With Significant Slider/housing Shaping Or Treating Patents (Class 29/603.12)
  • Patent number: 7367112
    Abstract: A method is provided for fabricating a head for perpendicular recording with self-aligning side shields. The voids where the side shields will be formed are milled into the layer of material for the pole tip to achieve self-alignment. A mask is patterned with openings defining initial shape of the pole piece tip nearest the air-bearing surface including the width and the point at which the pole tip widens out. A film of soft magnetic material to form the side shields is deposited over the wafer. A chemical-mechanical-polishing process is preferably used to remove the mask and the material deposited on it. A new mask is patterned over the predetermined area for the final shape of the pole tip and the side shields. The excess side shield material and pole tip material outside of the mask is then removed.
    Type: Grant
    Filed: February 14, 2006
    Date of Patent: May 6, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: James L. Nix, Neil Leslie Robertson, Mason Lamar Williams
  • Patent number: 7367110
    Abstract: A method for fabricating a read head for a magnetic disk drive having a read head sensor and a hard bias layer, where the read head has a shaped junction between the read head sensor and the hard bias layer. The method includes providing a layered wafer stack to be shaped. A single- or multi-layered photoresist mask having no undercut is deposited upon the layered wafer stack to be shaped. The layered wafer stack is shaped by the output of a milling source, where the shaping includes partial milling to within a partial milling range to form a shaped junction. A hard bias layer is then deposited which is in contact with the shaped junction of the wafer stack.
    Type: Grant
    Filed: September 27, 2004
    Date of Patent: May 6, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Marie-Claire Cyrille, Wipul Pemsiri Jayasekara, Mustafa Michael Pinarbasi
  • Patent number: 7360298
    Abstract: A method for fabricating a magnetic head, including depositing a plurality of sensor layers, including a pinned magnetic layer, a spacer layer, a free magnetic layer, a bias spacer layer, and a bias layer, and thereafter removing outer portions of the spacer layer, the free magnetic layer, the bias spacer layer, and the bias layer. Inner electrical lead portions are deposited upon outer portions of the pinned magnetic layer, and a bias pinning layer is then deposited upon both the bias layer and the inner electrical lead portions. Outer electrical lead portions are thereafter deposited in electrical connection with the inner electrical lead portions. An alternative embodiment includes removing portions of the pinned magnetic layer prior to the deposition of the inner electrical lead portions.
    Type: Grant
    Filed: September 14, 2005
    Date of Patent: April 22, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventor: Hardayal Singh Gill
  • Patent number: 7360296
    Abstract: A process is described for fabricating sliders with reduced lapping damage to the hard-bias materials. The stack of layers for the magnetic sensor is deposited on a wafer and patterned into an initial shape. The hard-bias structures are fabricated at the side of the magnetic sensor as in the prior art. In each of the two described embodiments of the invention, the hard-bias material below the ABS is reduced or removed and replaced with a fill material such as alumina. A first embodiment reduces the hard-bias material below the ABS by forming an extended lapping gap along the ABS in both the sensor and hard-bias material. A second embodiment forms a photoresist mask over the sensor and the portion of the hard-bias/lead structures above the ABS and the exposed hard-bias/lead material below the ABS is thinned or completely removed by milling.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: April 22, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Marie-Claire Cyrille, Prakash Kasiraj, Huey-Ming Tzeng
  • Patent number: 7362544
    Abstract: A thermal flying height adjustment slider capable of being mounted on a small-sized thin film magnetic head slider is provided wherein terminals of an energizer serving as a heater prevent corrosion of pole pieces and the number of terminals is reduced. In one embodiment, one of terminals of the energizer serving as the heater is electrically connected to the lower pole piece, so that a relay terminal for a heating device is used also as the terminal for preventing the corrosion of pole pieces.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: April 22, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Toshiya Shiramatsu, Masayuki Kurita, Mikio Tokuyama, Hidekazu Kohira, Masahiko Soga
  • Publication number: 20080078077
    Abstract: A method for bonding slider row bars for photolithography process, includes steps of: providing a first carrier plate having a sticky surface; providing slider row bars each having a first surface for forming ABS and an opposite second surface, and securing each slider row bar to the first carrier plate with its first surface facing the sticky surface; providing an encapsulation glue and dispensing it to the second surfaces and gaps between the slider row bars; providing a second carrier plate and attaching it to the second surfaces through the encapsulation glue; irradiating the first carrier plate and the encapsulation glue with ultraviolet light such that the first carrier plate is removed from the slider row bars, and the encapsulation glue is cured to bond the slider row bars with the second carrier plate together.
