blocked at least below the at least one additional doped region.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: April 29, 2014
    Assignee: Infineon Technologies AG
    Inventors: Philipp Riess, Henning Feick, Martin Wendel
  • Patent number: 8669554
    Abstract: A fast recovery rectifier structure with the combination of Schottky structure to relieve the minority carriers during the forward bias condition for the further reduction of the reverse recovery time during switching in addition to the lifetime killer such as Pt, Au, and/or irradiation. This fast recovery rectifier uses unpolished substrates and thick impurity diffusion for low cost production. A reduced p-n junction structure with a heavily p-type doped thin film is provided to terminate and shorten the p-n junction space charge region. This reduced p-n junction with less total charge in the p-n junction to further improve the reverse recovery time. This reduced p-n junction can be used alone, with the traditional lifetime killer method, with the Schottky structure and/or with the epitaxial substrate.
    Type: Grant
    Filed: January 11, 2012
    Date of Patent: March 11, 2014
    Inventor: Ho-Yuan Yu
  • Publication number: 20140048847
    Abstract: Disclosed is a technique capable of reducing loss at the time of switching in a diode. A diode disclosed in the present specification includes a cathode electrode, a cathode region made of a first conductivity type semiconductor, a drift region made of a low concentration first conductivity type semiconductor, an anode region made of a second conductivity type semiconductor, an anode electrode made of metal, a barrier region formed between the drift region and the anode region and made of a first conductivity type semiconductor having a concentration higher than that of the drift region, and a pillar region formed so as to connect the barrier region to the anode electrode and made of a first conductivity type semiconductor having a concentration higher than that of the barrier region. The pillar region and the anode are connected through a Schottky junction.
    Type: Application
    Filed: July 27, 2012
    Publication date: February 20, 2014
    Applicants: TOYOTA JIDOSHA KABUSHIKI KAISHA, KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
    Inventors: Yusuke Yamashita, Satoru Machida, Takahide Sugiyama, Jun Saito
  • Patent number: 8624347
    Abstract: A Schottky barrier diode includes a semiconductor layer having a plurality of trenches formed by digging in from a top surface and having mesa portions formed between adjacent trenches, and a Schottky metal formed to contact the top surface of the semiconductor layer including inner surfaces of the trenches.
    Type: Grant
    Filed: July 13, 2011
    Date of Patent: January 7, 2014
    Assignee: Rohm Co., Ltd.
    Inventors: Yoshiteru Nagai, Kohei Makita
  • Patent number: 8604583
    Abstract: The present invention aims to enhance the reliability of a semiconductor device equipped with a Schottky barrier diode within the same chip, and its manufacturing technology. The semiconductor device includes an n-type n-well region formed over a p-type semiconductor substrate, an n-type cathode region formed in part thereof and higher in impurity concentration than the n-well region, a p-type guard ring region formed so as to surround the n-type cathode region, an anode conductor film formed so as to integrally cover the n-type cathode region and the p-type guard ring region and to be electrically coupled thereto, n-type cathode conduction regions formed outside the p-type guard ring region with each separation portion left therebetween, and a cathode conductor film formed so as to cover the n-type cathode conduction regions and to be electrically coupled thereto. The anode conductor film and the n-type cathode region are Schottky-coupled to each other.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: December 10, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Kunihiko Kato, Hideki Yasuoka, Masatoshi Taya, Masami Koketsu
  • Patent number: 8592298
    Abstract: A method for fabricating edge termination structures in gallium nitride (GaN) materials includes providing a n-type GaN substrate having a first surface and a second surface, forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate, and forming a growth mask coupled to the n-type GaN epitaxial layer. The method further includes patterning the growth mask to expose at least a portion of the n-type GaN epitaxial layer, and forming at least one p-type GaN epitaxial structure coupled to the at least a portion of the n-type GaN epitaxial layer. The at least one p-type GaN epitaxial structure comprises at least one portion of an edge termination structure. The method additionally includes forming a first metal structure electrically coupled to the second surface of the n-type GaN substrate.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: November 26, 2013
    Assignee: Avogy, Inc.
