Of Inductor (epo) Patents (Class 257/E21.022)
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Patent number: 9972564Abstract: A fabrication method of a layer structure for mounting a semiconductor device is provided, which includes the steps of: providing a base material, wherein the base material has a conductive layer having a first surface having a plurality of first conductive elements and an opposite second surface having a plurality of second conductive elements, and a first encapsulant formed on the first surface of the conductive layer for encapsulating the first conductive elements; partially removing the conductive layer to form a circuit layer that electrically connects the first conductive elements and the second conductive elements; and forming a second encapsulant on a bottom surface of the first encapsulant for encapsulating the circuit layer and the second conductive elements, thus reducing the fabrication difficulty and increasing the product yield.Type: GrantFiled: May 29, 2014Date of Patent: May 15, 2018Assignee: Siliconware Precision Industries Co., Ltd.Inventors: Fang-Lin Tsai, Yi-Feng Chang, Cheng-Jen Liu, Yi-Min Fu, Hung-Chi Chen
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Patent number: 9929084Abstract: Electronic device comprising an interconnection structure comprising an alternating stack of arrays of conducting lines and dielectric layers in which: all the lines of a same array extend in a same plane and form an equipotential; a first pattern of a first array is such that the lines of the first array intersect at several intersections; a third pattern of a third array is similar, superimposed and aligned with the first pattern; a second pattern of a second array arranged between the first and third arrays is such that the lines of the second array intersect at several intersections offset with respect to those of the first and third patterns; a first conducting via extends from a line of the first and/or third array and is not in contact with the second array.Type: GrantFiled: February 9, 2017Date of Patent: March 27, 2018Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventor: Jose-Luis Gonzalez Jimenez
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Patent number: 9917129Abstract: A semiconductor device includes: a semiconductor substrate having a first surface and a second surface that face each other, and having an element region and an isolation region, the element region including a transistor in the first surface, and the isolation region including an element isolation layer surrounding the element region; and a contact plug extending from the first surface to the second surface in the isolation region of the semiconductor substrate.Type: GrantFiled: August 25, 2014Date of Patent: March 13, 2018Assignee: SONY CORPORATIONInventors: Takashi Yokoyama, Taku Umebayashi
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Patent number: 9773878Abstract: A semiconductor device includes a first main electrode terminal and second main electrode terminal disposed on the principal surface of a semiconductor substrate so as to be spaced from one another, an insulating film formed on the principal surface of the semiconductor substrate, and a thin film resistance layer. One end side of the thin film resistance layer is connected to the first main electrode terminal and the other end side of the thin film resistance layer is connected to the second main electrode terminal, the thin film resistance layer being spirally formed on the insulating film in such a way as to surround the first main electrode terminal. The thin film resistance layer extends while oscillating in a thickness direction of the semiconductor substrate.Type: GrantFiled: July 7, 2015Date of Patent: September 26, 2017Assignee: FUJI ELECTRIC CO., LTD.Inventors: Takahide Tanaka, Masaharu Yamaji
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Patent number: 9767957Abstract: A method making a three-dimensional inductor, the method including: forming a plurality of vias in a substrate or a molding compound, wherein the vias are arranged with spacings among them; forming a metal layer having interconnects, wherein the interconnects of the metal layer connect the plurality of vias on one end of the vias; forming a plurality of wires to connect the plurality of vias on the other end of the vias to form the 3D inductor; and tuning one or more of the plurality of wires to adjust a physical configuration and inductance value of the 3D inductor.Type: GrantFiled: August 12, 2013Date of Patent: September 19, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Monsen Liu, Chung-Hao Tsai, En-Hsiang Yeh, Chuei-Tang Wang, Chen-Hua Yu
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Patent number: 9721884Abstract: An inductor device includes a first insulating layer having a first via hole, a first metal layer formed on an upper surface of the first insulating layer and having a droop portion at an upper end-side of the first via hole, a second metal layer formed on a lower surface of the first insulating layer and having a first connection part exposed to a bottom surface of the first via hole, and a first metal-plated layer formed in the first via hole and configured to connect the first connection part and the droop portion of the first metal layer.Type: GrantFiled: October 24, 2016Date of Patent: August 1, 2017Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventors: Yasuyoshi Horikawa, Tsukasa Nakanishi, Tatsuaki Denda