    Type: Application
    Filed: October 2, 2006
    Publication date: April 3, 2008
    Applicant: SAE Magnetics (H.K.) Ltd.
    Inventors: TaiBoon Lee, YongPing Gao
  • Publication number: 20080072417
    Abstract: A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 27, 2008
    Inventors: Yimin Hsu, Vladimir Nikitin, Aron Pentek
  • Patent number: 7343665
    Abstract: The lower electrode is at least exposed at the surface of a substructure layer in a current-perpendicular-to-the-plane structure magnetoresistive element. A resist is formed to extend over the surface of the substructure layer. A patterning void is defined in the resist. The shape of the patterning void is designed to correspond to the contour of the magnetoresistive multilayered film. The magnetoresistive multilayered film is formed by deposition within the patterning void. This method enables avoidance of a dry etching process effected on the magnetoresistive multilayered film. Scrapings or waste of the magnetoresistive multilayered film are not generated at all. The side surfaces of the magnetoresistive multilayered film are completely prevented from attachment or adhesion of scrapings or waste. The side surfaces of the magnetoresistive multilayered film are kept stainless.
    Type: Grant
    Filed: October 28, 2002
    Date of Patent: March 18, 2008
    Assignee: Fujitsu Limited
    Inventors: Chikayoshi Kamata, Shin Eguchi, Atsushi Tanaka, Tooru Fukuya
  • Patent number: 7343664
    Abstract: A method for fabricating a magnetic head includes forming a first pole and a flux shaping layer in spaced relation to the first pole. A nonmagnetic layer is formed adjacent the flux shaping layer and positioned on an air bearing surface (ABS) side of the flux shaping layer. A tapered recess is created in the nonmagnetic layer, the taper of the recess increasing (i.e., becoming deeper) towards the flux forming layer. The recess is filled with a magnetic material. A probe layer is formed such that it is in electrical communication with the magnetic material filling the recess.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: March 18, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Gautam Khera, Sanford J. Lewis, Galina Moutchaidze, Aron Pentek, Hugo Alberto Emilio Santini, Mason Lamar Williams, III
  • Publication number: 20080052897
    Abstract: A method for bonding slider row bars for photolithography process, comprises steps of: (1) forming a holding device having a sticky surface; (2) providing a plurality of slider row bars each of which has a first surface for forming air bearing surface and a second surface opposite to the first surface, and securing the slider row bars on the holding device with their first surfaces facing to the sticky surface; (3) bonding the slider row bars together by an encapsulating glue; (4) providing a carrier and bonding the carrier to the second surfaces of the slider row bars; (5) removing the holding device. The invention also discloses a method for manufacturing sliders.
    Type: Application
    Filed: September 1, 2006
    Publication date: March 6, 2008
    Applicant: SAE Magnetics (H.K.) Ltd.
    Inventors: TaiBoon Lee, ZiAn Wang, YongPing Gao, ZhenHua Liu
  • Patent number: 7337530
    Abstract: A method of making a perpendicular magnetic recording head for use in a data storage device includes forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section. The first pole layer, second pole layer, third pole layer, and shield layer are formed without using a chemical mechanical polishing process. The method next includes concurrently trimming the shield layer and a write pole that is defined by the third pole layer to a predetermined track width. In the trimming step, the shield layer is used as a mask for the write pole.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: March 4, 2008
    Assignee: Western Digital (Fremont), LLC
    Inventors: Kroum S. Stoev, Francis H. Liu, Yugang Wang
  • Patent number: 7333306
    Abstract: A TMR sensor, a CPP GMR sensor and a CCP CPP GMR sensor all include a tri-layered free layer that is of the form CoFe/CoFeB/NiFe, where the atom percentage of Fe can vary between 5% and 90% and the atom percentage of B can vary between 5% and 30%. The sensors also include SyAP pinned layers which, in the case of the GMR sensors include at least one layer of CoFe laminated onto a thin layer of Cu. In the CCP CPP sensor, a layer of oxidized aluminum containing segregated particles of copper is formed between the spacer layer and the free layer. All three configurations exhibit extremely good values of coercivity, areal resistance, GMR ratio and magnetostriction.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: February 19, 2008
    Assignee: Headway Technologies, Inc.
