Crossover Interconnections (epo) Patents (Class 257/E23.143)
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Patent number: 11523520Abstract: The invention pertains to a method for the bonding of a component embedded into a printed circuit board exhibiting the following steps: Provision of a core exhibiting at least one insulating layer and at least one conductor layer applied to the insulating layer, Embedding of at least one component into a recess of the insulating layer, wherein the contacts of the component are essentially situated in the plane of an outer surface of the core exhibiting the at least one conductor layer, Application of a photoimageable resist onto the one outer surface of the core on which the component is arranged, while filling the spaces between the contacts of the component, Clearing of end faces of the contacts and of the areas of the conductor layer covered by the photoimageable resist by exposing and developing the photoimageable resist, by application of a semi-additive process, deposition of a layer of conductor material onto the cleared end faces of the contacts and the cleared areas of the conductor layer and formType: GrantFiled: November 8, 2018Date of Patent: December 6, 2022Assignee: AT&S Austria Technologie & Systemtechnik AktiengesellschaftInventors: Gerald Weidinger, Andreas Zluc, Johannes Stahr
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Patent number: 11145655Abstract: Some embodiments relate to a memory device including first and second conductive lines extending generally in parallel with one another within over a row of memory cells. A centerline extends generally in parallel with the first and second conductive lines and is spaced between the first and second conductive lines. A first plurality of conductive line segments is over the first conductive line. Conductive line segments of the first plurality of conductive line segments are coupled to different locations on the first conductive line. A second plurality of conductive line segments are disposed over the second conductive line, and are coupled to different locations on the second conductive line.Type: GrantFiled: January 8, 2020Date of Patent: October 12, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Sahil Preet Singh, Yen-Huei Chen
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Patent number: 11088074Abstract: A multi-finger transistor including plural control electrodes (2), plural first electrodes (3), and plural second electrodes (4) is provided on a semiconductor substrate (1). A resin film (14,15) covers the transistor. A first wiring (8) electrically connecting the plural first electrodes (3) to one other is provided on the resin film (14,15). The resin film (14,15) covers contact portions between the first wiring (8) and the plural first electrodes (3). A first hollow structure (16) sealed with the resin film (14,15) is provided around the plural control electrodes (2) and the plural second electrodes (4).Type: GrantFiled: April 4, 2017Date of Patent: August 10, 2021Assignee: Mitsubishi Electric CorporationInventors: Kazuhiro Maeda, Takayuki Hisaka, Hitoshi Kurusu
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Patent number: 9854682Abstract: A laminated body of a component incorporating substrate includes insulating base members. First and second mounting terminals of a first electronic component abut on a conductor-less surface of a first insulating base member. A first interlayer connection conductor in the first insulating base member connects the first mounting terminal to a conductor pattern. Third and fourth mounting terminals of a second electronic component abut on a conductor-less surface of a second insulating base member. A second interlayer connection conductor in the second insulating base member connects the third mounting terminal to a conductor pattern that abuts a conductor pattern of the first insulating base member which faces toward the second insulating base member, and the conductor pattern of the second insulating base member faces toward the first insulating base member in a lamination direction.Type: GrantFiled: December 8, 2016Date of Patent: December 26, 2017Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Kuniaki Yosui
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Patent number: 9722327Abstract: A multi-column antenna having ports for different sub-bands is provided. In one aspect of the invention, power dividers couple the sub-band ports to the columns of radiating elements. At least one power divider is an un-equal power divider to allow a half-power beam width (HPBW) of one sub-band to be configured independently of the HPBW of the other sub-band. The ports may be combined at the radiating elements by diplexers. According to another aspect of the present invention, a multi-column antenna has a plurality of first sub-band ports and a plurality of second sub-band ports. Each of the first sub-band ports is coupled to one of the columns by a first sub-band feed network. Each of the second sub-band ports is coupled to two of the columns by a second sub-band feed network including a power divider. The different sub-bands have different MIMO optimization of the same multi-column antenna.Type: GrantFiled: March 25, 2015Date of Patent: August 1, 2017Assignee: CommScope Technologies LLCInventors: Martin Lee Zimmerman, LiShao Cai
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Patent number: 9040418Abstract: Method of forming a capture pad on a semiconductor substrate. The method includes providing a semiconductor substrate having an active side and an inactive side and having a plurality of unfilled TSVs extending between the active side and the inactive side; filling the TSVs with a metal; defining capture pad areas on at least one of the active side and the inactive side adjacent to the TSVs, the defined capture pad areas comprising insulator islands and open areas; filling the open areas with the same metal to form a capture pad in direct contact with each of the TSVs, each of the capture pads having an all metal portion that follows an outline of each of the TSVs.Type: GrantFiled: November 10, 2013Date of Patent: May 26, 2015Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, John A. Griesemer, Gary Lafontant, Kevin S. Petrarca, Richard P. Volant
