With Specified Electrode Composition Or Configuration Patents (Class 257/4)
  • Patent number: 10069068
    Abstract: An apparatus for non-volatile memory, and more specifically a ReRAM device with a buried resistive memory cell. The memory cell includes a first contact disposed on a substrate, an active layer, a second contact, a first diffused zone disposed within the active layer, a second diffused zone disposed within the active layer, and an active switching zone disposed within the active layer in between the first diffused zone and the second diffused zone. In one embodiment, the active zone may be doped by diffusion or ion implantation and/or may be fabricated utilizing a self-aligned process. In another embodiment, the memory cell may combine a deep implant and shallow diffusion well to create the active zone. The vertically and laterally isolated buried resistive memory cell concentrates the electric field away from the edges of the device and eliminates the effects of interface impurities and contaminants.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: September 4, 2018
    Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
    Inventor: Daniel Bedau
  • Patent number: 10064281
    Abstract: In a capacitor, a width in a length direction of a first portion of a third outer electrode, which is a portion located on a first side surface, is greater than a width in a length direction of a second portion of the third outer electrode, which is a portion located on a first main surface. The first portion of the third outer electrode does not extend to first and second end surfaces.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: August 28, 2018
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Yasuo Fujii
  • Patent number: 10062840
    Abstract: A variable resistance memory device includes first memory cells and second memory cells. The first memory cells are between first and second conductive lines, and at areas at which the first and second conductive lines overlap. The second memory cells are between the second and third conductive lines, and at areas at which the second and third conductive lines overlap. Each first memory cell includes a first variable resistance pattern and a first selection pattern. Each second memory cell includes a second variable resistance pattern and a second selection pattern. At least one of the second memory cells is shifted from a closest one of the first memory cells.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: August 28, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyu-Rie Sim, Dae-Hwan Kang, Gwan-Hyeob Koh
  • Patent number: 10050084
    Abstract: Methods of forming memory cells comprising phase change and/or chalcogenide materials are disclosed. In one aspect, the method includes providing a lower line stack extending in a first direction, the lower line stack comprising a sacrificial line over a lower conductive line. The method further includes forming a chalcogenide line extending in the first direction by selectively removing the sacrificial material of the sacrificial line and replacing the sacrificial line with a chalcogenide material.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: August 14, 2018
    Assignee: MICRON TECHNOLOGY, INC.
    Inventors: Jong-Won Lee, Gianpaolo Spadini, Stephen W. Russell, Derchang Kau
  • Patent number: 10050195
    Abstract: A resistive random access memory device having a nano-scale tip and a nanowire is provided. A memory array using the same also is provided and fabrication method thereof. A technique is provided for forming a bottom electrode having an upwardly protruding tapered tip structure through etching a semiconductor substrate and a top electrode being formed of a nanowire and a technique forming a resistive random access memory device at a location intersected with each other in order that an area of each memory cell is minimized and that an electric field is focused on the tip of the bottom electrode across the top electrode.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: August 14, 2018
    Assignees: Seoul National University R&DB FOUNDATION, INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
    Inventors: Byung-Gook Park, Sung Hun Jin, Sunghun Jung, Minhwi Kim
  • Patent number: 10043705
    Abstract: A memory device includes a dielectric structure, a tungsten plug, a bottom electrode, a resistance switching element and a top electrode. The dielectric structure has an opening. The tungsten plug is embedded in the opening of the dielectric structure. The bottom electrode extends along top surfaces of the dielectric structure and the tungsten plug. The resistance switching element is present over the bottom electrode. The top electrode is present over the resistance switching element.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: August 7, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Chang Chu, Yao-Wen Chang, Sheng-Chau Chen, Alexander Kalnitsky
  • Patent number: 10038135
    Abstract: An electrostrictive composite includes a flexible polymer matrix and a carbon nanotube film structure. The carbon nanotube film structure is at least partially embedded into the flexible polymer matrix through a first surface. The carbon nanotube film structure includes a plurality of carbon nanotubes combined by van der Waals attractive force therebetween.