    Inventors: Tong Zhao, Kunliang Zhang, Hui-Chuan Wang, Yu-Hsia Chen, Min Li
  • Patent number: 7330338
    Abstract: Apparatus and method for adjusting at least one of a pitch and roll parameter of a gimbal for a head suspension assembly having a pair of members contacting at least one gimbal arm at spaced apart locations and having an additional member contacting the gimbal arm intermediate the spaced apart locations and wherein the members move together to cause plastic deformation of the gimbal arm. A like apparatus and method may be used sequentially or concurrently on a second gimbal arm, and may have an inverted orientation with respect to the first apparatus.
    Type: Grant
    Filed: May 5, 2004
    Date of Patent: February 12, 2008
    Assignee: Hutchinson Technology Incorporated
    Inventors: Thomas H. Wick, Mark S. Hedeen, Jeremy J. Stroschein, John L. Schumann, Justin M. Eggert
  • Publication number: 20080022509
    Abstract: A method is provided to manufacture a thin-film magnetic head that includes an insulating layer having a swelling extending from the front end to the back end of the insulating layer and also includes a upper magnetic pole having an apex part, a narrow part located on the side close to the front end of the apex part, and a taper part broadened toward the back end of the upper magnetic pole. The method includes a step of forming the insulating layer; a step of forming a photosensitive resist layer on the insulating layer; a step of forming a first mask layer, having a first blanked region formed in the shape of the narrow part, on the photosensitive resist layer; and a step of forming a second mask layer, having a second blanked region formed in the shape of the taper part, on the photosensitive resist layer.
    Type: Application
    Filed: November 1, 2006
    Publication date: January 31, 2008
    Inventors: Makoto Sakai, Kotaro Yamazaki
  • Patent number: 7320170
    Abstract: Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the longitudinal bias and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.
    Type: Grant
    Filed: April 20, 2004
    Date of Patent: January 22, 2008
    Assignees: Headway Technologies, Inc., TDK Corporation
    Inventors: Stuart Kao, Chunping Luo, Chaopeng Chen, Takahiko Machita, Daisuke Miyauchi, Jei-Wei Chang
  • Publication number: 20080010811
    Abstract: Various embodiments of the present invention pertain to manufacturing pre-sliders by annealing to saturation. According to one embodiment, pre-sliders are lapped to prepare for air bearing surfaces for the pre-sliders. The pre-sliders are annealed to saturation to level off the amount of overcoat expansion for the pre-sliders.
    Type: Application
    Filed: July 14, 2006
    Publication date: January 17, 2008
    Inventors: Damaris Davis, Hardayal S. Gill, Kenneth D. Mackay, Xiao Z. Wu
  • Publication number: 20080005891
    Abstract: A method for manufacturing a magneto-resistance effect element includes: forming a fixed magnetization layer; forming a free magnetization layer; and forming a spacer layer with an insulating layer and a non-magnetic metallic path penetrating through the insulating layer, includes: forming a first non-magnetic metallic layer; forming, a metallic layer on a surface of the first non-magnetic metallic layer; irradiating, onto the metallic layer, ions or plasma including at least one of oxygen and nitrogen and at least one selected from the group consisting of Ar, Xe, He, Ne, kr so as to convert the metallic layer into the insulating layer and the non-magnetic metallic path containing the first non-magnetic metallic layer; forming a second non-magnetic metallic layer on the non-magnetic metallic path; and irradiating ions or plasma onto at least one of the fixed magnetization layer, the first metallic layer, the metallic layer, the insulating layer converted from the second metallic layer and the second non-magne
    Type: Application
    Filed: July 5, 2007
    Publication date: January 10, 2008
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiromi Yuasa, Hideaki Fukuzawa, Yoshihiko Fuji
  • Publication number: 20080000076
    Abstract: A method is presented for fabricating a write pole for a magnetic recording head, wherein a photoresist layer is formed on a wafer stack. A target P2 pole configuration is provided, and a photomask having a pattern is produced, and the pattern is transferred to the photoresist to create a patterned photoresist having at least one photoresist channel. A layer of photoresist channel shrinking film used to produce a reduced width photoresist channel in an expanded photoresist. A P2 pole tip is formed within the reduced width photoresist channel. The P2 pole tip is then compared to the target P2 pole configuration to identify distortions, which are then used to produce a distortion-corrected photomask. The distortion-corrected photomask is then used to produce a distortion-corrected expanded photoresist, which is then used to produce a distortion-corrected P2 pole tip.