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Patent number: 8890327Abstract: A microelectronic assembly includes first and second microelectronic elements. Each of the microelectronic elements has oppositely-facing first and second surfaces and edges bounding the surfaces. The first microelectronic element is disposed on the second microelectronic element with the second surface of the first microelectronic element facing toward the first surface of the second microelectronic element. The first microelectronic element preferably extends beyond at least one edge of the second microelectronic element and the second microelectronic element preferably extends beyond at least one edge of the first microelectronic element. A first edge of the first microelectronic element has a length that is smaller than a first edge of the second microelectronic element. A second edge of the first microelectronic element has a length that is greater than the second edge of the second microelectronic element.Type: GrantFiled: September 27, 2011Date of Patent: November 18, 2014Assignee: Tessera, Inc.Inventors: Ilyas Mohammed, Belgacem Haba
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Patent number: 8836135Abstract: A semiconductor device including: a semiconductor substrate; a plurality of interconnect layers disposed at different heights from the semiconductor substrate, each interconnect layer including an interconnection formed therein; and a via formed in a columnar shape extending in the stack direction of the interconnect layers, the via electrically connecting the interconnections of the different interconnect layers, the interconnections including an intermediate interconnection in contact with the via in the intermediate portion thereof, and the intermediate interconnection including a first type intermediate interconnection passing through the via in a direction perpendicular to the stack direction and in contact with the via on the top surface, bottom surface, and both side surfaces thereof.Type: GrantFiled: February 10, 2012Date of Patent: September 16, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Hirokazu Kikuchi
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Patent number: 8823173Abstract: A semiconductor device includes first and second wirings formed in a first wiring layer and extending parallel to an X direction, third and fourth wirings formed in a third wiring layer and extending parallel to a Y direction; fifth and sixth wirings formed in a second wiring layer positioned between the first and second wiring layers, a first contact conductor that connects the first wiring to the third wiring; and a second contact conductor that connects the second wiring to the fourth wiring. The first and second contact conductors are arranged in the X direction. Because the first and second contact conductors that connect wiring layers that are two or more layers apart are arranged in one direction, a prohibited area that is formed in the second wiring layer can be made narrower.Type: GrantFiled: January 11, 2013Date of Patent: September 2, 2014Assignee: PS4 Luxco S.A.R.L.Inventors: Koji Yasumori, Hisayuki Nagamine
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Patent number: 8772949Abstract: Method of forming a capture pad on a semiconductor substrate. The method includes providing a semiconductor substrate having an active side and an inactive side and having a plurality of unfilled TSVs extending between the active side and the inactive side; filling the TSVs with a metal such that the metal is recessed with respect to at least one of the active side and the inactive side and does not entirely fill the TSVs; defining capture pad areas on the at least one of the active side and inactive side adjacent to the recessed TSVs; filling the capture pad areas and recessed TSVs with the same metal to form a capture pad in direct contact with each of the TSVs, each of the capture pads having an all metal portion that follows an outline of each of the TSVs. Also disclosed is a semiconductor substrate having a capture pad.Type: GrantFiled: November 7, 2012Date of Patent: July 8, 2014Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, John A. Griesemer, Gary Lafontant, Kevin S. Petrarca, Richard P. Volant
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Patent number: 8741682Abstract: Without sacrificial layer etching, a microstructure and a micromachine are manufactured. A separation layer 102 is formed over a substrate 101, and a layer 103 to be a movable electrode is formed over the separation layer 102. At an interface of the separation layer 102, the layer 103 to be a movable electrode is separated from the substrate. A layer 106 to be a fixed electrode is formed over another substrate 105. The layer 103 to be a movable electrode is fixed to the substrate 105 with the spacer layer 103 which is partially provided interposed therebetween, so that the layer 103 to be a movable electrode and a layer 106 to be a fixed electrode face each other.Type: GrantFiled: March 8, 2012Date of Patent: June 3, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Mayumi Yamaguchi, Konami Izumi
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Patent number: 8680686Abstract: A system and method for a thin multi chip stack package with film on wire and copper wire. The package comprises a substrate and a first die overlying the substrate. Copper wires electrically connect the first die to the substrate. A film overlies the first die and a portion of the copper wires. In addition, the film adheres a second die to the first die. The film also electrically insulates the copper wires from the second die.Type: GrantFiled: June 29, 2010Date of Patent: March 25, 2014Assignee: Spansion LLCInventors: Lai Nguk Chin, Foong Yue Ho, Wong Kwet Nam, Thor Lee Lee, Sally Foong, Kevin Guan
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Patent number: 8604557Abstract: A semiconductor memory device includes: a first n-type transistor; a first p-type transistor; a first wiring layer having a first interconnecting portion for connecting a drain of the first n-type transistor and a drain of the first p-type transistor; and a second wiring layer having a first conductive portion electrically connected to the first interconnecting portion.Type: GrantFiled: December 10, 2008Date of Patent: December 10, 2013Assignee: Fujitsu Semiconductor LimitedInventor: Narumi Ohkawa
