On Silicon (epo) Patents (Class 257/E29.146)
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Patent number: 10992100Abstract: In an embodiment, a device includes: a first reflective structure including first doped layers of a semiconductive material, alternating ones of the first doped layers being doped with a p-type dopant; a second reflective structure including second doped layers of the semiconductive material, alternating ones of the second doped layers being doped with a n-type dopant; an emitting semiconductor region disposed between the first reflective structure and the second reflective structure; a contact pad on the second reflective structure, a work function of the contact pad being less than a work function of the second reflective structure; a bonding layer on the contact pad, a work function of the bonding layer being greater than the work function of the second reflective structure; and a conductive connector on the bonding layer.Type: GrantFiled: December 3, 2018Date of Patent: April 27, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, An-Jhih Su, Chia-Nan Yuan, Shih-Guo Shen, Der-Chyang Yeh, Yu-Hung Lin, Ming Shih Yeh
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Patent number: 10304969Abstract: According to one embodiment, in a semiconductor device, The first semiconductor region is provided between the first and the second electrode. The second semiconductor region is provided between the first semiconductor region and the second electrode. The first and second connection region are electrically connected to the second electrode, reaches the first semiconductor region. The first insulating film is provided between the first connection region and the second semiconductor region and between the first connection region and the first semiconductor region. The second insulating film is provided between the second connection region and the second semiconductor region and between the second connection region and the first semiconductor region.Type: GrantFiled: February 18, 2016Date of Patent: May 28, 2019Assignee: Kabushiki Kaisha ToshibaInventors: Tsuneo Ogura, Tomoko Matsudai
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Patent number: 9385228Abstract: A semiconductor mesa is formed in a semiconductor layer between a first cell trench structure and a second cell trench structure extending from a first surface into the semiconductor layer. An opening is formed in a capping layer formed on the first surface, wherein the opening exposes at least a portion of the semiconductor mesa. Through the opening impurities of a first conductivity type are introduced into the exposed portion of the semiconductor mesa. A recess defined by the opening is formed.Type: GrantFiled: November 27, 2013Date of Patent: July 5, 2016Assignee: Infineon Technologies AGInventors: Johannes Georg Laven, Maria Cotorogea
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Patent number: 9041122Abstract: Provided are a semiconductor device and a method of manufacturing the semiconductor device. In order to improve reliability by solving a problem of conductivity that may occur when an air spacer structure that may reduce a capacitor coupling phenomenon between a plurality of conductive lines is formed, there are provided a semiconductor device including: a substrate having an active region; a contact plug connected to the active region; a landing pad spacer formed to contact a top surface of the contact plug; a contact conductive layer formed to contact the top surface of the contact plug and formed in a space defined by the landing pad spacer; a metal silicide layer formed on the contact conductive layer; and a landing pad connected to the contact conductive layer in a state in which the metal silicide layer is disposed between the landing pad and the contact conductive layer, and a method of manufacturing the semiconductor device.Type: GrantFiled: May 1, 2014Date of Patent: May 26, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Won-seok Yoo, Young-seok Kim, Han-jin Lim, Jeon-Il Lee
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Patent number: 8581344Abstract: A laterally diffused metal oxide semiconductor transistor. The laterally diffused metal oxide semiconductor transistor includes a substrate, a drain formed thereon, a source formed on the substrate, comprising a plurality of individual sub-sources respectively corresponding to various sides of the drain, a plurality of channels formed in the substrate between the sub-sources and the drain, a gate overlying a portion of the sub-sources and the channels, and a drift layer formed in the substrate underneath the drain.Type: GrantFiled: April 6, 2007Date of Patent: November 12, 2013Assignee: Vanguard International Semiconductor CorporationInventor: Ya-Sheng Liu