    Type: Application
    Filed: June 29, 2006
    Publication date: January 3, 2008
    Inventors: Kim Y. Lee, Jyh-Shury Lo
  • Patent number: 7313856
    Abstract: A manufacturing method for a spin valve sensor with a thin antiferromagnetic (AFM) layer exchange coupled to a self-pinned antiparallel coupled bias layer in the lead overlap regions is provided. The spin valve sensor comprises forming a ferromagnetic bias layer antiparallel coupled to a free layer in first and second passive regions where first and second lead layers overlap the spin valve sensor layers and forming a thin AFM layer exchange coupled to the bias layer to provide a pinning field to the bias layer. A cap layer is deposited over the thin AFM layer.
    Type: Grant
    Filed: September 29, 2005
    Date of Patent: January 1, 2008
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Hardayal Singh Gill
  • Patent number: 7312952
    Abstract: A thin-film magnetic head for perpendicular magnetic recording includes a nonmagnetic conductive elevation layer disposed under a main magnetic pole layer. The nonmagnetic conductive elevation layer and the main magnetic pole layer forms a trapezoidal shape converging toward an auxiliary magnetic pole layer, viewed from a face opposing a recording medium. The thin-film magnetic head for perpendicular magnetic recording includes an auxiliary magnetic pole layer, the main magnetic pole layer, and a nonmagnetic insulating layer disposed therebetween at a surface facing the recording medium.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: December 25, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Kobayashi
  • Patent number: 7308753
    Abstract: A slider comprises a slider body and a head element. The slider body has an air bearing surface, an air inflow end and an air outflow end. The air bearing surface has: a first surface including two portions extending in a direction of air passage; a second surface including a portion disposed between the two portions of the first surface; and a third surface located closer to the air outflow end than the first surface is. The first surface and the second surface have such a difference in level that the second surface is located farther from a recording medium than the first surface is. The difference in level varies gradually so as to increase with decreasing distance from the air outflow end. A method of manufacturing the slider includes forming a slider material containing a portion to be the slider body and the head element, and processing the material so as to form the air bearing surface.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: December 18, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Takehiro Kamigama
  • Patent number: 7308751
    Abstract: A magnetic head has less variations in the resistance of a magneto-resistive device before and after the magnetic head is left in a high temperature environment so as to have higher stability of the characteristics of the magnetic head against a high temperature environment. A TMR device includes a tunnel barrier layer made of an oxide layer. A DLC film serving as a protection film and an underlying layer therefor are formed on an end face of the TMR device on an air bearing surface side. A layer made of an oxide of a metal or an oxide of a semiconductor is formed between the underlying layer and the end face of the tunnel barrier layer on the air bearing surface side to be in contact with the end face of the tunnel barrier layer.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: December 18, 2007
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Tetsuya Kuwashima, Kentaro Nagai
  • Publication number: 20070266549
    Abstract: An improved method for the manufacture of magnetoresistive multilayer sensors is disclosed. The method is particularly advantageous for the production of magnetic tunnel junction (MTJ) sensors, which can be damaged at the air bearing surface by conventional lapping and ion milling. The disclosed process protects the ABS of the magnetoresistive sensor by depositing a diamond like carbon layer which remains in place through ion milling. The DLC layer is removed by oxidation subsequent to the formation of the ABS.
    Type: Application
    Filed: May 16, 2006
    Publication date: November 22, 2007
    Inventors: Hardayal Singh Gill, Wipul Pemsiri Jayasekara, Huey-Ming Tzeng, Xiao Z. Wu
  • Patent number: 7293345
    Abstract: A invention provides a method of manufacturing a thin film magnetic head is provided, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4 or CHF3) or chlorine-based gas (Cl2 or BCl3), a magnetic pole formation space R1 is formed so as to have a uniform width in an upper insulating layer by and a magnetic pole formation space R2 is formed in the lower insulating layer so as to have a width gradually narrowed from width W1 to width W4 with distance from the magnetic pole formation space R1. After that, a plating film is grown in the magnetic pole formation spaces R1 and R2, thereby forming a main magnetic pole layer.
    Type: Grant
    Filed: November 26, 2004
    Date of Patent: November 13, 2007
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Naoto Matono, Tatsuya Harada, Shigeru Shoji
  • Patent number: 7293344
    Abstract: A process for achieving tighter reader and writer track width control is disclosed. The write gap layer is used as the plating seed on which the upper pole is electro-formed. This allows the write gap layer to then be deposited through a precisely controllable process such as sputtering. Since less material needs to be removed during pole trimming, a thinner layer of photoresist may be used, resulting in improved dimensional control.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: November 13, 2007
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng-Chyi Han, Laurie Lauchlan, Xiaomin Liu
  • Patent number: 7287314
    Abstract: A Chemical Mechanical Polish (CMP) process and slurry therefore slurry that is capable of removing NiFe, SiO2, Photoresist, Ta, alumina and Cu at substantially the same rate. The slurry is useful for obtaining a substantially planar surface of several materials while avoiding corrosion of Cu coil and NiFe structure.