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Patent number: 8525247Abstract: A non-volatile memory device includes a lower molding layer, a horizontal interconnection line on the lower molding layer, an upper molding layer on the horizontal interconnection line, pillars extending vertically through the upper molding layer, the horizontal interconnection line, and the lower molding layer, and a buffer layer interposed between the pillars and the molding layers. The device also includes variable resistance material and a diode layer interposed between the pillars and the horizontal interconnection line.Type: GrantFiled: May 3, 2012Date of Patent: September 3, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Chan-Jin Park, Hyun-Su Ju, In-Gyu Baek
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Patent number: 8513778Abstract: Disclosed is a semiconductor device that is capable of preventing impurities such as moisture from being introduced into an active region at the time of dicing and at the time of bonding and that is capable of being easily miniaturized. The semiconductor device includes a cylindrical dummy wire having an opening for allowing a wire interconnecting a semiconductor element and an external connection terminal to pass therethrough, extending in an insulation film provided on a semiconductor layer having the semiconductor element to surround the semiconductor element, and disposed inside the external connection terminal.Type: GrantFiled: May 22, 2009Date of Patent: August 20, 2013Assignee: Oki Semiconductor Co., Ltd.Inventor: Shunichi Tokitoh
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Patent number: 8492904Abstract: One aspect of the present invention is a semiconductor device including: a semiconductor substrate; a first wiring that is formed on the semiconductor substrate; a second wiring that is formed to cross over the first wiring with a space interposed therebetween at a cross portion in which the first wiring and the second wiring cross each other; a protective film that is formed on the semiconductor substrate to cover at least a part of the first wiring, the part being located under the second wiring in the cross portion; and an insulator film that is formed in an island shape on the protective film under the second wiring in the cross portion to be located between edges of the protective film and to cover the first wiring in the cross portion.Type: GrantFiled: April 19, 2010Date of Patent: July 23, 2013Assignee: Renesas Electronics CorporationInventor: Akira Fujihara
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Patent number: 8486760Abstract: There is provided a method of manufacturing a substrate for flip chip, and a substrate for flip chip manufactured using the same. The method includes providing a base substrate including at least one conductive pad, forming a solder resist layer on the base substrate, the solder resist layer including a first opening exposing the conductive pad, forming a dry film on the solder resist layer, the dry film including a second opening connected with the first opening, forming a metal post in the first opening and a part of the second opening, filling the second opening above the metal post with solder paste, forming a solder cap by performing a reflow process on the filled solder paste, planarizing a surface of the solder cap, and removing the dry film. Accordingly, fine pitches and improve reliability can be achieved.Type: GrantFiled: September 29, 2010Date of Patent: July 16, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Tae Joon Chung, Jin Won Choi, Dong Gyu Lee, Hueng Jae Oh, Seon Jae Mun
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Patent number: 8421125Abstract: A semiconductor device includes a conductive pattern formed on a substrate, a conductive land formed to come into contact with at least part of the top surface of the conductive pattern, and a conductive section formed on the conductive land. The conductive section is electrically connected through the conductive land to the conductive pattern.Type: GrantFiled: March 8, 2012Date of Patent: April 16, 2013Assignee: Pansonic CorporationInventor: Masaki Tamaru
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Publication number: 20130075934Abstract: In one embodiment, a semiconductor device includes a first wiring provided in a first wiring layer along a first direction, a second wiring provided in a second wiring layer along a second direction orthogonal to the first direction, the second wiring intersecting with the first wiring at a first intersect portion, and a third wiring provided close to and along the second wiring in the second wiring layer, the third wiring intersecting with the first wiring at a second intersect portion, wherein a distance between the second wiring in the first intersection portion and the third wiring in the second intersection portion is narrower than a distance between the second wiring another than the first intersection portion and the third wiring another than the second intersection portion.Type: ApplicationFiled: March 16, 2012Publication date: March 28, 2013Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Osamu Oto, Takahiro Tsurudo, Kenichi Matoba, Jumpei Sato
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Patent number: 8378448Abstract: A set of metal line structures including a signal transmission metal line and a capacitively-grounded inductively-signal-coupled metal line is embedded in a dielectric material layer. A capacitor is serially connected between the capacitively-grounded inductively-signal-coupled metal line and a local electrical ground, which may be on the input side or on the output side. The set of metal line structures and the capacitor collective provide a frequency dependent inductor. The Q factor of the frequency dependent inductor has multiple peaks that enable the operation of the frequency dependent inductor at multiple frequencies. Multiple capacitively-grounded inductively-signal-coupled metal lines may be provided in the frequency-dependent inductor, each of which is connected to the local electrical ground through a capacitor. By selecting different capacitance values for the capacitors, multiple values of the Q-factor may be obtained in the frequency dependent inductor at different signal frequencies.Type: GrantFiled: December 7, 2009Date of Patent: February 19, 2013Assignee: International Business Machines CorporationInventors: Hanyi Ding, Wayne H. Woods, Jr.
