Leads Having Passage Through Base (epo) Patents (Class 257/E23.19)
  • Patent number: 8853795
    Abstract: A semiconductor device comprises a substrate provided with a doping of a first type, on which an electronic circuit is provided surrounded by a circuit portion of the substrate provided with a doping of a second type; at least one pad for connecting the electronic circuit to an external device outside the substrate, surrounded by a pad portion provided with a doping of the second type; a sensing device comprising a sensor portion of the substrate provided with a doping of the first type, for sensing a parameter forming a measure for a local electrical potential of the substrate; and an evaluation unit connected to the sensing device, for providing an evaluation signal based on a difference between the parameter and a reference value.
    Type: Grant
    Filed: February 23, 2009
    Date of Patent: October 7, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hubert Bode, Andreas Laudenbach, Andreas Roth
  • Patent number: 8703540
    Abstract: A method of packaging one or more semiconductor dies includes: providing a first die having a circuit surface and a connecting surface; providing a chip-scale frame having an inside surface and an outside surface, the chip-scale frame having a well region having an opening in the inside surface; coupling the first die to a wall of the well region using a first coupling mechanism for electrical and mechanical coupling; providing a substrate having a top surface and a bottom surface; coupling the inside surface of the chip-scale frame with the top surface of the substrate by a second coupling mechanism, wherein a gap is provided between the circuit surface of the first die and the top surface of the substrate; coupling a heat sink to the outside surface of the chip-scale frame; attaching a lid to the chip-scale frame to form a substantially airtight chamber around the first die.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: April 22, 2014
    Assignee: Semtech Corporation
    Inventors: Andrew J. Bonthron, Darren Jay Walworth
  • Patent number: 8624383
    Abstract: The invention provides an integrated circuit package and method of fabrication thereof. The integrated circuit package comprises an integrated circuit chip having a photosensitive device thereon; a bonding pad formed on an upper surface of the integrated circuit chip and electrically connected to the photosensitive device; a barrier formed between the bonding pad and the photosensitive device; and a conductive layer formed on a sidewall of the integrated circuit chip and electrically connected to the bonding pad. The barrier layer blocks overflow of the adhesive layer into a region, on which the photosensitive device is formed, to improve yield for fabricating the integrated circuit package.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: January 7, 2014
    Inventors: Yu-Lin Yen, Chen-Mei Fan
  • Publication number: 20130320516
    Abstract: Disclosed herein are a semiconductor package and a method of manufacturing the same, the semiconductor package including: a molding member having a cavity formed therein; a device mounted in the cavity; an insulating member formed inside the cavity and on and/or beneath the molding member and the device; a circuit layer formed on the insulating member, and including vias and connection pads electrically connected with the device; a solder resist layer formed on the circuit layer, and having openings exposing upper portions of the connection pads; and solder balls formed in the openings.
    Type: Application
    Filed: August 13, 2012
    Publication date: December 5, 2013
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Doo Hwan Lee, Tae Sung Jeong, Yul Kyo Chung
  • Patent number: 8546895
    Abstract: An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
    Type: Grant
    Filed: October 17, 2011
    Date of Patent: October 1, 2013
    Assignees: STMicroelectronics S.r.l., STMicroelectronics (Malta) Ltd
    Inventors: Mario Cortese, Mark Anthony Azzopardi, Edward Myers, Chantal Combi, Lorenzo Baldo
  • Patent number: 8410595
    Abstract: A semiconductor device is disclosed. At least one semiconductor chip is mounted on a substrate and is contacted to contact elements of the substrate. The encapsulation of the semiconductor chip includes the substrate, a cover and a pocket within the connected substrate and cover. The pocket is able to fix the chip in its position, and the cover is composed of the same material as the substrate.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: April 2, 2013
    Assignee: Qimonda AG
    Inventors: Steffen Kroehnert, Kerstin Nocke, Juergen Grafe, Kashi Vishwanath Machani
  • Patent number: 8367469
    Abstract: A method of packaging one or more semiconductor dies is provided. The method includes: providing a first die having a circuit surface and a connecting surface; providing a chip-scale frame having an inside surface and an outside surface, the chip-scale frame having a well region having an opening in the inside surface; coupling the first die to a wall of the well region using a first coupling mechanism for electrical and mechanical coupling; providing a substrate having a top surface and a bottom surface; coupling the inside surface of the chip-scale frame with the top surface of the substrate by a second coupling mechanism, wherein a gap is provided between the circuit surface of the first die and the top surface of the substrate; coupling a heat sink to the outside surface of the chip-scale frame using a third coupling mechanism.
