With Significant Slider/housing Shaping Or Treating Patents (Class 29/603.12)
  • Patent number: 11094340
    Abstract: The present disclosure includes methods of using a sacrificial, protective head overcoat during the manufacture of sliders. In some embodiments, the final trailing edge topography of the transducer devices is formed before applying the sacrificial, protective head overcoat. In some embodiments, the final trailing edge topography of the transducer devices is formed after removing the sacrificial, protective head overcoat.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: August 17, 2021
    Assignee: Seagate Technology LLC
    Inventors: Amy Jo Bergerud, Andrew Joseph Boyne, Daniel Richard Buettner, Kurt W. Wierman, Joel W. Hoehn
  • Patent number: 10857583
    Abstract: [Object] To enable flexible molding of a punch-nose in press working for obtaining a molded product including a U-shaped portion in a cross-section. [Solution] Provided is a press-working apparatus configured to provide a molded product by performing press working on a work, the molded product including, in a cross-section, a U-shaped portion including a bottom, a wall, and a punch-nose between the bottom and the wall, the press-working apparatus including: a die in which a recessed portion to receive the U-shaped portion is formed; a first punch that sandwiches a central area of the bottom with a bottom surface of the recessed portion; and a second punch that is pushed into the recessed portion later than the first punch, to restrain the wall between the second punch and a side surface of the recessed portion, and sandwich the work with the bottom surface to mold a peripheral area of the bottom and the punch-nose.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: December 8, 2020
    Assignee: NIPPON STEEL CORPORATION
    Inventors: Nobuo Yoshikawa, Yasuhiro Ito, Shigeru Yonemura, Tohru Yoshida
  • Patent number: 10699741
    Abstract: An apparatus, according to one embodiment, includes: a magnetic tape head module having: a substrate and an encapsulation layer which includes a compliant, deformable material. The magnetic tape head module also includes a closure, and a plurality of transducers positioned in an array along a longitudinal length of the magnetic tape head module. The array of transducers is sandwiched between at least a portion of the encapsulation layer and the substrate. Moreover, a portion of the encapsulation layer extends toward the substrate directly between adjacent transducers in the array.
    Type: Grant
    Filed: January 8, 2019
    Date of Patent: June 30, 2020
    Assignee: International Business Machines Corporation
    Inventor: Robert G. Biskeborn
  • Patent number: 10679948
    Abstract: A semiconductor device includes first and second inspection mark regions having the same pattern including a plurality of overlay inspection marks, a first element region having a portion overlapping with the first inspection mark region, and a second element region having a portion overlapping with the second inspection mark region. The first and second element regions are adjacent to each other and have different areas. The first element region includes a first pattern aligned with a plurality of first overlay inspection marks. The second element region includes a second pattern aligned with a plurality of second overlay inspection marks.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: June 9, 2020
    Assignee: TowerJazz Panasonic Semiconductor Co., Ltd.
    Inventors: Takahisa Ogawa, Mitsunori Fukura, Nobuyoshi Takahashi
  • Patent number: 10109306
    Abstract: A method corrects a head suspension by irradiating an objective part of the head suspension with a laser beam before or after mounting a read/write head on the head suspension. The method can precisely correct the head suspension even when correcting the head suspension a plurality of times. The method includes drawing, with the laser beam, a straight line of predetermined length on the objective part and repeating this process a plurality of times in such a way that the direction of a straight line drawn this time crosses the direction of a straight line drawn last time.
    Type: Grant
    Filed: January 22, 2009
    Date of Patent: October 23, 2018
    Assignee: NHK Spring Co., Ltd.