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Patent number: 8362616Abstract: A semiconductor device includes first and second wirings formed in a first wiring layer and extending parallel to an X direction, third and fourth wirings formed in a third wiring layer and extending parallel to a Y direction; fifth and sixth wirings formed in a second wiring layer positioned between the first and second wiring layers, a first contact conductor that connects the first wiring to the third wiring; and a second contact conductor that connects the second wiring to the fourth wiring. The first and second contact conductors are arranged in the X direction. According to the present invention, because the first and second contact conductors that connect wiring layers that are two or more layers apart are arranged in one direction, a prohibited area that is formed in the second wiring layer can be made narrower. Therefore, the flexibility of the layout of the second wiring layer is enhanced and the restriction on the wiring density can be relaxed.Type: GrantFiled: June 21, 2010Date of Patent: January 29, 2013Assignee: Elpida Memory, Inc.Inventors: Koji Yasumori, Hisayuki Nagamine
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Patent number: 8354342Abstract: A method for fabricating a semiconductor device includes forming a plurality of bodies that are each isolated from another by a trench and each include a diffusion barrier region with a sidewall exposed to the trench, forming a doped layer gap-filling the trench, forming a sidewall junction at the exposed sidewall of the diffusion barrier region by annealing the doped layer, and forming a conductive line coupled with the sidewall junction to fill the trench.Type: GrantFiled: November 4, 2010Date of Patent: January 15, 2013Assignee: Hynix Semiconductor Inc.Inventors: Jae-Geun Oh, Seung-Joon Jeon, Jin-Ku Lee, Mi-Ri Lee, Bong-Seok Jeon
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Publication number: 20120267795Abstract: A semiconductor device includes a semiconductor layer, an active region defined in the semiconductor layer, first fingers provided on the active region and arranged in parallel with respect to a first direction, second fingers provided on the active region and interleaved with the first fingers, a bus line that is provided on an outside of the active region and interconnects the first fingers, first air bridges that are provided on the outside of the active region and are extended over the bus line, and that are connected to the second fingers, and second air bridges that are provided on the outside of the active region and are arranged in a second direction which crosses to the first direction, and that interconnect the first air bridges.Type: ApplicationFiled: April 20, 2012Publication date: October 25, 2012Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventor: Tadayuki Shimura
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Patent number: 8274156Abstract: An optoelectronic semiconductor device includes a substrate, a semiconductor system having an active layer formed on the substrate and an electrode structure formed on the semiconductor system, wherein the layout of the electrode structure having at least a first conductivity type contact zone or a first conductivity type bonding pad, a second conductivity type bonding pad, a first conductivity type extension electrode, and a second conductivity type extension electrode wherein the first conductivity type extension electrode and the second conductivity type extension electrode have three-dimensional crossover, and partial of the first conductivity type extension electrode and the first conductivity type contact zone or the first conductivity type bonding pad are on the opposite sides of the active layer.Type: GrantFiled: November 25, 2009Date of Patent: September 25, 2012Assignee: Epistar CorporationInventors: Wei-Yo Chen, Yen-Wen Chen, Chien-Yuan Wang, Min-Hsun Hsieh, Tzer-Perng Chen
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Patent number: 8242578Abstract: Disclosed are embodiments of a circuit and method for electroplating a feature (e.g., a BEOL anti-fuse device) onto a wafer. The embodiments eliminate the use of a seed layer and, thereby, minimize subsequent processing steps (e.g., etching or chemical mechanical polishing (CMP)). Specifically, the embodiments allow for selective electroplating metal or alloy materials onto an exposed portion of a metal layer in a trench on the front side of a substrate. This is accomplished by providing a unique wafer structure that allows a current path to be established from a power supply through a back side contact and in-substrate electrical connector to the metal layer. During electrodeposition, current flow through the current path can be selectively controlled. Additionally, if the electroplated feature is an anti-fuse device, current flow through this current path can also be selectively controlled in order to program the anti-fuse device.Type: GrantFiled: March 25, 2011Date of Patent: August 14, 2012Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Toshiharu Furukawa, William R. Tonti
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Patent number: 8212361Abstract: A semiconductor die package capable of being mounted to a motherboard is disclosed. The semiconductor die package includes a substrate, and a first semiconductor die mounted on the substrate, where the first semiconductor die includes a first vertical device comprising a first input region and a first output region at opposite surfaces of the first semiconductor die. The semiconductor die package includes a second semiconductor die mounted on the substrate, where second semiconductor die comprises a second vertical device comprising a second input region and a second output region at opposite surfaces of the second semiconductor die. A substantially planar conductive node clip electrically communicates the first output region in the first semiconductor die and the second input region in the second semiconductor die. The first semiconductor die and the second semiconductor die are between the substrate and the conductive node clip.Type: GrantFiled: October 8, 2009Date of Patent: July 3, 2012Assignee: Fairchild Semiconductor CorporationInventors: Rajeev Joshi, Venkat Iyer, Jonathan Klein