    Type: Grant
    Filed: February 27, 2004
    Date of Patent: October 30, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Hung-Chin Guthrie, Ming Jiang, John Jaekoyun Yang
  • Patent number: 7287316
    Abstract: A lapping monitor element that is juxtaposed with a magnetic transducer element having a magnetoresistance effect film to determine the lapping position upon lapping the element height of the magnetic transducer element to a predetermined dimension. The lapping monitor element includes a resistance film to be resistance measured. The resistance film is a metal film of nonmagnetic transition metal or of alloy composed mainly of nonmagnetic transition metal, or a multilayered film where two or more such metal films are laid one upon another. The lapping monitor makes it possible to extremely stabilize the ELG sensor resistance measured values upon lapping as well as to provide a high accuracy MR height control.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: October 30, 2007
    Assignee: TDK Corporation
    Inventors: Noriaki Kasahara, Nozomu Hachisuka, Yasutoshi Fujita
  • Publication number: 20070226988
    Abstract: A method for forming micro-texture on ABS of a slider, includes steps of: positioning sliders arranged in arrays on a tray, each slider having a pole tip facing upward; loading the tray into a processing chamber, and evacuating the processing chamber to a preset pressure; introducing a mixture gas of inert gas and hydrocarbon gas into the processing chamber, and ionizing the mixture gas to produce ion beams; exposing the sliders to the ion beam for etching so as to form micro-texture with two-step structure on the ABS of the slider. The invention also discloses a method of manufacturing a slider having micro-texture.
    Type: Application
    Filed: March 23, 2007
    Publication date: October 4, 2007
    Applicant: SAE Magnetics (H.K.) Ltd.
    Inventors: HongXin Fang, HongTao Ma, Yu Ding, Heng Qiao, BaoHua Chen
  • Patent number: 7275311
    Abstract: An apparatus and system for precise lapping of recessed and protruding elements in a workpiece is disclosed. According to one embodiment, a system is provided having an air bearing surface with electrical components embedded therein to provide a desired surface dimension thereof. The described system embodiment comprises a non-abrasive lapping plate having a lapping surface with a plurality of grooves therein, a support structure for supporting a workpiece such that an air bearing surface thereof is exposed, and a non-abrasive liquid. When the non-abrasive liquid is dispensed between the air bearing surface and the lapping plate, the lapping plate contacts the air bearing surface such that the air bearing surface is lapped solely by the grooves in the lapping plate. The electrical components of the air bearing surface are lapped such that they are substantially uniform in dimension relative to the air bearing surface.
    Type: Grant
    Filed: May 27, 2005
    Date of Patent: October 2, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Yuri Markevitch, Mark C. McMaster, Yu-En Percy Chang
  • Patent number: 7275307
    Abstract: A method for making a magnetic head formed with a pair of magnetic core halves fitted to abut on each other having a nonmagnetic gap therebetween and having a slide contact plane for slide contact with a magnetic recording medium on which an end face of the nonmagnetic gap and the magnetic core halves. In the method, a nonmagnetic portion formed by filling a glass material is provided at an end portion of the slide contact plane other than the end face of the magnetic core halves on the slide contact plane.
    Type: Grant
    Filed: February 10, 2004
    Date of Patent: October 2, 2007
    Assignee: Sony Corporation
    Inventors: Akira Sugawara, Naoyuki Kaneyama, Akihiro Konno
  • Patent number: 7269889
    Abstract: As a protective film of an element and a slider in a magnetic head, a film is provided which is excellent in adhesiveness to a film forming surface and which shows sufficient corrosion-resistance property with a thinner thickness. To provided this film, according to the present invention, a DLC film as a protective film is formed onto an element portion end surface and a surface of a slider of a magnetic head core. A film deposition step is conducted plural times to obtain the DLC film with a predetermined thickness when the DLC film is formed using an electric discharge.
