With Specified Electrode Composition Or Configuration Patents (Class 257/4)
  • Patent number: 9070876
    Abstract: A variable resistance element is formed by sandwiching a metal oxide layer whose resistance changes between a pair of electrodes and the metal oxide layer includes a pair of variable resistance layers whose resistances change by formation of a current path and a branching suppression layer which is sandwiched between the variable resistance layers and suppresses branching of the current path.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: June 30, 2015
    Assignee: NEC Corporation
    Inventor: Kimihiko Ito
  • Patent number: 9070874
    Abstract: The present disclosure includes memory cell structures and method of forming the same. One such memory cell includes a first electrode having sidewalls angled less than 90 degrees in relation to a bottom surface of the first electrode, a second electrode, including an electrode contact portion of the second electrode, having sidewalls angled less than 90 degrees in relation to the bottom surface of the first electrode, wherein the second electrode is over the first electrode, and a storage element between the first electrode and the electrode contact portion of the second electrode.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: June 30, 2015
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Patent number: 9069933
    Abstract: A secure, networked portable storage device includes: a secure data storage section; a program storage section including a security program operatively connected to the secure data storage section, wherein the security program is operable to selectively enable and disable access to the secure data storage section; a device antenna operable at a low radio frequency not exceeding one megahertz; a transceiver operatively connected to the device antenna, the transceiver operable to receive radio signals at the low radio frequency and generate data signals at the said low radio frequency, in response thereto; a programmable microprocessor operatively coupled with the transceiver and the program storage section, the microprocessor configured for controlling operation of the program storage section and to cause the transceiver to emit an identification signal; and a connector for enabling an electrical connection between the portable storage device and another device, wherein the connector and the secure data storag
    Type: Grant
    Filed: May 25, 2007
    Date of Patent: June 30, 2015
    Assignee: Visible Assets, Inc.
    Inventors: Jason August, John Stevens, Paul Waterhouse
  • Patent number: 9070478
    Abstract: A variable resistive memory device includes an array of a plurality of memory cells. Each of the plurality of memory cells includes first and second electrodes, and an SbmSen material layer (where m and n are positive numbers, respectively) interposed between the first electrode and the second electrode. The SbmSen material layer includes a separation structure in which a plurality of Sb atoms are in contact with a plurality of Se atoms.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: June 30, 2015
    Assignees: Hynix Semiconductor Inc., Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: Mann Ho Cho, Ju Heyuck Baeck, Tae Hyeon Kim, Hye Jin Choi
  • Patent number: 9070858
    Abstract: Embodiments disclosed herein may relate to forming an interface between a selector transistor and a phase change material storage cell in a memory device.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: June 30, 2015
    Assignee: MICRON TECHNOLOGY, INC.
    Inventor: Agostino Pirovano
  • Patent number: 9059390
    Abstract: A conductive-bridge random access memory device is disclosed comprising a second metal layer configured to provide second metal cations; a layer of insulator adjacent to the second metal layer; the layer of insulator comprising a layer of first insulator and a layer of second insulator; the layer of second insulator being adjacent to the second metal layer; a first metal layer adjacent to the layer of first insulator, the first metal layer being opposite to the second metal layer; wherein the density of the layer of second insulator is higher than the density of the layer of first insulator.
    Type: Grant
    Filed: February 6, 2013
    Date of Patent: June 16, 2015
    Assignee: IMEC
    Inventor: Ludovic Goux
  • Patent number: 9059403
    Abstract: Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: June 16, 2015
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Patent number: 9053802
    Abstract: An integrated circuit includes a ferroelectric memory cell. In one embodiment, the ferroelectric memory cell includes a first oxide storage layer, a second oxide storage layer, and an amorphous layer disposed between the first and second oxide storage layers. Each of the first and second oxide storage layers includes a ferroelectric material that is at least partially in a ferroelectric state and further includes, as main components, oxygen and any of the group consisting of Hf, Zr and (Hf,Zr).