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Patent number: 8203213Abstract: Methods for packaging microelectronic devices and microelectronic devices formed using such methods are disclosed herein. One aspect of the invention is directed toward a method for packaging a microelectronic device that includes coupling an active side of a microelectronic die to a surface of a support member. The microelectronic die can have a backside opposite the active side, a peripheral side extending at least part way between the active side and the backside, and at least one through-wafer interconnect. The method can further include applying an encapsulant to cover a portion of the surface of the support member so that a portion of the encapsulant is laterally adjacent to the peripheral side, removing material from a backside of the microelectronic die to expose a portion of at least one through-wafer interconnect, and applying a redistribution structure to the backside of the microelectronic die.Type: GrantFiled: June 29, 2010Date of Patent: June 19, 2012Assignee: Micron Technology, Inc.Inventors: Choon Kuan Lee, Chin Hui Chong, David J. Corisis
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Patent number: 8203212Abstract: A multilayer integrated circuit (IC) including a cross pattern of air gaps in a wiring layer and methods of making the multilayer IC are provided. The patterning of the air gaps is independent of the wiring layout. Patterns of air gaps including: parallel alternating stripes of air gaps and dielectric that are orthogonal to a uni-directional metal wiring layout; parallel alternating stripes of air gaps and dielectric that are diagonal to either a uni- or bi-directional metal wiring layout; and a checkerboard pattern of air gaps and dielectric that crosses either a uni- or bi-directional metal wiring layout are easily formed by conventional photolithography and provide a comparatively uniform reduction in parasitic capacitance between the wires and the surrounding materials, when about one-half of a total length of the metal wiring layout is disposed within the air gaps.Type: GrantFiled: April 1, 2010Date of Patent: June 19, 2012Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
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Patent number: 8198733Abstract: A semiconductor device includes a conductive pattern formed on a substrate, a conductive land formed to come into contact with at least part of the top surface of the conductive pattern, and a conductive section formed on the conductive land. The conductive section is electrically connected through the conductive land to the conductive pattern.Type: GrantFiled: November 21, 2008Date of Patent: June 12, 2012Assignee: Panasonic CorporationInventor: Masaki Tamaru
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Patent number: 8178878Abstract: A mother thin film transistor (TFT) array substrate includes an insulating substrate, at least two TFT arrays and printed wirings. The TFT array includes TFTs formed on the insulating substrate. The printed wirings are connected to the TFT arrays. The printed wiring includes a discontinuous metal layer and at least one bridge layer connecting the discontinuous metal layer. The bridge layer is made from corrosion-resistant material.Type: GrantFiled: June 8, 2009Date of Patent: May 15, 2012Assignee: Chimei Innolux CorporationInventors: Charles Chien, Shang-Yu Huang, Tsau-Hua Hsieh
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Patent number: 8164197Abstract: A semiconductor device according to the present invention includes: a first interlayer dielectric film; a lower wire formed on the first interlayer dielectric film; a second interlayer dielectric film formed on the first interlayer dielectric film and the lower wire; and an upper wire formed on the second interlayer dielectric film to intersect with a prescribed portion of the lower wire in plan view. The first interlayer dielectric film is provided with a groove dug from the upper surface thereof in a region including the prescribed portion in plan view. The prescribed portion enters the groove. At least a portion of the second interlayer dielectric film formed on the lower wire has a planar upper surface.Type: GrantFiled: August 6, 2008Date of Patent: April 24, 2012Assignee: Rohm Co., Ltd.Inventors: Yuichi Nakao, Satoshi Kageyama
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Patent number: 8143725Abstract: A semiconductor device includes a first interconnect 31; a second interconnect 32 which is formed in a different interconnect layer from that of the first interconnect 31, and which has a wider line width than that of the first interconnect 31; and first and second plugs 51 and 52 which are formed in a region where the first and second interconnects 31 and 32 extend in the same direction so as to overlap one above the other, and which electrically connect the first and second interconnects 31 and 32. The first plug 51 has a larger base area than that of the second plug 52, and is formed on an end side of the first interconnect 31 with respect to the second plug 52.Type: GrantFiled: December 31, 2009Date of Patent: March 27, 2012Assignee: Panasonic CorporationInventor: Dai Motojima
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Patent number: 8138560Abstract: Without sacrificial layer etching, a microstructure and a micromachine are manufactured. A separation layer 102 is formed over a substrate 101, and a layer 103 to be a movable electrode is formed over the separation layer 102. At an interface of the separation layer 102, the layer 103 to be a movable electrode is separated from the substrate. A layer 106 to be a fixed electrode is formed over another substrate 105. The layer 103 to be a movable electrode is fixed to the substrate 105 with the spacer layer 103 which is partially provided interposed therebetween, so that the layer 103 to be a movable electrode and a layer 106 to be a fixed electrode face each other.Type: GrantFiled: May 14, 2007Date of Patent: March 20, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Mayumi Yamaguchi, Konami Izumi
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Publication number: 20120007258Abstract: A method for fabricating a semiconductor device includes forming a plurality of bodies that are each isolated from another by a trench and each include a diffusion barrier region with a sidewall exposed to the trench, forming a doped layer gap-filling the trench, forming a sidewall junction at the exposed sidewall of the diffusion barrier region by annealing the doped layer, and forming a conductive line coupled with the sidewall junction to fill the trench.Type: ApplicationFiled: November 4, 2010Publication date: January 12, 2012Inventors: Jae-Geun Oh, Seung-Joon Jeon, Jin-Ku Lee, Mi-Ri Lee, Bong-Seok Jeon
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Patent number: 8076730Abstract: System and method for transistor level routing is disclosed. A preferred embodiment comprises a semiconductor device including a first semiconductor device formed on a first active area in a substrate, the first semiconductor device having a first gate stack comprising a first high-k dielectric layer, a first metal layer and a first poly-silicon layer. The semiconductor device further includes a second semiconductor device formed on a second active area in the substrate, the second semiconductor device having a second gate stack comprising a second high-k dielectric layer, a second metal layer and a second poly-silicon layer. An electrical connection connects the first semiconductor device with the second semiconductor device and overlies the first active area, the second active area and a portion of the substrate between the first active area and the second active area.Type: GrantFiled: June 9, 2009Date of Patent: December 13, 2011Assignee: Infineon Technologies AGInventors: Martin Ostermayr, Chandraserhar Sarma
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Patent number: 8072080Abstract: The invention provides a connection structure including: a first electro-conductive film that is formed on a substrate; an insulation film that is formed on the first electro-conductive film, an end surface of the insulation film facing in a direction in which an end surface of the first electro-conductive film faces; and a second electro-conductive film that extends from the upper surface of the insulation film to reach the end surface of the first electro-conductive film across the end surface of the insulation film, the second electro-conductive film being electrically connected to the first electro-conductive film via the end surface of the first electro-conductive film.Type: GrantFiled: December 21, 2007Date of Patent: December 6, 2011Assignee: Seiko Epson CorporationInventor: Minoru Moriwaki
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Publication number: 20110241220Abstract: A multilayer integrated circuit (IC) including a cross pattern of air gaps in a wiring layer and methods of making the multilayer IC are provided. The patterning of the air gaps is independent of the wiring layout. Patterns of air gaps including: parallel alternating stripes of air gaps and dielectric that are orthogonal to a uni-directional metal wiring layout; parallel alternating stripes of air gaps and dielectric that are diagonal to either a uni- or bi-directional metal wiring layout; and a checkerboard pattern of air gaps and dielectric that crosses either a uni- or bi-directional metal wiring layout are easily formed by conventional photolithography and provide a comparatively uniform reduction in parasitic capacitance between the wires and the surrounding materials, when about one-half of a total length of the metal wiring layout is disposed within the air gaps.Type: ApplicationFiled: April 1, 2010Publication date: October 6, 2011Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
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Patent number: 8026611Abstract: A microelectronic assembly including a first and second microelectronic elements. Each of the microelectronic elements have oppositely-facing first and second surfaces and edges bounding the surfaces. The first microelectronic element is disposed on the second microelectronic element with the second surface of the first microelectronic element facing toward the first surface of the second microelectronic element. The first microelectronic element preferably extends beyond at least one edge of the second microelectronic element and the second microelectronic element preferably extends beyond at least one edge of the first microelectronic element.Type: GrantFiled: December 1, 2005Date of Patent: September 27, 2011Assignee: Tessera, Inc.Inventors: Ilyas Mohammed, Belgacem Haba