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Patent number: 8482043Abstract: An embodiment of the invention reduces the external resistance of a transistor by utilizing a silicon germanium alloy for the source and drain regions and a nickel silicon germanium self-aligned silicide (i.e., salicide) layer to form the contact surface of the source and drain regions. The interface of the silicon germanium and the nickel silicon germanium silicide has a lower specific contact resistivity based on a decreased metal-semiconductor work function between the silicon germanium and the silicide and the increased carrier mobility in silicon germanium versus silicon. The silicon germanium may be doped to further tune its electrical properties. A reduction of the external resistance of a transistor equates to increased transistor performance both in switching speed and power consumption.Type: GrantFiled: December 29, 2009Date of Patent: July 9, 2013Assignee: Intel CorporationInventors: Anand Murthy, Boyan Boyanov, Glenn A Glass, Thomas Hoffman
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Publication number: 20130049200Abstract: Silicidation techniques with improved rare earth silicide morphology for fabrication of semiconductor device contacts. For example, a method for forming silicide includes implanting a silicon layer with an amorphizing species to fond an amorphous silicon region in the silicon layer and depositing a rare earth metal film on the silicon layer in contact with the amorphous silicon region. A silicide process is then performed to combine the rare earth metal film and the amorphous silicon region to form a silicide film on the silicon layer.Type: ApplicationFiled: August 30, 2012Publication date: February 28, 2013Applicant: International Business Machines CorporationInventors: Paul R. Besser, Roy A. Carruthers, Christopher P. D'Emic, Christian Lavoie, Conal E. Murray, Kazuya Ohuchi, Christopher Scerbo, Bin Yang
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Patent number: 8071407Abstract: An active device array substrate and its fabricating method are provided. According to the subject invention, the elements of an array substrate such as the thin film transistors, gate lines, gate pads, data lines, data pads and storage electrodes, are provided by forming a patterned first metal layer, an insulating layer, a patterned semiconductor layer and a patterned metal multilayer. Furthermore, the subject invention uses the means of selectively etching certain layers. Using the aforesaid means, the array substrate of the subject invention has some layers with under-cut structures, and thus, the number of the time-consuming and complicated mask etching process involved in the production of an array substrate can be reduced. The subject invention provides a relatively simple and time-saving method for producing an array substrate.Type: GrantFiled: July 14, 2010Date of Patent: December 6, 2011Assignee: AU Optronics Corp.Inventors: Kuo-Lung Fang, Hsiang-Lin Lin, Han-Tu Lin
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Patent number: 7999266Abstract: A semiconductor device including polysilicon (poly-Si) and method of manufacturing the same are provided. The semiconductor device includes a TaNx material layer and a poly-Si layer formed on the TaNx material layer. The semiconductor device including poly-Si may be manufactured by forming a TaNx material layer and forming a poly-Si layer by depositing silicon formed on the TaNx material layer and annealing silicon.Type: GrantFiled: December 11, 2007Date of Patent: August 16, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Wenxu Xianyu, Jung-hyun Lee, Hyung-jin Bae, Young-soo Park
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Patent number: 7884399Abstract: A semiconductor device and a method of fabricating the same include a gate electrode formed over the silicon substrate, the gate electrode including low-concentration conductive impurity regions, a high-concentration conductive impurity region formed between the low-concentration conductive impurity regions and a first silicide layer formed over the high-concentration conductive impurity region, and contact electrodes including a first contact electrode connected electrically to the gate electrode and a second contact electrode connected electrically to source/drain regions. The first contact electrode contacts the uppermost surface of the gate electrode and a sidewall of the gate electrode. The gate electrode can be easily connected to the contact electrode, the high-concentration region can be disposed only on the channel region, making it possible to maximize overall performance of the semiconductor device.Type: GrantFiled: November 25, 2008Date of Patent: February 8, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Dae-Kyeun Kim
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Patent number: 7875545Abstract: A method of producing an ohmic contact and a resulting ohmic contact structure are disclosed. The method includes the steps of forming a deposited film of nickel and silicon on a silicon carbide surface at a temperature below which either element will react with silicon carbide and in respective proportions so that the atomic fraction of silicon in the deposited film is greater than the atomic fraction of nickel, and heating the deposited film of nickel and silicon to a temperature at which nickel-silicon compounds will form with an atomic fraction of silicon greater than the atomic fraction of nickel but below the temperature at which either element will react with silicon carbide. The method can further include the step of annealing the nickel-silicon compound to a temperature higher than the heating temperature for the deposited film, and within a region of the phase diagram at which free carbon does not exist.Type: GrantFiled: January 28, 2008Date of Patent: January 25, 2011Assignee: Cree, Inc.Inventors: Allan Ward, III, Jason Patrick Henning, Helmut Hagleitner, Keith Dennis Wieber
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Patent number: 7808102Abstract: A DC-DC boost converter in multi-die package is proposed having an output Schottky diode and a low-side vertical MOSFET controlled by a power regulating controller (PRC). The multi-die package includes a single die pad with the Schottky diode placed there on side by side with the vertical MOSFET. The PRC die is attached atop the single die pad via an insulating die bond. Alternatively, the single die pad is grounded. The vertical MOSFET is a top drain vertical N-channel FET, the substrate of Schottky diode die is its anode. The Schottky diode and the vertical MOSFET are stacked atop the single die pad. The PRC is attached atop the single die pad via a standard conductive die bond. The Schottky diode die can be supplied in a flip-chip configuration with cathode being its substrate. Alternatively, the Schottky diode is supplied with anode being its substrate without the flip-chip configuration.Type: GrantFiled: July 31, 2007Date of Patent: October 5, 2010Assignee: Alpha & Omega Semiconductor, Ltd.Inventors: François Hébert, Ming Sun
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Patent number: 7795675Abstract: A trench MIS device is formed in a P-epitaxial layer that overlies an N-epitaxial layer and an N+ substrate. In one embodiment, the device includes an N-type drain-drift region that extends from the bottom of the trench to the N-epitaxial layer. Preferably, the drain-drift region is formed at least in part by fabricating spacers on the sidewalls of the trench and implanting an N-type dopant between the sidewall spacers and through the bottom of the trench. The drain-drift region can be doped more heavily than the conventional “drift region” that is formed in an N-epitaxial layer. Thus, the device has a low on-resistance. The device can be terminated by a plurality of polysilicon-filled termination trenches located near the edge of the die, with the polysilicon in each termination trench being connected to the mesa adjacent the termination trench.Type: GrantFiled: September 21, 2005Date of Patent: September 14, 2010Assignee: Siliconix IncorporatedInventors: Mohamed N. Darwish, Kyle W. Terrill, Jainhai Qi, Qufei Chen
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Patent number: 7781776Abstract: An active device array substrate and its fabricating method are provided. According to the subject invention, the elements of an array substrate such as the thin film transistors, gate lines, gate pads, data lines, data pads and storage electrodes, are provided by forming a patterned first metal layer, an insulating layer, a patterned semiconductor layer and a patterned metal multilayer. Furthermore, the subject invention uses the means of selectively etching certain layers. Using the aforesaid means, the array substrate of the subject invention has some layers with under-cut structures, and thus, the number of the time-consuming and complicated mask etching process involved in the production of an array substrate can be reduced. The subject invention provides a relatively simple and time-saving method for producing an array substrate.Type: GrantFiled: August 13, 2008Date of Patent: August 24, 2010Assignee: AU Optronics Corp.Inventors: Kuo-Lung Fang, Hsiang-Lin Lin, Han-Tu Lin
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Publication number: 20100096755Abstract: A wiring structure has a silicon layer, a backing layer provided on the silicon layer, the backing layer comprising a copper alloy containing a manganese, and a copper layer provided on the backing layer, and a diffusion barrier layer having an electrical conductivity, the diffusion barrier layer being provided at a region including an interface between the silicon layer and the backing layer, in which a manganese in the diffusion barrier layer is enriched compared with the backing layer.Type: ApplicationFiled: February 2, 2009Publication date: April 22, 2010Applicant: Hitachi Cable, Ltd.Inventors: Noriyuki Tatsumi, Tatsuya Tonogi
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Patent number: 7629693Abstract: Different sized features in the array and in the periphery of an integrated circuit are patterned on a substrate in a single step. In particular, a mixed pattern, combining two separately formed patterns, is formed on a single mask layer and then transferred to the underlying substrate. The first of the separately formed patterns is formed by pitch multiplication and the second of the separately formed patterns is formed by conventional photolithography. The first of the separately formed patterns includes lines that are below the resolution of the photolithographic process used to form the second of the separately formed patterns. These lines are made by forming a pattern on photoresist and then etching that pattern into an amorphous carbon layer. Sidewall pacers having widths less than the widths of the un-etched parts of the amorphous carbon are formed on the sidewalls of the amorphous carbon. The amorphous carbon is then removed, leaving behind the sidewall spacers as a mask pattern.Type: GrantFiled: July 24, 2006Date of Patent: December 8, 2009Assignee: Micron Technology, IncInventors: Mirzafer K. Abatchev, Gurtej Sandhu, Luan Tran, William T. Rericha, D. Mark Durcan
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Publication number: 20090184425Abstract: The conductive line structure of a semiconductor device including a base; at least one patterned conductive layer formed over the base; a conductive line formed over the at least one patterned conductive layer; a protection layer that encompasses the top surface and sidewall of the conductive line to prevent undercut generated by etching. The structure further comprises an underlying layer under the conductive line. The underlying layer includes Ni, Cu or Pt. The conductive line includes gold or copper. The at least one patterned conductive layer includes at least Ti/Cu. The protection layer includes electro-less plating Sn, Au, Ag or Ni.Type: ApplicationFiled: January 17, 2008Publication date: July 23, 2009Inventors: Yu-Shan Hu, Ming-Chih Chen, Dyi-Chung Hu
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Patent number: 7479417Abstract: A method for manufacturing a pixel electrode contact structure of a thin-film transistors liquid crystal display is disclosed. First, a transparent substrate having a first insulating layer thereon is provided. Afterward, a first metal layer and a second metal layer are sequentially formed on the substrate and then be patterned by a halftone technology and an etching process, wherein the second metal layer is removed within the pixel electrode contact area. In the meantime, the drain lines of the thin-film transistor comprising the first metal layer and the second metal layer are formed. Next, a patterned passivation layer is formed on the substrate. Finally, a pixel electrode layer directly connecting the first metal layers within the pixel electrode contact structure is formed on the substrate. This invention provides the pixel electrode contact structure with low contact resistance and prevents the current leakage from the drain line to the storage capacitor.Type: GrantFiled: October 23, 2007Date of Patent: January 20, 2009Assignee: Au OptronicsInventor: Wen-Yi Shyu
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Publication number: 20080303081Abstract: A vertical semiconductor power device includes a plurality of semiconductor power cells connected to a bottom electric terminal disposed on a bottom surface of a semiconductor substrate and at least a top electrical terminal disposed on a top surface of the substrate and connected to the semiconductor power cells. The top electrical terminal further includes a solderable front metal for soldering to a conductor for providing an electric connection therefrom. In an exemplary embodiment, the conductor soldering to the solderable front metal includes a conductor of a high-heat-conductivity metal plate. In another exemplary embodiment, the conductor soldering to the solderable front metal includes a copper plate. In another exemplary embodiment, the solderable front metal includes a Ti/Ni/Au front metal. In another exemplary embodiment, the solderable front metal includes a Ti/Ni/Ag front metal.Type: ApplicationFiled: June 5, 2007Publication date: December 11, 2008Inventor: Fwu-Iuan Hshieh
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Patent number: 7452777Abstract: A trench gate FET is formed as follows. A well region is formed in a silicon region. A plurality of active gate trenches and a termination trench are simultaneously formed in an active region and a termination region of the FET, respectively, such that the well region is divided into a plurality of active body regions and a termination body region. Using a mask, openings are formed over the termination body region and the active body region. Dopants are implanted into the active body regions and the termination body region through the openings thereby forming a first region in each active and termination body region. Exposed surfaces of all first regions are recessed so as to form a bowl-shaped recess having slanted walls and a bottom protruding through the first region such that remaining portions of the first region in each active body region form source regions that are self-aligned to the active gate trenches.Type: GrantFiled: January 25, 2006Date of Patent: November 18, 2008Assignee: Fairchild Semiconductor CorporationInventors: Christopher Boguslaw Kocon, Nathan Lawrence Kraft