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Patent number: 9716056Abstract: A method for providing an inductively loaded integrated circuit includes providing a wafer with an integrated circuit formed thereon, the integrated circuit comprising at least one substrate via, including one or more substrate vias that are to be inductively loaded, and fabricating an inductive element on the backside of the wafer that electrically connects to the substrate vias that are to be inductively loaded. A corresponding apparatus includes a wafer with an integrated circuit formed on a top side of the wafer and an inductive element formed on a back side of the wafer, and at least one substrate via that extends through the wafer and electrically connects the inductive element to the integrated circuit. In certain embodiments, the inductive element comprises a plurality of conductive layers. In some embodiments, the inductive element comprises multiple turns on each conductive layer.Type: GrantFiled: January 26, 2015Date of Patent: July 25, 2017Assignee: International Business Machines CorporationInventor: Effendi Leobandung
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Patent number: 9690314Abstract: Power switching circuits including an inductive load and a switching device are described. The switches devices can be either low-side or high-side switches. Some of the switches are transistors that are able to block voltages or prevent substantial current from flowing through the transistor when voltage is applied across the transistor.Type: GrantFiled: July 16, 2014Date of Patent: June 27, 2017Assignee: Transphorm Inc.Inventors: James Honea, Yifeng Wu
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Patent number: 9589831Abstract: A method for forming a radio frequency area of an integrated circuit are provided. The method includes forming a buried oxide layer over a substrate, and an interface layer is formed between the substrate and the buried oxide layer. The method also includes etching through the buried oxide layer and the interface layer to form a deep trench, and a bottom surface of the deep trench is level with a bottom surface of the interface layer. The method further includes forming an implant region directly below the deep trench and forming an interlayer dielectric layer in the deep trench.Type: GrantFiled: December 16, 2015Date of Patent: March 7, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao
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Patent number: 9516712Abstract: In some embodiments, a light device for generating light includes light emitting diodes (LEDs), and power supply circuitry including at least one switching regulator including switching elements to provide power to the LEDs. The light device includes a device support structure including a device connector and an LED support to support the LEDs, wherein the device connector is one end of the device support structure, and the power supply circuitry is supported by the device support structure. Other embodiments are described.Type: GrantFiled: October 31, 2013Date of Patent: December 6, 2016Assignee: Intel CorporationInventors: Shekhar Y. Borkar, Stephen G. Eichenlaub
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Patent number: 9438169Abstract: A frequency shifter configured to shift the frequency of a signal, the frequency shifter comprising: a resonant structure configured to mechanically resonate at a first frequency; and a plurality of capacitors, each capacitor having a variable plate separation distance, wherein the resonant structure is configured to cause the plate separation distance of each capacitor to oscillate so as to cause the frequency of the signal to shift by the first frequency.Type: GrantFiled: December 8, 2014Date of Patent: September 6, 2016Assignee: QUALCOMM TECHNOLOGIES INTERNATIONAL, LTD.Inventors: James Collier, Tim Newton
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Patent number: 9438112Abstract: In one implementation, a power converter includes an output stage integrated circuit (IC) on a group III-V die, and a driver IC for driving the output stage IC, the driver IC fabricated on a group IV die. The power converter also includes a composite power switch split between the group III-V die and the group IV die, wherein a depletion mode group III-V transistor of the composite power switch is monolithically integrated in the group III-V die, and a group IV control switch of the composite power switch is monolithically integrated in the group IV die. As a result, the depletion mode group III-V transistor may be operated as an enhancement mode transistor.Type: GrantFiled: July 23, 2013Date of Patent: September 6, 2016Assignee: Infineon Technologies Americas Corp.Inventors: Alberto Guerra, Ahmed Masood
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Patent number: 9383418Abstract: A method of fabricating fluxgate devices to measure the magnetic field in two orthogonal, in plane directions, by using a composite-anisotropic magnetic core structure.Type: GrantFiled: May 23, 2014Date of Patent: July 5, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Anuraag Mohan, Dok Won Lee, William French, Erika L. Mazotti