    Inventors: Linda Romano, David P. Bour, Andrew Edwards, Hui Nie, Isik C. Kizilyalli, Richard J. Brown, Thomas R. Prunty
  • Patent number: 8421181
    Abstract: A Schottky barrier diode comprises a first-type substrate, a second-type well isolation region on the first-type substrate, and a first-type well region on the second-type well isolation region. With embodiments herein a feature referred to as a perimeter capacitance well junction ring is on the second-type well isolation region. A second-type well region is on the second-type well isolation region. The perimeter capacitance well junction ring is positioned between and separates the first-type well region and the second-type well region. A second-type contact region is on the second-type well region, and a first-type contact region contacts the inner portion of the first-type well region. The inner portion of the first-type well region is positioned within the center of the first-type contact region. Additionally, a first ohmic metallic layer is on the first-type contact region and a second ohmic metallic layer is on the first-type well region.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: April 16, 2013
    Assignee: International Business Machines Corporation
    Inventors: Frederick G. Anderson, Jenifer E. Lary, Robert M. Rassel, Mark E. Stidham
  • Patent number: 8405184
    Abstract: A trench Schottky diode and its manufacturing method are provided. The trench Schottky diode includes a semiconductor substrate having therein a plurality of trenches, a gate oxide layer, a polysilicon structure, a guard ring and an electrode. At first, the trenches are formed in the semiconductor substrate by an etching step. Then, the gate oxide layer and the polysilicon structure are formed in the trenches and protrude above a surface of the semiconductor substrate. The guard ring is formed to cover a portion of the resultant structure. At last, the electrode is formed above the guard ring and the other portion not covered by the guard ring. The protruding gate oxide layer and the protruding polysilicon structure can avoid cracks occurring in the trench structure.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: March 26, 2013
    Assignee: PFC Device Corporation
    Inventors: Kou-Liang Chao, Hung-Hsin Kuo, Tse-Chuan Su, Mei-Ling Chen
  • Patent number: 8368054
    Abstract: In an organic light emitting diode display including a first pixel and a second pixel that are associated with respective different colors, each of the first and second pixels being for displaying its associated color, each of the first and second pixels includes: a first electrode; a second electrode facing the first electrode; and a light emitting member formed between the first electrode and the second electrode; wherein the light emitting member of the first pixel includes: at least two light-emitting elements for emitting light of the color associated with the first pixel; and a charge generation layer between the at least two light-emitting elements; and wherein the second pixel has fewer light-emitting elements than the first pixel.
    Type: Grant
    Filed: October 13, 2008
    Date of Patent: February 5, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Hyo-Seok Kim, Kyong-Tae Park
  • Patent number: 8362585
    Abstract: A semiconductor junction barrier Schottky (JBS-SKY) diode with enforced upper contact structure (EUCS) is disclosed. Referencing an X-Y-Z coordinate, the JBS-SKY diode has semiconductor substrate (SCST) parallel to X-Y plane. Active device zone (ACDZ) atop SCST and having a JBS-SKY diode with Z-direction current flow. Peripheral guarding zone (PRGZ) atop SCST and surrounding the ACDZ. The ACDZ has active lower semiconductor structure (ALSS) and enforced active upper contact structure (EUCS) atop ALSS. The EUC has top contact metal (TPCM) extending downwards and in electrical conduction with bottom of EUCS; and embedded bottom supporting structure (EBSS) inside TPCM and made of a hard material, the EBSS extending downwards till bottom of the EUCS. Upon encountering bonding force onto TPCM during packaging of the JBS-SKY diode, the EBSS enforces the EUCS against an otherwise potential micro cracking of the TPCM degrading the leakage current of the JBS-SKY diode.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: January 29, 2013
    Assignee: Alpha & Omega Semiconductor, Inc.
    Inventors: Anup Bhalla, Ji Pan, Daniel Ng
  • Publication number: 20130015550
    Abstract: A semiconductor junction barrier Schottky (JBS-SKY) diode with enforced upper contact structure (EUCS) is disclosed. Referencing an X-Y-Z coordinate, the JBS-SKY diode has semiconductor substrate (SCST) parallel to X-Y plane. Active device zone (ACDZ) atop SCST and having a JBS-SKY diode with Z-direction current flow. Peripheral guarding zone (PRGZ) atop SCST and surrounding the ACDZ. The ACDZ has active lower semiconductor structure (ALSS) and enforced active upper contact structure (EUCS) atop ALSS. The EUC has top contact metal (TPCM) extending downwards and in electrical conduction with bottom of EUCS; and embedded bottom supporting structure (EBSS) inside TPCM and made of a hard material, the EBSS extending downwards till bottom of the EUCS. Upon encountering bonding force onto TPCM during packaging of the JBS-SKY diode, the EBSS enforces the EUCS against an otherwise potential micro cracking of the TPCM degrading the leakage current of the JBS-SKY diode.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Inventors: Anup Bhalla, Ji Pan, Daniel Ng
  • Patent number: 8334579
    Abstract: An integrated circuit device and method for fabricating the integrated circuit device is disclosed. The integrated circuit device includes a substrate, a diffusion source, and a lightly doped diffusion region in contact with a conductive layer. A junction of the lightly doped diffusion region with the conductive layer forms a Schottky region. An annealing process is performed to form the lightly doped diffusion region. The annealing process causes dopants from the diffusion source (for example, an n-well disposed in the substrate) of the integrated circuit device to diffuse into a region of the substrate, thereby forming the lightly doped diffusion region.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: December 18, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ping Chun Yeh, Der-Chyang Yeh, Chih-Ping Chao
  • Patent number: 8294235
    Abstract: A MOSFET switch which has a low surface electric field at an edge termination area, and also has increased breakdown voltage. The MOSFET switch has a new edge termination structure employing an N-P-N sandwich structure. The MOSFET switch also has a polysilicon field plate configuration operative to enhance any spreading of any depletion layer located at an edge of a main PN junction of the N-P-N sandwich structure.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: October 23, 2012
    Assignee: MaxPower Semiconductor, Inc.
