Abstract: A motor pack for an electrically driven tool includes at least one electric motor and a linearly displaceable member coupled to the electric motor such that the linearly displaceable member is displaced axially by operation of the at least one electric motor. The motor pack further includes a housing enclosing the electric motor and at least partially enclosing the linearly displaceable member. The housing includes a front plate to which a tool head may be removably coupled. The front plate has an aperture formed therein through which the linearly displaceable element can be coupled to a moveable element in the tool head. The motor pack also includes tool control circuitry enclosed within the housing and electrically coupled to the electric motor to control operation thereof.

Abstract: An article (e.g. a semiconductor wafer) is held in an article holder by means of a number of gas flows emitted from gas vortex chambers. Some of the gas flows act to cool an adjacent article portion more than the other gas flows. For example, some of the vortex chambers emit more gas per unit of time than the other chambers. More cooling is provided to those portions of the article which are heated more during processing. Greater temperature uniformity can be achieved.

Abstract: A device is disclosed for supporting semiconductor wafers or other polished, opaque plates for processing or metrology in a vertical orientation, where the wafer loading and unloading occurs in a horizontal orientation. The device consists of a pallet designed with an opening such that both sides of the wafer are exposed. The wafer is loaded into the pallet to rest on three fixed rest members extending a short distance into the opening. Moving clamp members on the frame are located for movement toward or away from the corresponding rest members. Two cylindrical rest pins are located on axes parallel to the central axis of the opening to permit the wafer to rest under the force of gravity on the rest pins when the frame is rotated to its vertical position. Special provisions are made to minimize the effects of mechanical vibration of the wafer while insuring a robust physical restraint of the wafer within the apparatus without inducing mechanical stresses which could influence the shape of the wafer.

Abstract: A working jig is described. It has a number of hydraulically controlled set elements (6-11) with inlets for hydraulic fluid under pressure. The working jig is especially characterized in that it has a plane side which is provided with a number of elongated first cavities (19-29). A cover (31) is provided to form, tightening the upper side of the cavities such that channels are formed leading to the inlets for hydraulic fluid, fed by a connection (30) between a pressure source and the channels.

Abstract: An actuator (10) for use in installing or extracting piles and the like has a common member (12) supported at (14) and having jaws (16) for gripping a pile. Within the block (12) a double-acting piston (18) is located alongside a space (20) for a control valve arrangement which provides hydraulic fluid, in various ways described, to create vibratory or impact forces from the piston (18). The piston and the valve arrangements are both removable and replaceable by alternatives, to modify the mode of operation of the actuator (10).

Abstract: Embodiments of the present invention provide a system and method for receiving and dropping-off a horizontally oriented flat substrate, for example a semiconductor wafer, on a substrate support structure and verifying the correct positioning and orientation (level) of the substrate. Additional embodiments provide a system and method for indicating the presence or absence, orientation and concavity or convexity of a substrate.

Abstract: A fluid powered rotary indexer includes a housing with a piston rotatably mounted therein. The housing includes ports providing fluid communication to opposing compartments within the housing so as to rotate the piston clockwise or counterclockwise upon the introduction of fluid into one compartment or the other. The piston is rotatably supported by a bearing which is mounted to a work surface. An adapter is connected to the piston for rotation therewith and supports a tool or work piece. The sealing rings are provided between the piston and the housing to provide a fluid seal for the chamber. A central opening is provided in the assembly through which cables, wires, and tubing can be extended.

Abstract: A clamp system includes a plurality of clamping devices arrayed along at least a first hydraulic supply loop and a plurality of support devices arrayed along at least a second hydraulic supply loop. The clamping devices may include vertical rotating clamping devices which rotate vertically to secure a workpiece to a base plate. The clamping devices may also include horizontally rotating clamping devices which rotate axially and extend vertically to clamp the workpiece. The support devices support and stabilize the workpiece during machining operations. The first and second hydraulic supply loops are interconnected and allow the clamping devices to clamp the workpiece before the support pieces support the workpiece. The second hydraulic supply loop boosts support to and locks the support devices for additional stability.