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Patent number: 9363902Abstract: This disclosure provides implementations of inductors, transformers, and related processes. In one aspect, a device includes a substrate having first and second surfaces. A first inducting arrangement includes a first set of vias, a second set of vias, a first set of traces arranged over the first surface connecting the first and second vias, and a second set of traces arranged over the second surface connecting the first and second vias. A second inducting arrangement is inductively-coupled and interleaved with the first inducting arrangement and includes a third set of vias, a fourth set of vias, a third set of traces arranged over the first surface connecting the third and fourth vias, and a fourth set of traces arranged over the second surface connecting the third and fourth vias. One or more sets of dielectric layers insulate portions of the traces from one another.Type: GrantFiled: July 8, 2014Date of Patent: June 7, 2016Assignee: QUALCOMM MEMS Technologies, Inc.Inventors: Chi Shun Lo, Jonghae Kim, Chengjie Zuo, Changhan Hobie Yun
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Patent number: 9275786Abstract: A three-dimensional (3D) orthogonal inductor pair is embedded in and supported by a substrate, and has a first inductor having a first coil that winds around a first winding axis and a second inductor having a second coil that winds around a second winding axis. The second winding axis is orthogonal to the first winding axis. The second winding axis intersects the first winding axis at an intersection point that is within the substrate.Type: GrantFiled: July 18, 2014Date of Patent: March 1, 2016Assignee: QUALCOMM INCORPORATEDInventors: David Francis Berdy, Chengjie Zuo, Daeik Daniel Kim, Changhan Hobie Yun, Mario Francisco Velez, Robert Paul Mikulka, Jonghae Kim
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Patent number: 9269643Abstract: A chip package structure is provided. The chip package structure includes a chip, at least one inducting coil, a molding compound and a redistribution circuit layer. The chip includes an active surface, a back surface opposite to the active surface. The inducting coil is disposed around a periphery region of the chip. The molding compound covers the chip and the periphery region and exposes the active surface. The inducting coil is disposed at the molding compound. The redistribution circuit layer covers the active surface, part of the molding compound and part of the inducting coil, and electrically connects the chip.Type: GrantFiled: July 7, 2014Date of Patent: February 23, 2016Assignee: ChipMOS Technologies Inc.Inventor: Tsung-Jen Liao
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Patent number: 9035457Abstract: A substrate with integrated passive devices and method of manufacturing the same are presented. The substrate may include through silicon vias, at least one redistribution layer having a 1st passive device pattern and stacked vias, and an under bump metal layer having a 2nd passive device pattern.Type: GrantFiled: November 29, 2012Date of Patent: May 19, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chu-Fu Lin, Ming-Tse Lin, Yung-Chang Lin
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Patent number: 8987054Abstract: In one embodiment, methods for making semiconductor devices are disclosed.Type: GrantFiled: March 15, 2013Date of Patent: March 24, 2015Assignee: Semiconductor Components Industries, L.L.C.Inventor: Darrell Truhitte
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Patent number: 8981433Abstract: A compensation network for a radiofrequency transistor is disclosed. The compensation network comprises first and second bonding bars for coupling to a first terminal of the RF transistor and a compensation capacitor respectively; one or more bond wires coupling the first and second bonding bars together; and a compensation capacitor formed from a first set of conductive elements coupled to the second bonding bar, the first set of conductive elements interdigitating with a second set of conductive elements coupled to a second terminal of the RF transistor.Type: GrantFiled: November 23, 2011Date of Patent: March 17, 2015Assignee: NXP, B.V.Inventors: Lukas Frederik Tiemeijer, Vittorio Cuoco, Rob Mathijs Heeres, Jan Anne van Steenwijk, Marnix Bernard Willemsen, Josephus Henricus Bartholomeus van der Zanden
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Patent number: 8941213Abstract: A semiconductor device includes: a spiral-shaped inductor formed to include a metal wire; and a horseshoe-shaped inductor formed to include the metal wire. The horseshoe-shaped inductor is arranged such that an opening of the horseshoe-shaped inductor is disposed opposite to the spiral-shaped inductor. Accordingly, unnecessary wave (spurious) output from a transmitting unit can be reduced as small as possible.Type: GrantFiled: April 18, 2013Date of Patent: January 27, 2015Assignee: Renesas Electronics CorporationInventor: Takao Kihara