    Type: Grant
    Filed: June 4, 2013
    Date of Patent: June 9, 2015
    Assignee: NaMLab gGmbH
    Inventors: Stefan Ferdinand Müller, Ekaterina Yurchuk, Uwe Schröder
  • Publication number: 20150144860
    Abstract: The present disclosure provides a method of fabricating a resistive memory array. In one embodiment, a method of fabricating a resistive memory array includes forming a plurality of insulators and a conductive structure on a first substrate, performing a resistor-forming process to transform the insulators into a plurality of resistors, polishing the conductive structure to expose a plurality of contact points respectively electrically connected to the resistors, providing a second substrate having a plurality of transistors and a plurality of interconnect pads, bonding respectively the interconnect pads and the contact points, and removing the first substrate from the resistors and the conductive structure.
    Type: Application
    Filed: November 22, 2013
    Publication date: May 28, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ku-Feng LIN, Hung-Chang YU, Kai-Chun LIN, Yue-Der CHIH
  • Publication number: 20150144864
    Abstract: Some embodiments include methods of forming memory cells. A stack includes ovonic material over an electrically conductive region. The stack is patterned into rails that extend along a first direction. The rails are patterned into pillars. Electrically conductive lines are formed over the ovonic material. The electrically conductive lines extend along a second direction that intersects the first direction. The electrically conductive lines interconnect the pillars along the second direction. Some embodiments include a memory array having first electrically conductive lines extending along a first direction. The lines contain n-type doped regions of semiconductor material. Pillars are over the first conductive lines and contain mesas of the n-type doped regions together with p-type doped regions and ovonic material. Second electrically conductive lines are over the ovonic material and extend along a second direction that intersects the first direction.
    Type: Application
    Filed: January 30, 2015
    Publication date: May 28, 2015
    Inventors: Fabio Pellizzer, Roberto Bez, Lorenzo Fratin
  • Publication number: 20150144862
    Abstract: A variable resistance memory device includes a gate pattern and a dummy gate pattern provided at the same level on a substrate, a first contact pattern provided on the dummy gate pattern, and a variable resistance pattern provided between the dummy gate pattern and the first contact pattern. The gate pattern and the dummy gate pattern define conductive electrodes of functional and non-functional transistors, respectively. The first contact pattern and the dummy gate pattern define upper and lower electrodes on the variable resistance pattern, respectively. Related fabrication methods are also discussed.
    Type: Application
    Filed: October 29, 2014
    Publication date: May 28, 2015
    Inventors: Hyun-Min Choi, Juyoun Kim, Shigenobu Maeda, Jihoon Yoon, Sungman Lim
  • Publication number: 20150144859
    Abstract: An integrated circuit device including a resistive random access memory (RRAM) cell formed over a substrate. The RRAM cell includes a top electrode having an upper surface. A blocking layer covers a portion of the upper surface. A via extends above the top electrode within a matrix of dielectric. The upper surface of the top electrode includes an area that interfaces with the blocking layer and an area that interfaces with the via. The area of the upper surface that interfaces with the via surrounds the area of the upper surface that interfaces with the blocking layer. The blocking layer is functional during processing to protect the RRAM cell from etch damage while being structured in such a way as to not interfere with contact between the overlying via and the top electrode.
    Type: Application
    Filed: November 22, 2013
    Publication date: May 28, 2015
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
  • Publication number: 20150144863
    Abstract: A method for forming a resistive memory device includes providing a substrate comprising a first metal material, forming a conductive silicon-bearing layer on top of the first metal material, wherein the conductive silicon-bearing layer comprises an upper region and a lower region, and wherein the lower region is adjacent to the first metal material, forming an amorphous layer from the upper region of the conductive silicon-bearing layer, and disposing an active metal material above the amorphous layer.