    Type: Grant
    Filed: April 14, 2016
    Date of Patent: July 31, 2018
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Lu-Zhuo Chen, Chang-Hong Liu, Jia-Ping Wang, Shou-Shan Fan
  • Patent number: 10026894
    Abstract: An example memristor includes a first conductive layer, a switching layer, and a second conductive layer. The first conductive layer may include a first conductive material and a second conductive material. The second conductive material may have a higher diffusivity than the first conductive material. The switching layer may be coupled to the first conductive layer and may include a first oxide having the first conductive material and a second oxide having the second conductive material. The second conductive layer may be coupled to the switching layer.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: July 17, 2018
    Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
    Inventors: Ning Ge, Jianhua Yang, Zhiyong Li, Minxian Zhang, Katy Samuels
  • Patent number: 10026782
    Abstract: Systems and methods for improving performance of a non-volatile memory that utilizes a Vacancy Modulated Conductive Oxide (VMCO) structure are described. The VMCO structure may include a layer of amorphous silicon (e.g., a Si barrier layer) and a layer titanium oxide (e.g., a TiO2 switching layer). In some cases, the VMCO structure or VMCO stack may use bulk switching or switching O-ion movements across an area of the VMCO structure, as opposed to switching locally in a constriction of vacancy formed filamentary path. A VMCO structure may be partially or fully embedded within a word line layer of a memory array.
    Type: Grant
    Filed: June 26, 2017
    Date of Patent: July 17, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Yoichiro Tanaka, Yangyin Chen, Chu-Chen Fu, Christopher Petti
  • Patent number: 10026480
    Abstract: Some embodiments include apparatuses and methods using first and second select gates coupled in series between a conductive line and a first memory cell string of a memory device, and third and fourth select gates coupled in series between the conductive line and a second memory cell string of the memory device. The memory device can include first, second, third, and fourth select lines to provide first, second, third, and fourth voltages, respectively, to the first, second, third, and fourth select gates, respectively, during an operation of the memory device. The first and second voltages can have a same value. The third and fourth voltages can have different values.
    Type: Grant
    Filed: August 4, 2017
    Date of Patent: July 17, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Akira Goda, Haitao Liu, Changhyun Lee
  • Patent number: 10014347
    Abstract: An array of memory cells includes buried access lines having conductively doped semiconductor material. Pillars extend elevationally outward of and are spaced along the buried access lines. The pillars individually include a memory cell. Outer access lines are elevationally outward of the pillars and the buried access lines. The outer access lines are of higher electrical conductivity than the buried access lines. A plurality of conductive vias is spaced along and electrically couple pairs of individual of the buried and outer access lines. A plurality of the pillars is between immediately adjacent of the vias along the pairs. Electrically conductive metal material is directly against tops of the buried access lines and extends between the pillars along the individual buried access lines. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: July 3, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Kunal R. Parekh
  • Patent number: 10014469
    Abstract: The present disclosure provides a semiconductor structure which includes a conductive layer and a resistance configurable structure over the conductive layer. The resistance configurable structure includes a first electrode, a resistance configurable layer over the first electrode, and a second electrode over the resistance configurable layer. The first electrode has a first sidewall, a second sidewall, and a bottom surface on the conductive layer. A joint between the first sidewall and the second sidewall includes an electric field enhancement structure. The present disclosure also provides a method for manufacturing the above semiconductor structure, including patterning a hard mask on a conductive layer; forming a spacer around the hard mask; removing at least a portion of the hard mask; forming a conforming resistance configurable layer on the spacer; and forming a second conductive layer on the conforming resistance configurable layer.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: July 3, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Po-Hao Lee, Chung-Cheng Chou, Wen-Ting Chu
  • Patent number: 10008668
    Abstract: A thermally optimized phase change memory cell includes a phase change material element disposed between first and second electrodes. The second electrode includes a thermally insulating region having a first thermal resistivity over the first electrode and a metallic contact region interposed between the phase change material element and the thermally insulating region, where the metallic contact layer has a second thermal resistivity lower than the first thermal resistivity.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: June 26, 2018
    Assignee: MICRON TECHNOLOGY, INC.
    Inventors: Mattia Boniardi, Andrea Redaelli
  • Patent number: 9997569
    Abstract: According to one embodiment, a memory device includes a first electrode, a second electrode, a first layer, and a second layer. The first electrode includes a first element. The first layer is provided between the first electrode and the second electrode. The first layer includes at least one of an insulator or a first semiconductor. The second layer is provided between the first layer and the second electrode. The second layer includes a first region and a second region. The second region is provided between the first region and the second electrode. The second region includes a second element. A standard electrode potential of the second element is lower than a standard electrode potential of the first element. A concentration of nitrogen in the first region is higher than a concentration of nitrogen in the second region.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: June 12, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Marina Yamaguchi, Shosuke Fujii, Yuuichi Kamimuta, Takayuki Ishikawa, Masumi Saitoh
  • Patent number: 9990994
    Abstract: Methods for programming data to an array of memory cells having a first memory cell, a second memory cell that is adjacent to the first memory cell in a first direction along a first axis, and a third memory cell that is adjacent to the first memory cell in a second direction along a second axis.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: June 5, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Andrea Redaelli
  • Patent number: 9990995
    Abstract: Systems having a resistive memory device having control circuitry configured to build a data word from remapped data bits from a received data word such that pairs of data bits are mapped to adjacent locations in the built data word, the control circuitry further configured to program the built data word to memory cells coupled to a selected data line such that, during a same program operation, pairs of adjacent memory cells along the selected data line are programmed with the pairs of data.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: June 5, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Andrea Redaelli
  • Patent number: 9985205
    Abstract: According to one embodiment, a semiconductor memory device includes first and second interconnect parts, and a second interconnect connection part. The first interconnect part includes a first core part, and a first interconnect layer. The first interconnect layer includes a first surrounding region and a first extended region. The second interconnect part includes a second core part, and a second interconnect layer. The second interconnect layer includes a second surrounding region and a second extended region. The second extended connection part overlaps a part of the first extended region in the third direction, overlaps the second core part in the first direction, and is electrically connected to the second core part. The second extended surrounding part is provided around the second extended connection part and contains a material contained in the first surrounding region.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: May 29, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Yusuke Arayashiki
  • Patent number: 9985206
    Abstract: A resistive switching memory stack is provided. The resistive switching memory stack includes a bottom electrode, formed from one or more metals. The resistive switching memory stack further includes a metal oxide layer, disposed over the bottom electrode, formed from an Atomic Layer Deposition (ALD) of one or more metal oxides. The resistive switching memory stack also includes a top electrode, disposed over the metal oxide layer, formed from the ALD of a plurality of metals into a metal layer stack. An oxygen vacancy concentration of the resistive switching memory stack is controlled by (i) a thickness of the plurality of metals forming the top electrode and (ii) a percentage of a particular one of the plurality of metals in the metal layer stack of the top electrode.
    Type: Grant
    Filed: February 1, 2017
    Date of Patent: May 29, 2018
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Vijay Narayanan, John Rozen
  • Patent number: 9984749
    Abstract: A current driver may include a current applying circuit and a current adjusting circuit. The current applying circuit may include a threshold switching element, and may provide unlimited amount of current while occupying small circuit area therefor. The current adjusting circuit may provide a bias voltage and control an amount of the current provided from the current applying circuit.
    Type: Grant
    Filed: April 10, 2017
    Date of Patent: May 29, 2018
    Assignee: SK hynix Inc.
    Inventors: Ho Seok Em, Seok Joon Kang
  • Patent number: 9978936
    Abstract: The concentration of a constituent within a chalcogenide film used to form a chalcogenide containing semiconductor may be adjusted post deposition by reacting the chalcogenide film with a material in contact with the chalcogenide film. For example, a chalcogenide film containing tellurium may be coated with a titanium layer. Upon the application of heat, the titanium may react with the tellurium to a controlled extent to reduce the concentration of tellurium in the chalcogenide film.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: May 22, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Davide Erbetta, Camillo Bresolin, Silvia Rossini
  • Patent number: 9978942
    Abstract: Subject matter disclosed herein may relate to devices formed from correlated electron material.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: May 22, 2018
    Assignee: ARM Ltd.
    Inventors: Lucian Shifren, Kimberly Gay Reid, Gregory Munson Yeric
  • Patent number: 9966305
    Abstract: A method for forming an ion flow barrier between conductors includes forming a barrier material through a via in an interlevel dielectric layer and onto a first metal layer and recessing the barrier material to form a thickness of the barrier material on the first metal layer in the via, the thickness forming an ion flow barrier. A second metal layer is deposited in the via over the ion flow barrier such that, during operation, the ion flow barrier reduces ion flow between the first metal layer and the second metal layer while maintaining low resistance.
    Type: Grant
    Filed: November 1, 2016
    Date of Patent: May 8, 2018
    Assignee: International Business Machines Corporation
    Inventors: James J. Demarest, James J. Kelly, Koichi Motoyama, Christopher J. Penny, Oscar van der Straten
  • Patent number: 9960224
    Abstract: A three capacitor stack and associated methods are shown. An exemplary capacitor device may include a first capacitor stack that includes a first plurality of layers of reference electrodes interleaved with first capacitor electrodes, a second capacitor stack on the first capacitor stack that includes a second plurality of layers of reference electrodes interleaved with second capacitor electrodes, and a third capacitor stack on the second capacitor stack that includes a reference electrode and a third capacitor electrode. A respective layer of dielectric material is formed between the reference electrodes and the first capacitor electrodes, the second capacitor electrodes, and the third capacitor electrode.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: May 1, 2018
    Assignee: Intel Corporation
    Inventors: Eng Huat Goh, Jiun Hann Sir, Han Kung Chua, Min Suet Lim, Hoay Tien Teoh
  • Patent number: 9953919
    Abstract: An eFuse structure of a semiconductor device may include a first metal formed at a first level on a substrate, a second metal formed at a second level between the first level and the substrate, a third metal formed at a third level between the second level and the substrate, a first via connecting the first metal to the second metal, and a second via connecting the second metal to the third metal. The first metal may include a first portion extending in a first direction, a second portion extending in the first direction and being adjacent to the first portion, and a third portion connecting the first portion to the second portion. A first distance between the first portion and the second portion may be greater than a width of the second portion in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Hyun-Min Choi
  • Patent number: 9947867
    Abstract: A method of fabricating a resistive memory element having a layer structure includes: providing a substrate; depositing a first electrode on an upper surface of the substrate; forming a layer of confining material on an upper surface of the first electrode so as to define a cavity having a maximal lateral dimension that is less than 60 nm along a direction parallel to an average plane of the first electrode, the confining material having a thermal conductivity greater than 0.5 W/(m·K); depositing a resistively switchable material as an amorphous compound comprising carbon to fill the cavity; and depositing a second electrode on an upper surface of the resistively switchable material.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: April 17, 2018
    Assignee: International Business Machines Corporation
    Inventors: Alessandro Curioni, Wabe W. Koelmans, Abu Sebastian, Federico Zipoli
  • Patent number: 9947722
    Abstract: A semiconductor memory device according to the embodiment includes a first wiring, a second wiring, a resistance change film, a metal film, and a first film. The first wiring is provided between a first interlayer insulating film and a second interlayer insulating film. The second wiring is provided intersecting with the first wiring and extends in a first direction. The resistance change film is provided between the first wiring and the second wiring. The metal film is provided between the second wiring and the resistance change film. The first film is provided between the first wirings and includes chalcogen.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: April 17, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Kazuhiko Yamamoto, Kunifumi Suzuki
  • Patent number: 9941470
    Abstract: The present disclosure relates to an integrated circuit, which includes a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a lower metal layer, an intermediate metal layer disposed over the lower metal layer, and an upper metal layer disposed over the intermediate metal layer. An upper surface of the lower metal layer and a lower surface of the intermediate metal layer are spaced vertically apart by a first distance. A resistive random access memory (RRAM) cell is arranged between the lower metal layer and the upper metal layer. The RRAM cell includes a bottom electrode and a top electrode which are separated by a data storage layer having a variable resistance. The data storage layer vertically spans a second distance that is greater than the first distance.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jen-Sheng Yang, Chih-Yang Chang, Chin-Chieh Yang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Yu-Wen Liao, Manish Kumar Singh
  • Patent number: 9935265
    Abstract: A resistive random access memory overcomes the low reliability of the conventional resistive random access memory. The resistive random access memory includes a resistance changing layer and two electrode layers. The two electrode layers are coupled with the resistance changing layer. Each of the two electrode layers includes a doping area containing a heavy element. In such an arrangement, the above deficiency can be overcome.
    Type: Grant
    Filed: October 12, 2016
    Date of Patent: April 3, 2018
    Assignee: National Sun Yat-Sen University
    Inventors: Ting-Chang Chang, Kuan-Chang Chang, Tsung-Ming Tsai, Chih-Hung Pan, Po-Hsun Chen
  • Patent number: 9935263
    Abstract: An electronic device includes a semiconductor memory. The semiconductor memory includes a selection element layer; a material layer directly coupled to a first surface of the selection element layer and including a conductive filament; and a variable resistance layer coupled to a second surface of the selection element layer opposite to the first surface.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: April 3, 2018
    Assignee: SK HYNIX INC.
    Inventor: Kwang-Hee Cho
  • Patent number: 9935357
    Abstract: Systems and methods are disclosed for positioning an antenna in a portable information handling system. A portable information handling system includes a housing having a first housing portion and a second housing portion. The portable information handling system also includes a hinge assembly rotationally coupling the first and second housing portions. The portable information handling system also includes an antenna disposed within the first housing portion, the antenna operable to transmit radio waves. The portable information handling system further includes an antenna aperture formed within the first housing portion. The second housing portion comprises a radio frequency (RF) permeable region comprising RF permeable material, the RF permeable region located in proximity to the antenna aperture when the portable information handling system is in tablet mode, tablet mode representing the first housing portion rotated approximately 360 degrees from the second housing portion.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: April 3, 2018
    Assignee: Dell Products L.P.
    Inventors: Benny J. Bologna, Mark Andrew Schwager, Julian Spencer
  • Patent number: 9922708
    Abstract: A voltage controlling circuit may include a first voltage terminal, a second voltage terminal and a plurality of Ovonic threshold switch (OTS) units. The second voltage terminal may have a voltage different from that of the first voltage terminal. The OTS devices may be connected between the first voltage terminal and the second voltage terminal. The OTS units may be serially connected with each other.
    Type: Grant
    Filed: January 12, 2017
    Date of Patent: March 20, 2018
    Assignee: SK hynix Inc.
    Inventor: Yun Seok Hong
  • Patent number: 9911692
    Abstract: Conductive structures include a plurality of conductive steps and a contact extending at least partially therethrough in communication with at least one of the plurality of conductive steps and insulated from at least another one of the conductive steps. Devices may include such conductive structures. Systems may include a semiconductor device and a stair step conductive structure having a plurality of contacts extending through a step of the stair step conductive structure. Methods of forming conductive structures include forming contacts in contact holes formed through at least one conductive step of a conductive structure. Methods of forming electrical connections in stair step conductive structures include forming contacts in contact holes formed through each step of the stair step conductive structure.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: March 6, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Michael A. Smith, Eric H. Freeman
  • Patent number: 9911916
    Abstract: In order to form a phase change thin film being flat in a nanometer level and having a good coverage, which is essential for realizing a three-dimensional ultra-high integrated phase change memory, an equipment for vapor phase growth of a phase change thin film is provided which form a phase change thin film at low temperature while the film is being kept in a completely amorphous state. A structure is provided in which an ammonia cracker is connected to a reactor of the equipment for vapor phase growth for a nitrogen radical obtained by decomposing ammonia gas. Consequently, low temperature decomposition of metal organic precursor and film formation on a substrate surface are realized. With the use of this equipment, it is possible to realize a completely amorphous film which has a flat surface at a low temperature of 135° C. using an amine complex as a Ge precursor.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: March 6, 2018
    Assignee: HITACH, LTD.
    Inventors: Yoshihisa Fujisaki, Yoshitaka Sasago, Takashi Kobayashi
  • Patent number: 9905698
    Abstract: The embodiment of the disclosure provides a method for manufacturing a low temperature poly-silicon thin film transistor, comprising forming an interlayer dielectric layer, forming a photoresist layer on the interlayer dielectric layer, and conducting a first photoresist removing on the photoresist layer to expose the interlayer dielectric layer with a first area, etching the interlayer dielectric layer with the first area to form a first depression region, conducting a second photoresist removing on the photoresist layer to expose the interlayer dielectric layer with a second area, and etching the interlayer dielectric layer with the second area and the first depression region to form a second depression region in a step form at the periphery of the first depression region.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: February 27, 2018
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventor: Changming Lu
  • Patent number: 9905758
    Abstract: The semiconductor device according to the present invention has an upper electrode, a first lower layer wiring that also functions as a lower electrode, an electrical resistance-changing film interposed between the upper electrode and the first lower layer wiring, a second lower layer wiring, and a contact plug, the contact plug connecting to the upper electrode and to the second lower layer wiring. The present invention yields a semiconductor device with which it is possible to dispose elements in high density while maintaining the reliability and manufacturing yield of the electrical resistance-changing element.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: February 27, 2018
    Assignee: NEC CORPORATION
    Inventors: Munehiro Tada, Toshitsugu Sakamoto
  • Patent number: 9893276
    Abstract: To provide a switching element having excellent operational stability and a high production yield, and a semiconductor device using the switching element, a switching element according to this invention includes a non-volatile resistive-change element, a rectifying element, and an insulating material. The non-volatile resistive-change element includes a first electrode, a second electrode, and a non-volatile resistive-change layer provided between the first electrode and the second electrode. The rectifying element includes the second electrode, a third electrode, and a volatile resistive-change layer provided between the second electrode and the third electrode. The insulating material is provided at least on the side surface of the third electrode.
    Type: Grant
    Filed: June 17, 2014
    Date of Patent: February 13, 2018
    Assignee: NEC CORPORATION
    Inventors: Naoki Banno, Munehiro Tada
  • Patent number: 9893281
    Abstract: Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a selection element, a lower electrode pattern provided on the selection element to include a horizontal portion and a vertical portion; and a phase-changeable pattern on the lower electrode pattern. The vertical portion may extend from the horizontal portion toward the phase-changeable pattern and have a top surface, whose area is smaller than that of a bottom surface of the phase-changeable pattern.
    Type: Grant
    Filed: November 7, 2016
    Date of Patent: February 13, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hideki Horii, Jeonghee Park, Sugwoo Jung
  • Patent number: 9887351
    Abstract: A resistive random access memory (RRAM) includes a first electrode, a second electrode, a base oxide provided between the first electrode and the second electrode, and a multivalent oxide provided between the first electrode and the second electrode. The multivalent oxide switches between at least two oxidative states.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: February 6, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Takashi Ando, Marwan H. Khater, Seyoung Kim, Hiroyuki Miyazoe
  • Patent number: 9881673
    Abstract: Memories having a plurality of resistive storage elements in a shared resistance variable material, a plurality of select devices coupled to the plurality of resistive storage elements in a one-to-one relationship and sense circuitry coupled to the plurality of select devices.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: January 30, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Andrea Redaelli
  • Patent number: 9865815
    Abstract: Methods of depositing silicon nitride encapsulation layers by atomic layer deposition over memory devices including chalcogenide material are provided herein. Methods include using iodine-containing and/or bromine-containing silicon precursors and depositing thermally using ammonia or hydrazine as a second reactant, or iodine-containing and/or bromine-containing silicon precursors and depositing using a nitrogen-based or hydrogen-based plasma.
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: January 9, 2018
    Assignee: Lam Research Coporation
    Inventor: Dennis M. Hausmann
  • Patent number: 9853213
    Abstract: A memory cell and method including a first electrode formed through a first opening in a first dielectric layer, a resistive layer formed on the first electrode, a spacing layer formed on the resistive layer, a second electrode formed on the resistive layer, and a second dielectric layer formed on the second electrode, the second dielectric layer including a second opening. The first dielectric layer formed on a substrate including a first metal layer. The first electrode and the resistive layer collectively include a first lip region that extends a first distance beyond the first opening. The second electrode and the second dielectric layer collectively include a second lip region that extends a second distance beyond the first opening. The spacing layer extends from the second distance to the first distance. The second electrode is coupled to a second metal layer using a via that extends through the second opening.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: December 26, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 9853219
    Abstract: Provided is a resistance-switching device. The resistance-switching device includes a first wiring including an aluminum oxide surface layer, and a second wiring including a carbon-containing surface layer in contact with the aluminum oxide surface layer. Electrochemical reaction products according to a reaction of aluminum oxide and carbon are generated or destroyed at a contact interface between the aluminum oxide surface layer and the carbon-containing surface layer according to a voltage or a current applied to the first wiring and the second wiring, and low resistance and high resistance are provided between the first wiring and the second wiring by the generation or destruction of the electrochemical reaction products.
    Type: Grant
    Filed: July 18, 2016
    Date of Patent: December 26, 2017
    Assignee: KOOKMIN UNIVERSITY INDUSTRY ACADEMY COOPERATION FOUNDATION
    Inventors: Mijung Lee, Youngdae Seo, Chaewon Kim, Museok Ko, Anjae Jo, Younhee Kim, Suji Kim, Heejoo Kim
  • Patent number: 9847297
    Abstract: This patent document provides an electronic device including a semiconductor memory that can simplify a fabrication process and improve characteristics of a variable resistance element, and a method for fabricating the same.
    Type: Grant
    Filed: September 6, 2015
    Date of Patent: December 19, 2017
    Assignee: SK hynix Inc.
    Inventor: Kwan-Woo Do
  • Patent number: 9847482
    Abstract: A resistive memory device includes a bottom electrode and a top electrode crossing the bottom electrode at a non-zero angle. A switching region operatively contacts the bottom electrode and the top electrode. The switching region defines a current path between the bottom electrode and the top electrode in an ON state. An oxygen-supplying layer operatively contacts a portion of the switching region. The oxygen-supplying layer is positioned orthogonally to the current path and to the switching region.
    Type: Grant
    Filed: April 29, 2014
    Date of Patent: December 19, 2017
    Assignee: Hewlett Packard Enterprise Development LP
    Inventor: Hans S. Cho
  • Patent number: 9837606
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: December 5, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chia-Shiung Tsai, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 9831426
    Abstract: Provided are a conductive bridging random access memory (CBRAM) device and a manufacturing method thereof. The CBRAM device includes a first electrode, a semiconductor oxide electrolyte layer formed on the first electrode and including a plurality of metal vacancies, a second electrode formed on the semiconductor oxide electrolyte layer, wherein when a positive voltage is applied to the second electrode, cations are reduced to the metal vacancies in the semiconductor oxide electrolyte layer to form a metal bridge.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: November 28, 2017
    Assignee: IUCF-HYU
    Inventor: Jea Gun Park
  • Patent number: 9831427
    Abstract: The present invention relates to memristive devices including a resistance-switching element and a barrier element. In particular examples, the barrier element is a monolayer of a transition metal chalcogenide that sufficiently inhibits diffusion of oxygen atoms or ions out of the switching element. As the location of these atoms and ions determine the state of the device, inhibiting diffusion would provide enhanced state retention and device reliability. Other types of barrier elements, as well as methods for forming such elements, are described herein.
    Type: Grant
    Filed: August 18, 2015
    Date of Patent: November 28, 2017
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventor: Gad S. Haase
  • Patent number: 9825095
    Abstract: An insulating layer is deposited over a transistor structure. The transistor structure comprises a gate electrode over a device layer on a substrate. The transistor structure comprises a first contact region and a second contact region on the device layer at opposite sides of the gate electrode. A trench is formed in the first insulating layer over the first contact region. A metal-insulator phase transition material layer with a S-shaped IV characteristic is deposited in the trench or in the via of the metallization layer above on the source side.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: November 21, 2017
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Brian S. Doyle, Elijah V. Karpov, David L. Kencke, Uday Shah, Charles C. Kuo, Robert S. Chau
  • Patent number: 9825100
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of conducting layers, a semiconductor layer, a variable resistive element, and a first wiring. The plurality of conducting layers are laminated in a first direction at predetermined pitches. The conducting layers extend in a second direction. The second direction is along the surface of the substrate. The semiconductor layer extends in the first direction. The variable resistive element is disposed at an intersection point between the plurality of conducting layers and the semiconductor layer. The first wiring is opposed to an inside of the semiconductor layer via a gate insulating film. The first wiring extends in the first direction. The semiconductor layer at least includes a first part and a second part. The first part is upward of the conducting layer on a lowermost layer. The second part is downward of the first part. The first part has a first length in a third direction.
    Type: Grant
    Filed: February 1, 2016
    Date of Patent: November 21, 2017
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yuki Sekino, Takashi Izumida, Nobutoshi Aoki
  • Patent number: 9818939
    Abstract: In one embodiment of the present invention, a resistive switching device includes a first electrode disposed over a substrate and coupled to a first potential node, a switching layer disposed over the first electrode, a conductive amorphous layer disposed over the switching layer, and a second electrode disposed on the conductive amorphous layer and coupled to a second potential node.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: November 14, 2017
    Assignee: ADESTO TECHNOLOGIES CORPORATION
    Inventors: John R. Jameson, III, John E. Sanchez, Wei Ti Lee, Yi Ma, Venkatesh P. Gopinath, Foroozan Sarah Koushan