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Patent number: 8907460Abstract: To suppress the noise caused by an inductor leaks to the outside, and also to be configured such that magnetic field intensity change reaches the inductor. An inductor surrounds an internal circuit in a planar view and also is coupled electrically to the internal circuit. The upper side of the inductor is covered by an upper shield part and the lower side of the inductor is covered by a lower shield part. The upper shield part is formed by the use of a multilayered wiring layer. The upper shield part has plural first openings. The first opening overlaps the inductor in the planar view.Type: GrantFiled: August 28, 2013Date of Patent: December 9, 2014Assignee: Renesas Electronics CorporationInventors: Takasuke Hashimoto, Shinichi Uchida, Yasutaka Nakashiba, Takatsugu Nemoto
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Patent number: 8900964Abstract: Back-end-of-line (BEOL) wiring structures and inductors, methods for fabricating BEOL wiring structures and inductors, and design structures for a BEOL wiring structure or an inductor. A feature, which may be a trench or a wire, is formed that includes a sidewall intersecting a top surface of a dielectric layer. A surface layer is formed on the sidewall of the feature. The surface layer is comprised of a conductor and has a thickness selected to provide a low resistance path for the conduction of a high frequency signal.Type: GrantFiled: February 7, 2012Date of Patent: December 2, 2014Assignee: International Business Machines CorporationInventors: Hanyi Ding, Jeffrey P. Gambino, Zhong-Xiang He, Alvin J. Joseph, Anthony K. Stamper, Timothy D. Sullivan
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Patent number: 8866258Abstract: According to an exemplary embodiment, an interposer structure for electrically coupling a semiconductor die to a support substrate in a semiconductor package includes at least one through-wafer via extending through a semiconductor substrate, where the at least one through-wafer via provides an electrical connection between the semiconductor die and the support substrate. The interposer structure further includes a passive component including a trench conductor, where the trench conductor extends through the semiconductor substrate. The passive component further includes a dielectric liner situated between the trench conductor and the semiconductor substrate. The passive component can further include at least one conductive pad for electrically coupling the trench conductor to the semiconductor die. The passive component can be, for example, an inductor or an antenna.Type: GrantFiled: October 6, 2009Date of Patent: October 21, 2014Assignee: Broadcom CorporationInventors: Wei Xia, Xiangdong Chen, Akira Ito
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Patent number: 8860180Abstract: An inductor structure implemented within a semiconductor integrated circuit includes a coil of conductive material including at least one turn and a current return encompassing the coil. The current return is formed of a plurality of interconnected metal layers of the semiconductor integrated circuit.Type: GrantFiled: October 26, 2012Date of Patent: October 14, 2014Assignee: Xilinx, Inc.Inventors: Jing Jing, Shuxian Wu, Parag Upadhyaya
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Patent number: 8836078Abstract: The present disclosure involves a semiconductor device. The semiconductor device includes a substrate having a horizontal surface. The semiconductor device includes an interconnect structure formed over the horizontal surface of the substrate. The interconnect structure includes an inductor coil that is wound substantially in a vertical plane that is orthogonal to the horizontal surface of the substrate. The interconnect structure includes a capacitor disposed proximate to the inductor coil. The capacitor has an anode component and a cathode component. The inductor coil and the capacitor each include a plurality of horizontally extending elongate members.Type: GrantFiled: August 18, 2011Date of Patent: September 16, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Hsiu-Ying Cho
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Patent number: 8802532Abstract: Disclosed are example bipolar transistors capable of reducing the area of a collector, reducing the distance between a base and a collector, and/or reducing the number of ion implantation processes. A bipolar transistor may includes a trench formed by etching a portion of a semiconductor substrate. A first collector may be formed on the inner wall of the trench. A second collector may be formed inside the semiconductor substrate in the inner wall of the trench. A first isolation film may be formed on the sidewall of the first collector. An intrinsic base may be connected to the third collector. An extrinsic base may be formed on the intrinsic base and inside the first isolation film. A second isolation film may be formed on the inner wall of the extrinsic base. An emitter may be formed by burying a conductive material inside the second isolation film.Type: GrantFiled: July 6, 2012Date of Patent: August 12, 2014Assignee: Dongbu HiTek Co., Ltd.Inventor: Nam Joo Kim