    Inventors: Eijiro Furuta, Isamu Ninomiya
  • Patent number: 10022776
    Abstract: Embodiments of the present invention provide a method of forming a feature line in a motor vehicle body panel. The method may comprise: in a first press operation, forming the panel into a first shapeform, the first shapeform having at least one feature line having a first radius of curvature; and in a second press operation, forming the panel into a second shapeform in which the at least one feature line has a second radius of curvature lower than the first.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: July 17, 2018
    Assignee: JAGUAR LAND ROVER LIMITED
    Inventor: Brian Lidgard
  • Patent number: 9978934
    Abstract: This disclosure provides various methods for improved etching of spin-transfer torque random access memory (STT-RAM) structures. In one example, the method includes (1) ion beam etch of the stack just past the MTJ at near normal incidence, (2) a short clean-up etch at a larger angle in a windowed mode to remove any redeposited material along the sidewall that extends from just below the MTJ to just above the MTJ, (3) deposition of an encapsulant with controlled step coverage to revert to a vertical or slightly re-entrant profile from the tapered profile generated by the etch steps, (4) ion beam etch of the remainder of the stack at near normal incidence while preserving the encapsulation along the sidewall of the MTJ, (5) clean-up etch at a larger angle and windowed mode to remove redeposited materials from the sidewalls, and (6) encapsulation of the etched stack.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: May 22, 2018
    Assignee: VEECO Instruments Inc.
    Inventors: Ajit Paranjpe, Boris Druz, Katrina Rook, Narasimhan Srinivasan
  • Patent number: 9971073
    Abstract: A method for coating substrates is provided. The method includes diamond turning a substrate to a surface roughness of between about 60 ? and about 100 ? RMS, wherein the substrate is one of a metal and a metal alloy. The method further includes polishing the diamond turned surface of the substrate to a surface roughness of between about 10 ? and about 25 ? to form a polished substrate, heating the polished substrate, and ion bombarding the substrate with an inert gas. The method includes depositing a coating including at least one metallic layer on the ion bombarded surface of the substrate using low pressure magnetron sputtering, and polishing the coating to form a finished surface having a surface roughness of less than about 25 ? RMS using a glycol based colloidal solution.
    Type: Grant
    Filed: April 6, 2015
    Date of Patent: May 15, 2018
    Assignee: Corning Incorporated
    Inventors: Joseph Charles Crifasi, Gary Allen Hart, Robin Merchant Walton, Leonard Gerard Wamboldt, Jue Wang
  • Patent number: 9934794
    Abstract: A magnetic apparatus has a media-facing surface (MFS), a pole, a write gap at the MFS, a trailing shield, coil(s) and a nonmagnetic refill material. The pole includes a pole tip proximate to the MFS. The trailing shield includes a pedestal and a recessed portion. The pedestal occupies a portion of the MFS. The recessed portion has a front surface at an acute angle from the MFS and is recessed from the MFS by a distance of not more than 0.8 micrometers. The write gap is between the pedestal and the pole tip. The coil(s) energize the pole and have at least one turn. The coil(s) are between the recessed portion of the trailing shield and the pole. The trailing shield is between the nonmagnetic refill material and the pole. A portion of the nonmagnetic refill material is between the recessed portion and the MFS.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: April 3, 2018
    Assignee: WESTERN DIGITAL (FREMONT), LLC
    Inventors: Ran Lin, Ming Sun, El-Amine Salhi, Donghong Li, Yunfei Li, Ming Jiang
  • Patent number: 9911444
    Abstract: According to one embodiment, a head for a disk drive includes a slider including an air-bearing surface having a pair of side edges, a pair of side surfaces, a leading-side end surface and a trailing-side end surface, and a head section provided in the slider. The slider includes a leading step in a leading-side end portion of the air-bearing surface, a deep trench provided downstream side of the leading step, and a trailing step in a trailing side end portion of the air-bearing surface and including the head section built therein, and side trenches having a depth of 100 to 300 nm formed respectively along the pair side edges of the air-bearing surface.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: March 6, 2018
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masami Yamane
  • Patent number: 9865286
    Abstract: A magnetic tape recording module having electrical lapping guides located within and adjacent to an array of magnetic read/write elements. Electrical leads connected with the electrical lapping guides are buried deep within the head build, close to the substrate so that they can pass beneath the electrical leads of the read/write elements without any capacitive coupling between the electrical lapping guide leads and the read/write element leads. The presence of the electrical lapping guides within and adjacent to the read/write element leads provides much more accurate control of read/write element stripe height during lapping.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: January 9, 2018
    Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
    Inventors: Cherngye Hwang, David John Seagle, Diane L. Brown
  • Patent number: 9842614
    Abstract: Implementations described and claimed herein includes a storage device comprising a transducer heat including at least one pair of read/write elements and a heat shaped to thermally protrude regions of the transducer head including the read/write elements. According to one implementation, the heat element includes at least one conductive portion of locally decreased resistance proximal to and between the pair of read/write elements to direct the thermally protruded close point away from a midpoint between the read/write elements.