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Patent number: 7935621Abstract: Disclosed are embodiments of a circuit and method for electroplating a feature (e.g., a BEOL anti-fuse device) onto a wafer. The embodiments eliminate the use of a seed layer and, thereby, minimize subsequent processing steps (e.g., etching or chemical mechanical polishing (CMP)). Specifically, the embodiments allow for selective electroplating metal or alloy materials onto an exposed portion of a metal layer in a trench on the front side of a substrate. This is accomplished by providing a unique wafer structure that allows a current path to be established from a power supply through a back side contact and in-substrate electrical connector to the metal layer. During electrodeposition, current flow through the current path can be selectively controlled. Additionally, if the electroplated feature is an anti-fuse device, current flow through this current path can also be selectively controlled in order to program the anti-fuse device.Type: GrantFiled: February 15, 2008Date of Patent: May 3, 2011Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Toshiharu Furukawa, William R. Tonti
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Patent number: 7911063Abstract: In a semiconductor device according to an aspect of the invention, a direction in which a fourth metal interconnection layer located on a semiconductor layer is extended is orthogonal to a direction in which third interconnection layers ML30 and ML37 located on the fourth interconnection layer are extended. Thus, even in a case where a stress is applied from outside to bonding pads BP1 and BP2 located above, the stress is wholly dispersed by the third interconnection layers and the fourth interconnection layer which are laminated to intersect with each other, and stress concentration on a particular point can be relieved to restrain deterioration in semiconductor device strength to a minimum. Accordingly, it is possible to provide the semiconductor device having a structure in which productivity of the semiconductor device can be improved while the stress concentration applied from outside on the particular point of the bonding pad is relieved.Type: GrantFiled: December 3, 2008Date of Patent: March 22, 2011Assignee: Renesas Electronics CorporationInventors: Shinichi Terazono, Katsuhiko Akao
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Publication number: 20110018142Abstract: An active matrix substrate is provided with first inspection wirings (70, 75) capable of inputting inspection signals to first switching wirings that are not adjacent to each other among the first switching wirings (69, 74) and to second switching wirings that are not adjacent to each other among the second switching wirings (69, 74), and second inspection wirings (72, 77) capable of inputting inspection signals to first switching wirings that are not adjacent to each other and not connected to the first inspection wirings among the first switching wirings (69, 74) and to second switching wirings that are not adjacent to each other and not connected to the first inspection wirings among the second switching wirings (69, 74).Type: ApplicationFiled: April 28, 2009Publication date: January 27, 2011Inventors: Takehiko Kawamura, Kazunori Tanimoto, Isao Ogasawara, Masahiro Yoshida, Hideaki Takizawa
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Publication number: 20110006440Abstract: A method and system for reducing the inductance on an integrated circuit. The method and system comprises providing a first differential line, including a first input and a first output, the first differential line including at least two bondwire traces which are coupled in parallel. The method and system also comprises providing a second differential line including a second input and a second output, the second differential line including at least two bondwire traces which are coupled in parallel, the first differential line being of opposite polarity to the second differential line. The method and system further comprises cross-coupling of the first input with the second input and the first output with the second output to reduce the inductance caused by bondwire traces. A technique in accordance with the invention uses the coupling factor K to help to further reduce the inductance.Type: ApplicationFiled: July 9, 2009Publication date: January 13, 2011Applicant: RALINK TECHNOLOGY (SINGAPORE) CORPORATIONInventor: WEIJUN YAO
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Patent number: 7863615Abstract: A display unit includes, on an insulating substrate, a plurality of wirings formed to extend in different directions, a thin-film transistor, and a display element. At least one of the plurality of wirings is a divided wiring having a crossing portion formed at an intersection with the other of the plurality of wirings, and a main portion which is formed in a layer same as the other of the plurality of wirings with an insulating film in between and which is electrically connected to the crossing portion via an conductive connection provided in the insulating film. At least one of the main portion and the crossing portion includes a first layer and a second layer stacked in order from the insulating substrate side, the second layer being in direct contact with the first layer and made of a material of a higher melting point than the first layer.Type: GrantFiled: October 17, 2008Date of Patent: January 4, 2011Assignee: Sony CorporationInventors: Naoki Hayashi, Atsuya Makita, Yasunobu Hiromasu