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: February 5, 2013
    Assignee: Semtech Corporation
    Inventors: Andrew J. Bonthron, Darren Jay Walworth
  • Patent number: 8106408
    Abstract: A metal pattern for a high frequency signal is patterned on a flexile substrate, and the flexile substrate is bent in such a way as to form a substantially right angle at a spot corresponding to an end of the metal pattern for the signal. And an end of the metal pattern is fixedly attached to a lead pin for signaling, attached to a stem, for electrical continuity, so as to be in a posture horizontal with each other. Meanwhile, a part of the lead pins attached to the stem, being in such a state as penetrated through respective holes provided in the flexible substrate, is fixedly attached to a part of metal patterns provided on the flexible substrate so as to ensure electrical continuity therebetween.
    Type: Grant
    Filed: June 13, 2009
    Date of Patent: January 31, 2012
    Assignee: Opnext Japan, Inc.
    Inventors: Takuma Ban, Michihide Sasada, Masanobu Okayasu
  • Patent number: 8093714
    Abstract: A chip assembly may comprise a substrate having a top surface and a bottom surface. The chip assembly may comprise a first die having a circuit surface and a connecting surface, the circuit surface comprising one or more integrated circuits. The chip assembly may comprise a chip-scale frame having an inside surface, an outside surface, and a well region, the well region having an opening within the inside surface, the well region having a wall, the well region housing the first die, the first die attached to the wall by a first coupling mechanism, the inside surface coupled to the top surface of the substrate by a second coupling mechanism. The chip assembly may comprise a heat sink coupled to the outside surface of the chip-scale frame using a third coupling mechanism.
    Type: Grant
    Filed: December 10, 2009
    Date of Patent: January 10, 2012
    Assignee: Semtech Corporation
    Inventors: Andrew J. Bonthron, Darren Jay Walworth
  • Patent number: 8043881
    Abstract: An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
    Type: Grant
    Filed: December 15, 2010
    Date of Patent: October 25, 2011
    Assignees: STMicroelectronics S.r.l., STMicroelectronics (Malta) Ltd.
    Inventors: Mario Cortese, Mark Anthony Azzopardi, Edward Myers, Chantal Combi, Lorenzo Baldo
  • Patent number: 7998774
    Abstract: A package includes a substrate provided with a passing opening and a MEMS device. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated sensitive to the chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the passing opening. A protective package incorporates the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device exposed through the passing opening of the substrate.
    Type: Grant
    Filed: December 30, 2010
    Date of Patent: August 16, 2011
    Assignee: STMicroelectronics S.r.l.
    Inventors: Federico Giovanni Ziglioli, Fulvio Vittorio Fontana, Mark Shaw
  • Patent number: 7989264
    Abstract: A semiconductor package and a method for manufacturing the same is provided for minimizing or preventing warpage and twisting of semiconductor chip bodies as a result of thinning them during gringing. The semiconductor package includes a semiconductor chip body and a substrate. The semiconductor chip body has a first surface, a second surface facing away from the first surface, through-electrodes which pass through the semiconductor chip body and project from the second surface, and a warpage prevention part which projects in the shape of a fence along an edge of the second surface. The substrate has a substrate body and connection pads which are formed on an upper surface of the substrate body, facing the second surface, and which are connected with the projecting through-electrodes.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: August 2, 2011
    Assignee: Hynix Semiconductor Inc.
    Inventor: Chang Jun Park
  • Patent number: 7898043
    Abstract: A package includes a substrate provided with a passing opening and a MEMS device. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated sensitive to the chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the passing opening. A protective package incorporates the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device exposed through the passing opening of the substrate.
    Type: Grant
    Filed: January 4, 2008
    Date of Patent: March 1, 2011
    Assignee: STMicroelectronics, S.r.l.
    Inventors: Federico Giovanni Ziglioli, Fulvio Vittorio Fontana, Mark Shaw
  • Patent number: 7880283
    Abstract: A high reliability power module which includes a plurality of hermetically sealed packages each having electrical terminals formed from an alloy of tungsten copper and brazed onto a surface of a ceramic substrate.
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: February 1, 2011
    Assignee: International Rectifier Corporation
    Inventor: Weidong Zhuang
  • Patent number: 7875942
    Abstract: An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
    Type: Grant
    Filed: January 4, 2008
    Date of Patent: January 25, 2011
    Assignees: STMicroelectronics, S.r.l., STMicroelectronics (Malta) Ltd.