    Type: Grant
    Filed: February 17, 2017
    Date of Patent: December 12, 2017
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Erik J. Hutchinson, Paul J. Sonda, Richard E. Martin
  • Patent number: 9721598
    Abstract: A terminal pad of a flexure for a head suspension connected to a functional part through a bonding material includes a terminal body, a base plating formed on a surface of the terminal body and having an uniform thickness, a padding plating made of a same material as the base plating and integrated with the base plating so that the padding plating swells with respect to the base plating, and a surface plating formed on a surface of the padding plating.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: August 1, 2017
    Assignee: NHK Spring Co., Ltd.
    Inventors: Sei Kawao, Yukie Yamada
  • Patent number: 9685176
    Abstract: Methods for forming a slider for a disc drive. One method includes forming a plurality of sliders on a wafer, applying a self-assembled monolayer coating on the plurality of sliders, and cutting the plurality of sliders into a plurality of individual sliders. Another method includes forming a plurality of sliders on a wafer, applying a low surface energy coating on the plurality of sliders, and cutting the plurality of sliders into a plurality of individual sliders.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: June 20, 2017
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Vince B. Engelkes, Peter Gunderson, Timothy W. Stoebe, David J. Ellison
  • Patent number: 9520146
    Abstract: A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
    Type: Grant
    Filed: August 21, 2013
    Date of Patent: December 13, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinwen Wang, Weimin Si, Jianxin Fang, Ying Hong, Hongzhou Jiang, Ching-Huang Lu, Yan Chen, Donghong Li, Lien-Chang Wang, Lieping Zhong, Tao Pan
  • Patent number: 9431035
    Abstract: A slider comprising a body having an air bearing surface (ABS), wherein the ABS extends between a leading edge and a trailing edge of the body. The slider comprises a transducer supported by the body and positioned near the trailing edge, wherein the transducer comprises a pole tip partially extending from the body. The slider comprises a surface defined in the body and forming the trailing edge, wherein the surface comprises a plurality of segments. A first segment of the plurality of segments extends from the ABS and is offset from a portion of the pole tip recessed within the body. The first segment is offset from the pole tip portion by a lesser extent than any other of the plurality of segments.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: August 30, 2016
    Assignee: Seagate Technology LLC
    Inventors: Gordon Merle Jones, Edwin Frank Redja, Joseph Michael Stephan
  • Patent number: 9318130
    Abstract: A method of fabricating a magnetic device includes forming a sensor having a pinned layer and a free layer. A first reactive ion etch of a sensor stack patterns a hard mask layer with a photoresist image to form a first hard mask. Then a second reactive ion etch is performed to form an extended pinned layer. The method also includes depositing an insulating layer after the second reactive ion etch to protect exposed edges of the sensor stack, and then providing a chemical mechanical planarization (CMP) stop layer on the insulating layer. Subsequently, a CMP of the sensor stack is performed to remove a portion of the insulating layer. The resulting structure is substantially free of residue on the back edges of the sensor.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: April 19, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Wei Gao, Guanghong Luo, Lily Yao, Ming Mao, Ming Jiang
  • Patent number: 9251814
    Abstract: Implementations disclosed and claimed herein provide a write head core located in a slider, the write head core comprising a first end operative to serve as a write pole, a second end operative to serve as a return pole, wherein the first end comprises a substantially smaller cross-sectional area than the second end, and wherein the write head core has a substantially smooth curvature.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: February 2, 2016
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Kirill Rivkin, Ned Tabat, Mourad Benakli, Michael A. Seigler
  • Patent number: 9218832
    Abstract: A method of surely removing a read/write slider from a flexure without large displacement of the slider, the slider attached to the flexure of the head suspension through an adhesive, comprises heating the slider so that the adhesive is heated through an adhered surface of the slider being in contact with the adhesive; and applying ultrasonic vibration to the slider so that the adhered surface of the slider vibrates at ultrasonic frequency with respect to the adhesive.
