Amorphous Materials (epo) Patents (Class 257/E29.083)
  • Patent number: 11502127
    Abstract: The embodiments herein relate to semiconductor memory devices and methods of forming the same. A semiconductor memory device is provided. The semiconductor memory device includes a dual-gate transistor and a memory cell. The memory cell is adjacent to the dual-gate transistor, wherein the memory cell and the dual-gate transistor share a common electrode.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: November 15, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Shyue Seng Tan, Xinshu Cai, Eng Huat Toh
  • Publication number: 20140035104
    Abstract: In an implementation, a Germanium on insulator apparatus is fabricated by forming a patterned masking layer on a Silicon on insulator (SOI) layer that leaves a portion of the SOI layer exposed, implanting Germanium onto the exposed portion of the SOI layer to form a Silicon-Germanium island, depositing amorphous Germanium over the Silicon-Germanium island and the patterned masking layer, removing the patterned masking layer and the amorphous Germanium that was deposited onto the patterned masking layer to produce a Silicon-Germanium composite stripe, and annealing the Silicon-Germanium composite stripe to crystallize the amorphous Germanium in the Silicon-Germanium composite stripe.
    Type: Application
    Filed: July 31, 2012
    Publication date: February 6, 2014
    Inventors: Alexandre M. BRATKOVSKI, Leonid Tsybeskov
  • Publication number: 20140021470
    Abstract: An integrated circuit device includes a semiconductor substrate and a gate electrode on the semiconductor substrate. The gate electrode structure includes an insulating layer of a dielectric material on the semiconductor substrate, an oxygen barrier layer on the insulating layer, and a tungsten (W) metal layer on the oxygen barrier layer.
    Type: Application
    Filed: July 17, 2012
    Publication date: January 23, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: MARTIN M. FRANK, VIJAY NARAYANAN
  • Publication number: 20140008652
    Abstract: A through-substrate via structure including a substrate, a conductive layer, and a parasitic capacitance modulation layer is provided. The substrate has at least one opening. The opening is filled with the conductive layer. The parasitic capacitance modulation layer is disposed between the conductive layer and the substrate. The parasitic capacitance modulation layer is placed around the through-substrate via to reduce the depletion capacitance and further reduce the parasitic capacitance of the through-substrate via. Therefore, during transmission of signals with high frequency, the parasitic capacitance around the through-substrate via is rather small and thereby the operation speed of devices is increased.
    Type: Application
    Filed: August 20, 2012
    Publication date: January 9, 2014
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Tzu-Chien Hsu, Tzu-Kun Ku, Cha-Hsin Lin
  • Patent number: 8604476
    Abstract: A data retention period in a semiconductor device or a semiconductor memory device is lengthened. The semiconductor device or the semiconductor memory includes a memory circuit including a first transistor including a first semiconductor layer and a first gate and a second transistor including a second semiconductor layer, a second gate, and a third gate The first semiconductor layer is formed at the same time as a layer including the second gate.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: December 10, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kiyoshi Kato, Yutaka Shionoiri, Shuhei Nagatsuka, Yuto Yakubo, Jun Koyama
  • Patent number: 8530895
    Abstract: A semiconductor component includes a thinned semiconductor substrate having a back side and a circuit side containing integrated circuits and associated circuitry. The semiconductor component also includes at least one lasered feature on the back side configured to provide selected electrical or physical characteristics for the substrate. The lasered feature can cover the entire back side or only selected areas of the back side, and can be configured to change electrical properties, mechanical properties or gettering properties of the substrate.