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Publication number: 20100327459Abstract: A semiconductor device includes first and second wirings formed in a first wiring layer and extending parallel to an X direction, third and fourth wirings formed in a third wiring layer and extending parallel to a Y direction; fifth and sixth wirings formed in a second wiring layer positioned between the first and second wiring layers, a first contact conductor that connects the first wiring to the third wiring; and a second contact conductor that connects the second wiring to the fourth wiring. The first and second contact conductors are arranged in the X direction. According to the present invention, because the first and second contact conductors that connect wiring layers that are two or more layers apart are arranged in one direction, a prohibited area that is formed in the second wiring layer can be made narrower. Therefore, the flexibility of the layout of the second wiring layer is enhanced and the restriction on the wiring density can be relaxed.Type: ApplicationFiled: June 21, 2010Publication date: December 30, 2010Inventors: Koji YASUMORI, Hisayuki Nagamine
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Patent number: 7843069Abstract: A wire bond pad and method of fabricating the wire bond pad. The method including: providing a substrate; forming an electrically conductive layer on a top surface of the substrate; patterning the conductive layer into a plurality of wire bond pads spaced apart; and forming a protective dielectric layer on the top surface of the substrate in spaces between adjacent wire bond pads, top surfaces of the dielectric layer in the spaces coplanar with coplanar top surfaces of the wire bond pads.Type: GrantFiled: September 4, 2007Date of Patent: November 30, 2010Assignee: International Business Machines CorporationInventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter
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Publication number: 20100270687Abstract: One aspect of the present invention is a semiconductor device including: a semiconductor substrate; a first wiring that is formed on the semiconductor substrate; a second wiring that is formed to cross over the first wiring with a space interposed therebetween at a cross portion in which the first wiring and the second wiring cross each other; a protective film that is formed on the semiconductor substrate to cover at least a part of the first wiring, the part being located under the second wiring in the cross portion; and an insulator film that is formed in an island shape on the protective film under the second wiring in the cross portion to be located between edges of the protective film and to cover the first wiring in the cross portion.Type: ApplicationFiled: April 19, 2010Publication date: October 28, 2010Applicant: NEC ELECTRONICS CORPORATIONInventor: Akira FUJIHARA
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Patent number: 7768138Abstract: In a semiconductor device, a semiconductor chip is connected to a board through an interconnection layer. A plurality of first terminals, a plurality of second terminals and a plurality of third terminals are provided on the board, the interconnection layer and the semiconductor chip, respectively. The second terminals are connected to the first terminals through the board. The third terminals are connected to the second terminals. The interconnection layer is rotatable about a rotation axis perpendicular to an upper surface of the interconnection layer. A first terminal having a specific function out of the first terminals and a third terminal having the specific function out of the third terminals are connected to each other by rotating the interconnection layer.Type: GrantFiled: September 17, 2008Date of Patent: August 3, 2010Assignee: Panasonic CorporationInventor: Masatoshi Shinagawa
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Patent number: 7745823Abstract: A thin film panel is provided, which includes a first signal line and a second signal line crossing the first signal line and formed on a different layer from the first signal line. The second signal line includes an expansion having an enlarged area and at least one cutout, and is disposed adjacent to a crossing region where the second signal line crosses the first signal line.Type: GrantFiled: June 30, 2006Date of Patent: June 29, 2010Assignee: Samsung Electronics Co., Ltd.Inventor: Dong-Hyeon Ki
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Patent number: 7652363Abstract: Wiring lines for the supply of a voltage to feed a drive voltage to an integrated circuit formed in a semiconductor chip are disposed so as to cover a main surface of the semiconductor chip, so that, if the wiring lines are removed for the purpose of analyzing information stored in the semiconductor chip, the integrated circuit does not operate and it is impossible to analyze the information. Further, there is provided a processing detector circuit for detecting that the wiring lines have been tampered with. When the processing detector circuit detects a change in the state of the wiring lines, the integrated circuit is reset. Thus, it is possible to improve the security of information stored on the card.Type: GrantFiled: May 24, 2006Date of Patent: January 26, 2010Assignee: Renesas Technology Corp.Inventors: Hirotaka Mizuno, Yoshio Masumura, Takeo Kon, Yukio Kawashima
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Publication number: 20090321953Abstract: A circuit substrate includes a substrate body having a first terminal and a second terminal separated from the first terminal. A circuit wire includes a wiring unit for electrically connecting the first and second terminals by electrically connecting conductive polarization particles that include a first polarity and a second polarity that is opposite to the first polarity. The circuit wire also includes an insulation unit for insulating the wiring unit.Type: ApplicationFiled: September 9, 2008Publication date: December 31, 2009Inventor: Tae Min KANG