    Type: Application
    Filed: January 14, 2015
    Publication date: May 28, 2015
    Inventors: Sung Hyun JO, Kuk-Hwan KIM, Tanmay KUMAR
  • Publication number: 20150144861
    Abstract: Embodiments of the present invention disclose a resistive memory and a method for fabricating the same. The resistive memory comprises a bottom electrode, a resistive layer and a top electrode. The resistive layer is located over the bottom electrode. The top electrode is located over the resistive layer. A conductive protrusion is provided on the bottom electrode. The conductive protrusion is embedded in the resistive layer, and has a top width smaller than a bottom width. Embodiments of the present invention further disclose a method for fabricating a resistive memory. According to the resistive memory and the method for fabricating the same provided by the embodiments of the present invention, by means of providing the conductive protrusion on the bottom electrode, a “lightning rod” effect may be occurred so that an electric field in the resistive layer is intensively distributed near the conductive protrusion.
    Type: Application
    Filed: July 8, 2013
    Publication date: May 28, 2015
    Inventors: Yimao Cai, Shihui Yin, Ru Huang, Yichen Fang
  • Patent number: 9040952
    Abstract: A semiconductor device includes a first conductive layer extending in a first direction, a second conductive layer extending in a second direction and disposed over the first conductive layer, the first and second directions being substantially perpendicular to each other, and a variable resistance layer disposed over the first conductive layer, the variable resistance layer extending in the second direction. An upper portion of the variable resistance layer is disposed between lower portions of two neighboring second conductive layers including the second conductive layer.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: May 26, 2015
    Assignee: SK HYNIX INC.
    Inventor: Taejung Ha
  • Patent number: 9040950
    Abstract: According to one embodiment, a nonvolatile memory device includes a first interconnect, an insulating layer, a needle-like metal oxide, and a second interconnect. The insulating layer is provided on the first interconnect. The needle-like metal oxide pierces the insulating layer in a vertical direction. The second interconnect is provided on the insulating layer.
    Type: Grant
    Filed: September 6, 2011
    Date of Patent: May 26, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kouji Matsuo
  • Patent number: 9041129
    Abstract: A semiconductor memory storage array device comprises a first electrode layer, an oxide layer, a second electrode layer, a memory material layer and a first insulator layer. The oxide layer is disposed on the first electrode layer. The second electrode layer is disposed on the oxide layer. The memory material layer is disposed on the second electrode layer. The first insulator layer is disposed adjacent to two sidewalls of the first electrode layer, the oxide layer, the second electrode layer and the memory material layer, so to define a gap either between the first electrode layer and the oxide layer or between the second electrode layer and the oxide layer.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: May 26, 2015
    Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: Chia-Hua Ho, Ming-Daou Lee, Wen-Cheng Chiu, Cho-Lun Hsu
  • Patent number: 9040949
    Abstract: According to one embodiment, an information recording device includes first and second electrodes, a variable resistance layer between the first and second electrodes, and a control circuit which controls the variable resistance layer to n (n is a natural number except 1) kinds of resistance. The variable resistance layer comprises a material filled between the first and second electrodes, and particles arranged in a first direction from the first electrode to the second electrode in the material, and each of the particles has a resistance lower than that of the material. A resistance of the variable resistance layer is decided by a short between the first electrode and at least one of the particles.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: May 26, 2015
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yuichiro Mitani, Daisuke Matsushita, Shosuke Fujii
  • Patent number: 9040953
    Abstract: According to one embodiment, a storage device includes first electrodes, second electrodes, a resistance change layer provided between the first electrodes and the second electrodes, and ion metal particles that are formed in an island form between the first electrodes and the resistance change layer and that contain a metal movable inside the resistance change layer. The first electrodes and the second electrodes are formed of a material which is more unlikely to be ionized as compared to the metal, and the first electrodes are in contact with the resistance change layer in an area around the ion metal particles.
    Type: Grant
    Filed: March 2, 2014
    Date of Patent: May 26, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yusuke Arayashiki, Hidenori Miyagawa, Tomohito Kawashima
  • Patent number: 9040951
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: May 26, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20150137063
    Abstract: Methods, devices, and systems associated with oxide based memory can include a method of forming a resistive switching region of a memory cell. Forming a resistive switching region of a memory cell can include forming a metal oxide material on an electrode and forming a metal material on the metal oxide material, wherein the metal material formation causes a reaction that results in a graded metal oxide portion of the memory cell.