Abstract: A mechanized device for externally grabbing and rotating the operating capstan of a railroad car bottom discharge gate is disclosed which utilizes a pair of spaced converging, opposed normally open gripper fingers operable between a closed and an open position, operated between a closed and an open position by a reciprocating fluid cylinder and a motor for rotating the gripper mechanism relative to the cylinder to thereby rotate the capstan to operate the gate.

Abstract: A tooling fixture includes a plurality of cylinders in a module fitted with pistons in which a portion thereof extends from the surface of the module. The cylinders are connected with a fluid source by a control valve assembly. The control valve assembly controls the amount of fluid to enter the cylinders in order to raise the pistons until a portion thereof are in contact with and support a workpiece. Once all of the pistons are in contact with and are fully supporting the workpiece, the fluid pressure is stabilized, maintaining the pistons at their set heights. Once the pistons are desired to be lowered, the valve assembly opens and the fluid can freely exit the cylinders and retract the pistons back into the module.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: An air bearing drive system has a base, a moving portion, an air bearing for forming an air film gap between the base and the moving portion, air nozzles and a suction inlet. The air nozzles and suction inlet are formed on the base. The air nozzles blow air toward the moving portion so as to exert a levitation force on the moving portion. The suction inlet applies suction to the air film gap so as to attract the moving portion toward the base and thereby exert an attraction force on the moving portion. An air supplying device supplies air to the air nozzles. A vacuum source applies suction to the suction inlets. Two adjusting devices are adapted to adjust the levitation force produced by the air issuing from the air nozzles and the attraction force of air drawn into the suction inlet so as to provide an accurate and low cost air bearing drive system.

Abstract: There is a workpiece clamp device 10 for horizontally holding a thin section long workpiece 1 having a constant section shape or having the same section shape in spaced positions in a longitudinal direction in two positions of the same section shape. The workpiece clamp device 10 is constituted of a driving clamp device 10A and a driven clamp device 10B comprising the same holding device 12. The driving clamp device 10A rotates the workpiece 1 centering on a horizontal axis O extending in a longitudinal direction of the workpiece, and the driven clamp device 10B follows movement of the workpiece and idles centering on the horizontal axis. An arbitrary portion to be machined of the workpiece can be directed in a direction in which the portion is easily machined by the rotation (e.g., upward direction).

Abstract: A device for the floating clamping of a workpiece to be machined. The device has a pair of clamping pistons and a pair of clamping jaws which are capable of being advanced onto mutually opposite sides of the workpiece with the aid of the two clamping pistons so as to exert a clamping force acting on the workpiece. The device is configured to contain a fixedly articulated collet chuck formed by a pair of clamping levers with clamping jaws and defining a chuck opening.

Abstract: An apparatus for delivering an engine to a dynamometer is provided with an exhaust system, coolant system, electrical system, and an engine mounting system. The systems decrease the time required to dress an engine while increasing test reliability and the number of engines that can be tested in an engine test room.

Abstract: The present invention is a cabinet installation device that is simple in design so as to provide for an apparatus that is not only user friendly, but is successful in operation for achieving the desired results. Enabling such an apparatus, the present invention comprises a base that maintains and houses a support, lifting and lowering assembly. Extending upwardly from the base is a guide assembly. The guide aids during the lifting and lowering process. An access extends through the guide to provide access for the operation of the support and lifting assembly, known as the operational assembly.

Abstract: An apparatus for chucking a workpiece to a worktable includes a plurality of magnetically activated vacuum flow check valves, which uses a magnet within its body, to block a port through which atmosphere can flow to a vacuum source. The magnet blocking the flow can be drawn off the port seat by positioning a second (activator) magnet in a cavity of the valve body proximal the first magnet. The resulting effect is the communication of a vacuum suction force from the vacuum source to the workpiece. The second (activator) magnet is preferably affixed to a bottom surface of a puck which, when received within a complementary structure on the valve assembly, serves as a chucking mechanism for securely holding a workpiece above the surface of the machining table during the machining operating.