    Type: Grant
    Filed: September 10, 2002
    Date of Patent: September 18, 2007
    Assignee: TDK Corporation
    Inventors: Kunihiro Ueda, Kentaro Nagai, Hiroki Nakazawa
  • Patent number: 7271983
    Abstract: An exemplary magnetic head assembly for use with magnetic recording media is provided. In one example, a head includes a data island associated with at least one data transducer, the data island having a width along a direction of media transport and a radius of curvature. The magnetic head further includes a mini-outrigger placed adjacent to the data island and separated by a void, wherein a width of the mini-outrigger along the direction of media transport is less than the width of the data island. Additionally, in one example, the radius of curvature of the mini-outrigger is less than the radius of curvature of the data island. The wrap angle of magnetic storage tape to the data island may be less than 3 degrees. Further, the radius of curvature of the mini-outrigger may be less than one-half the radius of curvature of the data island.
    Type: Grant
    Filed: September 16, 2004
    Date of Patent: September 18, 2007
    Assignee: Quantum Corporation
    Inventor: George A. Saliba
  • Patent number: 7263762
    Abstract: A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: September 4, 2007
    Assignee: Hitachi Global Storage Technologies
    Inventors: Daniel Bedell, Jennifer A. Loo, Aron Pentek, Murali Ramasubramanian
  • Patent number: 7263763
    Abstract: A method is provided for planarization of structures which minimizes step heights, reduces process steps, improves cleanliness, and provides increased ease of debond. Structures are placed with working surfaces facing down onto an adhesive layer such that structures remain fixed during heating. A bi-layer encapsulating film is used to achieve planarization. A carrier is bi-laminated with a thermoplastic film layer followed by a chemically inert protective polymer film layer that can withstand etch and cleaning processes. The thermoplastic layer is laminated on top of the carrier; the polymer layer is laminated on top of the joined thermoplastic layer and carrier. The carrier with bi-layer film is then placed onto the backside of the structures to resist chemical attack from the front side during photostrip and enable planarization. When heat is applied, the bi-layer encapsulating film melts and pushes the polymer layer into the gaps between structures thereby achieving complete planarization.
    Type: Grant
    Filed: June 27, 2005
    Date of Patent: September 4, 2007
    Assignee: International Business Machines Corporation
    Inventors: Qing Dai, Jennifer Qing Lu, Dennis Richard McKean, Eun Row, Li Zheng
  • Patent number: 7260887
    Abstract: The lapping of a slider is controlled based on an amplitude of a readback signal which is produced from an externally applied magnetic field. A lapping plate is used to lap a slider which includes at least one magnetic head having a read sensor. During the lapping, a coil produces a magnetic field around the slider and processing circuitry monitors both a readback signal amplitude and a resistance of the read sensor. The lapping of the slider is terminated based on the monitoring both the readback signal amplitude and the resistance. Preferably, the lapping of the slider is terminated when the resistance is within a predetermined resistance range and the readback signal amplitude is above a predetermined minimum amplitude threshold or reaches its peak value. Asymmetry can also be measured in the described system, where the lapping process is terminated based on asymmetry as well as resistance and amplitude measurements.
    Type: Grant
    Filed: February 27, 2004
    Date of Patent: August 28, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Jacey Robert Beaucage, Linden J. Crawforth, Xiao Z. Wu
  • Patent number: 7256963
    Abstract: In one aspect, an exemplary method of manufacturing a magnetic head assembly is provided. In one example, the method includes forming islands in a magnetic head structure to define a pair of mini-outriggers adjacent a data island, where the data island is separated from each mini-outrigger by a void, and a width of the data island along a direction of tape transport is greater than a width of the mini-outrigger. The method further includes lapping the head structure to remove a portion of the mini-outrigger, thereby creating a wrap angle between the tape and the surface of the data island. In one example, the lapping process reduces the mini-outrigger height relative to the data island in an adaptive manner, where the final contour and height of the mini-outrigger is influenced by the data island surface, e.g., by the width, radius of curvature, and the like.
    Type: Grant
    Filed: September 16, 2004
    Date of Patent: August 14, 2007
    Assignee: Quantum Corporation
    Inventor: George A. Saliba
  • Patent number: 7255636
    Abstract: A hybrid burnishing head for processing of surfaces of hard disk media comprises a solid body including a first major surface and a second, opposed major surface comprising a burnishing surface including first and second surface portions, wherein the first surface portion is configured for providing air bearing stability and flyability of the head over the media surface, the second surface portion is configured for providing burnishing of a media surface, and the first and second surface portions are operatively decoupled for simultaneously providing optimized air bearing stability/flyability and burnishing aggressiveness for a particular application.