    Type: Grant
    Filed: May 17, 2012
    Date of Patent: September 10, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Alan G. Wood, Tim Corbett
  • Publication number: 20130048987
    Abstract: Embodiments of the present invention provide p-i-n structures and methods for forming p-i-n structures useful, for example, in photovoltaic cells. In some embodiments, a method for forming a p-i-n structure on a substrate may include forming a bi-layer p-type layer on the substrate by: depositing a microcrystalline p-type layer atop the protective layer; and depositing an amorphous p-type layer atop the microcrystalline p-type layer; depositing an amorphous i-type layer via hot wire chemical vapor deposition atop the amorphous p-type layer; and depositing an amorphous n-type layer atop the amorphous i-type layer. A p-i-n structure may include a bi-layer p-type layer disposed above a substrate, the bi-layer p-type layer having a microcrystalline p-type layer and an amorphous p-type layer disposed atop the microcrystalline p-type layer; an amorphous i-type layer disposed atop the bi-layer p-type layer; and an n-type layer disposed atop the i-type layer.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 28, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventor: SUKTI CHATTERJEE
  • Publication number: 20130026470
    Abstract: Disclosed is a wiring structure that attains excellent low-contact resistance even if eliminating a barrier metal layer that normally is disposed between a Cu alloy wiring film and a semiconductor layer, and wiring structure with excellent adhesion. The wiring structure is provided with a semiconductor layer, and a Cu alloy layer, on a substrate in this order from the substrate side. A laminated structure is included between the semiconductor layer, and the Cu alloy layer. The laminated structure is composed of a (N, C, F, O) layer which contains at least one element selected from among a group composed of nitrogen, carbon, fluorine, and oxygen, and a Cu—Si diffusion layer which includes Cu and Si, in this order from the substrate side. At least one element selected from among the group composed of nitrogen, carbon, fluorine, and oxygen that composes the (N, C, F, O) layer is bonded to Si in the semiconductor layer.
    Type: Application
    Filed: March 30, 2011
    Publication date: January 31, 2013
    Applicant: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
    Inventors: Yasuaki Terao, Shinya Morita, Aya Miki, Katsufumi Tomihisa, Hiroshi Goto
  • Publication number: 20120273784
    Abstract: A transfer layer includes a transparent substrate. A buffer layer is formed on the transparent substrate that comprises PbO, GaN, PbTiO3, La0.5Sr0.5CoO3 (LSCO), or LaxPb1-xCoO3 (LPCO) so that separation between the buffer layer and the transparent substrate occurs at substantially high temperatures.
    Type: Application
    Filed: June 27, 2012
    Publication date: November 1, 2012
    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Il-Doo Kim, Harry L. Tuller, Yong Woo Choi, Akintunde I. Akinwande
  • Publication number: 20120241742
    Abstract: A semiconductor component includes a thinned semiconductor substrate having a back side and a circuit side containing integrated circuits and associated circuitry. The semiconductor component also includes at least one lasered feature on the back side configured to provide selected electrical or physical characteristics for the substrate. The lasered feature can cover the entire back side or only selected areas of the back side, and can be configured to change electrical properties, mechanical properties or gettering properties of the substrate.
    Type: Application
    Filed: May 17, 2012
    Publication date: September 27, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Alan G. Wood, Tim Corbett
  • Patent number: 8237166
    Abstract: An active matrix display comprising a light control device and a field effect transistor for driving the light control device. The active layer of the field effect transistor comprises an amorphous.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: August 7, 2012
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Hideya Kumomi, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Patent number: 8212252
    Abstract: An object of the present invention is to provide a new light-emitting device with the use of an amorphous oxide. The light-emitting device has a light-emitting layer existing between first and second electrodes and a field effect transistor, of which the active layer is an amorphous.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: July 3, 2012
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Tohru Den, Tatsuya Iwasaki, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Patent number: 8203146
    Abstract: Semiconductor devices and circuits with use of transparent oxide film are provided. The semiconductor device having a P-type region and an N-type region, wherein amorphous oxides with electron carrier concentration less than 1018/cm3 is used for the N-type region.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: June 19, 2012
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Katsumi Abe, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Publication number: 20120112191
    Abstract: A data retention period in a semiconductor device or a semiconductor memory device is lengthened. The semiconductor device or the semiconductor memory includes a memory circuit including a first transistor including a first semiconductor layer and a first gate and a second transistor including a second semiconductor layer, a second gate, and a third gate The first semiconductor layer is formed at the same time as a layer including the second gate.