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Patent number: 8790985Abstract: The disclosed invention provides a structure and method for providing a high lateral voltage resistance between the electrical networks, sharing a lateral plane, of conductive elements (e.g., having different high voltage potentials) comprising a coupler. In one embodiment, an integrated coupler providing a high lateral voltage resistance comprises a primary conductive element and a secondary conductive element. An isolating material is laterally configured between the electrical network of the primary conductive element and an electrical network of the secondary conductive element. The isolating material may comprise a low-k dielectric layer and prevents any lateral barrier layers (e.g., etch stop layers, diffusion barrier layers, etc.) from extending between the first conductive element and the electrical network of the second conductive element. The structure therefore provides a galvanically isolated integrated coupler which avoids electrical shorting between circuits (e.g.Type: GrantFiled: June 29, 2012Date of Patent: July 29, 2014Assignee: Infineon Technologies Austria AGInventors: Uwe Wahl, Markus Hammer, Jens-Peer Stengl
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Patent number: 8785940Abstract: An organic light-emitting display apparatus may include: a planarization layer disposed on a substrate and covering a plurality of thin film transistors; pixel electrodes, each comprising a light emission portion and anon-light emission portion, the light emission portion being arranged on the planarization layer in a first grid pattern; via-holes, each connecting one thin film transistor and one pixel electrode through the planarization layer, and arranged in a second grid pattern offset from the first grid pattern; dummy via-holes spaced apart from the via-holes; a pixel-defining layer (PDL) disposed on the planarization layer and covering the via-holes, the dummy via-holes, and the non-light emission portion of the pixel electrodes; an organic layer disposed on the light emission portion and comprising an emissive layer; and an opposite electrode disposed on the organic layer.Type: GrantFiled: September 21, 2011Date of Patent: July 22, 2014Assignee: Samsung Display Co., Ltd.Inventors: Jong-Yun Kim, Il-Jeong Lee, Young-Dae Kim
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Patent number: 8772908Abstract: An assembly and method of making same are provided. The assembly can include a first component including a dielectric region having an exposed surface, a conductive pad at the surface defined by a conductive element having at least a portion extending in an oscillating or spiral path along the surface, and a an electrically conductive bonding material joined to the conductive pad and bridging an exposed portion of the dielectric surface between adjacent segments. The conductive pad can permit electrical interconnection of the first component with a second component having a terminal joined to the pad through the electrically conductive bonding material. The path of the conductive element may or may not overlap or cross itself.Type: GrantFiled: August 20, 2012Date of Patent: July 8, 2014Assignee: Tessera, Inc.Inventor: Belgacem Haba
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Patent number: 8766400Abstract: An electronic device and fabrication method thereof are provided. The electronic device contains a glass substrate, a patterned semiconductor substrate, having at least one opening, disposed on the glass substrate and at least one passive component having a first conductive layer and a second conductive layer, wherein the first conductive layer is disposed between the patterned semiconductor substrate and the glass substrate.Type: GrantFiled: July 26, 2010Date of Patent: July 1, 2014Inventor: Ching-Yu Ni
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Patent number: 8742539Abstract: One aspect of the invention relates to a semiconductor component with a semiconductor body with a top side and with a bottom side. A first coil that is monolithically integrated with the semiconductor body is arranged distant from the bottom side and comprises N first windings, wherein N?1. The first coil has a first coil axis that extends in a direction different from a surface normal of the bottom side.Type: GrantFiled: July 27, 2012Date of Patent: June 3, 2014Assignee: Infineon Technologies Austria AGInventors: Joachim Weyers, Kevni Bueyuektas, Franz Hirler, Anton Mauder
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Patent number: 8722443Abstract: An IC device (100) includes an IC body (106) having a base layer (108) and first and second upper layers (114, 116) on the base layer. The IC body includes a cavity region (104) extending through said base and first upper layers and at least a portion of said second upper layer. In the IC device, a portion of said second upper layer in the cavity region comprises a planar inductive element (102) having first and second contacting ends (140, 142). In the IC device, at least one support member (128, 130, 132) extends at least partially into said cavity region from said IC body in at least a first direction parallel to said base layer and intersects at least a portion of said planar inductive element.Type: GrantFiled: February 12, 2013Date of Patent: May 13, 2014Assignee: Harris CorporationInventors: David M. Smith, Jeffrey A. Schlang