    Type: Grant
    Filed: April 16, 2013
    Date of Patent: December 22, 2015
    Assignee: NHK Spring Co., Ltd.
    Inventors: Sei Kawao, Shinpei Kakiuchi
  • Patent number: 9156306
    Abstract: Lithography method for etching very dense patterns on a substrate, based on a combination of several less dense partial patterns; a sacrificial layer is formed on a substrate and is etched according to a first partial pattern; spacers are formed on edges of elements of the sacrificial layer, the spacers defining a second partial pattern; then the sacrificial layer is removed leaving only the spacers remaining. A layer sensitive to an electron beam is subsequently deposited between the spacers to a thickness less than or equal to the height of the spacers, and this sensitive layer is exposed using an electron beam according to a third partial pattern such that there remains on the substrate a final pattern of regions lacking spacers and a sensitive layer, this pattern resulting from the combination of the second and third partial patterns and having higher density than each of the partial patterns.
    Type: Grant
    Filed: May 25, 2011
    Date of Patent: October 13, 2015
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Laurent Pain, Jerome Belledent, Sebastien Barnola
  • Patent number: 9003640
    Abstract: A method for fabricating a magnetic recording transducer is described. The method includes providing a pinned layer for a magnetic element. The portion of the magnetic transducer including the pinned layer is transferred to a high vacuum annealing apparatus before annealing the magnetic transducer. The portion of the magnetic recording transducer is annealed in the high vacuum annealing apparatus. A tunneling barrier is provided after the step of annealing the part of the magnetic recording transducer. A free layer for the magnetic element is also provided.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: April 14, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Chando Park, Qunwen Leng, Mahendra Pakala
  • Patent number: 8997335
    Abstract: A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: April 7, 2015
    Assignee: Headway Technologies, Inc.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Shigeki Tanemura, Hironori Araki, Kazuo Ishizaki, Takehiro Horinaka
  • Patent number: 8984738
    Abstract: A manufacturing method of a slider includes steps of (a) providing a row bar with a plurality of slider elements connecting together, the row bar having an air bearing surface, a back surface opposite the air bearing surface, a bonding surface and a bottom surface opposite the bonding surface; (b) grinding the bottom surface of the row bar; (c) lapping the air bearing surface of the row bar so as to obtain a predetermined requirement, and applying a first magnetic field with a first direction during lapping the air bearing surface, and the first direction being parallel to the air bearing surface and the bonding surface; and (d) cutting the row bar into a plurality of individual sliders. The present invention can maintain a good performance of a magnetic head during the manufacturing process.