    Type: Application
    Filed: January 7, 2015
    Publication date: May 21, 2015
    Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
  • Publication number: 20150137061
    Abstract: A method of fabricating a memory device is disclosed. In one aspect, the method comprises patterning a first conductive line extending in a first direction. The method additionally includes forming a free-standing pillar of a memory cell stack on the first conductive line after patterning the first conductive line. Forming the free-standing pillar includes depositing a memory cell stack comprising a selector material and a storage material over the conductive line and patterning the memory cell stack to form the free-standing pillar. The method further includes patterning a second conductive line on the pillar after patterning the memory cell stack, the second conductive line extending in a second direction crossing the first direction.
    Type: Application
    Filed: November 21, 2013
    Publication date: May 21, 2015
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Ombretta Donghi, Marcello Ravasio, Samuele Sciarrillo, Roberto Somaschini
  • Publication number: 20150137060
    Abstract: Devices and methods for forming a device are disclosed. The device includes a substrate and a selector diode disposed over the substrate. The diode includes first and second terminals. The first terminal is disposed between the second terminal and the substrate. The diode includes a Schottky Barrier (SB) disposed at about an interface of the first and second terminals. The SB includes a tunable SB height defined by a SB region having segregated dopants. The device includes a memory element disposed over and coupled to the selector diode.
    Type: Application
    Filed: November 20, 2013
    Publication date: May 21, 2015
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yuan SUN, Eng Huat TOH
  • Publication number: 20150137064
    Abstract: This disclosure provides a nonvolatile memory device and related methods of manufacture and operation. The device may include one or more resistive random access memory (ReRAM) approaches to provide a memory device with more predictable operation. In particular, the forming voltage required by particular designs may be reduced through the use of a barrier layer, a reverse polarity forming voltage pulse, a forming voltage pulse where electrons are injected from a lower work function electrode, or an anneal in a reducing environment. One or more of these techniques may be applied, depending on the desired application and results.
    Type: Application
    Filed: January 13, 2015
    Publication date: May 21, 2015
    Inventors: Pragati Kumar, Tony P. Chiang, Prashant B. Phatak, Yun Wang
  • Publication number: 20150137059
    Abstract: The present disclosure provides resistive random access memory (RRAM) structures and methods of making the same. The RRAM structures include a bottom electrode having protruded step portion that allows formation of a self-aligned conductive path with a top electrode during operation. The protruded step portion may have an inclination angle of about 30 degrees to 150 degrees. Multiple RRAM structures may be formed by etching through a RRAM stack.
    Type: Application
    Filed: November 15, 2013
    Publication date: May 21, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jonathan Tehan Chen, Chung-Cheng Chou, Po-Hao Lee, Kuo-Chi Tu
  • Publication number: 20150137065
    Abstract: Some embodiments include memory cells which contain, in order; a first electrode material, a first metal oxide material, a second metal oxide material, and a second electrode material. The first metal oxide material has at least two regions which differ in oxygen concentration relative to one another. One of the regions is a first region and another is a second region. The first region is closer to the first electrode material than the second region, and has a greater oxygen concentration than the second region. The second metal oxide material includes a different metal than the first metal oxide material. Some embodiments include methods of forming memory cells in which oxygen is substantially irreversibly transferred from a region of a metal oxide material to an oxygen-sink material. The oxygen transfer creates a difference in oxygen concentration within one region of the metal oxide material relative to another.