    Type: Grant
    Filed: June 16, 2005
    Date of Patent: August 14, 2007
    Assignee: Seagate Technology LLC
    Inventors: Yong Hu, Pranesh K. Swamy, Eric K. Dahlin, Hamid F. Ghazvini
  • Patent number: 7251878
    Abstract: A method and apparatus for defining leading edge taper of a write pole tip is disclosed. The fabrication process uses reactive ion etching to fabricate LET with tight control of the placement of LET's edge and to achieve higher angle for providing a higher effective write field at the pole tip while minimizing ATI for high-density perpendicular recording. The placement of a resist's edge is used to define the LET's edge and a CMP process is used to provide a planar surface for the fabrication of the write pole.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: August 7, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Quang Le, Jui-Lung Li, Yvette Chung Nga Winton, Sue Siyang Zhang, Yi Zheng
  • Publication number: 20070175018
    Abstract: A slider manufacturing method of the invention comprises: providing a row bar constructed by a plurality of slider bodies which has a surface for forming air bearing surface; forming a plurality of cutting lines on the surface for forming air bearing surface of the row bar; forming a stress absorption region adjacent to the cut line in a cutting region defined by two adjacent cutting lines; grinding the surface for forming air bearing surface of the row bar; and cutting the row bar along the cutting lines to form a plurality of individual sliders. When the row bar is cut by a cutter into a plurality of individual sliders along the cutting lines, stress generated in the cutting region adjacent to cutting lines during cutting process is partly or fully absorbed by the stress absorption region, thus no clear edge jumps will form at the edges of the ABS of the slider after cutting process, and the risks of disk surface scratching by slider also being eliminated.
    Type: Application
    Filed: January 26, 2007
    Publication date: August 2, 2007
    Applicant: SAE Magnetics (H.K) Ltd.
    Inventors: ZhiHua Tan, QuanBao Wang, YanZeng Ma
  • Patent number: 7249407
    Abstract: A method of manufacturing a magnetic head is provided which can improve controlling a thickness of a gap layer. A coil base layer having at least a surface layer formed of one or two or more alloys selected from Au, Ru, and Rh is formed on a contact layer. Thereby, since a surface of the coil base layer is not oxidized due to air exposure, the contact layer is not oxidized. As such, the coil base layer protects the contact layer, so that it is not necessary to perform an etching process for removing an oxide layer, as in the related art. Therefore, it is possible to further improve controlling a thickness of a gap layer without cutting the gap layer by the etching process, as compared with the related art.
    Type: Grant
    Filed: February 1, 2006
    Date of Patent: July 31, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Kiyoshi Kobayashi
  • Patent number: 7243411
    Abstract: A method for protecting a write head coil during write pole notching using ion mill resistant mask formed by reactive ion etching is disclosed. Ion mill shaping of the write pole is performed after depositing an ion mill-resistant material to protect the coil.
    Type: Grant
    Filed: January 18, 2005
    Date of Patent: July 17, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: David P. Druist, Aron Pentek
  • Patent number: 7240418
    Abstract: A slider includes a slider main body and a thin-film magnetic head element. The slider main body has an air bearing surface, an air inflow end, and an air outflow end. The air bearing surface has a first part closer to the air outflow end, a second part closer to the air inflow end, and a border part between the first part and the second part. The second part is slanted against the first part so that the entire air bearing surface has a convex shape bent at the border part.
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: July 10, 2007
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Takehiro Kamigama
  • Patent number: 7237323
    Abstract: A method of making a magnetic head having an air bearing surface (ABS) composed of a flat and smooth worked surface and having a reduced step produced between a rail portion on the ABS and an element portion. Steps of the method include forming an electromagnetic transducing element including an insulating layer on a board, and then removing only a specific plane of the board opposed to a magnetic recording medium up to a first predetermined depth. Forming an insulating film composed of the same material as that of the element insulating layer on the surface of the board after the removal. Polishing the surface of the element portion and then the insulating film is polished by a chemical mechanical polishing method till the element is exposed. Then forming a recessed portion having a second predetermined depth on the insulating film.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: July 3, 2007
    Assignee: TDK Corporation
    Inventor: Shunichi Katase
  • Patent number: 7238292
    Abstract: A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: July 3, 2007
    Assignee: Western Digital (Fremont), Inc.
    Inventors: Li He, Ming Zhao, Yining Hu
  • Patent number: 7231705
    Abstract: A pattern forming method includes forming a resist pattern for lift off of a first film disposed on a surface side of a base, patterning the first film by dry etching using the resist pattern as a mask, depositing a second film after patterning, removing the resist pattern to remove a portion of the second film on the resist pattern, and etching the surface side of the base after removing the resist pattern. The etching includes dry-etching the surface side of the base using etching particles with a main incident angle of the etching particles to the surface side of the base being set in a range of 60° to 90° relative to a normal direction of the one surface of the base. The dry etching is performed while rotating the base about an axis substantially parallel with the normal direction.