    Inventors: Jun Zeng, Mohamed N. Darwish, Shih-Tzung Su
  • Patent number: 8264056
    Abstract: A Schottky diode comprises an ohmic layer that can serve as a cathode and a metal layer that can serve as an anode, and a drift channel formed of semiconductor material that extends between the ohmic and metal layers. The drift channel includes a heavily doped region adjacent to the ohmic contact layer. The drift channel forms a Schottky barrier with the metal layer. A pinch-off mechanism is provided for pinching off the drift channel while the Schottky diode is reverse-biased. As a result, the level of saturation or leakage current between the metal layer and the ohmic contact layer under a reverse bias condition of the Schottky diode is reduced.
    Type: Grant
    Filed: July 29, 2010
    Date of Patent: September 11, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: Chung Yu Hung, Chih Min Hu, Wing Chor Chan, Jeng Gong
  • Patent number: 8169047
    Abstract: The present invention aims to enhance the reliability of a semiconductor device equipped with a Schottky barrier diode within the same chip, and its manufacturing technology. The semiconductor device includes an n-type n-well region formed over a p-type semiconductor substrate, an n-type cathode region formed in part thereof and higher in impurity concentration than the n-well region, a p-type guard ring region formed so as to surround the n-type cathode region, an anode conductor film formed so as to integrally cover the n-type cathode region and the p-type guard ring region and to be electrically coupled thereto, n-type cathode conduction regions formed outside the p-type guard ring region with each separation portion left therebetween, and a cathode conductor film formed so as to cover the n-type cathode conduction regions and to be electrically coupled thereto. The anode conductor film and the n-type cathode region are Schottky-coupled to each other.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: May 1, 2012
    Assignee: Renesas Electronics Corporation
    Inventors: Kunihiko Kato, Hideki Yasuoka, Masatoshi Taya, Masami Koketsu
  • Patent number: 8164154
    Abstract: A low profile high power Schottky barrier bypass diode for solar cells and panels with the cathode and anode electrodes on the same side of the diode and a method of fabrication thereof are disclosed for generating a thin chip with both electrodes being on the same side of the chip. In an embodiment, a mesa isolation with a Zener diode over the annular region surrounding the central region of the mesa anode in the Epi of the substrate is formed. In an embodiment, a P-type Boron dopant layer is ion implanted in the annular region for the Zener Diode. This controls recovery from high voltage spikes from the diode rated voltage. A Schottky barrier contact for the anode and a contact for the cathode are simultaneously created on the same side of the chip.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: April 24, 2012
    Inventors: Aram Tanielian, Garo Tanielian
  • Patent number: 8159039
    Abstract: A superjunction semiconductor device is provided having at least one column of a first conductivity type and at least one column of a second conductivity type extending from a first main surface of a semiconductor substrate toward a second main surface of the semiconductor substrate opposed to the first main surface. The at least one column of the second conductivity type has a first sidewall surface proximate the at least one column of the first conductivity type and a second sidewall surface opposed to the first sidewall surface. A termination structure is proximate the second sidewall surface of the at least one column of the second conductivity type. The termination structure includes a layer of dielectric of an effective thickness and consumes about 0% of the surface area of the first main surface. Methods for manufacturing superjunction semiconductor devices and for preventing surface breakdown are also provided.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: April 17, 2012
    Assignee: Icemos Technology Ltd.
    Inventor: Xu Cheng
  • Patent number: 8125008
    Abstract: A Schottky device and a semiconductor process of making the same are provided. The Schottky device comprises a substrate, a deep well, a Schottky contact, and an Ohmic contact. The substrate is doped with a first type of ions. The deep well is doped with a second type of ions, and formed in the substrate. The Schottky contact contacts a first electrode with the deep well. The Ohmic contact contacts a second electrode with a heavily doped region with the second type of ions in the deep well. Wherein the deep well has a geometry gap with a width formed under the Schottky contact, the first type of ions and the second type of ions are complementary, and the width of the gap adjusts the breakdown voltage.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: February 28, 2012
    Assignee: System General Corporation
    Inventors: Chiu-Chih Chiang, Chih-Feng Huang, You-Kuo Wu, Long Shih Lin