    Type: Application
    Filed: January 19, 2015
    Publication date: May 21, 2015
    Inventors: Gurtej S. Sandhu, Bhaskar Srinivasan
  • Publication number: 20150137062
    Abstract: Selector devices suitable for memory arrays have low leakage currents at low voltages, reducing sneak current paths for non-selected devices, and high leakage currents at high voltages, reducing voltage drops during switching. The selector device may include a non-conductive tri-layer between two electrodes. The non-conductive tri-layer may include a low-bandgap dielectric layer between two higher-bandgap dielectric layers. The high-bandgap dielectric layers may be doped to form traps at energy levels higher than the write voltage of the memory device. With a thin low-bandgap layer and a large bandgap difference from the high-bandgap layers, the selector may operate as a quantum well, conductive when the electrode Fermi level matches the lowest energy level of the quantum well and insulating at lower voltages.
    Type: Application
    Filed: December 4, 2014
    Publication date: May 21, 2015
    Inventors: Venkat Ananthan, Prashant B Phatak
  • Patent number: 9035275
    Abstract: A self-aligning stacked memory cell array structure and method for fabricating such structure. The memory cell array includes a stack of memory cells disposed adjacent to opposing sides of a conductive line that is formed within a trench. The memory cells are stacked such that the memory element surface of each memory cell forms a portion of the sidewall of the conductive line. The conductive line is formed within the trench such that electrical contact is made across the entire memory element surface of each memory cell. Such structure and method for making such structure is a self-aligning process that does not require the use of any additional masks.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: May 19, 2015
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wei-Chih Chien, Ming-Hsiu Lee, Shih-Hung Chen
  • Patent number: 9035273
    Abstract: A resistive switching memory device is provided with first to third electrodes. The first electrode forms a Schottky barrier which can develop a rectifying property and resistance change characteristics at an interface between the first electrode and an oxide semiconductor. The third electrode is made of a material which provides an ohmic contact with the oxide semiconductor. A control voltage is applied between the first and second electrodes, and a driving voltage is applied between the first and third electrodes.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: May 19, 2015
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Sakyo Hirose
  • Patent number: 9035274
    Abstract: A method for fabricating a semiconductor device includes forming an impurity layer over a first conductive layer; forming a first metal oxide layer over the impurity layer, wherein the first metal oxide layer includes oxygen at a lower ratio than a stoichiometric ratio; diffusing an impurity from the impurity layer into the first metal oxide layer to form a first doped metal oxide layer; forming a second metal oxide layer over the first doped metal oxide layer; and forming a second conductive layer over the second metal oxide layer.
    Type: Grant
    Filed: July 18, 2013
    Date of Patent: May 19, 2015
    Assignee: SK HYNIX INC.
    Inventor: Beom-Yong Kim
  • Publication number: 20150131358
    Abstract: This semiconductor device is provided with: a variable resistance first switch (103), which has a first terminal and a second terminal, and which has the resistance value thereof varied when an applied voltage exceeds a reference value; a variable resistance second switch (104), which has a third terminal and a fourth terminal, and which forms an intermediate node (105) by having the third terminal connected to the second terminal, and has the resistance state thereof varied when an applied voltage exceeds a reference value; first wiring (101) connected to the first terminal; second wiring (102), which is connected to the fourth terminal, and which extends in the direction intersecting the first wiring (101) in a planar view; a first selection switch element (106) connected to the first wiring (101); and a second selection switch element (107) connected to the second wiring (102).
    Type: Application
    Filed: February 28, 2013
    Publication date: May 14, 2015
    Inventors: Makoto Miyamura, Toshitsugu Sakamoto, Munehiro Tada
  • Publication number: 20150129828
    Abstract: A 3D semiconductor device and a method of manufacturing the same are provided. The method includes forming a first semiconductor layer including a common source node on a semiconductor substrate, forming a transistor region on the first semiconductor layer, wherein the transistor region includes a horizontal channel region substantially parallel to a surface of the semiconductor substrate, and source and drain regions branched from the horizontal channel region to a direction substantially perpendicular to the surface of the semiconductor substrate, processing the first semiconductor layer to locate the common source node corresponding to the source region, forming a gate in a space between the source region and the drain region, forming heating electrodes on the source region and the drain region, and forming resistance variable material layers on the exposed heating electrodes.