    Type: Grant
    Filed: February 9, 2004
    Date of Patent: June 19, 2007
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Kazuki Sato
  • Patent number: 7228619
    Abstract: A method for fabricating a coil and pedestal for a write head using a common seed layer is described. A nonmetallic gap layer is deposited on a planarized pole piece surface. Openings for the pole piece pedestal and the back gap pole piece are etched through the nonmetallic gap layer. A seed layer comprising a magnetic material is deposited on the etched gap layer. Preferably the coil is fabricated first on the planar surface of the seed layer. The coil structure, the pedestal pole piece, back-gap pole piece, side and center tap connections are fabricated on the same seed layer. The remaining seed layer is removed, the coil is encapsulated, the wafer is refilled with alumina and the wafer is planarized. The prior art process can be resumed at this point. Optionally a second seed layer such as copper (Cu) can be used.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: June 12, 2007
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Quang Le
  • Patent number: 7225527
    Abstract: When a magnetic tape material is slit into a plurality of magnetic tapes, projections are formed in edge portions of side surfaces of the magnetic tapes. The projections are removed by pressing cutting tools against the edge portions of the side surfaces of the magnetic tape while transporting the magnetic tape. Thus, product quality of the magnetic tape is improved.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: June 5, 2007
    Assignee: Fujifilm Corporation
    Inventors: Nobuyuki Kobayashi, Masanori Yamamoto
  • Patent number: 7219414
    Abstract: A main pole layer of a magnetic head includes a first portion disposed at a distance from a medium facing surface, and a second portion that is smaller in thickness than the first portion and disposed between the first portion and the medium facing surface. The step of forming the main pole layer includes the steps of forming a plating layer such that one of ends of the plating layer closer to the medium facing surface is located at a position that coincides with the position of one of ends of the first portion closer to the medium facing surface; forming a first nonmagnetic layer to cover the plating layer; polishing the first nonmagnetic layer and the plating layer; forming a space by removing the plating layer; forming a magnetic layer, which will be the main pole layer, in the space and on the top surface of the first nonmagnetic layer; forming a second nonmagnetic layer to cover the magnetic layer; and polishing the second nonmagnetic layer and the magnetic layer.
    Type: Grant
    Filed: January 25, 2005
    Date of Patent: May 22, 2007
    Assignee: TDK Corporation
    Inventors: Yuichi Watabe, Susumu Aoki, Yasuyuki Notsuke, Tetsuya Roppongi
  • Patent number: 7219413
    Abstract: A method for adjusting static attitude of a head suspension is provided that includes providing an adjustment pin and adjusting the static attitude of a supported head suspension by contacting the head suspension with the adjustment pin to cause a predetermined attitude change in the head suspension. Once adjusted, the head suspension is exposed to heat for a predetermined period of time. The adjustment pin is manipulated, such as by pivoting, translation or both, about the head slider mounting region to cause angular reorientation of the region prior to exposure to the heat. Measurement of the static attitude of the head suspension may be performed before adjusting, after adjusting or both. A static attitude adjustment system is also provided including a manipulatable adjustment pin to be placed in contact with the head suspension and a heat source configured to expose the suspension to heat.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: May 22, 2007
    Assignee: Hutchinson Technology Incorporated
    Inventor: Larry M. Kinzer
  • Patent number: 7221546
    Abstract: A longitudinal bias magnetic field control layer applies a counter bias magnetic field to a soft magnetic layer that is antiparallel (in opposite direction) to a longitudinal bias magnetic field. A magnitude of the counter bias magnetic field applied to the soft magnetic layer by the longitudinal bias magnetic field control layer is set smaller than that of the longitudinal bias magnetic field at a track center portion of the soft magnetic layer applied by a pair of bias magnetic field applying layers. A substantial longitudinal bias magnetic field is substantially applied to the soft magnetic layer in the same direction as that of the longitudinal bias magnetic field, and a magnitude of the substantial longitudinal bias magnetic field is maximum at both end portions of the soft magnetic layer and is weakened at the center portion of the soft magnetic layer.
    Type: Grant
    Filed: April 28, 2004
    Date of Patent: May 22, 2007
    Assignee: TDK Corporation
    Inventors: Koichi Terunuma, Koji Shimazawa, Yoshihiro Tsuchiya