    Inventors: Mario Cortese, Mark Anthony Azzopardi, Edward Myers, Chantal Combi, Lorenzo Baldo
  • Patent number: 7719096
    Abstract: A semiconductor device mountable to a substrate is provided. The device includes a semiconductor die and an electrically conductive attachment region having a first attachment surface and a second attachment surface. The first attachment surface is arranged for electrical communication with the semiconductor die. An interlayer material is formed on the second attachment surface of the electrically conductive attachment region. The interlayer material is a thermally conductive, dielectric material. A housing at least in part encloses the semiconductor die and the interlayer material.
    Type: Grant
    Filed: July 9, 2007
    Date of Patent: May 18, 2010
    Assignee: Vishay General Semiconductor LLC
    Inventors: Ta-Te Chou, Xiong-Jie Zhang, Xian Li, Hai Fu, Yong-Qi Tian
  • Patent number: 7649250
    Abstract: Provided are a semiconductor package and a method for manufacturing the same. The semiconductor package includes: a substrate having a top surface on which a lead is formed and a bottom surface opposite to the top surface; a semiconductor chip attached to the top surface of the substrate and having an active surface on which a chip pad is formed and a back surface opposite to the active surface; a redistribution pattern electrically connected to the chip pad and extending from the active surface to a lateral surface of the semiconductor chip; and an interconnector electrically connecting the redistribution to the lead on the lateral surface of the semiconductor chip.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: January 19, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Tae-Sung Park
  • Patent number: 7615835
    Abstract: A semiconductor device comprises a package having a cavity in the interior thereof, a chip having a semiconductor element, a board having the chip fixed to a first region on the upper face thereof, and an adhesive portion formed in a second region on the bottom face of the board in order to fix the board to a first face of the cavity, the second region being a region on the board other than the region thereof underneath the first region.
    Type: Grant
    Filed: June 29, 2006
    Date of Patent: November 10, 2009
    Assignee: Oki Semiconductor Co., Ltd.
    Inventor: Kengo Takemasa
  • Publication number: 20090236731
    Abstract: A stackable integrated circuit package system including mounting an integrated circuit device over a package carrier, mounting a stiffener over the package carrier and mounting a mountable package carrier over the stiffener with a vertical gap between the integrated circuit device and the mountable package carrier.
    Type: Application
    Filed: March 19, 2008
    Publication date: September 24, 2009
    Inventors: Seong Bo Shim, TaeWoo Kang, Yong Hee Kang
  • Publication number: 20090195325
    Abstract: In wireless communication devices, internally matching impedance in millimeter wave packaging enables better signal retention at high frequencies in the range of 15 GHz and above. Through the use of differential wire bond signal transmission, the inherent inductance of a millimeter wave package can be matched by the capacitance of the package wire bonds if the capacitance is tailored. The capacitance can be tailored by calculating a suitable distance between wire bonds and tuning the dielectric constant of the over-mold material. A differential set of wire bonds act like a differential transmission line whose characteristic impedance can be tuned by configuring the dielectric constant of the over-mold of the millimeter wave package.
    Type: Application
    Filed: February 1, 2008
    Publication date: August 6, 2009
    Applicant: VIASAT, INC.
    Inventor: Gaurav Menon
  • Patent number: 7528467
    Abstract: The present invention relates to an IC substrate provided with over voltage protection functions and thus, a plurality of over voltage protection devices are provided on a single substrate to protect an IC chip directly. According to the present invention, there is no need to install protection devices at respective I/O ports on a printed circuit board to prevent the IC devices from damage by surge pulses. Therefore, the costs to design circuits are reduced, the limited space is efficiently utilized, and unit costs to install respective protection devices are lowered down.
    Type: Grant
    Filed: February 28, 2006
    Date of Patent: May 5, 2009
    Assignee: Inpaq Technology Co., Ltd.
    Inventor: Chun-Yuan Lee
  • Publication number: 20080283989
    Abstract: Provided are a wafer level package and a wafer level packaging method, which are capable of performing an attaching process at a low temperature and preventing contamination of internal devices. In the wafer level package, a device substrate includes a device region, where a device is formed, and internal pads on the top surface. The internal pads are electrically connected to the device. A cap substrate includes a getter corresponding to the device on the bottom surface. A plurality of sealing/attaching members are provided between the device substrate and the cap substrate to attach the device substrate and the cap substrate and seal the device region and the getter. The sealing/attaching members are formed of polymer. A plurality of vias penetrate the cap substrate and are connected to the internal pads.
    Type: Application
    Filed: May 16, 2008
    Publication date: November 20, 2008
    Applicant: SAMSUNG ELECTRO-MECANICS CO., LTD.