    Type: Application
    Filed: December 1, 2014
    Publication date: May 14, 2015
    Inventor: Suk Ki KIM
  • Publication number: 20150129827
    Abstract: Provided is a three-dimensional resistance memory including a stack of layers. The stack of layers is encapsulated in a dielectric layer and is adjacent to at least one opening in the encapsulating dielectric layer. At least one L-shaped variable resistance spacer is disposed on at least a portion of the sidewall of the opening adjacent to the stack of layers. An electrode layer fills the remaining portion of the opening.
    Type: Application
    Filed: September 17, 2014
    Publication date: May 14, 2015
    Inventors: Frederick T. Chen, Tai-Yuan Wu, Yu-Sheng Chen, Wei-Su Chen, Pei-Yi Gu, Yu-De Lin
  • Publication number: 20150129826
    Abstract: A flexible and/or transparent nonvolatile memory device can be fabricated on flexible substrates, together with ductile materials or transparent conductive oxide materials, and layers with thicknesses that allow flexibility and transparency. The ductile materials can include Ti, Ni, Nb, or Zr. The transparent conductive materials can include indium tin oxide, zinc oxide or aluminum doped zinc oxide. The nonvolatile memory devices can include resistive switching memory, phase change memory, magnetoresistive random access memory, or spin-transfer torque random access memory.
    Type: Application
    Filed: November 13, 2013
    Publication date: May 14, 2015
    Applicant: Intermolecular Inc.
    Inventor: Yun Wang
  • Publication number: 20150134858
    Abstract: An electronic device includes a semiconductor memory unit that includes a vertical electrode formed over a substrate and receiving a voltage through one end of the vertical electrode, a resistance variable layer formed along a side of the vertical electrode to be thinner going from one end to the other end, and a plurality of horizontal electrodes formed adjacent to the vertical electrode with the resistance variable layer disposed between the horizontal electrodes and the vertical electrode, and stacked over the substrate with a space from each other.
    Type: Application
    Filed: May 17, 2014
    Publication date: May 14, 2015
    Applicant: SK HYNIX INC.
    Inventor: Kwang-Hee CHO
  • Patent number: 9029828
    Abstract: Provided are a phase-change memory device and a method of fabricating the same. The device may include memory cells provided at intersections of word lines and bit lines that extend along first and second directions crossing each other, and a mold layer including thermal insulating regions, such as air gaps, that may be provided between the memory cells to separate the memory cells from each other. Each of the memory cells may include a lower electrode electrically connected to the word line to have a first width in the first direction, an upper electrode electrically connected to the bit line to have a second width greater than the first width in the first direction, and a phase-change layer provided between the lower and upper electrodes to have the first width in the first direction.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: May 12, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Gyuhwan Oh
  • Patent number: 9029829
    Abstract: A memory cell includes a first resistive switching device having a first terminal and a second terminal, a switching device having a first terminal and a second terminal, and an access device having a first access terminal and a second access terminal. The first access terminal is coupled to the first terminal of the first resistive switching device and the first terminal of the switching device.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: May 12, 2015
    Assignee: Adesto Technologies Corporation
    Inventors: Juan Pablo Saenz Echeverry, Deepak Kamalanathan
  • Patent number: 9029826
    Abstract: Erosion of chalcogenides in phase change memories using ovonic threshold switch selectors can be reduced by controlling columnar morphology in electrodes used in the ovonic threshold switch. The columnar morphology may cause cracks to occur which allow etchants used to etch the ovonic threshold switch to sneak through the ovonic threshold switch and to attack chalcogenides, either in the switch or in the memory element. In one embodiment, the electrode may be split into two metal nitride layers separated by an intervening metal layer.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: May 12, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Kuo-Wei Chang, Jinwook Lee, Jong-Won Lee, Elijah V. Karpov
  • Patent number: 9029827
    Abstract: In an example, a single damascene structure is formed by, for example, providing a dielectric layer, forming a void in the dielectric layer, and forming a portion of a first two-terminal resistive memory cell and a portion of a second two-terminal resistive memory cell within the void. The portions of the two-terminal resistive memory cells may be vertically stacked within the void.