    Type: Application
    Filed: October 11, 2011
    Publication date: May 10, 2012
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Kiyoshi KATO, Yutaka SHIONOIRI, Shuhei NAGATSUKA, Yuto YAKUBO, Jun KOYAMA
  • Patent number: 8168974
    Abstract: A novel field-effect transistor is provided which employs an amorphous oxide. In an embodiment of the present invention, the transistor comprises an amorphous oxide layer containing electron carrier at a concentration less than 1×10?18/cm3, and the gate-insulating layer is comprised of a first layer being in contact with the amorphous oxide and a second layer different from the first layer.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: May 1, 2012
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Masafumi Sano, Katsumi Nakagawa, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Publication number: 20120061672
    Abstract: Some embodiments include a method of providing a semiconductor device. The method can include: (a) providing a flexible substrate; (b) depositing at least one layer of material over the flexible substrate, wherein the deposition of the at least one layer of material over the flexible substrate occurs at a temperature of at least 180° C.; and (c) providing a diffusion barrier between a metal layer and an a-Si layer. Other embodiments are disclosed in this application.
    Type: Application
    Filed: November 17, 2011
    Publication date: March 15, 2012
    Applicants: Arizona State University
    Inventors: Shawn O'Rourke, Curtis Moyer, Scott Ageno, Dirk Bottesch, Barry O'Brien, Michael Marrs
  • Patent number: 7955890
    Abstract: Embodiments of the present invention relate to methods for depositing an amorphous film that may be suitable for using in a NIP photodiode in display applications. In one embodiment, the method includes providing a substrate into a deposition chamber, supplying a gas mixture having a hydrogen gas to silane gas ratio by volume greater than 4 into the deposition chamber, maintaining a pressure of the gas mixture at greater than about 1 Torr in the deposition chamber, and forming an amorphous silicon film on the substrate in the presence of the gas mixture, wherein the amorphous silicon film is configured to be an intrinsic-type layer in a photodiode sensor.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: June 7, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Soo Young Choi, Jriyan Jerry Chen, Tae Kyung Won, Dong-Kil Yim
  • Publication number: 20110101338
    Abstract: A non-linear element, such as a diode, in which an oxide semiconductor is used and a rectification property is favorable is provided. In a thin film transistor including an oxide semiconductor in which the hydrogen concentration is less than or equal to 5×1019/cm3, the work function ?ms of a source electrode in contact with the oxide semiconductor, the work function ?md of a drain electrode in contact with the oxide semiconductor, and electron affinity ? of the oxide semiconductor satisfy ?ms??<?md. By electrically connecting a gate electrode and the drain electrode of the thin film transistor, a non-linear element with a more favorable rectification property can be achieved.
    Type: Application
    Filed: October 26, 2010
    Publication date: May 5, 2011
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Shunpei Yamazaki, Daisuke Kawae
  • Publication number: 20110024752
    Abstract: A method of fabricating a thin film transistor includes forming a gate electrode on a substrate, forming a semiconductor layer on the gate electrode, forming a source electrode on the semiconductor layer, forming a drain electrode on the semiconductor layer spaced apart from the source electrode, forming a copper layer pattern on the source electrode and the drain electrode, exposing the copper layer pattern on the source electrode and the drain electrode to a fluorine-containing process gas to form a copper fluoride layer pattern thereon, and patterning the semiconductor layer.
    Type: Application
    Filed: October 8, 2010
    Publication date: February 3, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Shin-Il CHOI, Sang-Gab KIM, Hong-Kee CHIN, Min-Seok OH, Yu-Gwang JEONG, Seung-Ha CHOI
  • Patent number: 7872259
    Abstract: An object of the present invention is to provide a new light-emitting device with the use of an amorphous oxide. The light-emitting device has a light-emitting layer existing between first and second electrodes and a field effect transistor, of which the active layer is an amorphous.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: January 18, 2011
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Tohru Den, Tatsuya Iwasaki, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Patent number: 7868326
    Abstract: A novel field-effect transistor is provided which employs an amorphous oxide. In an embodiment of the present invention, the transistor comprises an amorphous oxide layer containing electron carrier at a concentration less than 1×10?18/cm3, and the gate-insulating layer is comprised of a first layer being in contact with the amorphous oxide and a second layer different from the first layer.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: January 11, 2011
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Masafumi Sano, Katsumi Nakagawa, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Patent number: 7863611
    Abstract: Semiconductor devices and circuits with use of transparent oxide film are provided. The semiconductor device having a P-type region and an N-type region, wherein amorphous oxides with electron carrier concentration less than 1018/cm3 is used for the N-type region.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: January 4, 2011
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Katsumi Abe, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Publication number: 20100264415
    Abstract: An interconnecting structure production method includes providing a substrate, forming a semiconductor layer on the substrate, forming a doped semiconductor layer on the semiconductor layer, the doped semiconductor layer containing a dopant, forming an oxide layer in a surface of the doped semiconductor layer by heating the surface of the doped semiconductor layer in atmosphere of an oxidizing gas with a water molecule contained therein, forming an alloy layer on the oxide layer, and forming an interconnecting layer on the alloy layer.
    Type: Application
    Filed: April 16, 2010
    Publication date: October 21, 2010
    Applicant: HITACHI CABLE, LTD.
    Inventor: Noriyuki TATSUMI
  • Patent number: 7791072
    Abstract: An active matrix display comprising a light control device and a field effect transistor for driving the light control device. The active layer of the field effect transistor comprises an amorphous.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: September 7, 2010
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Hideya Kumomi, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Publication number: 20100147369
    Abstract: The present invention provides materials, devices, and methods for generation of electricity from solar power. In one aspect, the present invention includes a solar cell, including a first conductor, a doped silicon layer in electrical communication with the first conductor, a nanodiamond layer in contact with the doped silicon layer, a doped amorphous diamond layer in contact with the nanodiamond layer, and a second conductor in electrical communication with the doped amorphous diamond layer.
    Type: Application
    Filed: November 16, 2009
    Publication date: June 17, 2010
    Inventor: Chien-Min Sung
  • Patent number: 7700936
    Abstract: In one embodiment, a method of producing an optoelectronic nanostructure includes preparing a substrate; providing a quantum well layer on the substrate; etching a volume of the substrate to produce a photonic crystal. The quantum dots are produced at multiple intersections of the quantum well layer within the photonic crystal. Multiple quantum well layers may also be provided so as to form multiple vertically aligned quantum dots. In another embodiment, an optoelectronic nanostructure includes a photonic crystal having a plurality of voids and interconnecting veins; a plurality of quantum dots arranged between the plurality of voids, wherein an electrical connection is provided to one or more of the plurality of quantum dots through an associated interconnecting vein.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: April 20, 2010
    Assignee: University of Delaware
    Inventors: Janusz Murakowski, Garrett Schneider, Dennis W. Prather
  • Patent number: 7332790
    Abstract: A process of making a partial silicon-on-insulator ledge is disclosed. A deep implantation region is created in a substrate. During a lateral cavity etch, the deep implantation region resists etching. The lateral cavity etch acts to partially isolate an active area above the deep implantation region. The deep implantation region is formed at various process stages according to embodiments. An active device is also disclosed that is achieved by the process. A system is also disclosed that uses the active device.
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: February 19, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Fernando Gonzalez, Chandra Mouli, Lyle Jones
  • Publication number: 20070290210
    Abstract: A semiconductor device and a method of fabricating a low-temperature polysilicon film are provided. An amorphous silicon film is formed over a substrate. An insulating layer and a laser absorption layer are formed over the amorphous silicon film. A photolithographic and etching process is performed to remove portions of the laser absorption layer and the insulating layer to expose portions of the amorphous silicon film. A laser crystallization process is utilized to convert the amorphous silicon film into a polysilicon film.
    Type: Application
    Filed: July 12, 2007
    Publication date: December 20, 2007
    Inventors: Chih-Hsiung Chang, Yi-Wei Chen, Ming-Wei Sun