    Type: Grant
    Filed: February 22, 2012
    Date of Patent: March 24, 2015
    Assignee: SAE Magnetics (H.K.) Ltd
    Inventors: Chiuming Lueng, Mankit Lee, Lorest Garcia Pingul, Yasutoshi Fujita, Cheukman Lui, ChiYuen Mok, Cheukwing Leung, Juren Ding, Rongkwang Ni
  • Patent number: 8984739
    Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes the steps of: forming a preliminary head section that has a surface to be polished and includes a magnetic pole, a waveguide, and a preliminary plasmon generator; causing a volumetric expansion of the preliminary plasmon generator with heat by introducing light into the core of the waveguide of the preliminary head section; and polishing the surface to be polished of the preliminary head section into a medium facing surface. The preliminary plasmon generator has an end face located in the surface to be polished. In the step of polishing the surface to be polished, the surface to be polished is subjected to polishing with the preliminary plasmon generator expanded in volume, whereby the end face of the preliminary plasmon generator is polished into the front end face, and the preliminary plasmon generator thereby becomes the plasmon generator.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: March 24, 2015
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Koji Shimazawa, Yasutoshi Fujita, Tatsuya Shimizu
  • Patent number: 8844120
    Abstract: A method for providing a magnetic transducer including an underlayer is provided. The method comprises providing a recessed region in the underlayer. The recessed region includes a front having an angle from horizontal. The angle is greater than zero and less than ninety degrees. The method further comprises providing an assist pole layer in the recessed region, providing a main pole layer, a portion of the main pole layer residing on the assist pole layer, and defining a main pole from the assist pole layer and the main pole layer.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: September 30, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yong Shen, Zhigang Bai
  • Patent number: 8839504
    Abstract: A method in one approach includes forming a first layer of a nonmagnetic material over two sides of a structure, the first layer being substantially absent from above a top of the structure; depositing an overlayer of an etchable, nonmagnetic material over the first layer and the top of the structure; and etching the overlayer for substantially removing the overlayer from above the top of the structure, wherein a substantial portion of the overlayer remains along the two sides of the structure after the etching. Additional systems and methods are also presented.
    Type: Grant
    Filed: May 13, 2008
    Date of Patent: September 23, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Yi Zheng
  • Patent number: 8804283
    Abstract: A write pole can have a magnetically conductive pole tip has at least one corner. The at least one corner may be chamfered to limit magnetic saturation of the conductive pole tip. The conductive pole tip can have one or more beveled surface that has a chamfered corner which extends a predetermined distance along an edge of the write pole.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: August 12, 2014
    Assignee: Seagate Technology LLC
    Inventors: Eric Roger Meloche, Eric Linville, Jianhua Xue, Chris Rea, Huaqing Yin
  • Patent number: 8720044
    Abstract: A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: May 13, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai, Kevin K. Lin, Li He
  • Patent number: 8701274
    Abstract: A manner for stabilizing the shield domain structure is described that employs the magnetic field of a hard bias layer. More particularly, it has been found that the shield domain structure is stabilized when the height of the hard bias layer in the depth direction is made substantially half the height of upper shield layer. In another embodiment of the invention, a stabilizing structure is provided at approximately the midpoint of the shield in order to fix the closure domain of the shield to the desired two-domain structure. In an embodiment of the invention, the stabilizing structure is made convex or concave as viewed from the air-bearing surface.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 22, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Koji Kataoka, Takashi Wagatsuma
  • Patent number: 8689430
    Abstract: A method and system for providing a perpendicular magnetic recording (PMR) head are disclosed. A PMR pole having a bottom and a top wider than the bottom is provided. The PMR pole may be formed by depositing a PMR pole layer, then removing part of the PMR pole layer, leaving the PMR pole. The PMR pole may also be provided by forming a trench having the desired profile in a photoresist layer, depositing the PMR pole layer, then removing the photoresist layer, leaving the PMR pole in the location of the trench. A side gap is deposited over the PMR pole. A side shield is provided on the side gap. A planarization that removes part of the side shield on the PMR pole is performed. A top gap is provided on the PMR pole, substantially covering the entire PMR pole. A top shield is provided on the top gap.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: April 8, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yingjian Chen, Kyusik Sin
  • Patent number: 8671554
    Abstract: An example method for manufacturing a magneto-resistance effect element having a magnetic layer, a free magnetization layer, and a spacer layer includes forming a first metallic layer and forming, on the first metallic layer, a second metallic layer. A first conversion treatment is performed to convert the second metallic layer into a first insulating layer and to form a first metallic portion penetrating through the first insulating layer. A third metallic layer is formed on the first insulating layer and the first metallic portion. A second conversion treatment is performed to convert the third metallic layer into a second insulating layer and to form a second metallic portion penetrating through the second insulating layer.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: March 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideaki Fukuzawa, Hiromi Yuasa, Yoshihiko Fuji