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Patent number: 8716832Abstract: One or more embodiments related to a semiconductor structure, comprising: a conductive feature; an outer guard ring; and an inner guard ring between the outer guard ring and the conductive feature, the inner guard ring being electrically coupled to the conductive feature.Type: GrantFiled: September 27, 2011Date of Patent: May 6, 2014Assignee: Infineon Technologies AGInventor: Martin Kerber
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Publication number: 20140110821Abstract: A semiconductor inductor structure may include a first spiral structure, located on a first metal layer, having a first outer-spiral electrically conductive track and a first inner-spiral electrically conductive track separated from the first outer-spiral electrically conductive track by a first dielectric material. A second spiral structure, located on a second metal layer, having a second outer-spiral electrically conductive track and a second inner-spiral electrically conductive track separated from the second outer-spiral electrically conductive track by a second dielectric material may also be provided. The first outer-spiral electrically conductive track may be electrically coupled to the second outer-spiral electrically conductive track and the first inner-spiral electrically conductive track may be electrically coupled to the second inner-spiral electrically conductive track.Type: ApplicationFiled: October 18, 2012Publication date: April 24, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Robert L. Barry, Robert A. Groves, Venkata N.R. Vanukuru
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Publication number: 20140084414Abstract: Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography.Type: ApplicationFiled: September 27, 2012Publication date: March 27, 2014Inventors: Christopher J. Jezewski, Kevin P. O'Brien
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Patent number: 8674477Abstract: In some embodiments, the semiconductor package includes a substrate having multiple layers, from a first layer to a final layer, a die coupled to the first layer, an electrical connector such as a solder ball coupled to the final layer, and a spiral trace disposed and electrically coupled between the die and the electrical connector. Inductance of the spiral trace is selected such that the package has a predetermined impedance. Material, cross-sectional area, number and density of windings, and total overall length of the spiral trace are selected accordingly. In other embodiments, the semiconductor package includes a substrate with multiple layers; a die coupled to the first of the layers; an electrical connector coupled to the final layer; and a spiral trace, in or on the substrate. The spiral trace is near the die, and electrically coupled between the die and the electrical connector.Type: GrantFiled: July 5, 2012Date of Patent: March 18, 2014Assignee: Rambus Inc.Inventors: Hao Shi, Jung-Hoon Chun, Xingchao Yuan
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Patent number: 8669637Abstract: An integrated passive device system is disclosed including forming a first dielectric layer over a semiconductor substrate, depositing a metal capacitor layer on the first dielectric layer, forming a second dielectric layer over the metal capacitor layer, and depositing a metal layer over the second dielectric layer for forming the integrated capacitor, an integrated resistor, an integrated inductor, or a combination thereof.Type: GrantFiled: October 27, 2006Date of Patent: March 11, 2014Assignee: Stats ChipPac Ltd.Inventors: Yaojian Lin, Haijing Cao, Robert Charles Frye, Pandi Chelvam Marimuthu
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Publication number: 20140061853Abstract: Semiconductor integrated magnetic devices such as inductors, transformers, etc., having laminated magnetic-insulator stack structures are provided, wherein the laminated magnetic-insulator stack structures are formed using electroplating techniques. For example, an integrated laminated magnetic device includes a multilayer stack structure having alternating magnetic and insulating layers formed on a substrate, wherein each magnetic layer in the multilayer stack structure is separated from another magnetic layer in the multilayer stack structure by an insulating layer, and a local shorting structure to electrically connect each magnetic layer in the multilayer stack structure to an underlying magnetic layer in the multilayer stack structure to facilitate electroplating of the magnetic layers using an underlying conductive layer (magnetic or seed layer) in the stack as an electrical cathode/anode for each electroplated magnetic layer in the stack structure.Type: ApplicationFiled: August 29, 2012Publication date: March 6, 2014Applicant: International Business Machines CorporationInventor: Bucknell C. Webb
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Patent number: 8633568Abstract: Provided is an MCP including a plurality chips stacked therein. Each of the chips includes a plurality of inductor pads configured to transmit power or signals, and at both sides of a reference inductor pad, a first and a second inductor pads are formed to generate magnetic fluxes in different directions from each other.Type: GrantFiled: December 31, 2010Date of Patent: January 21, 2014Assignee: SK Hynix Inc.Inventors: Young Won Kim, Jun Ho Lee, Hyun Seok Kim, Boo Ho Jung, Sun Ki Cho, Yang Hee Kim