    Type: Grant
    Filed: October 24, 2013
    Date of Patent: May 12, 2015
    Assignee: Unity Semiconductor Corporation
    Inventors: Lidia Vereen, Bruce Lynn Bateman, Louis Parrillo, Elizabeth Friend, David Eggleston
  • Patent number: 9029248
    Abstract: A nano-ionic memory device is provided. The memory device includes a substrate, a chemically inactive lower electrode provided on the substrate, a solid electrolyte layer provided on the lower electrode and including a silver (Ag)-doped telluride (Te)-based nano-material, and an oxidizable upper electrode provided on the electrolyte layer.
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: May 12, 2015
    Assignee: EWHA University-Industry Collaboration Foundation
    Inventors: William Jo, Ah-Reum Jeong
  • Patent number: 9029233
    Abstract: Resistive-switching memory elements having improved switching characteristics are described, including a memory element having a first electrode and a second electrode, a switching layer between the first electrode and the second electrode, the switching layer comprising a first metal oxide having a first bandgap greater than 4 electron volts (eV), the switching layer having a first thickness, and a coupling layer between the switching layer and the second electrode, the coupling layer comprising a second metal oxide having a second bandgap greater the first bandgap, the coupling layer having a second thickness that is less than 25 percent of the first thickness.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: May 12, 2015
    Assignee: Intermolecular, Inc.
    Inventors: Ronald John Kuse, Tony Chiang, Michael Miller, Prashant Phatak, Jinhong Tong
  • Patent number: 9029231
    Abstract: A method of fabricating a fin selector with a gated RRAM and the resulting device are disclosed. Embodiments include forming a bottom electrode layer and a hardmask on a semiconductor substrate; etching the hardmask, bottom electrode layer, and semiconductor substrate to form a fin-like structure; forming first and second dummy gate stacks on first and second side surfaces of the fin-like structure, respectively; forming spacers on vertical surfaces of the first and second dummy gate stacks; forming an ILD surrounding the spacers; removing the first and second dummy gate stacks, forming first and second cavities on first and second sides of the fin-like structure; forming an RRAM layer on the first and second side surfaces of the fin-like structure in the first and second cavities, respectively; and filling each of the first and second cavities with a top electrode.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: May 12, 2015
    Assignee: Globalfoundries Singapore Pte. Ltd.
    Inventors: Eng Huat Toh, Elgin Quek, Shyue Seng Tan
  • Patent number: 9029187
    Abstract: Selector devices that can be suitable for memory device applications can have low leakage currents at low voltages to reduce sneak current paths for non selected devices, and high leakage currents at high voltages to minimize voltage drops during device switching. The selector device can include a first electrode, a tri-layer dielectric layer, and a second electrode. The tri-layer dielectric layer can include a low band gap dielectric layer disposed between two higher band gap dielectric layers. The high band gap dielectric layers can be doped with doping materials to form traps at energy levels higher than the operating voltage of the memory device.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: May 12, 2015
    Assignee: Intermolecular, Inc.
    Inventors: Venkat Ananthan, Prashant B Phatak
  • Patent number: 9029825
    Abstract: A semiconductor device includes multilayer interconnects and two variable resistance elements (22a, 22b) that are provided among the multilayer interconnects and that include first electrodes (5), second electrodes (10a, 10b), and variable resistance element films (9a, 9b) that are each interposed between first electrodes (5) and respective second electrodes (10a, 10b). Either the first electrodes (5) or the second electrodes (10a, 10b) of the two variable resistance elements (22a, 22b) are unified.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: May 12, 2015
    Assignee: NEC Corporation
    Inventors: Munehiro Tada, Makoto Miyamura, Hiromitsu Hada
  • Publication number: 20150123070
    Abstract: An array of vertically stacked tiers of memory cells includes a plurality of horizontally oriented access lines within individual tiers of memory cells and a plurality of horizontally oriented global sense lines elevationally outward of the tiers. A plurality of select transistors is elevationally inward of the tiers. A plurality of pairs of local first and second vertical lines extends through the tiers. The local first vertical line within individual of the pairs is in conductive connection with one of the global sense lines and in conductive connection with one of the two source/drain regions of one of the select transistors. The local second vertical line within individual of the pairs is in conductive connection with another of the two source/drain regions of the one select transistor. Individual of the memory cells include a crossing one of the local second vertical lines and one of the horizontal access lines and programmable material there-between.