  • Patent number: 8646168
    Abstract: A method for manufacturing a magnetic write pole of a magnetic write head for perpendicular magnetic recording. A magnetic write pole material is deposited, followed by union milling hard mask, a polymer mask under-layer followed by a dielectric hard mask material, followed by a photoresist. The photoresist is patterned to define a write pole shape and the shape of the patterned photoresist is transferred onto the underlying dielectric hard mask by a novel reactive ion etching that is performed in a chemistry that includes one or more fluorine containing gases and He. The presence of He in the reactive ion etching tool helps to improve the profile of the patterned dielectric hard mask. In addition, RIE parameters such a gas ratio (e.g. CF4 to CHF3 gas ratio) and power ratio (e.g. source power to bias power) are adjusted to optimize the profile of the patterned dielectric mask.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: February 11, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Guomin Mao, Sue Siyang Zhang, Yi Zheng
  • Patent number: 8615868
    Abstract: A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 31, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Yongchul Ahn, Xiaozhong Dang, Quang Le, Simon H. Liao
  • Patent number: 8607438
    Abstract: A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: December 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Wei Gao, Guanxiong Li, Ming Mao, Chih-Ching Hu, Guanghong Luo, Miao Wang, Zhihong Zhang, Anup G. Roy
  • Patent number: 8578593
    Abstract: A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: November 12, 2013
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Kosuke Tanaka, Shinji Hara, Tsutomu Chou, Yasutoshi Fujita
  • Patent number: 8495813
    Abstract: A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: July 30, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yufeng Hu, Jinshan Li
  • Patent number: 8458892
    Abstract: A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.
    Type: Grant
    Filed: May 11, 2010
    Date of Patent: June 11, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Weimin Si, Yun-Fei Li, Ying Hong
  • Patent number: 8453317
    Abstract: Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
    Type: Grant
    Filed: October 14, 2010
    Date of Patent: June 4, 2013
    Assignee: HGST Netherlands, B.V.
    Inventors: Donald Allen, Jennifer Ai-Ming Leung, Aron Pentek, Thomas Roucoux
  • Patent number: 8443510
    Abstract: A method for providing at least one transducer including magnetic structure and having an air-bearing surface (ABS) are described. The method includes providing a lapping electronic lapping guide (lapping ELG) and a targeting ELG. The lapping ELG and targeting ELG each are coplanar with the desired thickness of the magnetic structure and have a back edge at the distance from the ABS such that the ELG back edges are substantially aligned with the flare point. The targeting ELG has a front edge at a front edge distance from the ABS corresponding to an intersection of the bevel and the desired thickness. The method further includes lapping the transducer and terminating the lapping based on a first resistance of the lapping ELG and a second resistance of the targeting ELG.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: May 21, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Changqing Shi, Ming Jiang, Lijie Guan
  • Patent number: 8424192
    Abstract: A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: April 23, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Danning Yang, Lei Wang, Yingjian Chen, Brant Nease, Kyusik Sin
  • Patent number: 8418353
    Abstract: A method for providing energy assisted magnetic recording (EAMR) heads using a substrate are described. The substrate has front and back sides and apertures therein. The apertures are through-holes between the front and back sides of the substrate. The method includes providing a transmission medium in the apertures and fabricating EAMR transducers on the front side of the substrate. The EAMR transducers correspond to the apertures and the EAMR heads. The method also includes electrically insulating the back side of the substrate. The back side of the substrate is also prepared for mounting of the lasers. The lasers then are coupled the back side of the substrate. The lasers correspond to the EAMR heads and are configured to provide light through the apertures to the EAMR transducers. The method also includes separating the substrate into the EAMR heads.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: April 16, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Mark Moravec, Suwanchai Kongdum, Anucha Nontprasat
  • Patent number: 8407882
    Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: April 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota
  • Patent number: 8393074
    Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing a light source unit including a laser diode; providing a slider having a thermally-assisted magnetic recording head section thereon, the thermally-assisted magnetic recording head section including a magnetic pole, an optical waveguide, and a plasmon generator, the magnetic pole and the optical waveguide both extending toward an air bearing surface, the plasmon generator being located between the magnetic pole and the optical waveguide; driving the laser diode to allow a light beam to be emitted therefrom, the light beam including both a TE polarization component and a TM polarization component; performing an alignment between the light source unit and the thermally-assisted magnetic recording head section, based on a light intensity distribution of the TE polarization component in the light beam which has been emitted from the laser diode and then passed through the optical waveguide; and bonding the light source unit
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: March 12, 2013
    Assignees: TDK Corporation, Sae Magnetics (H.K) Ltd.