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Patent number: 8618629Abstract: Methods and apparatuses for matching impedances in a flip-chip circuit assembly are presented. An apparatus for matching impedances in a flip-chip circuit assembly may include a first circuit associated with a first die and a through silicon via (TSV) coupling the first circuit to a second circuit. The apparatus may further include a first impedance matching inductor interposed between the TSV and the second circuit. A method for matching impedances in a flip-chip circuit assembly may include providing a die having a first circuit, and forming a TSV over the die. The method may further include providing a second circuit and forming a first impedance matching inductor interposed between the TSV and second circuit.Type: GrantFiled: October 8, 2009Date of Patent: December 31, 2013Assignee: QUALCOMM IncorporatedInventors: Jonghae Kim, Jeong Hwan Yang, Matthew M. Nowak
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Patent number: 8618631Abstract: A semiconductor structure having an in situ chip-level ferrite bead inductor and method for forming the same. Embodiments include a substrate, a first dielectric layer formed on the substrate, a lower ferrite layer formed on the first dielectric layer, and an upper ferrite layer spaced apart from the lower ferrite layer in the structure. A first metal layer may be formed above the lower ferrite layer and a second metal layer formed below the upper ferrite layer, wherein at least the first or second metal layer has a coil configuration including multiple turns. At least one second dielectric layer may be disposed between the first and second metal layers. The ferrite bead inductor has a small form factor and is amenable to formation using BEOL processes.Type: GrantFiled: February 14, 2012Date of Patent: December 31, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jun-De Jin, Tzu-Jin Yeh
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Publication number: 20130320490Abstract: A semiconductor device structure a semiconductor substrate having a first conductivity type and a top surface. A plurality of first doped regions is at a first depth below the top surface arranged in a checkerboard fashion. The first doped regions are of a second conductivity type. A dielectric layer is over the top surface. An inductive element is over the dielectric layer, wherein the inductive element is over the first doped regions.Type: ApplicationFiled: June 5, 2012Publication date: December 5, 2013Inventors: Ertugrul Demircan, Thomas F. McNelly
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Publication number: 20130307117Abstract: A thin-contour semiconductor device with a solenoid and iron core integrated into the device package. The solenoid windings are constructed by a stripe-shaped layer portion, deposited on the chip surface, and an arced wire portion welded to the layer portion by low-cost standard wire bonding technique. The stripes are arrayed parallel to each other, spaced apart respective insulating gaps. The arced wires span from one stripe to the adjacent next stripe by bridging the gap and keeping the clock direction constant. The arced solenoid windings are then integrated into the encapsulating device package. The ferromagnetic core may be shaped as a ring to allow the formation of a strong and nearly homogeneous magnetic field inside the solenoid, providing reliable energy storage for power supply circuits.Type: ApplicationFiled: May 18, 2012Publication date: November 21, 2013Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Sreenivasan KODURI
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Patent number: 8580647Abstract: A device using an inductor with one or more through vias, and a method of manufacture is provided. In an embodiment, an inductor is formed in one or more of the metallization layers. One or more through vias are positioned directly below the inductor. The through vias may extend through one or more dielectric layers interposed between a substrate and the inductors. Additionally, the through vias may extend completely or partially through the substrate.Type: GrantFiled: December 19, 2011Date of Patent: November 12, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiao-Tsung Yen, Yu-Ling Lin
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Publication number: 20130280879Abstract: A method for producing a rounded conductor line of a semiconductor component is disclosed. In that method, a partially completed semiconductor component is provided. The partially completed semiconductor component has a bottom side and a top side spaced distant from the bottom side in a vertical direction. Also provided is an etchant. On the top side, a dielectric layer is arranged. The dielectric layer has at least two different regions that show different etch rates when they are etched with the etchant. Subsequently, a trench is formed in the dielectric layer such that the trench intersects each of the different regions. Then, the trench is widened by etching the trench with the etchant at different etch rates. By filling the widened trench with an electrically conductive material, a conductor line is formed.Type: ApplicationFiled: April 20, 2012Publication date: October 24, 2013Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Matthias Stecher, Markus Menath, Andreas Zankl, Anja Gissibl
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Publication number: 20130256833Abstract: A triple well isolate diode including a substrate having a first conductivity type and a buried layer formed in the substrate, where the buried layer has a second conductivity type. The triple well isolated diode including an epi-layer formed over the substrate and the buried layer, where the epi-layer has the first conductivity type. The triple well isolated diode including a first well formed in the epi-layer, where the first well has the second conductivity type, a second well formed in the epi-layer, where the second well has the first conductivity type and surrounds the first well, a third well formed in the epi-layer, where the third well has the second conductivity type and surrounds the second well. The triple well isolated diode including a deep well formed in the epi-layer, where the deep well has the first conductivity type and extends beneath the first well.Type: ApplicationFiled: April 3, 2012Publication date: October 3, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang CHENG, Fu-Yu CHU, Ruey-Hsin LIU
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Patent number: 8531002Abstract: An apparatus and method for wafer level fabrication of high value inductors directly on top of semiconductor integrated circuits. The apparatus and method includes fabricating a semiconductor wafer including a plurality of dice, each of the dice including power circuitry and a switching node. Once the wafer is fabricated, then a plurality of inductors are fabricated directly onto the plurality of dice on the wafer respectively. Each inductor is fabricated by forming a plurality of magnetic core inductor members on an interconnect dielectric layer formed on the wafer. An insulating layer, and then inductor coils, are then formed over the plurality of magnetic core inductor members over each die. A plated magnetic layer is formed over the plurality of inductors respectively to raise the permeability and inductance of the structure.Type: GrantFiled: October 6, 2010Date of Patent: September 10, 2013Assignee: National Semiconductor CorporationInventors: Peter J. Hopper, Peter Johnson, Kyuwoon Hwang, Andrei Papou
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Patent number: 8525294Abstract: A package-on-package includes a semiconductor package, and a coil provided at the semiconductor package. The semiconductor package includes a bottom face, and a solder ball protruded from the bottom face. An axis of the coil is inclined with respect to the normal line of the bottom face.Type: GrantFiled: July 2, 2009Date of Patent: September 3, 2013Assignee: Renesas Electronics CorporationInventors: Akira Tada, Hiroki Tanabe, Yoshinori Okada, Ikuo Kudo
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Patent number: 8513772Abstract: A method for fabricating a inductor carrier comprises the steps of providing a substrate with a protective layer; forming a first photoresist layer on protective layer; patterning the first photoresist layer to form a first opening and first apertures; forming a first metal layer within first opening and first apertures; removing the first photoresist layer; forming a first dielectric layer on protective layer; forming a second photoresist layer on first dielectric layer; patterning the second photoresist layer to form a second aperture and a plurality of third apertures; forming a second metal layer within second aperture and third apertures; removing the second photoresist layer; forming a second dielectric layer on first dielectric layer; forming a third photoresist layer on second dielectric layer; patterning the third photoresist layer to form a fifth aperture and sixth apertures; forming a third metal layer within fifth aperture and sixth apertures.Type: GrantFiled: January 11, 2013Date of Patent: August 20, 2013Assignee: Chipbond Technology CorporationInventors: Chih-Ming Kuo, You-Ming Hsu
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Patent number: 8513750Abstract: Methods and associated structures of forming microelectronic devices are described. Those methods may include forming a first layer of magnetic material and at least one via structure disposed in a first dielectric layer, forming a second dielectric layer disposed on the first magnetic layer, forming at least one conductive structure disposed in the second dielectric layer, forming a third layer of dielectric material disposed on the conductive structure, forming a second layer of magnetic material disposed in the third layer of dielectric material and in the second layer of dielectric material, wherein the first and second layers of the magnetic material are coupled to one another.Type: GrantFiled: September 15, 2010Date of Patent: August 20, 2013Assignee: Intel CorporationInventors: Donald S. Gardner, Gerhard Schrom, Peter Hazucha, Fabrice Paillet, Tanay Karnik