    Inventors: Won Kyu Jeung, Seog Moon Choi, Job Ha, Sang Hee Park, Tae Hoon Kim
  • Patent number: 7436056
    Abstract: An electronic component package includes a dielectric substrate having a first surface where an electronic component is sealed. A first signal line connecting to the electronic component and a first ground conductor are formed on the first surface of the dielectric substrate. A second signal line connected to an outside connection electrode and a second ground conductor are formed on a second surface of the dielectric substrate. The first ground conductor and the second ground conductor are connected by a plurality of ground conductor via-holes. A substrate-buried signal line connected to the first signal line and the second signal line is provided inside of the dielectric substrate so as to be put between the first ground conductor and the second ground conductor above and below and between the ground conductor via-holes on the right and left.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: October 14, 2008
    Assignee: Fujitsu Limited
    Inventors: Tszshing Cheung, Tadashi Ikeuchi, Takatoshi Yagisawa
  • Publication number: 20080224304
    Abstract: A semiconductor device includes: a semiconductor chip; a package for accommodating the chip, wherein the package has a box shape with an opening and a bottom; and a cover for sealing the opening of the package. The semiconductor chip is disposed on the bottom of the package. The cover has a plate shape. The cover includes a protrusion, which is disposed at a center of the plate shape. The protrusion protrudes toward an outside of the package.
    Type: Application
    Filed: February 26, 2008
    Publication date: September 18, 2008
    Applicant: DENSO Corporation
    Inventors: Tatsuya Watanabe, Masahiko Imoto
  • Publication number: 20080191327
    Abstract: The semiconductor device includes a semiconductor element, a lead frame electrically connected to the semiconductor element, and a package having an opening in a front surface with a part of the lead frame protruding from a bottom surface. The protruding lead frame branches into a plurality of end portions, and the end portions are bent to be positioned respectively on a side surface and one of a back surface and a bottom surface of the package.
    Type: Application
    Filed: February 1, 2008
    Publication date: August 14, 2008
    Applicant: NICHIA CORPORATION
    Inventors: Hideo ASAKAWA, Takeo KURIMOTO
  • Publication number: 20080164543
    Abstract: A package includes a substrate provided with a passing opening and a MEMS device. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated sensitive to the chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the passing opening. A protective package incorporates the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device exposed through the passing opening of the substrate.
    Type: Application
    Filed: January 4, 2008
    Publication date: July 10, 2008
    Applicant: STMicroelectronics S.r.l.
    Inventors: Federico Giovanni Ziglioli, Fulvio Vittorio Fontana, Mark Shaw
  • Publication number: 20080157330
    Abstract: A semiconductor device is disclosed. At least one semiconductor chip is mounted on a substrate and is contacted to contact elements of the substrate. The encapsulation of the semiconductor chip includes the substrate, a cover and a pocket within the connected substrate and cover. The pocket is able to fix the chip in its position, and the cover is composed of the same material as the substrate.
    Type: Application
    Filed: December 28, 2007
    Publication date: July 3, 2008
    Inventors: Steffen Kroehnert, Kerstin Nocke, Juergen Grafe, Kashi Vishwanath Machani
  • Publication number: 20080142953
    Abstract: With a conventional semiconductor device, there occurs deterioration in adhesion strength of bonded parts between a lid and a substrate. A semiconductor device according to an embodiment of the invention includes a substrate, a semiconductor chip with one of surfaces thereof, facing downward, mounted on the substrate, and a lid having a depressed part for accommodating the semiconductor chip, and a flange linked with the depressed part. Parts of the flange of the lid are bonded to the substrate by means of a binder. The flange is warped arcuately against the substrate, as seen in a side view. The bottom surface of the depressed part of the lid is bonded to the other surface of the semiconductor chip by means of a binder.
    Type: Application
    Filed: December 13, 2007
    Publication date: June 19, 2008
    Applicant: NEC ELECTRONICS CORPORATION
    Inventor: Harumi MIZUNASHI
  • Publication number: 20080128891
    Abstract: A semiconductor package substrate suitable for supporting a damage-sensitive device and a package substrate core having an upper and a lower surface. At least one pair of metal layers coats the upper and lower surfaces of the package substrate core. One pair of solder mask layers coats the outer metal layers of the at least one pair of metal layers. A plurality of vias is formed across the package substrate core and the at least one pair of metal layers. Advantageously, the plurality of vias is substantially distributed according to a homogeneous pattern in an area that is to be covered by the damage-sensitive device. A method for the production of such semiconductor package substrate is also described.
    Type: Application
    Filed: July 16, 2007
    Publication date: June 5, 2008
    Inventors: Federico Giovanni Ziglioli, Giovanni Graziosi, Mark Andrew Shaw, Mario Francesco Cortese, Conrad Max Cachia
  • Patent number: 7348663
    Abstract: A process for fabricating an integrated circuit package includes: selectively etching a first side of a substrate thereby providing etched regions of the substrate to partially define at least a plurality of contact pads; adding a dielectric material to the etched regions of the substrate; selectively etching a second side of the substrate to further define at least the plurality of contact pads and thereby provide a package base of at least the contact pads and the dielectric; mounting a semiconductor die to the package base and connecting the semiconductor die to the contact pads; fixing a lid to the package base to cover the semiconductor die in a cavity between the lid and the package base; and singulating to provide the integrated circuit package.
    Type: Grant
    Filed: July 15, 2005
    Date of Patent: March 25, 2008
    Assignee: ASAT Ltd.
    Inventors: Mohan Kirloskar, Katherine Wagenhoffer, Leo M. Higgins, III
  • Patent number: 7262491
    Abstract: A semiconductor device package comprising a semiconductor device and an electrically conductive lead frame at least partially covered by a molding compound. The electrically conductive lead frame includes a plurality of leads disposed proximate a perimeter of the package and a die pad disposed in a central region formed by the plurality of leads. The die pad includes a first die pad surface disposed at the first package face, and a second die pad surface opposite the first die pad surface. The semiconductor device is attached to a central region of the second die pad surface, and a portion of the second die pad surface extending outward from the die is roughened to improve adhesion of the die pad to the molding compound. In other aspects, grooves are disposed in the first and/or second die pad surfaces to further promote adhesion of the die pad and to prevent moisture from permeating into the vicinity of the semiconductor chip.
    Type: Grant
    Filed: September 6, 2005
    Date of Patent: August 28, 2007
    Assignee: Advanced Interconnect Technologies Limited
    Inventors: Shafidul Islam, Romarico Santos San Antonio, Anang Subagio
  • Patent number: 7262498
    Abstract: An assembly includes a substrate, a device coupled to the substrate; a ring formed on the substrate; and one or more bonding pads formed on the substrate, wherein the ring and bonding pads are formed of a same material.
    Type: Grant
    Filed: January 18, 2005
    Date of Patent: August 28, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: David M. Craig, Chien-Hua Chen, Charles C. Haluzak, Ronnie J. Yenchik
  • Patent number: 7239024
    Abstract: A semiconductor package is disclosed with a recess (51) for an integrated circuit die (52). The recess is made by bending or deforming all layers of a package substrate, and therefore the recess contains circuitry to connect to the integrated circuit die. The integrated circuit die is electrically connected to the package substrate by either wirebonds (53a), TAB or die solder balls (53b). The package substrate (50), a single sided printed wiring board, has a thick metal core (100) and one or more thin build up layers.
    Type: Grant
    Filed: November 19, 2003
    Date of Patent: July 3, 2007
    Inventor: Thomas Joel Massingill
  • Patent number: 7154173
    Abstract: This invention miniaturizes a package of a semiconductor device and simplifies a manufacturing procedure to reduce a manufacturing cost. A semiconductor wafer formed of a plurality of semiconductor chips formed with MEMS devices and wiring thereof on front surface thereof and a cap arrayed wafer disposed with a plurality of sealing caps are attached to seal the MEMS devices in cavities between them. Then, a plurality of via-holes is provided penetrating through the semiconductor wafer to form embedded electrodes therein, and bump electrodes are formed thereon. After this procedure, this structure is cut along scribe lines to be divided into each of packages.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: December 26, 2006
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Osamu Ikeda, Toshiyuki Ohkoda
  • Patent number: 6933523
    Abstract: An alignment aid for semiconductor devices. The alignment aid includes an area having a high level of reflectivity and an adjacent area having a of low level of reflectivity. The area having a low level of reflectivity includes at least one layer of tiles located in an interconnect layer of a semiconductor device and located over active circuitry of the semiconductor device. In some examples, the spacings between the tiles in a scan direction of the alignment aid is less than the wavelength of a light (e.g. a laser light) used to scan the alignment aid. In other examples, the width of the tiles in a scan direction of the alignment aid is less than the wave length of a laser used to scan the alignment aid.
    Type: Grant
    Filed: March 28, 2003
    Date of Patent: August 23, 2005
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Stephen G. Sheck