    Type: Application
    Filed: January 12, 2015
    Publication date: May 7, 2015
    Inventor: Zengtao T. Liu
  • Publication number: 20150123065
    Abstract: Some embodiments include a memory cell that has an electrode, a switching material over the electrode, a buffer region over the switching material, and an ion reservoir material over the buffer region. The buffer region includes one or more elements from Group 14 of the periodic table in combination with one or more chalcogen elements. Some embodiments include methods of forming memory cells.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 7, 2015
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Christopher W. Petz, Dale W. Collins, Scott E. Sills, Shuichiro Yasuda
  • Publication number: 20150123069
    Abstract: A storage element includes a first electrode and a second electrode separated by a gap and a dielectric layer provided between the first electrode and the second electrode to fill the gap. A separation distance of the gap changes in response to application of a voltage to a space between the first electrode and the second electrode, such that a switching phenomenon is produced which switches a resistance state between the first electrode and the second electrode between a high resistance state in which it is difficult for tunnel current to flow and a low resistance state in which it is easy for tunnel current to flow.
    Type: Application
    Filed: October 28, 2014
    Publication date: May 7, 2015
    Inventors: Shigeo FURUTA, Yuichiro MASUDA, Tsuyoshi TAKAHASHI, Masatoshi ONO, Yutaka HAYASHI, Taro ITAYA, Yasuhisa NAITOH, Tetsuo SHIMIZU
  • Publication number: 20150123071
    Abstract: Embodiments of the invention generally relate to memory devices and methods for fabricating such memory devices. In one embodiment, a method for fabricating a resistive switching memory device includes depositing a metallic layer on a lower electrode disposed on a substrate and exposing the metallic layer to an activated oxygen source while heating the substrate to an oxidizing temperature within a range from about 300° C. to about 600° C. and forming a metal oxide layer from an upper portion of the metallic layer during an oxidation process. The lower electrode contains a silicon material and the metallic layer contains hafnium or zirconium. Subsequent to the oxidation process, the method further includes heating the substrate to an annealing temperature within a range from greater than 600° C. to about 850° C. while forming a metal silicide layer from a lower portion of the metallic layer during a silicidation process.
    Type: Application
    Filed: January 16, 2015
    Publication date: May 7, 2015
    Inventors: Dipankar Pramanik, Tony P. Chiang, Tim Minvielle, Takeshi Yamaguchi
  • Publication number: 20150123064
    Abstract: Some embodiments include a memory cell having an electrode and a switching material over the electrode. The electrode is a first composition which includes a first metal and a second metal. The switching material is a second composition which includes the second metal. The second composition is directly against the first composition. Some embodiments include methods of forming memory cells.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 7, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Martin Schubert, Scott E. Sills, D.V. Nirmal Ramaswamy
  • Publication number: 20150123066
    Abstract: A phase-change memory cell having a reduced electrode-chalcogenide interface resistance and a method for making the phase-change memory cell are disclosed: An interface layer is formed between an electrode layer and a chalcogenide layer that and provides a reduced resistance between the chalcogenide-based phase-change memory layer and the electrode layer. Exemplary embodiments provide that the interface layer comprises a tungsten carbide, a molybdenum carbide, a tungsten boride, or a molybdenum boride, or a combination thereof. In one exemplary embodiment, the interface layer comprises a thickness of between about 1 nm and about 10 nm.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 7, 2015
    Inventors: F. Daniel Gealy, Andrea Gotti, Davide Colombo, Kuo-Wei Chang