    Inventors: Seiichi Takayama, Koji Shimazawa, Shinji Hara, Yasuhiro Ito, Nobuyuki Mori, Ryo Hosoi, Kazuaki Takanuki, Youichi Ando, Chimoto Sugiyama
  • Patent number: 8393073
    Abstract: A method for constructing a magnetoresistive sensor that avoids shadowing effects of a mask structure during sensor definition. The method includes the use of an antireflective coating (ARC) and a photosensitive mask deposited there over. The photosensitive mask is formed to cover a desired sensor area, leaving non-sensor areas exposed. A reactive ion etch is performed to transfer the pattern of the photosensitive mask onto the underlying ARC layer. The reactive ion etch (RIE) is performed with a relatively high amount of platen power. The higher platen power increases ion bombardment of the wafer, thereby increasing the physical (ie mechanical) component of material removal relative to the chemical component. This increase in the physical component of material removal result in an increased rate of removal of the photosensitive mask material relative to the ion mill resistant mask.
    Type: Grant
    Filed: July 21, 2008
    Date of Patent: March 12, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Richard Jule Contreras, Michael Feldbaum, Mustafa Michael Pinarbasi
  • Patent number: 8375565
    Abstract: A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: February 19, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yufeng Hu, Zhongyan Wang, Jinshan Li
  • Patent number: 8371019
    Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: February 12, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Sue Siyang Zhang, Yi Zheng, Qiping Zhong, Honglin Zhu
  • Patent number: 8353098
    Abstract: A method of manufacturing a perpendicular magnetic recording head capable of easily and accurately forming a main magnetic-pole layer having a shape suitable for concentrating a magnetic flux is provided. A nonmagnetic layer having a recessed section (a first recessed section and a second recessed section) is formed, and then an additional nonmagnetic layer is formed on an inner surface of the recessed section. Then, a magnetic layer is formed in the recessed section formed with the additional nonmagnetic layer, and then the magnetic layer is cut to form an air bearing surface, so as to form the main magnetic-pole layer.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: January 15, 2013
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
  • Patent number: 8347489
    Abstract: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng, Honglin Zhu
  • Patent number: 8347487
    Abstract: A fabricating method of a magnetoresistance sensor is provided with cost effective and process flexibility features. Firstly, a substrate is provided. Then, at least one magnetoresistance structure and at least one bonding pad are formed over the substrate, wherein the bonding pad is electrically connected with the magnetoresistance structure. Then, a passivation layer is formed over the magnetoresistance structure and the bonding pad. Then, a magnetic shielding and concentrator structure is formed over the passivation layer at a location corresponding to the magnetoresistance structure. Finally, bonding pad openings is formed on the passivation layer by patterned polyimide, thereby exposing the bonding pad. After bonding pad was opened, the patterned polyimide can be removed or retained as an additional protection layer.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: January 8, 2013
    Assignee: Voltafield Technology Corporation
    Inventors: Fu-Tai Liou, Chih-Chien Liang, Chien-Min Lee
  • Patent number: 8347488
    Abstract: A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng