With At Least One Ferroelectric Layer (epo) Patents (Class 257/E29.164)
  • Patent number: 7545013
    Abstract: A nonvolatilely reconfigurable logical circuit is built. It is a reconfigurable logical circuit based on the CMOS configuration using the spin MOSFET. By changing the transmission characteristic of each transistor in accordance with the magnetization states of Tr1, Tr2, Tr5, and Tr8 which are spin MOSFETs, it is possible to reconfigure all the two-input symmetric functions AND/OR/XOR/NAND/NOR/XNOR/“1”/“0”. Since it is possible to constitute the logical function by a small number of non-volatile elements, it is possible to reduce the chip area, thereby increasing the speed and reducing the power consumption.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: June 9, 2009
    Assignee: Japan Science and Technology Agency
    Inventors: Satoshi Sugahara, Tomohiro Matsuno, Masaaki Tanaka
  • Publication number: 20090134440
    Abstract: A semiconductor device comprising a substrate and a ferroelectric capacitor formed on the substrate. The ferroelectric capacitor includes a lower electrode, an upper electrode and a ferroelectric film interposed between the lower and upper electrodes. The ferroelectric capacitor having sidewalls receded from sidewalls of the upper electrode.
    Type: Application
    Filed: January 29, 2009
    Publication date: May 28, 2009
    Inventor: Hiroyuki KANAYA
  • Publication number: 20090127602
    Abstract: This disclosure concerns a memory including transistors provided on a substrate; ferroelectric capacitors provided on the transistors, the ferroelectric capacitors respectively including a ferroelectric film provided between a lower electrode and an upper electrode; and a barrier film covering a first side surface of the ferroelectric capacitor, and blocking passing of hydrogen, wherein adjacent two of the ferroelectric capacitors connected in the lower electrode form one capacitor unit, a plurality of the capacitor units connected in the upper electrode form one capacitor chain, the capacitor units are arranged with a deviation of a half pitch of the capacitor unit in adjacent plurality of capacitor chains, and when D1 is a distance between the adjacent ferroelectric capacitors within the capacitor unit, D2 is a distance between the adjacent capacitor chains, and D3 is a distance between the adjacent capacitor units within the capacitor chain, D3 is larger than D1 and D2.
    Type: Application
    Filed: October 16, 2008
    Publication date: May 21, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tohru Ozaki
  • Patent number: 7535745
    Abstract: A ferroelectric memory device, which includes a vertical ferroelectric capacitor having an electrode distance smaller than a minimum feature size of lithography technology being used and suitable for the miniaturization, and a method of manufacturing the same are disclosed. According to one aspect of the present invention, it is provided a ferroelectric memory device comprising an MIS transistor formed on a substrate, and a ferroelectric capacitor formed on an interlevel insulator above the MIS transistor, wherein a pair of electrodes of the ferroelectric capacitor are disposed in a channel length direction of the MIS transistor to face each other putting a ferroelectric film in-between, and wherein a distance between the electrodes of the ferroelectric capacitor is smaller than a gate length of the MIS transistor.
    Type: Grant
    Filed: June 19, 2006
    Date of Patent: May 19, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Susumu Shuto
  • Publication number: 20090059659
    Abstract: A spin transistor includes a first ferromagnetic layer provided on a substrate and having an invariable magnetization direction, a second ferromagnetic layer provided on the substrate apart from the first ferromagnetic layer in a first direction, and having a variable magnetization direction, a plurality of projecting semiconductor layers provided on the substrate to extend in the first direction, and sandwiched between the first ferromagnetic layer and the second ferromagnetic layer, a plurality of channel regions respectively provided in the projecting semiconductor layers, and a gate electrode provided on the channel regions.
    Type: Application
    Filed: August 28, 2008
    Publication date: March 5, 2009
    Inventors: Tomoaki INOKUCHI, Mizue Ishikawa, Hideyuki Sugiyama, Yoshiaki Saito
  • Patent number: 7479696
    Abstract: A tunable microwave device includes a SOI structure. A buffer layer is formed on the SOI structure. A microwave film layer is formed on the buffer layer. The microwave film layer comprises BST related materials.
    Type: Grant
    Filed: August 26, 2005
    Date of Patent: January 20, 2009
    Assignee: Massachusetts Institute of Technology
    Inventors: Il-Doo Kim, Ytshak Avrahami, Harry L. Tuller
  • Publication number: 20080290384
    Abstract: An improved microelectronic device, and method for making such a microelectronic device. The device includes one or plural transistors and piezoelectric mechanisms, with an arrangement capable of applying a variable mechanical strain on transistor channels.
    Type: Application
    Filed: July 21, 2006
    Publication date: November 27, 2008
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Jerome Lolivier, Maud Vinet, Thierry Poiroux
  • Patent number: 7436013
    Abstract: A ferroelectric memory device has a high performance, includes no Pb, and can be directly mounted onto an Si substrate. The ferroelectric memory device includes a (001)-oriented BiFeO3 ferroelectric layer 5 with a tetragonal structure, which is formed on an electrode 4 made of a perovskite material formed on an Si oxide film. The electrode 4 with a perovskite structure is formed by an ion beam assist method.
    Type: Grant
    Filed: January 10, 2007
    Date of Patent: October 14, 2008
    Assignee: Seiko Epson Corporation
    Inventors: Hiromu Miyazawa, Takamitsu Higuchi, Setsuya Iwashita
  • Patent number: 7382013
    Abstract: To provide a dielectric thin with a high dielectric constant, a low leakage current, and stable physical properties and electrical properties and to provide a thin film capacitor or other thin film dielectric device with a high capacitance and high reliability and a method of production of the same, a dielectric thin film containing oxides such as barium strontium titanate expressed by the formula (BaxSr(1-x))aTiO3 (0.5<x?1.0, 0.96<a?1.00) and having a thickness of not more than 500 nm and a method of production of a thin film dielectric device including a step of annealing the dielectric thin film in an atmosphere of an oxidizing gas after forming a dielectric thin film on a conductive electrode.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: June 3, 2008
    Assignee: TDK Corporation
    Inventors: Kiyoshi Uchida, Kenji Horino, Hitoshi Saita
  • Publication number: 20070287199
    Abstract: A method of forming a semiconductor structure includes providing a semiconductor substrate, performing a hydrogen annealing to the semiconductor substrate, forming a base oxide layer after the step of hydrogen annealing, and forming a high-k dielectric layer on the base oxide layer.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Inventors: Peng-Fu Hsu, Jin Ying, Hun-Jan Tao
  • Patent number: 7285810
    Abstract: A ferroelectric memory device includes a microelectronic substrate and a plurality of ferroelectric capacitors on the substrate, arranged as a plurality of rows and columns in respective row and column directions. A plurality of parallel plate lines overlie the ferroelectric capacitors and extend along the row direction, wherein a plate line contacts ferroelectric capacitors in at least two adjacent rows. The plurality of plate lines may include a plurality of local plate lines, and the ferroelectric memory device may further include an insulating layer disposed on the local plate lines and a plurality of main plate lines disposed on the insulating layer and contacting the local plate lines through openings in the insulating layer. In some embodiments, ferroelectric capacitors in adjacent rows share a common upper electrode, and respective ones of the local plate lines are disposed on respective ones of the common upper electrodes.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: October 23, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun-Ho Kim, Dong-Jin Jung, Ki-Nam Kim, Sang-Don Nam, Kyu-Mann Lee
  • Publication number: 20070238239
    Abstract: A method is provided for forming a rare earth element-doped silicon oxide (SiO2) precursor with nanocrystalline (nc) Si particles. In one aspect the method comprises: mixing Si particles into a first organic solvent, forming a first solution with a first boiling point; filtering the first solution to remove large Si particles; mixing a second organic solvent having a second boiling point, higher than the first boiling point, to the filtered first solution; and, fractionally distilling, forming a second solution of nc Si particles. The Si particles are formed by immersing a Si wafer into a third solution including hydrofluoric (HF) acid and alcohol, applying an electric bias, and forming a porous Si layer overlying the Si wafer. Then, the Si particles are mixed into the organic solvent by depositing the Si wafer into the first organic solvent, and ultrasonically removing the porous Si layer from the Si wafer.
    Type: Application
    Filed: September 12, 2005
    Publication date: October 11, 2007
    Inventors: Wei-Wei Zhuang, Yoshi Ono, Sheng Teng-Hsu, Tingkai Li
  • Patent number: 7276758
    Abstract: Disclosed is a non-volatile memory having three data states and a method for manufacturing the same. The non-volatile memory includes a silicon substrate having a device separation film; a floating gate formed on the silicon substrate; a tunnel oxide film interposed between the silicon substrate and the floating gate below both ends of the floating gate; a ferroelectric substance interposed between the silicon substrate and the floating gate inside the tunnel oxide film; a diffusion barrier film enclosing the ferroelectric substance; a control gate formed on the substrate including the floating gate; a gate oxide film formed below the control gate; spacers formed on both lateral walls of the laminated floating gate and control gate including the tunnel oxide film and gate oxide film, respectively; and source/drain regions formed within the substrate surfaces on both sides of the control gate including the spacers, respectively.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: October 2, 2007
    Assignee: Hynix Semiconductor Inc.
    Inventor: Kyung Do Kim
  • Patent number: 7220601
    Abstract: Provided is a method of manufacturing a nano-sized MTJ cell in which a contact in the MTJ cell is formed without forming a contact hole. The method of forming the MTJ cell includes forming an MTJ layer on a substrate, forming an MTJ cell region by patterning the MTJ layer, sequentially depositing an insulating layer and a mask layer on the MTJ layer, exposing an upper surface of the MTJ cell region by etching the mask layer and the insulating layer at the same etching rate, and depositing a metal layer on the insulating layer and the MTJ layer.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: May 22, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Soon-won Hwang, I-hun Song, Geun-young Yeom, Seok-jae Chung
  • Patent number: 7214977
    Abstract: A ferroelectric thin film formed of a highly oriented polycrystal in which 180° domains and 90° domains arrange at a constant angle to an applied electric field direction in a thin film plane and reversely rotate in a predetermined electric field.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: May 8, 2007
    Assignee: Seiko Epson Corporation
    Inventors: Takeshi Kijima, Yasuaki Hamada, Eiji Natori
  • Patent number: 7211852
    Abstract: High quality epitaxial layers of GaN can be grown overlying large silicon wafers (200) by forming an amorphous layer (210) on the substrate. The amorphous layer dissipates strain and permits the growth of a high quality GaN layer (208). Any lattice mismatch between the GaN layer and the underlying substrate is taken care of by the amorphous layer.
    Type: Grant
    Filed: April 29, 2005
    Date of Patent: May 1, 2007
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jamal Ramdani, Lyndee L. Hilt
  • Patent number: 7211851
    Abstract: A ferroelectric memory comprises a first transistor connected between N1 and N2 nodes, a second transistor connected between the N2 node and an N3 node, a first transistor connected between P1 and P2 nodes, a second transistor connected between the P2 node and a P3 node, a first wiring formed in a first wiring layer to interconnect the N1 node and the P1 node, a second wiring formed in the first wiring layer to interconnect the N3 node and the P3 node, a third wiring formed in a second wiring layer different from the first wiring layer to interconnect the N2 node and the P2 node, a first capacitor whose first electrode is connected to the first wiring, and a second capacitor whose first electrode is connected to the second wiring. Second electrodes of the first and second capacitors are both connected to the N2 node or the P2 node.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: May 1, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tadashi Miyakawa, Daisaburo Takashima
  • Patent number: 7196367
    Abstract: An embodiment of the invention is a transistor formed in part by a ferromagnetic semiconductor with a sufficiently high ferromagnetic transition temperature to coherently amplify spin polarization of a current. For example, an injected non-polarized control current creates ferromagnetic conditions within the transistor base, enabling a small spin-polarized signal current to generate spontaneous magnetization of a larger output current.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: March 27, 2007
    Assignee: Intel Corporation
    Inventors: Dmitri E. Nikonov, George I. Bourianoff
  • Publication number: 20070031981
    Abstract: In a method for forming a ferroelectric film of insulating metal oxide on a surface of an electrode with a concave or a convex or in convex shape which is formed above a substrate, multiple types of source gases constituting a material gas and each containing an organometallic compound are introduced into a chamber and main components of the multiple types of source gases are allowed to chemically react with one another with the chemical reaction proceeding depending on the reaction rate. Then, the ferroelectric film is deposited on the surface of the electrode.
    Type: Application
    Filed: October 5, 2006
    Publication date: February 8, 2007
    Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    Inventors: Toshitaka Tatsunari, Shinichiro Hayashi
  • Patent number: 7148531
    Abstract: A ferromagnetic thin-film based digital memory having a substrate formed of a base supporting an electrically insulating material primary substrate layer in turn supporting a plurality of current control devices each having an interconnection arrangement with each of said plurality of current control devices being separated from one another by spacer material therebetween and being electrically interconnected with information storage and retrieval circuitry. A plurality of bit structures are each supported on and electrically connected to a said interconnection arrangement of a corresponding one of said plurality of current control devices and have magnetic material films in which a characteristic magnetic property is substantially maintained below an associated critical temperature above which such magnetic property is not maintained of which two are separated by at least one intermediate layer of a nonmagnetic material having two major surfaces on opposite sides thereof.
    Type: Grant
    Filed: April 28, 2005
    Date of Patent: December 12, 2006
    Assignee: NVE Corporation
    Inventors: James M. Daughton, James G. Deak, Arthur V. Pohm
  • Patent number: 7141842
    Abstract: A magnetic memory device includes a memory cell which has a first wiring line composed of a first wiring layer, a second wiring line composed of a second wiring layer and provided above or below the first wiring line so as to cross the first wiring line, and a magnetoresistive effect element device provided in a position where the first wiring line and the second wiring line cross each other. The device further includes a peripheral circuit which includes a third wiring line provided around the memory cell and composed of the first wiring layer, a fourth wiring line provided above or below the third wiring line and composed of the second wiring layer, and at least one magnetic layer forming the magnetoresistive effect element device and provided between the third wiring line and the fourth wiring line.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: November 28, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takeshi Kajiyama
  • Patent number: 7026677
    Abstract: The present invention provides a magnetic memory device capable of performing stable operation efficiently using a magnetic field generated by write current and formed with high precision while realizing a compact configuration. Since a plating film is used for at least a part of a magnetic yoke, as compared with the case of formation by a dry film forming method, sufficient thickness and higher dimensional precision can be obtained. Consequently, a more stabilized return magnetic field can be generated and high reliability can be assured. Neighboring memory cells can be disposed at narrower intervals, so that the invention is suitable for realizing higher integration and higher packing density.
    Type: Grant
    Filed: July 20, 2004
    Date of Patent: April 11, 2006
    Assignee: TDK Corporation
    Inventors: Akifumi Kamijima, Hitoshi Hatate