Abstract: The present invention provides a clamp system for securing a workpiece. The structure of oil paths formed in a base plate is simplified while maintaining good guiding ability of a piston rod of a hydraulic cylinder. Also, the ratio of the work area relative to the surface of the base plate is increased.

Abstract: A device for holding a part comprises a retainer member provided for applying and holding the part and having a convexly spherical surface section which is received in a concavely spherical surface section of a receptacle member. To enable movement of the spherical surface sections relative to one another, the device includes an arrangement for forming a temporary friction-free air bearing between the two surface sections, which can be removed once the surfaces of the two parts have been brought into the desired alignment and engagement to fix the receptacle and retainer members in position.

Abstract: A device particularly adapted to engage an irregular bottom surface of an object and then carry that object includes a support block. In the support block is a set of longitudinally spaced apart upright bores. On each side of the bores in a top wall of the block is a guide channel for a slide bar. Ends of these bars operatively connect with a reciprocating mechanism attached to one end of the block. In each bore is a sleeve having an inner opening formed with an upper section for a spring. An upper and lower end coil of a coil portion of each spring connects with an arm that projects outwardly. The upper arms fit respectively in upward facing slots in one slide bar while the lower arms fit respectively in downward facing slots in the other slide bar. In the sleeve inner openings and extending respectively through the coil portion of each springs is a support pin. Top ends of these pins fit in openings in a top cover plate fastened to the support block top wall.

Abstract: A vacuum chuck/insert assembly (100) for firmly supporting a semiconductor wafer (106) during wafer processing. The vacuum chuck comprises a chuck (102) and a removable insert (104). The chuck includes a base (108) and a plurality of spacers (112) for holding the insert in spaced relationship to the base of the chuck. The chuck further includes first and second vacuum seals (116, 118) and vacuum ports (128) extending through the base of the chuck. The insert includes a base (132) and a plurality of spacers (136) for holding the wafer in spaced relationship to the base of the insert. The insert further includes a vacuum seal (140) and vacuum ports (146) extending through the base of the insert. During operation, vacuum applied to the vacuum chuck/insert assembly holds the insert firmly in contact with the chuck and the wafer firmly in contact with the insert.

Abstract: A vacuum holding fixture for a thermoformed part carries a base attachment plate which is releasably coupled to the top wall of a vacuum support box having a vacuum passage sealed to a vacuum passage within the attachment plate and a vacuum chamber within the holding fixture. The attachment plate is precisely positioned and releasably locked to the vacuum box by a plurality of couplers each including a stud projecting downwardly from the attachment plate and received within a corresponding cylinder recessed within the vacuum box. Each cylinder has locking balls which releasably grip the corresponding stud in response to axial movement of a fluid actuated spring biased piston surrounding the cylinder.

Abstract: A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A sonic energy source, such as a megasonic transducer, provides sonic energy into a liquid in the bowl. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into the liquid. Sonic energy is provided to the workpiece through the liquid, optionally while the head spins the workpiece. The liquid may include de-ionized water and an etchant.

Abstract: A holder for holding a semiconductor wafer for treatment in wafer treating apparatus including a plurality of supports for generally point support of the wafer at a plurality of points on the wafer. Each support bears a fraction of weight of the wafer and is movable up and down and subject to force biasing it to move upward. The total of the forces exerted on the supports biasing them upward is adapted to counterbalance the weight of the wafer.

Abstract: A apparatus includes an arm, a housing having a chamber, a vane rotatably movable within the chamber and an engaging member. The engaging member is slidingly coupled to the arm. The engaging member is selectively positionable in an engaged and a disengaged position with the vane such that the arm rotates in response to rotation of the vane when the engaging member is in the engaged position.

Abstract: A positioning apparatus includes an arm, a housing having a chamber, a vane rotatably movable within the chamber and an engaging member. The engaging member is slidingly coupled to the arm. The engaging member is selectively positionable in an engaged and a disengaged position with the vane such that the arm rotates in response to rotation of the vane when the engaging member is in the engaged position.

Abstract: In the method and apparatus of this invention a wafer for manufacturing semiconductor devices is held by a vortex-type substrate holder against a moveable frame during processing. Motion of the wafer is controlled with movement of the frame. The frame is shaped to provide a sealed chamber through which gas that is used to create the vortices is also re-captured. With such sealed chamber a higher heat conducting but more expensive gas can be recycled and used for the vortex holder and cooling of the wafer. In another technique of this invention, damage of the wafer edges from impacts with position limiters is avoided by inserting a small physical off-set of the center of mass of the wafer relative to that of the frame used to rotate the wafer. This prevents sliding of the wafer within the holder. In another feature of the invention end effects during treatment of the wafer are avoided by providing an extension around the wafer.

Abstract: For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means (100) that there is a gas flowing through at least one first means (5) for producing the forces which pull a semiconductor wafer toward the means (100) based on the Bernoulli principle and that there is at least one second means (2, 3) for holding the semiconductor wafer on the means (100) as a result of the forces produced by at least one electromagnetic field.

Abstract: A pallet for clamping a workpiece to be processed, in particular by machining operations, wherein the pallet is connected to a holding fixture which accommodates a quick-acting connection which is provided with conduits for the feed of a hydraulic fluid to a piston/cylinder unit and with a quick-acting connection in combination with conduits for the return of the hydraulic fluid, in which case these first connections can be connected to second quick-acting connections which are connected to a conduit for the feed of the hydraulic fluid and to a conduit for the return of the hydraulic fluid to a hydraulic supply unit, and the second quick-acting connections are arranged in a holding body which has an actuating lever for a connecting device, and the actuating lever has an eccentric slot, which can be connected to a guide pin which is fastened to the holding body for the first quick-acting connections.

Abstract: A platform is held atop a vertically moveable dual position leveling base by three draw screws, three push screws, and three spring-loaded pins. The leveling base is configured to secure and orient the platform such that an upper surface of the platform is substantially horizontal with allowance for adjustments in each of two positions. The platform is pushed upwardly relative to the base by the spring-loaded pins. The orientation of the platform in one position is adjusted by the three draw screws, which pull the platform down against the upward force of the spring-loaded pins. The base also has an upper position in which the platform is pressed into sealing engagement with a lower mating surface of a chamber. Three adjustable push screws provide the desired platform orientation by limiting the movement of the platform towards the base.

Abstract: An improved hydraulic vise jaw incorporates a fluid supply which communicates hydraulic fluid to an area behind a plurality of pistons such that the pistons are held outwardly against a part with a generally uniform force. Each piston is positioned in a piston cylinder. The piston cylinders are arranged in several columns and a supply passage connects each of the piston cylinders in an upper row and a second supply passage connects each of the piston cylinders in a lower row. A communication hole selectively connects a first piston cylinder in the top row with a second piston cylinder in the bottom row. Preferably, the communication hole connects piston cylinders which are in distinct columns. In this way, the flow of hydraulic fluid between the rows is somewhat restricted such that an equal and adequate holding force is maintained on the pistons. In another feature, a pin selectively holds the pistons within the piston cylinders such that they are prevented from moving outwardly of the body.

Abstract: A non-contact pick-up device is disclosed. The non-contact pick-up device mainly includes a disk, and a plurality of air nozzles on the disk. Each nozzle has an air channel; and an upper end of the channel is tilt outwards. Therefore, as a disc-shaped article is placed on the disk; air jets out from the nozzles, due to Bernoulli principle, pressure difference is formed on the disc-shaped article. Thus, due to the action of atmosphere pressure, the disc-shaped article will be clamped. The pick-up device may be used in semiconductor manufacturing process for clamping a wafer.

Abstract: A cabinet installation lifting system and its method of use are disclosed. The cabinet installation lifting system has a base section, a lifting mechanism attached to the base section, and at least one platform attached to the top part of the lifting mechanism. A second, upper platform section may be removably attached to the first platform section by means of at least one removable extension. When different sized cabinets are installed, different sized removable extensions are selected for the appropriate overall height of the cabinet installation lifting system. Installation of wall cabinets is performed by installing a base cabinet, placing the cabinet installation lifting system on the base cabinet, placing the wall cabinet to be installed on the cabinet installation lifting system, lifting the wall cabinet to the desired height, securing the wall cabinet, and removing the cabinet installation lifting system.

Abstract: The invention relates to a vacuum tightening system comprising a supporting base and a modular suction device for tightening a work piece. According to the invention, the modular suction device and the work piece can be tightened by means of a vacuum circuit in which the vacuum pressure is increased for tightening the work piece.

Abstract: A device particularly adapted to engage an irregular bottom surface of an object and then carry that object includes a support block. In the support block is a set of longitudinally spaced apart upright bores. On each side of the bores in a top wall of the block is a guide channel for a slide bar. Ends of these bars operatively connect with a reciprocating mechanism attached to one end of the block. In each bore is a sleeve having an inner opening formed with an upper section for a spring. An upper and lower end coil of a coil portion of each spring connects with an arm that projects outwardly. The upper arms fit respectively in upward facing slots in one slide bar while the lower arms fit respectively in downward facing slots in the other slide bar. In the sleeve inner openings and extending respectively through the coil portion of each springs is a support pin. Top ends of these pins fit in openings in a top cover plate fastened to the support block top wall.

Abstract: A method of fabricating a thin-sheet-coated composite substrate bonds together a thin sheet and a substrate which unavoidably has an irregular thickness with an adhesive so that the outer surface of the thin sheet has the highest possible flatness. A surface plate having a flat surface of high flatness is held by a chuck included in a spinner with the flat surface facing upward. The thin sheet is placed on the surface plate in close contact with the flat surface of the surface plate. A liquid adhesive is dropped on the thin sheet and the substrate is placed on the adhesive. The chuck is rotated at high rotational speed to spread the adhesive in the space between the thin sheet and the substrate and to remove a surplus portion of the adhesive from the space between the thin sheet and the substrate by centrifugal force.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: A suction pad (A) is adapted to be placed on a suction table (2) a plurality of openings (2a) connected to a negative pressure generating source (3) in order to fix a work piece (W) by suction on a top surface (5d) of the suction pad (A). The suction pad (A) includes a communicating passage (5a, 5b, 5c and 6a) for communicating the top surface (5d) with a bottom surface (6b) of the suction pad (A) and for communicating negative pressure from the openings (2a) of the suction table (2) to the top surface (5d) of the suction pad (A) when the suction pad (A) is placed on any one of the openings (2a) of the suction table (2). A magnet (10) is provided for attracting a plug (4) for normally closing each of the openings (2a) of the suction table (2) so as to communicate the negative pressure generating source (3) with the communicating passage (5a, 5b, 5c and 6a).

Abstract: An apparatus for delivering an engine to a dynamometer is provided with an exhaust system, coolant system, electrical system, and an engine mounting system. The systems decrease the time required to dress an engine while increasing test reliability and the number of engines that can be tested in an engine test room.

Abstract: A clamp for clamping extendible supports in flexible tooling system includes three overlapping tapered collets surrounding the extendible support, with a set of ball bearings positioned between each of the collets. The middle collet is tapered in a direction opposite to that of the inner and outer collets, so that when the middle collet is pressed by springs into a gap between the inner and outer collet, the inner collet is forced against the extendible support, thereby clamping it. The ball bearings and the three collet assembly prevent the clamp from binding with thermal expansion so that the clamp releases when the force pressing the middle collet into the space between the inner and outer collet is removed. The springs maintain a sustained clamping force so the clamp does not release upon thermal expansion of it components.

Abstract: A Bernoulli wand type semiconductor wafer pickup device that is adapted to regulate the temperature of a wafer while the wafer is being repositioned within a semiconductor processing system. In one embodiment, the device is comprised of a resistive heating element that is adapted to raise the temperature of the pickup device. In particular, by raising the temperature of the pickup device, a portion of the thermal radiation emitted from the device is absorbed by the wafer, thus providing a means for regulating the wafer temperature. In another embodiment, the device is adapted with the characteristics of a black body absorber so as to enable the device to optimally absorb thermal radiation from external radiant sources, thereby providing a means for increasing the temperature of the device. In another embodiment, the device is coated with reflective material that enables a large portion of thermal radiation emitted from the wafer to be reflected and absorbed back into the wafer.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: A flexible tooling system includes a support table with multiple openings adapted to removably accept a self-contained actuator. Each opening of the support table provides vacuum and air supply lines as well as a bus interface so that each position may be uniquely addressed and commanded separately from any other openings. The self-contained actuator has corresponding connectors for receiving the vacuum and air supply as well as for interfacing with the bus. An actuator may be placed at a particular location by insertion into the receptacle at the opening in the support table aperture. The actuator may be commanded to raise, lower, lock in position and supply vacuum separate from any other actuator.

Abstract: A manually operated pallet changer system for use with automatic machine tools includes a pallet changer and a compatible machine tool mounted pallet receiver. The pallet changer includes a massive, floor supported base to which a cantilevered first platform is pivotally attached for rotation between a pallet-exchange position and a work-setup position. A second platform rests atop the first platform and supports a pair of work pallet guides. The two platforms are rotatably attached near their centers so that the pallet guides can be interchanged by rotating the upper platform about its center by 180°. The configuration permits the platforms to be rotated as a unit away from a machine tool to the work-setup position. Work pallets are assembled and then the platforms are rotated together into the pallet-exchange position in which one of the pallet guides is aligned for transferring a work pallet to the machine tool mounted pallet receiver.

Abstract: A pin table for supporting a workpiece, such as a printed circuit board, while an operation is carried out on it, comprises a base defining a plurality of vertically disposed pneumatic cylinders arranged in a column and row matrix. Each cylinder has a two-position spool valve located axially beneath it in the base for controlling actuation of the cylinder between a position in which the piston rod is fully retracted and a position in which the piston rod is fully raised. The piston rods constitute the pins of the pin table and are selectively movable into their raised positions by the application of compressed air to the cylinders via the spool valves whereby a desired array of raised piston rods may be established.

Abstract: Quick clamping cylinder for retracting and centering a draw-in nipple, in which the quick clamping cylinder contains a displaceable piston which is subjected to spring forces when retracting and to pressure fluid when releasing, the supply with pressure fluid being effected through the attaching means of the quick clamping cylinder.

Abstract: Arrangement for clamping and positioning palettes in the correct position, wherein for the clamping of the palettes a draw-in nipple cooperates with a rapid-clamping cylinder. Addtionally, a rotation safeguard is present between the palette and the associated rapid clamping cylinder. This safeguard against rotation is implemented in the form of localizing pins which have a corresponding mechanical strength to prevent movement when clamping force is exerted.

Abstract: A clamping device for frictional clamping of a workpiece which includes a clamp element adapted to frictionally clamp a workpiece and a mechanism for moving the clamp element which includes a shape memory alloy adapted to move the clamp element when the shape memory alloy is heated. The shape memory alloy moves the clamp element into a clamped state and/or unclamped state upon heating the shape memory alloy. The clamped element is preferably a super elastic alloy which is naturally oriented in a clamped position for a positive clamp and in an unclamped position for a non-positive clamp.

Abstract: Wafer verifying apparatus for receiving a wafer thereagainst and for verifying the wafer, wafer verifying apparatus comprising a fixture including a stage for receiving thereagainst a surface of the wafer, a vacuum assembly for effecting a vacuum coupling of the surface of the wafer to the stage, and sensor apparatus for accepting the wafer in the presence of a vacuum couple of the surface of the wafer against the stage and for rejecting the wafer absent a vacuum couple of the surface of the wafer against the stage.

Abstract: An alignment device for establishing alignment between the surfaces of abutting components. A rotary table supports a base plate for rotation in a plane. An air bearing connected to the base plate in turn supports a support plate. The air bearing includes an upper spherical protrusion supported in a spherical cavity coupled to an air passageway in the base plate. Compressed air enters the air passageway and establishes an air interface between the upper and lower bearing components. The support plate is stabilized with respect to the base plate by a series of spring adjustments. The component support of the base plate is free to change planarity in response to an abutting surface of another component.